A mirror adjustment device and a method of assembling the same

Abstract

The present application relates to a kind of mirror adjusting device, it includes horizontal mirror, mirror is supported installation on horizontal mirror pedestal by second cushion block, fixed device fixes second cushion block to stabilize mirror, clamping device is installed around horizontal mirror pedestal, mirror is clamped on optical path by clamping device, the clamping device includes first clamping device and second clamping device, wherein, the first top bead and second top bead of first clamping device are oppositely arranged and cooperate with mirror, the third top bead and fourth top bead of second clamping device are oppositely arranged and cooperate with mirror.The present application is fixed by top bead to mirror clamping to realize the fixing of mirror surface, the control of the movement direction of clamping point is realized by flexible hinge, the fine adjustment of the action on clamping point is realized by micrometer and lever arm, and large-scale range can be corrected mirror deformation.

Description

TECHNICAL FIELD

[0001] The present application relates to the clamping and face correction of a plane mirror, and more particularly to a mirror adjusting device and an assembling method thereof. BACKGROUND

[0002] In the light path processing of X-rays of the synchrotron radiation, mirrors are often used, which change the direction of X-rays, correct the shape of X-rays, or affect the phase of X-rays. Mirrors vary in shape according to different functions and requirements. Among them, a kind of mirror adopts an ultra-thin thickness to realize various processing of X-rays.

[0003] Because of the thin thickness, these mirrors often deform under the action of gravity and installation stress, affecting the imaging quality of the mirror.

[0004] Before online installation, the mirror of the synchrotron radiation often needs to be tested offline. Due to the thickness, the thin plane mirror often appears offline testing, and the face shape is corrected to perfect condition. However, during the online installation process, some unknown factors will have a great influence, so that the effect of offline correction is completely lost.

[0005] The thin mirror of the synchrotron radiation is very valuable, but the thickness is very thin, and it is easy to be damaged during transportation and handling due to factors such as vibration. SUMMARY

[0006] In order to solve the problems such as deformation of the thin plane mirror in the prior art, the present application provides a mirror adjusting device and an assembling method thereof.

[0007] The mirror adjusting device according to the present application comprises a horizontal mirror, the horizontal mirror comprises a mirror, a second cushion block, a clamping device, a fixing device and a horizontal mirror base, the mirror is supported and installed on the horizontal mirror base through the second cushion block, the fixing device fixes the second cushion block to stabilize the mirror, the clamping device is installed around the horizontal mirror base, the mirror is clamped on the light path through the clamping device, the clamping device comprises a first clamping device and a second clamping device, wherein the first clamping device comprises a first top bead lever, a second top bead lever, a third top bead lever, a first support, a second support, a first clamping base and a first micrometer, the first support and the second support are fixedly installed on the first clamping base at intervals, the first top bead lever is rotatably installed between the first support and the second support through a first flexible hinge, the second top bead lever is rotatably installed on the first support through a second flexible hinge, the third top bead lever is rotatably installed on the second support through a third flexible hinge, the first micrometer is installed on the first clamping base and is flexibly connected with the first, second and third top bead levers respectively, the first top bead lever comprises a first top bead installed on a first lever arm, the second and third top bead levers respectively comprise a second top bead installed on a second lever arm, the first top bead and the second top bead are oppositely arranged and cooperated with the mirror, wherein the second clamping device comprises a clamping block assembly, a third support, a second clamping base and a second micrometer, the clamping block assembly comprises a first clamping block, a second clamping block and a clamping block screw, the first clamping block is installed on the second clamping block through a fourth flexible hinge, the clamping block screw is installed on the first clamping block and penetrates through the first clamping block to abut on the second clamping block to adjust the opening angle of the first clamping block and the second clamping block, the clamping block assembly is rotatably installed on the third support through a fifth flexible hinge, the third support is fixedly installed on the second clamping base, the second micrometer is installed on the second clamping base and is flexibly connected with the clamping block assembly, the first clamping block comprises a third top bead, the second clamping block comprises a fourth top bead installed on a third lever arm, the third top bead and the fourth top bead are oppositely arranged and cooperated with the mirror.

[0008] Preferably, the first clamping device further comprises a first limiting locking device, a first lock ring and a second lock ring, the first limiting locking device connects the first top bead lever and the first clamping base to lock the first top bead lever on the first clamping base, the first lock ring connects the second top bead lever and the first clamping base to lock the second top bead lever on the first clamping base, and the second lock ring connects the third top bead lever and the first clamping base to lock the third top bead lever on the first clamping base.

[0009] Preferably, the second clamping device further comprises a third lock ring and a fourth lock ring, the third lock ring connects the first clamping block and the second clamping block to lock the opening angle of the first clamping block and the second clamping block, and the fourth lock ring connects the second clamping block and the second clamping base to lock the second clamping block on the second clamping base.

[0010] Preferably, the horizontal mirror is controlled by a first adjusting mechanism, which comprises a first adapter plate, a rotation motor, a first roll motor and a first translation motor, wherein the first adapter plate is connected with the horizontal mirror, the rotation motor is connected with the first adapter plate to provide the horizontal mirror with a degree of freedom of rotation in a horizontal plane, the first roll motor is connected with the rotation motor to provide the horizontal mirror with a degree of freedom of roll in a plane perpendicular to the optical path, and the first translation motor is connected with the first roll motor to provide the horizontal mirror with a degree of freedom of translation in the horizontal plane perpendicular to the optical path.

[0011] Preferably, the center of the reflecting surface of the horizontal mirror is located on the rotation axis of the rotation motor and also on the rotation center of the first roll motor.

[0012] Preferably, the fixing device is mounted on the horizontal mirror base.

