A multifunctional finger air pressure tester

Abstract

The present invention relates to the field of finger air pressure detection technology, and in particular to a multifunctional finger air pressure gauge; comprising a base plate, a finger to be detected is placed on the base plate, a horizontal adjustment structure is provided in the width direction of the finger to be detected, a vertical adjustment structure is provided in the length direction of the finger to be detected, at least one blind hole is provided on the base plate at a position corresponding to the air hole of the finger to be detected, a cover plate is provided above the finger to be detected, a pressure block is embedded in the lower end of the cover plate, an air guide hole is provided in the pressure block at a position corresponding to the air hole of the finger to be detected, and an air duct compatible with the air guide hole is provided on the side of the cover plate. The multifunctional finger air pressure gauge provided by the present invention can not only separate the finger air pressure detection function from the overall manipulator equipment, but also realize air pressure detection of fingers of multiple specifications and sizes, with a wide range of applications, simple structure, convenient operation and high flexibility.

Description

Technical Field

[0001] The invention relates to the technical field of finger air pressure detection, and in particular to a multifunctional finger air pressure detection tool. Background Art

[0002] In the semiconductor manufacturing process, there are multiple processes involved, and each process is completed by certain equipment and processes. The wafer handling robot can transfer wafers from the outside of the equipment to the equipment chamber for processing. A typical wafer handling robot transfers wafers (WAFER) into the processing chamber one by one and retrieves the processed wafers.

[0003] At present, the finger detection function mounted on the robot is usually used to detect the air pressure of the fingers. Due to different actual working conditions, the fingers used are also various. If the above detection method is adopted, different robot equipment is required to perform air pressure detection on different fingers. The scope of application is narrow, the targeting is strong, and the flexibility is poor.

[0004] To this end, the present invention provides a multifunctional finger air pressure testing tool. Summary of the invention

[0005] Based on this, it is necessary to provide a multifunctional finger air pressure gauge to address the above technical problems.

[0006] In order to achieve the above object, the technical solution of the present invention is as follows:

[0007] A multifunctional finger air pressure gauge comprises a base plate, a finger to be detected is placed on the base plate, a horizontal adjustment structure for limiting the left and right movement of the finger to be detected is provided in the width direction of the finger to be detected, the horizontal adjustment structure is detachably connected to the base plate, a vertical adjustment structure for moving the finger to be detected forward and backward is provided in the length direction of the finger to be detected, the vertical adjustment structure is detachably connected to the base plate, at least one blind hole is provided at a position corresponding to an air hole of the finger to be detected on the base plate, a cover plate is provided above the finger to be detected, an anti-movement structure compatible with the horizontal adjustment structure and the vertical adjustment structure is provided at the lower end of the cover plate, a pressure block is embedded in the lower end of the cover plate, an air guide hole is provided in the pressure block corresponding to the position of the air hole of the finger to be detected, an air duct compatible with the air guide hole is provided on the side of the cover plate, and an air pipe connector is detachably connected to the input end of the air duct.

[0008] Specifically, the horizontal adjustment structure includes a first horizontal telescopic plate and a second horizontal telescopic plate, which are symmetrically arranged on the left and right sides of the finger to be detected, and the first horizontal telescopic plate and the second horizontal telescopic plate are both L-shaped structures. The horizontal sections of the first horizontal telescopic plate and the second horizontal telescopic plate are both provided with a first adjustment waist groove, and a first internal threaded hole is provided on the bottom plate at a position corresponding to the first adjustment waist groove.

[0009] Specifically, the vertical adjustment structure is a vertical telescopic plate, which is arranged at the rear end of the finger to be detected, and the vertical telescopic plate is arranged between the first horizontal telescopic plate and the second horizontal telescopic plate. The vertical telescopic plate is an L-shaped structure, and the horizontal section of the vertical telescopic plate is provided with a second adjustment waist groove, and a second internal threaded hole is provided on the bottom plate at a position corresponding to the second adjustment waist groove.

[0010] Specifically, grooves are provided at the lower end of the cover plate corresponding to the positions of the first horizontal telescopic plate, the second horizontal telescopic plate and the vertical telescopic plate, which are used for the front, back, left and right movement of the cover plate. The anti-movement structure is a card slot, and the positions corresponding to the card slots on the first horizontal telescopic plate and the second horizontal telescopic plate are provided with matching protruding structures, which are used to limit the movement of the cover plate after the cover plate is moved to a suitable installation position.

