An air handling device for laser direct imaging lithography equipment

Abstract

An air treatment device for laser direct imaging lithography equipment comprises a filter component, a temperature control and dehumidification component, and a fan component arranged in sequence from the outside to the inside. Operation of the fan component forms a positive pressure inside the air treatment device, and external air is sequentially drawn into the filter component and the temperature control and dehumidification component under the action of the air pressure difference to achieve cleanliness, temperature control, and dehumidification. The device comprises an air return port, which is located at the bottom of the filter component and can promote the circulation and replacement of air inside the laser direct imaging lithography equipment and the air inside the air treatment device. The device comprises a thermal insulation component, which is located outside the temperature control and dehumidification component and can achieve thermal insulation for the temperature control and dehumidification component. The present invention can integrate temperature, humidity, and cleanliness control functions, has a reasonable arrangement, and can operate efficiently, thereby ensuring the safe, reliable, and stable operation of the laser direct imaging lithography equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of laser direct imaging lithography equipment, in particular to an air processing device applied to laser direct imaging lithography equipment. Background Art

[0002] Laser direct imaging (LDI) is a key technology in PCB manufacturing. Compared to traditional exposure techniques, LDI offers higher imaging quality, making it particularly suitable for mid- to high-end PCB manufacturing. LDI uses a computer-controlled laser beam to create an image directly on a substrate coated with a photosensitive material, eliminating the need for film during the exposure process, saving time and costs while also minimizing deviations caused by film expansion and contraction.

[0003] Correspondingly, the laser direct imaging lithography equipment used to utilize the laser direct imaging (LDI) technology is a high-precision and high-precision equipment. In order to ensure the stability of operation, the internal and external temperature, humidity and cleanliness of such high-precision and high-precision equipment need to be controlled at a stable value.

[0004] At present, independent external devices are generally used in the market to supply air to the laser direct imaging lithography equipment through air ducts, thereby achieving the effect of cooling and controlling the temperature of the laser direct imaging lithography equipment. Secondly, there are also multiple components installed inside the laser direct writing equipment to achieve the effect of temperature control of the laser direct writing equipment, such as the utility model patent with application number CN201921717535.5, named as a temperature control device.

[0005] Although existing devices can control the temperature inside the laser equipment, the following problems still exist: First, whether the current device settings affect the operation of the laser direct imaging lithography equipment itself; second, the device can only achieve single temperature control inside the laser direct imaging lithography equipment and cannot regulate the humidity and cleanliness of the air entering the laser direct imaging lithography equipment; third, whether the current device settings on the laser direct imaging lithography equipment are reasonable and whether it can achieve efficient heat exchange for the laser direct imaging lithography equipment.

[0006] Based on the above problems, it is necessary to design an air handling device for laser direct imaging lithography equipment, which can integrate temperature, humidity and cleanliness control functions, be reasonably set up and operate efficiently to ensure the safe, reliable and stable operation of laser direct imaging lithography equipment. Summary of the Invention

[0007] The present invention aims to overcome the defects in the above-mentioned prior art and provide an air treatment device for laser direct imaging lithography equipment, which can integrate temperature, humidity and cleanliness control functions, has reasonable settings and can operate efficiently, ensuring the safe, reliable and stable operation of laser direct imaging lithography equipment.

[0008] In order to achieve the above objectives, the technical solution adopted by the present invention is: an air treatment device applied to laser direct imaging lithography equipment, including a filter component, a temperature control and dehumidification component and a fan component arranged in sequence from the outside to the inside, the operation of the fan component forms a positive pressure inside the air treatment device, and the external air is sucked into the filter component, the temperature control and dehumidification component in sequence under the action of the air pressure difference to achieve cleaning, temperature control and dehumidification; including a return air port, the return air port is located at the bottom of the filter component, which can promote the circulation and replacement of the air inside the laser direct imaging lithography equipment and the air inside the air treatment device; including a thermal insulation component, the thermal insulation component is located outside the temperature control and dehumidification component, and can achieve thermal insulation for the temperature control and dehumidification component.

