A method, device and system for detecting small holes on the surface of air bearing for air spindle

Abstract

The present application relates to the field of air bearing processing, in particular to a method, device and system for detecting small holes on the surface of air bearings for air spindles. The method includes: obtaining an image of the small hole of the grooved floating bearing; judging the preliminary processing status of the small hole of the bearing based on the image; inserting a conical probe into the small hole on the surface of the air bearing for the air spindle, and obtaining the state of the light spot on the photosensitive component; judging the processing status of the small hole based on the state of the light spot. The technical problem that the method for detecting small holes on the surface of air bearings for air spindles in the prior art does not meet the detection requirements is solved, and the technical effect of improving the small hole detection accuracy, detection efficiency and the quality of the finished air bearings for air spindles is achieved.

Description

Technical Field

[0001] The present application relates to the field of air bearing processing, and in particular to a method, detection and system for detecting small holes on the surface of an air bearing for an air spindle. Background Art

[0002] In the field of ultra-precision machining equipment, the requirements for the precision of the machined parts are getting higher and higher. Since air bearings for air spindles have the advantages of low friction, low temperature rise, large load-bearing capacity and high precision, they are widely used in ultra-precision machining equipment.

[0003] The existing air bearings for air spindles need to be processed into multiple small holes that meet the requirements on the bearing blank by small hole processing equipment. However, it is generally difficult for the existing small hole processing equipment to process all the small holes to meet the requirements at one time. It is usually necessary to observe and measure the small holes during the processing process. By observing the processing of the small holes, the processing process is adjusted to make the processing results meet the requirements. The existing measurement method generally requires the bearing blank to be removed from the fixture and the small holes to be measured using a pin gauge. After the measurement is completed, the bearing blank is installed back. The measurement process is relatively complicated and will affect the processing accuracy of the small holes. At the same time, the existing measurement method can only perform the most basic measurement of the small holes, and the measurement of the pin gauge may damage the hole wall of the small hole and affect the processing effect of the air bearing for air spindle.

[0004] Therefore, the problem of the prior art is that the pinhole detection method does not meet the detection requirements. Summary of the invention

[0005] The present application provides a small hole processing equipment, which solves the technical problem that the surface small hole detection method of air bearing for air spindle in the prior art does not meet the detection requirements, and achieves the technical effect of improving the small hole detection accuracy, detection efficiency and the quality of the finished product of air bearing for air spindle.

[0006] The present application provides a method for detecting small holes on the surface of an air bearing for an air spindle, comprising the following steps: obtaining an image of the small hole of the air bearing for an air spindle; judging the preliminary processing condition of the small hole of the bearing based on the image; obtaining the state of a light spot on a photosensitive component; and judging the processing condition of the small hole based on the state of the light spot.

[0007] Preferably, the detection method further comprises the following steps: ventilating the air bearing for the air spindle; dripping a leak detection liquid into the small holes on the surface of the air bearing for the air spindle; obtaining the state of the leak detection liquid at the target small holes and transmitting it to the judgment module.

[0008] Preferably, the step of obtaining the light spot state includes: turning on the light emitting component, adjusting the light emission position so that the light spot is located on the photosensitive component; recording the position of the light spot after the conical probe tends to be stable; driving the conical probe to move in the small hole, recording the change of the light spot position during the movement, and calculating the light spot position information generated by the light emitting component, the light spot position change or its transformed information.

[0009] Preferably, the detection method also includes the following steps: clearing the leak detection liquid at the small hole on the surface of the air spindle air bearing; inserting the conical probe into the small hole on the surface of the air spindle air bearing; after completing the detection of the small hole, controlling the conical probe to detach from the small hole; the clamping assembly drives the air spindle air bearing to rotate to the next position to be tested; repeating the above steps until the record of the small hole processing conditions on the entire air spindle air bearing surface is completed.

[0010] Preferably, the detection method further comprises the following steps: obtaining the position of the small hole on the surface of the air bearing for the air spindle and transmitting it to the control module; controlling the driving device to move the conical probe to the specified small hole position and controlling the conical probe to enter the small hole.

[0011] Preferably, the small hole detection method also includes the following steps: acquiring multiple images of the same small hole within a unit time; comparing the multiple acquired images to obtain the preliminary processing status of the target small hole; if the processing status of the target small hole meets the preliminary processing requirements, the preliminary processing of the small hole is completed; if the processing status of the target small hole does not meet the preliminary processing requirements, continue to process the small hole.

[0012] The present application also provides an apparatus, comprising: a fixture, a visual inspection device, a conical probe and a displacement detection device, wherein the visual inspection device is installed on the fixture and is used to obtain the position information of the bearing hole; a conical probe is provided at one end of the conical probe, and the outer diameter of the conical probe is smaller than the inner diameter of the small hole on the surface of the air bearing for the air spindle; the displacement detection device is installed on the fixture, and the displacement detection device can be used to detect the displacement of the conical probe in the small hole.

