An analysis system for vacuum coating machine

Abstract

This invention discloses an analysis system for a vacuum coating machine, comprising a data acquisition module for collecting various required data, a database pan-tilt unit for storing various reference data, a status judgment module, a safety and stability analysis module, and a quality stability analysis module. The status judgment module is used to determine the operating status of the vacuum coating machine and detect equipment anomalies. The safety and stability analysis module is used to determine whether there are any safety and stability hazards in the equipment. This invention processes and analyzes the collected equipment-related data and calculates a safety and stability coefficient θ using a formula model, which can be used to determine whether there are any safety and stability hazards. AQ The cleaning parameter σ is used to determine the cleanliness of the coating chamber, and the quality influence parameter φ is used to determine the impact of the current state on the coating effect, thereby intuitively discovering whether the equipment is operating stably and safely.

Description

Technical Field

[0001] The invention relates to an equipment mode environment analysis system, in particular to an analysis system for a vacuum coating machine. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a high vacuum degree. There are many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. The main idea is to divide it into evaporation and sputtering. The main function of the vacuum coating machine equipment mode environmental analysis system is to monitor and control the working environment and process of the coating machine to ensure the coating quality and stable operation of the equipment.

[0003] When the vacuum coating machine in the prior art is in use, only some directly measured parameters are provided for the staff to make reference judgments when using it, such as pressure value, temperature value, operating power and cleanliness displayed by the cleaning pointer, etc. When receiving these parameters, the staff can only roughly judge the current operating status of the equipment, and it is difficult to further analyze them to judge the stability of the equipment operation process. In addition, there are many data that need to be manually observed, such as whether the equipment interface is accurately and firmly connected, whether the loading seat in the coating chamber is firmly installed, whether the safety pin is correctly inserted, and the actual cleanliness of the coating chamber. This will take up a lot of time when the vacuum coating machine is actually used. Therefore, a vacuum coating machine analysis system is needed to facilitate the staff to intuitively and quickly judge the stability and safety of the vacuum coating machine during use, so as to improve the efficiency of the vacuum coating machine during use.

[0004] In order to solve the above defects, a technical solution is now provided. Summary of the invention

[0005] The purpose of the present invention is to propose an analysis system for a vacuum coating machine in order to solve the problem that when using an existing vacuum coating machine, it is only possible to roughly judge the current operating status of the equipment, and it is difficult to further analyze it to determine the stability of the equipment operation process, and many data need to be obtained by manual observation.

[0006] The purpose of the present invention can be achieved through the following technical solutions: An analysis system for a vacuum coating machine includes a data acquisition module for collecting various required data and a database pan / tilt for storing various reference data, and also includes a state judgment module and a safety and stability analysis module:

[0007] The state judgment module is used to receive various collected apparent image data, including apparent images of key points inside and outside the vacuum coating machine, compare the apparent images of each point with the reference high-definition image data in the database pan / tilt, judge the operating state of the vacuum coating machine and find out equipment abnormalities;

[0008] The safety and stability analysis module receives the safety reference data collected by the data collection module, and the safety reference data includes the map positioning data collected regularly, the internal temperature K i 、Input voltage U i , internal absolute pressure P i And the number of nearby security guards PN i , where i represents the serial number of the recording time, i∈[1,n], i∈N + , n is the total number of recorded moments, N + Represents a positive integer; sets the internal temperature K i 、Input voltage U i The normal ranges are R K , R U , for those that do not belong to the normal interval R K , R U K i , U i Count and sum to get the number of temperature and pressure anomalies Ct′, and then collect the internal temperature K i 、Input voltage U i Count and sum the total number of temperature and pressure to get the total number Ct, substitute it into the formula Get the temperature and pressure difference

[0009] The database PTZ is also used to store the local atmospheric pressure value P corresponding to each positioning data. JW , substitute into the formula to calculate the vacuum degree P' of the vacuum coating machine i , Set a safety threshold Substitute the formula to calculate the vacuum anomaly value Where JW represents the local longitude and latitude;

