A multi-specification compatible evaporation machine crucible airtightness leak detection mechanism

Abstract

The present invention discloses a multi-specification compatible evaporator crucible airtightness leak detection mechanism, including a leak detection device; further comprising: the rear and left and right sides of the leak detection cavity inside the leak detection device are connected to the outer end of the leak detection connecting pipe at an equidistant distance; wherein a positioning mechanism is provided in the leak detection cavity inside the leak detection device, and the positioning mechanism includes a positioning platform; wherein a lifting mechanism is provided in the leak detection cavity inside the leak detection device, and the lifting mechanism includes a lifting bottom plate, and the lifting bottom plate is fixedly installed at the center position of the inner bottom surface of the leak detection device. The multi-specification compatible evaporator crucible airtightness leak detection mechanism adapts to evaporators and crucibles of different specifications and models through the leak detection connecting pipe inside the leak detection device, and after the evaporator is driven to descend to the lower part of the leak detection cavity by the lifting mechanism, the evaporator is limited and fixed by the positioning mechanism, so as to improve the convenience and efficiency of the evaporator airtightness detection.

Description

Technical Field

[0001] The invention relates to the technical field of crucible air tightness leak detection, in particular to an evaporation machine crucible air tightness leak detection mechanism which is adaptable to multiple specifications. Background Art

[0002] Crucible refers to a kind of vessel used in chemical experiments to heat the objects carried inside at high temperatures. The main function of the crucible used in the evaporation machine is to protect the material being evaporated and keep it in an inert environment, thereby achieving the purpose of reducing oxidation reactions. During the evaporation operation, it needs to be in a vacuum state, which means that the crucible evaporation machine used needs to be tested for its airtightness during production and assembly;

[0003] The evaporation crucible disclosed in publication number CN111676453A includes a crucible body and a cover plate. The connecting ears of the cover plate and the crucible body are provided with a magnetic structure, and the magnetic attraction between the cover plate and the connecting ears is utilized to increase the air tightness between the cover plate and the connecting ears, prevent the formation of a gap between the connecting ears and the cover plate, reduce steam leakage, and improve the display effect.

[0004] The multiple gas leakage detection tube of the vapor deposition machine disclosed in publication number CN213364163U adopts multiple connecting tubes to be connected with multiple detection chambers in a one-to-one correspondence, thereby avoiding frequent installation and removal of the connecting tubes during the detection process, facilitating the use of the multiple gas leakage detection tubes, and improving the detection efficiency of the air tightness detection. Since the connecting tubes and the detection chambers are sealed, and the body and the gas detector are sealed, the connection sealing of the multiple gas leakage detection tubes and the detection chambers and the gas detectors is ensured, thereby improving the accuracy of the air tightness detection.

[0005] However, in actual use of the above-disclosed evaporator crucible airtightness detection mechanism, the specifications of the evaporator and the crucible vary greatly in different usage scenarios and requirements, and the required vacuum pipelines are also different. Therefore, it is difficult to meet the detection requirements through a single detection mechanism. At the same time, the existing detection mechanism is cumbersome to use and requires users to frequently assist in operation, which affects the convenience and efficiency of airtightness detection.

[0006] Therefore, we propose a multi-specification compatible evaporation machine crucible airtightness leak detection mechanism to solve the above-mentioned problems. Summary of the invention

[0007] The purpose of the present invention is to provide an airtightness leak detection mechanism for an evaporation machine crucible that is adaptable to multiple specifications, in order to solve the problem that the specifications of existing evaporation machines and crucibles are quite different in different usage scenarios and requirements, and the vacuum pipelines required to be used are also different. Therefore, it is difficult to achieve the detection requirements through a single detection mechanism. At the same time, the existing detection mechanism is cumbersome to use and requires users to frequently assist in operation, which affects the convenience and efficiency of airtightness detection.

[0008] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a multi-specification compatible evaporation machine crucible airtightness leak detection mechanism, comprising a leak detection device, and a leak detection cavity opened inside the leak detection device, and the rear of the top surface of the leak detection device is hingedly connected to the bottom end of the sealing cover plate;

[0009] It also includes: the rear and left and right sides of the leak detection cavity inside the leak detection device are connected to the outer ends of the leak detection connecting pipes at equal distances, and the leak detection connecting pipes arranged at equal distances are used to adapt to the connection of crucibles of evaporation machines of different specifications;

[0010] Wherein, a positioning mechanism is arranged in the leak detection cavity inside the leak detection device, and the positioning mechanism includes a positioning platform, and a positioning bracket is fixedly installed at the inner center of the positioning platform;

[0011] Wherein, a lifting mechanism is arranged in the leak detection cavity inside the leak detection device, and the lifting mechanism includes a lifting bottom plate, and the lifting bottom plate is fixedly installed at the center position of the inner bottom surface of the leak detection device.

