A dual seal door system with a door locking mechanism

Abstract

The present application relates to the technical field of vacuum chamber and transport container docking of nuclear fusion, a double-sealing door system with door locking mechanism, comprising: a door locking mechanism; the door locking mechanism comprises: a door locking pin and a driving link; two ends of the driving link are respectively rotatably connected to the door locking pin and a transport container latch; the door locking pin is rotatably installed to a transport container door; the door locking pin has a locking rotation position for locking the transport container door and a vacuum chamber door as a whole and an unlocking rotation position for unlocking to allow the transport container door and the vacuum chamber door to separate; when the transport container latch moves from the locking position to the unlocking position, the door locking pin is driven by the driving link to move from the unlocking rotation position to the locking rotation position.The beneficial effects of the present application are: the door locking mechanism automatically realizes the unlocking of the transport container door and the vacuum chamber door in the process of locking the transport container door; and automatically realizes the locking of the transport container door and the vacuum chamber door in the process of unlocking the transport container door.

Description

Technical Field

[0001] This invention relates to the technical field of docking vacuum chambers and transfer containers in nuclear fusion, and specifically to a double-sealed door system with a door locking mechanism. Background Technology

[0002] During the installation and maintenance of nuclear fusion equipment, remote control is used to prevent radiation hazards to the health of operators, ensuring that they are not directly exposed to radiation. Current technology primarily involves docking a transfer container with a vacuum chamber, using robots to move materials between the two.

[0003] The docking of double-sealed doors is an important research direction. Summary of the Invention

[0004] The purpose of this invention is to provide a double-sealed door system with a door locking mechanism to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A double-sealed door system with a door locking mechanism includes: a transfer container and a vacuum chamber; the transfer container is provided with a transfer container door; the vacuum chamber is provided with a vacuum chamber door; the transfer container door is provided with a transfer container latch for locking the transfer container door; the transfer container latch is slidably mounted to the transfer container door; the transfer container latch has a locked position to prevent the transfer container door from being opened and an unlocked position to allow the transfer container door to be opened; the transfer container latch slides between the locked position and the unlocked position.

[0007] A double-sealed door system with a door locking mechanism further includes: a door locking mechanism; the door locking mechanism includes: a door locking pin and a drive linkage; both ends of the drive linkage are rotatably connected to the door locking pin and a transfer container latch, respectively; the door locking pin is rotatably mounted to the transfer container door; the door locking pin has a locked rotation position that locks the transfer container door and the vacuum chamber door as a whole and an unlocked rotation position that allows the transfer container door and the vacuum chamber door to separate; the door locking pin rotates between the locked rotation position and the unlocked rotation position; when the transfer container latch moves from the locked position to the unlocked position, it drives the door locking pin to move from the unlocked rotation position to the locked rotation position via the drive linkage;

[0008] The vacuum chamber door has a door pin channel for the insertion of the door locking pin; the end of the door locking pin has a locking hook structure; when the door locking pin is in the unlocked rotation position, the door locking pin can pass through the door pin channel.

[0009] When the door lock pin is inserted into the pin channel and the door lock pin is in the locked rotating position, the lock hook structure cooperates with the channel opening of the door pin channel to prevent the door lock pin from being pulled out of the door pin channel, thereby locking the transfer container door and the vacuum chamber door as a whole.

[0010] As a further aspect of the present invention: a sealing cover is provided on the side of the vacuum chamber door away from the transfer container door; the sealing cover is fixed to the vacuum chamber door and covers the door pin channel.

[0011] As a further aspect of the present invention: a channel component is provided on the transfer container door; the channel component forms a door pin channel; the channel component and the sealing cover are jointly fixed to the transfer container door by fastening bolts; sealing rings are provided between the channel component and the transfer container door, and between the channel component and the sealing cover.

[0012] As a further embodiment of the present invention: the lock hook structure is a lock hook block that protrudes radially from the end of the door lock pin.

[0013] As a further aspect of the present invention: the number of locking hook blocks is several; the several locking hook blocks are evenly distributed along the circumference of the door locking pin.