[0010] Label each safety officer as Ad p , where p = 1, 2, 3...PN i , PN i is the number of security guards, and calculates Ad for each security guard p Distance from vacuum coating machine S p , set the factory area range limit value S', substitute into the formula Calculate the individual distance difference, and further filter to get the negative distance set and positive distance set Where S″ is the maximum distance reference value, substitute the elements in the negative distance set and the positive distance set into the formula Calculate the safety officer influence parameters

[0011] Substitute the safety officer's influencing parameters, vacuum anomalies, and temperature and pressure anomalies into the model Calculate the safety stability factor θ AQ , where λ1, λ2, and λ3 are all set coefficients; a safety and stability coefficient threshold is set in advance θ AQ and For comparison, when When , a good signal of safety and stability is generated; when When , a safety stability abnormality signal is generated;

[0012] There are two sets of reference values, namely and collection Both sets of reference value sets are stored in the database cloud platform, where the data in set A are used for safety and stability analysis during operation, and the parameters in set B are used for safety and stability analysis during shutdown. Corresponding calls are made based on the operating status and stop status instructions output by the status judgment module.

[0013] As a preferred embodiment of the present invention, it also includes a quality stability analysis module, and the quality stability analysis module includes a pre-transportation quality stability analysis unit;

[0014] The pre-transport quality and stability analysis unit is used to obtain cleaning coefficient related data, where the cleaning coefficient related data includes the rotation angle of the cleaning pointer, the suspended particle concentration value, humidity value, temperature value inside the coating room, and the high-definition image and usage time inside the coating room. The rotation angle of the cleaning pointer is recorded as α, and three adjacent angle intervals are set, respectively. Set the corresponding explicit coefficient ρ α , when α is in the interval When the output is α =1, and generates a signal that there are more pollutants in the coating room. When α is in the interval When the output is α = 2, and generates a general signal of cleanliness. When α is in the interval When the output is α =3, and a good cleanliness signal is generated;

[0015] The concentration values ​​of PM2.5 and PM10 in the suspended particle concentration values ​​are normalized and their values ​​are taken, which are denoted as H 2.5 and H 10 , substitute into the formula The suspended particle influence coefficient ρ is calculated H , where λ4 is the set coefficient;

[0016] The collected temperature and humidity values ​​inside the vacuum coating machine are normalized and their values ​​are taken, which are marked as μK , μ RH , substitute into the formula The water vapor influence coefficient ρ is calculated W ;

[0017] The collected high-definition image set is marked as PT. The database PT also stores the internal high-definition image set of the coating room when it leaves the factory. The two sets of high-definition image sets are compared, and the diameter range is greater than the threshold The difference blocks are counted to obtain the total number of stains WD. The usage time is calculated in days. If it is less than one day, it will be calculated as one day. The value is recorded as T. The total number of stains WD and the usage time T are substituted into the formula Calculate the actual stain influence coefficient ρ WD , where λ5 and λ6 are set coefficients;

[0018] Substitute the apparent coefficient, suspended particle influence coefficient, water vapor influence coefficient, and actual stain influence coefficient into the mathematical model The cleaning parameter σ inside the coating chamber of the vacuum coating machine is calculated.

[0019] As a preferred embodiment of the present invention, the quality stability analysis module also includes an in-transit quality stability analysis unit, which is used to receive quality influencing factor data when the vacuum coating machine is running, wherein the quality influencing factor data includes the vacuum degree, gas flow rate, argon concentration and power of the vacuum coating machine collected regularly in the coating chamber; the vacuum degree, gas flow rate, argon concentration and power of the vacuum coating machine in the coating chamber are normalized to obtain their values, and are recorded as P′ in order of recording time. ij , QT j ,Ar j and P j , where j = 1, 2, 3...n, n is the total number of records, substitute into the mathematical model Calculate the quality influencing parameters , where δ1, δ2, k1, k2, and k3 are all set constant factors.

