A centering method for a centering system

Abstract

The embodiment of the present disclosure provides an optical path fixture, a centering system and a method, and relates to the field of beam centering technology. The specific implementation of the optical path fixture includes: the optical path fixture (100) is used in conjunction with a linear light source (200), and includes a supporting and fixing plate (110) and a light-through plate (120), wherein: a positioning hole (111) is machined on the supporting and fixing plate (110), and a light-through hole (121) is machined on the light-through plate (120), and the light-through hole (121) is a linear hole with the same shape as the light source of the linear light source (200). This implementation can miniaturize and unify various types of traditional fixtures, so that the calibration and centering fixtures are universal fixtures with uniform types and sizes, avoiding bending deformation of the fixtures, reducing fixture costs and system complexity, eliminating cumulative errors of multiple types and sizes, and improving calibration and centering accuracy.

Description

Technical Field

[0001] The present disclosure relates to the technical field of beam centering, and in particular to a centering method for a centering system. Background Art

[0002] In the existing centering process of ion beams, laser beams, electron beams, etc., taking the ion beam of an ion implanter as an example, as shown in Figure 2, the ion implanter includes a reference module 1, an energy module 2, an acceleration module 3 and a mass selection module 4. During injection, the ion beam is transmitted along the center line of 4-3-2-1 (i.e., the optical path). Under ideal conditions, each module itself is in a good horizontal state, strictly aligned and accurately spaced, which can ensure that the ion beam is limited to a two-dimensional plane under the action of the magnetic field and electric field, and is continuously transmitted without loss along the optical path to achieve higher transmission efficiency.

[0003] In order to ensure strict alignment and precise spacing of the modules, the existing alignment system adopts a point light source 5, an optical path correction tool 1 6, an optical path centering tool 1 7, an optical path correction tool 2 8, an optical path centering tool 2 9, a distance fixture 1 10, a distance fixture 2 11, a distance fixture 3 12 and a spirit level. The optical path correction tool is used to correct the light path of the point light source 5, the optical path centering tool is used to correct the alignment between the modules, and each distance fixture is used to adjust the spacing between the modules. The spirit level is used to correct the horizontal state of each module. As shown in Figure 2 (a), the alignment and distance adjustment of the module are adjusted in sequence in the opposite direction of the ion beam transmission, that is, the ion beam is transmitted along the center line of 4-3-2-1, and the alignment system is adjusted in sequence along the center line of 1-2-3-4, thereby realizing the alignment and distance adjustment of each module by the alignment system to ensure that the ion beam is as close as possible to the ideal state of optical path alignment.

[0004] However, on the one hand, the optical path calibration fixture 1 6, optical path centering fixture 1 7, and optical path calibration fixture 2 8, as shown in Figure 2 (b)-(d), are all slender and made of aluminum alloy. The slender structure has poor rigidity, and the tensile and compressive strength of aluminum alloy is relatively low, making the aforementioned fixtures extremely easy to bend and deform, and the calibration accuracy cannot be guaranteed. On the other hand, the fixed-distance fixtures are usually strictly manufactured according to the module spacing, with a small given tolerance range. As a result, the module docking surface is extremely easy to scratch or damage during the spacing adjustment process. In severe cases, the module sealing surface may even be scratched, forcing the module to be repaired. This is not only time-consuming and labor-intensive to adjust, but also increases the module cost. On the other hand, due to the small space of each module, directly observing the level gauge inside the module with the naked eye to judge the module's horizontal state is not only difficult to observe but also has poor accuracy. Finally, the alignment system uses a wide variety of components and sizes, and the point light source has a single dimension. Not only is the alignment system complex and the alignment process cumbersome, but the alignment accuracy is also poor, affecting the subsequent beam propagation. Summary of the Invention

[0005] In view of this, the embodiments of the present disclosure provide an optical path tooling, a centering system and a method, which can solve the problems that traditional proofreading and centering tooling is prone to bending and deformation, and the proofreading accuracy cannot be guaranteed; the fixed-distance tooling is prone to scratching and knocking the module docking surface, and in severe cases, it may even scratch the module sealing surface, forcing the module to be repaired, and the adjustment is time-consuming and labor-intensive, which increases the module cost; the horizontal state is difficult to observe from the naked eye and the accuracy is poor; the centering system uses a wide variety of components and sizes, and the point light source has a single dimension, which makes the centering system complex, the centering process cumbersome, and the centering accuracy is poor, affecting the subsequent beam propagation.

