A pressure sensor for shield and its preparation method

Abstract

The present invention discloses a pressure sensor for a shield machine and a preparation method thereof. The pressure sensor for a shield machine comprises: a seat body, which is used to connect to the inner wall of the shield tail of a shield machine, and a groove structure is formed on the seat body; a sealing film, which is arranged at the edge of the groove structure to seal the groove structure; a spherical crown pressure sensing film, which is located in the groove structure and connected to the groove bottom of the groove structure; and the top of the spherical crown pressure sensing film abuts against the sealing film. Since a spherical crown pressure sensor is used and the top of the spherical crown pressure sensor abuts against the sealing film, once the pressure of the grease changes, the spherical crown pressure sensor will be deformed and the pressure change will be sensed, so that effective measures can be taken in advance to avoid further leakage.

Description

Technical Field

[0001] The invention relates to the technical field of shield pressure sensing, and in particular to a pressure sensor for a shield and a preparation method thereof. Background Art

[0002] The shield machine is a large-scale mechanical equipment used for tunnel excavation in the engineering field. It can perform complex operations such as automated excavation and repair in complex underground environments. Good and reliable sealing is the prerequisite for ensuring the safety of shield machine excavation work. Since the sealing system of the shield tail is located in the shield tail part, this part is in direct contact with the external engineering environment. The working environment is complex and changeable, and the possibility of leakage is very high. Therefore, it is necessary to conduct leakage detection on the sealing system of this part.

[0003] In the prior art, the pressure of the grease chamber is mainly detected by ultrasonic sensors, fiber grating pressure sensors and other sensors. If the sensitivity of the sensors of the shield tail sealing system in these shield machines is too low, the leakage of the shield tail grease chamber cannot be detected in time.

[0004] Therefore, the prior art still needs to be improved and developed. Summary of the invention

[0005] The technical problem to be solved by the present invention is that, in view of the above-mentioned defects of the prior art, a pressure sensor for a shield and a preparation method thereof are provided, aiming to solve the problem in the prior art that the sensitivity of the sensor of the shield tail sealing system in the shield is too low and the leakage of the shield tail grease cavity cannot be detected in time.

[0006] The technical solution adopted by the present invention to solve the technical problem is as follows:

[0007] A pressure sensor for a shield machine, comprising:

[0008] A seat body, used for connecting to the inner wall of the shield tail of the shield machine, and a groove structure is formed on the seat body;

[0009] A sealing film, disposed at the edge of the groove structure to seal the groove structure;

[0010] A spherical crown-shaped pressure sensing membrane is located in the groove structure and connected to the groove bottom of the groove structure;

[0011] Wherein, the top of the spherical crown-shaped pressure sensing membrane abuts against the sealing membrane.

[0012] The shield pressure sensor, wherein the spherical crown pressure sensing membrane comprises:

[0013] A spherical crown-shaped matrix membrane, wherein a micro groove is arranged on the inner side of the top of the spherical crown-shaped matrix membrane;

[0014] The conductive film is arranged on the inner side of the top of the spherical crown-shaped base film and extends into the micro groove.

[0015] The pressure sensor for shield machine, wherein an annular membrane is arranged on the edge of the spherical cap-shaped base membrane.

[0016] The shield pressure sensor, wherein the shield pressure sensor further comprises:

[0017] A collection and power supply device is arranged outside the groove structure;

[0018] Wherein, the energy collection and power supply device is electrically connected to the conductive film.

[0019] The pressure sensor for shield, wherein the spherical crown base membrane is made of a flexible polymer, and the flexible polymer is selected from at least one of polyimide, epoxy resin, natural rubber, nitrile rubber, polydimethylsiloxane, olefin thermoplastic elastomer, and polyamide thermoplastic elastomer.

[0020] In the pressure sensor for a shield, the sealing film is a metal film.

[0021] The pressure sensor for shield, wherein the seat body comprises:

[0022] Mounting seat;

[0023] A support seat, arranged on the mounting seat;

[0024] Wherein, the support seat is provided with an air hole and the groove structure, and the air hole is communicated with the groove structure.

[0025] A method for preparing a pressure sensor for a shield as described above, comprising the steps of:

[0026] preparing a pressure sensing membrane;

[0027] The pressure sensing membrane is installed at the bottom of the groove structure of the seat body to form a spherical crown pressure sensing membrane;

[0028] The sealing film is installed on the edge of the groove structure to obtain a pressure sensor for a shield.