[0020] As a preferred implementation of the present invention, the preferred terminal further includes:

[0021] The preferred terminal receives the data collection module to collect the reference information of the current online safety officers, and labels each safety officer as Ad x , x = 1, 2, 3...m, m is the total number of online safety officers, and the safety officer reference information includes the length of time T of online safety officers x , the current operating time of the vacuum coating machine equipment The number of times the online security officer executes the command N x, the distance between the online safety officer and the vacuum coating machine L x ;

[0022] Assume that the equipment operation time of the online security officer is t x , the current operating time of the vacuum coating machine equipment and the length of time each safety officer has been on the job T x Substitute into the formula Calculate the equipment operation time t of each online security officer x ;

[0023] Set the device operation time t x , the number of times the online security officer executes the instruction N x , the distance between the online safety officer and the vacuum coating machine L x Substitute into the formula The instruction execution optimization parameter ε of each online safety officer is calculated, where ω1, ω2, and ω3 are weight factors of the equipment operation time, the number of times the online safety officer executes instructions, and the distance between the online safety officer and the vacuum coating machine, respectively. The safety officers are sorted according to the instruction execution optimization parameters corresponding to each online safety officer, and the instructions generated by the system are sent to the top three online safety officers with the instruction execution optimization parameters.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] 1. The present invention compares each high-definition image with the pre-stored image in the database pan / tilt, and sends the abnormal signal of the high-definition image number different from the comparison image to the receiving terminal of the staff through the database pan / tilt, reminding the staff that there is an abnormality at the key point, and then start or stop after inspection and adjustment; it solves the problem in the prior art that the staff needs to go around the equipment to manually check each point that needs to be observed on the equipment before starting and stopping operations. Compared with the prior art, it is more convenient and quicker, and at the same time reduces the occurrence of misjudgment and misoperation due to manual inspection.

[0026] 2. The present invention analyzes the safety reference data through the safety and stability analysis module to obtain the safety personnel influence parameters, vacuum abnormal values, temperature and pressure abnormal values, and calculates the safety and stability coefficient based on this, makes a judgment on it, generates a safety and stability abnormal signal, and sends an early warning to the receiving terminal of the staff through the database pan / tilt station, so as to further analyze and judge the safety and stability of the equipment operation process;

[0027] 3. The present invention analyzes the cleaning coefficient related data through the quality stability analysis module to obtain the cleaning parameters inside the coating chamber of the vacuum coating machine, so as to remind timely cleaning to avoid the lower the cleanliness in the coating chamber, which is more unfavorable to the coating effect; the quality influencing factor data is analyzed to obtain the quality influencing parameters for judging the coating effect during operation, and then the quality of the coated finished product is judged. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0029] Figure 1 It is a principle block diagram of the present invention. DETAILED DESCRIPTION

[0030] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] Embodiment 1:

[0032] See also Figure 1 As shown, an analysis system for a vacuum coating machine includes a data acquisition module for collecting various required data, a database pan / tilt for storing various reference data, a state judgment module, and a safety and stability analysis module.

[0033] It should be noted that the data acquisition module is used to collect data required by various modules and units, including various surface image data required by the state judgment module and various safety reference data required by the safety and stability analysis module.

[0034] The state judgment module is used to receive the collected various surface image data, including the surface images of the key points inside and outside the vacuum coating machine, and compare the surface images of each point with the data received in the database pan / tilt to judge the operating state of the vacuum coating machine and find out the abnormality of the equipment. The specific steps are as follows:

[0035] The external locking mechanism of the vacuum coating machine, the mainframe IO backplane wiring port, the internal coating chamber stainless steel latch, the coating component mounting seat and other parts that need to be manually visually inspected before operation are marked as key points, and the start button is marked as a key point. The high-definition camera in the data acquisition module collects high-definition images of each key point, and the high-definition images of each key point are marked and recorded as DW respectively. g , g = 1, 2, 3 ... j, j is the total number of key points, each high-definition image DWg Each corresponds to a key point, and the key point can be quickly distinguished by the label. Among them, DW1 specifically refers to the high-definition image of the start button.