[0006] To achieve the above objectives, according to one aspect of the present disclosure, there is provided an optical path tooling, comprising: a light-transmitting plate, wherein:

[0007] A light-through hole is processed on the light-through plate, and the light-through hole is a rectangular long hole.

[0008] According to another aspect of the present disclosure, there is provided an alignment system, including: an optical path fixture, a linear light source, a level, a distance fixture, and a feeler gauge.

[0009] According to yet another aspect of the present disclosure, a centering method is provided.

[0010] One or more technical solutions provided in the embodiments of the present application, through an optical path tooling including only a light-passing plate and a support portion, wherein the light-passing hole on the light-passing plate is a rectangular long hole, which is used in conjunction with a line light source to align various modules or equipment, can not only unify traditional multi-type and multi-size tooling, avoid cumulative errors of tooling, reduce tooling costs and system complexity, and improve proofreading and alignment accuracy, but also use the line light source as a reference benchmark for the horizontal state, without the need to observe the horizontal state of each module or equipment with the naked eye, making the horizontal state control of the alignment system simple and convenient, and the horizontal state of each module and equipment highly consistent, avoiding cumulative errors of multiple adjustments, simplifying the horizontal state adjustment process, and also improving the technical effect of proofreading and alignment accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Further details, features and advantages of the present disclosure are disclosed in the following description of exemplary embodiments in conjunction with the accompanying drawings, in which:

[0012] Figure 1 shows a front view of an optical path tooling according to an exemplary embodiment of the present disclosure;

[0013] FIG2( a ) shows a schematic diagram of the centering of a conventional ion implanter;

[0014] FIG2( b ) shows the front views of the conventional optical path calibration tool 1, the optical path centering tool 1, and the optical path calibration tool 2;

[0015] FIG2( c ) shows a top view of a conventional optical path calibration tool 1, an optical path centering tool 1, and an optical path calibration tool 2;

[0016] FIG2( d ) shows a side view of a conventional optical path calibration tool 1, an optical path centering tool 1, and an optical path calibration tool 2;

[0017] FIG3( a ) shows a side view of an optical path tooling according to an exemplary embodiment of the present disclosure;

[0018] FIG3( b ) shows a top view of an optical path tooling according to an exemplary embodiment of the present disclosure;

[0019] Figure 4 shows a schematic diagram of a centering system according to an exemplary embodiment of the present disclosure;

[0020] FIG5( a ) shows a front view of a line light source according to an exemplary embodiment of the present disclosure;

[0021] FIG5( b ) shows a top view of a line light source according to an exemplary embodiment of the present disclosure;

[0022] FIG5( c ) shows a front view of a line light source according to another exemplary embodiment of the present disclosure;

[0023] Figure 6 A schematic diagram showing the size parameters of the light through hole on the light through plate of the optical path tooling according to an exemplary embodiment of the present disclosure;

[0024] FIG7( a ) shows a flow chart of a centering method of a centering system according to an exemplary embodiment of the present disclosure;

[0025] FIG7( b ) shows a schematic diagram of an application of a centering method of a centering system according to an exemplary embodiment of the present disclosure;

[0026] FIG7( c ) is a schematic diagram showing the direction of the light path of the line light source according to an exemplary embodiment of the present disclosure;

[0027] FIG8( a ) shows a flow chart of a centering method of a centering system according to another exemplary embodiment of the present disclosure;

[0028] FIG8( b ) is a schematic diagram showing a centering method of a centering system according to an exemplary embodiment of the present disclosure applied to an ion implanter;

[0029] FIG8( c ) is a schematic diagram showing a centering method of a centering system according to another exemplary embodiment of the present disclosure applied to an ion implanter. DETAILED DESCRIPTION

[0030] The following describes embodiments of the present disclosure in more detail with reference to the accompanying drawings. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are for illustrative purposes only and are not intended to limit the scope of protection of the present disclosure.