[0012] Preferably, the upper left and right sides of the exterior of the leak detection device are fixedly connected to the bottom end of the hydraulic telescopic rod, and the top ends of the left and right hydraulic telescopic rods are hingedly connected to the left and right ends of the sealing cover plate, and the opening and closing of the leak detection device is achieved by flipping the sealing cover plate, and the rear of the leak detection device is used to connect a vacuum machine to achieve leak detection.

[0013] Preferably, the positioning mechanism includes a guide slide rod, and the guide slide rod is fixedly installed at equal angles inside the positioning platform, and the inner ends of the guide slide rods arranged at equal angles are fixedly connected to the outside of the positioning bracket, and a transmission shaft is rotatably arranged inside the positioning bracket through a bearing, and at the same time, the outer wall of the transmission shaft on the bottom surface of the positioning bracket is wound and connected to the upper end of the traction cable.

[0014] Preferably, the positioning mechanism includes a positioning slide, and the positioning slide is slidably set on the outer wall of the guide slide rod through a return spring, and the top surface of the positioning slide set at an equal angle is elastically slid with a positioning slide plate, and the positioning slide plate elastically connected to the positioning slide and its top surface is used to position crucibles of different specifications.

[0015] Preferably, the positioning mechanism includes a positioning bracket whose top surface transmission shaft has an outer wall which is wound around the inner end of a guide cable, and the outer end of the guide cable is fixedly connected to the inner end of a positioning slide seat which is arranged at an equal angle, and after the guide cable is wound up by the transmission shaft, the connected positioning slide seat is driven to move inward.

[0016] Preferably, the inner center position of the lifting base plate included in the lifting mechanism is rotatably connected to the outer end of the winding shaft through a torsion spring, and the outer wall of the winding shaft is wound and connected to the bottom end of the traction steel cable included in the positioning mechanism, and two-way threaded rods are rotatably provided on the left and right sides of the bottom surface of the lifting base plate through bearings, and the front and rear outer walls of the left and right two-way threaded rods are threadedly connected to the bottom end of the hinged flip rod.

[0017] Preferably, the lifting mechanism includes an elastic telescopic rod, and the elastic telescopic rod is hingedly connected to the left and right sides of the inner side of the lifting base plate in a front-to-back symmetrical manner, and the top end of the symmetrically arranged elastic telescopic rod and the top end of the hinged flip rod are both hingedly arranged on the bottom surface of the lifting base plate, and the symmetrically arranged elastic telescopic rod and the hinged flip rod are staggered in opposite directions.

[0018] Preferably, the lifting mechanism includes a driving shaft, and the driving shaft is rotatably arranged on the left and right sides of the rear interior of the leak detection device through bearings, and the bottom ends of the left and right driving shafts are meshedly connected to the rear ends of the symmetrically arranged bidirectional threaded rods through bevel gear groups, and spiral guide grooves are provided on the outer walls of the left and right driving shafts.

[0019] Preferably, the lifting mechanism includes a spiral sleeve, and the spiral sleeve is arranged on the left and right sides of the rear inside the leak detection device through a resistance spring sliding engagement, and the spiral sleeve is connected to the spiral guide groove opened on the outer wall of the driving shaft, and the top ends of the spiral sleeves on the left and right sides are fitted on the bottom surface of the sealing cover plate.

[0020] Compared with the prior art, the beneficial effects of the present invention are as follows: the multi-specification compatible evaporator crucible airtightness leak detection mechanism is adapted to evaporators and crucibles of different specifications and models through the leak detection connecting pipe inside the leak detection device, and after the evaporator is driven to descend to the bottom of the leak detection chamber through the lifting mechanism, the evaporator is limited and fixed through the positioning mechanism, so as to improve the convenience and efficiency of the evaporator airtightness detection. The specific contents are as follows:

[0021] 1. The sealing cover plate is turned upward, and the lifting mechanism of the leak detection cavity inside the leak detection device works after the sealing cover plate is turned over, so that the lifting mechanism drives the positioning mechanism to drive the positioning platform to move upward, so that the positioning platform is at the top of the leak detection cavity, so as to carry the evaporator and the crucible;

