A pressure head assembly structure for hot pressing sintering equipment

Abstract

The present invention discloses a pressure head assembly structure for hot pressing and sintering equipment, a pre-tightening component, which is arranged between the pressure head and the pressure head fixing plate, and the pre-tightening component at least includes an elastic member that can tighten the vertical distance between the pressure head and the pressure head fixing plate; an adjustment component, which is arranged between the pressure head and the pressure head fixing plate, and the adjustment component at least includes three non-collinear limit members. The present invention sets a pre-tightening component and an adjustment component on the pressure head and the pressure head fixing plate, and the tensioning force of the elastic member reduces the gap between the thread and the screw thread during the assembly and adjustment process of the pressure head, thereby preventing the flatness adjustment from failing due to the screw thread gap; the positions of the three limit members on the pressure head or the pressure head fixing plate are not collinear, thereby preventing the pressure head from rotating relative to the pressure head fixing plate, effectively ensuring that the pressure head is assembled in strict accordance with the assembly angle control requirements, and avoiding the pressure head from damaging the chip during crimping due to assembly errors.

Description

Technical Field

[0001] The invention belongs to the technical field of nano-silver sintering equipment, and in particular relates to a pressure head assembly structure of hot pressing sintering equipment. Background Art

[0002] Nanosilver sintering technology utilizes nanosilver paste at relatively low temperatures, with or without pressure, to achieve high-temperature resistant packaging and connection. The sintering temperature is far below the melting point of bulk silver. The organic components in the nanosilver paste decompose and volatilize during the sintering process, ultimately forming a silver connection layer. Nanosilver sintered joints meet the low-temperature interconnect requirements and high-temperature performance of third-generation semiconductor power module packaging, and are already widely used in power device manufacturing.

[0003] The present invention is used to adjust the flatness of the pressure head of a pressurized nanosilver sintering device. The pressurized nanosilver sintering device has extremely high requirements for the flatness of the pressure head. Due to errors in parts processing and equipment assembly, the flatness of the equipment pressure head cannot meet the flatness requirements of the equipment. Unqualified flatness often affects the quality of sintering. Uneven force during crimping can cause chip floating, chip cracking, and other phenomena, thereby producing defective products and affecting the product qualification rate.

[0004] In view of this, the present invention is proposed. Summary of the Invention

[0005] The present invention provides a pressure head assembly structure for hot pressing and sintering equipment. By arranging a pre-tightening component and an adjustment component on the pressure head and the pressure head fixing plate, the tensioning force of the elastic component ensures that the pressure head will not be displaced downward due to gravity during the assembly and adjustment process, which will cause the flatness of the entire pressure head to change. This measure reduces the gap between the thread and the screw teeth, and prevents the flatness adjustment from failing due to the screw tooth gap; the positions of the three limit members on the pressure head or the pressure head fixing plate are not collinear, which prevents the pressure head from rotating relative to the pressure head fixing plate, effectively ensuring that the pressure head is assembled in strict accordance with the assembly angle control requirements, and avoiding damage to the chip during crimping due to assembly errors.

[0006] To solve the above technical problems, the basic concept of the technical solution adopted by the present invention is: a pressure head assembly structure of hot pressing and sintering equipment, including a pressure head and a pressure head fixing plate, wherein the pressure head is connected to the bottom of the pressure head fixing plate, and includes a pre-tightening component arranged between the pressure head and the pressure head fixing plate, wherein the pre-tightening component includes at least an elastic member capable of tensioning the vertical distance between the pressure head and the pressure head fixing plate, so as to prevent the pressure head from being displaced in the vertical direction relative to the pressure head fixing plate;

[0007] The adjustment component is arranged between the pressure head and the pressure head fixing plate. The adjustment component includes at least three non-collinear limiting members for preventing the pressure head from being displaced relative to the bottom of the pressure head fixing plate.

[0008] Furthermore, there are multiple elastic members, which are symmetrically distributed at least at four corners between the pressure head and the pressure head fixing plate.