[0013] Preferably, the displacement detection device comprises: a light-emitting component and a light-sensing component; the light-emitting component is connected to the conical probe; the light-sensing component is installed on the fixture, and the light-sensing component is used to receive optical information generated by the light-emitting component.

[0014] Preferably, the detection device further comprises a driving device, which is movably connected to the conical probe and can drive the conical probe to enter the small hole; wherein the driving device is movably connected to the conical probe.

[0015] The present application also provides a system, including: an acquisition module, a storage module and a judgment module, the acquisition module is configured to: acquire the pinhole image and light spot position information of the bearing; the storage module is configured to: receive and store the pinhole image and light spot position information; the judgment module is configured to: judge the micro-hole processing status based on the pinhole image and light spot position information.

[0016] In summary, the present application includes at least one of the following beneficial technical effects:

[0017] 1. Provide a surface detection method for air bearings for air spindles, which can judge the preliminary processing conditions of the small holes through imaging at the small holes, and can judge the specific processing conditions of the small holes through the photosensitive components on the surface of the small holes on the premise that the preliminary processing conditions meet the requirements. When the judgment result does not meet the requirements, the small holes can continue to be processed until they meet the requirements. In this way, the preliminary processing conditions of the small holes can be judged by imaging, that is, whether the small holes are penetrated and processed to the point where they can pass through the conical probe, to avoid the inability to perform subsequent measurements; at the same time, by obtaining the state of the light spot on the photosensitive component, it is possible to quickly measure a variety of data inside the small holes without destroying the internal structure of the small holes, thereby improving the measurement efficiency of the air bearings for air spindles while ensuring the quality of the air bearings for air spindles.

[0018] 2. A surface detection method for air bearings for air spindles is provided. The small holes on the surface of the air bearings for air spindles are preliminarily measured by using a leak detection liquid and a collection component. The preliminary detection of the air bearings for air spindles can be completed without entering the small holes or removing the air bearings for air spindles. The detection speed and the processing accuracy of the air bearings for air spindles are increased, thereby ensuring the finished product quality of the air bearings for air spindles.

[0019] 3. Provide a device for detecting small holes on the surface of an air bearing for an air spindle. By setting a conical probe and a photosensitive component connected to the conical probe, when the conical probe enters the small hole on the surface of the air bearing for the air spindle, compressed gas flows from the inside of the air bearing for the air spindle to the surface of the air bearing for the air spindle. Under the action of the flowing gas, the conical probe is maintained at the center position of the small hole. When the conical probe moves in the small hole, the light-emitting component connected to the conical probe moves synchronously and is displayed on the photosensitive component, thereby completing the measurement of the verticality of the small hole on the bearing surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the conventional technology, the drawings required for use in the embodiments or the conventional technology descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0021] Figure 1 A method for detecting small holes on the surface of an air bearing for an air spindle according to an embodiment of the present invention;

[0022] Figure 2 A schematic diagram of the structure of a detection device according to an embodiment of the present invention;

[0023] Figure 3 A detection device according to an embodiment of the present invention.

[0024] Figure numerals: 100, air bearing for air spindle; 110, air cavity; 120, seal; 130, small hole; 200, clamp; 210, clamping part; 300, conical probe; 310, conical probe; 400, light-emitting component; 500, photosensitive component; 600, driving device; 610, driving unit. DETAILED DESCRIPTION

[0025] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0026] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may also be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0027] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0028] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediate medium. Moreover, a first feature being “above”, “above” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0029] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more related listed items.

[0030] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings). In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0031] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0032] The form of small hole throttling requires that multiple small holes that meet the requirements be processed on the bearing blank by small hole processing equipment. The existing small hole processing equipment is limited by its own precision requirements. When processing small holes, it is generally difficult to process all small holes to meet the requirements at one time. It is usually necessary to measure the processed small holes during the processing to observe the processing of the small holes and adjust the processing equipment. The existing measurement method generally requires the bearing blank to be removed from the fixture and the small holes to be measured using a pin gauge. After the measurement is completed, the bearing blank is installed back. The measurement process is relatively complicated and will affect the processing accuracy of the small holes. At the same time, the existing measurement method can only perform the most basic measurement of the small holes, and the pin gauge measurement may damage the hole wall of the small hole, affecting the processing effect of the air bearing for the air spindle.

[0033] In order to solve the above problems, Figure 1 As shown, the present invention first provides a method for detecting small holes on the surface of an air bearing for an air spindle. The method solves the technical problem that the small hole detection method in the prior art does not meet the detection requirements, and by providing a new small hole detection method, the technical effect of improving the small hole detection accuracy, detection efficiency, and the quality of the finished product of the air bearing for the air spindle is achieved.

