Manufacturing method of low eddy current ultra-high vacuum chamber and vacuum chamber structure

Abstract

The present invention relates to a method for manufacturing a low-eddy current ultra-high vacuum chamber and a vacuum chamber structure, wherein the method comprises: extruding a pipeline pipe material through a pipeline main body mold; extruding a square flange plate through a flange mold; heat treating the formed pipeline pipe material and the square flange plate; fine-machining the heat-treated pipeline pipe material and the square flange plate to form a pipeline and a flange; making an inlay ring so that its shape is adapted to the shape of the flange inner hole and the inner and outer walls of the pipeline; cleaning the finely machined pipeline and flange parts; and performing high-pressure hot-melt molding of the two ends of the cleaned pipeline with the corresponding flange and the inlay ring through a molding mold to form the overall structure of the vacuum chamber. The present invention can solve the eddy current effect of the vacuum chamber in the particle accelerator.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum chambers, and in particular to a method for manufacturing a low-eddy current ultra-high vacuum chamber and a vacuum chamber structure. Background Art

[0002] In recent years, particle accelerators are developing towards high energy, high current and high bunch power. In order to avoid beam loss caused by dynamic vacuum effect and space charge effect, the dipole magnet in the synchronization ring of particle accelerator will adopt ultrafast pulse cycle mode, and the magnetic field rise rate of its ultrafast pulse magnet will continue to increase, reaching 200T / s.

[0003] When the magnetic field rise rate reaches 200T / s, the traditional metal thin-wall vacuum pipe will have serious eddy current effect. The all-ceramic vacuum pipe has problems such as low yield, high processing difficulty, and low structural reliability, which makes it unable to better meet the use requirements. Therefore, it is urgent to develop a high reliability, extremely low conductivity / insulation, low eddy current, and vacuum degree better than 10 -7 Pa ultra-high vacuum chamber. Summary of the invention

[0004] In view of the above problems, the purpose of the present invention is to provide a method for manufacturing a low-eddy current ultra-high vacuum chamber and a vacuum chamber structure, which can solve the eddy current effect of the vacuum chamber in the particle accelerator.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] The method for manufacturing the low eddy current ultra-high vacuum chamber of the present invention comprises the following steps:

[0007] Extruding the pipe material through the pipe main body die;

[0008] Extrusion forming of square flange sheet through flange die;

[0009] Heat treatment is performed on the formed pipes and square flange plates;

[0010] Finish the heat-treated pipes and square flange plates to form pipes and flanges;

[0011] Make the inlay ring so that its shape is adapted to the shape of the inner hole of the flange and the inner and outer walls of the pipe;

[0012] Clean the finished pipes and flanges;

[0013] The two ends of the cleaned pipe are respectively hot-melt molded with the corresponding flanges and the embedded rings through a molding die to form the overall structure of the vacuum chamber.

[0014] The production method preferably further comprises the following steps:

[0015] Processing the flange sealing surface forming the overall structure of the vacuum chamber so that the roughness of the sealing surface reaches a set value range;

[0016] Cleaning and drying the vacuum chamber structure after processing;

[0017] The cleaned and dried vacuum chamber is subjected to vacuum evacuation and leak detection.

[0018] In the manufacturing method, preferably, the pipeline main body mold includes: a pipeline inner wall molding module, a pipeline outer wall molding module, a first material injection module, a second material injection module, a third material injection module, a mold support and a fourth material injection module;

[0019] The second material injection module, the third material injection module and the first material injection module are sequentially stacked and tightly matched along the direction from injection to extrusion;

[0020] The center of the second material injection module is provided with a first tapered hole, the center of the third material injection module is provided with a cylindrical hole, the center of the first material injection module is provided with a second tapered hole, and the first tapered hole, the cylindrical hole and the second tapered hole are sequentially connected;

[0021] The fourth material injection module is arranged in the through hole formed by the first tapered hole, the cylindrical hole and the second tapered hole; the pipeline inner wall forming module and the fourth material injection module are fixed by a connecting piece;

[0022] The fourth material injection module includes a first cone section, a column section and a second cone section;