[0009] As a preferred solution of the present invention, it includes a shell, which is located on the top of the laser direct imaging lithography equipment, and forms an air inlet on the side of the shell facing the external air, and forms an air outlet on the side of the shell facing the laser direct imaging lithography equipment, and the area size of the air inlet is larger than the area size of the return air outlet.

[0010] As a preferred solution of the present invention, the filter component includes a first filter and a second filter arranged in sequence, the first filter is located at the rear end of the air inlet, and a first chamber is provided between the first filter and the second filter.

[0011] As a preferred solution of the present invention, the temperature control and dehumidification component includes a surface cooler, a water chiller and a water inlet and outlet, and the surface cooler is connected to the water chiller via the water inlet and outlet.

[0012] As a preferred solution of the present invention, the temperature control and dehumidification component includes a water receiving tray, a condensation water outlet and a condensation water collecting device. The water receiving tray is located at the lower end of the surface cooler, and the condensation water outlet is located at the bottom of the water receiving tray and discharges the water in the water receiving tray into the condensation water collecting device.

[0013] As a preferred solution of the present invention, the fan component includes a fan bracket and a fan, the fan is fixed inside the housing through the fan bracket, and the fan blades inside the fan rotate around the plumb line.

[0014] As a preferred solution of the present invention, a third filter is installed below the fan, and the third filter is located at the rear end of the air outlet.

[0015] As a preferred solution of the present invention, a second chamber is formed above the fan, and a third chamber is formed below the fan.

[0016] As a preferred solution of the present invention, the thermal insulation component includes thermal insulation cotton, thermal insulation pad, and thermal insulation layer. The thermal insulation cotton wraps the water receiving tray, the thermal insulation pad is located between the surface cooler and the fan, and the thermal insulation layer is arranged on the inner surface of the shell.

[0017] As a preferred solution of the present invention, a controller is included, and the controller is connected to the chiller via a cable.

[0018] The beneficial effects of the present invention are:

[0019] 1. The present invention can perform the three-in-one functions of cleaning, temperature control and dehumidification of the external air, thereby realizing temperature control, humidity control and cleaning inside the laser direct imaging lithography equipment.

[0020] 2. Compared with the method of supplying air to the laser direct imaging lithography equipment through an air duct via an external additional device, the present invention uses a fan component to form a positive pressure inside the laser direct imaging lithography equipment, resulting in less wind resistance, greater air volume, and more effective temperature control, dehumidification, and filtration and cleaning.

[0021] 3. The present invention can form a small local air return cycle between the air handling device, the laser direct imaging lithography equipment and the return air outlet, as well as a large air return cycle between the air handling device, the laser direct imaging lithography equipment and the external environment, thereby shortening the heat exchange time inside the laser direct imaging lithography equipment and achieving efficient temperature and humidity control inside the laser direct imaging lithography equipment.

[0022] 4. Compared with the device that sets multiple components inside the laser direct writing device to achieve temperature control, the present invention has a reasonable setting and does not affect the internal operation of the laser direct imaging lithography device. Secondly, it can fully control the heat exchange, temperature and humidity of the laser direct imaging lithography device from top to bottom, thereby improving the air treatment effect.

[0023] 5. The filter component of the present invention can filter and remove pollutants in the external air, ensuring the cleanliness of the air entering the laser direct imaging lithography equipment without affecting the operation of the laser direct imaging lithography equipment itself.

[0024] 6. The area of ​​the air inlet of the present invention is larger than that of the return air outlet, so that the flow rate of the external air at the air inlet is greater than the flow rate of the hot air output from the return air outlet. The external air at the air inlet can drive the hot air at the return air outlet to circulate back and achieve rapid temperature and humidity control.

[0025] 7. The first filter, the second filter and the third filter of the present invention effectively filter the passing air to ensure the cleanliness of the air. At the same time, the flow-equalizing membrane below the third filter can evenly discharge air to facilitate uniform heat exchange inside the laser direct imaging lithography equipment.

[0026] 8. The present invention is provided with a water receiving tray and thermal insulation components, which can not only realize the effective discharge of condensed water into the condensed water collection device, but also realize thermal insulation between the surface cooler and the laser direct imaging lithography equipment, thereby avoiding the adverse effects of condensed water on the equipment.