[0013] The assembling method of the above-mentioned mirror adjusting device according to the present application comprises the following steps: S1, assembling the first and second clamping devices respectively, for the first clamping device, when assembling the first, second and third flexible hinges, the opening between the first and second top beads is as large as possible, then the first and second lever arms and the first micrometer are coupled, and it is ensured that the maximum swing angle of the first and second lever arms within the travel range of the first micrometer does not exceed the travel range of the first, second and third flexible hinges; for the second clamping device, after loosening the clamping block screw, the fourth and fifth flexible hinges are assembled in sequence, then the third lever arm and the second micrometer are coupled, and it is ensured that the second micrometer travels to the midpoint of the travel range, and the fifth flexible hinge is assembled at this position; S2, placing the mirror and the second pad on the horizontal mirror base, and the mirror and the second pad are positioned by the three-point supporting device due to the action of gravity; S3, assembling the fixing device on the horizontal mirror base so that the mirror and the second pad are locked on the horizontal mirror base; S4, assembling the first and second clamping devices on the horizontal mirror base, adjusting the first micrometer so that the first and second top beads do not touch the mirror surface of the mirror, and adjusting the second micrometer so that the third and fourth top beads do not touch the mirror surface of the mirror; S5, moving the mirror adjusting device into the optical path; S6, adjusting the first and second micrometers to correct the surface shape of the mirror.

[0014] Preferably, during the assembling of the first and second clamping devices, the first, second, third, fourth and fifth flexible hinges are in the balanced position, and the clamping openings of the first and second clamping devices are in the fully open state, and the clamping openings of the first and second clamping devices are fully closed without exceeding the travel range of the first, second, third, fourth and fifth flexible hinges.

[0015] Preferably, the opening between the third and fourth top beads is maximized due to the elastic action of the fourth flexible hinge, and the third and fourth top beads are closed without exceeding the travel range of the fourth flexible hinge.

[0016] Preferably, the two second clamping devices are mirror-symmetrical, and the third and fourth top beads act on the middle of the mirror when assembled.

[0017] The mirror adjusting device according to the present application fixes the mirror surface by clamping the mirror with top beads, controls the movement direction of the clamping point by flexible hinges, finely adjusts the force acting on the clamping point by the micrometer and lever arm, and corrects the mirror surface by applying force to the clamping point. The mirror adjusting device according to the present application can be used not only for fixing and protecting the mirror during short-distance transportation and long-distance transportation, but also for correcting the deformation of the mirror caused by gravity and stress in a large-scale range, and ensuring the stability of the mirror surface during short-distance transportation and long-distance transportation. The mirror adjusting device according to the present application can correct the deformation of the mirror of a thin mirror of a synchrotron radiation during installation and use. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a structural schematic diagram of the mirror adjusting device according to a preferred embodiment of the present application.

[0019] Figure 2 is an exploded view of the mirror adjusting device of Figure 1

[0020] Figure 3 is a structural schematic diagram of the horizontal mirror of Figure 2

[0021] Figure 4 is an exploded view of the horizontal mirror of Figure 3

[0022] Figure 5 is an exploded view of the first clamping device of Figure 4

[0023] Figure 6 is a structural schematic diagram of the first clamping device of Figure 5

[0024] Figure 7 is an exploded view of the first clamping device of Figure 6

[0025] Figure 8 is another perspective view of the first clamping device of Figure 6

[0026] Figure 9 is a side view of the first top bead lever of Figure 7

[0027] Figure 10 is a side view of the second / third top bead lever of Figure 7

[0028] ​​​​​​​​​Figure 11 Flexible fixing of the micrometer with the lever arm is shown.

[0029] Figure 12 is a structural diagram of the second clamping device of Figure 5

[0030] Figure 13 is an exploded view of the second clamping device of Figure 12

[0031] Figure 14 is an assembly diagram of the clamping block assembly of the second clamping device of Figure 12

[0032] Figure 15 is a structural diagram of the first clamping block of Figure 13

[0033] Figure 16 is a structural diagram of the second clamping block of Figure 13

[0034] Figure 17 is a structural diagram of the fixing device of Figure 5

[0035] Figure 18 is a side view of the first clamping device of Figure 5

[0036] Figure 19 is a side view of the second clamping device of Figure 5

[0037] Figure 20 is a structural diagram of the vertical mirror of Figure 2

[0038] Figure 21 is an exploded view of the vertical mirror of Figure 20

[0039] Figure 22 is an exploded view of the second clamping device of Figure 21

[0040] Figure 23 is a structural diagram of the second clamping device of Figure 22

[0041] Figure 24 is a structural diagram of the vertical mirror base of Figure 22

[0042] Figure 25 shows the initial assembly state of the vertical mirror of Figure 20 DETAILED DESCRIPTION

[0043] ​​​​​​​​​​​​​​The preferred embodiments of the present invention are given below with reference to the accompanying drawings and described in detail.

[0044] like Figure 1 As shown, a preferred embodiment of the reflector adjustment device according to the present invention includes a horizontal mirror 201 and a vertical mirror 207, both controlled by two sets of adjustment mechanisms, and both are mounted on the same device base 212. The horizontal mirror 201 is a vertically placed reflector mechanism, also known as an H-mirror, positioned in the optical path to modulate the horizontal properties of the incident X-rays. The vertical mirror 207 is a horizontally placed reflector mechanism, also known as a V-mirror, positioned in the optical path to modulate the vertical properties of the incident X-rays. The horizontal mirror 201 and the vertical mirror 207 are coupled together to act on the X-rays in all directions.

[0045] In this embodiment, the device base 212 serves as a base plate, providing a mounting platform for the horizontal mirror 201 and the vertical mirror 207, allowing the entire reflector adjustment device to be moved as a whole. Thus, the reflector, after offline testing and calibration, can be easily moved as a whole.

[0046] In this embodiment, the horizontal mirror 201 is controlled by a first adjustment mechanism, and the vertical mirror 207 is controlled by a second adjustment mechanism. The first and second adjustment mechanisms are evenly distributed to achieve stability and ease of use of the coupling between the horizontal mirror 201 and the vertical mirror 207.

