An air bearing device with measurable and controllable suspension posture

Abstract

The invention relates to the technical field of air bearings, and provides a suspension attitude measurable and controllable air bearing device, comprising a base, a throttle plate, a guide rail and a control device; the throttle plate is provided with an array of micropores; the base has an air storage channel, and the air storage channel is connected with the array of micropores; an air pressure detection device, an active air pressure control component and a plurality of laser ranging sensors are provided on the base; the air pressure detection device is used to obtain air pressure information of the air storage channel; the plurality of laser ranging sensors face the array of micropores, lasers can pass through the array of micropores and irradiate the upper surface of the guide rail, and the plurality of laser ranging sensors are used to obtain a plurality of height information between the laser ranging sensors and the upper surface of the guide rail; the control device is used to control the active air pressure control component according to the air pressure information and the height information; the suspension attitude measurable and controllable air bearing device can actively and accurately control air pressure and airflow, so as to maintain a stable air film and suspension height; and can predict air floating surface collision and adjust local air pressure to avoid collision.

Description

Technical Field

[0001] The invention relates to the technical field of air bearings, and in particular to an air bearing device with measurable and controllable suspension posture. Background Art

[0002] There are still some problems that need to be addressed in current air bearings, such as (1) how to accurately control air pressure and airflow to maintain a stable air film and suspension height; (2) in actual applications, the two air-floating surfaces of the air bearing may accidentally contact, affecting its accuracy. How to avoid such collisions? (3) Traditional air bearings do not have a self-checking function and cannot detect and adjust the suspension state in real time, increasing the risk of system instability.

[0003] Patent No. 202311827091.1 is an intelligent static pressure air bearing device and detection method, and Patent No. 202311639484.X is a real-time detection method and device for the air film thickness of a porous medium air bearing. These two patents explore the intelligence of air bearings, so that air bearings have preliminary detection functions. However, no solutions are given on how to accurately control air pressure and airflow, and how to avoid collisions of air bearing surfaces. In essence, it is still a passive air bearing without active adjustment function. For this reason, the present invention continues to delve into the direction of intelligent air bearings and proposes an air bearing device with measurable and controllable suspension posture. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide an air-floating bearing device with a measurable and controllable suspension posture, which gives the air-floating bearing the functions of active detection and active regulation, can actively adjust the intake pressure, stabilize the suspension height, can actively detect and avoid collisions, and can actively detect and regulate the suspension posture of the air-floating bearing.

[0005] To solve the above problems, the present invention adopts the following technical solutions:

[0006] A suspended attitude measurable and controllable air bearing device comprises a base, a throttle plate, a guide rail and a control device.

[0007] The throttle plate is located between the base and the guide rail, the throttle plate is fixedly connected to the base, and array micropores are arranged on the throttle plate.

[0008] The base has an air storage channel, and the air storage channel is communicated with the array micropores.

[0009] An air pressure detection device, an active air pressure control component and a plurality of laser ranging sensors are arranged on the base, and the air pressure detection device, the active air pressure control component and the plurality of laser ranging sensors are all electrically connected to the control device.

[0010] The air pressure detection device is used to obtain the air pressure information of the air storage channel.

[0011] The plurality of laser ranging sensors face the array microholes so that the laser can pass through the array microholes and irradiate the upper surface of the guide rail. The plurality of laser ranging sensors are used to obtain a plurality of height information between the laser ranging sensors and the upper surface of the guide rail.

[0012] The control device is used to control the active air pressure control component according to the air pressure information and the plurality of height information, so as to adjust the suspension posture and suspension height of the base and the throttle plate.

[0013] In the air bearing device with measurable and controllable suspension posture provided by at least one embodiment of the present disclosure, the laser ranging sensor is a laser confocal sensor.

[0014] In the air bearing device with measurable and controllable suspension posture provided by at least one embodiment of the present disclosure, the air pressure detection device is an air pressure sensor.

[0015] In the air bearing device with measurable and controllable suspension posture provided by at least one embodiment of the present disclosure, a first assembly hole and a second assembly hole are provided on the base.

