Positionable support apparatus for a silicon wafer cleaning machine

Abstract

The application discloses a positionable supporting device for a silicon wafer cleaning machine and particularly relates to the technical field of silicon wafer cleaning machines, which comprises a supporting seat and a cleaning machine body, the cleaning machine body is arranged on the supporting seat, both sides of the supporting seat are provided with placing grooves, and the placing grooves are provided with moving cleaning devices which are slidably arranged in the placing grooves. The driving assembly, the reciprocating screw rod, the threaded cap, the extruding connecting column, the moving frame, the guide hole, the cleaning ring and the cleaning brush are arranged, the cleaning agent adhered to the side surface of the cleaning machine body is wiped and cleaned when the moving rod and the cleaning brush move, the moving frame and the cleaning ring are controlled to move downward when the extruding connecting column enters the guide hole, the cleaning agent adhered to the side surface of the supporting leg is wiped and cleaned by the cleaning ring, the side surfaces of the cleaning machine body and the supporting leg are automatically cleaned, the situation that the cleaning agent causes corrosion to the cleaning machine body and the supporting leg for a long time is avoided, and the normal service life of the cleaning machine body and the supporting leg is ensured to a certain extent.

Description

Technical Field

[0001] This invention relates to the field of silicon wafer cleaning machine technology, and more specifically, to a positionable support device for a silicon wafer cleaning machine. Background Technology

[0002] A silicon wafer cleaning machine is a specialized piece of equipment used to clean semiconductor silicon wafers. During semiconductor manufacturing, after silicon wafers undergo processes such as cutting, grinding, and polishing, their surfaces become contaminated with various pollutants, such as particles, metal ions, and organic matter. These contaminants can affect subsequent processing steps and the performance of the final product, thus requiring a cleaning machine to remove these contaminants.

[0003] The working principle of a silicon wafer cleaning machine is generally to remove dirt from the surface of the silicon wafer by the interaction of ultrasonic vibration and chemical cleaning agent. The ultrasonic generator produces high-frequency vibration, which is transmitted to the cleaning solution through the cleaning tank, generating a cavitation effect. This effect can effectively break down tiny particles and dirt on the surface of the silicon wafer and disperse them into the cleaning solution.

[0004] During the silicon wafer cleaning process, chemical cleaning agents may splash inside the cleaning machine or drip from the product surface, causing the cleaning agents to adhere to the sides of the cleaning machine or the bottom support. Over time, this can lead to significant corrosion. Therefore, a positioning support device for silicon wafer cleaning machines is needed to solve this problem. Summary of the Invention

[0005] To overcome the above-mentioned defects, the present invention provides a positionable support device for a silicon wafer cleaning machine. The technical problem to be solved by the present invention is that cleaning agent adheres to the side and bottom support of the cleaning machine, which will cause corrosion after long-term use.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a positionable support device for a silicon wafer cleaning machine, comprising a support base and a cleaning body, wherein the cleaning body is mounted on the support base, and placement grooves are provided on both the front and rear sides of the support base. A movable cleaning device is provided within each placement groove and slidably disposed within the placement groove. The movable cleaning device is located outside the cleaning body. Four support legs are connected to the support base, and movable cleaning devices are fitted over the support legs, with two movable cleaning devices slidably disposed outside the movable cleaning devices. The movable cleaning devices are mounted outside the cleaning body. A circular groove is provided on the support base, and a cylinder is slidably disposed within the circular groove. The top end of the cylinder is connected to the cleaning body. A guide groove is provided on the support base, and a guide block is slidably disposed within the guide groove. The guide block is connected to the bottom of the cleaning body. Two connecting grooves are provided on the support base, and a movable connecting device is slidably disposed within the connecting groove. A sliding groove is provided under the cleaning body, and the movable connecting device is slidably disposed within the sliding groove.

[0007] As a further aspect of the present invention: a magnetic plate is connected to the position of the movable connecting device in the guide groove, the inner wall of the guide groove is provided with an inclined surface on the side near the circular groove, and the side of the guide block is provided with an inclined surface on the side near the cylinder.

[0008] As a further embodiment of the present invention: the sliding groove is T-shaped, the supporting leg is cylindrical, the bottom end of the supporting leg is connected to an anti-slip pad, there are two guide grooves, and there are two connecting grooves and two sliding grooves.

[0009] As a further aspect of the present invention: the mobile cleaning device includes a drive assembly connected in a placement groove, the output shaft of the drive assembly is connected to a reciprocating lead screw, the reciprocating lead screw is externally threaded with a threaded cap, a sliding seat is externally connected to the threaded cap, and the sliding seat is slidably disposed in the placement groove.