[0011] Specifically, the top of the cover plate is also provided with a built-in threaded hole for installing the handle.

[0012] Specifically, adjustable feet are provided at the four corners of the bottom surface of the base plate.

[0013] The advantages and beneficial effects of the present invention are:

[0014] The multifunctional finger air pressure detection tool provided by the present invention can not only separate the finger air pressure detection function from the overall manipulator equipment, but also realize air pressure detection on fingers of various specifications and sizes. It has a wide range of applications, a simple structure, easy operation and high flexibility. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of a multifunctional finger air pressure tester in an embodiment of the present invention;

[0016] Figure 2 is a top view of the bottom plate in an embodiment of the present invention;

[0017] Figure 3 Schematic diagram of the structure of the first horizontal telescopic plate in an embodiment of the present invention;

[0018] Figure 4 It is a structural schematic diagram of a vertical telescopic plate in an embodiment of the present invention;

[0019] Figure 5A bottom view of a cover plate in an embodiment of the present invention;

[0020] Figure 6 It is a schematic diagram of the structure of assembling a finger to be detected on a base plate in an embodiment of the present invention.

[0021] Figure numerals: base plate 1, adjustable foot 2, finger to be detected 3, first horizontal telescopic plate 4, second horizontal telescopic plate 5, vertical telescopic plate 6, trachea connector 7, cover plate 8, handle 9, first internal threaded hole 10, blind hole 11, second internal threaded hole 12, first adjustment waist groove 13, protruding structure 14, second adjustment waist groove 15, groove 16, slot 17, pressure block 18, air guide hole 19, air hole 20. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below through specific implementation methods in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0023] In order to solve the problem that the existing finger pressure detection function mounted on the manipulator is usually used to detect the air pressure of the finger, the defects of needing to use different manipulator equipment to detect the air pressure of the corresponding finger, poor flexibility, narrow scope of application and strong targeting, the present application provides a multifunctional finger air pressure gauge, which can be used alone, solves the technical problem of separating the finger air pressure detection function from the overall manipulator equipment, and at the same time, the gauge is also suitable for air pressure detection of fingers of various specifications and sizes, with a simple structure, easy operation and high practicality.

[0024] Reference Figure 1-5 As shown, the multifunctional finger air pressure gauge is mainly composed of a base plate 1, a horizontal adjustment structure, a vertical adjustment structure, a cover plate 8, a pressure block 18 and an adjustable foot 2.

[0025] In one embodiment, a finger 3 to be detected is placed on the bottom plate 1, and a horizontal adjustment structure for limiting the left and right movement of the finger 3 to be detected is provided in the width extension direction of the finger 3 to be detected, and the horizontal adjustment structure is detachably connected to the bottom plate 1, wherein, with reference to the attached Figure 3 and attached Figure 6, the horizontal adjustment structure includes a first horizontal telescopic plate 4 and a second horizontal telescopic plate 5, which are symmetrically arranged on the left and right sides of the finger 3 to be detected, and the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 are both L-shaped structures. The horizontal sections of the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 are both provided with a first adjustment waist groove 13, and a first internal threaded hole 10 is provided on the bottom plate 1 corresponding to the first adjustment waist groove 13; the distance between the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 depends on the width of the finger 3 to be detected, and the first adjustment waist groove 13 is provided in the horizontal sections of the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5, and a bolt is passed through the first adjustment waist groove 13 and is threadedly connected in the first internal threaded hole 10, so as to fix the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 on the bottom plate 1, so as to limit the left and right movement of the finger 3 to be detected. At the same time, in this embodiment, the number of the first adjustment waist grooves 13 in the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 is two, and the two first adjustment waist grooves 13 are arranged in parallel and side by side, which can effectively improve the installation stability of the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5.