[0009] Furthermore, the elastic member is a mold spring, and the pre-tightening assembly also includes a fixing screw, which passes through the mold spring, the pressure head fixing plate and the pressure head in sequence, and is used to fix the pressure head on the pressure head fixing plate.

[0010] Furthermore, the three limiting members are connected in sequence from head to tail on the pressure head or the pressure head fixing plate to form a triangle;

[0011] Preferably, the enclosed triangle is an isosceles triangle or an equilateral triangle.

[0012] Furthermore, the side walls of the pressure head and the pressure head fixing plate opposite to each other are provided with limiting grooves whose positions match those of the limiting members;

[0013] The limiting component includes an adjusting screw and a nut. The adjusting screw passes through the nut, the pressure head fixing plate and the pressure head in sequence, and the end of the adjusting screw extends into the limiting groove.

[0014] Furthermore, the end of the adjusting screw is in the shape of a ball head, and the groove wall of the limiting groove is in the shape of an arc.

[0015] Furthermore, each of the limiting grooves extends outward from the plate surface of the pressure head to form a strip shape, and the extension line of one limiting groove is located on the perpendicular midline of the connection line of the other two limiting grooves.

[0016] Furthermore, a gasket is sleeved on the outside of the adjusting screw, and the gasket is located between the nut and the pressure head fixing plate.

[0017] After adopting the above technical solution, the present invention has the following beneficial effects compared with the prior art:

[0018] 1. The present invention sets a pre-tightening component and an adjustment component on the pressure head and the pressure head fixing plate. The tensioning force of the elastic member reduces the gap between the thread and the screw thread during the assembly and adjustment process of the pressure head, thereby preventing the flatness adjustment from failing due to the screw thread gap; the positions of the three limit members on the pressure head or the pressure head fixing plate are not collinear, thereby preventing the pressure head from rotating relative to the pressure head fixing plate, effectively ensuring that the pressure head is assembled in strict accordance with the assembly angle control requirements, and avoiding damage to the chip during crimping due to assembly errors.

[0019] 2. The present invention sets three limiting members on the pressure head or the pressure head fixing plate and connects the ends thereof in sequence to form a triangle, so that when the limiting members are connected between the pressure head and the pressure head fixing plate, the pressure head will not be rotated relative to the pressure head fixing plate. Therefore, it can be ensured that the pressure head can meet the assembly angle requirements during the assembly process on the pressure head fixing plate, thereby preventing parts processing errors and ensuring the qualified rate of the chips after crimping.

[0020] 3. The present invention provides limiting grooves on the side walls opposite to the pressure head and the pressure head fixing plate, whose positions match those of the limiting parts. During the process of adjusting the flatness of the pressure head by adjusting the screw, there will be no rotational displacement relative to the pressure head fixing plate, thereby ensuring the angle requirements of its assembly, avoiding parts processing errors, and ensuring the qualified rate of the chips after crimping.

[0021] 4. The present invention sets the end of the adjusting screw to be ball-shaped and the groove wall of the limiting groove to be arc-shaped, so that the adjusting screw can adapt to the irregular or uneven surface of the limiting groove, reduce the friction during the adjustment process, and ensure better contact and adjustment effects.

[0022] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The accompanying drawings are part of the present invention and are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention, but do not constitute an undue limitation of the present invention. Obviously, the drawings described below are only some embodiments. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without inventive effort. In the accompanying drawings:

[0024] Figure 1 Schematic diagram of the assembly structure of the pressure head structure in an embodiment of the present invention;

[0025] Figure 2 Schematic diagram of the perspective structure of the pressure head structure in an embodiment of the present invention;

[0026] Figure 3 Schematic diagram of the exploded structure of the pressure head structure in an embodiment of the present invention.

