A multi-layer ceramic substrate sintering device with multiple sintering box furnaces

Abstract

The invention relates to the technical field of high-temperature sintering of ceramic substrates, in particular to a multi-layer ceramic substrate sintering device with multiple sintering box furnaces, comprising: a push plate furnace, comprising a furnace body, a material feed port and a material discharge port, a sintering table and a loading table, the upper end surface of the loading table is detachably provided with a multi-layer ceramic substrate, the sintering table is pushed by a hydraulic cylinder to slide on the inner wall of the furnace body; a heating mechanism, comprising a heating wire, a ventilation slot and an air nozzle; a turning mechanism, comprising a rotating shaft, which drives the loading table to rotate in the sintering table when the rotating shaft rotates; the multi-layer ceramic substrate is automatically turned over during the movement of the sintering table, so that the heating is more uniform, and the internal gas circulation of the sintering table is realized through a slide plate during the movement, so that the internal gas temperature tends to be consistent, and defects such as warping caused by thermal stress and uneven heating are reduced. While the gas circulates, the oil and gas smoke is filtered, adsorbed and removed, so as to solve the problem that the smoke is condensed and accumulated when it is cold and difficult to clean, and the manual cleaning is time-consuming and labor-intensive, thereby improving the sintering production efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of high-temperature sintering of ceramic substrates, in particular to a multi-layer ceramic substrate sintering device with a plurality of sintering box furnaces. Background Art

[0002] Multilayer ceramic substrates are common key materials in modern electronic devices. Their manufacturing process requires strict control of the sintering steps. High-temperature sintering furnace devices play a vital role in the co-firing process of multilayer ceramic substrates. The sintering furnace dedicated to multilayer ceramic substrates is an improved self-propelled plate furnace. The difference is that it is usually composed of a combination of multiple sintering furnaces, and the number of sintering furnaces is adjusted according to product requirements to achieve different heat treatment effects. It heats the ceramic material in a controlled environment to cause solid-phase sintering or liquid-phase sintering to eventually obtain a dense ceramic substrate product. In the manufacturing process of multilayer ceramic substrates, the sintering furnace needs to be able to provide precise temperature control, uniform temperature distribution, and a suitable atmosphere to ensure the density and performance of the multilayer ceramic material.

[0003] The existing Chinese patent with authorization announcement number CN208952661U discloses a high-temperature push-plate kiln, including a bracket, a nine-nine porcelain slide plate, a corundum push plate and an arched kiln body, the bottom of the arched kiln body is connected to the nine-nine porcelain slide plate, the corundum push plate is arranged along the length direction of the kiln body and moves along the nine-nine porcelain slide plate; the kiln body includes a low-temperature zone, a high-temperature zone and a cooling zone connected in sequence; the inner wall of the low-temperature zone is provided with three layers of fiberboard, and the inner wall of the high-temperature zone is provided with four layers of fiberboard and a layer of hollow alumina balls in sequence from the outside to the inside; the inner wall of the cooling zone is provided with two layers of fiberboard; the high-temperature zone has a plurality of heating elements inserted through the hollow alumina balls, and by respectively providing a low-temperature zone, a high-temperature zone and a cooling zone for different requirements in the sintering process, during the movement of the corundum push plate, it passes through different areas to meet different temperature requirements.

[0004] However, the push plate furnace in the above technical solution cannot maintain a consistent temperature distribution in the furnace. Uneven temperature will lead to uneven sintering of different parts of the ceramic substrate, uneven distribution of internal thermal stress, and quality defects such as warping, which will ultimately affect the density and mechanical properties of the product. At the same time, the push plate furnace mentioned above cannot ensure the uniform distribution of the atmosphere (such as oxygen, nitrogen or inert gas) in the furnace. The uneven atmosphere may lead to inconsistent chemical reactions between the surface and the interior of the material, affecting the stability of the sintering process and the quality of the product. At the same time, the oil fume and dust generated during the sintering process may not only leak and affect the physical and mental health of the operators, but also condense in the colder area at the edge of the inner wall of the furnace body when it is cold, accumulate and agglomerate, and the longer the time, the more difficult it is to clean. Stopping work for cleaning is time-consuming and labor-intensive and affects production. Summary of the invention

[0005] The purpose of this section is to summarize some aspects of embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the specification abstract and the invention title of this application to avoid blurring the purpose of this section, the specification abstract and the invention title, and such simplifications or omissions cannot be used to limit the scope of the present invention.

