Quartz wafer, its vibrating device and electronic equipment

Abstract

The application relates to a quartz wafer and a vibration device, which comprises a base, a pair of vibration arms, the pair of vibration arms being arranged on the base in parallel along a first direction and extending along a second direction, wherein the second direction is perpendicular to the first direction, a support part comprising a support arm, a connecting arm and a pair of dispensing arms, wherein one end of the support arm is arranged on the base and located between the pair of vibration arms, the support arm extends to the other end to protrude the pair of vibration arms along the second direction, the connecting arm extends along the first direction and is connected with the protruding end of the support arm, the two ends of the connecting arm are symmetrically protruded to the pair of vibration arms, and the pair of dispensing arms are respectively connected with the protruding ends of the connecting arm, each dispensing arm is arranged to extend along the second direction, the length of the dispensing arm along the second direction accounts for at least 62% of the length of the support arm along the second direction, and the dispensing arm does not protrude the base along the second direction. The application has the effects of reducing dispensing point vibration stress and improving mounting stability.

Description

TECHNICAL FIELD

[0001] The present application relates to a quartz wafer, a vibrating device thereof and an electronic device. BACKGROUND

[0002] The vibrating device is an important unit module of the electronic device, and plays a role of timing, timing, event recording, low-power interruption and the like in the electronic device, and is embodied as a filter, a resonator, a reference clock source and the like built in the electronic device. At present, the vibrating device usually adopts a structure in which a quartz wafer is sealed in a package in which a cavity is formed. The quartz wafer has a pair of vibrating arms arranged side by side and a base portion that fixes base end sides of the two vibrating arms in the length direction as one body, wherein a groove is provided on the vibrating arm, a vibration electrode is provided in cooperation with the groove, and further, a mounting electrode connected to the vibration electrode is formed on the outer surface of the base portion. When a predetermined voltage is applied to these electrodes, the pair of vibrating arms vibrate at a predetermined resonance frequency in the direction of approaching or leaving each other by the interaction of the vibration electrodes of the pair of vibrating arms with each other.

[0003] A three-arm resonator is disclosed in the related document, which can get rid of many problems encountered by the traditional tuning fork resonator, including a tuning fork-shaped component with two parallel vibrating arms connected to each other through a connecting component, a center arm extending from the connecting component and located between the two vibrating arms of the tuning fork-shaped component, wherein at least one groove is formed on the front side and the rear side of each vibrating arm.

[0004] In the related technology in the above, there is a problem that the reduction of the point vibration stress is limited under the condition of ensuring a small package volume. SUMMARY

[0005] In order to effectively reduce the low point stress, the purpose of the present application is to provide a quartz wafer, a vibrating device thereof and an electronic device.

[0006] In the first aspect, the quartz wafer provided by the present application adopts the following technical scheme:

[0007] A quartz wafer comprises:

[0008] a base portion;

[0009] a pair of vibrating arms arranged side by side on the base portion along a first direction and extending along a second direction, wherein the second direction is perpendicular to the first direction;

[0010] The support part comprises a support arm, a connecting arm and a pair of dispensing arms, wherein one end of the support arm is arranged on the base and located between the pair of vibration arms, the support arm extends to the other end to protrude the pair of vibration arms in the second direction; the connecting arm extends in the first direction and is connected with the protruding end of the support arm, both ends of the connecting arm symmetrically protrude the pair of vibration arms; the pair of dispensing arms are respectively connected with the protruding ends of the connecting arm, each dispensing arm is arranged to extend in the second direction, the length of the dispensing arm in the second direction accounts for at least 62% of the length of the support arm in the second direction, and the dispensing arm does not protrude the base in the second direction.

[0011] Optionally, the length of the dispensing arm in the second direction accounts for 62-88% of the length of the support arm in the second direction.

[0012] Optionally, each dispensing arm extends linearly in the second direction.

[0013] Optionally, the central arm comprises a lower rod, a central rod and an upper rod arranged in sequence away from the base, and the width of the central rod in the first direction is greater than the width of the upper rod in the first direction.

[0014] Optionally, the length of the central rod in the second direction accounts for 45-55% of the length of the support arm in the second direction.

[0015] Optionally, the width of the bottom rod in the first direction is not greater than the width of the upper rod in the first direction, and is not less than 80% of the width of the vibration arm in the first direction.