[0029] The method for preparing the pressure sensor for a shield, wherein the pressure sensing membrane is installed at the bottom of the groove structure of the seat body to form a spherical crown pressure sensing membrane, comprises:

[0030] Installing the pressure sensing membrane at the bottom of the groove structure of the support seat;

[0031] Filling gas into the pores to expand the pressure sensing membrane to form a spherical crown-shaped pressure sensing membrane;

[0032] The support base is installed on the mounting base.

[0033] The method for preparing the pressure sensor for shield machine, wherein the preparation of the pressure sensing film comprises:

[0034] forming a first microgroove on a first template;

[0035] Forming a second template based on the first template; forming micro protrusions corresponding to the first micro grooves on the second template;

[0036] forming a base film on the second template; forming micro grooves of the micro protrusions on the base film;

[0037] A conductive film is formed on the side of the base film where the micro groove is located to obtain a pressure sensing film.

[0038] Beneficial effect: Since a spherical crown pressure sensor is used and the top of the spherical crown pressure sensor is against the sealing film, once the pressure of the grease changes, the spherical crown pressure sensor will deform and sense the pressure change, so that effective measures can be taken in advance to avoid further leakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 is a cross-sectional view of a pressure sensor in an embodiment of the present invention.

[0040] Figure 2 4 is a cross-sectional view of a spherical crown pressure sensing membrane in an embodiment of the present invention.

[0041] Figure 3 1 is a bottom view of the spherical crown pressure sensing membrane in an embodiment of the present invention.

[0042] Figure 4 1 is a state diagram of the spherical crown base membrane under stress in an embodiment of the present invention.

[0043] Figure 5 4 is a graph showing a change trend of the resistance change rate △R / R0 and the pressure of the pressure sensor in an embodiment of the present invention.

[0044] Description of reference numerals:

[0045] 1. Shield tail; 10. Base body; 11. Mounting seat; 12. Support seat; 121. Groove structure; 122. Air hole; 20. Sealing film; 30. Spherical crown pressure sensing film; 31. Spherical crown base film; 311. Micro groove; 312. Ring film; 32. Conductive film; 321. First electrode; 322. Second electrode; 333. Wire; 40. Collection and power supply device; 50. Lock accessories. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical solution and advantages of the present invention clearer and more specific, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0047] Please also see Figure 1-Figure 5 The present invention provides some embodiments of a pressure sensor for a shield.

[0048] like Figure 1 As shown, the shield pressure sensor of the present invention comprises:

[0049] A seat body 10 is used to connect to the inner wall of the shield tail 1 of the shield machine, and a groove structure 121 is formed on the seat body 10;

[0050] A sealing film 20, disposed at the edge of the groove structure 121 to seal the groove structure 121;

[0051] The spherical crown pressure sensing membrane 30 is located in the groove structure 121 and connected to the groove bottom of the groove structure 121;

[0052] The top of the spherical crown-shaped pressure sensing membrane 30 abuts against the sealing membrane 20 .

[0053] Specifically, the shield tail 1 of the shield machine is located against the inner wall of the excavated tunnel, and segments are laid on the inner side of the shield tail 1. There is soil and groundwater outside the segments. Mortar may also be poured between the inner wall of the tunnel and the segments. In order to prevent soil, groundwater and mortar from entering the segments, the shield tail 1 is equipped with a shield tail 1 sealing system, and the shield tail 1 and the segments are sealed by the shield tail 1 sealing system. The shield tail 1 sealing system usually forms several grease cavities, for example, multiple sealing brushes are provided, and a grease cavity is formed between the inner wall of the shield tail 1, the segments and two adjacent sealing brushes. If leakage occurs, for example, soil, groundwater and mortar enter the grease cavity, the pressure of the grease cavity will increase. The soil and mortar entering the grease cavity may damage the shield tail 1 sealing system or the shield tail 1, for example, damage the sealing brush, resulting in sealing failure.