[0006] In view of the above problems in the prior art, the present invention is proposed.

[0007] In order to solve the above technical problems, the present invention provides the following technical solutions: a multi-layer ceramic substrate sintering device with multiple sintering box furnaces, comprising: a push plate furnace, comprising a furnace body, a feeding port and a discharging port respectively arranged at two ends of the furnace body, a sintering table slidably arranged on the inner wall of the furnace body, and a loading table rotatably arranged inside the sintering table, a multi-layer ceramic substrate is detachably arranged on the upper surface of the loading table, and the sintering table is pushed by a hydraulic cylinder to slide on the inner wall of the furnace body;

[0008] The heating mechanism comprises heating wires arranged on the inner walls of both sides of the furnace body, and ventilation slots and air nozzles arranged on the inner walls of the furnace body, wherein the ventilation slots are symmetrically arranged on both sides of the heating wires, and the air nozzles are arranged between the heating wires to heat the gas ejected from the air nozzles;

[0009] The turning mechanism includes a rotating shaft that rotates and penetrates the inner wall of the sintering table. When the rotating shaft rotates, the loading platform is driven to rotate inside the sintering table.

[0010] As a preferred solution of the multilayer ceramic substrate sintering device with multiple sintering box furnaces described in the present invention, wherein: the inner wall of the bottom surface of the furnace body is provided with a guide rail, the bottom surface of the sintering table is provided with a slider, the slider is slidably arranged on the outer wall of the guide rail, and the direction of the guide rail is parallel to the direction of the furnace body.

[0011] As a preferred solution of the multi-layer ceramic substrate sintering device with multiple sintering box furnaces described in the present invention, the inner wall of the bottom of the furnace body is also provided with a groove, a rack is fixedly provided on the bottom surface of the groove, the rotating shaft rotates and passes through one end of the outside of the sintering table, extends into the groove and is provided with a gear, and the gear is meshed with the rack.

[0012] As a preferred solution of the multi-layer ceramic substrate sintering device with multiple sintering box furnaces described in the present invention, the outer wall of the rotating shaft is rotatably sleeved with a bracket, the upper end face of the rotating shaft is provided with a turntable, the turntable is slidably provided with a pillar, and the upper end face of the pillar is rotatably provided with a sliding sleeve.

[0013] As a preferred solution of the multi-layer ceramic substrate sintering device with multiple sintering box furnaces described in the present invention, wherein: a swing arm is provided on the lower end surface of the stage, a fixed shaft is rotatably provided on the upper end of the bracket, the swing arm is sleeved on the outer wall of the fixed shaft, a moving shaft is provided on the lower side of the inner wall of the swing arm, and the sliding sleeve is slidably sleeved on the outer wall of the moving shaft.

[0014] As a preferred solution of the multi-layer ceramic substrate sintering device with multiple sintering box furnaces of the present invention, wherein: the inner wall of the furnace body is also provided with an air chamber, the outer wall of the air chamber is provided with an air outlet, the air outlet is located in the air chamber and one end surface thereof is rotatably provided with an air plate, and the air plate is movably fitted with the inner wall of the air chamber;

[0015] The inner wall of the air chamber is provided with an air collecting groove, the outer wall of the air collecting groove is slidably provided with a fan plate, the side wall of the air collecting groove is symmetrically provided with through holes, and a pull rod is slidably penetrated by the air chamber.

[0016] As a preferred solution of the multi-layer ceramic substrate sintering device with multiple sintering box furnaces described in the present invention, the outer wall of the gas collecting trough is provided with an arc plate, the air nozzle is opened through the highest point of the arc plate, and the inner wall of the gas collecting trough is also rotatably provided with an adjusting plate, and the adjusting plate is slidably fitted with the arc plate.

[0017] As a preferred solution of the multilayer ceramic substrate sintering device with multiple sintering box furnaces described in the present invention, wherein: the pull rod slidingly extends into the ventilation slot and a slide table is provided at one end, a slide plate is slidably provided in the ventilation slot, and an array of bumps is provided on the slide plate.

[0018] As a preferred solution of the multi-layer ceramic substrate sintering device with multiple sintering box furnaces described in the present invention, a scraper is provided at one end of the protrusion away from the slide plate, a sieve plate is fixedly provided on the outer wall of the air outlet, the scraper is slidably fitted with the sieve plate, and the protrusion is slidably fitted with the slide table.