[0027] 9. The surface cooler of the present invention has the effects of cooling and dehumidifying, and its cooling and dehumidifying effects are affected by the temperature and flow rate of the cooling water. Regulating the surface cooler can control the temperature and humidity of the external air. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of the present invention;

[0029] Figure 2 It is an installation diagram of the present invention;

[0030] Figure 3 This is a schematic diagram of the external structure of the present invention Figure 1 ;

[0031] Figure 4 This is a schematic diagram of the external structure of the present invention Figure 2 ;

[0032] Reference numerals in the figure: 1. filter component, 2. temperature control and dehumidification component, 3. fan component, 4. return air outlet, 5. thermal insulation component, 6. shell, 7. third filter, 8. controller, 11. first filter, 12. second filter, 13. first chamber, 21. surface cooler, 22. chiller, 23. water inlet and outlet, 24. water receiving tray, 25. condensate outlet, 26. condensate collecting device, 31. bracket, 32. fan, 33. second chamber, 34. third chamber, 51. thermal insulation cotton, 52. thermal insulation pad, 53. thermal insulation layer, 61. air inlet, 62. air outlet. DETAILED DESCRIPTION

[0033] The embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0034] like Figures 1-4 As shown, an air treatment device for laser direct imaging lithography equipment includes a filter component 1, a temperature control and dehumidification component 2 and a fan component 3 arranged in sequence from the outside to the inside. The operation of the fan component 3 forms a positive pressure inside the air treatment device. Under the action of the air pressure difference, the external air is sucked into the filter component 1 and the temperature control and dehumidification component 2 in sequence to achieve cleaning, temperature control and dehumidification; it includes a return air port 4, which is located at the bottom of the filter component 1 and can promote the circulation and replacement of the air inside the laser direct imaging lithography equipment and the air inside the air treatment device; it includes a thermal insulation component 5, which is located outside the temperature control and dehumidification component 2 to insulate the temperature control and dehumidification component 2 from the laser direct imaging lithography equipment.

[0035] Specifically, the operation of the fan component 3 creates an air pressure difference inside the air handling device, thereby enabling external air to actively enter the air handling device to facilitate the processing of the external air by the filter component 1 and the temperature control and dehumidification component 2. The filter component 1 can filter and remove pollutants from the external air, thereby ensuring the cleanliness of the air entering the laser direct imaging lithography apparatus and thus not affecting the operation of the laser direct imaging lithography apparatus itself. The temperature control and dehumidification component 2 can cool and dehumidify the cleaned air. The cooled and dehumidified air enters the interior of the laser direct imaging lithography apparatus and is discharged from around the laser direct imaging lithography apparatus, thereby achieving temperature control inside and outside the laser direct imaging lithography apparatus.

[0036] Furthermore, the return air vent 4 at the bottom of the filter component 1 can first input the hot air from the laser direct imaging lithography equipment near the air handling device into the filter component 1, the temperature control and dehumidification component 2, and the fan component 3, thereby realizing rapid heat exchange within the laser direct imaging lithography equipment, shortening the heat exchange time within the laser direct imaging lithography equipment, and realizing efficient temperature and humidity control within the laser direct imaging lithography equipment.

[0037] Furthermore, in order to prevent the temperature of the temperature control and dehumidification component 2 from being too low, causing the water vapor inside the laser direct imaging lithography equipment to be cooled and liquefied, thereby causing damage to the parts of the laser direct imaging lithography equipment, a thermal insulation component 5 is provided outside the temperature control and dehumidification component 2.

[0038] Compared with the existing technology, the present invention, firstly, can perform the three-in-one functions of purification, temperature control and dehumidification of external air, and realize effective heat exchange, temperature control and humidity control inside the laser direct imaging lithography equipment without affecting the internal operation of the laser direct imaging lithography equipment. Secondly, a small local air return cycle of the air treatment device, the laser direct imaging lithography equipment and the return air port 4 and a large air return cycle of the air treatment device, the laser direct imaging lithography equipment and the external environment are formed, which shortens the heat exchange time inside the laser direct imaging lithography equipment and realizes efficient temperature and humidity control inside the laser direct imaging lithography equipment. Thirdly, the fan component 3 can allow a large amount of external air to enter the laser direct imaging lithography equipment, thereby forming a positive pressure inside the laser direct imaging lithography equipment, which can better prevent the external air from affecting the temperature, humidity and cleanliness of the internal and external environments of the laser direct imaging lithography equipment.