[0034] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods. It should be understood that the specific embodiments described here are only used to explain the present application and are not used to limit the present application.

[0035] like Figure 1 As shown, specifically, the method for detecting small holes on the surface of an air bearing for an air spindle includes:

[0036] Step S110: acquiring an image of the small hole 130 of the air bearing 100 for the air spindle;

[0037] When detecting the small holes 130 on the surface of the air bearing 100 for the air spindle, it is first necessary to obtain the image of the small hole 130 of the air bearing 100 for the air spindle through the acquisition module, and transmit the image of the small hole 130 to the storage module; the method for obtaining the image of the small hole 130 is to obtain the image of the small hole 130 of the air bearing 100 for the air spindle through the acquisition module (preferably a visual shooting component, such as a CCD camera, etc.).

[0038] Step S120: judging the preliminary processing condition of the bearing hole 130 based on the imaging;

[0039] In the present invention, when inspecting the processing condition of the small hole 130 on the bearing surface, it is necessary to insert the conical probe 310 into the small hole 130. Before inserting the conical probe 310 into the small hole 130, it is necessary to first perform a preliminary inspection on the small hole 130 to detect whether the small hole 130 is penetrated and whether the aperture of the small hole 130 allows the conical probe 310 to pass through. However, due to the depth and size of the small hole 130, it is impossible to directly determine whether the small hole 130 is penetrated or whether the preliminary processing condition of the small hole 130 meets the requirements. Therefore, it is necessary to first image the small hole 130 on the surface of the air bearing 100 for the air spindle for judgment.

[0040] The judgment module judges the preliminary processing condition of the small hole 130 on the bearing surface based on the imaging result at the small hole 130. If the result meets the processing condition, the next measurement process can be carried out. If the result does not meet the condition, the small hole 130 will continue to be processed until it meets the preliminary detection result. The preliminary processing condition of the small hole 130 specifically includes whether the small hole 130 is penetrated, the aperture size of the small hole 130, etc.

[0041] Step S130: insert the conical probe 310 into the small hole 130 on the surface of the air bearing 100 along the air main axis, and obtain the state of the light spot on the photosensitive component 500;

[0042] In fluid mechanics, when the compressed gas in the channel flows from a large gap to a small gap, that is, when the compressed gas flows through the conical probe 310 in the small hole 130, the conical probe 310 is kept at the center of the channel under the action of the cone. After the imaging result meets the preliminary processing requirements of the small hole 130, the measurement method enters the next step to detect the specific processing conditions of the small hole 130;

[0043] In the present invention, after the conical probe 310 is inserted into the small hole 130, the conical probe 310 will remain at the center position in the small hole 130, and as the conical probe 310 moves in the small hole 130, if the data such as the verticality of the inner wall of the small hole 130 changes, the conical probe 310 will also change. The photosensitive component 500 is used to obtain the state of the light spot located thereon, including the change information of the position and size of the light spot.

[0044] Step S140: judging the processing condition of the small hole 130 based on the light spot state.

[0045] In one embodiment, when performing inspection, the conical probe 310 is first inserted into the small hole 130. The conical probe 310 is maintained at the center of the small hole 130 under the action of compressed gas. When the conical probe 310 moves along the channel in the small hole 130, if the straightness in the small hole 130 changes, the tail of the conical probe 310 will also change accordingly; the tail of the conical probe 310 is connected to the light emitting component 400, and the light emitting component 400 is fixedly connected to the conical probe 310. When the conical probe 310 moves, the light spot emitted by the light emitting component 400 will also change accordingly on the photosensitive component 500. The processing condition of the small hole 130 can be judged according to the change in the state of the light spot.

[0046] In the present invention, the light emitting component 400 provided in cooperation with the conical probe 310 can amplify the moving track of the conical probe 310, so that even if the conical probe 310 moves only a small distance, it can be accurately measured by the photosensitive component 500 through the amplification effect of the light emitting component 400, thereby improving the accuracy of the measurement. At the same time, when the conical probe 310 is inserted into the small hole 130, there is a gap between the conical probe 310 and the inner wall of the small hole 130, and the high-speed flowing compressed gas will form a layer of air film between the conical probe 310 and the inner wall of the small hole 130, so that the conical probe 310 will not contact the inner wall of the small hole 130, and the conical probe 310 can quickly measure various data inside the small hole 130 without destroying the internal structure of the small hole 130, thereby improving the measurement efficiency of the air bearing 100 for the air spindle while ensuring the quality of the air bearing 100 for the air spindle.