[0019] As a preferred solution of the multi-layer ceramic substrate sintering device with multiple sintering box furnaces described in the present invention, the slide plate is arranged on the outer wall of each of the sintering tables and moves therewith, the ventilation groove is arranged on one side of the end surface of the feed port and the discharge port, and a cleaning door is rotatably provided, and a cleaning curtain is provided inside the cleaning door.

[0020] The beneficial effects of the present invention are as follows: the multilayer ceramic substrate is automatically flipped during the movement of the sintering table, so that the heating effect is more uniform. The movement also realizes the internal gas circulation of the sintering table through the slide plate, so that the internal gas temperature tends to be consistent, reducing defects such as warping caused by thermal stress and uneven heating. While the gas circulates, the smoke generated in the sintering process is filtered, adsorbed and removed, solving the problem that the smoke condenses and accumulates when it is cold and is difficult to clean, and manual cleaning is time-consuming and labor-intensive, thereby improving the sintering production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. Among them:

[0022] Figure 1 It is an overall schematic diagram of a multi-layer ceramic substrate sintering device with multiple sintering box furnaces in the present invention;

[0023] Figure 2 It is an enlarged view of the feed port in the present invention;

[0024] Figure 3 It is an enlarged schematic diagram of the flipping mechanism structure in the present invention;

[0025] Figure 4 It is a schematic diagram of the cooperation between the slide and the convex block in the present invention;

[0026] Figure 5 It is a schematic diagram of the internal structure of the air chamber in the present invention;

[0027] Figure 6 It is a schematic cross-sectional view of the air chamber in the present invention;

[0028] Figure 7 It is an enlarged schematic diagram of the scraper area in the present invention;

[0029] Figure 8 This is an enlarged schematic diagram of the cleaning door area in the present invention;

[0030] Fig. 9 It is a partial enlarged view of the air chamber area in the present invention.

[0031] Reference numerals:

[0032] 10. Push plate furnace; 11. Furnace body; 111. Air chamber; 1113. Sieve plate; 1111. Air outlet; 1112. Air plate; 112. Groove; 1121. Rack; 113. Gas collecting groove; 1131. Fan plate; 1132. Through hole; 1133. Curved plate; 1134. Adjusting baffle; 114. Pull rod; 115. Guide rail; 12. Feeding port; 123. Cleaning door; 1231. Cleaning curtain; 13. Discharging port; 14. Sintering table; 141. Sliding block; 15. Loading table;

[0033] 20. Heating mechanism; 21. Heating wire; 22. Ventilation slot; 221. Slide table; 222. Slide plate; 223. Bump; 2231. Scraper; 23. Air nozzle;

[0034] 30. Flipping mechanism; 31. Rotating shaft; 311. Gear; 312. Bracket; 3121. Fixed shaft; 3122. Moving shaft; 313. Turntable; 3131. Support; 3132. Sliding sleeve; 151. Swing arm. DETAILED DESCRIPTION

[0035] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below in conjunction with the accompanying drawings.

[0036] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0037] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments.

[0038] Example 1

[0039] Reference Figure 1 to Figure 9 , which is the first embodiment of the present invention, provides a multilayer ceramic substrate sintering device with multiple sintering box furnaces, including: a push plate furnace 10, a heating mechanism 20 and a flipping mechanism 30. The push plate furnace 10 is used to simultaneously perform sintering treatment on each sintering table 14, and the flipping mechanism 30 is used to flip the angle of the multilayer ceramic substrate, so that the sintering temperature of each area tends to be consistent, the heating effect is more uniform, the warping and deformation caused by thermal stress difference are reduced, and the product quality is improved.

[0040] Specifically, they include:

[0041] The push plate furnace 10 comprises a furnace body 11, a feeding port 12 and a discharging port 13 respectively arranged at two ends of the furnace body 11, a sintering table 14 slidably arranged on the inner wall of the furnace body 11, and a loading table 15 rotatably arranged inside the sintering table 14, a multi-layer ceramic substrate is detachably arranged on the upper end surface of the loading table 15, the sintering table 14 is pushed by a hydraulic cylinder to slide on the inner wall of the furnace body 11, and the furnace body 11 is composed of at least two sintering box furnaces combined and configured;

[0042] The heating mechanism 20 includes heating wires 21 disposed on the inner walls of both sides of the furnace body 11, and ventilation slots 22 and air nozzles 23 disposed on the inner walls of the furnace body 11. The ventilation slots 22 are symmetrically disposed on both sides of the heating wires 21, and the air nozzles 23 are disposed between the heating wires 21 to heat the gas ejected from the air nozzles 23.