[0022] Connect the leak detection connecting pipe that is set inside the leak detection chamber and is compatible with the evaporation machine and the crucible, so as to adapt to different specifications and models, and connect the vacuum machine with the leak detection device to ensure the accuracy in the subsequent vacuum leak detection process;

[0023] 2. When the sealing cover plate is turned downward, the spiral sleeves slidingly engaged on the left and right sides below are pressed and slide downward between the resisting springs, so that the driving shaft connected to the spiral sleeve through the spiral guide groove rotates, so that the driving shaft drives the meshing bidirectional threaded rod to rotate synchronously through the bevel gear set at the bottom;

[0024] Furthermore, the bidirectional threaded rod drives the hinged flip rod to flip outward synchronously, so that the hinged flip rod drives the top hinged positioning platform to slide downward, and at the same time, the elastic telescopic rod symmetrically hinged on the bottom surface of the positioning platform is flipped and contracted synchronously, and then supported on the bottom surface of the positioning platform to prevent the positioning platform from tilting and colliding with the vapor deposition machine and the crucible on its top surface;

[0025] 3. The positioning platform drives the internal positioning bracket and the transmission shaft to shorten the distance between the lifting base plate, and the winding shaft connected to the lifting base plate through the torsion spring rotates to wind up the traction cable. At the same time, after the traction cable is wound up, it drives the transmission shaft wound on its upper end to rotate, and then the transmission shaft winds up the guide cable fixedly connected to the outer wall above it;

[0026] Furthermore, the guide steel cable drives the positioning slide fixedly connected to its outer end to slide, and the positioning slide plate above the positioning slide first contacts the base of the vapor deposition machine, so that vapor deposition machines of different specifications can be synchronously adapted through the positioning slide and the elastically connected positioning slide, so as to achieve clamping positioning to ensure the stability of the vapor deposition machine, so as to improve the convenience and efficiency of air tightness detection of the vapor deposition machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the present invention;

[0028] Figure 2 This is a schematic diagram of the installation structure of the positioning platform of the present invention;

[0029] Figure 3 It is a schematic diagram of the structure after the sealing cover plate and the leakage detection device of the present invention are closed;

[0030] Figure 4 This is a schematic diagram of the three-dimensional structure of the lifting base plate of the present invention;

[0031] Figure 5 This is a schematic diagram of the installation structure of the winding shaft of the present invention;

[0032] Figure 6 This is a schematic diagram of the drive shaft installation structure of the present invention;

[0033] Figure 7 For the present invention Figure 6 The enlarged structural diagram at A in the middle;

[0034] Figure 8 This is a schematic diagram of the three-dimensional structure of the positioning platform of the present invention;

[0035] Fig. 9 This is a schematic diagram of the installation structure of the positioning bracket of the present invention;

[0036] Fig.10 For the present invention Fig. 9 Enlarged structural diagram at B in the middle.

[0037] In the figure: 1. leak detection device; 2. leak detection chamber; 3. sealing cover plate; 4. leak detection connecting pipe; 5. positioning platform; 6. positioning bracket; 7. lifting bottom plate; 8. hydraulic telescopic rod; 9. guide slide bar; 10. transmission shaft; 11. traction cable; 12. positioning slide seat; 13. reset spring; 14. positioning slide plate; 15. guide cable; 16. winding shaft; 17. two-way threaded rod; 18. hinged flip rod; 19. elastic telescopic rod; 20. driving shaft; 21. spiral guide groove; 22. spiral sleeve; 23. resistance spring; 24. bevel gear group. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the implementation regulations described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] See also Figure 1-Figure 10 , the present invention provides the following technical solutions:

[0040] Embodiment 1: In order to solve the problems existing in the use of the existing leak detection device 1, the present embodiment adopts the following technical scheme: a multi-specification compatible evaporation machine crucible airtightness leak detection mechanism, comprising a leak detection device 1, and a leak detection cavity 2 opened inside the leak detection device 1, and the rear of the top surface of the leak detection device 1 is hingedly connected to the bottom end of the sealing cover plate 3; the rear and left and right sides of the leak detection cavity 2 inside the leak detection device 1 are equidistantly connected to the outer end of the leak detection connecting pipe 4, and the leak detection connecting pipes 4 arranged at equal distances are used to adapt to the connection of evaporation machine crucibles of different specifications; the left and right sides of the upper outside of the leak detection device 1 are fixedly connected to the bottom end of the hydraulic telescopic rod 8, and the top ends of the hydraulic telescopic rods 8 on the left and right sides are hingedly connected to the left and right ends of the sealing cover plate 3, and the opening and closing of the leak detection device 1 are realized by flipping the sealing cover plate 3, and the rear of the leak detection device 1 is used to connect a vacuum machine to realize leak detection;