[0036] It should be noted that the high-definition image collected for the coated part mounting seat does not include the coated part. Only the image of the coated part mounting seat excluding the coated part is collected, and the collected image can significantly determine whether a coated part is installed on the coated part mounting seat, so that no matter what the type of coated part is, it will not affect the image of the coated part mounting seat when it is loaded or unloaded.

[0037] Each HD image DW g Compare with the pre-stored images in the database PTZ. The pre-stored images in the database PTZ are divided into two groups: DW g ′=(DW1′,DW2′,DW3′......DW j ′) and DW g ″=(DW1″,DW2″,DW3″…DW j ″), which are normal high-definition image comparison diagrams of key points in the running state and the stopped state, respectively. DW1, DW′1 and DW1″ are compared first. When DW1 is the same as DW′1, the vacuum coating machine is marked as running and the equipment start command is sent to the host. At the same time, DW g With DW g 'One by one comparison, when each DW g With DW g ′ are the same, a normal signal of the key point of the equipment is generated; when there is DW g With DW g ′ is different, stop sending the equipment startup command, generate an abnormal signal of the key point of the equipment, and mark the high-definition image that is different from the comparison image with DW g The abnormal signal is sent to the staff's receiving terminal through the database pan / tilt station, reminding the staff that there is an abnormality at the key point and they can start again after checking and adjusting.

[0038] When DW1 is the same as DW1″, the vacuum coating machine is marked as stopped and the equipment stop command is sent to the host. g With DW g ″One by one comparison, when each DW g With DW g ″ are the same, a normal signal of the key point of the equipment is generated; when there is DW g With DW g If they are different, stop sending the equipment stop command, generate an abnormal signal of the key point of the equipment, and label the high-definition image that is different from the comparison image with DW. gThe abnormal signal is sent to the receiving terminal of the staff through the database pan / tilt, reminding the staff who are operating that there is an abnormality at the key point, and then stop after inspection and adjustment. This solves the problem in the existing technology that the staff needs to go around the equipment to manually check each point that needs to be observed before starting and stopping the operation. Compared with the existing technology, it is more convenient and faster, and at the same time reduces the occurrence of misjudgment and misoperation due to manual inspection.

[0039] The safety and stability analysis module receives the safety reference data collected by the data collection module, and the safety reference data includes the map positioning data collected regularly, the internal temperature K i 、Input voltage U i , internal absolute pressure P i And the number of nearby security guards PN i , where i represents the serial number of the recording time, i∈[1,n], i∈N + , n is the total number of recorded moments, N + Represents a positive integer, and processes and analyzes the collected safety reference data to obtain a safety stability coefficient used to determine whether the equipment has safety and stability risks. The specific processing and analysis process is as follows:

[0040] Set internal temperature K i 、Input voltage U i The normal ranges are R K , R U , for those not in the normal range R K , R U K i , U i Count and sum the number of temperature and pressure anomalies Ct′, and then calculate the internal temperature K i 、Input voltage U i Count and sum the total number to get the total temperature and pressure Ct, and substitute it into the formula to get the temperature and pressure difference

[0041] The map positioning data includes the current latitude and longitude of the vacuum coating machine. The location of the vacuum coating machine can be accurately located according to the latitude and longitude. The database PTZ stores the local atmospheric pressure value P corresponding to each positioning data. JW , JW represents the local longitude and latitude, substitute it into the formula to calculate the vacuum degree P of the vacuum coating machine i ′, Set a safety threshold Substitution Calculate the vacuum value

[0042] Label each safety officer as Ad p , where p = 1, 2, 3... PNi , PN i is the number of security guards. Calculate the Ad p Distance from vacuum coating machine S p , set the factory range limit value S', S' is set by the staff according to the range of the factory where the vacuum coating machine is located during the specific implementation. Substitute the formula to calculate the individual distance difference Further filtering to obtain negative distance collection and positive distance set Where S″ is the maximum distance reference value, which represents the maximum threshold for the distance input reference between the employee and the factory building. Substitute the negative distance set and the positive distance set into the formula to calculate the safety officer influence parameter Where exp represents an exponential function with the natural constant e as the base.