[0026] In one embodiment, a vertical adjustment structure for moving the finger 3 to be detected forward and backward is provided in the length direction of the finger 3 to be detected, and the vertical adjustment structure is detachably connected to the base plate 1, wherein, with reference to the attached Figure 4 and attached Figure 6 The vertical adjustment structure is a vertical telescopic plate 6, which is arranged at the rear end of the finger to be detected 3, and the vertical telescopic plate 6 is arranged between the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5. The vertical telescopic plate 6 is an L-shaped structure, and the horizontal section of the vertical telescopic plate 6 is provided with a second adjustment waist groove 15, and a second internal threaded hole 12 is provided on the bottom plate 1 at a position corresponding to the second adjustment waist groove 15; the vertical telescopic plate 6 for supporting the rear end of the finger to be detected 3 is arranged between the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5, and the first horizontal telescopic plate 4, the second horizontal telescopic plate 5 and the vertical telescopic plate 6 are used to adjust the finger 3 to be detected. The synergistic effect of the two can limit the forward and backward movement of the finger 3 to be detected. At the same time, a second adjusting waist groove 15 is opened in the horizontal section of the vertical telescopic plate 6, and a bolt is passed through the second adjusting waist groove 15 and threaded into the second internal threaded hole 12 to fix the vertical telescopic plate 6 on the base plate 1, and the adjustment position of the vertical telescopic plate 6 depends on the length of the air hole 20 of the finger 3 to be detected. At the same time, in this embodiment, there are two second adjusting waist grooves 15 in the vertical telescopic plate 6, and the two second adjusting waist grooves 15 are arranged in parallel and side by side, which can effectively improve the installation stability of the vertical telescopic plate 6.

[0027] In one embodiment, at least one blind hole 11 is provided on the bottom plate 1 at a position corresponding to the air hole 20 of the finger 3 to be detected. Figure 2The number of blind holes 11 is 3, and the size and depth of the blind holes 11 can be designed according to the size of the air holes 20 of the finger 3 to be detected. At the same time, the base plate 1 involved in the present application can be suitable for the adjustment of single-hole fingers, double-hole fingers and three-hole fingers.

[0028] In one embodiment, referring to the attached Figure 5 A cover plate 8 is provided above the finger 3 to be detected, and an anti-movement structure compatible with the horizontal adjustment structure and the vertical adjustment structure is provided at the lower end of the cover plate 8. A pressure block 18 is embedded in the lower end of the cover plate 8, and an air guide hole 19 is provided at the pressure block 18 corresponding to the position of the air hole 20 of the finger 3 to be detected. An air duct compatible with the air guide hole 19 is provided on the side of the cover plate 8, and an air pipe connector 7 is detachably connected to the input end of the air duct; wherein, a groove 16 is provided at the lower end of the cover plate 8 corresponding to the position of the first horizontal telescopic plate 4, the second horizontal telescopic plate 5 and the vertical telescopic plate 6, which is used for the front, back, left and right movement of the cover plate 8, and the anti-movement structure is a card slot 17, and the position corresponding to the card slot 17 on the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 A matching protruding structure 14 is provided for limiting the movement of the cover plate 8 after the cover plate 8 is moved to a suitable installation position; a built-in threaded hole for installing a handle 9 is also provided on the top of the cover plate 8; a built-in threaded hole is provided at the upper end of the cover plate 8 to carry the handle 9, which is convenient for installing the handle 9 and plays a role in facilitating the taking of the cover plate 8; a groove 16 corresponding to the horizontal adjustment structure and the vertical adjustment structure is provided at the lower end of the cover plate 8 to realize the front, back, left and right movement of the cover plate 8. When the cover plate 8 is moved to a suitable installation position, the anti-movement structure (card slot 17) provided at the lower end of the cover plate 8 can cooperate with the corresponding protruding structure 14 on the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 to prevent the cover plate 8 from moving.

[0029] In one embodiment, a pressing block 18 is embedded in the lower end of the cover plate 8. The pressing block 18 can be replaced with a pressing block 18 of corresponding size according to the size of the finger 3 to be detected. Figure 1 The finger 3 to be detected in the drawing is a single-hole finger. Since the air guide hole 19 is provided on the pressing block 18 and is connected to the cover plate 8, the purpose of air guide can be achieved.

[0030] In one of the embodiments, adjustable feet 2 are provided at the four corners of the bottom surface of the base plate 1. By using the adjustable feet 2, the use height of the base plate 1 can be adjusted according to actual needs, which has high flexibility.