[0010] As a further embodiment of the present invention: the other end of the reciprocating lead screw is connected to a limiting plate, the side of the sliding seat away from the circular groove is connected to a pressing connecting column, the pressing connecting column is connected inside the movable cleaning device, the other end of the pressing connecting column is connected to a moving rod, the side of the moving rod near the cleaning machine body is connected to a cleaning brush, the cleaning brush is located outside the cleaning machine body, and the pressing connecting column is cylindrical.

[0011] As a further aspect of the present invention: the movable cleaning device includes a movable frame, the front of which is provided with a guide hole, the movable cleaning device is slidably disposed in the guide hole, the guide hole is composed of an inclined section and a horizontal section, and an extension block is connected to the side of the movable frame.

[0012] As a further embodiment of the present invention: a sliding sleeve is provided through the extension block, a sliding rod is slidably connected inside the sliding sleeve, a fixing plate is connected to the top end of the sliding rod, the fixing plate is installed outside the cleaning machine body, a circular plate is connected to the bottom end of the sliding rod, a first elastic component is provided on the outer sleeve of the sliding rod, the top end of the first elastic component is connected to the sliding sleeve, and the bottom end of the first elastic component is connected to the circular plate.

[0013] As a further embodiment of the present invention: a middle rod is connected to the lower part of the movable frame, and a cleaning ring is connected to the other end of the middle rod, the cleaning ring being sleeved on the outside of the support leg.

[0014] As a further aspect of the present invention: the movable connecting device includes a connecting plate, a guide slider is connected to the connecting plate, the guide slider is slidably connected in a sliding groove, a second elastic component is connected to the side of the guide slider, and the other end of the second elastic component is connected in the sliding groove.

[0015] As a further aspect of the present invention: the connecting plate has a protruding limiting part on the side near the magnetic plate, the protruding limiting part is disposed in the connecting groove, the side of the connecting plate that is close to the magnetic plate has opposite magnetism, and the side of the connecting plate that is away from the magnetic plate is connected to a pull rod.

[0016] The beneficial effects of this invention are as follows:

[0017] 1. This invention comprises a drive assembly, a reciprocating screw, a threaded cap, a pressing connecting column, a moving frame, a guide hole, a cleaning ring, and a cleaning brush. The drive assembly controls the movement of the threaded cap, sliding seat, and pressing connecting column via the reciprocating screw. When the moving rod and cleaning brush move, they wipe and clean the cleaning agent adhering to the side of the cleaning machine body. When the pressing connecting column enters the guide hole, it controls the moving frame and cleaning ring to move downward, thereby controlling the cleaning ring to wipe and clean the cleaning agent adhering to the side of the support leg. This automatically cleans the cleaning machine body and the side of the support leg, avoiding corrosion caused by the cleaning agent over a long period of time and ensuring its normal service life to a certain extent.

[0018] 2. This invention uses a connecting plate, a guide slider, a second elastic component, a connecting groove, a magnetic plate, a guide block, and a guide groove. The guide groove guides the guide block, aligning it with the support base during the lowering of the cleaning machine body. Simultaneously, the connecting plate smoothly enters the connecting groove. Subsequently, the magnetic force between the connecting plate and the magnetic plate controls the protruding limiting part of the connecting plate to engage in the connecting groove, automatically completing the positioning and support of the cleaning machine body. The assembly operation between the two is convenient and quick. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0020] Figure 2 This is a three-dimensional structural diagram of the cleaning body and support base of the present invention.

[0021] Figure 3 This is a partial cross-sectional structural diagram of the support base of the present invention.

[0022] Figure 4 For the present invention Figure 3 Enlarged structural diagram of section B;

[0023] Figure 5 This is a three-dimensional structural schematic diagram of the mobile connection device of the present invention;

[0024] Figure 6 This is a three-dimensional structural schematic diagram of the mobile cleaning device of the present invention;

[0025] Figure 7 For the present invention Figure 6 Enlarged structural diagram of part A in the middle;

[0026] Figure 8 This is a three-dimensional structural schematic diagram of the active cleaning device of the present invention;