[0054] The seat body 10 can be connected to the inner wall of the shield tail 1, and the pressure sensor (or the seat body 10) is located in the grease cavity of the shield tail 1 and is used to detect the pressure of the grease in the grease cavity. The sealing film 20 seals the groove structure 121, and the grease and other objects in the grease cavity cannot enter the groove structure 121. The sealing film 20 faces the pipe segment and contacts the grease in the grease cavity. The spherical crown pressure sensing film 30 is located in the groove, and the top of the spherical crown pressure sensing film 30 is against the inner side of the sealing film 20. When the grease cavity is filled with grease for sealing, the grease squeezes the sealing film 20 and the spherical crown pressure sensing film 30. If the pressure of the grease in the grease cavity changes, the squeezing force of the grease squeezing the sealing film 20 and the spherical crown pressure sensing film 30 changes, and is sensed by the spherical crown pressure sensing film 30. Since a spherical crown pressure sensor is used and the top of the spherical crown pressure sensor is against the sealing film 20, once the pressure of the grease changes, the spherical crown pressure sensor will be deformed and the pressure change will be sensed, so that effective measures can be taken in advance to avoid further leakage.

[0055] The sensing area of ​​the spherical crown pressure sensing membrane 30 is located at the top of the spherical crown pressure sensing membrane 30. The deformation of the sealing membrane 20 is concentrated on the top of the spherical crown pressure sensing membrane 30, so that the deformation of the top of the spherical crown pressure sensing membrane is very sensitive, which is beneficial to improving the sensitivity of the pressure sensor and can detect the pressure changes in the grease cavity in time.

[0056] In a preferred implementation of the embodiment of the present invention, Figure 2 As shown, the spherical crown pressure sensing membrane 30 includes:

[0057] A spherical cap-shaped base film 31, wherein a micro groove 311 is arranged on the inner side of the top of the spherical cap-shaped base film 31;

[0058] The conductive film 32 is disposed on the inner side of the top of the spherical cap-shaped base film 31 and extends into the micro groove 311 .

[0059] Specifically, at least one microgroove 311 is provided on the inner side of the top of the spherical crown-shaped base film 31, and the groove wall and the edge of the microgroove 311 are provided with a conductive film 32. When the squeezing force on the spherical crown-shaped base film 31 increases, the microgroove 311 opens, and the resistance of the conductive film 32 increases; when the squeezing force on the spherical crown-shaped base film 31 decreases, the microgroove 311 moves closer, and the resistance of the conductive film 32 decreases. When the microgroove 311 is used, even if the deformation of the spherical crown-shaped base film 31 is small, the opening and closing degree of the microgroove 311 will change greatly, and the resistance change of the conductive film 32 will also be large, so the pressure sensor has a high sensitivity and can detect the pressure change in the grease cavity in time. The conductive film 32 is provided with a first electrode 321 and a second electrode 322, and the first electrode 321 and the second electrode 322 are both connected with a wire 333.

[0060] In a preferred implementation of the embodiment of the present invention, Figure 2 As shown, an annular membrane 312 is provided at the edge of the spherical cap-shaped base membrane 31 .

[0061] Specifically, an annular film 312 is disposed on the edge of the spherical crown-shaped base film 31 . The annular film 312 surrounds the spherical crown-shaped base film 31 . The annular film 312 is connected to the bottom of the groove structure 121 , and the connection can be achieved by bonding.

[0062] In a preferred implementation of the embodiment of the present invention, Figure 1 As shown, the shield pressure sensor also includes:

[0063] A collection and power supply device 40 is arranged outside the groove structure 121;

[0064] The power collection and power supply device 40 is electrically connected to the conductive film 32 .

[0065] Specifically, the power supply device 40 is used to supply power to the conductive film 32 and collect the resistance or voltage of the conductive film 32. The power supply device 40 can be disposed outside the groove structure 121 and electrically connected to the conductive film 32.

[0066] In a preferred implementation of the embodiment of the present invention, the spherical crown base membrane 31 is made of a flexible polymer, and the flexible polymer is selected from at least one of polyimide, epoxy resin, natural rubber, nitrile rubber, polydimethylsiloxane, olefin thermoplastic elastomer, and polyamide thermoplastic elastomer.

[0067] Specifically, the spherical crown base membrane 31 is made of a flexible material, so the spherical crown base membrane 31 can be deformed, and the flexible material can be a flexible polymer material, for example, polyimide (PI), epoxy resin, natural rubber (NR), nitrile rubber (NBR), polydimethylsiloxane (PDMS), olefin thermoplastic elastomer, polyamide thermoplastic elastomer (TPAE).

[0068] In a preferred implementation of the embodiment of the present invention, the sealing film 20 is a metal film.

[0069] Specifically, the sealing film 20 can be a metal film, which has high strength and is not easy to break. The metal film is made of metal material, for example, stainless steel.