[0043] The turning mechanism 30 includes a rotating shaft 31 that rotates and penetrates the inner wall of the sintering table 14 . When the rotating shaft 31 rotates, the stage 15 is driven to rotate inside the sintering table 14 .

[0044] Among them, the feed port 12 and the discharge port 13 are symmetrically arranged on both sides of the furnace body 11. The furnace body 11 is composed of various chambers. The heating wire 21 heats the inside of the chamber by electric heating. The temperature inside each chamber is different. The sintering table 14 slides from the feed port 12 along the furnace body 11 and slides out from the discharge port 13 and heats according to the set temperature. The heating time is controlled by the speed at which the hydraulic cylinder pushes the sintering table 14.

[0045] More preferably, the number of sintering tables 14 is greater than or equal to 2, and the sintering tables 14 are in contact with each other, pushing the sintering table 14 located at the feed port 12, driving all the sintering tables 14 to slide toward the discharge port 13, and at the same time, the multilayer ceramic substrate is heated so that the solid particles are bonded to each other, the grains grow, and the voids and grain boundaries gradually decrease to form a dense polycrystalline sintered body.

[0046] Preferably, on the side of the feed port 12, the wind force of the air nozzle 23 is relatively small to prevent particles in the ingredients of the multilayer ceramic substrate from being blown up and affecting the sintered appearance, while preventing air pollution and protecting the personal safety of operators.

[0047] The feed inlet 12 and the discharge outlet 13 can automatically close the hatches for sealing after entering the sintering table 14, thereby reducing heat loss and preventing on-site workers from being burned by hot air.

[0048] More preferably, a guide rail 115 is provided on the inner wall of the bottom surface of the furnace body 11 , a slider 141 is provided on the lower bottom surface of the sintering table 14 , and the slider 141 is slidably arranged on the outer wall of the guide rail 115 , and the direction of the guide rail 115 is parallel to the direction of the furnace body 11 .

[0049] Preferably, a groove 112 is formed on the inner wall of the bottom of the furnace body 11 , a rack 1121 is fixedly provided on the bottom of the groove 112 , one end of the rotating shaft 31 that rotates and passes through the outside of the sintering table 14 extends into the groove 112 and is provided with a gear 311 , which meshes with the rack 1121 .

[0050] More preferably, a bracket 312 is rotatably sleeved on the outer wall of the rotating shaft 31 , a rotating disk 313 is provided on the upper end surface of the rotating shaft 31 , a pillar 3131 is slidably provided on the rotating disk 313 , and a sliding sleeve 3132 is rotatably provided on the upper end surface of the pillar 3131 .

[0051] Furthermore, a swing arm 151 is provided on the lower end surface of the stage 15, a fixed shaft 3121 is rotatably provided on the upper end of the bracket 312, the swing arm 151 is sleeved on the outer wall of the fixed shaft 3121, a movable shaft 3122 is provided on the lower side of the inner wall of the swing arm 151, and a sliding sleeve 3132 is slidably sleeved on the outer wall of the movable shaft 3122.

[0052] The rack 1121 is fixedly disposed at the bottom of the groove 112 and parallel to the guide rail 115 . The bracket 312 is fixedly connected to the sintering table 14 . The axis directions of the movable shaft 3122 and the fixed shaft 3121 are parallel to the guide rail 115 .

[0053] Preferably, the bracket 312 is in a door shape and is slidably connected to the outer walls on both sides of the fixed axis 3121 to ensure the stability of the rotation of the fixed axis 3121. The support 3131 is eccentrically arranged on the outside of the turntable 313 and slides along the axis direction of the turntable 313. The degree of eccentricity determines the angle of the flipping of the worktable 15.

[0054] Furthermore, in this embodiment, the temperature sensor and the cylinder control support 3131 can slide in the vertical direction of the turntable 313 and in the radial direction at the same time, so as to automatically adjust the flip angle of the stage 15 according to the different temperatures of each chamber, and uniformly heat all angles of the multilayer ceramic substrate at the same time to reduce blind spots.