[0027] Description of the main components in the figure:

[0028] 1. Press head; 11. Limiting groove; 2. Press head fixing plate; 3. Adjustment assembly; 30. Limiting piece; 31. Adjustment screw; 32. Nut; 33. Gasket; 4. Pre-tightening assembly; 41. Fixing screw; 42. Elastic piece; 421. Mold spring.

[0029] It should be noted that these drawings and textual descriptions are not intended to limit the conceptual scope of the present invention in any way, but rather to illustrate the concept of the present invention for those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. The following embodiments are used to illustrate the present invention but are not used to limit the scope of the present invention.

[0031] In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the present invention.

[0032] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; and direct or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0033] like Figures 1 to 3 As shown, the structure of the pressing head 1 of the hot pressing sintering equipment of the present invention includes a pressing head 1 and a pressing head fixing plate 2, wherein the pressing head 1 is connected to the bottom of the pressing head fixing plate 2. The pressing head 1 and the pressing head fixing plate 2 are generally rectangular, and the opposite side walls thereof are flat.

[0034] Theoretically, when the indenter 1 is fixed on the indenter fixing plate 2, the relative planes of the two are set in parallel, but screws are needed to connect during the connection process. During the connection process, on the one hand, the depths of the screw holes of the indenter 1 after tightening are inconsistent, resulting in the relative planes of the indenter 1 and the indenter fixing plate 2 being not parallel, so that the indenter 1 becomes skewed, and the overall flatness cannot meet the crimping requirements, causing the chip to float or break; on the other hand, in the process of passing the screws through the indenter fixing plate 2 and screwing them into the indenter 1, the spiral action will cause a slight rotational displacement of the indenter 1, which will cause the indenter 1 to be unable to be accurately assembled to the preset position, resulting in the chip breaking during crimping.

[0035] In order to solve the problem that the flatness and angle of the above-mentioned pressure head 1 cannot meet the assembly requirements, the following improvements are proposed:

[0036] The present invention includes a pre-tightening component 4 and an adjustment component 3:

[0037] The pre-tightening assembly 4 is arranged between the ram 1 and the ram fixing plate 2, and the pre-tightening assembly 4 at least includes a die spring 421 that can tighten the vertical distance between the ram 1 and the ram fixing plate 2, so as to prevent the ram 1 from being displaced in the vertical direction relative to the ram fixing plate 2;

[0038] The adjustment assembly 3 is arranged between the pressure head 1 and the pressure head fixing plate 2. The adjustment assembly 3 includes at least three non-collinear limit members 30 for preventing the pressure head 1 from being displaced relative to the bottom of the pressure head fixing plate 2.

[0039] In the present invention, when the pressure head 1 is fixed to the pressure head fixing plate 2, screws are generally used for fixation. However, due to the specific structural defects of the connection and fixation between the screw and the threaded hole, there must be a gap between the external thread of the screw and the threaded hole. When assembling the pressure head 1, there is a gap space with slight displacement of the pressure head 1 in the vertical direction. By arranging a mold spring 421 between the pressure head 1 and the pressure head fixing plate 2, the elastic force of the mold spring 421 creates a tension between the pressure head 1 and the pressure head fixing plate 2, so that during the assembly and adjustment process of the pressure head 1, the pressure head 1 will not be displaced downward due to gravity, which will cause the flatness of the entire pressure head 1 to change. At the same time, by reducing the gap between the thread and the thread, the failure of the flatness adjustment due to the thread gap is prevented;

[0040] In addition, by arranging at least three limit members 30 between the pressure head 1 and the pressure head fixing plate 2, wherein the positions of the three limit members 30 on the pressure head 1 or the pressure head fixing plate 2 are not on the same straight line, the three point positions are limited, thereby preventing the pressure head 1 from rotating relative to the bottom plate surface of the pressure head fixing plate 2 due to the rotational action of the rotating screw during the process of adjusting the flatness of the pressure head 1, thereby effectively ensuring that the assembly of the pressure head 1 strictly follows the assembly angle control requirements, and avoiding the pressure head 1 from damaging the chip during crimping due to assembly errors.