[0047] In one embodiment, the method for detecting the air bearing 100 for the air spindle further includes the following steps:

[0048] S210: dripping a leak detection liquid into the small hole 130 on the surface of the air bearing 100 for the air spindle;

[0049] The leak detection liquid is dripped onto the small hole 130 to be inspected through the robotic arm. The leak detection liquid is preferably soapy water or other liquid that can produce bubbles under gas blowing. The specific dripping method is that the visual acquisition module obtains the specific position of the target small hole 130, and then controls the robotic arm to move above the air bearing 100 for the air spindle, and completes the dripping of the leak detection liquid.

[0050] S220: Ventilate the air bearing 100 of the air spindle;

[0051] Specifically, in one embodiment, the air bearing 100 for the air spindle includes a through hole coaxial with the bearing body. When the air bearing 100 for the air spindle is mounted on a machine tool for processing, a sealing ring is first mounted on one end of the air bearing 100 for the air spindle close to the machine tool clamping member. After the processing is completed, the sealing ring is mounted on the other end of the air bearing 100 for the air spindle to complete the sealing of the air bearing 100 for the air spindle. After the air bearing 100 for the air spindle is processed once, one end of the air bearing 100 for the air spindle is ventilated, and the compressed gas flows out along the small hole 130, and blows the leak detection liquid to generate bubbles or keeps the conical probe 310 located in the small hole 130 at the center of the small hole 130.

[0052] S230: Acquire the state of the leak detection liquid at the target small hole 130 and transmit it to the judgment module.

[0053] By acquiring the state of the leak detection liquid at the target small hole 130, the processing status of the small hole 130 can be obtained, including: whether bubbles are generated at the micropores, the size of the bubbles and the time required for the bubbles to stabilize, etc.; based on whether bubbles are generated at the micropores, it can be determined whether the small hole 130 is penetrated, and on this basis, the approximate diameter of the small hole 130 can be preliminarily estimated based on the average size of the bubbles and the change in the bubbles per unit time.

[0054] In one embodiment, obtaining whether the small holes 130 on the surface of the air bearing 100 for the air spindle are penetrated further includes the following steps:

[0055] S240: Obtaining the pressure change in the air cavity 110 of the air bearing 100 for the air spindle through the pressure sensor;

[0056] Specifically, a pressure sensor is provided between the air supply device and the air bearing 100 for the air spindle. The pressure sensor can obtain the change in pressure in the air cavity 110. Since the compressed gas will flow out from the small hole 130, the pressure in the air cavity 110 will decrease. The change in pressure in the air cavity 110 depends on the number of small holes 130 that have penetrated the surface of the air bearing 100 for the air spindle. Therefore, the number of small holes 130 that have penetrated can be calculated based on the data of the pressure sensor. When the number of small holes 130 meets the requirements, the preliminary processing of the air bearing 100 for the air spindle is completed.

[0057] In one embodiment, using the light emitting assembly 400 includes the following steps:

[0058] S310: Turn on the light emitting component 400, adjust the light emission position so that the light spot is located on the photosensitive component 500; the light emitting component 400 is preferably an optical component that can emit a straight light beam, such as an LED lamp, an infrared laser transmitter, etc., and the light spot emitted by the light emitting component 400 is adjusted until it forms a light spot on the photosensitive component 500. The light emitting component 400 is controlled by the opening of the external device; specifically, the light spot is made to approach the center position of the photosensitive component 500, and the area size v1 of the light spot is recorded at the same time, and a range value of the light spot is set. When va≤v1≤vb, the adjustment of the light emitting component 400 is completed.

[0059] S320: Record the position of the light spot after the conical probe 300 tends to be stable; after the conical probe 310 is inserted into the small hole 130 and remains still under the action of the flowing gas, turn on the light emitting component 400 and make the light spot generated by the light emitting component 400 located on the photosensitive component 500, and the photosensitive component 500 first records the initial center position (a, b) of the light spot after it tends to be stable.

[0060] S330: driving the conical probe 310 to move in the pinhole 130, recording the change of the light spot position during the movement, and recording and calculating the light spot position information, light spot position change and the transformed information generated by the light emitting component 400.

[0061] Record the data of the position change at the center of the light spot (a1, b1), (a2, b2)......(an, bn), compare and calculate (a1, b1), (a2, b2)......(an, bn) with (a, b) respectively, and obtain the following position data group after calculation: (a1-a, b1-b), (a2-a, b2-b)......(an-a, bn-b). Through the obtained position change data and according to the model of the processed small hole 130, the maximum value of the position change (amax, bmax) is obtained from the storage module. If the absolute value of the position change (|an-a|, |bn-b|) is between (a, b) and (amax, bmax), the result of the processing of the small hole 130 meets the processing requirements, otherwise it does not meet the processing requirements.