[0031] It should be understood that the various steps described in the method embodiments of the present disclosure may be performed in different orders and / or in parallel. In addition, the method embodiments may include additional steps and / or omit the steps shown. The scope of the present disclosure is not limited in this respect.

[0032] The term "including" and its variations used in this document are open inclusions, that is, "including but not limited to". The term "based on" means "at least partially based on". The term "in an embodiment of the present disclosure" means "at least one embodiment"; the term "another exemplary embodiment" means "at least one other embodiment". The relevant definitions of other terms will be given in the following description. It should be noted that the concepts of "first", "second", etc. mentioned in this disclosure are only used to distinguish different components, modules or units, and are not used to limit the order or interdependence of the functions performed by these components, modules or units.

[0033] It should be noted that the modifications of "one" and "multiple" mentioned in the present disclosure are illustrative rather than restrictive, and those skilled in the art should understand that unless otherwise clearly indicated in the context, they should be understood as "one or more".

[0034] The existing alignment system, taking the ion implanter as an example, includes the following steps when aligning:

[0035] (1) Adjustment of the horizontal state of reference module 1:

[0036] Arrange two levels orthogonally inside the reference module 1, and continuously adjust the position and height of each corner of the reference module 1 until the horizontal indication states of the two levels are synchronized, and then fix the reference module 1 to achieve the positioning and horizontal state of the reference module 1.

[0037] (2) Light path calibration of point light source 5①:

[0038] As shown in Figure 2 (b)-(d), the optical path calibration fixture 6 is an integrated calibration fixture, including an optical path entrance plate I, an optical path exit plate II and a connecting shaft III. The optical path entrance plate I and the optical path exit plate II are respectively processed with a circular optical path opening IV;

[0039] The optical path calibration fixture 1 6 is installed on the inner cavity reference surface inside the reference module 1 through the connecting shaft III, and then the point light source 5 is placed at position 5①. The vertical height, horizontal position, pitch angle, etc. of the point light source 5 are continuously adjusted until the light path emitted by the point light source 5 enters from the circular optical path opening IV of the optical path entrance plate I of the optical path calibration fixture 1 6 and is emitted from the circular optical path opening IV of the optical path exit plate II of the optical path calibration fixture 1 6. The point light source 5 is fixed to achieve the alignment between the optical path of the point light source 5① and the reference module 1; wherein, the reference surfaces of different modules are determined at the factory, and when arranging the level instrument, tooling, etc., they can be directly placed. For example, the reference module 1 is a hollow cavity with a magnetic pole at the top and bottom, and the inner cavity reference surface of the reference module 1 is the upper surface of the lower magnetic pole;

[0040] (3) Optical path alignment between energy module 2 and reference module 1:

[0041] Optical path centering fixture 7 is also an integrated calibration fixture;

[0042] Arrange two levels orthogonally inside the energy module 2, and install the optical path centering tool 7 on the inclined reference surface inside the energy module 2 on the side close to the reference module 1. Continuously adjust the position and height of each corner of the energy module 2 until the light path transmitted from the reference module 1 enters from the circular optical path opening IV of the optical path entrance plate I of the optical path centering tool 7 and exits from the circular optical path opening IV of the optical path exit plate II of the optical path centering tool 7, and the horizontal indication states of the two levels are synchronized, thereby achieving the horizontal state of the energy module 2 and the optical path alignment of the energy module 2 and the reference module 1;

[0043] (4) Distance between energy module 2 and reference module 1:

[0044] The distance fixture 10 is a handheld fixture in the shape of a Chinese character "𠃍". As shown in FIG2(a), the handheld distance fixture 10 is placed between the energy module 2 and the reference module 1. While maintaining the horizontal state and height of the energy module 2, the energy module 2 is continuously moved until the distance between the energy module 2 and the reference module 1 is within the tolerance margin of the distance fixture 10. The energy module 2 is then fixed to achieve the positioning of the energy module 2 and the precise control of the distance between the energy module 2 and the reference module 1.