[0041] Furthermore, by setting the pre-tightening component 4 and the adjusting component 3, the problem of flatness not meeting assembly requirements due to processing errors of nano-silver sintering equipment parts and equipment assembly errors is effectively solved, and the qualified rate of the products after crimping is effectively guaranteed.

[0042] Furthermore, there are multiple mold springs 421 , which are symmetrically distributed at least at the four corners of the pressing head 1 and the pressing head fixing plate 2 .

[0043] In the present invention, the aforementioned die springs 421 are disposed at or near the four corners between the ram 1 and the ram fixing plate 2, and the die springs 421 are symmetrically arranged in pairs. That is, the multiple die springs 421 in the preload assembly 4 are symmetrically distributed between the ram 1 and the ram fixing plate 2, thereby ensuring that the elastic force acting between the ram 1 and the ram fixing plate 2 is evenly distributed at the four corners, thereby ensuring the flatness of the ram 1 after assembly and the qualified rate of the products after crimping.

[0044] Of course, the number of the mold springs 421 is at least four, and can also be an integer multiple of four, and the assembly positions are symmetrically arranged in pairs.

[0045] Furthermore, the mold spring 421 is an elastic member 42 , and the pre-tightening assembly 4 also includes a fixing screw, which passes through the elastic member 42 , the pressure head fixing plate 2 and the pressure head 1 in sequence, and is used to fix the pressure head 1 on the pressure head fixing plate 2 .

[0046] In the present invention, the mold spring 421 is preferably an elastic member 42 that can deform under pressure to generate tension. Of course, the mold spring 421 can be any component that can generate tension under pressure. When assembling the ram 1 to the ram fixing plate 2, it is necessary to set: four through-holes are provided on the ram fixing plate 2, wherein each through-hole is symmetrically arranged at the four corners of the ram fixing plate 2, and at the same time, first screw holes corresponding to the positions of the through-holes are symmetrically provided on the ram 1. The fixing screw 41 is passed through the elastic member 42 and the through-hole of the pressure head fixing plate 2 to the first screw hole of the pressure head 1 in sequence. By tightening the fixing screw 41, the elastic member 42 generates tensioning force, and the pressure head 1 is pre-fixed on the pressure head fixing plate 2. Due to the cooperation of the various components in the entire pre-tightening assembly 4, the elastic member 42 is deformed, which eliminates the gap between the thread of the fixing screw 41 and the first screw hole, thereby preliminarily ensuring that the pressure head 1 will not have vertical displacement relative to the pressure head fixing plate 2 due to gravity, thereby ensuring the flatness of the pressure head 1.

[0047] Furthermore, the three limiting members 30 on the pressure head 1 or the pressure head fixing plate 2 are connected in sequence from head to tail to form a triangle;

[0048] Preferably, the enclosed triangle is an isosceles triangle or an equilateral triangle.

[0049] In the present invention, the three stoppers 30 are located on opposing side walls of the ram 1 and the ram fixing plate 2, with the three stoppers 30 formed in a triangular shape by connecting the end points of the three stoppers 30. More preferably, the triangle formed by the three stoppers 30 on the surface of the ram 1 or the ram fixing plate 2 is an isosceles triangle or an equilateral triangle, and the area enclosed by the triangular shape is located at the exact center of the ram 1 or the ram fixing plate 2.

[0050] By limiting the specific positions of the three limiting members 30, when the limiting members 30 are connected between the ram 1 and the ram fixing plate 2, the ram 1 will not undergo rotational displacement relative to the ram fixing plate 2. This ensures that the ram 1 can meet the assembly angle requirements during assembly on the ram fixing plate 2, thereby preventing part processing errors and ensuring the qualified rate of the chips after crimping.