[0016] Optionally, each dispensing arm has a dispensing groove at the dispensing point.

[0017] Optionally, the dispensing groove and the electrode groove on the same side of the vibration arm each comprise a vertical side wall and an inclined side wall with a gradually changing inclination angle.

[0018] In a second aspect, the present application provides a vibration device adopting the technical scheme as follows:

[0019] The vibration device comprises a quartz crystal wafer.

[0020] In a third aspect, the present application provides an electronic device adopting the technical scheme as follows:

[0021] The electronic device comprises the vibration device.

[0022] In summary, the present application has at least one of the following beneficial technical effects:

[0023] The dispensing arm is set, the force transmission distance of the dispensing point is extended without expanding the packaging volume, further, the dispensing arm is reversely extended in the form of bending, and the length of the dispensing arm in the second direction accounts for at least 62% of the length of the supporting arm in the second direction, and the dispensing arm does not protrude from the base in the second direction, further improving the mounting stability; the vibration stress of the dispensing point is reduced to 10 -5 , which is reduced by 7 orders of magnitude compared with the traditional four-arm setting, and is reduced by 2 orders of magnitude compared with the full encapsulation setting of further extending the dispensing arm. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 is a perspective view of the quartz wafer according to one of the technical solutions of the present application;

[0025] Figure 2 is a front view of the quartz wafer according to one of the technical solutions of the present application;

[0026] Figure 3 is Figure 2 a sectional view in the direction of A-A in figure

[0027] Figure 4 is a front view of the quartz wafer for showing electrode arrangement according to one of the technical solutions of the present application;

[0028] Figure 5 is a sectional view of the vibration device according to one of the technical solutions of the present application;

[0029] Figure 6 is a simulation analysis diagram of the force state of the tuning fork wafer according to the present application;

[0030] Figure 7 is a simulation analysis diagram of the force state of the tuning fork wafer according to the present application.

[0031] BRIEF DESCRIPTION OF DRAWINGS: 100, quartz wafer; 1, base; 10, connecting electrode; 2, vibration arm; 20, vibration piece; 21, electrode groove; 22, hammer head piece; 23, excitation electrode; 3, supporting part; 4, supporting arm; 40, lower rod; 41, central rod; 42, upper rod; 5, connecting arm; 6, dispensing arm; 60, dispensing groove; 61, assembly electrode; 7, base; 8, packaging piece; 80, container; 81, cover; DETAILED DESCRIPTION

[0032] The following will be described in detail in combination with the accompanying Figure 1 - the accompanying Figure 7 , the present application is further described in detail, so that those skilled in the art can implement it according to the description.

[0033] It should be understood that the terms such as "have", "contain" and "include" used herein do not exclude the presence or addition of one or more other elements or combinations thereof.

[0034] The present application provides a quartz wafer, comprising a base 1, a pair of vibrating arms 2 and a support part 3.

[0035] Referring to Figure 1 , the base 1 constitutes the basis on which the pair of vibrating arms 2 and the support part 3 are installed; in this embodiment, the base 1 is cuboid-shaped.

[0036] The pair of vibrating arms 2 are arranged side by side on the base 1 along a first direction, referring to Figure 2 , the first direction is the width direction of the vibrating arms 2, i.e. the X direction, and the pair of vibrating parts extend along a second direction, which is perpendicular to the first direction, i.e. the Y direction; the Z direction is the direction perpendicular to both the X direction and the Y direction, i.e. the thickness direction of the quartz wafer; in this embodiment, the pair of vibrating arms 2 are symmetrically arranged about the central axis of the base 1 along the Y direction, and the pair of vibrating arms 2 can be straight arms or can be provided with hammers.

[0037] The support part 3 comprises a support arm 4, a connecting arm 5 and a pair of dispensing arms 6.

[0038] One end of the support arm 4 is arranged on the base 1 and located between the pair of vibrating arms 2, the support arm 4 extends along the second direction, and the central axis of the support arm 4 along the Y direction overlaps the central axis of the base 1 along the Y axis, and the other end of the support arm 4 (the end of the support arm 4 away from the base 1) protrudes from the pair of vibrating arms 2; in this embodiment, the distance by which the support arm 4 protrudes from the pair of vibrating arms 2 is sufficient to ensure that the connecting arm 5 does not interfere with the vibration of the vibrating arms 2.