[0055] In summary, when in use, the hydraulic cylinder pushes the sintering table 14 at the feed port 12 to slide inward, thereby driving the loading platform 15 located in the sintering table 14 to slide inward along the furnace body 11, and through different chambers, heating according to the set temperature. At the same time, since the gear 311 at the end of the rotating shaft 31 is engaged with the rack 1121, the gear 311 rolls along the rack 1121 and drives the rotating shaft 31 to rotate. The rotation of the turntable 313 drives the support 3131 to rotate. At the same time, since the support 3131 can slide in the direction perpendicular to the turntable 313 and can slide left and right along the moving shaft 3122, the moving shaft 3122 can be driven to move back and forth during the circular rotation.

[0056] At the same time, because the swing arm 151 is fixed and can only rotate around the axis following the fixed axis 3121, the cyclic rotation of the pillar 3131 drives the swing arm 151 and the stage 15 to flip back and forth around the fixed axis 3121, so that the multilayer ceramic substrate on the stage 15 flips with the movement of the sintering table 14, so that each angle of the multilayer ceramic substrate is close to the heating wire 21 for heating, so that the multilayer ceramic substrate blank is automatically flipped during the movement of the sintering table 14, so that the heating effect is more uniform everywhere, the thermal stress difference caused by uneven heating is reduced, and the quality of the finished product is improved.

[0057] Example 2

[0058] Reference Figure 1 to Figure 9 , which is the second embodiment of the present invention. This embodiment is based on the previous embodiment, but differs in that the air circulation inside the sintering table 14 is constructed by the pull rod 114, so that the gas temperature around the multi-layer ceramic substrate tends to be consistent, reducing the stress difference caused by uneven heating and improving product quality.

[0059] Specifically, an air chamber 111 is formed on the inner wall of the furnace body 11 , and an air port 1111 is formed on the outer wall of the air chamber 111 . An air plate 1112 is rotatably provided on one end surface of the air port 1111 located in the air chamber 111 , and the air plate 1112 is movably fitted to the inner wall of the air chamber 111 .

[0060] Among them, the air outlet 1111 connects the air chamber 111 and the ventilation slot 22. There are four air outlets 1111 in total, which are symmetrically arranged on the inner walls of the two ventilation slots 22. The air outlet 1111 is rectangular in shape, and the wind plate 1112 is rectangular in shape and larger than the air outlet 1111, so that when the wind plate 1112 is attached to the air outlet 1111, it can completely block it and prevent the airflow from flowing from the air outlet 1111 to the ventilation slot 22.

[0061] The air chamber 111 is a sealed cavity that connects the ventilation slots 22 on the upper and lower sides of the furnace body 11 . The air nozzle 23 is located in the middle of the air chamber 111 , so that the gas ejected from the air nozzle 23 in the air chamber 111 can be directly heated by the heating wire 21 .

[0062] More preferably, an air collecting groove 113 is provided on the inner wall of the air chamber 111 , a fan plate 1131 is slidably provided on the outer wall of the air collecting groove 113 , through holes 1132 are symmetrically opened on the side wall of the air collecting groove 113 , and a pull rod 114 is slidably penetrated by the air chamber 111 .

[0063] Furthermore, a fan plate 1131 is fixedly sleeved on the outer wall of one end of the pull rod 114 located in the air chamber 111 , and the fan plate 1131 is sealingly embedded between the air collecting groove 113 and the air chamber 111 , so that the air chamber 111 is divided into two parts by the fan plate 1131 .

[0064] The air chamber 111 is I-shaped, the air collecting groove 113 is a rectangular hollow block, there are four through holes 1132 symmetrically arranged on the side wall of the air collecting groove 113 , and there are four air outlets 1111 symmetrically arranged on the four corner outer walls of the air chamber 111 .

[0065] More preferably, when there is a negative pressure in the air outlet 1111, the gas in the gas collecting groove 113 is sucked into the air outlet 1111, blowing up the wind plate 1112 to rotate and separate from the air outlet 1111, and the air outlet 1111 is opened at this time; when there is a positive pressure in the air outlet 1111, the wind plate 1112 is pressed against the inner wall of the air outlet 1111 and sealed, and the air outlet 1111 is closed, and the gas can only flow out from the air nozzle 23.

[0066] Preferably, an arc plate 1133 is provided on the outer wall of the air collecting groove 113 , and the air nozzle 23 is opened through the highest point of the arc plate 1133 . An adjusting plate 1134 is also rotatably provided on the inner wall of the air collecting groove 113 , and the adjusting plate 1134 is slidably fitted with the arc plate 1133 .