[0023] The second material injection module is sleeved outside the first cone section and forms a first injection channel with the first cone section;

[0024] The third material injection module is sleeved outside the column section, and the third material injection module is provided with an annular second injection channel;

[0025] The first material injection module is sleeved outside the second cone section and forms a third injection channel with the second cone section;

[0026] The pipeline outer wall forming module is sleeved outside the pipeline inner wall forming module, and a wall cavity for extruding and forming pipeline pipes is formed between the two;

[0027] Wherein, the first injection channel, the second injection channel, the third injection channel and the wall cavity are connected in sequence;

[0028] The pipeline outer wall forming module and the first material injection module are respectively provided with first cooling water holes for cooling water to flow;

[0029] The two mold supports are respectively fixed to the first material injection module.

[0030] The manufacturing method, preferably, extruding the pipeline material through the pipeline main body mold specifically comprises the following steps:

[0031] The hot-melt polymer material is injected from the injection port of the second material injection module. Under the pressure, the hot-melt polymer material passes through the first injection channel, the second injection channel, the third injection channel and the wall cavity in sequence and finally extrudes to form a pipeline structure.

[0032] While extruding, cooling water is injected into the first cooling water hole to cool the pipe material before extrusion.

[0033] In the manufacturing method, preferably, the flange mold comprises: an upper pressing plate, an upper forming module, a side forming module, a lower forming module and a lower pressing plate;

[0034] The upper pressing plate and the upper forming module are stacked in sequence from top to bottom;

[0035] The lower forming module is arranged in parallel and at intervals below the upper forming module;

[0036] The three side forming modules are arranged between the upper forming module and the lower forming module to block the three directions between the two, so as to form a cavity for forming a square flange plate with one side open and three sides closed;

[0037] A material injection port is provided on the closed side opposite to the open side of the cavity, and the material injection port is communicated with the cavity;

[0038] The lower pressing plate is fixedly arranged at the bottom of the lower forming module;

[0039] Second cooling water holes for cooling water to flow are arranged on the sides of the upper molding module and the lower molding module.

[0040] The manufacturing method, preferably, the extrusion molding of the square flange sheet by the flange mold specifically comprises the following steps:

[0041] The hot-melt polymer material is injected from the material injection port. Under the pressure, the hot-melt polymer material enters the cavity formed by the square flange plate and is extruded in the cavity to form a square flange plate.

[0042] While extruding, cooling water is injected into the second cooling water holes on the sides of the upper molding module and the lower molding module to cool the square flange.

[0043] In the manufacturing method, preferably, the compression molding die comprises: a flange fixing tool, a linkage support assembly, a pipe inner wall support die, a hot melt die, an inlay ring pressing die and a hydraulic system;

[0044] The interconnecting support assembly comprises a first connecting plate, a second connecting plate and a third connecting plate and a connecting rod which are arranged in parallel in sequence, wherein the four corners of the first connecting plate, the second connecting plate and the third connecting plate are connected by connecting rods respectively, and the second connecting plate can reciprocate on the connecting rods; the hydraulic cylinder of the hydraulic system is fixedly arranged on the first connecting plate, and the telescopic rod of the hydraulic system passes through the first connecting plate and is connected to the second connecting plate;

[0045] The inlay ring pressing die is fixedly arranged on the second connecting plate, and the inlay ring is fixedly arranged on the inlay ring pressing die;

[0046] The hot melt mold comprises an inlay ring hot melt mold and a molding hot melt mold which are stacked in sequence, the inlay ring hot melt mold is provided with a hot melt groove corresponding to the shape of the inlay ring, and the molding hot melt mold is provided with a hot melt protrusion;

[0047] The flange fixing tool is fixedly arranged on the third connecting plate, the flange is fixedly arranged on the flange fixing tool, the pipeline passes through the third connecting plate and the flange fixing tool and extends into the interior of the flange, and the pipeline is tightly matched with the flange fixing tool;

[0048] An annular space is formed between the flange and the pipe, and the annular space is used to place the embedded ring after hot melting;

[0049] The pipeline inner wall supporting mold is fixedly arranged on the pipeline inner wall.