[0062] In one embodiment, the detection method further comprises the following steps:

[0063] S410: Clear the leak detection liquid from the small holes 130 on the surface of the air bearing 100 for the air spindle; specifically, in the aforementioned steps, in order to conduct a preliminary inspection of the small holes 130 on the surface of the air bearing 100 for the air spindle, a leak detection liquid is dripped into the small holes 130 of the air bearing 100 for the air spindle, and the leak detection liquid can be blown away from the surface of the air bearing 100 for the air spindle through external parts such as a blowing rod, so as to facilitate subsequent measurement and processing; it can be imagined that the blowing rod can also be used to clear processing debris from the surface of the air bearing 100 for the air spindle.

[0064] S420: After completing the detection of the small hole 130, control the conical probe 300 to detach from the small hole 130; after completing the detection of a small hole 130, the conical probe 300 is driven by the manipulator to withdraw from the small hole 130, and when the conical probe 300 withdraws to a certain distance, the manipulator drives the conical probe 300 to move on the horizontal plane to complete the detection of another small hole 130 on the same plane.

[0065] S430: The clamping assembly drives the air bearing 100 for the air spindle to rotate to the next position to be tested, and the above steps are repeated until the processing status of the small holes 130 on the surface of the air bearing 100 for the air spindle is recorded. The clamping assembly drives the air bearing 100 for the air spindle to rotate along the axis of the bearing for a certain angle, and rotates from the previous processing station to the next processing station. At the same time, the conical probe 300 enters the small hole 130 under the drive of the manipulator and completes the detection. This is repeated until the detection of the small holes 130 on the surface of all the air bearings 100 for the air spindle is completed.

[0066] In one embodiment, the detection method further comprises the following steps:

[0067] S510: Acquire the position of the small hole 130 on the surface of the air bearing 100 for the air spindle, and transmit it to the control module;

[0068] S520 : controlling the driving device 600 to move the conical probe 310 to a designated position of the small hole 130 , and controlling the conical probe 310 to enter the small hole 130 .

[0069] The acquisition module first obtains the position of the small hole 130 on the surface of the air bearing 100 for the air spindle, and transmits it to the judgment unit. The judgment unit controls the fixture 200 to rotate so that the small hole rotates into a vertical direction. After obtaining the position of the small hole 130 on the surface of the air bearing 100 for the air spindle, the driving device 600 controls the conical probe 310 to move to the top of the small hole 130 on the surface. Under the control of the driving device 600, the conical probe 310 gradually enters the small hole 130 to complete the measurement of the small hole 130.

[0070] In one embodiment, the small hole detection method further comprises the following steps:

[0071] S610: Acquire multiple images at the same small hole 130 within a unit time;

[0072] Specifically, after the leak detection liquid is dripped into the small hole 130, the state of the leak detection liquid will change with the change of time. The acquisition module can obtain multiple images of the leak detection liquid at the small hole 130 within a unit time, and transmit the multiple images to the storage module and the judgment module; the specific length of the unit time is selected according to the actual situation, which depends on the aperture of the small hole 130, the pressure and flow rate of the compressed gas, the composition of the leak detection liquid, etc. Before the detection, the time required for the bubble of the leak detection liquid to be generated and stabilized can be determined by experiment, and the length of the unit time can be determined on this basis.

[0073] S620: Compare the multiple acquired images to obtain the preliminary processing status of the target small hole 130; if the processing status of the target small hole 130 meets the preliminary processing requirements, the preliminary processing of the small hole 130 is completed; if the processing status of the target small hole 130 does not meet the preliminary processing requirements, continue to process the small hole 130.

[0074] Specifically, the acquisition component obtains a state picture after the leak detection liquid is dripped at the small hole 130 to be tested, including the time h required for the bubbles in the leak detection liquid to be generated from the beginning to maintain stability, the average diameter d of the bubbles after the leak detection liquid bubbles tend to be stable, etc. The storage module contains various internal standard data when facing small holes 130 of different models. The obtained data is compared with the standard data in the storage module. If the time h and the average diameter d are both within the standard range, the preliminary processing standard of the small hole 130 on the surface of the air bearing 100 for the air spindle can proceed to the next step of testing. Otherwise, the processing will continue until the processing is completed.

[0075] A device for detecting small holes on the surface of an air bearing for an air spindle, such as Figures 2 to 3 As shown, it includes: a fixture 200 and a conical probe 300, the fixture 200 includes a clamping portion 210; the conical probe 300 includes a conical probe 310, the outer diameter of the conical probe 310 is smaller than the inner diameter of the small hole 130 on the surface of the air bearing 100 for the air spindle, and the diameter of the conical probe 310 gradually increases from the end close to the fixture 200 to the end away from the fixture 200.