[0067] Among them, the baffle plate 1134 slides on the arc plate 1133, and the seal between the baffle plate 1134 and the arc plate 1133 prevents the gas from flowing through, and divides the gas collecting groove 113 into two parts. The rotating axis of the baffle plate 1134 is located at the center of the arc plate 1133, thereby ensuring that the baffle plate 1134 is always sealed during the rotation around the arc plate 1133.

[0068] In summary, when in use, as the sintering table 14 continuously slides on the furnace body 11, the built-in motor drives the pull rod 114 to slide back and forth. When the pull rod 114 moves upward, it drives the fan plate 1131 to slide upward along the gas collecting groove 113. At the same time, the fan plate 1131 is sealed and slides with the gas collecting groove 113 and the air chamber 111, thereby pressing the gas on the upper side of the fan plate 1131 upward, forming a positive pressure on the upper side of the air chamber 111 and a negative pressure on the lower side, so that the upper air port 1111 is closed and the lower air port 1111 is opened. The gas on the upper side of the air chamber 111 can only flow into the gas collecting groove 113 along the through hole 1132 and push the baffle plate 1134 to rotate toward the negative pressure side. The air nozzle 23 is connected to the gas collecting groove 113 on the positive pressure side, so that the gas on the positive pressure side of the gas collecting groove 113 can flow out from the air nozzle 23 along the arc plate 1133 and be heated by the heating wire 21 to become hot air.

[0069] At the same time, after all the gases have flowed out from the nozzle 23, the pull rod 114 slides in the opposite direction, thereby switching the positive and negative pressure areas, and the baffle 1134 flips over. The air chamber 111 on the negative pressure side draws air from the ventilation slot 22 on that side. As the pull rod 114 slides back and forth and then circulates back and forth, the gases in the colder areas on the upper and lower sides of the furnace body 11 are continuously absorbed into the air chamber 111 and flow out through the gas collecting slot 113 and the nozzle 23, and are heated by the heating wire 21 to heat the middle area of ​​the multilayer ceramic substrate. At the same time, an atmosphere circulation is formed to make the gas temperature area in the sintering table 14 consistent, thereby improving product quality.

[0070] Example 3

[0071] Reference Figure 1-Figure 9 , which is the third embodiment of the present invention. This embodiment is based on the previous embodiment, but is different in that, during the production and movement of the sintering table 14, the pull rod 114 is driven to move back and forth to realize gas circulation, and at the same time, the circulating gas is filtered to remove impurities and the impurities are scraped and removed, thereby reducing the condensation and accumulation of flue gas in the sintering table 14 and the furnace body 11 when it is cold and difficult to clean, solving the problem of manual cleaning of the sintering table 14 being time-consuming and labor-intensive and easily leaving dead corners, and improving the production efficiency of multi-layer ceramic substrates.

[0072] Specifically, a slide table 221 is provided at one end of the pull rod 114 that slides and extends into the ventilation slot 22 , a slide plate 222 is slidably provided in the ventilation slot 22 , and an array of protrusions 223 is provided on the slide plate 222 .

[0073] A scraper 2231 is provided at one end of the protrusion 223 away from the slide plate 222 , a sieve plate 1113 is fixedly provided on the outer wall of the air outlet 1111 , the scraper 2231 is slidably fitted with the sieve plate 1113 , and the protrusion 223 is slidably fitted with the slide table 221 .

[0074] Furthermore, the protrusion 223 is an isosceles trapezoidal block, and the slide 221 is a right-angled trapezoidal block. The inclined surface of the slide 221 is arranged close to the direction of the feed port 12 and slides in fit with the inclined surface of the protrusion 223. The protrusion 223 can follow the pull rod 114 and completely sink into the side wall of the ventilation groove 22 and its height is lower than the screen plate 1113, so that the scraper 2231 on the protrusion 223 can fully fit with the screen plate 1113.

[0075] Among them, the slides 222 and the protrusions 223 located on the upper and lower ventilation slots 22 are arranged alternately, so that when the slide 221 on one side of the pull rod 114 slides and fits with the upper end surface of the protrusion 223, the slider 141 on the other side slides and fits with the lower end surface of the protrusion 223. With the movement of the slide 222, the slide 221 slides up and down along each protrusion 223, and the pull rod 114 is driven by the upper and lower slides 221 to slide back and forth at the same time.