[0045] (5) Light path calibration of point light source 5②:

[0046] Optical path calibration tool 2 8 is also an integrated calibration tool;

[0047] Install the optical path calibration fixture 2 8 on the inclined reference surface inside the energy module 2 near the acceleration module 3 via the connecting shaft III, then place the point light source 5 at position 5②, and continuously adjust the vertical height, horizontal position, and pitch angle of the point light source 5 until the light path emitted by the point light source 5 enters from the circular optical path opening IV of the optical path entrance plate I of the optical path calibration fixture 2 8 and exits from the circular optical path opening IV of the optical path exit plate II of the optical path calibration fixture 2 8, then fix the point light source 5 to achieve alignment between the optical path of the point light source 5② and the energy module 2;

[0048] (6) Optical path alignment between acceleration module 3 and energy module 2:

[0049] As shown in FIG2 (a), the optical path centering fixture 2 9 is a split type centering fixture, each centering fixture includes an optical path plate V, and a circular optical path opening IV is processed on the optical path plate V;

[0050] Install the optical path centering tool 2 9 on the external reference surface of the acceleration module 3 through the positioning holes on the optical path plate V, and continuously adjust the position and height of each corner of the acceleration module 3 until the light path transmitted from the energy module 2 enters from the circular optical path opening IV of the optical path plate V of the optical path centering tool 2 9 on the side close to the energy module 2 and exits from the circular optical path opening IV of the optical path plate V of the optical path centering tool 2 9 on the side close to the mass selection module 4, thereby achieving optical path alignment between the acceleration module 3 and the energy module 2;

[0051] (7) Distance between acceleration module 3 and energy module 2:

[0052] The second distance fixture 11 is a handheld fixture, as shown in FIG2 (a). The handheld distance fixture 11 is placed between the acceleration module 3 and the energy module 2. While maintaining the height of the acceleration module 3, the acceleration module 3 is continuously moved until the distance between the acceleration module 3 and the energy module 2 is within the tolerance margin of the distance fixture 11. The acceleration module 3 is then fixed to achieve the positioning of the acceleration module 3 and the precise control of the distance between the acceleration module 3 and the energy module 2.

[0053] (8) Optical path alignment between mass selection module 4 and acceleration module 3:

[0054] Arrange two levels orthogonally inside the quality selection module 4, and install the optical path centering tool 2 9 on the external reference surface of the quality selection module 4 through the positioning holes on the optical path plate V. Continuously adjust the position and height of each corner of the quality selection module 4 until the light path transmitted from the acceleration module 3 enters from the circular optical path opening IV of the optical path plate V of the optical path centering tool 2 9 on the side close to the acceleration module 3 and exits from the circular optical path opening IV of the optical path plate V of the optical path centering tool 2 9 on the side away from the acceleration module, and the horizontal indication states of the two levels are synchronized, thereby achieving the horizontal state of the quality selection module 4 and the optical path alignment of the quality selection module 4 and the acceleration module 3;

[0055] (9) Distance between mass selection module 4 and acceleration module 3:

[0056] The third distance fixture 12 is a handheld fixture, as shown in Figure 2 (a). The handheld distance fixture 3 12 is placed between the quality selection module 4 and the acceleration module 3. While maintaining the horizontal state and height of the quality selection module 4, the quality selection module 4 is continuously moved until the distance between the quality selection module 4 and the acceleration module 3 is within the tolerance margin of the second distance fixture 11. The quality selection module 4 is fixed to achieve the positioning of the quality selection module 4 and the precise control of the distance between the quality selection module 4 and the acceleration module 3.

