Sealing door device for storage warehouse

Abstract

The invention discloses a sealed door device for a storage bin, including a frame, on which a material port connected to the left and right is provided, and a temporary storage position for accommodating a wafer box is provided in the material port; a door panel assembly is provided with two groups and respectively located on both sides of the material port; each group of door panel assemblies includes an opening and closing driving part and a door panel part, and the door panel part moves up and down under the action of the opening and closing driving part to open and close the material port; the door panel part includes an inner door panel, an outer door panel, and an elastic member, and the inner door panel is arranged near the material port and connected to the outer door panel through the elastic member; the outer door panel is connected to the opening and closing driving part; a clamping assembly is arranged one by one with the door panel assembly, and includes a stopper and a linkage part; the stopper is arranged on the frame and located above the material port, for the inner door panel of the corresponding door panel assembly to abut; the linkage part is arranged between the inner door panel and the outer door panel, and can swing up and down to move the inner door panel toward or away from the outer door panel. The invention can effectively suppress the leakage of nitrogen at the material port.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor processing, and in particular to a sealing door device of a storage bin. Background Art

[0002] In the semiconductor production process, in order to avoid oxidation problems when storing wafers, the wafers need to be stored in a nitrogen environment. In order to meet the needs of automated production, nitrogen-sealed storage bins (hereinafter referred to as "storage bins") are usually used to store wafers. The storage bin is filled with nitrogen and has a material port for the material box to enter and exit. When the wafer needs to be stored, open the material port of the storage bin, load the wafer into the wafer box, and then use the robot to send the wafer box into the storage bin. When the robot exits the storage bin, the material port of the storage bin can be closed. At this time, the wafer is in a nitrogen environment. However, during the process of opening and closing the material port, nitrogen may leak from the storage bin to the outside of the storage bin, thereby affecting the airtightness of the storage bin. Summary of the invention

[0003] In order to overcome the above disadvantages, the object of the present invention is to provide a sealing door device for a storage warehouse, which can effectively suppress the leakage of nitrogen at the material inlet.

[0004] In order to achieve the above purpose, the technical solution adopted by the present invention is: a sealing door device for a storage warehouse, comprising

[0005] A frame having a material port connected to the left and right sides, wherein a temporary storage position for accommodating a wafer box is provided in the material port;

[0006] The door panel assembly is provided with two groups and is respectively located on both sides of the material opening; each group of the door panel assembly includes an opening and closing driving part and a door panel part, and the door panel part moves up and down under the action of the opening and closing driving part to open and close the material opening; the door panel part includes an inner door panel, an outer door panel, and an elastic member, and the inner door panel is arranged close to the material opening and is connected to the outer door panel through the elastic member; the outer door panel is connected to the opening and closing driving part;

[0007] A clamping assembly is arranged one-to-one with the door panel assembly, and includes a stopper and a linkage part; the stopper is arranged on the frame and located above the material port, and is used for the inner door panel of the corresponding door panel assembly to abut against; the linkage part is arranged between the inner door panel and the outer door panel, and can swing up and down to make the inner door panel move toward or away from the outer door panel;

[0008] A conveying assembly, arranged at the material port, for conveying the wafer box;

[0009] During the operation of the two groups of door panel assemblies, the material opening is closed by at least one group of the door panel assemblies; and during the rising of the outer door panel, the inner door panel can rise synchronously with the outer door panel under the action of the elastic member until the inner door panel abuts against the stop portion, at which time the inner door panel closes the material opening; when the outer door panel continues to rise, the linkage portion swings to move the inner door panel away from the outer door panel and press against the material opening.

[0010] During installation, the rack is set at the junction of the storage bin and the external environment, and the storage bin can only be connected to the external environment through the material port on the rack. One of the two sets of door panel assemblies faces the storage bin, and the other faces the external environment. When the wafer box is not stored or taken, the two sets of door panel assemblies are in a state of closing the material port. At this time, the two sets of door panel assemblies can separate the storage bin from the external environment to avoid the flow of air between the storage bin and the external environment; when the wafer box needs to be stored, the door panel assembly on the side facing the external environment is first opened, and the wafer box is transported to the temporary storage position. At this time, because the door panel assembly located in the storage bin is still in a closed state, the nitrogen in the storage bin will not enter the material port, and will not leak into the external environment through the material port; then after closing the door panel assembly on the side facing the external environment, open the door panel assembly on the side facing the storage bin. At this time, the wafer box on the temporary storage position can enter the storage bin, and because the door panel assembly on the side facing the external environment is in a closed state, the nitrogen in the storage bin does not leak into the external environment through the material port. When it is necessary to take the wafer box, first open the door panel assembly facing the storage warehouse side, and place the wafer box to be taken on the temporary storage position. Then close the door panel assembly facing the storage warehouse side, and then open the door panel assembly facing the external environment side. At this time, the wafer box on the temporary storage position can be taken to the external environment.