[0043] Safety officer influence parameters Vacuum value Temperature and pressure difference Substitute the preset model and calculate the safety stability coefficient θ AQ , Among them, λ1, λ2, and λ3 are all set coefficients, which are set by the staff according to the specific implementation. Set a safety and stability coefficient threshold θ AQ and For comparison, when When , a good signal of safety and stability is generated; when When a safety and stability abnormality signal is generated, an early warning is sent to the receiving terminal of the staff through the database cloud platform. The staff will make specific settings based on the specific implementation.

[0044] It should be noted that due to the differences in normal voltage, normal temperature, internal absolute pressure and other parameters of the vacuum coating machine when it is actually running and stopped, two groups of reference values ​​and reference intervals are set for each of the above processing and analysis processes, namely, set and collection All are stored in the database cloud platform for use. The data in set A are used for safety and stability analysis during operation, and the parameters in set B are used for safety and stability analysis during shutdown. One is selected according to the actual operating state of the vacuum coating machine, and the selection of the data set is called accordingly according to the operating state and stop state instructions output by the state judgment module.

[0045] Embodiment 2:

[0046] Based on the analysis system for a vacuum coating machine in Example 1, in actual use, it is necessary not only to analyze and evaluate the safety of the vacuum coating machine, but also to analyze the parameters that affect the quality of the processed products, so as to facilitate the staff to judge the operating effect of the equipment. Compared with Example 1, the improvement is that it also includes a quality stability analysis module, and the quality stability analysis module includes a pre-operation quality stability analysis unit and an in-operation quality stability analysis unit. The pre-operation quality stability analysis unit analyzes and processes the data that affects the quality stability before the operation of the vacuum coating machine, so as to obtain a coefficient for judging the influence of the current equipment environment on the coating effect; the in-operation quality stability analysis unit analyzes and processes the data that affects the quality stability when the vacuum coating machine is running, so as to obtain a coefficient for judging the influence of the current equipment environment on the coating effect.

[0047] The data acquisition module collects various cleaning factor-related data required by the pre-transport quality and stability analysis unit; and various quality influencing factor data required by the in-transport quality and stability analysis unit. The pre-transport quality and stability analysis unit obtains cleaning factor-related data, which includes the rotation angle of the cleaning pointer, the suspended particle concentration value, humidity value, temperature value and high-definition image of the coating room and the use time. The various digital information and image information received from the data acquisition module are processed and analyzed to determine whether the cleanliness of the coating room meets the coating requirements. The specific processing and analysis steps are as follows:

[0048] The rotation angle of the cleaning pointer is recorded as α, and the apparent coefficient ρ is set α , set three adjacent angle intervals, respectively And the corresponding explicit coefficient ρ α When α is in the interval When the output is α =1, and generate a signal that there are many pollutants in the coating room, and send the signal to the receiving end of the staff through the database pan / tilt to remind the staff to clean; when α is in the interval When the output is α =2, and generate a general cleanliness signal, which is sent to the receiving end of the staff through the database pan / tilt, reminding the staff to further observe the cleanliness of the coating room to determine whether to clean it; when α is in the interval When the output is α =3, and generate a good cleanliness signal, and send the good cleanliness signal to the receiving end of the staff through the database pan / tilt station.

[0049] In a specific embodiment, That is, if the cleaning pointer rotates by an angle of 30°>α≥0°, the output ρ α=1, and generates a poor cleanliness signal; if the cleaning pointer rotates by an angle of 60°>α≥30°, then the output is ρ α =2, and generates a general cleanliness signal; if the cleaning pointer rotates by an angle of 90°≥α≥60°, then the output is ρ α =3, and a good cleanliness signal is generated.