[0070] In a preferred implementation of the embodiment of the present invention, Figure 1 As shown, the seat body 10 includes:

[0071] Mounting seat 11;

[0072] A support seat 12, disposed on the mounting seat 11;

[0073] The support seat 12 is provided with an air hole 122 and the groove structure 121 , and the air hole 122 is communicated with the groove structure 121 .

[0074] Specifically, the mounting seat 11 is used to mount the pressure sensor on the inner wall of the shield tail 1. For example, a mounting hole can be set on the mounting seat 11, and the mounting hole is used for the locking accessory 50 to pass through, and the mounting seat 11 is locked to the inner wall of the shield tail 1. The support seat 12 is used to support the sealing membrane 20 and install the spherical crown pressure sensing membrane 30. The groove structure 121 is set on the support seat 12, and the groove of the groove structure 121 is located on the side of the support seat 12 away from the mounting seat 11. The groove bottom of the groove structure 121 is provided with an air hole 122, and air can be transported into the groove structure 121 through the air hole 122. For example, after the pressure sensing membrane is connected to the groove bottom of the groove structure 121, air is transported into the air hole 122, and the pressure sensing membrane expands to form the spherical crown pressure sensing membrane 30.

[0075] In a preferred implementation of the embodiment of the present invention, the conductive film 32 is selected from at least one of a carbon conductive material film, a metal material film, a transition metal carbide material film, a polymer conductive material film, and a conductive composite material film.

[0076] Specifically, the conductive film 32 also exists on the groove wall of the micro groove 311. When the micro groove 311 is deformed, the conductive films 32 on the two groove walls of the micro groove 311 are closely attached to or separated from each other. The surface of the conductive film 32 has good conductivity. When the conductive films 32 on the two groove walls are closely attached to or separated from each other, the resistance of the conductive film 32 changes greatly.

[0077] In a preferred implementation of the embodiment of the present invention, the conductive film 32 may be made of metal particle conductive material.

[0078] Specifically, the metal particles are distributed on the two groove walls of the micro groove 311, especially the metal particles deposited at the bottom of the micro groove 311. When the extrusion pressure increases, the metal particles at the bottom will be torn, that is, the metal particles that were originally in contact with each other at the bottom of the groove will be forced to separate, the groove wall of the micro groove 311 will open, and the spacing between the metal particles stacked on both sides of the bottom groove wall will increase, resulting in a reduction in the electron path. Correspondingly, when the extrusion pressure decreases, the groove walls of the micro groove 311 will move closer, the spacing between the metal particles stacked on both sides of the bottom groove wall will decrease, and the metal particles that were originally not in contact on the inclined surface will come into contact, resulting in an increase in the number of electron paths, thereby affecting the size of the resistance.

[0079] Based on the shield pressure sensor described in any of the above embodiments, the present invention also provides a preferred embodiment of a method for preparing a shield pressure sensor:

[0080] The method for preparing a pressure sensor for a shield machine according to an embodiment of the present invention comprises the following steps:

[0081] Step S100, preparing a pressure sensing film;

[0082] Step S200, installing the pressure sensing membrane at the bottom of the groove structure of the seat body to form a spherical crown-shaped pressure sensing membrane;

[0083] Step S300: Install a sealing film on the edge of the groove structure to obtain a pressure sensor for a shield.

[0084] Specifically, a pressure sensing membrane is prepared first, and the pressure sensing membrane can be in a planar shape. When the pressure sensing membrane is installed, the pressure sensing membrane is formed into a spherical crown shape, which is a spherical crown pressure sensing membrane. After the spherical crown pressure sensing membrane is installed first, the sealing membrane is installed to obtain a pressure sensor for a shield.

[0085] Step S100 specifically includes:

[0086] Step S110, forming a first micro groove on a first template;

[0087] Step S120, forming a second template based on the first template; forming micro protrusions corresponding to the first micro grooves on the second template;

[0088] Step S130, forming a base film on the second template; forming the micro-grooves of the micro-protrusions on the base film;

[0089] Step S140 , forming a conductive film on the side of the base film where the micro groove is located to obtain a pressure sensing film.

[0090] Specifically, a pressure-sensitive film is prepared by a template method, and a first microgroove is first formed on a first template, and the size of the first microgroove is the same as the size of the microgroove to be finally formed. Then, a second template is prepared on the basis of the first template, and a microprotrusion is formed at a position corresponding to the first microgroove on the second template. Then, a substrate film is prepared on the basis of the second template, and a microgroove is formed at a position corresponding to the microprotrusion on the substrate film. Finally, a conductive film is formed on one side of the substrate film where the microgroove is located, and part of the conductive film is located in the microgroove, and finally a pressure-sensitive film is obtained. After the conductive film is formed, a first electrode and a second electrode can also be formed on the conductive film, and wires are connected to the first electrode and the second electrode respectively. The first electrode and the second electrode can use double-layer electrodes, and the double-layer electrode includes a silver electrode layer and a copper electrode layer, and the wire can use a copper wire.

