A device for detecting the shear resistance of a gallium arsenide chip

Abstract

The present invention relates to the technical field of chip detection, and specifically discloses a gallium arsenide chip anti-shear force detection device, which includes a chip column, a collection cabinet, a conveyor and a positioning table. The conveyor is installed at the top of the collection cabinet and is used for conveying the chip column. The positioning table is installed at the top of the collection cabinet and is used for positioning the chip column. A support frame is arranged at the top of the collection cabinet, and the support frame is arranged in a "day" shape. An adjustment component for transferring the chip column is arranged inside the support frame. A positioning hole matching the chip column is arranged at the top of the positioning table, and an ejection hole is arranged at the bottom of the positioning table. The ejection hole and the positioning hole are coaxially arranged. The present invention has an automatic detection structure for the anti-shear force of the chip, an automatic cleaning and collection structure for chip waste products, and an automatic conveying, transferring and positioning structure for the chip, improving the anti-shear force detection efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of chip detection, and particularly relates to a shear resistance detection device for gallium arsenide chips. Background Art

[0002] A gallium arsenide chip is an integrated circuit made of a semiconductor material gallium arsenide, including ultra-high-speed integrated circuits, microwave monolithic integrated circuits, optoelectronic integrated circuits, etc. The chip is usually fixed on a base wafer, and typical methods include welding, bonding, or solder ball arrays. During the chip production process, shear resistance detection is generally required. Chip shear resistance refers to evaluating the adhesion strength between the chip and the base to ensure that the chip can withstand the applied shear force during installation, thereby ensuring the firmness and reliability of the package.

[0003] Chinese Patent (CN210626295U) discloses a chip bonding interface shear strength test device, which includes a frame, a base, a vacuum adsorption platform, a vacuum airway, a vacuum tube, a device under test, a push knife, and fasteners. A base is provided on the frame, and the base is fixed on the frame; the vacuum adsorption platform is fixed on the base, and the vacuum adsorption platform is internally provided with a vacuum airway and externally connected to a vacuum tube for adsorbing and fixing the device under test; a test push knife is provided on the driving device above the frame, and the push knife abuts against the device under test to test the shear strength of the bonding interface; the fasteners are connected to the base through screws to fix the device under test.

[0004] However, there are some drawbacks in the above related technologies. For example, during the shear resistance detection of the chip, since the chip and the integral base wafer are generally fixed by fasteners and then force is applied for detection, the local part of the chip is easily damaged, and manual assistance is required to fix and disassemble the chip before and after detection, resulting in low detection efficiency. Summary of the Invention

[0005] To solve the above problems existing in the prior art, the present invention provides a shear resistance detection device for gallium arsenide chips, which can overcome technical defects.

[0006] The object of the present invention can be achieved by the following technical solutions:

[0007] A shear resistance detection device for gallium arsenide chips includes a chip column, a collection cabinet, a conveyor, and a positioning table. The conveyor is installed at the top of the collection cabinet and is used to convey the chip column. The positioning table is installed at the top of the collection cabinet and is used to position the chip column. A support frame is provided at the top of the collection cabinet. The support frame is arranged in a "day" shape, and an adjustment component for transferring the chip column is arranged inside the support frame;

[0008] The top of the positioning platform is provided with a positioning hole matching the chip column, the bottom of the positioning platform is provided with an ejection hole, the ejection hole and the positioning hole are coaxially arranged, an ejection mechanism for ejecting the chip column is arranged in the ejection hole, a push knife is slidably installed on the top of the positioning platform, the top of the positioning platform is provided with a groove, and a force measuring component for detecting the shear resistance of the chip column is arranged in the groove;

[0009] The positioning assembly includes a lifting plate and a limiting shaft, a third hydraulic cylinder is fixedly installed on the top wall of the support frame, a piston rod of the third hydraulic cylinder penetrates the support frame and is fixedly connected to the bottom end of the lifting plate, the limiting shaft is rotatably connected to the lifting plate, the limiting shaft penetrates the two upper horizontal sections of the support frame, a support plate is fixedly installed on the bottom end of the limiting shaft, three-jaw chucks for clamping chip columns are provided at both ends of the support plate, and a driving assembly for driving the limiting shaft to rotate is provided at the top of the middle horizontal section of the support frame.