[0039] The connecting arm 5 extends along the first direction, i.e. the connecting arm 5 is arranged perpendicularly to the support arm 4, the side surface of the connecting arm 5 close to the support arm 4 is connected (integrally formed) with the protruding end of the support arm 4, and the two ends of the connecting arm 5 symmetrically protrude from the pair of vibrating arms 2, i.e. the distance between the two ends of the connecting arm 5 is equal to the distance between the corresponding side support arms 4, and the distance by which the two ends of the connecting arm 5 protrude is sufficient to ensure that after the connecting arm 5 is integrally formed with the pair of dispensing arms 6, the installation of the dispensing arms 6 does not interfere with the vibration of the vibrating arms 2.

[0040] The pair of dispensing arms 6 are respectively connected with the protruding ends (end portions of the side surface facing the dispensing arms 6) of the connecting arm 5, and each of the dispensing arms 6 is arranged to extend along the second direction, which can be Figure 1 as shown in the figure, or can be non-linear extension, which can be arranged such that part of the arm body of the dispensing arm 6 is recessed towards the vibrating arms 2 on the basis of not interfering with the vibration of the vibrating arms 2; in this embodiment, each of the dispensing arms 6 extends linearly along the second direction.

[0041] The length of the dispensing arm 6 along the second direction accounts for at least 62% of the length of the supporting arm 4 along the second direction, and the dispensing arm 6 does not protrude from the base 1 along the second direction.

[0042] In use, referring to Figure 2 The pair of vibrating arms 2 are each provided with an electrode slot 21 extending along the Y direction. Referring to Figure 4 The pair of vibrating arms 2 are provided with a vibration exciting electrode 23 formed by matching the electrode slots 21, the base 1 is provided with a connecting electrode 10, and the pair of dispensing arms 6 are provided with an assembling electrode 61, the vibration exciting electrode 23 is electrically connected to the assembling electrode 61 through the connecting electrode 10. The dispensing arm 6 is used to assemble the quartz wafer into the package 8 described below, i.e., to be glued to the subsequent base 7, and the assembling electrode 61 is formed with a conductive connection point on the dispensing arm 6, constituting a dispensing point; a predetermined voltage is applied to the vibration exciting electrode 23 through the dispensing point, and the vibration exciting electrodes 23 of the pair of vibrating arms 2 interact with each other, causing the pair of vibrating arms 2 to vibrate in the direction of approaching or leaving each other at a predetermined resonant frequency; with this technical solution, first, the dispensing arm 6 is provided, which extends the force transmission distance of the dispensing point from the vibrating arm 2 without expanding the package volume, reduces the stress of the dispensing point, and improves the installation stability; second, while extending the force transmission distance of the dispensing point from the vibrating arm 2, the dispensing arm 6 is reversely extended in a bent form, and the length of the dispensing arm 6 along the second direction accounts for at least 62% of the length of the supporting arm 4 along the second direction, and the dispensing arm 6 does not protrude from the base 1 along the second direction, further improving the installation stability; in summary, the vibration stress of the dispensing point is reduced to 10-5, which is reduced by 7 orders of magnitude compared with the traditional four-arm setting, and is reduced by 2 orders of magnitude compared with the full package setting of further extending the dispensing arm 6.

[0043] In another technical solution, the length of the dispensing arm 6 along the second direction accounts for 62-88% of the length of the supporting arm 4 along the second direction. In one embodiment, the length of the dispensing arm 6 along the second direction accounts for 62% of the length of the supporting arm 4 along the second direction, or 73%, or 88%. With this scheme, the length of the dispensing arm 6 is further limited, which meets the vibration stress reduction effect of the dispensing point, and at the same time, the dispensing arm 6 is set to be shorter, which reduces the overall weight of the quartz wafer and further improves the installation stability.