[0076] Specifically, the air spindle uses an air bearing 100 such as Figure 2As shown, it includes a bearing body, an air cavity 110 located in the bearing body, and a plurality of small holes 130 that penetrate the bearing body and are connected to the air cavity 110. The small holes 130 are evenly arranged on the surface of the air bearing 100 for the air spindle. The air bearing 100 for the air spindle is cylindrical in shape and is mounted on the fixture 200 through a multi-jaw chuck during the processing. One end of the multi-jaw chuck is fixedly mounted on the machine tool. The air bearing 100 for the air spindle is clamped along the outer contour of the air bearing 100 for the air spindle through the clamping part to keep the air bearing 100 for the air spindle from changing its position during the processing and testing process.

[0077] Conical probe 300, conical probe 300 such as Figure 2 As shown, it includes a conical probe 310, the diameter of which is smaller than the diameter of the small hole 130, and the conical probe 310 can enter the small hole 130 with a gap between it and the hole wall of the small hole 130; preferably, the diameter of the conical probe 310 gradually increases from the end close to the fixture 200 to the end away from the small hole 130, that is, the end of the conical probe 310 close to the fixture 200 gradually shrinks along the axis of the conical probe 300 to form a conical probe 310, and the transition between the conical probe 310 and the probe can be a curved surface transition or a flat surface transition; when the conical probe 310 enters the small hole 130, the compressed gas flows from one end of the small hole 130 to the other end, and when the compressed gas flows through the conical probe 310, it flows from the end with a small diameter to the end with a large diameter, and at this time, the conical probe 310 and the conical probe 300 can be maintained at the center of the small hole 130 under the action of the fluid.

[0078] Please refer to Figure 2 The small hole 130 detection device also includes: a light-emitting component 400 and a photosensitive component 500. The light-emitting component 400 is connected to the conical probe 300 and can move synchronously with the conical probe 300; the photosensitive component 500 is set corresponding to the transmitting end of the light-emitting component 400, and the photosensitive component 500 is used to receive the optical information generated by the light-emitting component 400.

[0079] In one embodiment, the surface small hole detection device of the air bearing for the air spindle also includes a light-emitting component 400 and a photosensitive component 500. The light-emitting component 400 is connected to the conical probe 310 and can move synchronously with the conical probe 300; wherein, the light-emitting component 400 is preferably arranged at the end of the conical probe 300 away from the air bearing 100 for the air spindle, and the light-emitting component 400 is controlled by an external switch. The light-emitting component 400 can be used as a light source to emit a light beam to amplify the movement amplitude of the conical probe 310. The light-emitting component 400 can be an LED lamp, an infrared transmitter, etc.

[0080] The photosensitive component 500 is arranged opposite to the light-emitting component 400. The photosensitive component 500 includes a photosensitive part made of a photosensitive material. After the light-emitting component 400 is adjusted, the light spot emitted by it can be emitted to the photosensitive part, and the photosensitive part can transmit the size and position information of the light spot to the detection system; during the movement of the light-emitting component 400 and the conical probe 300, the photosensitive component 500 can move synchronously with the light-emitting component 400.

[0081] Please refer to Figure 2 The detection device also includes a driving device 600 , which is movably connected to the conical probe 300 and can drive the conical probe 300 to enter the small hole 130 .

[0082] Specifically, in one embodiment, the driving device 600 is connected to the conical probe 300, and the driving device 600 includes a driving unit 610 and at least one movable connection member. The driving unit 610 is preferably a manipulator assembly, which drives the conical probe 300 to move synchronously through the movable connection member.

[0083] As before, the movable connection piece is preferably a spherical groove, and the part of the conical probe 300 away from the conical probe head 310 is provided with a spherical part, which is located in the spherical groove and movably connected to the spherical groove. When the driving device 600 drives the conical probe head 310 to move in the small hole 130, the conical probe 300 and the light-emitting assembly 400 connected to the conical probe 300 can swing freely; the movable connection piece can also be other types of connection methods, such as a movable rod, a universal joint, etc. The conical probe 300 needs to enter the small hole 130, and the compressed gas flowing in the small hole 130 can only keep the conical probe 310 in the center of the small hole 130, and cannot play a supporting role. By setting a movable support assembly to support the movable probe, and the movable probe can swing freely to avoid affecting the measurement results.

[0084] An embodiment of the present application also proposes a readable storage medium, on which one or more computer programs are stored. The one or more computer programs include instructions. When the program or instructions are executed by a processor in a micro-hole processing device including multiple application programs, the processor in the micro-hole processing device can execute the various processes of the above-mentioned spray plate processing method embodiment.