[0051] Furthermore, the side walls of the pressure head 1 and the pressure head fixing plate 2 opposite to each other are provided with limiting grooves 11 whose positions match those of the limiting members 30;

[0052] The limiting member 30 includes an adjusting screw 31 and a nut 32 . The adjusting screw 31 passes through the nut 32 , the pressure head fixing plate 2 , and the pressure head 1 in sequence. The end of the adjusting screw 31 extends into the limiting groove 11 .

[0053] In the present invention, a limiting groove 11 corresponding to the limiting member 30 is provided on the side wall of the ram 1 relative to the ram fixing plate 2, wherein the limiting groove 11 extends downward from at least the end surface of the ram 1 to a certain depth. In order to achieve precise adjustment of the flatness of the ram 1 after pre-assembly on the ram fixing plate 2, a corresponding arrangement is required: a second screw hole is provided through the ram fixing plate 2 at a position corresponding to the limiting member 30. After the adjusting screw 31 is screwed into the pressure head fixing plate 2 and continues to extend downward until it reaches the limiting groove 11 of the pressure head 1, at least three adjusting screws 31 are extended into the corresponding limiting groove 11 on the pressure head 1, and the fine adjustment is performed by subsequently rotating the adjusting screw 31, so as to accurately adjust the flatness of the pressure head 1. Due to the cooperation between the three adjusting screws 31 and the limiting groove 11, there will be no rotational displacement relative to the pressure head fixing plate 2 during the process of adjusting the flatness of the pressure head 1 by the adjusting screw 31, thereby ensuring the angle requirements of the assembly, preventing parts processing errors, and ensuring the qualified rate of the chip after crimping.

[0054] Specifically, after the adjustment screw 31 is adjusted, the external thread of the adjustment screw 31 remains exposed on the upper surface of the indenter fixing plate 2. At this point, the screw thread is connected to the adjustment screw 31, thus completing the locking operation of the adjustment screw 31 after the precise adjustment of the flatness of the indenter 1, ensuring that the indenter 1 will not move relative to the indenter fixing plate 2 after adjustment.

[0055] Furthermore, the end of the adjusting screw 31 is in the shape of a ball head, and the groove wall of the limiting groove 11 is in the shape of an arc.

[0056] In the present invention, the end of the adjustment screw 31 is rounded, resulting in a spherical head-shaped head. Of course, the retaining groove 11 that matches the adjustment screw 31 preferably has an arc-shaped wall that partially or completely fits the outer wall of the spherical head. Since the head of the adjustment screw 31 engages with the retaining groove 11 during the screwing process, the adjustment screw 31 ensures that the pressure head 1 does not rotate relative to the pressure head fixing plate 2 during the flatness adjustment process. This satisfies the angle requirements for the assembly of the pressure head 1, thereby resolving part processing errors and ensuring the qualified rate of the crimped products.

[0057] It should be noted that the ball-shaped configuration of the adjustment screw 31 can adapt to the irregular or uneven surface of the limiting groove 11, reducing the friction during the adjustment process, thereby providing better contact and adjustment effects.

[0058] At the same time, it should also be noted that after the adjustment of the screw 31 is completed, in order to understand the flatness between the pressure head 1 and the pressure head fixing plate 2, an ink pad or an imprint test paper can be set on the lower mold in the hot pressing sintering equipment. By observing the depth of the imprint mark, it is possible to intuitively judge which position of the pressure head 1 is uneven, and then timely re-adjustment can be made.

[0059] Furthermore, each of the limiting grooves 11 extends outward from the plate surface of the pressure head 1 to form a strip shape, and the extension line of one limiting groove 11 is located on the mid-perpendicular line connecting the other two limiting grooves 11.

[0060] In the present invention, each limiting groove 11 is formed on the central plate surface of the pressure head 1 through milling or other processing techniques such as pressing, forming a strip-like structure extending from the center of the pressure head 1 to its edge. The extension line of one limiting groove 11 on the plate surface of the pressure head 1 is located on the mid-perpendicular line connecting the other two limiting grooves 11. This perpendicular relationship more effectively limits the plane rotation displacement of the pressure head 1 relative to the pressure head fixing plate 2 during the adjustment process. That is, during the adjustment process, the adjustment screw is limited by the mutually perpendicular limiting grooves 11 to prevent displacement in the X / Y plane direction.