[0031] In one embodiment, the multifunctional finger air pressure gauge of the present invention, before use, firstly selects a matching pressing block 18 according to the specifications of the actual finger 3 to be detected, and installs the pressing block 18 at the lower end of the cover plate 8, and then assembles the first horizontal telescopic plate 4, the second horizontal telescopic plate 5 and the vertical telescopic plate 6 on the bottom plate 1 according to the size of the actual finger 3 to be detected, so as to achieve the limit fixation of the finger 3 to be detected, and then buckles the cover plate 8 on the finger 3 to be detected, and moves the cover plate 8 forward, backward, left and right until the cover plate The card slot 17 under 8 cooperates with the corresponding protruding structure 14 on the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 to prevent the cover plate 8 from moving; in the process of detecting the air pressure, an external pressure gauge tooling and an air source are connected to the air pipe connector 7 to achieve the purpose of ventilation. At the same time, a wafer needs to be placed on the finger to be detected 3 to block the air hole 20, and the air guide hole 19 of the pressure plate is aligned with the air hole 20 of the finger to be detected 3, and the air hole 20 of the finger to be detected is pressed by the pressure block 18 and the overall structure of the cover plate 8 to achieve a sealing effect.

[0032] The above contents are further detailed descriptions of the present invention in combination with specific implementation methods, and it cannot be determined that the specific implementation of the present invention is limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions or substitutions can be made without departing from the concept of the present invention, which should be regarded as falling within the scope of protection of the present invention.

Claims

1. A multifunctional finger air pressure tester, comprising a bottom plate, characterized in that: A finger to be detected is placed on the bottom plate, a horizontal adjustment structure for limiting the left and right movement of the finger to be detected is provided in the width direction of the finger to be detected, the horizontal adjustment structure is detachably connected to the bottom plate, a vertical adjustment structure for moving the finger to be detected forward and backward is provided in the length direction of the finger to be detected, the vertical adjustment structure is detachably connected to the bottom plate, at least one blind hole is provided at a position corresponding to the air hole of the finger to be detected on the bottom plate, a cover plate is provided above the finger to be detected, an anti-movement structure compatible with the horizontal adjustment structure and the vertical adjustment structure is provided at the lower end of the cover plate, a pressure block is embedded in the lower end of the cover plate, an air guide hole is provided on the pressure block corresponding to the position of the air hole of the finger to be detected, an air duct compatible with the air guide hole is provided on the side of the cover plate, and an air pipe connector is detachably connected to the input end of the air duct; The horizontal adjustment structure includes a first horizontal telescopic plate and a second horizontal telescopic plate, the first horizontal telescopic plate and the second horizontal telescopic plate are symmetrically arranged on the left and right sides of the finger to be detected, the first horizontal telescopic plate and the second horizontal telescopic plate are both L-shaped structures, the horizontal sections of the first horizontal telescopic plate and the second horizontal telescopic plate are both provided with a first adjustment waist groove, and a first internal threaded hole is provided at a position on the bottom plate corresponding to the first adjustment waist groove; The vertical adjustment structure is a vertical telescopic plate, which is arranged at the rear end of the finger to be detected, and is arranged between the first horizontal telescopic plate and the second horizontal telescopic plate. The vertical telescopic plate is an L-shaped structure, and a second adjustment waist groove is provided in the horizontal section of the vertical telescopic plate, and a second internal threaded hole is provided at a position on the bottom plate corresponding to the second adjustment waist groove; The lower end of the cover plate is provided with grooves corresponding to the positions of the first horizontal telescopic plate, the second horizontal telescopic plate and the vertical telescopic plate, which are used for the front, back, left and right movement of the cover plate. The anti-movement structure is a card slot, and the positions corresponding to the card slots on the first horizontal telescopic plate and the second horizontal telescopic plate are provided with matching protrusion structures, which are used to limit the movement of the cover plate after the cover plate is moved to a suitable installation position.

2. A multifunctional finger air pressure gauge according to claim 1, characterized in that: The top of the cover plate is also provided with a built-in threaded hole for installing a handle.

3. A multifunctional finger air pressure gauge according to claim 1, characterized in that: The four corners of the bottom surface of the bottom plate are also provided with adjustable feet.

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