[0039] like Figure 1 、 Figure 3As shown, the controller 8 can receive temperature and humidity feedback inside the laser direct imaging lithography equipment. At the same time, the controller 8 can control the operation of the filter component 1, the temperature control and dehumidification component 2, and the fan component 3. The controller 8 is connected to the chiller 22 in the temperature control and dehumidification component 2 through a cable. After the controller 8 receives the signal from the laser direct imaging lithography equipment, it controls the chiller 22 to turn on or off, thereby realizing the control of the external air temperature and humidity by the surface cooler 21.

[0040] The filter component 1, the temperature control and dehumidification component 2, the fan component 3, the return air outlet 4 and the thermal insulation component 5 are all covered by the shell 6 and supported by the internal frame of the shell 6. The shell 6 is located at the top of the laser direct imaging lithography equipment. The air processed by the shell 6 can perform heat exchange, temperature control and humidity control on the top to the bottom of the laser direct imaging lithography equipment. The shell 6 forms an air inlet 61 on the side facing the external air, and forms an air outlet 62 on the side facing the laser direct imaging lithography equipment. The external air enters from the air inlet 61, and after treatment, enters the laser direct imaging lithography equipment through the air outlet 62 for heat exchange. The area size of the air inlet 61 is larger than the area size of the return air outlet 4. More specifically, the number and size of the several square holes formed in the air inlet 61 are much larger than the number and size of the several round holes in the return air outlet 4.

[0041] The air treatment device of the present invention is located on the top of the laser direct imaging lithography equipment. It is reasonably arranged and does not affect the internal operations of the laser direct imaging lithography equipment. Secondly, it can fully control the heat exchange temperature and humidity of the laser direct imaging lithography equipment from top to bottom, thereby improving the air treatment effect.

[0042] The area of ​​the air inlet 61 of the present invention is larger than the area of ​​the return air outlet 4, so that the flow rate of the external air of the air inlet 61 is greater than the flow rate of the hot air output by the return air outlet 4. The external air of the air inlet 61 can drive the hot air of the return air outlet 4 to circulate back, thereby achieving rapid temperature and humidity control.

[0043] like Figures 1-4 As shown, the specific structures of the filter component 1, the temperature control and dehumidification component 2 and the fan component 3 are as follows:

[0044] The filter component 1 includes a first filter 11 and a second filter 12 arranged in sequence. The first filter 11 is located at the rear end of the air inlet 61 , and a first chamber 13 is provided between the first filter 11 and the second filter 12 .

[0045] The temperature control and dehumidification component 2 includes a surface cooler 21, a water chiller 22, a water inlet and outlet 23, a water receiving tray 24, a condensed water outlet 25 and a condensed water collection device 26. The surface cooler 21 is connected to the water chiller 22 through the water inlet and outlet 23 and a pipeline. The water receiving tray 24 is located at the lower end of the surface cooler 21. The condensed water outlet 25 is located at the bottom of the water receiving tray 24 and discharges the water in the water receiving tray 24 into the condensed water collection device 26.

[0046] The surface cooler 21 has the effects of cooling and dehumidifying, and its cooling and dehumidifying effects are affected by the temperature and flow rate of the cooling water. By regulating the surface cooler 21, the temperature and humidity of the external air can be controlled.

[0047] The fan component 3 includes a fan bracket 31 and a fan 32. The fan 32 is fixed to the internal frame of the housing 6 through the fan bracket 31. The fan blades inside the fan 32 rotate around the plumb line.

[0048] A third filter 7 is installed below the fan 32 , and the third filter 7 is located at the rear end of the air outlet 62 . A second chamber 33 is formed above the fan 32 , and a third chamber 34 is formed below the fan 32 .