[0014] As a further aspect of the present invention: the vacuum chamber includes: a vacuum chamber flange door frame; the vacuum chamber flange door frame forms a vacuum chamber door opening; the vacuum chamber door closes the vacuum chamber door opening; the transfer container includes: a transfer container flange door frame; the transfer container flange door frame forms a transfer container door opening; the transfer container door closes the transfer container door opening;

[0015] A double-sealed door system with a door locking mechanism further includes a door frame locking mechanism for locking the transfer container door and the vacuum chamber door as a single unit;

[0016] The door frame locking mechanism includes: a door frame locking pin and a door frame locking motor; the door frame locking motor drives the door frame locking pin to rotate; the door frame locking pin is rotatably mounted to the transfer container flange door frame; the door frame locking pin has a door frame locked rotation position that locks the transfer container flange door frame and the vacuum chamber flange door frame as a whole and a door frame unlocked rotation position that allows the transfer container flange door and the vacuum chamber flange door to separate; the door frame locking pin rotates between the door frame locked rotation position and the door frame unlocked rotation position; the vacuum chamber flange door frame forms a door frame pin channel for the door frame locking pin to be inserted; the end of the door frame locking pin forms a door frame pin locking hook structure; when the door frame locking pin is in the door frame unlocked rotation position, the door frame locking pin can pass through the door frame pin channel;

[0017] When the door frame locking pin is inserted into the door frame lock channel and the door frame locking pin is in the door frame locked rotation position, the door frame pin lock hook structure cooperates with the channel opening of the door frame pin channel to prevent the door frame locking pin from being pulled out of the door frame pin channel, thereby locking the transfer container flange door frame and the vacuum chamber flange door frame into a whole.

[0018] As a further embodiment of the present invention: the door frame locking pin has the same door frame pin hook structure as the door locking pin.

[0019] As a further aspect of the present invention: the door frame locking motor drives the door frame locking pin to rotate via gear transmission.

[0020] As a further aspect of the present invention: a transfer container pin guide frame is fixed on the transfer container door for guiding the sliding of the transfer container pin; a rotatable transfer container turntable is installed on the transfer container door; a transfer container drive pin is fixed on the transfer container pin; multiple transfer container track grooves are formed on the transfer container turntable for guiding the movement of the transfer container drive pin; the transfer container drive pin is located in the transfer container track groove; when the transfer container turntable rotates, the multiple transfer container pins are pushed to slide simultaneously through the cooperation of the transfer container track groove and the transfer container drive pin.

[0021] As a further aspect of the present invention: a drive shaft is installed on the transfer container turntable; a vacuum chamber door is provided with a vacuum chamber pin for locking the transfer container door; the vacuum chamber pin is slidably installed on the vacuum chamber door; a vacuum chamber pin guide frame for guiding the sliding of the vacuum chamber pin is fixed on the vacuum chamber door; a rotatable vacuum chamber turntable is installed on the vacuum chamber door; a vacuum chamber drive pin is fixed on the vacuum chamber pin; multiple vacuum chamber track grooves for guiding the movement of the vacuum chamber drive pin are formed on the vacuum chamber turntable; the vacuum chamber drive pin is located in the vacuum chamber track groove; when the vacuum chamber turntable rotates, the multiple vacuum chamber pins are simultaneously pushed to slide through the cooperation of the vacuum chamber track groove and the vacuum chamber drive pin; a drive insertion hole is formed on the vacuum chamber turntable; the drive shaft is inserted into the drive insertion hole, and when the drive shaft rotates, it simultaneously drives the transfer container turntable and the vacuum chamber turntable to rotate.

[0022] Compared with the prior art, the beneficial effects of the present invention are: the door locking mechanism automatically unlocks the transfer container door and the vacuum chamber door during the locking process of the transfer container door; and automatically locks the transfer container door and the vacuum chamber door during the unlocking process of the transfer container door.

[0023] The door locking mechanism locks the transfer container door and the vacuum chamber door as a single unit. During the movement of the transfer container latch, the door locking pin automatically moves; that is, during the locking process between the transfer container door and the transfer container flange frame, the transfer container door and the vacuum chamber door are automatically unlocked; and during the unlocking process between the transfer container door and the transfer container flange frame, the transfer container door and the vacuum chamber door are automatically locked.

[0024] The door frame locking mechanism locks the transfer container flange door frame and the vacuum chamber flange door frame into a single unit.

[0025] A locking and unlocking mechanism for a double-sealed door is provided, which controls the locking and unlocking of the vacuum chamber door by locking and unlocking the transfer container door.

[0026] The vacuum chamber turntable locking mechanism locks and unlocks the turntable based on the movement of the transport container. When the transport container door approaches the vacuum chamber door, the unlocking pin is inserted into the unlocking hole, releasing the vacuum chamber turntable and allowing it to rotate. Rotating the turntable then drives the unlocking pin, unlocking the vacuum chamber door. When the transport container door separates from the vacuum chamber door, the unlocking pin is withdrawn from the unlocking hole, and the sliding pin is reinserted into its locking hole, re-locking the vacuum chamber turntable. The turntable cannot rotate, and the vacuum chamber door remains locked.