[0010] Preferably, the chip column includes a chip body and a base sheet which are fixedly connected, and glue columns are pre-injected on the outside of the chip body and the base sheet. One side of the chip body is exposed on the outside of the glue columns, and the bottom end of the push knife is flush with the bottom end of the chip body. The glue columns assist in wrapping the chip body and the base sheet, thereby reducing the possibility of chip collapse during shear force resistance detection. The top of the chip body is exposed on the outside of the glue columns, and the glue columns are directly inserted into the positioning holes of the positioning platform, thereby eliminating the use of fasteners for the chip and improving the efficiency of chip shear force resistance detection.

[0011] Preferably, the ejection mechanism includes a slider, which is slidably installed in the ejection hole, and an ejection rod is fixedly installed on the top of the slider, and the ejection rod is penetrated and slidably connected to the positioning platform. A first hydraulic cylinder is installed on the top wall of the collection cabinet, and the top end of the piston rod of the first hydraulic cylinder is fixedly connected to the bottom end of the slider.

[0012] Preferably, the force measuring assembly includes a support block and a pressure sensor, the support block is fixedly mounted on the bottom end of the push knife, the support block is located in the groove, a receiving groove is provided on the side of the support block away from the chip column, the pressure sensor is located in the receiving groove, the thickness of the pressure sensor is greater than the depth of the receiving groove, and limit plates are movably provided on the opposite sides of the support block, three limit columns are fixedly mounted between the two limit plates, the limit columns are penetrated and slidably connected to the support block, the first hydraulic cylinder drives the slide block and the ejection rod to rise synchronously, and the chip column is ejected from the positioning hole, and then the second hydraulic cylinder drives the two limit plates and the three limit columns to slide synchronously, squeezes the pressure sensor, drives the support block and the push knife to slide synchronously, pushes the detected chip column to the discharge port, and drops it into the collection cabinet.

[0013] Preferably, a second hydraulic cylinder is provided on one side of the positioning platform, the end of the piston rod of the second hydraulic cylinder is located in the groove, and the top end of the piston rod of the second hydraulic cylinder is fixedly connected to the adjacent limiting plate.

[0014] Preferably, a discharge port is provided at the top of the collection cabinet, and the discharge port is located on a side of the positioning platform close to the conveyor.

[0015] Preferably, a through hole matching the limiting shaft is provided at the top of the lifting plate, and a bearing matching the limiting shaft is provided in the through hole of the lifting plate.

[0016] Preferably, the driving assembly includes a first pulley and a second pulley, the first pulley is key-connected to the limit shaft, a support seat is clamped at the top end of the middle horizontal section of the support frame, the support seat is rotatably connected to the first pulley, a synchronous belt is arranged between the first pulley and the second pulley, a servo motor is arranged at the bottom end of the middle horizontal section of the support frame, and the output shaft of the servo motor is key-connected to the second pulley.

[0017] The beneficial effects of the present invention are:

[0018] 1. By setting the force measuring component and the ejection mechanism, the beneficial effect that can be obtained is that the second hydraulic cylinder drives two limit plates, three limit columns, pressure sensors, support blocks and push knives to slide synchronously to shear the chip column on the top of the positioning table, and the pressure sensor monitors the shear force in real time and uploads it to the PLC controller. After the shearing is completed, the second hydraulic cylinder drives the push knife to reset, and the first hydraulic cylinder drives the slider and the ejection rod to rise synchronously to eject the chip column from the positioning hole. The two limit plates are respectively fitted with the pressure sensor and the support block, and then the second hydraulic cylinder drives the two limit plates, three limit columns, pressure sensors, support blocks and push knives to slide synchronously to push the detected chip column to the discharge port and drop it into the collection cabinet. It has an automatic detection structure for the chip's shear resistance and an automatic cleaning and collection structure for chip waste.