[0047] like Figure 2 As shown, the first adjustment mechanism includes a first adapter plate 202 connected to the horizontal mirror 201, which has four positioning pins at its four corners. When the horizontal mirror 201 is installed on the first adapter plate 202, it can be firmly locked, so that the horizontal mirror 201 can be removed as a whole for offline calibration.

[0048] like Figure 2 As shown, the first adjustment mechanism also includes a rotary motor 203 connected to the first adapter plate 202 and a first roll angle motor 204 connected to the rotary motor 203. The rotary motor 203 provides the horizontal mirror 201 with the degree of freedom to rotate in the horizontal plane, and the first roll angle motor 204 provides the horizontal mirror 201 with the degree of freedom to roll in a plane perpendicular to the optical path. Specifically, the rotary motor 203 is a high-precision rotary motor with a minimum resolution of 0.001 degrees or higher, providing a slight angle of incidence for the reflector of the horizontal mirror 201. Specifically, when the horizontal mirror 201 is mounted on the first adapter plate 202, the center of the reflecting surface of the horizontal mirror 201 is exactly located on the rotation axis of the rotary motor 203, and also on the rotation center of the first roll angle motor 204. In this embodiment, the error is controlled within 1 millimeter.

[0049] like Figure 2As shown, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level.

[0050] As shown in FIG. 2, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level. Figure 2 As shown, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level.

[0051] As shown, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level.

[0052] Figure 2 As shown in FIG. 2, the second adjusting mechanism comprises a second adapter plate 208 connected with the vertical mirror 207, and four positioning pins are designed at four corners of the second adapter plate 208. When the vertical mirror 207 is installed on the second adapter plate 208, it can be firmly locked, so that the vertical mirror 207 can be taken off as a whole for offline calibration.

[0053] As shown in FIG. 2, the second adjusting mechanism further comprises a second roll motor 210 connected with the second adapter plate 208, and a second translational motor 211 connected with the second roll motor 210, so as to provide a translational degree of freedom of the vertical mirror 207 in the vertical direction through the second translational motor 211, so that the vertical mirror 207 can cut into or out of the light path as needed. In the embodiment, the second translational motor 211 is a high-precision translational motor, and the motion accuracy is micron level. Figure 2 As shown in FIG. 2, the second adjusting mechanism further comprises a second roll motor 210 connected with the second adapter plate 208, and a second translational motor 211 connected with the second roll motor 210, so as to provide a translational degree of freedom of the vertical mirror 207 in the vertical direction through the second translational motor 211, so that the vertical mirror 207 can cut into or out of the light path as needed. In the embodiment, the second translational motor 211 is a high-precision translational motor, and the motion accuracy is micron level.

[0054] Figure 2 As shown in FIG. 2, the second adjusting mechanism further comprises a second roll motor 210 connected with the second adapter plate 208, and a second translational motor 211 connected with the second roll motor 210, so as to provide a translational degree of freedom of the vertical mirror 207 in the vertical direction through the second translational motor 211, so that the vertical mirror 207 can cut into or out of the light path as needed. In the embodiment, the second translational motor 211 is a high-precision translational motor, and the motion accuracy is micron level. ​​

[0055] It should be understood that the installation order of the vertical mirror 207 and the second adjusting mechanism is fixed and cannot be adjusted to ensure that the calibration is as a whole, according to the experimental requirements, easily moved in or out of the light path, and the calibrated posture is maintained.

[0056] Horizontal mirror 201

[0057] As shown in Figures 3-4 , the horizontal mirror 201 includes a first reflecting mirror 201a, a second cushion block 201b, a horizontal mirror base 201c, and a first clamping device 201d, wherein the first reflecting mirror 201a is installed on the second cushion block 201b, placed on the horizontal mirror base 201c, and finally fixed by the first clamping device 201d. In this way, the horizontally placed first reflecting mirror 201a is clamped and fixed. In this embodiment, the horizontal mirror base 201c has three-point support devices, and the first reflecting mirror 201a and the second cushion block 201b can be positioned by the three-point support devices due to gravity.

[0058] As shown in Figure 5 , the first clamping device 201d includes a first clamping device 301, second clamping devices 302, 303, and a fixing device 304 installed around the horizontal mirror base 201c, wherein the first clamping device 301 is installed at both ends of the horizontal mirror base 201c, respectively, the second clamping devices 302, 303 are installed symmetrically at the central position of the horizontal mirror base 201c, and the fixing device 304 is installed on the horizontal mirror base 201c at both sides of the second clamping devices 302, 303, respectively, for firmly fixing the second cushion block 201b on the horizontal mirror base 201c, thereby stabilizing the first reflecting mirror 201a. The first clamping device 301 and the second clamping devices 302, 303 can effectively adjust the overall curvature of the first reflecting mirror 201a in a large range.

[0059] As shown in Figure 6 , the first clamping device 301 includes a first top bead lever 501, a second top bead lever 503, a third top bead lever 506, a first bracket 509, a second bracket 510, and a first clamping base 511, wherein the first clamping base 511 is fixedly installed at both ends of the horizontal mirror base 201c (see Figure 5 ), the first bracket 509 and the second bracket 510 are fixedly installed on the first clamping base 511 at a distance from each other, the first top bead lever 501 is rotatably installed between the first bracket 509 and the second bracket 510, the second top bead lever 503 is rotatably installed on the first bracket 509, and the third top bead lever 506 is rotatably installed on the second bracket 510.

[0060] As shown in Figures 7-8As shown, the first clamping device 301 further comprises a first flexible hinge 502, which adopts a three-segment design, with both ends fixedly connected to the first support 509 and the second support 510 respectively, and the middle part passing through the first mounting hole 603 (see Figure 9 ) of the first top bead lever 501. In this way, the first top bead lever 501 is allowed to rotate slightly along a predetermined trajectory through the first flexible hinge 502, and the trajectory of such rotation is very accurate, and the first top bead lever 501 is not prone to distortion during the entire rotation process.