[0027] The cooperation between the door opening position limit block and the door locking lever structure allows the door locking lever to be locked in position after the transfer container door moves, thus locking the transfer container turntable and keeping the transfer container pin in the retracted state. Additionally, when the transfer container door moves to engage with the transfer container flange frame, it ensures that the lever drive pin groove aligns with the lever drive pin.

[0028] The sliding door mechanism enables the movement of the transfer container door and the vacuum chamber door.

[0029] Other features and advantages of the present invention will be disclosed in detail in the following detailed description and accompanying drawings. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of a double-sealing door system according to the present invention;

[0031] Figure 2 yes Figure 1 A schematic diagram of the internal structure of a double-sealed door system;

[0032] Figure 3 yes Figure 2 A partially enlarged view of a double-seal door system;

[0033] Figure 4 yes Figure 2 A schematic diagram of the combination of the transfer container door and the transfer container flange frame in a double-sealed door system;

[0034] Figure 5 yes Figure 4 A schematic diagram of the transfer container door with a medium structure, where the dashed locking lever indicates the position of the locking lever after rotation;

[0035] Figure 6 yes Figure 5 A schematic diagram showing the structure after part of it has been removed from the central structure.

[0036] Figure 7 yes Figure 5 Cross-sectional view of the door of the transit container;

[0037] Figure 8 yes Figure 7 Enlarged view of a portion of the structure;

[0038] Figure 9 yes Figure 2 A schematic diagram of a vacuum chamber door in a double-sealed door system;

[0039] Figure 10 yes Figure 9 Cross-sectional view of the door of the medium vacuum chamber;

[0040] Figure 11 yes Figure 10 Enlarged view of a portion of the structure;

[0041] Figure 12 yes Figure 2 A schematic diagram of the door locking mechanism of a double-sealed door system, showing the door locking pin inserted into the door pin channel;

[0042] Figure 13 yes Figure 2 A schematic diagram of the locking mechanism of the door frame of a double-sealed door system, showing the locking of the flange door frame of the transfer container and the flange door frame of the vacuum chamber.

[0043] List of reference numerals: Double-sealed door system 100, transfer container 10, transfer container door 11, transfer container pin 111, transfer container drive pin 1111, transfer container turntable 112, transfer container track groove 1121, drive pin 1122, door opening position limit block 113, transfer container pin guide 114, transfer container flange door frame 12, door frame pin channel 121, vacuum chamber 20, vacuum chamber door 21, vacuum chamber pin 211, vacuum chamber drive pin 2111, vacuum chamber turntable 212, vacuum chamber track groove 2121, drive socket 2122, vacuum chamber pin guide 213, vacuum chamber flange door frame 22, door lock motor 31, door lock lever 32, upper lever 321, lower lever 322, upper lever return spring 32 3. A rocker arm drive pin groove 324, a rocker arm drive screw 33, a rocker arm drive screw nut seat 34, a rocker arm drive pin 341, a door locking mechanism 40, a door locking pin 41, a lock hook structure 411, a drive link 42, a sealing cover 43, a channel component 44, a door pin channel 441, a door frame locking mechanism 50, a door frame locking pin 51, a door frame pin lock hook structure 511, a door frame locking motor 52, a sliding door mechanism 60, a sliding door motor 61, a sliding door drive screw 62, a sliding door drive screw nut 63, a lower rotating wheel 64, a sliding door drive screw nut bracket 65, an upper rotating wheel 651, a track frame 66, a horizontal section 661, an inclined climbing section 662, a vacuum chamber turntable locking mechanism 70, a sliding pin 71, an unlocking hole 711, a sliding pin return spring 72, an unlocking pin 73, and a sliding pin insertion hole 74. Detailed Implementation

[0044] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0045] Please see Figures 1 to 13 In this embodiment of the invention, a double-sealed door system 100 includes a transfer container 10 and a vacuum chamber 20. The transfer container 10 is provided with a transfer container door 11. The vacuum chamber 20 is provided with a vacuum chamber door 21. The transfer container 10 moves along a track to achieve separation and connection with the vacuum chamber 20.

[0046] The transfer container door 11 is provided with a transfer container latch 111 for locking the transfer container door 11. The transfer container latch 111 is slidably installed to the transfer container door 11. The vacuum chamber door 21 is provided with a vacuum chamber latch 211 for locking the transfer container door 11. The vacuum chamber latch 211 is slidably installed to the vacuum chamber door 21.

[0047] Specifically, a transfer container door 11 is fixed with a transfer container pin guide frame 114 for guiding the transfer container pin 111 to slide. A vacuum chamber door 21 is fixed with a vacuum chamber pin guide frame 213 for guiding the vacuum chamber pin 211 to slide.