[0016] The first assembly hole and the second assembly hole are both communicated with the air storage channel, and the air pressure detection device and the laser ranging sensor are respectively assembled in the first assembly hole and the second assembly hole.

[0017] In the air bearing device with measurable and controllable suspension posture provided by at least one embodiment of the present disclosure: the control device is fixedly arranged on the upper surface of the base.

[0018] In the air-floating bearing device with measurable and controllable suspension posture provided in at least one embodiment of the present disclosure: an air inlet hole and a third assembly hole are provided on the base, the active air pressure control component is assembled in the third assembly hole, and the active air pressure control component is used to control the flow cross-sectional area of ​​the air inlet hole, so as to change the air pressure in the air storage channel.

[0019] In the air-floating bearing device with measurable and controllable suspension posture provided by at least one embodiment of the present disclosure: the active air pressure control component includes a piezoelectric ceramic, a valve seat, a guide seat and a valve core, the guide seat is mounted on the valve core, one end of the piezoelectric ceramic is bonded to the top of the valve core, the other end of the piezoelectric ceramic is bonded to the inner top surface of the valve seat, the upper surface of the guide seat is bonded to the lower surface of the valve seat, and the bottom end of the valve core is located in the air inlet hole.

[0020] In the air bearing device with measurable and controllable suspension posture provided in at least one embodiment of the present disclosure, three air storage channels are configured, and the three air storage channels are distributed in a ring array.

[0021] The air pressure detection device, the active air pressure control assembly and the laser ranging sensor are arranged in three groups, and correspond one to one with the three air storage passages.

[0022] In the air-floating bearing device with measurable and controllable suspension posture provided in at least one embodiment of the present disclosure: the channel of the air inlet hole is arranged in an L shape, one of the openings of the air inlet hole is connected to the air storage channel, and the other opening of the air inlet hole is located on the side of the base.

[0023] The bottom end of the valve core is located at a right angle to the air inlet hole.

[0024] The air bearing device with measurable and controllable suspension posture provided by at least one embodiment of the present disclosure further includes a curved display configured to be electrically connected to the control device.

[0025] The side surface of the base is provided with an assembly groove, the curved display is fixedly arranged in the assembly groove, and the curvature of the curved display is the same as the curvature of the outer wall of the base.

[0026] The present invention has the following beneficial effects:

[0027] Compared with the prior art, the present invention provides the air bearing with the functions of active detection and active regulation, can actively adjust the intake pressure, stabilize the suspension height, can actively detect and avoid collisions, and can actively detect the suspension posture of the air bearing. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present disclosure and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 A stereoscopic view of an air bearing device with measurable and controllable suspension posture according to some embodiments is shown.

[0030] Figure 2 A schematic diagram showing the distribution of array microwells in some embodiments is shown.

[0031] Figure 3 A schematic diagram showing the distribution of air pressure detection devices, active air pressure control components and laser ranging sensors in some embodiments is shown.

[0032] Figure 4 A perspective view of a base in some embodiments is shown.

[0033] Figure 5A partial cross-sectional view of an air bearing device with measurable and controllable suspension posture in some embodiments is shown.

[0034] Figure 6 A top view of a control device in some embodiments is shown.

[0035] Figure 7 A posture schematic diagram of an air bearing device with measurable and controllable suspension posture is shown.

[0036] Figure 8 The flow chart of the air storage channel air pressure feedforward PID control algorithm is shown.

[0037] Fig. 9 A collision avoidance algorithm flow chart is shown.

[0038] Fig.10 A stereoscopic view of an air bearing device with measurable and controllable suspension posture according to some embodiments is shown.

[0039] Fig.11 A stereoscopic view of the suspended posture measurable and controllable air bearing device of some embodiments is shown after the connecting seat is removed.

[0040] Fig.12 A cross-sectional view of an air bearing device with measurable and controllable suspension posture according to some embodiments is shown.