[0085] The readable storage medium of the embodiment of the present application, when identifying processing anomalies of processing equipment, first obtains the processing value of the processing equipment, and extracts features of the processing value to obtain real-time feature data, and inputs the real-time feature data into the trained processing prediction model to obtain the predicted characteristic value output by the processing prediction model, and identifies processing anomalies of the processing equipment according to the processing difference between the actual characteristic value and the predicted characteristic value. The embodiment of the present application can automatically obtain the predicted characteristic value as the reference value based on the processing value and the trained processing prediction model, without having an in-depth understanding of the internal reaction mechanism of the temperature control process, reducing the dependence on professional experience. In addition, the predicted characteristic value as the reference value is obtained based on the processing value, so it can respond to the changes in the temperature control data due to different process results in a timely manner, and can be used universally when executing different processes.

[0086] The systems, devices, modules or units described in the above embodiments may be implemented by computer chips or entities, or by products with certain functions. A typical implementation device is a computer. Specifically, the computer may be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smart phone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0087] For the convenience of description, the above device is described in various units according to their functions. Of course, when implementing the present application, the functions of each unit can be implemented in the same or multiple software and / or hardware.

[0088] Those skilled in the art will appreciate that the embodiments of the present application may be provided as methods, systems, or computer program products. Therefore, the present application may adopt the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Moreover, the present application may adopt the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program codes.

[0089] The present application is described with reference to the flowcharts and / or block diagrams of the methods, devices (systems), and computer program products according to the embodiments of the present application. It should be understood that each process and / or box in the flowchart and / or block diagram, as well as the combination of the processes and / or boxes in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0090] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0091] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions for implementing the process. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0092] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0093] Memory may include non-permanent storage in a computer-readable medium, random access memory (RAM) and / or non-volatile memory in the form of read-only memory (ROM) or flash RAM. Memory is an example of a computer-readable medium.

[0094] Computer readable media include permanent and non-permanent, removable and non-removable media that can be implemented by any method or technology to store information. Information can be computer readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disk read-only memory (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device. As defined in this article, computer readable media does not include temporary computer readable media (transitory media), such as modulated data signals and carrier waves.

[0095] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0096] The present application may be described in the general context of computer-executable instructions executed by a computer, such as program modules. Generally, program modules include routines, programs, objects, components, data structures, etc. that perform specific tasks or implement specific abstract data types. The present application may also be practiced in distributed computing environments where tasks are performed by remote processing devices connected through a communication network. In a distributed computing environment, program modules may be located in local and remote computer storage media, including storage devices.

[0097] Effect:

[0098] 1. Provide a method for detecting small holes on the surface of an air bearing for an air spindle, which can judge the preliminary processing of the small hole 130 by imaging at the small hole 130, and can judge the specific processing of the small hole 130 by the photosensitive component 500 on the surface of the small hole 130 on the premise that the preliminary processing meets the requirements. When the judgment result does not meet the requirements, the small hole 130 can continue to be processed until it meets the requirements. In this way, the preliminary processing of the small hole 130, that is, whether the small hole 130 is penetrated and processed to the point where it can pass through the conical probe 310, can be judged by imaging, so as to avoid the inability to perform subsequent measurements; at the same time, by obtaining the state of the light spot on the photosensitive component 500, it is possible to quickly measure various data inside the small hole 130 without destroying the internal structure of the small hole 130, and the measurement efficiency of the air bearing 100 for the air spindle is improved while ensuring the quality of the air bearing 100 for the air spindle.

[0099] 2. A method for detecting small holes on the surface of an air bearing for an air spindle is provided. The small holes 130 on the surface of the air bearing 100 for an air spindle are preliminarily measured by using a leak detection liquid and a collection component. The preliminary detection of the air bearing 100 for an air spindle can be completed without entering into the small holes 130 or removing the air bearing 100 for an air spindle. The detection speed and the processing accuracy of the air bearing 100 for an air spindle are increased, thereby ensuring the finished product quality of the air bearing 100 for an air spindle.

[0100] 3. Provide a device for detecting small holes on the surface of an air bearing for an air spindle. By setting a conical probe 310 and a photosensitive component 500 connected to the conical probe 310, when the conical probe 310 enters the small hole 130 on the surface of the air bearing 100 for the air spindle, compressed gas flows from the inside of the air bearing 100 for the air spindle to the surface of the air bearing 100 for the air spindle. Under the action of the flowing gas, the conical probe 310 is kept at the center position of the small hole 130 in the small hole 130. When the conical probe 310 moves in the small hole 130, the light-emitting component 400 connected to the conical probe 310 moves synchronously and is displayed on the photosensitive component 500, thereby completing the measurement of the verticality of the small hole 130 on the bearing surface.

[0101] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0102] The above embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, appropriate deformations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the scope of patent protection of the present application shall be subject to the attached claims.