[0048] In a preferred embodiment, the transfer container door 11 is equipped with a rotatable transfer container turntable 112. A transfer container drive pin 1111 is fixed on the transfer container latch 111. Multiple transfer container track grooves 1121 are formed on the transfer container turntable 112 to guide the movement of the transfer container drive pin 1111. The transfer container drive pin 1111 is located in the transfer container track grooves 1121. When the transfer container turntable 112 rotates, the multiple transfer container latches 111 are simultaneously pushed to slide through the cooperation of the transfer container track grooves 1121 and the transfer container drive pin 1111.

[0049] The vacuum chamber door 21 is equipped with a rotatable vacuum chamber turntable 212. A vacuum chamber drive pin 2111 is fixed on the vacuum chamber latch 211. The vacuum chamber turntable 212 has multiple vacuum chamber track grooves 2121 formed to guide the movement of the vacuum chamber drive pin 2111. The vacuum chamber drive pin 2111 is located in the vacuum chamber track grooves 2121.

[0050] When the vacuum chamber turntable 212 rotates, it cooperates with the vacuum chamber track groove 2121 and the vacuum chamber drive pin 2111 to simultaneously push multiple vacuum chamber pins 211 to slide.

[0051] The transfer container turntable 112 is equipped with a drive shaft 1122. The vacuum chamber turntable 212 is formed with a drive socket 2122.

[0052] The drive shaft 1122 is inserted into the drive socket 2122. When the drive shaft 1122 rotates, it simultaneously drives the transfer container turntable 112 and the vacuum chamber turntable 212 to rotate.

[0053] In one specific implementation, both the transfer container turntable 112 and the vacuum chamber turntable 212 are composed of two halves.

[0054] As a preferred embodiment, a double-sealed door system 100 further includes a vacuum chamber turntable locking mechanism 70 for locking the vacuum chamber turntable 212.

[0055] The vacuum chamber turntable locking mechanism 70 includes a sliding pin 71, a sliding pin return spring 72, and an unlocking pin 73. The vacuum chamber door 21 forms a sliding pin insertion hole 74 for the sliding pin 71 to be inserted. The sliding pin 71 is slidably mounted to the vacuum chamber turntable 212. The sliding pin return spring 72 applies a force to the sliding pin 71, causing it to move towards the sliding pin insertion hole 74.

[0056] The unlocking pin 73 is secured to the transfer container turntable 112. The sliding pin 71 forms an unlocking hole 711 through which the unlocking pin 73 passes. The hole walls of the locking pin 73 and / or the unlocking hole 711 are provided with driving ramps.

[0057] When the unlocking pin 73 is inserted into the unlocking hole 711, the driving inclined surface applies a force to the sliding pin 71 that overcomes the sliding pin return spring 72, pulling the sliding pin 71 out of the sliding pin insertion hole 74. When the unlocking pin 73 is pulled out of the unlocking hole 711, the sliding pin 71 is inserted into the sliding pin insertion hole 74 under the force of the sliding pin return spring 72.

[0058] When the transfer container door 11 is close to the vacuum chamber door 21, the unlocking pin 73 is inserted into the unlocking hole 711. The unlocking pin 73 is used to release the lock of the vacuum chamber turntable 212, thereby allowing the vacuum chamber turntable 212 to rotate. At this time, rotating the vacuum chamber turntable 212 can drive the vacuum chamber pin 211 to move, thereby unlocking the vacuum chamber door 21.

[0059] When the transfer container door 11 separates from the vacuum chamber door 21, the unlocking pin 73 is pulled out from the unlocking hole 711, and the sliding pin 71 is reinserted into the unlocking sliding pin hole 74, thereby re-locking the vacuum chamber turntable 212. The vacuum chamber turntable 212 cannot rotate, and the vacuum chamber door 21 is kept in the locked state.

[0060] The drive shaft 1122 is driven by a motor to rotate. As a preferred embodiment, a double-sealed door system 100 also includes: a door lock motor 31, a door lock lever 32, a lever drive screw 33, and a lever drive screw nut seat 34.

[0061] The rocker arm drive screw nut seat 34 has or is equipped with a rocker arm drive screw nut. The rocker arm drive screw 33 and the rocker arm drive screw nut constitute a screw-nut transmission mechanism. The rocker arm drive screw nut seat 34 has or is equipped with a rocker arm drive pin 341. The door lock rocker arm 32 has a rocker arm drive pin groove 324 for guiding the rocker arm drive pin 341 to slide.