[0027] In the diagram: 1. Support base; 2. Cleaning machine body; 3. Placement slot; 4. Moving cleaning device; 41. Drive assembly; 42. Reciprocating screw; 43. Threaded cap; 44. Sliding seat; 45. Extrusion connecting column; 46. Moving rod; 47. Cleaning brush; 48. Limiting plate; 5. Movable cleaning device; 501. Moving frame; 502. Guide hole; 503. Extension block; 504. Sliding sleeve; 505. Sliding rod; 506. Fixing plate; 507. Circular plate; 508. First elastic component; 509. Intermediate rod; 510. Cleaning ring; 6. Support leg; 7. Circular groove; 8. Cylinder; 9. Guide groove; 10. Guide block; 11. Magnetic plate; 12. Connecting groove; 13. Sliding groove; 14. Moving connecting device; 141. Connecting plate; 142. Guide slider; 143. Second elastic component; 144. Protruding limiting part; 145. Pull rod. Detailed Implementation

[0028] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] like Figure 1-8 As shown, the present invention provides a positionable support device for a silicon wafer cleaning machine, including a support base 1 and a cleaning machine body 2. The cleaning machine body 2 is disposed on the support base 1, and placement grooves 3 are provided on both the front and rear sides of the support base 1. The movable cleaning device 4 is slidably disposed in the placement grooves 3.

[0030] Four support legs 6 are connected to the support base 1. The support legs 6 are cylindrical and the bottom of the support legs 6 are connected to anti-slip pads. The support legs 6 are covered with movable cleaning devices 5. Two of the movable cleaning devices 5 are slidably disposed outside the movable cleaning device 4. The movable cleaning devices 5 are installed outside the cleaning machine body 2.

[0031] A circular groove 7 is provided on the support base 1, and a cylinder 8 is slidably provided in the circular groove 7. The top end of the cylinder 8 is connected to the cleaning machine body 2. The circular groove 7 limits the cylinder 8 to prevent the cleaning machine body 2 from swaying horizontally relative to the support base 1.

[0032] The mobile cleaning device 4 includes a drive assembly 41, which is connected to the placement groove 3. The output shaft of the drive assembly 41 is connected to a reciprocating screw 42. The reciprocating screw 42 is externally threaded with a threaded cap 43. A sliding seat 44 is externally connected to the threaded cap 43. The sliding seat 44 is slidably disposed in the placement groove 3, forming a clamping space with the cleaning machine body 2 to prevent the sliding seat 44 from rotating as the reciprocating screw 42 rotates.

[0033] The other end of the reciprocating screw 42 is connected to a limit plate 48, and the side of the sliding seat 44 away from the circular groove 7 is connected to a pressing connecting column 45. The other end of the pressing connecting column 45 is connected to a moving rod 46, and the side of the moving rod 46 near the cleaning body 2 is connected to a cleaning brush 47, which is located outside the cleaning body 2.

[0034] A drive assembly 41 is used to control the rotation of the reciprocating screw 42. The reciprocating screw 42 and the threaded cap 43 work together to control the threaded cap 43, the extrusion connecting column 45 and the sliding seat 44 to move back and forth along the length of the reciprocating screw 42. A moving rod 46 and a cleaning brush 47 are used to wipe and clean the sides of the cleaning machine body 2.

[0035] The movable cleaning device 5 includes a movable frame 501, with guide holes 502 extending through its front and back sides. A cylindrical pressing connecting column 45 is slidably disposed within the guide hole 502, which consists of an inclined section and a horizontal section. When the pressing connecting column 45 passes through the inclined section of the guide hole 502, it controls the guide hole 502 to move vertically, thereby controlling the vertical movement of the movable frame 501.

[0036] An extension block 503 is connected to the side of the movable frame 501. A sliding sleeve 504 is installed through the extension block 503. A sliding rod 505 is slidably connected inside the sliding sleeve 504. A fixing plate 506 is connected to the top of the sliding rod 505, and the fixing plate 506 is installed outside the cleaning machine body 2. A circular plate 507 is connected to the bottom of the sliding rod 505. A first elastic component 508, such as a spring, is installed on the outer sleeve of the sliding rod 505. The top of the first elastic component 508 is connected to the sliding sleeve 504, and the bottom of the first elastic component 508 is connected to the circular plate 507. The sliding rod 505 guides the sliding sleeve 504 and the extension block 503 to ensure that the movable frame 501 does not rotate or shake when moving vertically, and to ensure the smooth and stable movement of the movable frame 501 and the cleaning ring 510.

[0037] A middle rod 509 is connected to the lower part of the movable frame 501. A cleaning ring 510 is connected to the other end of the middle rod 509. The cleaning ring 510 is sleeved on the outside of the support leg 6 and is used to wipe and clean the side of the support leg 6.