[0061] As shown in Figures 7-8 , the first clamping device 301 further comprises a second flexible hinge 504, which adopts a two-segment design, and the second top bead lever 503 is mounted on the first support 509 through the second flexible hinge 504. In addition, the first clamping device 301 further comprises a first locking ring 505, which tightly locks the second top bead lever 503 on the first clamping base 511 after adjusting the posture of the second top bead lever 503, ensuring its stability and accuracy.

[0062] As shown in Figures 7-8 , the first clamping device 301 further comprises a third flexible hinge 507, which adopts a two-segment design, and the third top bead lever 506 is mounted on the second support 510 through the third flexible hinge 507. In addition, the first clamping device 301 further comprises a second locking ring 508, which tightly locks the third top bead lever 506 on the first clamping base 511 after adjusting the posture of the third top bead lever 506.

[0063] As shown in Figures 7-8 , the first clamping device 301 further comprises a first micrometer 512, which has a body and a telescopic head as a precision tool, wherein the body is mounted on the first clamping base 511, and the telescopic head is flexibly connected to the first top bead lever 501, the second top bead lever 503 and the third top bead lever 506 respectively. By adjusting the first micrometer 512, the slight rotation of the first top bead lever 501, the second top bead lever 503 and the third top bead lever 506 along the flexible hinge shaft can be accurately controlled, thereby realizing high-precision adjustment and positioning.

[0064] As shown in Figure 9As shown, the first top bead lever 501 includes a first top bead 601 and a first lever arm 604, wherein the first top bead 601 is mounted on a lateral extension of the first lever arm 604. The first top bead 601 is made of stainless steel, has a diameter no less than 5mm, and has a surface polished with a flatness between Ra0.1 and Ra0.4. The top end of the first lever arm 604 has a lever top point 602, and the upper top point of the first top bead 601 is at the same horizontal plane as the lever top point 602. The top of the first lever arm 604 has a first mounting hole 603 for mounting the first flexible hinge 502 (see Figure 7 ), and the bottom of the first lever arm 604 has a first mounting position 605 for coupling and mounting the telescopic head of the first micrometer 512 (see Figure 7 ). The first distance (i.e. top bead action arm) 607 is between the upper top point of the first top bead 601 and the center of the first mounting hole 603, and the second distance (i.e. lever action arm) 608 is between the first mounting position 605 and the center of the first mounting hole 603. The greater the ratio of the second distance 608 to the first distance 607, the more precise the regulation of the mirror surface of the first mirror 201a (see Figure 3 ). In the embodiment, the ratio of the second distance 608 to the first distance 607 is greater than 5.

[0065] As shown in Figure 9 , the first top bead lever 501 further includes a first limit locking device 606 for locking the position of the first top bead lever 501. In the embodiment, the first limit locking device 606 is in the shape of a circular arc, and the center of the circular arc coincides with the center of the first mounting hole 603.

[0066] The second top bead lever 503 and the third top bead lever 506 have the same structure, and only the second top bead lever 503 will be described in detail below. As shown in Figure 10 , the second top bead lever 503 includes a second top bead 701 and a second lever arm 703, wherein the second top bead 701 is mounted on a lateral extension of the second lever arm 703. The second top bead 701 is made of stainless steel, has a diameter no less than 5mm, and has a surface polished with a flatness between Ra0.1 and Ra0.4. The top of the second lever arm 703 has a second mounting hole 702 for mounting the second flexible hinge 504 (see Figure 7 ), and the bottom of the second lever arm 703 has a second mounting position 705 for coupling and mounting the telescopic head of the first micrometer 512 (see Figure 7The second top bead lever 503 is coupled to the telescopic head of the first micrometer 512. The lower vertex of the second top bead 701 is in the same horizontal plane as the center of the second mounting hole 702, and the center of the second mounting hole 702 is in the same vertical line as the second mounting position 705. The third distance (i.e., the top bead action arm) 706 is between the lower vertex of the second top bead 701 and the center of the second mounting hole 702, and the fourth distance (i.e., the lever action arm) 707 is between the second mounting position 705 and the center of the second mounting hole 702. The ratio of the fourth distance 707 to the third distance 706 is the magnification effect of the lever, which can make the first micrometer 512 more accurately adjust the mirror surface. In this embodiment, the ratio of the fourth distance 707 to the third distance 706 is greater than 5.

[0067] As shown in Figure 10 , the second top bead lever 503 further includes a second limit locking device 704 for locking the position of the second top bead lever 503, for locking the second lever arm 703.

[0068] As shown in Figures 11 , the telescopic head of the first micrometer 512 is flexibly fixed on the lever arms 604, 703 of the first top bead lever 501, the second top bead lever 503, and the third top bead lever 506, so that the telescopic head can push or pull back the lever arms, and can also rotate around the lever arms, but cannot be detached from the lever arms. The lever arms 604, 703 are provided with symmetrical semispherical recesses 801, and the two semispherical recesses 801 are connected by a through hole 802. The telescopic head of the first micrometer 512 has a semispherical head 806 with a threaded hole at the top. When the semispherical head 806 is placed in the semispherical recess 801, the ball 803 of the threaded rod 805 is inserted from the other side of the semispherical recess 801, and the threaded rod 805 is inserted into the threaded hole of the semispherical head 806. The diameter of the threaded rod 805 is smaller than the diameter of the through hole 802. After installation, the ball 803 and the semispherical head 806 are moderately fixed at both ends of the through hole 802, so that the telescopic head of the first micrometer 512 can move the lever arms 604, 703 forward and backward, and can also rotate around the lever arms 604, 703.