[0041] In the figure:

[0042] 1. Base; 11. Air storage channel; 12. Air pressure detection device; 13. Active air pressure control assembly; 14. Laser ranging sensor; 15. First assembly hole; 16. Second assembly hole; 17. Air inlet hole; 18. Third assembly hole; 19. Assembly groove; 131. Piezoelectric ceramic; 132. Valve seat; 133. Guide seat; 134. Valve core; 10. Spherical protrusion;

[0043] 2. Curved display;

[0044] 3. Throttle plate; 31. Array micropores;

[0045] 4. Guide rails;

[0046] 5. Control device; 51. PCB circuit board; 52. Piezoelectric ceramic ADC circuit; 53. Information exchange circuit; 54. MCU main control circuit;

[0047] 6. Connecting seat; 61. Depression;

[0048] 7. Soft bolts. DETAILED DESCRIPTION

[0049] The example embodiments of the present disclosure may be modified in various ways. Therefore, various example embodiments are shown in the accompanying drawings and described in more detail. However, it will be understood that the present disclosure is not limited to specific example embodiments, but includes all modifications, equivalents and alternative forms without departing from the scope and spirit of the present disclosure.

[0050] Example

[0051] like Figures 1 to 6 As shown, this embodiment provides an air bearing device with a measurable and controllable suspension posture, including a base 1, a throttle plate 3, a guide rail 4 and a control device 5.

[0052] The throttle plate 3 is located between the base 1 and the guide rail 4, and an array of micropores 31 is arranged on the throttle plate 3. The base 1 has an air storage channel 11, and the air storage channel 11 is connected to the array of micropores 31.

[0053] The diameter of the micropores of the array micropores is between 50 and 150 microns, the thickness of the throttle plate 3 is 1.5 mm, and the throttle plate 3 is fixed to the bottom surface of the base 1 by gluing; the central axis of the throttle plate 3 coincides with the central axis of the base 1.

[0054] An air pressure detection device 12 , an active air pressure control component 13 and a laser distance sensor 14 are provided on the base 1 , and the air pressure detection device 12 , the active air pressure control component 13 and the laser distance sensor 14 are all electrically connected to the control device 5 .

[0055] The air pressure detection device 12 is used to obtain the air pressure information of the air storage passage 11 when in use.

[0056] When fixing the throttle plate 3, the array microholes need to be facing the laser ranging sensor 14, so that the laser emitted by the laser ranging sensor 14 can be emitted from the microholes, so that the laser can pass through the array microholes 31 and irradiate the upper surface of the guide rail 4. When in use, the laser ranging sensor 14 is used to obtain multiple height information between it and the upper surface of the guide rail 4, so that the control device 5 can judge the thickness of the air film according to the height information and the threshold.

[0057] The control device 5 is used to control the active air pressure control component 13 according to the air pressure information and the multiple height information, so as to adjust the suspension posture and suspension height of the base 1 and the throttle plate 3.

[0058] In the embodiment of the present application, the laser distance measuring sensor 14 is a laser confocal sensor. The air pressure detection device 12 is an air pressure sensor.

[0059] In the embodiment of the present application, a first assembly hole 15 and a second assembly hole 16 are provided on the base 1 .

[0060] The first assembly hole 15 and the second assembly hole 16 are both connected to the air storage channel 11 , and the air pressure detection device 12 and the laser distance sensor 14 are respectively assembled in the first assembly hole 15 and the second assembly hole 16 .

[0061] In an embodiment of the present application, an air inlet hole 17 and a third assembly hole 18 are provided on the base 1, the air inlet hole 17 and the third assembly hole 18 are connected, and the active air pressure control component 13 is assembled in the third assembly hole 18. The active air pressure control component 13 is used to control the flow cross-sectional area of ​​the air inlet hole 17, thereby achieving a change in the air pressure of the air storage channel 11.

[0062] In an embodiment of the present application, the active air pressure control component 13 includes a piezoelectric ceramic 131, a valve seat 132, a guide seat 133 and a valve core 134. The guide seat 133 is sleeved on the valve core 134. One end of the piezoelectric ceramic 131 is bonded to the top of the valve core 134, and the other end of the piezoelectric ceramic 131 is bonded to the inner top surface of the valve seat 132. The upper surface of the guide seat 133 is bonded to the lower surface of the valve seat 132, and the bottom end of the valve core 134 is located in the air inlet hole 17.

[0063] The valve seat 132 is fastened in the third assembly hole 18 by means of connection.