[0038] The support base 1 has two guide grooves 9, and a guide block 10 is slidably installed in each guide groove 9. The guide block 10 is connected to the bottom surface of the cleaning machine body 2. The inner wall of the guide groove 9 is inclined on the side near the circular groove 7, and the side of the guide block 10 is inclined on the side near the cylinder 8. The two inclined surfaces fit together, and the guide groove 9 guides the guide block 10, so that the cleaning machine body 2 can be smoothly and accurately aligned with the support base 1 during the lowering process. The support base 1 has two connecting grooves 12, and a movable connecting device 14 is slidably installed in each connecting groove 12. The bottom of the cleaning machine body 2 has a sliding groove 13, which is T-shaped. There are two connecting grooves 12 and two sliding grooves 13, and the movable connecting device 14 is slidably installed in the sliding groove 13. A magnetic plate 11 is connected in the guide groove 9 at the position corresponding to the movable connecting device 14, and the magnetic plate 11 and the connecting plate 141 are magnetically engaged.

[0039] The movable connecting device 14 includes a connecting plate 141, on which a guide slider 142 is connected. The guide slider 142 is slidably connected within a sliding groove 13. A second elastic component 143, such as a spring, is connected to the side of the guide slider 142. The other end of the second elastic component 143 is connected within the sliding groove 13. The sliding groove 13 limits and supports the guide block 10, preventing the guide block 10 from tilting, wobbling, or disengaging from the sliding groove 13, thus allowing the connecting plate 141 to move smoothly and stably. The second elastic component 143 applies elastic force to the guide block 10, preventing it from wobbling arbitrarily. When the connecting plate 141 loses external force, it can be controlled to reset.

[0040] A protruding limiting part 144 is provided on the side of the connecting plate 141 near the magnetic plate 11. The protruding limiting part 144 is located in the connecting groove 12. The side of the connecting plate 141 that is close to the magnetic plate 11 has opposite magnetism. A pull rod 145 is connected to the side of the connecting plate 141 away from the magnetic plate 11. After the protruding limiting part 144 is engaged and inserted into the connecting groove 12, it prevents vertical relative shaking between the cleaning machine body 2 and the support base 1. The magnetic force between the magnetic plate 11 and the connecting plate 141 can automatically control the protruding limiting part 144 to enter the connecting groove 12 and ensure that the protruding limiting part 144 maintains stable contact with the connecting groove 12 when it is not pulled by the outside.

[0041] Working principle of this invention:

[0042] When it is necessary to assemble the support base 1 and the cleaning body 2, the cleaning body 2 is lowered directly. At this time, the guide block 10 moves along the guide groove 9 and guides the cylinder 8 into the circular groove 7. At the same time, the connecting plate 141 and the protruding limiting part 144 enter the connecting groove 12. The magnetic force between the magnetic plate 11 and the connecting plate 141 will control the protruding limiting part 144 to enter the connecting groove 12. At this time, the assembly of the support base 1 and the cleaning body 2 is completed.

[0043] When the support leg 6 needs to be cleaned, the drive assembly 41 is controlled to work. The drive assembly 41 controls the reciprocating screw 42 to rotate. The reciprocating screw 42 controls the sliding seat 44, the pressing connecting column 45, the moving rod 46 and the cleaning brush 47 to move through the threaded cap 43. During the movement of the cleaning brush 47, the side of the cleaning body 2 will be wiped and cleaned. When the pressing connecting column 45 enters the guide hole 502, it will press the moving frame 501 to move downward. The sliding sleeve 504 moves downward along the sliding rod 505. At the same time, the moving frame 501 controls the cleaning ring 510 to move downward through the intermediate rod 509. When the cleaning ring 510 moves downward, it will move the support leg 6 downward and wipe and clean its surface. When the pressing connecting column 45 moves away from the guide hole 502, the first elastic component 508 controls the sliding sleeve 504 and the extension block 503 to move. At this time, the moving frame 501 and the cleaning ring 510 move upward to reset.

[0044] When it is necessary to disassemble the cleaning machine body 2, the connecting plate 141 can be moved directly by the pull rod 145. After the connecting plate 141 and the protruding limiting part 144 are separated from the connecting groove 12, the cleaning machine body 2 can be taken out upwards directly.