[0044] The pair of vibration arms 2 are provided with a hammer head, including a vibration piece 20 and a hammer head piece 22, the hammer head piece 22 is arranged at one end of the vibration piece 20 away from the base 1, the hammer head piece 22 is a widened part relative to the vibration piece 20, which is a counterweight part, and the width is greater than the width of the vibration piece 20, and the number of flexures and deformations of the vibration arm 2 per unit time can be adjusted by changing the mass of the hammer head. Due to the arrangement of the hammer head piece 22, the width of the central arm is limited, and under the condition of meeting the vibration interference, the reduction effect of the vibration stress of the dispensing point is enhanced. In another technical scheme, the central arm includes a lower rod 40, a central rod 41 and an upper rod 42 arranged in sequence away from the base 1, that is, the central arm is divided into the lower rod 40, the central rod 41 and the upper rod 42 according to the different widths along the X direction. The width of the central rod 41 along the first direction is greater than the width of the upper rod 42 along the first direction. Further, the width of the central rod 41 along the first direction is 1.8-3 times the width of the upper rod 42 along the first direction. By adopting this scheme, the width of the central rod 41 is expanded, the vibration hard body transmitted to the central rod 41 through the lower rod 40 is weakened, and the reduction effect of the vibration stress of the dispensing point is enhanced under the condition of meeting the vibration interference.

[0045] In another technical scheme, the width of the central rod 41 along the first direction is greater than the width of the lower rod 40 along the first direction. By adopting this technical scheme, the vibration stress transmitted to the lower rod 40 through the base 1 is reduced.

[0046] In another technical scheme, the length of the central rod 41 along the second direction accounts for 45-55% of the length of the support arm 4 along the second direction. The central rod 41 can be 45% of the length of the support arm 4, or 50% of the length of the support arm 4, or 55% of the length of the support arm 4. By adopting this scheme, the length of the central rod 41 is adjusted to further reduce the vibration stress of the dispensing point and improve the stability of the quartz crystal wafer installation.

[0047] In another technical scheme, the width of the bottom rod along the first direction is not greater than the width of the upper rod 42 along the first direction, and is not less than 80% of the width of the vibration arm 2 along the first direction. In this embodiment, the distance between the pair of hammer head pieces 22 meets the arrangement of the upper rod 42, and the upper rod 42 does not interfere with the hammer head piece 22, that is, the lower rod 40 forms a notch relative to the central rod 41. By adopting this scheme, the conduction efficiency of the vibration stress of the vibration arm 2 to the central rod 41 through the lower rod 40 is reduced on the basis of meeting the rigidity requirement of the support arm 4, and the vibration stress of the dispensing point is reduced.

[0048] In another technical solution, each glue dispensing arm 6 has a glue dispensing groove 60 at the glue dispensing point. In this embodiment, the depth of the glue dispensing groove 60 is not more than half of the thickness of the glue dispensing arm 6 along the Z direction, and further, the depth of the glue dispensing groove 60 accounts for 40-50% (not included) of the thickness of the glue dispensing arm 6 along the Z direction. With this solution, the contact stability between the conductive glue and the glue dispensing groove 60 is increased, and the depth of the glue dispensing groove 60 is further limited to improve the mounting stability of the quartz wafer while ensuring the strength of the glue dispensing arm 6.

[0049] In another technical solution, the glue dispensing groove 60 and the electrode groove 21 on the same side of the vibrating arm 2 each include a vertical side wall and an inclined side wall with a gradually changing inclination angle. In this embodiment, referring to the glue dispensing groove 60, the inclined side wall with a gradually changing inclination angle includes an arm body with the inclination angle gradually decreasing in the direction away from the glue dispensing groove 60; and the end of the vertical side wall is inclined toward the connection with the inclined side wall. With this solution, the glue dispensing groove 60 is set to have the same specification as the vibrating arm 2 for easy etching formation, and although additional settings are required, the processing technology is not increased, which simplifies the process. Figure 3

[0050] A vibrating device, referring to Figure 5 , the resonator includes a quartz wafer 100, a pedestal 7, and a package 8; the pedestal 7 is glued to the glue dispensing arms 6 of the quartz wafer at two glue dispensing points to support the quartz wafer 100; the package 8 includes a container 80 and a cover 81 for packaging the container 80, the container 80 is provided with the pedestal 7 and contains the quartz wafer 100, and then the quartz wafer is packaged by the cover 81 to achieve the purpose of containing the quartz wafer.

[0051] An electronic device includes a vibrating device that functions as a filter, a resonator, a reference clock source, etc. in the electronic device.