[0057] In summary, the existing alignment system completes the optical path alignment of the point light source, indicating that the optical path of the point light source coincides with the optical path of the beam transmission, and the beam can be transmitted continuously along the optical path without loss. It should be noted that steps (1)-(9) are only for the optical path alignment of the existing ion implanter. Since the reference module 1, energy module 2 and mass selection module 4 of the ion implanter are all hollow cavities, which include multiple magnetic poles inside. The direction of the optical path is controlled by the magnetic field of the magnetic poles, so horizontal state adjustment is required. The acceleration module 3 has a different structure from the other three modules and does not need to be adjusted horizontally. For various beam alignments in actual alignment scenarios, according to the type of beam, different application scenarios, and equipment structure, those skilled in the art can select appropriate alignment systems and alignment methods for various beams as needed, rather than being limited to steps (1)-(9).

[0058] However, in order to ensure that each module is strictly aligned, the existing alignment system requires that the distance between the optical path entrance plate I and the optical path exit plate II of the optical path correction tool 6, the optical path centering tool 1 7, and the optical path correction tool 2 8 should be as close as possible to the dimensions of the installation position of the reference module 1 and the energy module 2, and the straightness should be as high as possible. On the one hand, due to the slender structure and aluminum alloy material, the one-piece tool is extremely easy to bend and deform, resulting in low alignment accuracy; on the other hand, in order to simulate the real optical path as much as possible, the sizes of the optical path correction tool 6, the optical path centering tool 1 7, and the optical path correction tool 2 8 are different, resulting in a large number of component types and sizes in the alignment system. While the system complexity is too high, the cumulative errors of multiple components further reduce the alignment accuracy.

[0059] In order to ensure that each module is in a good level state, the existing centering system needs to adjust the level state of each module using a spirit level. Although the reference module 1, energy module 2 and mass selection module 4 are made of transparent materials, the space is small. It is difficult to directly observe the indication of the spirit level on the reference surface with the naked eye to judge the level state of the module, which is difficult to observe and has poor accuracy.

[0060] In order to ensure the precise spacing between modules in the existing alignment system, the spacing tooling is usually strictly manufactured according to the module spacing, with a small given tolerance range. During adjustment, it is often pressed tightly against the mating surfaces between modules, which makes it easy to over-adjust the spacing and difficult to remove. The adjustment and removal process often results in scratches and bumps on the module mating surfaces. In severe cases, the module sealing surface may even be scratched, forcing the module to be repaired. Not only is the adjustment time-consuming and labor-intensive, and the accuracy is difficult to guarantee, but it also increases the module cost.

[0061] In summary, the existing alignment system has a complex structure and cumbersome process, and the alignment error is too high and the alignment accuracy is poor. As a result, it cannot guarantee that the beam can be transmitted continuously along the optical path without loss during the subsequent actual transmission process, resulting in low transmission efficiency.

[0062] In the embodiments disclosed herein, the optical path tooling, centering system and method disclosed herein can not only unify the traditional multi-type and multi-size tooling, realize universal tooling, avoid cumulative errors of tooling, reduce tooling costs and system complexity, and improve proofreading and centering accuracy, but also use a line light source as a reference for the horizontal state, eliminating the need to visually observe the horizontal state of each module or device, making the horizontal state control of the centering system simple and convenient, and the horizontal state consistency of each module and device strong, avoiding cumulative errors of multiple adjustments, simplifying the horizontal state adjustment process, and also improving proofreading and centering accuracy. Furthermore, the spacing between modules or devices is adjusted using a combination of a distance tooling and a feeler gauge, which will not scratch or knock the mating surface, let alone the sealing surface, further reducing adjustment costs and maintenance costs, and improving proofreading and centering accuracy.

[0063] Aspects of the present disclosure are described below with reference to the accompanying drawings.