[0064] When in use, the valve core 134 can be controlled by the piezoelectric ceramic 131 to move slightly up and down, so that the flow area of ​​the air inlet hole 17 can be adjusted, thereby achieving the effect of controlling the air pressure.

[0065] In the embodiment of the present application, three air storage passages 11 are configured, and the three air storage passages 11 are distributed in a ring array.

[0066] The air pressure detection device 12 , the active air pressure control component 13 and the laser distance sensor 14 are equipped with three groups, and the three groups of equipment correspond to the three air storage channels 11 one by one.

[0067] Likewise, three groups of the first assembly holes 15 , the second assembly holes 16 , the air inlet holes 17 and the third assembly holes 18 are provided.

[0068] The three air pressure sensors detect the pressures of the three air storage channels 11 respectively, and provide feedback values ​​for the pressure control component to control the pressures of the air storage channels.

[0069] It should be pointed out that the number of air storage channels 11 can be designed according to actual needs. For example, the number of air storage channels 11 can be two, or the number of air storage channels 11 can be four; however, no matter how many air storage channels 11 there are, the number of air pressure detection devices 12, active air pressure control components 13 and laser ranging sensors 14 will be the same, so as to obtain the information of each air storage channel and its corresponding position respectively.

[0070] In an embodiment of the present application, a PCB circuit board 51 of the control device 5 is installed on the upper surface of the base 1 , and the PCB circuit board 51 has a laser confocal sensor ADC circuit, a piezoelectric ceramic ADC circuit 52 , an information exchange circuit 53 and an MCU main control circuit 54 .

[0071] The function of the laser confocal sensor ADC circuit is to receive signals from an external laser confocal sensor processor; the piezoelectric ceramic ADC circuit is used to receive signals from an external piezoelectric ceramic processor; the information exchange circuit 53 is used to transfer the required electrical signals between various circuits, and at the same time, the information exchange circuit 53 is used to establish electrical signal exchange between external devices and devices on the PCB circuit board; the MCU main control circuit is used to run local algorithms to achieve air pressure control, collision detection, posture detection, etc.

[0072] The piezoelectric ceramic 131 has two pins connected to an external piezoelectric ceramic processor (not shown), and the optical fiber of the laser confocal sensor is connected to an external laser confocal laser processor (not shown)

[0073] In the embodiment of the present application, the air inlet 17 is L-shaped, one of the openings of the air inlet 17 is connected to the air storage channel 11, and the other opening of the air inlet 17 is located on the side of the base 1. The bottom end of the valve core 134 is located at a right angle to the air inlet 17.

[0074] In the embodiment of the present application, the suspended posture measurable and controllable air bearing device further includes a curved display 2 , and the curved display 2 is electrically connected to the control device 5 .

[0075] A mounting groove 19 is provided on the side of the base 1 , and the curved display 2 is fixedly disposed in the mounting groove 19 . The curvature of the curved display 2 is the same as the curvature of the outer wall of the base 1 .

[0076] like Figures 10 to 12 As shown, in some embodiments, the suspended attitude measurable and controllable air bearing device further includes a connecting seat 6 and a soft bolt 7; a spherical protrusion 10 is provided at the top of the base 1, and a recess 61 matching the spherical protrusion 10 is provided at one end of the connecting seat 6, the recess 61 and the spherical protrusion 10 cooperate with each other to form a spherical hinge, and the soft bolt 7 is threadedly connected to the base 1 and presses the connecting seat 6 on the base. The connecting seat 6 can be connected to the external slide, and because the base 1 and the connecting seat 6 are spherically matched, and the soft bolt 7 has a certain deformation ability, this enables the air bearing to adaptively adjust its own state according to the air film pressure distribution.

[0077] Furthermore, in order to facilitate the installation of the connecting seat 6, the PCB circuit board is designed to be ring-shaped, the connecting seat 6 is inserted into the ring hole of the PCB circuit board, and there is a gap between the ring hole of the PCB circuit board and the connecting seat 6.

[0078] In order to further disclose the working principle of a suspended attitude measurable and controllable air bearing device in the embodiment, the attitude detection, collision detection and air pressure control methods will be described in detail below.