[0062] The rocker arm drive pin 341 slides in the rocker arm drive pin groove 324. The rocker arm drive pin groove 324 is an elongated, waist-shaped groove. The door locking rocker arm 32 is mounted on the drive shaft 1122. The door locking motor 31 drives the rocker arm drive screw 33 to rotate, which in turn drives the rocker arm drive screw nut seat 34 to move along the rocker arm drive screw 33 through the screw nut transmission mechanism. This movement, in turn, through the engagement of the rocker arm drive pin 341 and the rocker arm drive pin groove 324, pushes the door locking rocker arm 32 to rotate the drive shaft 1122.

[0063] In a preferred embodiment, two opening position limiting blocks 113 are fixed on the transfer container door 11. The two opening position limiting blocks 113 form an opening position limiting groove.

[0064] The door locking lever 32 includes an upper lever 321, a lower lever 322, and an upper lever return spring 323. The upper lever 321 is rotatably mounted to the lower lever 322. The upper lever 321 forms a lever drive pin groove 324. The lower lever 322 is mounted on the drive shaft 1122.

[0065] The upper swing arm return spring 323 applies a force to the upper swing arm 321 to move it into the door opening position limiting groove.

[0066] When the transfer container door 11 is closed, the rocker arm drive screw nut seat 34 overcomes the force of the upper rocker arm return spring 323 and abuts against the upper rocker arm 321, pushing the upper rocker arm 321 out of the door opening position limiting groove, so that the door opening position limiting block 113 does not block the movement of the upper rocker arm 321 with the rocker arm drive screw nut seat 34.

[0067] When the transfer container door 11 is in the open state, the upper swing arm 321 is embedded in the door opening position limit groove under the action of the upper swing arm return spring 323 to lock the position of the door locking swing arm 32.

[0068] The cooperation between the door opening position limiting block 113 and the door locking lever 32 structure can lock the position of the door locking lever 32, i.e., lock the position of the transfer container turntable 112, and lock the transfer container pin 111 in the retracted state after the transfer container door 11 moves. In addition, when the transfer container door 11 moves to engage with the transfer container flange door frame 12, it can ensure that the lever drive pin groove 324 and the lever drive pin 341 are aligned.

[0069] A door-closing position limit block is fixed on the transfer container door 11, and the door-closing position limit block is set on the movement path of the door-locking lever 32. When the door-locking lever 32 contacts the door-closing position limit block, the transfer container pin 111 is in the extended state, and the transfer container pin 111 locks the transfer container door 11 and the transfer container flange frame 12 into a whole.

[0070] In a preferred embodiment, the transfer container latch 111 has a locked position to prevent the transfer container door 11 from being opened and an unlocked position to allow the transfer container door 11 to be opened. The transfer container latch 111 slides between the locked position and the unlocked position. A double-sealed door system 100 further includes a door locking mechanism 40. The door locking mechanism 40 includes a door locking pin 41 and a drive linkage 42.

[0071] The two ends of the drive linkage 42 are rotatably connected to the door locking pin 41 and the transfer container latch 111, respectively. The door locking pin 41 is rotatably mounted to the transfer container door 11. The door locking pin 41 has a locked rotation position that locks the transfer container door 11 and the vacuum chamber door 21 as a whole, and an unlocked rotation position that allows the transfer container door 11 and the vacuum chamber door 21 to separate. The door locking pin 41 rotates between the locked rotation position and the unlocked rotation position. When the transfer container latch 111 moves from the locked position to the unlocked position, the drive linkage 42 drives the door locking pin 41 to move from the unlocked rotation position to the locked rotation position.

[0072] The vacuum chamber door 21 has a door pin channel 441 for the insertion of a door locking pin 41. The end of the door locking pin 41 has a locking hook structure 411. When the door locking pin 41 is in the unlocked rotation position, the door locking pin 41 can pass through the door pin channel 441.

[0073] When the door lock pin 41 is inserted into the pin channel and the door lock pin 41 is in the locked rotation position, the lock hook structure 411 cooperates with the channel opening of the door pin channel 441 to prevent the door lock pin 41 from being pulled out of the door pin channel 441, thereby locking the transfer container door 11 and the vacuum chamber door 21 into a whole.

[0074] During the movement of the transfer container latch 111, the door locking pin 41 is automatically moved. That is, during the locking process of the transfer container door 11 and the transfer container flange door frame 12, the transfer container door 11 and the vacuum chamber door 21 are automatically unlocked; during the unlocking process of the transfer container door 11 and the transfer container flange door frame 12, the transfer container door 11 and the vacuum chamber door 21 are automatically locked.