[0041] like Figure 1-Figure 2 As shown, when it is necessary to perform airtightness test on the vapor deposition machine and the crucible, firstly, the sealing cover plate 3 provided on the top surface of the leak detection device 1 is manually grasped and flipped upward, so that the sealing cover plate 3 hinged to the leak detection device 1 is driven and supported by the hydraulic telescopic rods 8 hinged on the left and right sides during the flipping process, and at the same time, the lifting mechanism of the leak detection cavity 2 inside the leak detection device 1 works after the sealing cover plate 3 is flipped, so that the lifting mechanism drives the positioning mechanism to drive the positioning platform 5 to move upward, so that the positioning platform 5 is at the top of the leak detection cavity 2, so as to support the vapor deposition machine and the crucible;

[0042] Furthermore, the evaporator and the crucible are placed above the positioning platform 5 inside the leak detection chamber 2, and then the leak detection connecting pipe 4 arranged inside the leak detection chamber 2 and adapted to the evaporator and the crucible is connected so as to adapt to different specifications and models. At the same time, the vacuum machine is connected to the leak detection device 1 to ensure accuracy in the subsequent vacuum leak detection process.

[0043] Embodiment 2: In order to solve the problems existing in the use of the existing leak detection device 1, the present embodiment adopts the following technical scheme, wherein a lifting mechanism is provided in the leak detection cavity 2 inside the leak detection device 1, and the lifting mechanism includes a lifting bottom plate 7, and the lifting bottom plate 7 is fixedly installed at the center position of the inner bottom surface of the leak detection device 1; the inner center position of the lifting bottom plate 7 included in the lifting mechanism is rotatably connected to the outer end of the winding shaft 16 through a torsion spring, and the outer wall of the winding shaft 16 is wound and connected to the bottom end of the traction cable 11 included in the positioning mechanism, and the left and right sides of the bottom surface of the lifting bottom plate 7 are rotatably provided with a bidirectional threaded rod 17 through a bearing, and the front and rear outer walls of the bidirectional threaded rods 17 on the left and right sides are threadedly connected to the bottom end of the hinged flip rod 18;

[0044] The lifting mechanism includes an elastic telescopic rod 19, and the elastic telescopic rod 19 is hingedly connected to the left and right sides of the lifting bottom plate 7 in a front-to-back symmetrical manner, and the top of the symmetrically arranged elastic telescopic rod 19 and the top of the hinged flip rod 18 are both hingedly arranged on the bottom surface of the lifting bottom plate 7, and the symmetrically arranged elastic telescopic rod 19 and the hinged flip rod 18 are staggeredly distributed in opposite directions;

[0045] The lifting mechanism includes a driving shaft 20, and the driving shaft 20 is rotatably arranged on the left and right sides of the rear of the leak detection device 1 through a bearing, and the bottom ends of the driving shafts 20 on the left and right sides are meshed and connected to the rear ends of the symmetrically arranged two-way threaded rods 17 through a bevel gear set 24, and the outer walls of the driving shafts 20 on the left and right sides are provided with spiral guide grooves 21; the lifting mechanism includes a spiral sleeve 22, and the spiral sleeve 22 is slidably engaged and arranged on the left and right sides of the rear of the leak detection device 1 through a resisting spring 23, and the spiral sleeve 22 is connected to the spiral guide grooves 21 provided on the outer wall of the driving shaft 20, and the top ends of the spiral sleeves 22 on the left and right sides are arranged to fit the bottom surface of the sealing cover plate 3;

[0046] like Figure 4 , Figure 6-Figure 7 As shown, when it is necessary to perform vacuum detection on the evaporator and the crucible, the opened sealing cover plate 3 is manually flipped downward and closed between the leak detection device 1. During the downward flipping process of the sealing cover plate 3, it contacts the spiral sleeves 22 that are slidably engaged on the left and right sides below and squeezes the springs 23 to slide downward, while the spiral sleeves 22 in the sliding engagement cannot rotate, so that the driving shaft 20 connected to the spiral sleeve 22 through the spiral guide groove 21 rotates, so that the driving shaft 20 drives the meshing bidirectional threaded rod 17 to rotate synchronously through the bevel gear group 24 at the bottom, and the bidirectional threaded rod 17 drives the articulated flip rods 18 threadedly connected on the front and rear sides to flip outward synchronously, so that the articulated flip rod 18 drives the top hinged positioning platform 5 to slide downward, and at the same time, the elastic telescopic rods 19 symmetrically hinged on the bottom surface of the positioning platform 5 are flipped and contracted synchronously, and then supported on the bottom surface of the positioning platform 5 to prevent the positioning platform 5 from tilting and colliding with the evaporator and crucible on its top surface.