[0076] Among them, a filter is provided on the inner wall of the sieve plate 1113. When the gas circulates in the sintering table 14, the generated gas must pass through the sieve plate 1113 and the air outlet 1111 and be filtered and screened out, thereby absorbing and removing toxic and harmful substances and large particles generated during the sintering process of the multi-layer ceramic substrate, and preventing various tar gases from condensing and accumulating on the upper and lower sides of the sintering table 14 and the furnace body 11 when they are cold.

[0077] Preferably, the slide plate 222 is arranged on the outer wall of each sintering table 14 and moves therewith, and the ventilation slot 22 is arranged on one side of the end surface of the feed port 12 and the discharge port 13 and is rotatably provided with a cleaning door 123, and a cleaning curtain 1231 is provided inside the cleaning door 123.

[0078] Among them, the scraper 2231 is a rubber scraper, which can scrape off the impurities filtered on the screen plate 1113, and flow out along the ventilation groove 22 toward the discharge port 13 driven by the protrusion 223. When the slide plate 222 slides into the ventilation groove 22, the protrusion 223 and the scraper 2231 pass through the cleaning door 123, and the deposited dust is cleared by the cleaning curtain 1231.

[0079] Preferably, the cleaning curtain 1231 can fit tightly with the surface of the bump 223 and the scraper 2231 and clean away the impurity particles on the surface. At the discharge port 13, the bump 223 and the scraper 2231 are cleaned again by the cleaning curtain 1231, and the impurity particles scraped out by the scraper 2231 are cleaned and collected, thereby extending the cleaning cycle of the furnace body 11 and improving work efficiency.

[0080] In summary, when in use, as the sintering table 14 moves in the furnace body 11, the slide plate 222 located on the sintering table 14 slides along the ventilation slot 22, and at the same time the slide 221 slides along the surface of the protrusion 223 on the slide 221. During this process, the slide 221 moves back and forth in the vertical direction, so that the two slides 221 drive the pull rod 114 to move up and down in a circular motion, thereby realizing gas circulation in the sintering table 14.

[0081] At the same time, when the gas circulates, it must pass through the sieve plate 1113 and the air outlet 1111. At this time, the particulate dust generated during the sintering process and the toxic substances generated by the combustion of organic matter can be filtered and adsorbed. As the slide plate 222 slides, the scraper 2231 located on the protrusion 223 slides through the sieve plate 1113, and scrapes off the impurity particles accumulated on its surface and brings them out along the ventilation groove 22 through the protrusion 223, thereby achieving simultaneous removal of internal impurities during the sintering process, reducing the workload of manual impurity removal and extending the cleaning cycle. At the same time, the dust and impurities accumulated on the protrusion 223 are removed through the cleaning curtain 1231, which will not affect the next use and improve production efficiency.

[0082] Importantly, it should be noted that the construction and arrangement of the present application shown in a number of different exemplary embodiments are only exemplary. Although only a few embodiments are described in detail in this disclosure, it should be readily understood by those who refer to this disclosure that many modifications are possible (e.g., the size, scale, structure, shape and proportion of various elements, and parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, changes in orientation, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in the application. For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of the element may be inverted or otherwise changed, and the nature or number or position of the discrete element may be altered or changed. Therefore, all such modifications are intended to be included within the scope of the present invention. The order or sequence of any process or method steps may be changed or reordered according to an alternative embodiment. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and is not only structurally equivalent but also equivalent structure. Other substitutions, modifications, changes and omissions may be made in the design, operating conditions and arrangement of the exemplary embodiments without departing from the scope of the present invention. Therefore, the invention is not limited to a specific embodiment, but extends to numerous modifications still falling within the scope of the appended claims.

[0083] Additionally, in order to provide a concise description of exemplary embodiments, all features of an actual embodiment may not be described (ie, those features that are not relevant to the best mode presently contemplated for carrying out the invention or those features that are not relevant to implementing the invention).

[0084] It will be appreciated that in the development of any actual implementation, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will be a routine task of design, fabrication, and production for those of ordinary skill having the benefit of this disclosure without undue experimentation.