[0069] As shown in Figures 12-14 , the second clamping device 302, 303 respectively includes a clamping block assembly 1011, a third bracket 1009, a second clamping base 1006, and a second micrometer 1010. The second clamping base 1006 is fixedly installed on the horizontal mirror base 201c (see Figure 5The third bracket 1009 is fixedly installed on the second clamping base 1006 in the middle of the two sides of the second clamping device 302, 303, the clamping block assembly 1011 is installed on the third bracket 1009, and the second micrometer 1010 is installed on the second clamping base 1006 and is flexibly connected with the clamping block assembly 1011. The clamping block assembly 1011 comprises a first clamping block 1001, a second clamping block 1004, a fourth flexible hinge 1002 and a clamping block screw 1007, wherein the first clamping block 1001 is installed on the second clamping block 1004 via the fourth flexible hinge 1002, the clamping block screw 1007 is installed on the first clamping block 1001 and is pressed on the second clamping block 1004 through the first clamping block 1001, and the clamping block screw 1007 can adjust the opening and closing angle of the first clamping block 1001 and the second clamping block 1004. In the embodiment, the fourth flexible hinge 1002 adopts a three-section design, and two ends are installed on the first clamping block 1001 and the middle part is installed on the second clamping block 1004. In the embodiment, the top end of the clamping block screw 1007 is spherical. It should be understood that the second clamping device 302, 303 is mirror-symmetrically designed, the third bracket 1009 and the clamping block assembly 1011 are completely the same in structure, the second clamping base 1006 is mirror-symmetrically designed, and the clamping block assembly 1011 is designed in different assembly modes to realize the mirror symmetry of the second clamping device 302, 303.

[0070] As shown in Figures 12-14 , the second clamping device 302, 303 further comprises a fifth flexible hinge 1008, which adopts a two-section design, one end of which is installed on the third bracket 1009 and the other end of which is installed on the second clamping block 1004.

[0071] As shown in Figures 12-14 , the second clamping device 302, 303 further comprises a third locking ring 1003 and a fourth locking ring 1005, wherein the third locking ring 1003 connects the first clamping block 1001 and the second clamping block 1004 to lock the opening and closing angle of the first clamping block 1001 and the second clamping block 1004, and the fourth locking ring 1005 connects the second clamping block 1004 and the second clamping base 1006 to lock the second clamping block 1004 on the second clamping base 1006 after adjustment.

[0072] As shown in Figure 15 , the first clamping block 1001 comprises a third top bead 1101, which is made of stainless steel, has a diameter not less than 5 mm and a surface polished to a flatness of Ra0.1 to Ra0.4. The first clamping block 1001 has a third mounting hole 1102, and the clamping block screw 1007 (see Figure 14) through the third mounting hole 1102. The first clamping block 1001 has a first locking hole 1103, and the third locking ring 1003 cooperates with the first locking hole 1103 to lock the opening and closing angle of the first clamping block 1001 and the second clamping block 1004. The first clamping block 1001 has a fourth mounting hole 1104 for mounting the fourth flexible hinge 1002. When the first clamping block 1001 is placed horizontally, the center of the fourth mounting hole 1104 is on the same horizontal plane as the lower vertex of the third top bead 1101.

[0073] As shown in Figure 16 , the second clamping block 1004 includes a fourth top bead 1201 and a third lever arm 1202, wherein the fourth top bead 1201 is mounted on the lateral extension of the third lever arm 1202. The fourth top bead 1201 is made of stainless steel, with a diameter not less than 5 mm, and the surface is polished to a flatness of Ra0.1 to Ra0.4. The top of the third lever arm 1202 has a fifth mounting hole 1205 and a sixth mounting hole 1206, wherein the fifth flexible hinge 1008 is installed through the fifth mounting hole 1205 to mount the second clamping block 1004 on the third bracket 1009, and the fourth flexible hinge 1002 is installed through the sixth mounting hole 1206 to mount the second clamping block 1004 on the first clamping block 1001. The bottom of the third lever arm 1202 has a third mounting position 1204 for coupling and mounting the extension head of the second micrometer 1010, and the mounting method is as shown in Figure 11 . The third lever arm 1202 has a second locking hole 1203, and the fourth locking ring 1005 cooperates with the second locking hole 1203 to lock the swing arm angle of the second clamping block 1004. The upper vertex of the fourth top bead 1201, the center of the fifth mounting hole 1205 and the sixth mounting hole 1206 are on a horizontal line. Their front and back order cannot be changed. At the same time, the center of the fifth mounting hole 1205 and the third mounting position 1204 are on the same plumb line.

[0074] As shown in Figure 17 , the fixing device 304 includes a fixed base 1302, which has a seventh mounting hole 1303 at the lower part, and the fixed base 1302 is installed and fixed on the horizontal mirror base 201c (see Figure 5 ) through the seventh mounting hole 1303. The top of the fixed base 1302 has a completely threaded hole, and the locking bolt 1304 is assembled on the threaded hole. One end of the locking bolt 1304 is a hand wheel, and the other end is a locking sheet 1301. In this embodiment, the locking sheet 1301 is a high-density polytetrafluoroethylene sheet.

[0075] Horizontal mirror 201 assembly

[0076] The clamping devices 301, 302, 303 (see Figure 5During assembly, pay attention to the angles of flexible hinges 502, 504, 507, 1002, and 1008, ensuring that when each flexible hinge 502, 504, 507, 1002, and 1008 is in a balanced position, the clamps of clamping devices 301, 302, and 303 are fully open. Simultaneously, even when the clamps of clamping devices 301, 302, and 303 are fully closed, they should not exceed the travel range of each flexible hinge 502, 504, 507, 1002, and 1008.

[0077] like Figure 18 As shown, for the first clamping device 301, when assembling the flexible hinges 502, 504, and 507, the opening between the first top bead 601 and the second top bead 701 is made as large as possible. Then, the lever arms 604 and 703 and the telescopic head of the first micrometer 512 are assembled and coupled. The testing device ensures that within the stroke range of the first micrometer 512, the maximum swing angle of the lever arms 604 and 703 does not exceed the stroke of the flexible hinges 502, 504, and 507. At the maximum angle of the swing arm, the first limit locking device 606 and the locking rings 505 and 508 are locked.