[0075] In one specific implementation, a sealing cover 43 is provided on the side of the vacuum chamber door 21 away from the transfer container door 11. The sealing cover 43 is fixed to the vacuum chamber door 21, covering the door pin channel 441. The locking hook structure 411 is a locking hook block that protrudes radially from the end of the door locking pin 41. There are several locking hook blocks. The several locking hook blocks are evenly distributed along the circumference of the door locking pin 41. In one specific implementation, there are 3 locking hook blocks. In an optional implementation, the number of locking hook blocks can be set to 2 or 4, etc.

[0076] Specifically, the transfer container door 11 is provided with a channel component 44. The channel component 44 forms a door pin channel 441. The channel component 44 and the sealing cover 43 are together fixed to the transfer container door 11 by fastening bolts. Sealing rings are provided between the channel component 44 and the transfer container door 11, and between the channel component 44 and the sealing cover 43.

[0077] In a preferred embodiment, the vacuum chamber 20 includes a vacuum chamber flange frame 22. The vacuum chamber flange frame 22 forms a vacuum chamber door opening. The vacuum chamber door 21 closes the vacuum chamber door opening. The transfer container 10 includes a transfer container flange frame 12. The transfer container flange frame 12 forms a transfer container door opening. The transfer container door 11 closes the transfer container door opening.

[0078] A double-sealed door system 100 further includes a door frame locking mechanism 50 for locking the transfer container flange door frame 12 and the vacuum chamber flange door frame 22 into a single unit.

[0079] The door frame locking mechanism 50 includes a door frame locking pin 51 and a door frame locking motor 52. The door frame locking motor 52 drives the door frame locking pin 51 to rotate. The door frame locking pin 51 is rotatably mounted to the transfer container flange door frame 12. The door frame locking pin 51 has a door frame locking rotation position that locks the transfer container flange door frame 12 and the vacuum chamber flange door frame 22 into a single unit, and a door frame unlocking rotation position that allows the transfer container 10 flange door and the vacuum chamber 20 flange door to separate.

[0080] The door frame locking pin 51 rotates between the door frame locked rotation position and the door frame unlocked rotation position. The vacuum chamber flange door frame 22 has a door frame pin channel 121 for the insertion of the door frame locking pin 51. The end of the door frame locking pin 51 has a door frame pin hook structure 511.

[0081] When the door frame locking pin 51 is in the door frame unlocked rotation position, the door frame locking pin 51 can pass through the door frame pin channel 121.

[0082] When the door frame locking pin 51 is inserted into the door frame lock channel and the door frame locking pin 51 is in the door frame locked rotation position, the door frame pin lock hook structure 511 cooperates with the channel opening of the door frame pin channel 121 to prevent the door frame locking pin 51 from being pulled out of the door frame pin channel 121, thereby locking the transfer container flange door frame 12 and the vacuum chamber flange door frame 22 into a whole.

[0083] The door frame locking mechanism 50 can lock and unlock the transfer container flange door frame 12 and the vacuum chamber flange door frame 22.

[0084] The door frame locking pin 51 has the same door frame pin hook structure 511 as the door frame locking pin 41. The door frame locking motor 52 drives the door frame locking pin 51 to rotate via gear transmission. Specifically, the door frame locking pin 51 is equipped with a bevel gear. The door frame locking motor 52 drives the door frame locking pin 51 to rotate via the bevel gear transmission. Belt transmission or other transmission methods can be configured as needed.

[0085] In a preferred embodiment, the vacuum chamber door 21 and the transfer container door 11 are combined into a single unit to form a sealed door assembly.

[0086] A double-sealed door system 100 further includes a sliding door mechanism 60 for moving the sealed door assembly to open the door.

[0087] The sliding door mechanism 60 includes: a sliding door motor 61, a sliding door drive screw 62, a sliding door drive screw nut 63, a lower rotating wheel 64, a sliding door drive screw nut bracket 65, and a track frame 66. The sliding door drive screw nut bracket 65 is rotatably mounted to the upper end of the transfer container door 11. The lower rotating wheel 64 is rotatably mounted to the lower end of the transfer container door 11. The sliding door motor 61 is rotatably mounted to the transfer container 10. The sliding door motor 61 drives the sliding door drive screw 62 to rotate. The sliding door drive screw 62 and the sliding door drive screw nut 63 constitute a screw-nut transmission mechanism. The sliding door drive screw nut 63 is mounted to the sliding door drive screw nut bracket 65. The track frame 66 is mounted to the transfer container 10. The lower rotating wheel 64 moves along the track frame 66.