[0085] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. A multilayer ceramic substrate sintering device having a plurality of sintering box furnaces, characterized in that: include: A push plate furnace (10) comprises a furnace body (11), a material inlet (12) and a material outlet (13) respectively arranged at two ends of the furnace body (11), a sintering table (14) slidably arranged on the inner wall of the furnace body (11), and a loading table (15) rotatably arranged inside the sintering table (14), wherein a multi-layer ceramic substrate is detachably provided on the upper end surface of the loading table (15), the sintering table (14) is pushed by a hydraulic cylinder to slide on the inner wall of the furnace body (11), and the furnace body (11) is composed of at least two sintering box furnaces combined and configured; The heating mechanism (20) comprises heating wires (21) provided on the inner walls of both sides of the furnace body (11), and ventilation slots (22) and air nozzles (23) provided on the inner walls of the furnace body (11), wherein the ventilation slots (22) are symmetrically provided on both sides of the heating wires (21), and the air nozzles (23) are provided between the heating wires (21) to heat the gas ejected from the air nozzles (23); The turning mechanism (30) comprises a rotating shaft (31) that rotates and passes through the inner wall of the sintering table (14), and when the rotating shaft (31) rotates, the loading table (15) is driven to rotate inside the sintering table (14); The bottom inner wall of the furnace body (11) is also provided with a groove (112), and a rack (1121) is fixedly provided on the bottom surface of the groove (112); one end of the rotating shaft (31) rotates and passes through the outside of the sintering table (14), extends into the groove (112) and is provided with a gear (311), and the gear (311) is meshed with the rack (1121); The outer wall of the rotating shaft (31) is rotatably sleeved with a bracket (312); the upper end surface of the rotating shaft (31) is provided with a rotating disk (313); a support (3131) is slidably provided on the rotating disk (313); and the upper end surface of the support (3131) is rotatably provided with a sliding sleeve (3132); A swing arm (151) is provided on the lower end surface of the loading platform (15); a fixed shaft (3121) is rotatably provided on the upper end of the bracket (312); the swing arm (151) is sleeved on the outer wall of the fixed shaft (3121); a movable shaft (3122) is provided on the lower side of the inner wall of the swing arm (151); and the sliding sleeve (3132) is slidably sleeved on the outer wall of the movable shaft (3122); An air chamber (111) is also formed on the inner wall of the furnace body (11), and an air port (1111) is formed on the outer wall of the air chamber (111). An end surface of the air port (1111) located in the air chamber (111) is rotatably provided with an air plate (1112), and the air plate (1112) is movably fitted to the inner wall of the air chamber (111); An air collecting groove (113) is provided on the inner wall of the air chamber (111), a fan plate (1131) is slidably provided on the outer wall of the air collecting groove (113), through holes (1132) are symmetrically opened on the side wall of the air collecting groove (113), and a pull rod (114) is slidably penetrated through the air chamber (111); The outer wall of the air collecting groove (113) is provided with an arc-shaped plate (1133), the air nozzle (23) is opened through the highest point of the arc-shaped plate (1133), and the inner wall of the air collecting groove (113) is also rotatably provided with an adjusting plate (1134), and the adjusting plate (1134) is slidably fitted with the arc-shaped plate (1133).

2. The multilayer ceramic substrate sintering device having a plurality of sintering box furnaces according to claim 1, characterized in that: A guide rail (115) is provided on the inner wall of the bottom surface of the furnace body (11), and a slider (141) is provided on the lower bottom surface of the sintering table (14). The slider (141) is slidably arranged on the outer wall of the guide rail (115), and the direction of the guide rail (115) is parallel to the direction of the furnace body (11).

3. The multilayer ceramic substrate sintering device having a plurality of sintering box furnaces according to claim 2, characterized in that: A sliding platform (221) is provided at one end of the pull rod (114) that slides and extends into the ventilation slot (22), a sliding plate (222) is slidably provided in the ventilation slot (22), and an array of bumps (223) is provided on the sliding plate (222).

4. The multilayer ceramic substrate sintering device having a plurality of sintering box furnaces according to claim 3, characterized in that: A scraper (2231) is provided at one end of the protrusion (223) away from the slide plate (222); a sieve plate (1113) is fixedly provided on the outer wall of the air outlet (1111); the scraper (2231) is slidably fitted with the sieve plate (1113); and the protrusion (223) is slidably fitted with the slide table (221).

5. The multilayer ceramic substrate sintering device having a plurality of sintering box furnaces according to claim 4, characterized in that: The slide plate (222) is arranged on the outer wall of each sintering table (14) and moves therewith. The ventilation slot (22) is arranged on one side of the end surface of the feed port (12) and the discharge port (13) and is rotatably provided with a cleaning door (123). A cleaning curtain (1231) is provided inside the cleaning door (123).

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