[0064] Figure 1 Schematic diagram of an optical path tooling according to an exemplary embodiment of the present disclosure is shown as follows: Figure 1 As shown, the optical path tooling 100 of the present disclosure includes a light-transmitting plate, wherein:

[0065] A light-through hole 111 is formed on the light-through plate 110 , and the light-through hole 111 is a rectangular long hole.

[0066] Furthermore, the optical path fixture 100 further includes a support portion 120 , as shown in FIG. 3 ( a ) and FIG. 3 ( b ). A positioning hole 121 is machined on the support portion 120 for cooperating with a positioning pin to fix the optical path fixture 100 .

[0067] Furthermore, the positioning holes 121 of the support portion 120 are used to cooperate with positioning pins provided on the reference surface of each module or device to fix the optical path tooling 100 .

[0068] In the embodiment of the present disclosure, the optical path tooling of the present disclosure can unify the various traditional optical path calibration tooling and optical path centering tooling of different types, and there is no need to distinguish between calibration tooling or centering tooling, so that the tooling used for light source calibration and centering of various modules or equipment is a universal tooling. Not only are the traditional optical path calibration tooling 16, optical path centering tooling 17, and optical path calibration tooling 28 miniaturized, but the types and sizes are also unified, which greatly reduces the tooling cost and system complexity, and improves the accuracy of calibration and centering. Moreover, since there are no longer slender connecting parts such as connecting shafts or connecting rods, bending deformation of the tooling is avoided, and even long-term use will not affect the calibration and centering accuracy, thereby avoiding the cumulative errors of various types and sizes, and also improving the accuracy of calibration and centering.

[0069] Figure 4 A schematic diagram of a centering system according to an exemplary embodiment of the present disclosure is shown. Figure 4 As shown, the centering system 1000 of the present disclosure includes an optical path tool 100, a linear light source 200, a level 300, a distance tool 400 and a feeler gauge 500, wherein:

[0070] The number of optical path fixtures 100 can be selectively set according to the actual beam module or beam device. The optical path fixtures 100 are used in pairs on each module or device to align the optical path of each module or device, thereby achieving the centering of the beam path of each module or device to reduce the transmission loss of the beam and improve the transmission efficiency. The line light source 200 is used in conjunction with the level 300 to ensure that the line light source 200 is a horizontal line light source. The distance fixture 400 and the feeler gauge 500 are used in conjunction to accurately control the spacing between each module or device. Among them, the type of the level 300 can be selectively set as needed. For example, the level 300 is a digital level or a bubble level.

[0071] Furthermore, as shown in Figures 5(a) and 5(b), the shape of the light hole 121 on the light-through plate 110 of the optical path fixture 100 is the same as the light source shape of the line light source 200, that is, the line light source 200 is a rectangular line light source, and the light hole 111 is a rectangular long hole. It should be noted that the light source shape and light source size of the line light source 200 can be selectively set as needed, as long as the light emitted by the line light source 200 is linear light. For example, the light source shape of the line light source 200 is a bar as shown in Figure 5(c), and accordingly, the light hole 111 is a bar hole; the horizontal width W of the line light source 200 l As shown in Figure 5(b), W = 15 mm.

[0072] Furthermore, in order to ensure the centering accuracy of the beam path and improve the beam transmission efficiency, the horizontal width of the line light source 200 is set to be larger than the beam width of the beam, the horizontal width W of the line light source 200 l Greater than the horizontal width W of the optical through hole 111 h For example, the horizontal width W of the linear light source 200 is 15 mm, and the horizontal width W of the light hole 111 is h and vertical height H h like Figure 6 As shown, the horizontal width W of the optical through hole 111 is h It is 10mm, or 12mm, etc.

[0073] In addition, the vertical height H of the optical through hole 111 is h It can be selectively set according to the centering accuracy, adjustment difficulty, etc. For example, the vertical height H of the optical through hole 111 h like Figure 6 As shown, the vertical height H of the light hole 111 h It can be 1mm, 2mm, 3mm, 4mm, 5mm, etc.