[0047] Embodiment 3: In order to solve the problems existing in the use of the existing leak detection device 1, the present embodiment adopts the following technical scheme, wherein a positioning mechanism is provided in the leak detection cavity 2 inside the leak detection device 1, and the positioning mechanism includes a positioning platform 5, and a positioning bracket 6 is fixedly installed at the inner center of the positioning platform 5; the positioning mechanism includes a guide slide bar 9, and the guide slide bar 9 is fixedly installed at equal angles inside the positioning platform 5, and the inner ends of the guide slide bars 9 arranged at equal angles are fixedly connected to the outside of the positioning bracket 6, and a transmission shaft 10 is rotatably provided inside the positioning bracket 6 through a bearing, and at the same time, the outer wall of the transmission shaft 10 on the bottom surface of the positioning bracket 6 is wound and connected to the upper end of the traction cable 11;

[0048] The positioning mechanism includes a positioning slide 12, and the positioning slide 12 is slidably arranged on the outer wall of the guide slide rod 9 through a return spring 13, and a positioning slide plate 14 is elastically slidably arranged on the top surface of the positioning slide 12 arranged at an equal angle, and the positioning slide plate 14 elastically connected to the positioning slide 12 and its top surface is used to position crucibles of different specifications; the outer wall of the transmission shaft 10 on the top surface of the positioning bracket 6 included in the positioning mechanism is wound and connected to the inner end of the guide steel cable 15, and the outer end of the guide steel cable 15 is fixedly connected to the inner end of the positioning slide 12 arranged at an equal angle, and after the guide steel cable 15 is rolled up through the transmission shaft 10, the connected positioning slide 12 is driven to move inward;

[0049] like Figure 4-Figure 5 As shown, in the process of the lifting mechanism driving the positioning platform 5 to move downward, the positioning platform 5 drives the internal positioning bracket 6 and the transmission shaft 10 to shorten the distance between the lifting base plate 7, so that the traction cable 11 on the outer wall below the traction transmission shaft 10 is in a relaxed state, and then the winding shaft 16 connected by the torsion spring inside the lifting base plate 7 rotates to wind up the traction cable 11. At the same time, after the traction cable 11 is wound up, it drives the transmission shaft 10 wound on its upper end to rotate, and then the transmission shaft 10 winds up the guide cable 15 fixedly connected to the outer wall above it, so that the guide cable 15 The positioning slide 12 fixedly connected to its outer end is driven to slide toward the middle of the positioning platform 5 along the direction of the guide slide bar 9. At this time, the positioning slide plate 14 elastically arranged above the positioning slide 12 first contacts the base of the vapor deposition machine, so that vapor deposition machines of different specifications can be synchronously adapted through the positioning slide 12 and the elastically connected positioning slide plate 14 to achieve clamping positioning to ensure the stability of the vapor deposition machine. Finally, after the lifting mechanism drives the vapor deposition machine to descend to the bottom of the leak detection chamber 2, the positioning mechanism is used to limit and fix the vapor deposition machine, so as to improve the convenience and efficiency of the air tightness detection of the vapor deposition machine.