[0049] A flow-distributing membrane is located below the third filter 7. Made of stainless steel or polyester (polyester fiber), this membrane offers excellent light transmittance, a fine surface, and low resistance, helping to reduce energy consumption. In practical applications, the mesh size (pore density) of the flow-distributing membrane is typically between 100 and 200 mesh. The function of this membrane is to ensure even distribution of airflow through the filter, preventing blow-by and turbulent flow, maintaining uniform cleanliness in the work area, and improving the efficiency and quality of air purification.

[0050] During operation of the air handling device, the fan 32 drives the airflow of the entire air handling device to circulate. External air passes through the first filter 11 and enters the first chamber 13. It then passes through the second filter 12, where it is cleansed and contaminants are removed twice. After heat exchange and dehumidification with the surface cooler 21, the air enters the second chamber 33. Due to the internal frame structure of the housing 6, the second chamber 33 is located above the fan 32. Air is drawn in by the fan 32 and discharged obliquely from the side into the third chamber 34. It is filtered and evenly distributed again by the third filter 7 before entering the interior of the LDIM apparatus and exchanging heat with the air inside the LDIM apparatus. Meanwhile, some high-temperature and high-humidity air from the interior of the LDIM apparatus enters the first chamber 13 from the air handling device return air port 4, where it mixes with the external air that has also entered the first chamber 13. The above-described airflow continues in this cycle, effectively controlling the temperature, humidity, and cleanliness of the environment within the LDIM apparatus.

[0051] The first filter 11, the second filter 12 and the third filter 7 of the present invention effectively filter the passing air to ensure the cleanliness of the air. At the same time, the flow-equalizing membrane below the third filter can evenly discharge air to facilitate uniform heat exchange inside the laser direct imaging lithography equipment.

[0052] During operation, the air handling unit (AHU) must provide cooling water at a temperature lower than the ambient temperature inside and outside the LDI lithography apparatus to effectively cool and dehumidify the air. This can cause condensation at the hot and cold interfaces. This condensation can damage, corrode, and rust electronic, optical, and mechanical components of the LDI lithography apparatus. Therefore, the AHU is equipped with a water tray (24) and thermal insulation (5) for thermal insulation.

[0053] The water receiving tray 24 receives water and enters the condensed water collecting device 26 through the condensed water outlet 25 and the pipeline to prevent the condensed water from being discharged into the laser direct imaging lithography equipment and causing damage, rust and corrosion to the equipment.

[0054] like Figure 1 、 Figure 4 As shown, the thermal insulation component 5 includes thermal insulation cotton 51, thermal insulation pad 52, and thermal insulation layer 53. The thermal insulation cotton 51 wraps the water receiving tray 24, the thermal insulation pad 52 is located between the surface cooler 21 and the fan 32, and the thermal insulation layer 53 is arranged on the inner surface of the shell 6.

[0055] The surface cooler 21 is fixedly mounted on the inner frame of the housing 6 , with a heat-insulating pad 52 disposed in the middle to minimize the amount of cold transferred from the surface cooler to the laser direct imaging lithography equipment.

[0056] Similarly, in order to keep warm and reduce the transfer of cold, a thermal insulation layer 53 is provided between the surface cooler 21 and the fan 32; the inner side of the shell 6 that is in contact with the external environment over a large area is also provided with a thermal insulation layer 53.

[0057] The present invention provides a water receiving tray 25 and a thermal insulation component 5, which can not only realize the effective discharge of condensed water into the condensed water collection device, but also realize thermal insulation between the surface cooler 21 and the laser direct imaging lithography equipment, thereby avoiding the adverse effects of condensed water on the equipment.

[0058] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein, but is to be embodied in the widest possible manner consistent with the principles and novel features disclosed herein.