Claims

1. A method for detecting small holes on the surface of an air bearing for an air spindle, characterized in that: include: Acquiring an image of a small hole (130) on the surface of an air bearing (100) for an air spindle; Based on the imaging, determining the preliminary processing condition of the bearing small hole (130); Controlling the conical probe (310) to move along the small hole (130) on the surface of the air bearing (100) for the air main axis, and acquiring the state of the light spot on the photosensitive component (500); Based on the light spot state, judging the processing condition of the small hole (130); Acquiring an image of a small hole (130) on the surface of an air bearing (100) for an air spindle comprises the following steps: Complete the sealing of the air bearing (100) for the air spindle; Add leak detection liquid dropwise to the small hole (130) on the surface of the air bearing (100) for the air spindle; Ventilate the air spindle with an air bearing (100); Obtaining the state of the leak detection liquid at the target small hole (130) and transmitting it to the judgment module includes: Whether bubbles are generated at the micropores is determined to determine whether the small hole (130) is penetrated, and the approximate diameter of the small hole (130) is calculated based on the average size of the bubbles and the amount of change in the bubbles per unit time.

2. The method for detecting small holes on the surface of an air bearing for an air spindle according to claim 1, characterized in that: The step of obtaining the light spot state comprises: Turning on the light emitting component (400) and adjusting the light emitting position so that the light spot is located on the light sensing component (500); Recording the position of the light spot after the conical probe (300) becomes stable; The conical probe (310) is driven to move in the small hole (130), and changes in the light spot position during the movement are recorded, and the light spot position information, light spot position changes, and transformed information generated by the light emitting component (400) are recorded and calculated.

3. The method for detecting small holes on the surface of an air bearing for an air spindle according to claim 2, characterized in that: The detection method further comprises the following steps: Remove the leak detection liquid from the small hole (130) on the surface of the air bearing (100) for the air spindle; After completing the detection of the small hole (130), controlling the conical probe (300) to separate from the small hole (130); The clamping assembly drives the air spindle to rotate to the next position to be measured by using the air bearing (100); Repeat the above steps until the processing conditions of the small holes (130) on the surface of the air bearing (100) for the entire air spindle are recorded.

4. The method for detecting small holes on the surface of an air bearing for an air spindle according to claim 3, characterized in that: The detection method also includes the following steps: Obtaining the position of a small hole (130) on the surface of an air bearing (100) for an air spindle, and transmitting it to a control module; The driving device (600) is controlled to move the conical probe (310) to a designated small hole (130) position, and the conical probe (310) is controlled to enter the small hole (130).

5. The method for detecting small holes on the surface of an air bearing for an air spindle according to claim 1, characterized in that: The small hole (130) detection method further comprises the following steps: Acquire multiple images at the same small hole (130) within a unit time; Comparing the acquired multiple images, a preliminary processing condition of the target small hole (130) is obtained; If the processing condition of the target small hole (130) meets the preliminary processing requirements, the preliminary processing of the small hole (130) is completed; If the processing condition of the target small hole (130) does not meet the preliminary processing requirements, the small hole (130) is continued to be processed.

6. An air bearing surface small hole detection device for air spindles, used in the air bearing surface small hole detection method for air spindles as claimed in any one of claims 1 to 5, characterized in that: include: A clamp (200), the clamp (200) comprising a clamping portion (210); A conical probe (300), the conical probe (300) comprising a conical probe (310), the outer diameter of the conical probe (310) being smaller than the inner diameter of a small hole (130) on the surface of an air bearing (100) for an air spindle, the diameter of the conical probe (310) gradually increasing from an end away from a fixture (200) to an end close to the fixture (200).

7. The air bearing surface small hole detection device for air spindle according to claim 6, characterized in that: The small hole (130) detection device further comprises: A light-emitting component (400), the light-emitting component (400) being connected to the conical probe (300) and being capable of moving synchronously with the conical probe (300); A photosensitive component (500) is arranged corresponding to the transmitting end of the light emitting component (400), and the photosensitive component (500) is used to receive optical information generated by the light emitting component (400).

8. The air bearing surface small hole detection device for air spindle according to claim 6, characterized in that: The detection device further comprises a driving device (600), wherein the driving device (600) is movably connected to the conical probe (300) and can drive the conical probe (300) to enter the small hole (130).

9. A system for detecting small holes on the surface of an air bearing for an air spindle, used in the method for detecting small holes on the surface of an air bearing for an air spindle as claimed in any one of claims 1 to 5, characterized in that: include: A collection module is configured to: collect an image of the bearing small hole (130) and light spot position information; A storage module is configured to: receive and store the pinhole (130) image and light spot position information; The judgment module is configured to judge the micro-hole processing condition based on the small hole (130) image and the light spot position information.

Images