[0050] The concentration values ​​of PM2.5 and PM10 in the suspended particle concentration values ​​are normalized and their values ​​are taken, which are denoted as H 2.5 and H 10 , substitute into the formula to calculate the suspended particle influence coefficient ρ H , Wherein λ4 is a preset coefficient, which is set by the staff according to the specific implementation example.

[0051] The collected temperature and humidity values ​​inside the vacuum coating machine are normalized and their values ​​are taken, which are marked as μ K , μ RH , substitute into the formula to calculate the water vapor influence coefficient ρ W ,

[0052] The internal high-definition images of the coating room are captured by multiple evenly distributed high-definition cameras. The collected high-definition image set is marked as PT, and the internal high-definition image set of the coating room when it leaves the factory is stored in the database PTZ. The two sets of high-definition image sets are compared, and the diameter range is greater than the threshold The total number of stains WD is obtained by counting the difference blocks. The usage time is calculated in days. If it is less than one day, it will be calculated as one day. The value is recorded as T. The total number of stains WD and the usage time T are substituted into the formula to calculate the actual stain impact coefficient ρ WD , Among them, λ5 and λ6 are both preset coefficients, which are set by the staff according to the specific implementation example.

[0053] The explicit coefficient ρ α , suspended particle influence coefficient ρ H , Water vapor influence coefficient ρ W , actual stain influence coefficient ρ WD Substituting into the mathematical model, The cleaning parameter σ inside the coating chamber of the vacuum coating machine is calculated. The higher the cleaning parameter, the higher the cleanliness of the coating chamber. On the other hand, the lower the cleaning parameter, the lower the cleanliness of the coating chamber, which is less conducive to the coating effect.

[0054] When the vacuum coating machine is running, the Yunzhong quality and stability analysis unit receives the quality influencing factor data collected by the data acquisition module. The quality influencing factor data includes the vacuum degree, gas flow, argon concentration and power of the vacuum coating machine collected regularly in the coating chamber. The data is analyzed and processed to obtain the quality influencing parameters used to judge the coating effect during operation. The specific analysis and processing process is as follows:

[0055] The vacuum degree, gas flow rate, argon concentration and power of the vacuum coating machine in the coating chamber are normalized and their values ​​are recorded in order of recording time as P ij ′, QT j ,Ar j and P j , where j = 1, 2, 3...n, n is the total number of records. Substitute into the mathematical model Calculate the quality influencing parameters , where δ1, δ2, k1, k2, and k3 are all set constant factors, and the specific values ​​are set by the staff according to the specific implementation method. The larger the quality influence parameter φ is, the greater the influence of various data in the coating room on the coating effect is, and the worse the quality of the finished coating product is. On the contrary, if the quality influence parameter φ is smaller, the quality of the finished coating product will be better.

[0056] Embodiment three:

[0057] Based on the analysis system for a vacuum coating machine provided in Example 2, there is a lack of screening of instructions and signal output objects in actual use, so that when executing various signals generated by the entire analysis system, the selection of objects for executing instructions is often not intelligent enough, resulting in deviations in the effect of executing instructions, affecting the stability of the overall operation of the system, and therefore further improvement is needed. Compared with Example 2, the improvement is that it also includes an execution preferred terminal.

[0058] The data collection module collects the reference information of each safety officer needed by the execution optimization terminal. The execution optimization terminal receives the data collection module to collect the reference information of the current online safety officers, and labels each safety officer, which is recorded as Ad x , x = 1, 2, 3...m, m is the total number of online security officers. The security officer reference information includes the length of time T that the online security officer has been employed x , the current operating time of the vacuum coating machine equipment The number of times the online security officer executes the command N x , the distance between the online safety officer and the vacuum coating machine L x .