[0019] 2. By setting the positioning component and the conveyor, the beneficial effect that can be obtained is that after the three-jaw chuck clamps the chip column on the conveyor, the third hydraulic cylinder drives the lifting plate and the limit shaft to rise. At the same time, the servo motor drives the second pulley to rotate, and cooperates with the synchronous belt to drive the first pulley to rotate on the support seat. After driving the limit shaft to rotate 180°, the third hydraulic cylinder drives the lifting plate and the limit shaft to descend, and the chip column falls into the positioning hole of the positioning table. The three-jaw chuck releases the chip column. At the same time, the three-jaw chuck at the other end of the support plate clamps another chip column to be tested, which has an automatic conveying, transfer and positioning structure for the chip, and improves the efficiency of shear force detection.

[0020] 3. By setting up the chip column and the positioning table, the beneficial effect that can be obtained is that the glue column assists in wrapping the chip body and the base sheet, reducing the possibility of chip collapse during shear force resistance testing. The top of the chip body is exposed on the outside of the glue column, and the glue column is directly inserted into the positioning hole of the positioning table, eliminating the use of fasteners for the chip and improving the efficiency of chip shear force resistance testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0022] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 It is a cross-sectional view of the glue column in the present invention;

[0024] Figure 3 It is the installation structure diagram of the positioning platform in the present invention;

[0025] Figure 4 It is a structural diagram of the installation of the first hydraulic cylinder in the present invention;

[0026] Figure 5 For the present invention Figure 4 Enlarged view of point A inside;

[0027] Figure 6 An exploded view of the force measuring assembly of the present invention;

[0028] Figure 7 The figure is a diagram of the installation structure of the three-jaw chuck in the present invention;

[0029] Figure 8 It is the installation structure diagram of the driving component in the present invention.

[0030] Description of reference numerals:

[0031] In the figure: 1. chip column; 11. chip body; 12. base plate; 13. glue column; 2. collection cabinet; 21. feed port; 3. conveyor; 4. positioning table; 41. positioning hole; 42. ejection hole; 43. slider; 44. ejection rod; 45. first hydraulic cylinder; 46. push knife; 47. groove; 51. support block; 52. receiving groove; 53. pressure sensor; 54. limit plate; 55. limit column; 56. second hydraulic cylinder; 6. support frame; 61. lifting plate; 62. third hydraulic cylinder; 63. limit shaft; 64. support plate; 65. three-jaw chuck; 71. first pulley; 72. second pulley; 73. support seat; 74. synchronous belt; 75. servo motor. DETAILED DESCRIPTION

[0032] To further elaborate on the technical means and effects adopted by the present invention to achieve the intended invention purpose, the following, in conjunction with the accompanying drawings and preferred embodiments, clearly and completely describes the specific implementation manners, structures, features and their effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts belong to the scope of protection of the present invention.

[0033] In the description of the present application, it should be understood that the orientation or positional relationship indicated by terms such as "inside", "outside", etc. is based on the orientation or position shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, a specific orientation structure and operation. Therefore, it should not be construed as a limitation to the present application.

[0034] Referring to Figure 1-Figure 4 , a gallium arsenide chip anti-shear force detection device disclosed by the present invention includes a chip column 1, a collection cabinet 2, a conveyor 3 and a positioning table 4. The chip column 1 includes a chip body 11 and a base plate 12 which are fixedly connected. A glue column 13 is pre-poured outside the chip body 11 and the base plate 12. One side of the chip body 11 is exposed outside the glue column 13, reducing the possibility of breakage. The conveyor 3 is installed at the top of the collection cabinet 2 and is used to convey the chip column 1. The positioning table 4 is installed at the top of the collection cabinet 2 and is used to position the chip column 1. A blanking port 21 is provided at the top of the collection cabinet 2. The blanking port 21 is located on the side of the positioning table 4 close to the conveyor 3. A support frame 6 is provided at the top of the collection cabinet 2. The support frame 6 is arranged in a "day" shape and has a supporting function. The glue column 13 assists in wrapping the chip body 11 and the base plate 12, reducing the possibility of breakage of the chip during the anti-shear force detection process.