[0011] The beneficial effects of the sealing door device of the present invention are:

[0012] 1. First, a temporary storage position is set at the material port to realize the storage of wafer boxes at the material port. Then, two sets of door panel components are set to open the material port on one side. While ensuring that the wafer boxes can enter and exit the material port smoothly, one set of door panel components is in a state of closing the material port, thereby effectively isolating the air flow inside and outside the storage warehouse, thereby reducing the risk of nitrogen in the storage warehouse leaking out from the material port. Then, the transportation of wafer boxes at the material port is realized through the cooperation of the conveying component.

[0013] 2. In the door panel assembly, the opening and closing drive unit drives the door panel unit to move up and down to open or close the material port; in the door panel unit, the opening and closing drive unit directly drives the outer door panel, and the inner door panel and the outer door panel are connected by elastic parts so that the inner door panel can be raised and lowered synchronously with the outer door panel when there is no external force; and the double door panel setting of the inner door panel and the outer door panel is to cooperate with the action of the clamping assembly to achieve the sealing and clamping of the material port, so as to further suppress the risk of nitrogen escaping from the gap between the inner door panel and the frame when the material port is closed;

[0014] 3. In the clamping assembly, the stopper is arranged above the material opening and abuts against the inner door panel to limit the position of the inner door panel closing the material opening and prevent the inner door panel from continuing to move upward with the outer door panel. When the outer door panel continues to move upward, the swing of the linkage part can convert the force of the outer door panel moving upward into a horizontal push on the inner door panel, so that the inner door panel can be pressed against the material opening to achieve sealing of the material opening, further suppressing the risk of nitrogen leakage.

[0015] 4. Through the cooperation of the door panel assembly and the clamping assembly, the opening and closing of the material port is carried out in two steps. When closing, the first step is to realize the synchronous upward movement of the outer door panel and the inner door panel through the cooperation of the opening and closing drive unit and the elastic member, so that the inner door panel reaches the closed position. The second step is to realize the continued upward movement of the outer door panel and the clamping movement of the inner door panel toward the material port through the cooperation of the opening and closing drive unit, the stopper unit and the linkage unit, so as to seal and clamp the material port. Similarly, when opening, the first step is to realize the conversion of the downward movement of the outer door panel into the movement of the inner door panel toward the outer door panel through the cooperation of the opening and closing drive unit and the linkage unit, so as to release the sealing and clamping of the inner door panel on the material port. The second step is to realize the synchronous downward movement of the outer door panel and the inner door panel through the cooperation of the opening and closing drive unit and the elastic member, so as to open the material port. In the process of sealing and clamping or releasing the sealing and clamping, the power source is also provided by the opening and closing drive unit, and no additional power source is required.

[0016] 5. In the door panel part, the inner door panel and the outer door panel are connected by elastic parts, which can realize the synchronous movement of the inner door panel and the outer door panel when there is no external force on the inner door panel, and can also use its own tensile elastic force to cooperate with the continued upward movement of the outer door panel when the inner door panel is subjected to external force (stopped by the stop part), thereby ensuring the normal implementation of the clamping action.

[0017] Further, the linkage part includes connecting rods symmetrically arranged on both sides of the inner door panel along the front-back direction, and the two ends of each connecting rod are respectively pivotally connected to the inner door panel and the outer door panel; and when the elastic member is in the natural state, the connecting rod is inclined downward from the inner door panel to the outer door panel. By limiting the inclination direction of the connecting rod, when the inner door panel and the outer door panel reach the closed position (that is, the inner door panel abuts against the stopper), as the outer door panel continues to move upward, the end of the connecting rod connected to the outer door panel can move upward accordingly, thereby causing the connecting rod to gradually swing from the downward inclined state to the horizontal state (or a state close to the horizontal state), and the size of the connecting rod in the horizontal direction becomes larger, while the outer door panel is limited by the opening and closing drive unit and can only be lifted and lowered. Therefore, the inner door panel moves in the direction away from the outer door panel (that is, the direction close to the material opening) under the action of the connecting rod to be pressed against the material opening.

