A micro air floating measuring head based on diamond vibrator driving
The miniature air-bearing probe driven by a rhombic oscillator achieves frictionless linear motion using an air-bearing guide rail and a capacitive sensor. This solves the problem that existing micro-displacement measurement devices struggle to achieve high precision, miniaturization, and low measurement force simultaneously, thus realizing miniaturized measurement with high precision and low friction.
CN118857073BActive Publication Date: 2026-06-26BEIJING UNIV OF TECH
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- BEIJING UNIV OF TECH
- Filing Date
- 2024-05-27
- Publication Date
- 2026-06-26
AI Technical Summary
Technical Problem
Existing micro-displacement measurement devices cannot simultaneously achieve high precision, miniaturized structure, and miniaturized measurement force.
Method used
The miniature air-bearing probe driven by a rhombic oscillator achieves frictionless motion using an air-bearing guide rail. Combined with capacitive sensor measurement, the probe is driven to move linearly by the rhombic oscillator, and the measurement force and accuracy are controlled by active triggering and self-locking functions.
Benefits of technology
It achieves high-precision, low-friction miniaturized measurement, has a wide range of applications, controllable measurement force, high repeatability accuracy, and reduces errors introduced by probe deformation.
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Figure CN118857073B_ABST
Abstract
A kind of micro air floating measuring head based on diamond vibrator drive belongs to high-precision measurement and electromechanical technical field;Two air floating short sleeves are fixedly connected on the base of the device, air floating guide rail is installed between the base and air floating short sleeve, measuring needle and metal target are respectively fixedly connected at the two ends of air floating guide rail;Diamond vibrator is installed in the middle of air floating guide rail, pre-tightening hinge is installed on the periphery of diamond vibrator, the matching relationship between pre-tightening hinge and both sides of diamond vibrator is interference fit, pre-tightening hinge is fixedly connected with motor cover shell through upper mounting hole, motor cover shell is installed between two air floating short sleeves and is fixedly connected on the base, and capacitor sensor is installed on the side facing metal target.The device has no Abbe error in principle, has active trigger and self-locking function, so it has the advantages of small trigger measurement force and high measurement precision.
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