[0035] Referring to Figure 1-Figure 6A positioning hole 41 matching the chip column 1 is provided at the top of the positioning platform 4, and an ejection hole 42 is provided at the bottom of the positioning platform 4. The ejection hole 42 is coaxially arranged with the positioning hole 41. An ejection mechanism for ejecting the chip column 1 is provided in the ejection hole 42. The ejection mechanism includes a slider 43. The slider 43 is slidably installed in the ejection hole 42 to have a supporting effect. An ejection rod 44 is fixedly installed at the top of the slider 43. The ejection rod 44 penetrates and is slidably connected to the positioning platform 4 to have an ejection effect. A first hydraulic cylinder 45 is installed on the top wall of the collection cabinet 2. The top end of the piston rod of the first hydraulic cylinder 45 is fixedly connected to the bottom end of the slider 43. The positioning platform 4 has a driving function. A push knife 46 is slidably installed at the top of the positioning platform 4. The bottom end of the push knife 46 is flush with the bottom end of the chip body 11 and has the function of applying shear force to the chip body 11. A groove 47 is arranged at the top of the positioning platform 4. A force measuring component for detecting the shear resistance of the chip column 1 is arranged in the groove 47. The force measuring component includes a support block 51 and a pressure sensor 53. The support block 51 is fixedly installed at the bottom end of the push knife 46. The support block 51 is located in the groove 47 and has a supporting function. A receiving groove 52 is arranged on the side of the support block 51 away from the chip column 1. The pressure sensor 53 is located in the receiving groove 52. The pressure sensor 53 is located in the receiving groove 52. The thickness of the sensor 53 is greater than the depth of the accommodating groove 52. Limiting plates 54 are movably arranged on the opposite sides of the support block 51. Three limiting columns 55 are fixedly installed between the two limiting plates 54. The limiting columns 55 are penetrated and slidably connected with the support block 51 and have a supporting function. A second hydraulic cylinder 56 is arranged on one side of the positioning platform 4. The end of the piston rod of the second hydraulic cylinder 56 is located in the groove 47, and the top of the piston rod of the second hydraulic cylinder 56 is fixedly connected to the adjacent limiting plate 54. The second hydraulic cylinder 56 drives the two limiting plates 54, the three limiting columns 55, the pressure sensor 53, the support block 51 and the push knife 46 to slide synchronously. The chip column 1 at the top of the positioning platform 4 is sheared, and the pressure sensor 53 monitors the shear force in real time and uploads it to the PLC controller. After the shearing is completed, the second hydraulic cylinder 56 drives the push knife 46 to reset, and the first hydraulic cylinder 45 drives the slider 43 and the ejector rod 44 to rise synchronously, and the chip column 1 is ejected from the positioning hole 41. The two limit plates 54 are respectively fitted with the pressure sensor 53 and the support block 51. Then the second hydraulic cylinder 56 drives the two limit plates 54, the three limit columns 55, the pressure sensor 53, the support block 51 and the push knife 46 to slide synchronously, and the detected chip column 1 is pushed to the discharge port 21, and falls into the collection cabinet 2.