[0018] Furthermore, the outer door panel is provided with at least one waist-shaped groove arranged in the vertical direction; the inner door panel is provided with a guide block arranged in one-to-one correspondence with the waist-shaped groove and capable of extending into the corresponding waist-shaped groove; the elastic member is arranged in the waist-shaped groove and located above the guide block, and the two ends of the elastic member are respectively connected to the waist-shaped groove and the guide block, and when the elastic member is in a natural state, a gap is left between the lower end of the guide block and the waist-shaped groove. Through the cooperation of the waist-shaped groove and the guide block, the pulling force of the elastic member on the inner door panel can be as much as possible in the vertical direction, so as to avoid the inner door panel from being displaced in the horizontal direction during the process of rising and falling with the outer door panel, and the waist-shaped groove can guide the movement of the guide block, and the gap reserved between the guide block and the bottom of the waist-shaped groove can ensure that when the inner door panel stops on the stopper, the waist-shaped groove can move up along the guide block to ensure the continued upward movement of the outer door panel.

[0019] Furthermore, when the inner door panel abuts against the stopper, as the outer door panel continues to move upward, the waist groove can abut against the lower end of the guide block. At this time, the elastic member is in a stretched state, and the connecting rod swings to the horizontal direction. The upward position of the outer door panel can be limited by the abutment of the waist groove and the guide block, so as to define the swinging direction of the connecting rod and the position of the outer door panel when the inner door panel is pressed against the material port; the connecting rod swings from the oblique direction to the horizontal direction, so that the size of the connecting rod in the horizontal direction increases, and then the inner door panel can be forced to move away from the outer door panel, so that the horizontal distance between the inner door panel and the outer door panel is adapted to the size of the connecting rod in the horizontal direction.

[0020] Furthermore, a door panel stopper is provided on one side of the inner door panel facing the outer door panel and is located above the outer door panel, and the door panel stopper is used for the outer door panel to abut against, and when the elastic member is in a natural state, a gap is left between the outer door panel and the door panel stopper. The door panel stopper can stop the outer door panel from moving upward.

[0021] Furthermore, the upper end of the outer door panel is provided with a clearance notch for avoiding the stopper. The provision of the clearance notch can prevent the outer door panel from abutting against the stopper during the synchronous upward movement of the outer door panel and the inner door panel, thereby ensuring that the outer door panel can continue to move upward.

[0022] Furthermore, the frame is provided with a sealing ring around the material opening for the inner door panel to press against, and the sealing ring can cooperate with the inner door panel to enhance the sealing effect of the material opening.

[0023] Specifically, the opening and closing drive unit includes a lifting cylinder, a lifting plate, and a lifting rail; the lifting rail is arranged vertically on the frame, the lifting plate is slidably arranged on the lifting rail, and is connected to the piston rod of the lifting cylinder; the lifting plate is connected to the outer door panel. The movement direction of the lifting plate and the outer door panel can be guided by the cooperation between the lifting rail and the lifting plate.

[0024] Furthermore, the conveying assembly includes a conveyor platform located on the temporary storage position, and a slide that can be telescopically moved is provided on the conveyor platform, and the slide is used to support the wafer box; when the slide is fully retracted, the slide can be accommodated in the temporary storage position, and when the slide is fully extended, the slide can be located outside the material port. The arrangement of the conveying assembly can not only support the storage of the wafer box in the material port, but also realize the outward conveyance of the wafer box in the material port, thereby avoiding the inconvenience of the robot entering and exiting the material port to take the wafer box in the prior art.

[0025] Furthermore, the slide includes a slide body, and the slide body is connected to the conveyor platform through a slide rail assembly, and the slide rail assembly includes at least a first-level slide rail and a second-level slide rail, the first-level slide rail is fixed to the conveyor platform, and the second-level slide rail is slidably arranged on the first-level slide rail; the slide body is slidably arranged on the second-level slide rail. The segmented design of the first-level slide rail and the second-level slide rail not only ensures the overall extension length of the slide rail assembly, which is conducive to delivering the wafer box out of the material port, but also enables the conveying assembly to be built into the temporary storage position of the material port when the slide rail assembly is fully retracted. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the three-dimensional structure of the sealing door device according to an embodiment of the present invention;

[0027] Figure 2 A side view of a sealing door device according to an embodiment of the present invention;

[0028] Figure 3 It is a front view of a sealing door device according to an embodiment of the present invention;

[0029] Figure 4 This is a schematic diagram of the structure of the door panel assembly when the material port is opened according to an embodiment of the present invention;

[0030] Figure 5 for Figure 4 A partial enlarged view of the middle A area;

[0031] Figure 6 This is a schematic diagram of the structure of the door panel assembly and the frame when the material port is closed according to an embodiment of the present invention;

[0032] Figure 7 for Figure 6 A partial enlarged view of the B area;

[0033] Figure 8 It is a schematic structural diagram of a conveying assembly according to an embodiment of the present invention.