[0059] Although this article uses the following figures more frequently: 1. filter component, 2. temperature control and dehumidification component, 3. fan component, 4. return air outlet, 5. thermal insulation component, 6. shell, 7. third filter, 8. controller, 11. first filter, 12. second filter, 13. first chamber, 21. surface cooler, 22. chiller, 23. water inlet and outlet, 24. water receiving tray, 25. condensate outlet, 26. condensate collecting device, 31. bracket, 32. fan, 33. second chamber, 34. third chamber, 51. thermal insulation cotton, 52. thermal insulation pad, 53. thermal insulation layer, 61. air inlet, 62. air outlet and other terms, it does not exclude the possibility of using other terms; these terms are used only to more conveniently describe and explain the essence of the present invention; interpreting them as any additional limitations is contrary to the spirit of the present invention.

Claims

1. An air handling device for laser direct imaging lithography equipment, characterized by: The air handling device comprises a filter component (1), a temperature control and dehumidification component (2), and a fan component (3) arranged in sequence from the outside to the inside, wherein the filter component (1) comprises a first filter (11) and a second filter (12) arranged in sequence, wherein the first filter (11) is located at the rear end of the air inlet (61), and a first chamber (13) is provided between the first filter (11) and the second filter (12); the fan component (3) operates to form a positive pressure inside the air handling device, and the external air is sequentially sucked into the filter component (1) and the temperature control and dehumidification component (2) under the action of the pressure difference, and is cleaned, temperature controlled, and dehumidified; the air handling device, the laser direct imaging lithography equipment, and the external environment form a large air reflux cycle. It includes a return air port (4), the return air port (4) is located at the bottom of the filter component (1), and the air treatment device, the laser direct imaging lithography equipment and the return air port (4) form a small local air return cycle; It comprises a heat-insulating component (5), wherein the heat-insulating component (5) is located outside the temperature-control and dehumidification component (2) and can achieve heat insulation for the temperature-control and dehumidification component (2); The invention comprises a shell (6), wherein the shell (6) is located on the top of the laser direct imaging lithography device, and an air inlet (61) is formed on a side of the shell (6) facing the outside air, and the area size of the air inlet (61) is larger than the area size of the return air outlet (4).

2. The air treatment device for laser direct imaging lithography equipment according to claim 1, characterized in that: An air outlet (62) is formed on the side of the housing (6) facing the laser direct imaging lithography equipment.

3. The air treatment device for laser direct imaging lithography equipment according to claim 1, characterized in that: The temperature control and dehumidification component (2) comprises a surface cooler (21), a water chiller (22), and a water inlet and outlet (23); the surface cooler (21) is connected to the water chiller (22) via the water inlet and outlet (23).

4. The air treatment device for laser direct imaging lithography equipment according to claim 3, characterized in that: The temperature control and dehumidification component (2) comprises a water receiving tray (24), a condensation water outlet (25) and a condensation water collecting device (26); the water receiving tray (24) is located at the lower end of the surface cooler (21); the condensation water outlet (25) is located at the bottom of the water receiving tray (24) and discharges water in the water receiving tray (24) into the condensation water collecting device (26).

5. The air treatment device for laser direct imaging lithography equipment according to claim 1, characterized in that: The fan component (3) comprises a fan bracket (31) and a fan (32). The fan (32) is fixed inside the housing (6) via the fan bracket (31). The fan blades inside the fan (32) rotate around a plumb line.

6. The air treatment device for laser direct imaging lithography equipment according to claim 5, characterized in that: A third filter (7) is installed below the fan (32), and the third filter (7) is located at the rear end of the air outlet (62).

7. The air treatment device for laser direct imaging lithography equipment according to claim 5, characterized in that: A second chamber (33) is formed above the fan (32), and a third chamber (34) is formed below the fan (32).

8. The air treatment device for laser direct imaging lithography equipment according to claim 1, characterized in that: The thermal insulation component (5) includes thermal insulation cotton (51), a thermal insulation pad (52), and a thermal insulation layer (53). The thermal insulation cotton (51) wraps the water receiving tray (24). The thermal insulation pad (52) is located between the surface cooler (21) and the fan (32). The thermal insulation layer (53) is arranged on the inner surface of the shell (6).

9. The air treatment device for laser direct imaging lithography equipment according to claim 1, characterized in that: The device comprises a controller (8), wherein the controller (8) is connected to a chiller (22) via a cable.

Images