[0036] Reference Figure 1 and Figure 7-Figure 8, a positioning assembly for transferring the chip column 1 is provided in the support frame 6, and the positioning assembly includes a lifting plate 61 and a limiting shaft 63. A third hydraulic cylinder 62 is fixedly installed on the top wall of the support frame 6, and the piston rod of the third hydraulic cylinder 62 passes through the support frame 6 and is fixedly connected to the bottom end of the lifting plate 61, and has a driving function. The limiting shaft 63 is rotatably connected to the lifting plate 61, and a through hole matching the limiting shaft 63 is provided at the top of the lifting plate 61. A bearing matching the limiting shaft 63 is provided in the through hole of the lifting plate 61. The limiting shaft 63 is penetrated by the two horizontal sections above the support frame 6, and a support plate 64 is fixedly installed at the bottom end of the limiting shaft 63, which has a supporting function. Three-claw chucks 65 for clamping the chip column 1 are provided at both ends of the support plate 64. A driving assembly for driving the limiting shaft 63 to rotate is provided at the top of the horizontal section in the middle of the support frame 6, and the driving assembly includes a first pulley 71 and a second Pulley 72, the first pulley 71 and the limit shaft 63 are key-connected, a support seat 73 is clamped at the top of the middle horizontal section of the support frame 6, the support seat 73 is rotatably connected to the first pulley 71, a synchronous belt 74 is arranged between the first pulley 71 and the second pulley 72, a servo motor 75 is arranged at the bottom end of the middle horizontal section of the support frame 6, and the output shaft of the servo motor 75 is key-connected to the second pulley 72. After the three-jaw chuck 65 clamps the chip column 1 on the conveyor 3, the third hydraulic cylinder 62 drives the lifting plate 61 and the limit shaft 63 to rise. At the same time, the servo motor 75 drives the second pulley 72 to rotate, and cooperates with the synchronous belt 74 to drive the first pulley 71 to rotate on the support seat 73. After driving the limit shaft 63 to rotate 180°, the third hydraulic cylinder 62 drives the lifting plate 61 and the limit shaft 63 to descend, and the chip column 1 falls into the positioning hole 41 of the positioning platform 4, and the three-jaw chuck 65 releases the chip column 1.

[0037] The working principle and use process of the present invention are as follows: the glue column 13 assists in wrapping the chip body 11 and the base sheet 12, reducing the possibility of chip collapse during the shear resistance test. After the three-jaw chuck 65 clamps the chip column 1 on the conveyor 3, the third hydraulic cylinder 62 drives the lifting plate 61 and the limit shaft 63 to rise. At the same time, the servo motor 75 drives the second pulley 72 to rotate, and cooperates with the synchronous belt 74 to drive the first pulley 71 to rotate on the support seat 73. After driving the limit shaft 63 to rotate 180°, the third hydraulic cylinder 62 drives the lifting plate 61 and the limit shaft 63 to descend, and the chip column 1 falls into the positioning hole 41 of the positioning platform 4. The three-jaw chuck 65 releases the chip column 1, and the second hydraulic cylinder 56 drives the two limit plates 54 and the three The limit columns 55, the pressure sensor 53, the support block 51 and the push knife 46 slide synchronously to shear the chip column 1 on the top of the positioning platform 4. The pressure sensor 53 monitors the shear force in real time and uploads it to the PLC controller. After the shearing is completed, the second hydraulic cylinder 56 drives the push knife 46 to reset, and the first hydraulic cylinder 45 drives the slider 43 and the ejector rod 44 to rise synchronously to eject the chip column 1 from the positioning hole 41. The two limit plates 54 are respectively fitted with the pressure sensor 53 and the support block 51. Then the second hydraulic cylinder 56 drives the two limit plates 54, the three limit columns 55, the pressure sensor 53, the support block 51 and the push knife 46 to slide synchronously to push the detected chip column 1 to the discharge port 21 and drop it into the collection cabinet 2.