[0034] In the figure:

[0035] 1-frame; 11-feeding port;

[0036] 2-door panel assembly; 21-opening and closing drive unit; 211-lifting cylinder; 212-lifting plate; 213-lifting slide rail; 22-door panel unit; 221-inner door panel; 2211-guide block; 2212-door panel stopper; 222-outer door panel; 2221-waist groove; 2222-giving gap; 223-elastic member;

[0037] 3- Wafer box;

[0038] 41-stop portion; 42-linkage portion; 421-link rod;

[0039] 5- Sealing ring;

[0040] 6- conveying assembly; 61- conveyor platform; 62- slide; 621- slide body; 622- first-level slide rail; 623- second-level slide rail. DETAILED DESCRIPTION

[0041] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0042] Example

[0043] See attached Figure 1-Figure 3As shown, a sealed door device of a storage bin of the present invention comprises a frame 1 and a door panel assembly 2, wherein a material port 11 connected to the left and right is provided through the frame 1, and a temporary storage position for accommodating a wafer box 3 is provided in the material port 11. Two groups of door panel assemblies 2 are provided and are respectively located on both sides of the material port 11 along the left and right directions, and each group of door panel assemblies 2 comprises an opening and closing driving part 21 and a door panel part 22, and the door panel part 22 moves up and down under the action of the opening and closing driving part 21 to open and close the material port 11. And during the operation of the two groups of door panel assemblies 2, the material port 11 is closed by at least one group of door panel assemblies 2.

[0044] During installation, the rack 1 is arranged at the junction of the storage bin and the external environment, and the storage bin can only communicate with the external environment through the material opening 11 on the rack 1. One of the two sets of door panel assemblies 2 faces the storage bin, and the other faces the external environment. When the wafer box 3 is not stored or taken out, the two groups of door panel assemblies 2 are in a state of closing the material port. At this time, the setting of the two groups of door panel assemblies 2 can separate the storage warehouse from the external environment to avoid the flow of air between the storage warehouse and the external environment; when the wafer box 3 needs to be stored, first open the door panel assembly 2 on the side facing the external environment, and place the wafer box 3 on the temporary storage position. At this time, because the door panel assembly 2 located in the storage warehouse is still in a closed state, the nitrogen in the storage warehouse will not enter the material port 11, and will not leak into the external environment through the material port 11; then after closing the door panel assembly 2 on the side facing the external environment, open the door panel assembly 2 on the side facing the storage warehouse. At this time, the wafer box 3 on the temporary storage position can enter the storage warehouse, and because the door panel assembly 2 on the side facing the external environment is in a closed state, the nitrogen in the storage warehouse does not leak into the external environment through the material port 11. When the wafer box 3 needs to be taken, the door panel assembly 2 facing the storage storage side is first opened, and the wafer box 3 to be taken is placed on the temporary storage position. Then, the door panel assembly 2 facing the storage storage side is closed, and then the door panel assembly 2 facing the external environment side is opened. At this time, the wafer box 3 on the temporary storage position can be taken to the external environment.

[0045] In this embodiment, the one-sided opening of the material port 11 is achieved by setting up two groups of door panel assemblies 2, thereby avoiding direct connection between the interior of the storage warehouse and the external environment, so as to suppress the leakage of nitrogen in the storage warehouse from the material port 11 to the external environment, and then through the cooperation of the temporary storage position, the storage / removal action of the wafer box 3 can be divided into two steps (when one door panel assembly 2 is opened, the wafer box 3 is first placed on the temporary storage position, and then the other door panel assembly 2 is opened, and the wafer box 3 on the temporary storage position is sent to the storage warehouse / external environment). In this way, it can ensure that the wafer box 3 can smoothly enter and exit the material port 11 and realize the circulation of the wafer box 3 between the storage warehouse and the external environment, and at the same time, a group of door panel assemblies 2 can be in a closed state, so as to suppress the risk of leakage of nitrogen in the storage warehouse to the external environment.