[0074] In the embodiment of the present disclosure, the centering system of the present disclosure can not only unify the traditional multi-type and multi-size tooling, realize the universality of tooling, avoid the cumulative error of tooling, reduce the tooling cost and system complexity, and improve the accuracy of proofreading and centering, but also use the line light source as the reference benchmark for the horizontal state, without the need to observe the horizontal state of each module or equipment with the naked eye, so that the horizontal state control of the centering system is simple and convenient, and the horizontal state of each module and equipment is highly consistent, avoiding the cumulative error of multiple adjustments, simplifying the horizontal state adjustment process, and also improving the accuracy of proofreading and centering. Furthermore, the combination of fixed-distance tooling and feeler gauges to adjust the spacing between modules or equipment will not scratch or knock the docking surface, let alone the sealing surface, further reducing the adjustment cost and maintenance cost, and improving the accuracy of proofreading and centering.

[0075] FIG7( a ) shows a flow chart of a centering method of a centering system according to a first exemplary embodiment of the present disclosure. As shown in FIG7( a ), the centering method of the centering system according to the first exemplary embodiment of the present disclosure includes the following steps:

[0076] In the embodiment of the present disclosure, the centering method of the centering system of the present disclosure is described by taking the centering of the line light source 200 , the first module 600 and the second module 700 as shown in FIG7( b ) as an example.

[0077] Step 701: Install one optical path tooling at the first entrance and the first exit of the first module respectively.

[0078] In the disclosed embodiment, the inner cavity reference surface of the first module 600 is provided with positioning pins with pre-precisely calculated positioning positions. The positioning holes 121 of the optical path fixture 100 engage with the positioning pins on the inner cavity reference surface to secure the optical path fixture 100 to the first module 600. Compared to the traditional optical path calibration fixture 6, the optical path fixture 100 is a universal component, which is not only low-cost, but also has accuracy that does not decrease with long-term use, thus ensuring centering accuracy.

[0079] Furthermore, positioning pins are respectively provided at positions near the first entrance 610 and the first exit 620 of the inner cavity reference surface of the first module 600, and the positioning holes 121 of a pair of optical path tooling 100 are respectively engaged with the positioning pins near the first entrance 610 and the first exit 620 on the inner cavity reference surface of the first module 600, thereby fixing the pair of optical path tooling 100 and the first module 600.

[0080] Furthermore, before installing the optical path tooling for the first module, the ground corners of the first module 600 can be placed at positions corresponding to the positioning marks according to the ground positioning marks.

[0081] Step 702 : along the light path of the line light source, fix two levels in the path direction and path normal of the light path, respectively, and adjust the line light source until the two levels are in a horizontal state.

[0082] In the embodiment of the present disclosure, the path direction and path normal of the light source light path are shown in FIG7( c ), that is, within the plane of the light emitted by the linear light source 200 , the direction along the light emission direction is the path direction, and the direction perpendicular to the light emission direction is the path normal.

[0083] Furthermore, in step 702, when the level 300 and the line light source 200 are separately provided, the two levels 300 are arranged orthogonally on the line light source 200 in accordance with the path direction and the path normal. The two levels 300 are used to indicate the horizontality of the path direction and the path normal of the light source light path, respectively. The vertical height, horizontal position, pitch angle, etc. of the line light source 200 are continuously adjusted until both levels 300 are level on the horizontal reference surface of the line light source 200. Thus, the leveling of the line light source 200 is adjusted. The light path emitted by the line light source 200 has good linearity and high levelness, which can serve as a reference for leveling and can be used to verify the levelness of various modules or devices. Accordingly, each module or device no longer needs to use a level to adjust its levelness. In other words, it is no longer necessary to place a level inside each module or device and observe it with the naked eye. The levelness of each module or device can be determined by simply aligning the light path of the line light source 200. Compared with the traditional level observation and adjustment of multiple modules or devices, the horizontal control of the line light source 200 is simple and easy, which reduces the difficulty of adjusting the horizontal state of the entire beam system. Moreover, since only the line light source 200 is used as the horizontal reference, the horizontal reference of each module or device is unique, which can ensure the consistency of the horizontal state of each module or device, and improve the stability and accuracy of the horizontal state of the entire beam system. At the same time, by reducing the adjustment steps of the horizontal state of multiple modules or devices, the beam centering process is simplified, and the error accumulation of the horizontal state adjustment is reduced, thereby improving the centering efficiency and centering accuracy.