[0038] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A device for detecting the shear resistance of a gallium arsenide chip, comprising a chip column (1), a collection cabinet (2), a conveyor (3) and a positioning table (4), characterized in that: The conveyor (3) is installed at the top of the collection cabinet (2) and is used to convey the chip column (1). The positioning table (4) is installed at the top of the collection cabinet (2) and is used to position the chip column (1). A support frame (6) is provided at the top of the collection cabinet (2). The support frame (6) is arranged in an "8" shape. A position adjustment component for transferring the chip column (1) is provided inside the support frame (6). A positioning hole (41) matching the chip column (1) is provided at the top of the positioning table (4). An ejection hole (42) is provided at the bottom of the positioning table (4). The ejection hole (42) and the positioning hole (41) are coaxially arranged. An ejection mechanism for ejecting the chip column (1) is provided inside the ejection hole (42). A push knife (46) is slidably installed at the top of the positioning table (4). A groove (47) is provided at the top of the positioning table (4). A force measuring component for detecting the shear resistance of the chip column (1) is provided inside the groove (47). The position adjustment component includes a lifting plate (61) and a limiting shaft (63). A third hydraulic cylinder (62) is fixedly installed on the top wall of the support frame (6). The piston rod of the third hydraulic cylinder (62) penetrates through the support frame (6) and is fixedly connected to the bottom end of the lifting plate (61). The limiting shaft (63) is rotatably connected to the lifting plate (61). The limiting shaft (63) penetrates through the upper two horizontal sections of the support frame (6). A support plate (64) is fixedly installed at the bottom end of the limiting shaft (63). Three-jaw chucks (65) for clamping the chip column (1) are provided at both ends of the support plate (64). A driving component for driving the limiting shaft (63) to rotate is provided at the top of the middle horizontal section of the support frame (6). The chip column (1) includes a chip body (11) and a base plate (12) which are fixedly connected. Glue columns (13) are pre-poured outside the chip body (11) and the base plate (12). One side of the chip body (11) is exposed outside the glue column (13). The bottom end of the push knife (46) is flush with the bottom end of the chip body (11). The force measuring component includes a support block (51) and a pressure sensor (53). The support block (51) is fixedly installed at the bottom end of the push knife (46). The support block (51) is located inside the groove (47). A receiving groove (52) is provided on the side of the support block (51) away from the chip column (1). The pressure sensor (53) is located inside the receiving groove (52). The thickness of the pressure sensor (53) is greater than the depth of the receiving groove (52). Limiting plates (54) are movably provided on both opposite sides of the support block (51). Three limiting columns (55) are fixedly installed between the two limiting plates (54). The limiting columns (55) penetrate through and are slidably connected to the support block (51). The two limiting plates (54) are respectively in contact with the pressure sensor (53) and the support block (51).

2. A gallium arsenide chip anti-shear force detection device according to claim 1, characterized in that: The ejection mechanism comprises a slider (43), the slider (43) is slidably mounted in the ejection hole (42), an ejection rod (44) is fixedly mounted on the top end of the slider (43), the ejection rod (44) penetrates and is slidably connected to the positioning platform (4), a first hydraulic cylinder (45) is mounted on the top wall of the collection cabinet (2), and the top end of the piston rod of the first hydraulic cylinder (45) is fixedly connected to the bottom end of the slider (43).

3. A gallium arsenide chip anti-shear force detection device according to claim 1, characterized in that: A second hydraulic cylinder (56) is provided on one side of the positioning platform (4), the end of the piston rod of the second hydraulic cylinder (56) is located in the groove (47), and the top end of the piston rod of the second hydraulic cylinder (56) is fixedly connected to the adjacent limit plate (54).

4. A gallium arsenide chip anti-shear force detection device according to claim 1, characterized in that: A material discharge port (21) is provided at the top of the collection cabinet (2), and the material discharge port (21) is located on a side of the positioning platform (4) close to the conveyor (3).

5. The device for detecting the shear resistance of a gallium arsenide chip according to claim 1, characterized in that: A through hole matching the limiting shaft (63) is provided at the top end of the lifting plate (61), and a bearing matching the limiting shaft (63) is provided in the through hole of the lifting plate (61).

6. A gallium arsenide chip anti-shear force detection device according to claim 1, characterized in that: The driving assembly comprises a first pulley (71) and a second pulley (72), the first pulley (71) being key-connected to a limit shaft (63), a support seat (73) being clamped at the top end of a middle horizontal section of the support frame (6), the support seat (73) being rotationally connected to the first pulley (71), a synchronous belt (74) being arranged between the first pulley (71) and the second pulley (72), a servo motor (75) being key-connected to the output shaft of the servo motor (75) being key-connected to the second pulley (72) at the bottom end of the middle horizontal section of the support frame (6).

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