[0059] Assume that the equipment operation time of the online security officer is t x , the current operating time of the vacuum coating machine equipment and the length of time each safety officer has been on the job T x Substitute into the formula and calculate the equipment operation time t of each online security officer x ,

[0060] Set the device operation time t x , the number of times the online security officer executes the instruction N x , the distance between the online safety officer and the vacuum coating machine L x Substitute into the formula The instruction execution optimization parameter ε of each online safety officer is calculated, where ω1, ω2, and ω3 are weight factors of the equipment operation time, the number of times the online safety officer executes instructions, and the distance between the online safety officer and the vacuum coating machine, respectively. The safety officers are sorted according to the instruction execution optimization parameters corresponding to each online safety officer, and the instructions generated by the system are preferentially sent to the online safety officers with the top three instruction execution optimization parameters to improve the efficiency of instruction execution.

[0061] It should be noted that each safety officer has his or her own receiving terminal, which is connected to the database pan-tilt unit. When the safety officer logs in through the receiving terminal, the database pan-tilt unit will mark him or her as online and include him or her in the collection range of the data collection module.

[0062] The preferred embodiments of the present invention disclosed above are only used to help explain the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to only specific implementation methods. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. An analysis system for a vacuum coating machine, comprising a data acquisition module for collecting various required data and a database platform for storing various reference data, characterized in that: It also includes a state judgment module and a safety and stability analysis module: The state judgment module is used to receive the collected various apparent image data, compare the apparent image of each point with the reference high-definition image data in the database pan / tilt, judge the operating state of the vacuum coating machine and find out the abnormality of the equipment; The safety and stability analysis module receives the safety reference data collected by the data acquisition module and sets the internal temperature K i 、Input voltage U i The normal ranges are R K , R U , for those that do not belong to the normal interval R K , R U K i , U i Count and sum to get the number of temperature and pressure anomalies Ct′, and then collect the internal temperature K i 、Input voltage U i Count and sum the total number of temperature and pressure to get the total number Ct, substitute it into the formula Get the temperature and pressure difference The database PTZ is also used to store the local atmospheric pressure value P corresponding to each positioning data. JW , substitute into the formula to calculate the vacuum degree P of the vacuum coating machine i ′, P i is the absolute internal pressure, where i represents the serial number of the recording time, i∈[1,n], i∈N + , n is the total number of recorded moments, N + represents a positive integer; Set a safety threshold Substitute the formula to calculate the vacuum anomaly value Where JW represents the local longitude and latitude; Label each safety officer as Ad p , where p = 1, 2, 3...PN i , PN i is the number of security guards, and calculates Ad for each security guard p Distance from vacuum coating machine S p , set the factory area range limit value S', substitute into the formula Calculate the individual distance difference, and further filter to get the negative distance set and positive distance set Where S″ is the maximum distance reference value, substitute the elements in the negative distance set and the positive distance set into the formula Calculate the safety officer influence parameters Substitute the safety officer's influencing parameters, vacuum anomalies, and temperature and pressure anomalies into the model Calculate the safety stability factor θ AQ , where λ1, λ2, and λ3 are all set coefficients; a safety and stability coefficient threshold is set in advance θ AQ and For comparison, when When , a good signal of safety and stability is generated; when When , a safety stability abnormality signal is generated; There are two sets of reference values, namely and collection Both sets of reference value sets are stored in the database cloud platform, where the data in set A are used for safety and stability analysis during operation, and the parameters in set B are used for safety and stability analysis during shutdown. Corresponding calls are made based on the operating status and stop status instructions output by the status judgment module.