[0078] like Figure 19 As shown, for the second clamping devices 302 and 303, first, the clamping block screw 1007 is completely loosened, and then the fourth flexible hinge 1002 is assembled. When the device is relaxed, the opening between the third top ball 1101 and the fourth top ball 1201 is maximized due to the elasticity of the fourth flexible hinge 1002. Simultaneously, when the third top ball 1101 and the fourth top ball 1201 are closed, they will not exceed the stroke of the fourth flexible hinge 1002. At the position where the opening between the third top ball 1101 and the fourth top ball 1201 is at its maximum, the third locking ring 1003 is locked. Then, the fifth flexible hinge 1008 is assembled. First, the third lever arm 1202 and the telescopic head of the second micrometer 1010 are coupled, and then the second micrometer 1010 is moved to the midpoint of its stroke. At this position, the fifth flexible hinge 1008 is assembled. The effect after assembly is that the balance position of the fifth flexible hinge 1008 is exactly at the midpoint of the stroke of the second micrometer 1010. At this point, lock the fourth locking ring 1005.

[0079] See Figure 4 The first reflector 201a and the second pad 201b are placed on the horizontal mirror base 201c. The horizontal mirror base 201c has a three-point support device, and the first reflector 201a and the second pad 201b can be positioned by the three-point support device due to gravity.

[0080] See Figure 5 Assemble the fixing device 304 onto the horizontal mirror base 201c. Slowly tighten the handwheels of the four fixing devices 304 in sequence. Tighten each locking bolt 1304 (see [link]) to the appropriate tightness. Figure 17) Tighten 1 / 4 or 1 / 8 turn clockwise each time until all the locking bolts 1304 are tightened. The first mirror 201a and the second spacer 201b are locked on the horizontal mirror base 201c.

[0081] Referring to Figure 5 Install the first clamping device 301 on the horizontal mirror base 201c. Note that the top beads 601, 701 will not touch the mirror surface of the first mirror 201a. If necessary, loosen the first limit lock 606 and the locking rings 505, 508, and adjust the first micrometer 512 to move the top beads 601, 701 away from the mirror surface.

[0082] Referring to Figure 5 Install the second clamping device 302, 303 on the horizontal mirror base 201c. Note that the top beads 1101, 1201 will not touch the mirror surface of the first mirror 201a. If necessary, loosen the locking rings 1003, 1005, and adjust the second micrometer 1010 to move the top beads 1101, 1201 away from the mirror surface. The second clamping device 302, 303 is mirror-symmetrical, and when installed, the top beads 1101, 1201 are exactly acting on the middle of the first mirror 201a.

[0083] Place the device under a laser interferometer.

[0084] Loosen the first limit lock 606 and the locking rings 505, 508, 1003, 1005.

[0085] Fine-tune the micrometers 512, 1010 according to the surface profile results fed back by the laser interferometer to correct the surface profile of the first mirror 201a. For the second clamping device 302, 303, preferentially use the second micrometer 1010 to slightly stick the top bead 1201 to the first mirror 201a, and then rotate the clamping screw 1007 to make the top bead 1101 also slightly stick to the first mirror 201a. Then fine-tune the second micrometer 1010 to correct the surface profile of the first mirror 201a.

[0086] After getting the appropriate surface profile structure, lock the first limit lock 606 and the locking rings 505, 508, 1003, 1005.

[0087] Vertical mirror 207

[0088] As Figures 20-21As shown, the vertical mirror 207 includes a second reflecting mirror 201e, a third pad 201f, a vertical mirror base 306, and a second clamping device 201g. The second reflecting mirror 201e is mounted on the third pad 201f, then placed on the vertical mirror base 306, and finally fixed by the second clamping device 201g. Thus, the vertically placed second reflecting mirror 201e is clamped and fixed. In this embodiment, the vertical mirror base 306 has a three-point support device, and the second reflecting mirror 201e and the third pad 201f can be positioned by the three-point support device due to gravity.

[0089] like Figures 20-21 As shown, the vertical mirror 207 also includes a back plate 305, which is mounted on the vertical mirror base 306 and has a gap between the second reflector 201e and the third pad 201f, so they do not directly contact each other.

[0090] like Figure 22 As shown, the second clamping device 201g includes a first clamping device 301, second clamping devices 302 and 303, and a fixing device 304 mounted around the back plate 305. The first clamping device 301 is mounted at both ends of the back plate 305. The second clamping device 302 is mounted on the back plate 305. The second clamping device 303 is mounted on both the back plate 305 and the vertical mirror base 306. The fixing device 304 is mounted on both sides of the second clamping device 302 on the back plate 305 to fix the third pad 201f, thereby stabilizing the second reflector 201e and enabling effective adjustment of the overall curvature of the second reflector 201e over a large scale. The structure of the first clamping device 301 is as follows... Figures 6-11 and Figure 18 As shown, the structure of the second clamping device 302 is as follows: Figures 12-16 and Figure 19 As shown, the structure of the fixing device 304 is as follows: Figure 17 As shown.

[0091] like Figure 23 As shown, the second clamping device 303 includes a third micrometer 401, whose telescopic head is fixed to a connecting rod 402. The tail of the connecting rod 402 is equipped with a U-shaped groove 403 and a guide rail 404. A fifth top ball 405 is installed at one end of the U-shaped groove 403. The other end of the U-shaped groove 403 has a through threaded hole, in which a top ball screw 406 is fitted. One end of the top ball screw 406 is a handwheel, and the other end is a sixth top ball 407. In this embodiment, the fifth top ball 405 and the sixth top ball 407 are made of stainless steel, with a diameter of not less than 5 mm, and their surfaces are polished with a flatness between Ra0.1 and Ra0.4.

[0092] like Figure 24As shown, three positioning support balls 501 are arranged on the top surface of the vertical mirror base 306 in an isosceles triangle pattern. The vertical mirror base 306 has a track groove 502 for accommodating the connecting rod 402 (see Figure 23 ). The vertical mirror base 306 also has a slide rail mounting hole 503 for mounting the guide rail 404 (see Figure 23 ).

[0093] Vertical mirror 207 assembly

[0094] As shown in Figure 25 , the third micrometer 401 is assembled on the back plate 305 without being tightened.