[0061] Furthermore, a washer 33 is sleeved on the outside of the adjusting screw 31 , and the washer 33 is located between the nut 32 and the pressure head fixing plate 2 .

[0062] In the present invention, after the adjusting screw 31 has completed the action of adjusting the flatness of the pressure head 1, a gasket 33 is sleeved on the outside of the adjusting screw 31, and then the nut 32 is threadedly connected to the external thread of the adjusting screw 31. Thus, the setting of the gasket 33 can effectively prevent the nut 32 from loosening, thereby avoiding the displacement of the plane of the pressure head 1 after the adjustment is completed, and further affecting its flatness.

[0063] The above description is merely a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any technician familiar with this patent can make some changes or modifications to equivalent embodiments using the above technical content without departing from the scope of the technical solution of the present invention. The implementation schemes in the above embodiments can be further combined or replaced. However, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the solution of the present invention.

Claims

1. A pressure head assembly structure for hot pressing sintering equipment, comprising a pressure head and a pressure head fixing plate, wherein the pressure head is connected to the bottom of the pressure head fixing plate, characterized in that: include, A pre-tightening assembly is provided between the pressure head and the pressure head fixing plate, and the pre-tightening assembly includes at least an elastic member capable of tightening the vertical distance between the pressure head and the pressure head fixing plate, so as to prevent the pressure head from being displaced in the vertical direction relative to the pressure head fixing plate; The adjustment component is arranged between the pressure head and the pressure head fixing plate. The adjustment component includes at least three non-collinear limiting members for preventing the pressure head from being displaced relative to the bottom of the pressure head fixing plate.

2. The pressure head assembly structure of the hot pressing sintering equipment according to claim 1, characterized in that: There are multiple elastic members, which are symmetrically distributed at least at four corners between the pressure head and the pressure head fixing plate.

3. The pressure head assembly structure of the hot pressing sintering equipment according to claim 2, characterized in that: The elastic member is a mold spring, and the pre-tightening assembly further includes a fixing screw, which passes through the mold spring, the pressure head fixing plate and the pressure head in sequence, and is used to fix the pressure head on the pressure head fixing plate.

4. A pressing head assembly structure for hot pressing sintering equipment according to any one of claims 1 to 3, characterized in that: The three limiting members are connected in sequence from head to tail on the pressure head or the pressure head fixing plate to form a triangle.

5. The pressure head assembly structure of the hot pressing sintering equipment according to claim 4, characterized in that: The enclosed triangle is an isosceles triangle or an equilateral triangle.

6. The pressure head assembly structure of the hot pressing sintering equipment according to claim 5, characterized in that: The side walls of the pressure head and the pressure head fixing plate opposite to each other are provided with limiting grooves whose positions match those of the limiting members; The limiting component includes an adjusting screw and a nut. The adjusting screw passes through the nut and the pressure head fixing plate in sequence, and the end of the adjusting screw extends into the limiting groove.

7. The pressure head assembly structure of the hot pressing sintering equipment according to claim 6, characterized in that: The end of the adjusting screw is in the shape of a ball head, and the groove wall of the limiting groove is in the shape of an arc.

8. The pressure head assembly structure of the hot pressing sintering equipment according to claim 7, characterized in that: Each of the limiting grooves extends outward from the plate surface of the pressure head to form a strip shape, and the extension line of one limiting groove is located on the mid-perpendicular line connecting the other two limiting grooves.

9. The pressure head assembly structure of the hot pressing sintering equipment according to claim 8, characterized in that: A gasket is also sleeved on the outside of the adjusting screw, and the gasket is located between the nut and the pressure head fixing plate.

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