[0046] Since the opening and closing drive unit 21 can only drive the door panel 22 to move up and down, when the door panel 22 closes the material port 11, there will inevitably be a gap between the frame 1 and the frame 1, which causes gas to escape from the gap between the frame 1 and the door panel 22, that is, the air tightness of the material port 11 is poor when it is closed. Based on this, in some embodiments, a clamping assembly is added and the structure of the door panel 22 is improved.

[0047] For details, see the attached Figure 2 , Figure 4 , Figure 5 As shown, the door panel portion 22 includes an inner door panel 221 and an outer door panel 222 arranged in the left-right direction, and the inner door panel 221 is arranged close to the material port 11, and the outer door panel 222 is connected to the opening and closing driving portion 21. The inner door panel 221 and the outer door panel 222 are connected by an elastic member 223 (such as a spring). When the opening and closing driving portion 21 drives the outer door panel 222 to rise and fall, the elastic member 223 can transmit the lifting and falling movement of the outer door panel 222 to the inner door panel 221, so that the inner door panel 221 can be lifted and moved synchronously with the outer door panel 222.

[0048] The clamping assembly is arranged in a one-to-one correspondence with the door panel assembly 2, and includes a stopper 41 and a linkage 42. The stopper 41 is arranged on the frame 1 and is located above the material port 11, so as to be abutted by the inner door panel 221 of the corresponding door panel assembly 2. The linkage 42 is arranged between the inner door panel 221 and the outer door panel 222, and can swing up and down to move the inner door panel 221 in a direction close to or away from the outer door panel 222. When the inner door panel 221 rises to a position to close the material port 11 along with the outer door panel 222, the inner door panel 221 can be stopped by the stopper 41 and cannot continue to rise, while the outer door panel 222 can continue to rise under the action of the opening and closing drive unit 21. At this time, the outer door panel 222 can apply force to the linkage 42 to make the linkage 42 swing, and the linkage 42 then forces the inner door panel 221 to move in a direction away from the outer door panel 222 and press against the material port 11.

[0049] In the door panel portion 22, the opening and closing drive portion 21 directly drives the outer door panel 222, and the inner door panel 221 and the outer door panel 222 are connected by the elastic member 223 so that the inner door panel 221 can be raised and lowered synchronously with the outer door panel 222 when there is no external force; and the double door panel setting of the inner door panel 221 and the outer door panel 222 can cooperate with the action of the clamping assembly to achieve sealing and clamping of the material port 11, so as to further suppress the risk of nitrogen escaping from the gap between the inner door panel 221 and the frame 1 when the material port 11 is closed.

[0050] The cooperation between the door panel assembly 2 and the clamping assembly makes it possible for the door panel portion 22 to open and close the material opening 11 in two steps. When closing, the first step is to realize the synchronous upward movement of the outer door panel 222 and the inner door panel 221 through the cooperation of the opening and closing driving portion 21 and the elastic member 223, so that the inner door panel 221 reaches the closed position, and the second step is to realize the continued upward movement of the outer door panel 222 and the inner door panel 221 to the material opening 11 through the cooperation of the opening and closing driving portion 21, the stopper portion 41 and the linkage portion 42. The first step is to convert the downward movement of the outer door panel 222 into the movement of the inner door panel 221 toward the outer door panel 222 through the cooperation of the opening and closing drive unit 21 and the linkage unit 42, so as to release the sealing and pressing of the inner door panel 221 on the material port 11; the second step is to realize the synchronous downward movement of the outer door panel 222 and the inner door panel 221 through the cooperation of the opening and closing drive unit 21 and the elastic member 223, so as to open the material port 11. It can be understood that in the process of the opening and closing drive unit 21 driving the door panel unit 22 to rise, the door panel unit 22 first closes the material port 11, and then seals and presses the material port 11, and in the process of the opening and closing drive unit 21 driving the door panel unit 22 to descend, the door panel unit 22 first releases the material port 11 (contact seal pressing), and then opens the material port 11.

[0051] Furthermore, sealing rings 5 ​​for the inner door plate 221 to press against are evenly arranged on both sides of the frame 1 around the material opening 11. The sealing ring 5 can cooperate with the inner door plate 221 to enhance the sealing and pressing effect of the material opening 11.