[0095] The back plate 305 is assembled on the vertical mirror base 306. Note that the third micrometer 401 is placed into the track groove 502 (see Figure 24 ) of the vertical mirror base 306.

[0096] The connecting rod 402 is assembled from the front of the track groove 502 (see Figure 24 ) of the vertical mirror base 306 and coupled with the third micrometer 401.

[0097] The connecting rod 402 is lightly screwed on the vertical mirror base 306. Rotate the third micrometer 401 to move the connecting rod 402 and correct the posture of the connecting rod 402 and the third micrometer 401 in the process. Until no resistance is felt, the screw on the connecting rod 402 is tightened.

[0098] The fixing screw of the third micrometer 401 is tightened to tightly fix it on the back plate 305. At this point, the second clamping device 303 composed of the third micrometer 401 and the connecting rod 402 is assembled.

[0099] Referring to Figure 23 , the fifth top bead 405 and the sixth top bead 407 are completely loosened, and the opening is maximized.

[0100] From top to bottom, the second reflecting mirror 201e and the third pad 201f are placed on the vertical mirror base 306, which has three-point support devices, and the second reflecting mirror 201e and the third pad 201f can be positioned by the three-point support devices due to gravity. During the placement process, pay attention to adjust the third micrometer 401 so that the fifth top bead 405 and the sixth top bead 407 do not touch the second reflecting mirror 201e.

[0101] Referring to Figure 25Assemble clamping devices 301 and 302 respectively. During assembly, pay attention to the angles of flexible hinges 502, 504, 507, 1002, and 1008, ensuring that when each flexible hinge 502, 504, 507, 1002, and 1008 is in a balanced position, the clamping jaws of clamping devices 301, 302, and 303 are fully open. Simultaneously, even when the clamping jaws of clamping devices 301, 302, and 303 are fully closed, they should not exceed the travel range of each flexible hinge 502, 504, 507, 1002, and 1008.

[0102] like Figure 18 As shown, for the first clamping device 301, when assembling the flexible hinges 502, 504, and 507, the opening between the first top bead 601 and the second top bead 701 is made as large as possible. Then, the lever arms 604 and 703 and the telescopic head of the first micrometer 512 are assembled and coupled. The testing device ensures that within the stroke range of the first micrometer 512, the maximum swing angle of the lever arms 604 and 703 does not exceed the stroke of the flexible hinges 502, 504, and 507. At the maximum angle of the swing arm, the first limit locking device 606 and the locking rings 505 and 508 are locked.

[0103] like Figure 19 As shown, for the second clamping device 302, first, the clamping block screw 1007 is completely loosened, and then the fourth flexible hinge 1002 is assembled. When the device is relaxed, the opening between the third top ball 1101 and the fourth top ball 1201 is maximized due to the elasticity of the fourth flexible hinge 1002. Simultaneously, when the third top ball 1101 and the fourth top ball 1201 are closed, they will not exceed the stroke of the fourth flexible hinge 1002. At the position where the opening between the third top ball 1101 and the fourth top ball 1201 is at its maximum, the third locking ring 1003 is locked. Then, the fifth flexible hinge 1008 is assembled. First, the third lever arm 1202 and the telescopic head of the second micrometer 1010 are coupled, and then the second micrometer 1010 is moved to the midpoint of its stroke. At this position, the fifth flexible hinge 1008 is assembled. The effect after assembly is that the balance position of the fifth flexible hinge 1008 is exactly at the midpoint of the stroke of the second micrometer 1010. At this point, lock the fourth locking ring 1005.

[0104] See Figure 25 Assemble the fixing device 304 onto the back plate 305. Slowly tighten the handwheels of both fixing devices 304 in sequence. Tighten each locking bolt 1304 (see [link]) to the appropriate tightness. Figure 17 Turn clockwise 1 / 4 or 1 / 8 turn each time until all locking bolts 1304 are tightened. The second reflector 201e and the third pad 201f are locked onto the back plate 305.

[0105] See Figure 25Two first clamping devices 301 are assembled on the back plate 305. Note that the top beads 601, 701 will not touch the mirror surface of the second mirror 201e. If necessary, loosen the first limit locking device 606 and the locking rings 505, 508, adjust the first micrometer 512 to make the top beads 601, 701 away from the mirror surface.

[0106] Referring to Figure 5 The second clamping device 302 is assembled on the back plate 305. Note that the top beads 1101, 1201 will not touch the mirror surface of the second mirror 201e. If necessary, loosen the locking rings 1003, 1005, adjust the second micrometer 1010 to make the top beads 1101, 1201 away from the mirror surface. When assembled, the top beads 1101, 1201 just act on the middle of the second mirror 201e.

[0107] Put the device under the laser interferometer.

[0108] Loosen the first limit locking device 606 and the locking rings 505, 508, 1003, 1005.

[0109] Fine tune the micrometers 512, 1010, 401 according to the surface profile result from the laser interferometer to correct the surface profile of the second mirror 201e. For the second clamping device 302, first use the second micrometer 1010 to make the top bead 1201 slightly touch the second mirror 201e, then rotate the clamping screw 1007 to make the top bead 1101 also slightly touch the second mirror 201e. Then fine tune the second micrometer 1010 to correct the surface profile of the first mirror 201a. For the second clamping device 303, first use the third micrometer 401 to make the fifth top bead 405 slightly touch the second mirror 201e, then rotate the top bead screw 406 to make the sixth top bead 407 slightly touch the second mirror 201e. Adjust the third micrometer 401 to correct the surface profile of the second mirror 201e according to the result from the laser interferometer.

[0110] After getting the proper surface profile structure, lock the first limit locking device 606 and the locking rings 505, 508, 1003, 1005.

[0111] The above description is only the preferred embodiment of the present application, and is not intended to limit the scope of the present application. The above embodiment of the present application can be variously changed. Any simple, equivalent changes and modifications made according to the content of the claims and the description of the present application fall within the scope of the present application. The present application is not described in detail, and is conventional technical content.