[0050] The manufacturing method, preferably, is to form the overall structure of the vacuum chamber by high-pressure hot-melt molding of the two ends of the cleaned pipe with the corresponding flanges and the embedded rings through a molding die to form the overall structure of the vacuum chamber, which specifically includes the following steps:

[0051] The inlay ring is fixedly set on the inlay ring pressing die, and the pipe inner wall supporting die is fixedly set on the inner wall of the pipe, and the hydraulic system is turned on to press the inlay ring into the inlay ring hot melt die of the hot melt die to hot melt the inlay ring;

[0052] At the same time, the hot melt protrusion on the hot melt mold is pressed into the annular space between the flange and the pipe to perform hot melting on the inner wall of the flange and the outer wall of the pipe;

[0053] The hot-melt mold is taken out, and then the hot-melt embedded ring is pressed into the annular space between the pipe and the flange through the hydraulic system. The hot-melt embedded ring is melted into one with the inner wall of the flange and the outer wall of the pipe to form the overall structure of the vacuum chamber;

[0054] Remove the inlay ring pressing mold and the pipe inner wall supporting mold.

[0055] The vacuum chamber structure of the present invention comprises a pipeline and flanges arranged at both ends of the pipeline, and is characterized in that the pipeline and the flanges are both made of polymer materials.

[0056] In the vacuum chamber structure, preferably, the polymer material is PEEK and its composite material and / or VESPEL material.

[0057] The present invention adopts the above technical solution, which has the following advantages:

[0058] (1) The pipe and flange of the present invention are both made of polymer materials. The vacuum chamber overcomes the shortcomings of metal thin-wall vacuum chambers and all-ceramic pipes, and provides a new solution for high reliability, low eddy current, and ultra-high vacuum chambers.

[0059] (2) The present invention adopts an extrusion process. Compared with the vacuum chamber injection molding process, the vacuum chamber of the extrusion molding process has better sealing performance, which solves the fusion line problem that may be generated by the injection molding process;

[0060] (3) The integral molding of the flange and the pipe is performed by hot-melting the flange, pipe and inlay ring under high pressure, which solves the problem of poor sealing of traditional hot-melting at normal pressure;

[0061] (4) Taking the PEEK and its composite material vacuum chamber as an example, the low eddy current ultra-high vacuum chamber can withstand the atmospheric pressure under certain temperature conditions, and the entire manufacturing process meets the ultra-high vacuum manufacturing standards. BRIEF DESCRIPTION OF THE DRAWINGS

[0062] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Throughout the accompanying drawings, the same reference numerals are used to represent the same components. In the accompanying drawings:

[0063] Figure 1 is a flow chart of a method for manufacturing a low eddy current ultra-high vacuum chamber according to the present invention;

[0064] Figure 2 It is a schematic diagram of the overall structure of the pipeline main body mold of the present invention;

[0065] Figure 3is a cross-sectional view of a pipe body mold of the present invention;

[0066] Figure 4 It is a structural schematic diagram of the flange mold of the present invention;

[0067] Figure 5 It is a structural schematic diagram of the compression molding die of the present invention;

[0068] Figure 6 It is a schematic cross-sectional structural diagram of the compression molding die of the present invention;

[0069] Figure 7 It is a schematic diagram of the structure of the inlay ring of the present invention;

[0070] Figure 8 It is a structural schematic diagram of the vacuum chamber structure of the present invention.

[0071] The symbols in the accompanying drawings are as follows:

[0072] 1-pipeline inner wall forming module; 2-pipeline outer wall forming module; 3-first material injection module; 4-second material injection module; 5-third material injection module; 6-mold support; 7-first cooling water hole; 8-fourth material injection module; 9-upper pressure plate; 10-upper molding module; 11-side molding module; 12-lower molding module; 13-lower pressure plate; 14-pipeline; 15-flange fixing tooling; 16-flange; 17-linkage support assembly; 18-pipeline inner wall support mold; 19-molding hot melt mold; 20-inlay ring hot melt mold; 21-inlay ring pressing mold; 22-hydraulic system; 23-inlay ring. DETAILED DESCRIPTION

[0073] The exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.