[0052] In some embodiments, see Appendix Figure 5 As shown, the linkage part 42 includes connecting rods 421 symmetrically arranged on both sides of the inner door panel 221 in the front-to-back direction, and both ends of each connecting rod 421 are respectively pivoted on the inner door panel 221 and the outer door panel 222. When the elastic member 223 is in a natural state, the connecting rod 421 is inclined downward from the inner door panel 221 to the outer door panel 222. Furthermore, a plurality of connecting rods 421 distributed up and down can be arranged on each side of the inner door panel 221. Exemplarily, two connecting rods 421 are arranged on each side of the inner door panel 221, and the two connecting rods 421 are respectively close to the upper and lower ends of the inner door panel 221. This arrangement enables the four connecting rods 421 (two on each side of the inner door panel 221) to be relatively evenly distributed on the four corners of the inner door panel 221 and the outer door panel 222, so as to ensure that when the four connecting rods 421 swing synchronously, the movement amount of each part of the inner door panel 221 is relatively consistent, so as to ensure the pressing effect on the material port 11.

[0053] When the elastic member 223 is in a natural state, the connecting rod 421 is inclined downward from the inner door panel 221 to the outer door panel 222. When the inner door panel 221 abuts against the stop portion 41, as the outer door panel 222 continues to move upward, the end of the connecting rod 421 connected to the outer door panel 222 can move upward accordingly, and the height of the end of the connecting rod 421 connected to the inner door panel 221 remains unchanged, so that the connecting rod 421 can gradually swing from the downward inclined direction to the horizontal direction. At this time, the size of the connecting rod 421 in the horizontal direction gradually increases, and the outer door panel 222 is limited by the opening and closing drive unit 21 and can only move up and down. Therefore, the swing of the connecting rod 421 can push the inner door panel 221 to move in the direction away from the outer door panel 222 (i.e., the direction close to the material opening 11) to be pressed against the material opening 11.

[0054] In some embodiments, see Appendix Figure 5 As shown, at least one waist-shaped groove 2221 arranged vertically is provided on the outer door panel 222, and a guide block 2211 is provided on the inner door panel 221, which is arranged one-to-one with the waist-shaped groove 2221 and can extend into the corresponding waist-shaped groove 2221. The elastic member 223 is arranged in the waist-shaped groove 2221 and is located above the guide block 2211. The two ends of the elastic member 223 are respectively connected to the waist-shaped groove 2221 and the guide block 2211, and when the elastic member 223 is in a natural state, a gap is left between the lower end of the guide block 2211 and the waist-shaped groove 2221. It should be noted that the elastic member 223 can be a spring, in which case the spring is only located in one waist-shaped groove 2221, or it can be a plurality of springs corresponding to the number of waist-shaped grooves 2221, in which case the springs are located one by one in the corresponding waist-shaped grooves 2221. Obviously, the one-to-one corresponding arrangement of the multiple waist-shaped grooves 2221 and the multiple springs can make the upward pulling force or downward pulling force of the elastic member 223 on the inner door panel 221 more uniform.

[0055] Through the cooperation between the waist-shaped groove 2221 and the guide block 2211, the pulling force of the elastic member 223 on the inner door panel 221 can be as much as possible in the vertical direction, so as to avoid the horizontal displacement of the inner door panel 221 during the lifting and lowering process of the outer door panel 222, and the waist-shaped groove 2221 can guide the movement of the guide block 2211, and the gap between the guide block 2211 and the bottom of the waist-shaped groove 2221 can ensure that when the inner door panel 221 stops on the stop part 41, the waist-shaped groove 2221 can move up along the guide block 2211 to ensure that the outer door panel 222 continues to move upward.

[0056] For further information, see Appendix Figure 6-Figure 7As shown, when the inner door panel 221 abuts against the stopper 41, as the outer door panel 222 continues to move upward, the waist groove 2221 can abut against the lower end of the guide block 2211. At this time, the elastic member 223 is in a stretched state, and the link rod 421 swings to a horizontal direction or a direction close to the horizontal direction. At this time, the abutment between the lower end of the guide block 2211 and the waist groove 2221 can limit the upward position of the outer door panel 222, and the link rod 421 also swings to its limit position. At this time, the inner door panel 221 is also in a limit position of the pressing material port 11. In this process, the link rod 421 swings from an oblique direction to a horizontal direction or a direction close to the horizontal direction, so that the size of the link rod 421 in the horizontal direction increases, and then the inner door panel 221 can be forced to move in a direction away from the outer door panel 222, so that the horizontal distance between the inner door panel 221 and the outer door panel 222 is adapted to the size of the link rod 421 in the horizontal direction.

[0057] It should be noted that the close to horizontal direction means that the link rod 421 is still in a downward slanting direction from the inner door panel 221 to the outer door panel 222, but at this time, the downward slanting degree is less than the downward slanting degree of the link rod 421 when the elastic member 223 is in a natural state. This arrangement is to ensure that in the process of pressing the material port 11, the swing of the link rod 421 can gradually increase the size of the link rod 421 in the horizontal direction, thereby pushing the inner door panel 221 to move away from the outer door panel 222.