[0050] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A multi-specification compatible evaporation machine crucible airtightness leak detection mechanism, comprising a leak detection device (1), and a leak detection cavity (2) disposed inside the leak detection device (1), wherein the rear of the top surface of the leak detection device (1) is hingedly connected to the bottom end of a sealing cover plate (3); It is characterized in that Also includes: The rear and left and right sides of the leak detection cavity (2) inside the leak detection device (1) are connected to the outer ends of the leak detection connecting pipes (4) at equal distances, and the leak detection connecting pipes (4) arranged at equal distances are used to adapt to the connection of crucibles of evaporation machines of different specifications; Wherein, a positioning mechanism is provided in the leak detection cavity (2) inside the leak detection device (1), and the positioning mechanism includes a positioning platform (5), and a positioning bracket (6) is fixedly installed at the inner center of the positioning platform (5); A lifting mechanism is provided in the leak detection cavity (2) inside the leak detection device (1), and the lifting mechanism includes a lifting bottom plate (7), and the lifting bottom plate (7) is fixedly installed at the center position of the inner bottom surface of the leak detection device (1); The positioning mechanism comprises a guide slide bar (9), and the guide slide bar (9) is fixedly installed at an equal angle inside the positioning platform (5), and the inner ends of the guide slide bars (9) arranged at an equal angle are fixedly connected to the outside of the positioning bracket (6), and a transmission shaft (10) is rotatably arranged inside the positioning bracket (6) through a bearing, and at the same time, the outer wall of the transmission shaft (10) on the bottom surface of the positioning bracket (6) is wound and connected to the upper end of the traction cable (11); The positioning mechanism comprises a positioning slide (12), and the positioning slide (12) is slidably arranged on the outer wall of the guide slide rod (9) via a return spring (13), and a positioning slide plate (14) is elastically slidably arranged on the top surface of the positioning slide (12) arranged at an equal angle, and the positioning slide plate (14) elastically connected to the positioning slide (12) and the top surface thereof is used to position crucibles of different specifications; The positioning mechanism comprises a positioning bracket (6) whose top surface transmission shaft (10) has an outer wall which is wound around the inner end of a guide steel cable (15), and the outer end of the guide steel cable (15) is fixedly connected to the inner end of a positioning slide (12) arranged at an equal angle, and after the guide steel cable (15) is wound up by the transmission shaft (10), the connected positioning slide (12) is driven to move inward.

2. The multi-specification compatible evaporation machine crucible airtightness leak detection mechanism according to claim 1, characterized in that: The upper left and right sides of the exterior of the leak detection device (1) are fixedly connected to the bottom end of the hydraulic telescopic rod (8), and the top ends of the hydraulic telescopic rods (8) on the left and right sides are hingedly connected to the left and right ends of the sealing cover plate (3), and the leak detection device (1) is opened and closed by flipping the sealing cover plate (3), and the rear of the leak detection device (1) is used to connect a vacuum machine to realize leak detection.

3. The multi-specification compatible evaporation machine crucible airtightness leak detection mechanism according to claim 1, characterized in that: The lifting mechanism includes a lifting base plate (7) whose inner center is rotatably connected to the outer end of a winding shaft (16) via a torsion spring, and an outer wall of the winding shaft (16) is wound around and connected to the bottom end of a traction steel cable (11) included in the positioning mechanism, and two-way threaded rods (17) are rotatably provided on both left and right sides of the bottom surface of the lifting base plate (7) via bearings, and the front and rear outer walls of the two-way threaded rods (17) on both left and right sides are threadedly connected to the bottom end of a hinged flip rod (18).

4. The multi-specification compatible evaporation machine crucible airtightness leak detection mechanism according to claim 3, characterized in that: The lifting mechanism comprises an elastic telescopic rod (19), and the elastic telescopic rod (19) is hingedly connected to the left and right sides of the lifting base plate (7) in a front-to-back symmetrical manner, and the top end of the symmetrically arranged elastic telescopic rod (19) and the top end of the hinged flip rod (18) are both hingedly arranged on the bottom surface of the lifting base plate (7), and the symmetrically arranged elastic telescopic rod (19) and the hinged flip rod (18) are staggeredly distributed in opposite directions.

5. The multi-specification compatible evaporation machine crucible airtightness leak detection mechanism according to claim 4, characterized in that: The lifting mechanism comprises a driving shaft (20), and the driving shaft (20) is rotatably arranged on the left and right sides of the rear of the leak detection device (1) through a bearing, and the bottom ends of the driving shafts (20) on the left and right sides are meshed and connected to the rear ends of symmetrically arranged bidirectional threaded rods (17) through a bevel gear set (24), and the outer walls of the driving shafts (20) on the left and right sides are provided with spiral guide grooves (21).

6. The multi-specification compatible evaporation machine crucible airtightness leak detection mechanism according to claim 5, characterized in that: The lifting mechanism comprises a spiral sleeve (22), and the spiral sleeve (22) is slidably engaged with a spring (23) and arranged on the left and right sides of the rear of the leak detection device (1), and the spiral sleeve (22) is connected to a spiral guide groove (21) provided on the outer wall of the driving shaft (20), and the top ends of the spiral sleeves (22) on the left and right sides are arranged to fit the bottom surface of the sealing cover plate (3).

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