[0074] The present invention provides a method for manufacturing a low-eddy current ultra-high vacuum chamber and a vacuum chamber structure. The eddy current effect of the vacuum chamber in a particle accelerator can be solved by setting the material of the vacuum chamber to PEEK (polyetheretherketone) and its composite materials, VESPEL materials and other polymer engineering plastics, and adopting extrusion technology and hot-melt technology to manufacture the vacuum chamber.

[0075] like Figure 1 As shown, the method for manufacturing a low eddy current ultra-high vacuum chamber provided by the present invention comprises the following steps:

[0076] (1) Extruding the pipeline material through the pipeline main body mold;

[0077] (2) Extruding a square flange sheet through a flange die;

[0078] (3) heat treating the formed pipe and square flange plate;

[0079] (4) Finishing the heat-treated pipes and square flange plates to form pipes and flanges;

[0080] (5) Make the inlay ring so that its shape is compatible with the inner hole of the flange and the inner and outer walls of the pipe;

[0081] (6) Clean the finished pipes and flanges;

[0082] (7) The two ends of the cleaned pipe are respectively molded with the corresponding flanges and the embedded rings by high-pressure hot-melt molding through a molding die to form the overall structure of the vacuum chamber.

[0083] In the above embodiment, preferably, the present invention further comprises the following steps:

[0084] (8) Processing the flange sealing surface forming the overall structure of the vacuum chamber so that the roughness of the sealing surface reaches a set value range;

[0085] (9) Cleaning and drying the vacuum chamber structure after the processing;

[0086] (10) After cleaning and drying, the entire structure of the vacuum chamber is vacuumed and leak tested.

[0087] In the above embodiment, preferably, Figure 2 and Figure 3 As shown, the pipeline main body mold includes: a pipeline inner wall molding module 1, a pipeline outer wall molding module 2, a first material injection module 3, a second material injection module 4, a third material injection module 5, a mold support 6 and a fourth material injection module 8;

[0088] The second material injection module 4, the third material injection module 5 and the first material injection module 3 are sequentially stacked and tightly matched along the direction from injection to extrusion;

[0089] The second material injection module 4 is provided with a first tapered hole at its center, the third material injection module 5 is provided with a cylindrical hole at its center, and the first material injection module 3 is provided with a second tapered hole at its center. The first tapered hole, the cylindrical hole and the second tapered hole are connected in sequence.

[0090] The fourth material injection module 8 is arranged in the through hole formed by the first tapered hole, the cylindrical hole and the second tapered hole; the pipeline inner wall forming module 1 and the fourth material injection module 8 are fixed by a connecting member (the connecting member can be a long screw);

[0091] The fourth material injection module 8 includes a first cone section, a column section and a second cone section; the second material injection module 4 is sleeved outside the first cone section and forms a first injection channel with the first cone section; the third material injection module 5 is sleeved outside the column section, and a ring-shaped second injection channel is provided on the third material injection module; the first material injection module 3 is sleeved outside the second cone section and forms a third injection channel with the second cone section; the pipeline outer wall forming module 2 is sleeved outside the pipeline inner wall forming module 1, and a wall cavity for extruding and forming pipeline pipes is formed between the two; wherein the first injection channel, the second injection channel, the third injection channel and the wall cavity are sequentially connected;

[0092] The pipeline outer wall forming module 2 and the first material injection module 3 are respectively provided with first cooling water holes 7 for cooling water to flow; and the two mold supports 6 are respectively fixed to the first material injection module 3 .

[0093] In the above embodiment, preferably, the pipeline tube is extruded by a pipeline main body mold, which specifically includes the following steps:

[0094] The hot-melt polymer material is injected from the injection port of the second material injection module. Under the pressure, the hot-melt polymer material passes through the first injection channel, the second injection channel, the third injection channel and the wall cavity in sequence and finally extrudes to form a pipeline structure.