[0058] In some embodiments, see Appendix Figure 5 , Figure 7 As shown, a door panel stopper 2212 located above the outer door panel 222 is provided on the side of the inner door panel 221 facing the outer door panel 222, and the door panel stopper 2212 is used for the outer door panel 222 to abut against. When the elastic member 223 is in a natural state, a gap is left between the outer door panel 222 and the door panel stopper 2212. The door panel stopper 2212 is also provided to limit the upward position of the outer door panel 222. Furthermore, when the lower end of the guide block 2211 abuts against the waist-shaped groove 2221, the outer door panel 222 can abut against the door panel stopper 2212. This arrangement can double limit the rising position of the outer door panel 222 in both the upper and lower directions, and ensure the position stability of the outer door panel 222 when the material port 11 is sealed and pressed.

[0059] In some embodiments, the upper end of the outer door panel 222 is provided with a clearance notch 2222 for avoiding the stopper 41. Furthermore, the clearance notch 2222 is abutted by the door panel stopper 2212. Firstly, the provision of the clearance notch 2222 can prevent the outer door panel 222 from abutting against the stopper 41, and secondly, the abutment between the clearance notch 2222 and the door panel stopper 2212 can limit the rising position of the outer door panel 222.

[0060] In some embodiments, the stopper 41 includes at least one frame stopper fixedly connected to the frame 1 along the front-rear direction. Exemplarily, two frame stoppers are provided.

[0061] In some embodiments, see Appendix Figure 4-Figure 5 As shown, two groups of opening and closing drive units 21 are provided, and are symmetrically arranged on both sides of the inner door panel 221 along the front-to-back direction. Each group of opening and closing drive units 21 includes a lifting cylinder 211, a lifting plate 212, and a lifting rail 213. The lifting rail 213 is arranged vertically on the frame 1, and the lifting plate 212 is slidably arranged on the lifting rail 213 and connected to the piston rod of the lifting cylinder 211; the lifting plate 212 is connected to the outer door panel 222. The cooperation between the lifting rail 213 and the lifting plate 212 can guide the moving direction of the lifting plate 212 and the outer door panel 222.

[0062] Furthermore, the lifting plate 212 is a U-shaped plate held on the frame 1, and when the U-shaped plate is connected to the outer door plate 222, the U-shaped plate can partially cover the side of the outer door plate 222 away from the inner door plate 221. The significance of this arrangement is to utilize the structural stability of the frame 1 to inhibit the left and right movement of the lifting plate 212, and then inhibit the left and right movement of the outer door plate 222 connected to the lifting plate 212, so as to ensure that the outer door plate 222 can only move up and down with the lifting plate 212.

[0063] In the prior art, the wafer box 3 is transported at the material port 11 by a robot, but the robot needs to enter the storage to take and place the wafer box, which is complicated to operate and difficult to adapt to the sealing door device of the present invention. Based on this, in some embodiments, see the attached Figure 1 As shown, a conveying assembly 6 is also provided at the material port 11. Figure 8 As shown, the conveying assembly 6 includes a conveyor table 61 located at the temporary storage position, and a slide table 62 that can be telescopically moved is provided on the conveyor table 61, and the slide table 62 is used to support the wafer box 3. When the slide table 62 is fully retracted, the slide table 62 can be completely accommodated in the temporary storage position; when the slide table 62 is fully extended, the slide table 62 can be extended along the material port 11 to the external environment. The arrangement of the conveying assembly 6 can not only support the storage of the wafer box 3 in the temporary storage position, but also realize the outward transportation of the wafer box 3 on the temporary storage position, thereby avoiding the inconvenience of the robot in the prior art to take the wafer box from the material port.

[0064] For further information, see Appendix Figure 8As shown, the slide 62 includes a slide body 621, and the slide body 621 is connected to the conveyor table 61 through a slide rail assembly. The slide rail assembly includes at least a first-level slide rail 622 and a second-level slide rail 623. The first-level slide rail 622 is fixed to the conveyor table 61, and the second-level slide rail 623 is slidably arranged thereon; the slide body 621 is slidably arranged on the second-level slide rail 623. The segmented design of the first-level slide rail 622 and the second-level slide rail 623 not only ensures the overall extension length of the slide rail assembly, which is conducive to delivering the wafer box 3 out of the material port 11, but also enables the conveying assembly 6 to be built into the temporary storage position of the material port 11 when the slide rail assembly is fully retracted. It should be noted that in actual application, the number of segmented slide rails can be adjusted according to actual needs. In this embodiment, the first-level slide rail and the second-level slide rail are set. In some embodiments, a third-level slide rail or even a fourth-level slide rail can also be added.