[0088] When the sliding door motor 61 drives the sliding door drive screw 62 to rotate, it drives the sliding door drive screw nut frame 65 to move along the sliding door drive screw 62 through the screw nut transmission mechanism, which in turn drags the lower rotating wheel 64 to move along the track frame 66.

[0089] In a preferred embodiment, an upper rotating wheel 651 is provided on the sliding door drive screw nut bracket 65. The upper rotating wheel 651 is rotatably mounted to the sliding door drive screw nut bracket 65. When the upper rotating wheel 651 contacts the track frame 66, it moves along the track frame 66.

[0090] In one specific implementation, the track frame 66 includes a horizontal section 661 and an inclined climbing section 662. The horizontal section 661 supports the upper rotating wheel 651. The lower rotating wheel 64 climbs along the inclined climbing section 662. When the sliding door motor 61 drives the sliding door drive screw 62 to rotate, the screw nut transmission mechanism drives the sliding door drive screw nut frame 65 to move along the sliding door drive screw 62 until the upper rotating wheel 651 contacts the track frame 66. At this time, as the sliding door drive screw nut frame 65 continues to move along the sliding door drive screw 62, the upper rotating wheel 651 moves along the track frame 66 and is supported by the track frame 66.

[0091] Both the transfer container pin 111 and the vacuum chamber pin 211 consist of two sections connected by double-headed bolts. The length is adjustable through the connection of the double-headed bolts, which facilitates assembly and adjustment.

[0092] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0093] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A double-sealed door system (100) with a door locking mechanism (40), comprising: Transfer container (10) and vacuum chamber (20); The transfer container (10) is provided with a transfer container door (11); the vacuum chamber (20) is provided with a vacuum chamber door (21); the transfer container door (11) is provided with a transfer container latch (111) for locking the transfer container door (11); the transfer container latch (111) is slidably installed to the transfer container door (11); the transfer container latch (111) has a locking position to prevent the transfer container door (11) from being opened and an unlocking position to allow the transfer container door (11) to be opened; the transfer container latch (111) slides between the locking position and the unlocking position; The double-sealed door system (100) with a door locking mechanism (40) is characterized in that it further includes: the door locking mechanism (40); The door locking mechanism (40) includes: a door locking pin (41) and a drive link (42); both ends of the drive link (42) are rotatably connected to the door locking pin (41) and the transfer container pin (111), respectively; the door locking pin (41) is rotatably mounted to the transfer container door (11); the door locking pin (41) has a locking rotation position that locks the transfer container door (11) and the vacuum chamber door (21) into a whole and an unlocking rotation position that allows the transfer container door (11) and the vacuum chamber door (21) to separate; the door locking pin (41) rotates between the locking rotation position and the unlocking rotation position; when the transfer container pin (111) moves from the locking position to the unlocking position, the drive link (42) drives the door locking pin (41) to move from the unlocking rotation position to the locking rotation position; The vacuum chamber door (21) has a door pin channel (441) for the door locking pin (41) to be inserted; the end of the door locking pin (41) has a locking hook structure (411); when the door locking pin (41) is in the unlocked rotation position, the door locking pin (41) can pass through the door pin channel (441); When the door locking pin (41) is inserted into the pin channel and the door locking pin (41) is in the locked rotation position, the lock hook structure (411) cooperates with the channel opening of the door pin channel (441) to prevent the door locking pin (41) from being pulled out of the door pin channel (441), thereby locking the transfer container door (11) and the vacuum chamber door (21) into a whole.

2. A double-sealed door system (100) with a door locking mechanism (40) according to claim 1, characterized in that, The vacuum chamber door (21) is provided with a sealing cover (43) on the side away from the transfer container door (11); the sealing cover (43) is fixed to the vacuum chamber door (21) and covers the door pin channel (441).

3. A double-sealed door system (100) with a door locking mechanism (40) according to claim 2, characterized in that, The transfer container door (11) is provided with a channel component (44); the channel component (44) forms the door pin channel (441); the channel component (44) and the sealing cover (43) are together fixed to the transfer container door (11) by fastening bolts; sealing rings are provided between the channel component (44) and the transfer container door (11) and between the channel component (44) and the sealing cover (43).

4. A double-sealed door system (100) with a door locking mechanism (40) according to claim 1, characterized in that, The lock hook structure (411) is a lock hook block that protrudes radially from the end of the door lock pin (41).

5. A double-sealed door system (100) with a door locking mechanism (40) according to claim 4, characterized in that, The number of the locking hook blocks is several; the several locking hook blocks are evenly distributed along the circumference of the door locking pin (41).