[0095] While extruding, cooling water is injected into the first cooling water hole to cool the pipe material before extrusion.

[0096] In the above embodiment, preferably, Figure 4 As shown, the flange mold includes: an upper pressing plate 9, an upper forming module 10, a side forming module 11, a lower forming module 12 and a lower pressing plate 13; the upper pressing plate 9 and the upper forming module 10 are stacked from top to bottom in sequence; the lower forming module 12 is arranged below the upper forming module 10 in parallel and at intervals; the three side forming modules 11 are arranged between the upper forming module 10 and the lower forming module 12 to block the three directions between the two, so as to form a square flange plate forming cavity with one side open and three sides closed;

[0097] A material injection port (not shown in the figure) is provided on the closed side opposite to the open side of the cavity, and the material injection port is connected to the cavity;

[0098] The lower pressing plate 13 is fixedly arranged at the bottom of the lower forming module 12;

[0099] Second cooling water holes for cooling water to flow are provided on the sides of the upper molding module 10 and the lower molding module 12 .

[0100] In the above embodiment, preferably, the extrusion molding of the square flange sheet by the flange die specifically comprises the following steps:

[0101] The hot-melt polymer material is injected from the material injection port. Under the pressure, the hot-melt polymer material enters the cavity formed by the square flange plate and is extruded in the cavity to form a square flange plate.

[0102] While extruding, cooling water is injected into the second cooling water holes on the sides of the upper molding module and the lower molding module to cool the square flange.

[0103] In the above embodiment, preferably, Figure 5 and Figure 6 As shown, the compression molding die includes: a flange fixing tool 15, a linkage support assembly 17, a pipe inner wall support die 18, a hot melt die, an inlay ring pressing die 21 and a hydraulic system 22;

[0104] The interconnecting support assembly 17 includes a first connecting plate, a second connecting plate, and a third connecting plate and a connecting rod, which are sequentially arranged in parallel. The four corners of the first connecting plate, the second connecting plate, and the third connecting plate are respectively connected by connecting rods, and the second connecting plate can reciprocate on the connecting rods; the hydraulic cylinder of the hydraulic system 22 is fixedly arranged on the first connecting plate, and the telescopic rod of the hydraulic system 22 passes through the first connecting plate and is connected to the second connecting plate;

[0105] The inlay ring pressing die 21 is fixedly arranged on the second connecting plate, and the inlay ring 23 (see Figure 7 ) is fixedly arranged on the inlay ring pressing die;

[0106] The hot melt mold comprises an inlay ring hot melt mold 20 and a molding hot melt mold 19 which are stacked in sequence. The inlay ring hot melt mold 20 is provided with a hot melt groove corresponding to the shape of the inlay ring, and the molding hot melt mold 19 is provided with a hot melt protrusion.

[0107] The flange fixing tool 15 is fixedly arranged on the third connecting plate, the flange 16 is fixedly arranged on the flange fixing tool 15, the pipeline 14 passes through the third connecting plate and the flange fixing tool 15 and extends into the interior of the flange 16, and the pipeline 14 is tightly matched with the flange fixing tool 15;

[0108] An annular space is formed between the flange 16 and the pipe 14, and the annular space is used to place the embedded ring after hot melting;

[0109] The pipeline inner wall supporting mold 18 is fixedly disposed on the inner wall of the pipeline 14 .

[0110] It should be noted that the hot melt mold is a mature product on the market, and its principle is the same as that of the hot melt machine. Specifically, a carbon rod may be arranged inside it; therefore, its specific structure will not be described in detail here.