[0065] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A sealing door device for a storage warehouse, characterized in that: include A frame having a material port connected to the left and right sides, wherein a temporary storage position for accommodating a wafer box is provided in the material port; The door panel assembly is provided with two groups and is respectively located on both sides of the material opening; each group of the door panel assembly includes an opening and closing driving part and a door panel part, and the door panel part moves up and down under the action of the opening and closing driving part to open and close the material opening; the door panel part includes an inner door panel, an outer door panel, and an elastic member, and the inner door panel is arranged close to the material opening and is connected to the outer door panel through the elastic member; the outer door panel is connected to the opening and closing driving part; A clamping assembly is arranged one-to-one with the door panel assembly, and includes a stopper and a linkage part; the stopper is arranged on the frame and located above the material port, and is used for the inner door panel of the corresponding door panel assembly to abut against; the linkage part is arranged between the inner door panel and the outer door panel, and can swing up and down to make the inner door panel move toward or away from the outer door panel; A conveying assembly is arranged at the material port and is used to carry the wafer box; the conveying assembly includes a conveyor table located on the temporary storage position, and a slide table that can be telescopically moved is provided on the conveyor table, and the slide table is used to support the wafer box; when the slide table is fully retracted, the slide table can be accommodated in the temporary storage position, and when the slide table is fully extended, the slide table can be located outside the material port; During the operation of the two groups of door panel assemblies, the material opening is closed by at least one group of the door panel assemblies; and during the rising of the outer door panel, the inner door panel can rise synchronously with the outer door panel under the action of the elastic member until the inner door panel abuts against the stop portion, at which time the inner door panel closes the material opening; when the outer door panel continues to rise, the linkage portion swings to move the inner door panel away from the outer door panel and press against the material opening.

2. The sealing door device according to claim 1, characterized in that: The linkage part includes connecting rods symmetrically arranged on both sides of the inner door panel along the front-to-back direction, and both ends of each connecting rod are pivotally connected to the inner door panel and the outer door panel respectively; and when the elastic member is in a natural state, the connecting rods are inclined downward from the inner door panel to the outer door panel.

3. The sealing door device according to claim 2, characterized in that: The outer door panel is provided with at least one waist-shaped groove arranged along the vertical direction; the inner door panel is provided with guide blocks which are arranged one-to-one corresponding to the waist-shaped grooves and can extend into the corresponding waist-shaped grooves; the elastic member is arranged in the waist-shaped groove and located above the guide block, and the two ends of the elastic member are respectively connected to the waist-shaped groove and the guide block, and when the elastic member is in a natural state, a gap is left between the lower end of the guide block and the waist-shaped groove.

4. The sealing door device according to claim 3, characterized in that: When the inner door panel abuts against the stopper, as the outer door panel continues to move upward, the waist-shaped groove can abut against the lower end of the guide block. At this time, the elastic member is in a stretched state, and the connecting rod swings to a horizontal direction.

5. The sealing door device according to claim 2, characterized in that: A door panel stopper located above the outer door panel is provided on one side of the inner door panel facing the outer door panel, and the door panel stopper is used for the outer door panel to abut against; and when the elastic member is in a natural state, a gap is left between the outer door panel and the door panel stopper.

6. The sealing door device according to claim 5, characterized in that: The upper end of the outer door panel is provided with a clearance notch for avoiding the stopper.

7. The sealing door device according to claim 2, characterized in that: The frame is provided with a sealing ring around the material opening for the inner door panel to press against.

8. The sealing door device according to claim 2, characterized in that: The opening and closing drive unit includes a lifting cylinder, a lifting plate, and a lifting rail; the lifting rail is vertically arranged on the frame, the lifting plate is slidably arranged on the lifting rail, and is connected to the piston rod of the lifting cylinder; the lifting plate is connected to the outer door panel.

9. The sealing door device according to claim 1, characterized in that: The slide includes a slide body, and the slide body is connected to the conveyor platform through a slide rail assembly. The slide rail assembly includes at least a first-level slide rail and a second-level slide rail. The first-level slide rail is fixed to the conveyor platform, and the second-level slide rail is slidably arranged on the first-level slide rail; the slide body is slidably arranged on the second-level slide rail.

Images