[0091] Step S200 specifically includes:

[0092] Step S210, installing the pressure sensing film at the bottom of the groove structure of the support seat;

[0093] Step S220, filling gas into the pores to expand the pressure sensing membrane to form a spherical crown-shaped pressure sensing membrane;

[0094] Step S230: Install the support base on the mounting base.

[0095] Specifically, when installing the pressure sensing film, the pressure sensing film is connected to the groove bottom of the groove structure. For example, the pressure sensing film is bonded to the groove bottom of the groove structure around the periphery, and then the air is filled into the pores so that the pressure sensing film expands to a certain height, and the pores are blocked so that the pressure sensing film maintains a spherical crown shape to form a spherical crown pressure sensing film (the pores can also be blocked with a rubber plug first, and then the air is injected with a syringe). Finally, the support seat is connected to the mounting seat. The expansion height is related to the width of the micro groove and the width of the pressure sensing film. After flushing the air, the two groove walls of the micro groove are close to a state of being completely close or just close, that is, the state in which the resistance of the conductive film has just reached the minimum value. Since the grease in the grease cavity has a certain pressure, a certain extrusion force will be formed. When the pressure sensor is used, a certain extrusion will be formed on the spherical crown pressure sensing film, and the groove wall of the micro groove will be slightly opened. Of course, when the grease pressure is large, the air pressure between the spherical crown pressure sensing film and the groove structure can also be increased by filling air, thereby adjusting the different application scenarios of the pressure sensor. Specific embodiment 1

[0097] The silicon wafer is used as the first template and the epoxy resin template is used as the second template. The first template is prepared first, and then the second template is prepared based on the first template. Finally, the base film is prepared based on the second template, and the pressure sensing film is further prepared.

[0098] Step (1), ultrasonically clean the polished silicon wafer with anhydrous ethanol for 5 minutes, and place it on a three-dimensional precision motion platform of a femtosecond laser processing system;

[0099] Step (2), the ultrashort pulse laser generated by the femtosecond laser is incident vertically onto the double convex lens after passing through a reflector, and the light beam is focused by the convex lens and acts on the surface of the silicon wafer to start processing;

[0100] Step (3), placing the processed silicon wafer with the first micro-groove in a 20wt% hydrofluoric acid solution for etching for 60 minutes, then washing it with clean water for 3 times, and then ultrasonically cleaning it in anhydrous ethanol for 10 minutes;

[0101] Step (4), mixing and blending the A and B solvents in the epoxy resin in a mass ratio of 3:1, and stirring them sufficiently, then evenly coating the epoxy resin on the surface of the processed silicon wafer with the first micro-groove, and letting it stand for 10 minutes for degassing, then putting it in a drying oven at 60° C. for 2 hours, taking it out, and peeling off the cured epoxy resin to obtain an epoxy resin template with micro-protrusions;

[0102] Step (5), the PDMS precursor and the solvent are mixed in a weight ratio of 10:1, and the mixture is fully stirred and blended, and then placed for 30 minutes for degassing treatment, and then the mixed solution is coated on the epoxy resin template by a spin coater, and then placed in a drying oven at 70° C. for 1 hour and then taken out;

[0103] Step (6), peel off the cured PDMS film and cut it using a femtosecond laser to obtain Figure 3 The circular PDMS film shown has a diameter a of 12 mm, a replicated groove structure in the middle, and a length b of 8 mm;

[0104] Step (7), using a magnetron sputtering coating apparatus to perform ion sputtering on the finally prepared PDMS film, sputtering conductive gold nanoparticles on the surface of the flexible substrate to a thickness of about 50 nm;

[0105] Step (8), such as Figure 2 As shown, the nano silver paste is coated on both sides of the slot structure, and then a copper electrode is placed on the silver paste and placed in a drying oven at 150°C for 30 minutes, after which a copper wire is welded on the surface of the copper electrode to lead out the circuit;

[0106] Step (9), coating the side of the pressure sensing film with the conductive layer with sticky glue, then placing the pressure sensing film upside down on the bottom of the groove structure, and then sealing the bottom of the mounting seat with a sealing rubber, and finally injecting air into the interior through an air pumping device, so that the pressure sensing film arches to a certain height of about 1 mm;

[0107] Step (10), using a femtosecond laser to cut a circular stainless steel metal sheet, and gluing it to the edge of the groove structure to cover the surface of the flexible film.