[0079] Posture detection method:

[0080] like Figure 7 As shown, three laser confocal sensors detect three height points, namely high1, higt2, and higt3. Since the three points form a plane, first assume that higt1=higt2=higt3=0. At this time, the surface formed by the three points is called the reference surface face. Standard , the surface formed by three points in real time is called face now , the posture of the air bearing refers to the face now Relative to face Standard Angle θ of rotation around X0 and Y0 X ,θ y , θ can be obtained by the vector method X , and θ y , assuming B0 = (x1, y1, z1), B1 = (x2, y2, z2), B2 = (x3, y1, z1), then the vector Z now ,X0,X0,Z0 can be calculated by the following formula:

[0081]

[0082] θ X and θ y That is the vector Respectively and The angle is calculated as follows:

[0083]

[0084] Collision detection method:

[0085] From the above, we can know that the distances measured by the three laser confocal sensors are high1, high2, and high3 respectively. Set a threshold high hit , according to the roughness of the two air bearing surfaces, high hit = 2 microns, the MCU main control circuit receives the conversion value of the laser confocal sensor ADC circuit, and loops to determine whether high1, high2, and high3 are less than high hit , the pseudo code is as follows:

[0086] If high1 <high hit or high2 <high hit or high3 <high hit

[0087] collision;

[0088] Or

[0089] No collision;

[0090] End.

[0091] Active control method of air pressure:

[0092] When designing an air bearing, its static characteristics are usually designed under a specific pressure. Therefore, in actual application, its intake pressure needs to be fixed. The present invention controls the gas pressure entering the three air storage channels through a piezoelectric ceramic closed-loop control, and adopts a feedforward PID control algorithm to stabilize the air pressure value by controlling the displacement of the piezoelectric ceramic. For example, the air pressure value of the air storage channel is set to 5 Bar, and the fluctuation range is one thousandth. The relationship between the displacement and voltage of the piezoelectric ceramic is generally nonlinear. Controlling the voltage value of the piezoelectric ceramic makes the piezoelectric ceramic expand and contract, thereby controlling the flow area of ​​the air inlet hole, thereby controlling the pressure of the air storage channel. In general, the intake pressure needs to be greater than the pressure of the air storage channel.

[0093] For example, if 6 Bar pressure is introduced into the air inlet, the air pressure control algorithm flow of the air storage channel is as follows Figure 8 As shown, PPMAC_INPUT is the algorithm input air pressure, such as the above-mentioned air storage channel air pressure setting value of 5Bar, PPMAC_INPUT2 is the error, that is, the error between the actual air storage channel pressure and the setting value, PPMAC_INPUT1 is the actual air storage channel pressure collected by three air pressure sensors, PPMAC_Servo_RTN is the voltage value output by the algorithm to the piezoelectric ceramic. Since the driving circuit of the piezoelectric ceramic is an external circuit, the MCU active circuit runs the algorithm and transmits the voltage value to the information exchange circuit, and then transmits it to the external circuit.

[0094] The collision avoidance algorithm is based on the above-mentioned collision detection algorithm and the active air pressure control algorithm, as follows:

[0095] The collision algorithm detects that the local air film thickness is less than the threshold, such as the distance detected by the laser confocal sensor is less than the high hit , then the number of the air storage channel that is about to collide is given.

[0096] The other air film design value is taken as the set value, the local air film thickness is taken as the target value, the piezoelectric ceramic displacement is taken as the control value, and the PID algorithm is used to adjust the corresponding air storage channel pressure to stabilize the air film thickness to the set value. The algorithm flow is as follows: Fig. 9As shown, PPMAC_I NPUT is the algorithm input gas film thickness, such as the average value of the measurement values ​​of the two laser confocal sensors mentioned above, PPMAC_I NPUT2 is the gas film thickness collected by the remaining laser confocal sensor, and PPMAC_Servo_RTN is the voltage value output by the algorithm to the piezoelectric ceramic. Since the driving circuit of the piezoelectric ceramic is an external circuit, the MCU active circuit runs the algorithm and transmits the voltage value to the information exchange circuit, and then transmits it to the external circuit.