Claims

1. A reflector adjustment device, characterized in that, The mirror adjustment device includes a horizontal mirror, which comprises a mirror, a second pad, a clamping device, a fixing device, and a horizontal mirror base. The mirror is supported and mounted on the horizontal mirror base by the second pad. The fixing device fixes the second pad to stabilize the mirror. The clamping device is mounted around the horizontal mirror base, and the mirror is clamped in the optical path by the clamping device. The clamping device includes a first clamping device and a second clamping device. The first clamping device includes a first top ball lever, a second top ball lever, a third top ball lever, a first bracket, a second bracket, a first clamping base, and a first micrometer. The first bracket and the second bracket are fixedly mounted on the first clamping base with a gap between them. The first top ball lever is rotatably mounted between the first bracket and the second bracket via a first flexible hinge. The second top ball lever is rotatably mounted on the first bracket via a second flexible hinge. The third top ball lever is rotatably mounted on the second bracket via a third flexible hinge. The first micrometer is mounted on the first clamping base and flexibly connected to the first... I. Second and third top ball levers, the first top ball lever includes a first top ball mounted on a first lever arm, the second and third top ball levers each include a second top ball mounted on a second lever arm, the first and second top balls are arranged opposite each other and cooperate with a reflector, wherein the second clamping device includes a clamping block assembly, a third bracket, a second clamping base and a second micrometer, wherein the clamping block assembly includes a first clamping block, a second clamping block and a clamping block screw, wherein the first clamping block is mounted on the second clamping block by a fourth flexible hinge, the clamping block screw is mounted on the first clamping block and passes through the first clamping block and abuts against the second clamping block to adjust the opening angle of the first and second clamping blocks, the clamping block assembly is rotatably mounted on the third bracket by a fifth flexible hinge, the third bracket is fixedly mounted on the second clamping base, the second micrometer is mounted on the second clamping base and flexibly connected to the clamping block assembly, the first clamping block includes a third top ball, the second clamping block includes a fourth top ball mounted on the third lever arm, the third and fourth top balls are arranged opposite each other and cooperate with a reflector.

2. The mirror adjustment device according to claim 1, characterized in that, The first clamping device further includes a first limiting locking device, a first locking ring, and a second locking ring. The first limiting locking device connects the first top ball lever and the first clamping base to lock the first top ball lever on the first clamping base. The first locking ring connects the second top ball lever and the first clamping base to lock the second top ball lever on the first clamping base. The second locking ring connects the third top ball lever and the first clamping base to lock the third top ball lever on the first clamping base.

3. The mirror adjustment device according to claim 1, characterized in that, The second clamping device further includes a third locking ring and a fourth locking ring, wherein the third locking ring connects the first clamping block and the second clamping block to lock the opening and closing angle of the first clamping block and the second clamping block, and the fourth locking ring connects the second clamping block and the second clamping base to lock the second clamping block on the second clamping base.

4. The mirror adjustment device according to claim 1, characterized in that, The horizontal mirror is controlled by a first adjustment mechanism, which includes a first adapter plate, a rotary motor, a first roll angle motor, and a first translational motor. The first adapter plate is connected to the horizontal mirror, the rotary motor is connected to the first adapter plate to provide the horizontal mirror with the degree of freedom to rotate in the horizontal plane, the first roll angle motor is connected to the rotary motor to provide the horizontal mirror with the degree of freedom to roll in the plane perpendicular to the light path, and the first translational motor is connected to the first roll angle motor to provide the horizontal mirror with the degree of freedom to translate in the horizontal plane perpendicular to the light path.

5. The mirror adjustment device according to claim 4, characterized in that, The center of the reflecting surface of the horizontal mirror is located on the rotating shaft of the rotary motor, and also on the rotation center of the first rolling angle motor.

6. The mirror adjustment device according to claim 1, characterized in that, The fixing device is installed on the base of the horizontal mirror.

7. A method for assembling a reflector adjustment device according to any one of claims 1-6, characterized in that, The assembly method includes the following steps: S1, assemble the first and second clamping devices respectively. For the first clamping device, when assembling the first, second and third flexible hinges, the opening between the first and second top balls should be as large as possible. Then, couple the first and second lever arms and the first micrometer to ensure that within the stroke range of the first micrometer, the maximum swing angle of the first and second lever arms will not exceed the stroke of the first, second and third flexible hinges. For the second clamping device, after loosening the clamping block screw, assemble the fourth flexible hinge first, then couple the third lever arm and the second micrometer to ensure that the second micrometer travels to the midpoint of its stroke. At the midpoint, assemble the fifth flexible hinge. S2, Place the reflector and the second pad on the horizontal mirror base. The reflector and the second pad are positioned by the three-point support device due to gravity. S3, assemble the fixing device onto the horizontal mirror base so that the reflector and the second pad are locked onto the horizontal mirror base; S4, assemble the first and second clamping devices on the horizontal mirror base, adjust the first micrometer so that the first and second top beads do not touch the mirror surface of the reflector, and adjust the second micrometer so that the third and fourth top beads do not touch the mirror surface of the reflector. S5, move the reflector adjustment device into the optical path; S6, adjust the surface profile of the first and second micrometer correction mirrors.

8. The assembly method according to claim 7, characterized in that, During the assembly of the first and second clamping devices, when the first, second, third, fourth, and fifth flexible hinges are in the balanced position, the jaws of the first and second clamping devices are in the fully open state, and even after the jaws of the first and second clamping devices are fully closed, they do not exceed the travel range of the first, second, third, fourth, and fifth flexible hinges.

9. The assembly method according to claim 7, characterized in that, The opening between the third and fourth top beads is maximized by the elasticity of the fourth flexible hinge, and the third and fourth top beads will not exceed the stroke of the fourth flexible hinge when they are closed.

10. The assembly method according to claim 7, characterized in that, The two second clamping devices are mirror-symmetrical. During assembly, the third and fourth top beads act in the middle of the reflector.

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