2. The analysis system for a vacuum coating machine according to claim 1, characterized in that: It also includes a quality stability analysis module, which includes a pre-transportation quality stability analysis unit; The pre-transport quality and stability analysis unit is used to obtain the cleaning coefficient related data, and then the cleaning pointer rotation angle is recorded as α, and three adjacent angle intervals are set, which are Set the corresponding explicit coefficient ρ α , when α is in the interval When the output is α =1, and generates a signal that there are more pollutants in the coating room. When α is in the interval When the output is α = 2, and generates a general signal of cleanliness. When α is in the interval When the output is α =3, and a good cleanliness signal is generated; The concentration values ​​of PM2.5 and PM10 in the suspended particle concentration values ​​are normalized and their values ​​are taken, which are denoted as H 2.5 and H 10 , substitute into the formula The suspended particle influence coefficient ρ is calculated H , where λ4 is the set coefficient; The collected temperature and humidity values ​​inside the vacuum coating machine are normalized and their values ​​are taken, which are marked as μ K , μ RH , substitute into the formula The water vapor influence coefficient ρ is calculated W ; The collected high-definition image set is marked as PT. The database PT also stores the internal high-definition image set of the coating room when it leaves the factory. The two sets of high-definition image sets are compared, and the diameter range is greater than the threshold The difference blocks are counted to obtain the total number of stains WD. The usage time is calculated in days. If it is less than one day, it will be calculated as one day. The value is recorded as T. The total number of stains WD and the usage time T are substituted into the formula Calculate the actual stain influence coefficient ρ WD , where λ5 and λ6 are set coefficients; Substitute the apparent coefficient, suspended particle influence coefficient, water vapor influence coefficient, and actual stain influence coefficient into the mathematical model The cleaning parameter σ inside the coating chamber of the vacuum coating machine is calculated.

3. The analysis system for a vacuum coating machine according to claim 2, characterized in that: The quality stability analysis module also includes an in-transit quality stability analysis unit, which is used to receive quality influencing factor data when the vacuum coating machine is running, wherein the quality influencing factor data include the vacuum degree, gas flow rate, argon concentration in the coating chamber and the power of the vacuum coating machine collected regularly; the vacuum degree, gas flow rate, argon concentration in the coating chamber and the power of the vacuum coating machine are then normalized to obtain their values, and are recorded as P according to the recording time. ij ′, QT j ,Ar j and P j , where j = 1, 2, 3...n, n is the total number of records, substitute into the mathematical model Calculate the quality influencing parameters , where δ1, δ2, k1, k2, and k3 are all set constant factors.

4. The analysis system for a vacuum coating machine according to claim 1, characterized in that: Also includes executing the preferred terminal: The preferred terminal receives the data collection module to collect the reference information of the current online safety officers, and labels each safety officer as Ad x , x = 1, 2, 3...m, m is the total number of online safety officers, and the safety officer reference information includes the length of time T of online safety officers x , the current operating time of the vacuum coating machine equipment The number of times the online security officer executes the command N x , the distance between the online safety officer and the vacuum coating machine L x ; Assume that the equipment operation time of the online security officer is t x , the current operating time of the vacuum coating machine equipment and the length of time each safety officer has been on the job T x Substitute into the formula Calculate the equipment operation time t of each online security officer x ; Set the device operation time t x , the number of times the online security officer executes the instruction N x , the distance between the online safety officer and the vacuum coating machine L x Substitute into the formula The instruction execution optimization parameter ε of each online safety officer is calculated, where ω1, ω2, and ω3 are weight factors of the equipment operation time, the number of times the online safety officer executes instructions, and the distance between the online safety officer and the vacuum coating machine, respectively. The safety officers are sorted according to the instruction execution optimization parameters corresponding to each online safety officer, and the instructions generated by the system are sent to the top three online safety officers with the instruction execution optimization parameters.

5. The analysis system for a vacuum coating machine according to claim 2, characterized in that: The various surface image data include the surface images of key points inside and outside the vacuum coating machine, and the safety reference data include regularly collected map positioning data, internal temperature K i 、Input voltage U i , internal absolute pressure P i And the number of nearby security guards PN i , where i represents the serial number of the recording time, i∈[1,n], i∈N + , n is the total number of recorded moments, N + Represents a positive integer; the cleaning coefficient related data include the rotation angle of the cleaning pointer, the suspended particle concentration value, humidity value, temperature value inside the coating room, as well as the high-definition image of the interior of the coating room and the duration of use.

Images