[0052] Experiment

[0053] The package size of the vibrating device is set to 1.6 mm in length along the Y direction and 1 mm in width along the X direction; the size of the quartz wafer is 1.2 mm in length along the Y direction and 0.6 mm in width along the X direction; the length of the glue dispensing arm accounts for 88% of the length of the support arm along the second direction (1), and the length of the glue dispensing arm is 1 mm (a)); (2) the length of the glue dispensing arm + base is 1.1 mm, and the length of the support arm is 1.06 mm (b)). Figure 6 Figure 6 ​​(b);(3) The length of the dispensing arm is 1mm, and the length of the dispensing arm is 0.88mm, but the middle part of the dispensing arm is bent inward toward the corresponding vibrating arm (not shown); The stress state of the tuning fork crystal is analyzed by simulation, and the stress state corresponding to the dispensing point is obtained, referring to Figure 6 It can be seen that when the dispensing arm is linear, the vibration stress at the dispensing point is reduced to 10. -5 The vibration stress at the adhesive dots set in the inner bend can also be reduced to 10. -4 .

[0054] Reference Figure 7 , Figure 7 (a) is in Figure 6 (a) Based on (1), extend the full encapsulation setting of the dispensing arm; Figure 7 (b) Four-arm configuration; the stress state of the tuning fork crystal is analyzed through simulation, and the stress state corresponding to the dispensing point is obtained, referring to... Figure 7 It can be seen that, Figure 7 (a) The vibration stress of the corresponding product is 10. -3 , Figure 7 (b) The vibration stress of the corresponding product is 10. 2 All below Figure 6 (a) Corresponding product.

[0055] The embodiments described in this specific implementation are preferred embodiments of this application and are not intended to limit the scope of protection of this application. Identical components are represented by the same reference numerals. Therefore, all equivalent changes made to the structure, shape, and principle of this application should be covered within the scope of protection of this application.

Claims

1. A quartz wafer, characterized in that, include: Base (1); A pair of vibrating arms (2), the pair of vibrating arms (2) are arranged side by side on the base (1) along the first direction and extend along the second direction, wherein the second direction intersects the first direction; The support part (3) includes a support arm (4), a connecting arm (5) and a pair of dispensing arms (6), wherein one end of the support arm (4) is disposed on the base (1) and located between the pair of vibrating arms (2), and the support arm (4) extends along the second direction to the other end protruding from the pair of vibrating arms (2); the connecting arm (5) extends along the first direction and is connected to the protruding end of the support arm (4), and both ends of the connecting arm (5) symmetrically protrude from the pair of vibrating arms (2); the pair of dispensing arms (6) are respectively connected to the protruding ends of the connecting arm (5), each dispensing arm (6) extends along the second direction, the length of the dispensing arm (6) along the second direction accounts for at least 62% of the length of the support arm (4) along the second direction, and does not protrude from the base (1) along the second direction.

2. The quartz wafer according to claim 1, characterized in that, The length of the dispensing arm (6) along the second direction accounts for 62-88% of the length of the support arm (4) along the second direction.

3. The quartz wafer according to claim 2, characterized in that, Each of the dispensing arms (6) extends in a straight line along the second direction.

4. The quartz wafer according to claim 1, characterized in that, The support arm (4) includes a lower rod (40), a central rod (41) and an upper rod (42) arranged sequentially in a direction away from the base (1), wherein the width of the central rod (41) in the first direction is greater than the width of the upper rod (42) in the first direction.

5. The quartz wafer according to claim 4, characterized in that, The length of the central rod (41) along the second direction is 45-55% of the length of the support arm (4) along the second direction.

6. The quartz wafer according to claim 4, characterized in that, The width of the lower rod (40) along the first direction is not greater than the width of the upper rod (42) along the first direction, and is not less than 80% of the width of the vibrating arm (2) along the first direction.

7. The quartz wafer according to claim 1, characterized in that, Each of the dispensing arms (6) has a dispensing groove (60) at the dispensing point.

8. The quartz wafer according to claim 7, characterized in that, The dispensing groove (60) and the electrode groove (21) on the same side of the vibrating arm (2) both include a vertical sidewall and an inclined sidewall with a gradually changing tilt angle.

9. A vibrating device, characterized in that, Includes the quartz wafer (100) as described in any one of claims 1-8.

10. An electronic device, characterized in that, Including the vibration device as described in claim 9.

Images