[0097] Example embodiments of the present inventive concept are described herein with reference to cross-sectional or plan views, which are schematic diagrams of idealized embodiments and intermediate structures of the example embodiments. As such, deviations from the illustrated shapes, for example as a result of manufacturing techniques and / or tolerances, are expected. Therefore, example embodiments of the present inventive concept should not be construed as limited to the specific shapes shown herein, but include deviations from shapes caused, for example, by manufacturing.

[0098] The subject matter disclosed above is to be considered illustrative and not restrictive, and the appended claims are intended to cover all such modifications, enhancements, and other embodiments that fall within the true spirit and scope of the inventive concept. Therefore, to the maximum extent allowed by law, the scope is to be determined by the broadest permissible interpretation of the appended claims and their equivalents, and shall not be restricted or limited by the foregoing detailed description.

Claims

1. An air bearing device with a measurable and controllable suspension posture, characterized in that: include: bases, throttle plates, guides and controls; The throttle plate is located between the base and the guide rail, the throttle plate is fixedly connected to the base, and an array of microholes is arranged on the throttle plate; The base has an air storage channel, and the air storage channel is connected to the array micropores; An air pressure detection device, an active air pressure control component and a plurality of laser ranging sensors are arranged on the base, and the air pressure detection device, the active air pressure control component and the plurality of laser ranging sensors are all electrically connected to the control device; The air pressure detection device is used to obtain the air pressure information of the air storage channel; The plurality of laser distance measuring sensors face the array micro-holes, so that the laser can pass through the array micro-holes and irradiate the upper surface of the guide rail, and the plurality of laser distance measuring sensors are used to obtain a plurality of height information between the laser distance measuring sensors and the upper surface of the guide rail; The control device is used to control the active air pressure control component according to the air pressure information and the plurality of height information to adjust the suspension posture and suspension height of the base and the throttle plate; The base is provided with an air inlet hole and a third assembly hole, the active air pressure control component is assembled in the third assembly hole, and the active air pressure control component is used to control the flow cross-sectional area of ​​the air inlet hole, so as to change the air pressure in the air storage channel; The active air pressure control assembly includes a piezoelectric ceramic, a valve seat, a guide seat and a valve core, wherein the guide seat is sleeved on the valve core, one end of the piezoelectric ceramic is bonded to the top of the valve core, the other end of the piezoelectric ceramic is bonded to the inner top surface of the valve seat, the upper surface of the guide seat is bonded to the lower surface of the valve seat, and the bottom end of the valve core is located in the air inlet hole; The air inlet hole is L-shaped, one of the openings of the air inlet hole is connected to the air storage channel, and the other opening of the air inlet hole is located on the side of the base; The bottom end of the valve core is located at a right angle to the air inlet hole.

2. The air bearing device with measurable and controllable suspension posture according to claim 1, characterized in that: The laser distance measuring sensor is a laser confocal sensor.

3. The air bearing device with measurable and controllable suspension posture according to claim 1, characterized in that: The air pressure detection device is an air pressure sensor.

4. The air bearing device with measurable and controllable suspension posture according to claim 1, characterized in that: The base is provided with a first assembly hole and a second assembly hole; The first assembly hole and the second assembly hole are both communicated with the air storage channel, and the air pressure detection device and the laser ranging sensor are respectively assembled in the first assembly hole and the second assembly hole.

5. The air bearing device with measurable and controllable suspension posture according to claim 1, characterized in that: The control device is fixedly arranged on the upper surface of the base.

6. The air bearing device with measurable and controllable suspension posture according to claim 1, characterized in that: The gas storage passages are configured in three numbers, and the three gas storage passages are distributed in a ring array; The air pressure detection device, the active air pressure control assembly and the laser ranging sensor are arranged in three groups, and correspond one to one with the three air storage passages.

7. The air bearing device with measurable and controllable suspension posture according to claim 1, characterized in that: Also includes: a curved display configured to be electrically connected to the control device; Wherein, a mounting groove is provided on the side surface of the base, the curved display is fixedly arranged in the mounting groove, and the curvature of the curved display is the same as the curvature of the outer wall of the base.

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