[0108] The working mechanism of the pressure sensor is as follows Figure 4As shown, "V"-shaped microgrooves are processed on the surface of the spherical crown-shaped substrate film, and the sputtered gold nanoparticles are evenly distributed on the surface of the spherical crown-shaped substrate film and cover the inclined groove walls of the microgrooves. Some gold nanoparticles are deposited at the sharp corners of the microgrooves. In the absence of external pressure, the entire interface is in a normal conductive state with low resistance. When subjected to external pressure, the presence of the microgrooves will amplify the tearing effect of the gold nanoparticles, causing the originally interconnected gold nanoparticles to be forced to separate under tension, resulting in a decrease in the number of conductive electrons, which in turn leads to an increase in the resistance of the conductive layer. The signal output by this mechanism of action is particularly sensitive and can respond quickly to changes in external pressure. According to Figure 5 From the characterization results shown, the pressure sensor is able to detect pressures ranging from 30Pa to 2800Pa, with a large detection range and high sensitivity.

[0109] It should be understood that the application of the present invention is not limited to the above examples. For ordinary technicians in this field, improvements or changes can be made based on the above description. All these improvements and changes should fall within the scope of protection of the claims attached to the present invention.

Claims

1. A pressure sensor for a shield, characterized in that: include: A seat body, used for connecting to the inner wall of the shield tail of the shield machine, and a groove structure is formed on the seat body; A sealing film, disposed at the edge of the groove structure to seal the groove structure; A spherical crown-shaped pressure sensing membrane is located in the groove structure and connected to the groove bottom of the groove structure; Wherein, the top of the spherical crown pressure sensing membrane abuts against the sealing membrane; The spherical crown pressure sensing membrane comprises: A spherical crown-shaped matrix membrane, wherein a micro groove is arranged on the inner side of the top of the spherical crown-shaped matrix membrane; A conductive film is disposed on the inner side of the top of the spherical crown-shaped base film and extends into the micro groove; The seat body comprises: Mounting seat; A support seat, arranged on the mounting seat; Wherein, the support seat is provided with an air hole and the groove structure, the air hole is communicated with the groove structure; the air hole is used to transport air into the groove structure.

2. The shield pressure sensor according to claim 1, characterized in that: An annular membrane is arranged at the edge of the spherical crown-shaped base membrane.

3. The shield pressure sensor according to claim 1, characterized in that: The shield pressure sensor also includes: A collection and power supply device is arranged outside the groove structure; Wherein, the energy collection and power supply device is electrically connected to the conductive film.

4. The shield pressure sensor according to claim 1, characterized in that: The spherical crown base membrane is made of a flexible polymer, and the flexible polymer is selected from at least one of polyimide, epoxy resin, natural rubber, nitrile rubber, polydimethylsiloxane, olefin thermoplastic elastomer, and polyamide thermoplastic elastomer.

5. The shield pressure sensor according to claim 1, characterized in that: The sealing film is a metal film.

6. A method for preparing a pressure sensor for a shield according to any one of claims 1 to 5, characterized in that: Includes steps: preparing a pressure sensing membrane; The pressure sensing membrane is installed at the bottom of the groove structure of the seat body to form a spherical crown pressure sensing membrane; Installing a sealing film on the edge of the groove structure to obtain a pressure sensor for a shield; The method of installing the pressure sensing membrane at the bottom of the groove structure of the seat body to form a spherical crown-shaped pressure sensing membrane includes: Installing the pressure sensing membrane at the bottom of the groove structure of the support seat; Filling gas into the pores to expand the pressure sensing membrane to form a spherical crown-shaped pressure sensing membrane; The support base is installed on the mounting base.

7. The method for preparing a pressure sensor for a shield according to claim 6, characterized in that: The preparation of the pressure sensing film comprises: forming a first microgroove on a first template; Forming a second template based on the first template; forming micro protrusions corresponding to the first micro grooves on the second template; forming a base film on the second template; forming micro grooves of the micro protrusions on the base film; A conductive film is formed on the side of the base film where the micro groove is located to obtain a pressure sensing film.

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