[0111] In the above embodiment, preferably, the two ends of the cleaned pipe are respectively molded with the corresponding flanges and the embedded rings by high-pressure hot-melt molding through a molding die to form the overall structure of the vacuum chamber, which specifically includes the following steps:

[0112] The embedded ring is fixedly set on the embedded ring pressing mold 21, and the pipeline inner wall supporting mold 18 is fixedly set on the inner wall of the pipeline, and the hydraulic system 22 is turned on to press the embedded ring into the embedded ring hot melt mold 20 of the hot melt mold to hot melt the embedded ring;

[0113] At the same time, the hot melt protrusion on the hot melt mold 19 is pressed into the annular space between the flange 16 and the pipe 14, and the inner wall of the flange 16 and the outer wall of the pipe 14 are hot-melted;

[0114] The hot melt mold is taken out, and then the hot melted insert ring is pressed into the annular space between the pipe 14 and the flange 16 through the hydraulic system 22. The hot melted insert ring is melted into the inner wall of the flange 16 and the outer wall of the pipe 14 to form a vacuum chamber overall structure; wherein the vacuum chamber overall structure is as shown in Figure 8 As shown;

[0115] The inlay ring pressing die 21 and the pipe inner wall supporting die 18 are removed.

[0116] The vacuum chamber structure provided by the present invention comprises a pipeline 14 and flanges 16 arranged at both ends of the pipeline. The pipeline 14 and the flange 16 are both made of polymer materials.

[0117] In the above embodiments, preferably, the polymer material is PEEK and its composite materials and / or VESPEL material or other polymer engineering plastics.

[0118] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for manufacturing a low eddy current ultra-high vacuum chamber, characterized in that: The following steps are involved: Extruding the pipe material through the pipe main body die; Extrusion molding of square flange sheet through flange die; Heat treatment is performed on the formed pipes and square flange plates; Finish the heat-treated pipes and square flange plates to form pipes and flanges; Make the inlay ring so that its shape is adapted to the shape of the inner hole of the flange and the inner and outer walls of the pipe; Clean the finished pipes and flanges; The two ends of the cleaned pipe are respectively hot-melt molded with the corresponding flanges and the embedded rings through a molding die to form the overall structure of the vacuum chamber.

2. The method according to claim 1, characterized in that: The following steps are also included: Processing the flange sealing surface forming the overall structure of the vacuum chamber so that the roughness of the sealing surface reaches a set value range; Cleaning and drying the vacuum chamber structure after processing; The cleaned and dried vacuum chamber is subjected to vacuum evacuation and leak detection.

3. The method according to claim 1, characterized in that: The pipeline main body mold comprises: a pipeline inner wall molding module, a pipeline outer wall molding module, a first material injection module, a second material injection module, a third material injection module, a mold support and a fourth material injection module; The second material injection module, the third material injection module and the first material injection module are sequentially stacked and tightly matched along the direction from injection to extrusion; The center of the second material injection module is provided with a first tapered hole, the center of the third material injection module is provided with a cylindrical hole, the center of the first material injection module is provided with a second tapered hole, and the first tapered hole, the cylindrical hole and the second tapered hole are sequentially connected; The fourth material injection module is arranged in the through hole formed by the first tapered hole, the cylindrical hole and the second tapered hole; the pipeline inner wall forming module and the fourth material injection module are fixed by a connecting piece; The fourth material injection module includes a first cone section, a column section and a second cone section; The second material injection module is sleeved outside the first cone section and forms a first injection channel with the first cone section; The third material injection module is sleeved outside the column section, and the third material injection module is provided with an annular second injection channel; The first material injection module is sleeved outside the second cone section and forms a third injection channel with the second cone section; The pipeline outer wall forming module is sleeved outside the pipeline inner wall forming module, and a wall cavity for extruding and forming pipeline pipes is formed between the two; Wherein, the first injection channel, the second injection channel, the third injection channel and the wall cavity are connected in sequence; The pipeline outer wall forming module and the first material injection module are respectively provided with first cooling water holes for cooling water to flow; The two mold supports are respectively fixed to the first material injection module.

4. The method according to claim 3, characterized in that: The extrusion molding of the pipeline pipe material through the pipeline main body mold specifically includes the following steps: The hot-melt polymer material is injected from the injection port of the second material injection module. Under the pressure, the hot-melt polymer material passes through the first injection channel, the second injection channel, the third injection channel and the wall cavity in sequence and finally extrudes to form a pipeline structure. While extruding, cooling water is injected into the first cooling water hole to cool the pipe material before extrusion.