6. A double-sealed door system (100) with a door locking mechanism (40) according to claim 1, characterized in that, The vacuum chamber (20) includes: a vacuum chamber flange door frame (22); the vacuum chamber flange door frame (22) forms a vacuum chamber door opening; the vacuum chamber door (21) closes the vacuum chamber door opening; the transfer container (10) includes: a transfer container flange door frame (12); the transfer container flange door frame (12) forms a transfer container door opening; the transfer container door (11) closes the transfer container door opening; The double-sealed door system (100) with a door locking mechanism (40) further includes: a door frame locking mechanism (50) for locking the transfer container flange door frame (12) and the vacuum chamber flange door frame (22) into a whole; the door frame locking mechanism (50) includes: a door frame locking pin (51) and a door frame locking motor (52); the door frame locking motor (52) drives the door frame locking pin (51) to rotate; the door frame locking pin (51) is rotatably installed to the transfer container flange door frame (12); The door frame locking pin (51) has a door frame locking rotation position that locks the transfer container flange door frame (12) and the vacuum chamber flange door frame (22) into a whole, and a door frame unlocking rotation position that allows the transfer container (10) flange door and the vacuum chamber (20) flange door to be separated; the door frame locking pin (51) rotates between the door frame locking rotation position and the door frame unlocking rotation position; the vacuum chamber flange door frame (22) is formed with a door frame pin channel (121) for the door frame locking pin (51) to be inserted; the end of the door frame locking pin (51) is formed with a door frame pin hook structure (511); when the door frame locking pin (51) is in the door frame unlocking rotation position, the door frame locking pin (51) can pass through the door frame pin channel (121); When the door frame locking pin (51) is inserted into the door frame locking channel and the door frame locking pin (51) is in the door frame locking rotation position, the door frame pin hook structure (511) cooperates with the channel opening of the door frame pin channel (121) to prevent the door frame locking pin (51) from being pulled out of the door frame pin channel (121), thereby locking the transfer container flange door frame (12) and the vacuum chamber flange door frame (22) into a whole.

7. A double-sealed door system (100) with a door locking mechanism (40) according to claim 6, characterized in that, The door frame locking pin (51) has the same door frame pin hook structure (511) as the door locking pin (41).

8. A double-sealed door system (100) with a door locking mechanism (40) according to claim 6, characterized in that, The door frame locking motor (52) drives the door frame locking pin (51) to rotate via gear transmission.

9. A double-sealed door system (100) with a door locking mechanism (40) according to claim 1, characterized in that, The transfer container door (11) is fixed with a transfer container pin guide frame (114) for guiding the transfer container pin (111) to slide; the transfer container door (11) is equipped with a rotatable transfer container turntable (112); a transfer container drive pin (1111) is fixed on the transfer container pin (111); a plurality of transfer container track grooves (1121) are formed on the transfer container turntable (112) for guiding the movement of the transfer container drive pin (1111); the transfer container drive pin (1111) is located in the transfer container track groove (1121); when the transfer container turntable (112) rotates, the multiple transfer container pins (111) are pushed to slide simultaneously through the cooperation of the transfer container track groove (1121) and the transfer container drive pin (1111).

10. A double-sealed door system (100) with a door locking mechanism (40) according to claim 9, characterized in that, The transfer container turntable (112) is equipped with a drive shaft (1122); the vacuum chamber door (21) is provided with a vacuum chamber pin (211) for locking the transfer container door (11); the vacuum chamber pin (211) is slidably installed on the vacuum chamber door (21); a vacuum chamber pin guide bracket (213) is fixed on the vacuum chamber door (21) for guiding the sliding of the vacuum chamber pin (211); the vacuum chamber door (21) is equipped with a rotatable vacuum chamber turntable (212); the vacuum chamber pin (212) is slidably installed on the vacuum chamber door (212); the vacuum chamber pin (212) is slidably installed on the vacuum chamber door (212) for locking the vacuum chamber door (1 ... 11) A vacuum chamber drive pin (2111) is fixed on the vacuum chamber turntable (212); a plurality of vacuum chamber track grooves (2121) are formed on the vacuum chamber turntable (212) for guiding the movement of the vacuum chamber drive pin (2111); the vacuum chamber drive pin (2111) is located in the vacuum chamber track groove (2121); when the vacuum chamber turntable (212) rotates, the vacuum chamber track groove (2121) and the vacuum chamber drive pin (2111) cooperate to push the plurality of vacuum chamber pins (2111) to slide simultaneously; The vacuum chamber turntable (212) has a drive insertion hole (2122); the drive insertion shaft (1122) is inserted into the drive insertion hole (2122), and when the drive insertion shaft (1122) rotates, it simultaneously drives the transfer container turntable (112) and the vacuum chamber turntable (212) to rotate.

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