[0045] In the description of this invention, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0046] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0047] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0048] In this invention, unless otherwise expressly specified and limited, the first feature "on" or "below" the second feature may be in direct contact with the first and second features, or indirect contact through an intermediate medium. In the description of this specification, references to terms such as "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

Claims

1. A positionable support device for a silicon wafer cleaning machine, comprising a support base (1) and a cleaning machine body (2), characterized in that: The cleaning machine body (2) is mounted on a support base (1). Placement slots (3) are provided on both the front and rear sides of the support base (1). A movable cleaning device (4) is installed in each placement slot (3). The movable cleaning device (4) is slidably positioned within the placement slot (3) and is located outside the cleaning machine body (2). Four support legs (6) are connected to the support base (1). Movable cleaning devices (5) are mounted on the support legs (6), with two of the movable cleaning devices (5) slidably positioned outside the movable cleaning devices (4). The movable cleaning devices (5) are installed outside the cleaning machine body (2). A circular groove (7) is provided on the support base (1), and a cylinder (8) is slidably provided in the circular groove (7). The top of the cylinder (8) is connected to the cleaning machine body (2). A guide groove (9) is provided on the support base (1), and a guide block (10) is slidably provided in the guide groove (9). The guide block (10) is connected to the bottom of the cleaning machine body (2). Two connecting grooves (12) are provided on the support base (1), and a movable connecting device (14) is slidably provided in the connecting groove (12). A sliding groove (13) is provided under the cleaning machine body (2), and the movable connecting device (14) is slidably provided in the sliding groove (13). The mobile cleaning device (4) includes a drive assembly (41), which is connected in the placement groove (3). The output shaft of the drive assembly (41) is connected to a reciprocating screw (42). The reciprocating screw (42) is externally threaded with a threaded cap (43). The threaded cap (43) is externally connected to a sliding seat (44). The sliding seat (44) is slidably disposed in the placement groove (3). The other end of the reciprocating screw (42) is connected to a limit plate (48). The side of the sliding seat (44) away from the circular groove (7) is connected to a pressing connecting column (45). The pressing connecting column (45) is connected in the mobile cleaning device (5). The other end of the pressing connecting column (45) is connected to a moving rod (46). The side of the moving rod (46) close to the cleaning body (2) is connected to a cleaning brush (47). The cleaning brush (47) is disposed outside the cleaning body (2). The pressing connecting column (45) is cylindrical. The active cleaning device (5) includes a movable frame (501), a guide hole (502) is provided on the front of the movable frame (501), the extrusion connecting column (45) is slidably disposed in the guide hole (502), the guide hole (502) is composed of an inclined section and a horizontal section, an extension block (503) is connected to the side of the movable frame (501), a sliding sleeve (504) is provided through the extension block (503), a sliding rod (505) is slidably connected in the sliding sleeve (504), a fixing plate (506) is connected to the top of the sliding rod (505), the fixing plate (506) is installed outside the cleaning machine body (2), a circular plate (507) is connected to the bottom of the sliding rod (505), a first elastic component (508) is provided on the outer sleeve of the sliding rod (505), the top of the first elastic component (508) is connected to the sliding sleeve (504), and the bottom of the first elastic component (508) is connected to the circular plate (507).

2. The positionable support device for a silicon wafer cleaning machine according to claim 1, characterized in that: A magnetic plate (11) is connected to the guide groove (9) at the position corresponding to the movable connecting device (14). The inner wall of the guide groove (9) is set as an inclined surface on the side near the circular groove (7), and the side of the guide block (10) is set as an inclined surface on the side near the cylinder (8).

3. The positionable support device for a silicon wafer cleaning machine according to claim 1, characterized in that: The sliding groove (13) is T-shaped, the support leg (6) is cylindrical, the bottom end of the support leg (6) is connected to an anti-slip pad, the guide groove (9) is two, and the connecting groove (12) and the sliding groove (13) are both two.

4. The positionable support device for a silicon wafer cleaning machine according to claim 1, characterized in that: The movable frame (501) is connected to a middle rod (509) at the bottom, and the other end of the middle rod (509) is connected to a cleaning ring (510), which is sleeved on the outside of the support leg (6).

5. The positionable support device for a silicon wafer cleaning machine according to claim 2, characterized in that: The movable connecting device (14) includes a connecting plate (141), on which a guide slider (142) is connected. The guide slider (142) is slidably connected in a sliding groove (13). A second elastic component (143) is connected to the side of the guide slider (142), and the other end of the second elastic component (143) is connected in the sliding groove (13).

6. The positionable support device for a silicon wafer cleaning machine according to claim 5, characterized in that: The connecting plate (141) has a protruding limiting part (144) on the side near the magnetic plate (11), the protruding limiting part (144) is located in the connecting groove (12), the side of the connecting plate (141) that is close to the magnetic plate (11) has opposite magnetism, and the side of the connecting plate (141) away from the magnetic plate (11) is connected to a pull rod (145).

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