5. The method according to claim 1, characterized in that: The flange mold comprises: an upper pressing plate, an upper forming module, a side forming module, a lower forming module and a lower pressing plate; The upper pressing plate and the upper forming module are stacked in sequence from top to bottom; The lower forming module is arranged in parallel and at intervals below the upper forming module; The three side forming modules are arranged between the upper forming module and the lower forming module to block the three directions between the two, so as to form a cavity for forming a square flange plate with one side open and three sides closed; A material injection port is provided on the closed side opposite to the open side of the cavity, and the material injection port is communicated with the cavity; The lower pressing plate is fixedly arranged at the bottom of the lower forming module; Second cooling water holes for cooling water to flow are arranged on the sides of the upper molding module and the lower molding module.

6. The method according to claim 5, characterized in that: The method of extruding the square flange sheet through the flange die specifically comprises the following steps: The hot-melt polymer material is injected from the material injection port. Under the pressure, the hot-melt polymer material enters the cavity formed by the square flange plate and is extruded in the cavity to form a square flange plate. While extruding, cooling water is injected into the second cooling water holes on the sides of the upper molding module and the lower molding module to cool the square flange.

7. The manufacturing method according to claim 1, characterized in that: The compression molding die comprises: a flange fixing tool, a linkage support assembly, a pipe inner wall support die, a hot melt die, an inlay ring pressing die and a hydraulic system; The linkage support assembly comprises a first connecting plate, a second connecting plate and a third connecting plate and a connecting rod, which are arranged in parallel in sequence. The four corners of the first connecting plate, the second connecting plate and the third connecting plate are connected by connecting rods respectively, and the second connecting plate can reciprocate on the connecting rods; the hydraulic cylinder of the hydraulic system is fixedly arranged on the first connecting plate, and the telescopic rod of the hydraulic system passes through the first connecting plate and is connected to the second connecting plate; The inlay ring pressing die is fixedly arranged on the second connecting plate, and the inlay ring is fixedly arranged on the inlay ring pressing die; The hot melt mold comprises an inlay ring hot melt mold and a molding hot melt mold which are stacked in sequence, the inlay ring hot melt mold is provided with a hot melt groove corresponding to the shape of the inlay ring, and the molding hot melt mold is provided with a hot melt protrusion; The flange fixing tool is fixedly arranged on the third connecting plate, the flange is fixedly arranged on the flange fixing tool, the pipeline passes through the third connecting plate and the flange fixing tool and extends into the interior of the flange, and the pipeline is tightly matched with the flange fixing tool; An annular space is formed between the flange and the pipe, and the annular space is used to place the embedded ring after hot melting; The pipeline inner wall supporting mold is fixedly arranged on the pipeline inner wall.

8. The method according to claim 7, characterized in that: The two ends of the cleaned pipe are respectively subjected to high-pressure hot-melt molding with corresponding flanges and embedded rings through a molding die to form the overall structure of the vacuum chamber, which specifically includes the following steps: The inlay ring is fixedly set on the inlay ring pressing die, and the pipe inner wall supporting die is fixedly set on the inner wall of the pipe, and the hydraulic system is turned on to press the inlay ring into the inlay ring hot melt die of the hot melt die to hot melt the inlay ring; At the same time, the hot melt protrusion on the hot melt mold is pressed into the annular space between the flange and the pipe to perform hot melting on the inner wall of the flange and the outer wall of the pipe; The hot-melt mold is taken out, and then the hot-melt embedded ring is pressed into the annular space between the pipe and the flange through the hydraulic system. The hot-melt embedded ring is melted into one with the inner wall of the flange and the outer wall of the pipe to form the overall structure of the vacuum chamber; Remove the inlay ring pressing mold and the pipe inner wall supporting mold.

9. A vacuum chamber structure based on the method for manufacturing a low eddy current ultra-high vacuum chamber according to any one of claims 1 to 8, comprising a pipeline and flanges arranged at both ends of the pipeline, characterized in that: The pipeline and the flange are both made of polymer materials.

10. The vacuum chamber structure according to claim 9, characterized in that: The polymer material is PEEK and its composite material and / or VESPEL material.

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