[0084] Furthermore, alternatively, two levels 300 may be arranged orthogonally on the horizontal reference plane of the line light source 200 according to the path direction and the path normal.

[0085] It should be noted that the spirit level 300 and the line light source 200 can also be set as an integral whole. Accordingly, during manufacturing, two orthogonally arranged spirit levels 300 can be directly embedded in the line light source 200. Thus, by directly adjusting the vertical height, horizontal position, pitch angle, etc. of the line light source 200 and observing the horizontal state of the two spirit levels 300 in the line light source 200, the horizontal state of the line light source 200 can be adjusted. Accordingly, step 702 can also be "continuously adjusting the line light source until the two spirit levels are in a horizontal state."

[0086] Step 703 : adjusting the line light source according to the position deviation between the light path of the light source and the light through hole on the light path fixture at the first entrance, until the light path of the light source passes through the light through hole on the light path fixture at the first entrance.

[0087] In the embodiment of the present disclosure, while maintaining the horizontal state of the line light source 200, the height and left and right position along the optical path plane of the line light source 200 are continued to be adjusted according to the height deviation and horizontal deviation between the light path of the line light source 200 and the light hole 111 on the optical path fixture 100 at the first entrance 610, until the light path of the light source passes through the light hole 111 on the optical path fixture 100 at the first entrance 610, so that the height of the light path plane and the light hole 111 on the optical path fixture 100 at the first entrance 610 are approximately the same, and the light path of the light source can pass through the light hole 111 on the optical path fixture 100 at the first entrance 610 to facilitate subsequent centering.

[0088] Step 704 : Adjust the first module according to the projected angle between the light path of the light source and the light through hole on the light path fixture at the first entrance, until the light path of the light source is parallel to the light through hole on the light path fixture at the first entrance.

[0089] In the embodiment of the present disclosure, after the adjustment in step 704 , the line light source 200 serves as both a horizontal reference for the entire centering system and a path reference for light propagation. Therefore, the first module 600 is adjusted based on the line light source 200 .

[0090] Furthermore, since the light path of the line light source 200 after the adjustment in step 703 is not necessarily exactly horizontal with respect to the light hole 111 on the optical path fixture 100 at the first entrance 610, the two may be tilted. Therefore, in order to ensure the horizontal state of the first module 600, the height of each corner of the first module 600 is adjusted according to the angle between the light path of the light source and the light hole 111 on the optical path fixture 100 at the first entrance 610, until the light hole 111 on the optical path fixture 100 at the first entrance 610 is parallel to the light path of the light source, thereby realizing the adjustment of the horizontal state of the first module 600 and fixing the various corners of the first module 600. Accordingly, the first module 600 is in a horizontal state.

[0091] Step 705 : re-adjust the line light source according to the position deviation between the light path of the light source and the light through hole on the light path fixture at the first entrance, until the light path of the light source is aligned with the light through hole on the light path fixture at the first entrance.

[0092] In the embodiment of the present disclosure, after adjustment in step 704, although the light through hole 111 on the optical path fixture 100 of the first entrance 610 and the light path of the line light source 200 are parallel, the projection of the light path of the light source on the light-passing plate 110 of the optical path fixture 100 at the first entrance 610 may not be uniform, and the up and down distribution and left and right distribution along the light through hole 111 are unbalanced. Therefore, in order to ensure the uniformity of the light path of the light source and to improve the accuracy of subsequent centering, after fixing the first module 600, the line light source 200 is adjusted again according to the height deviation and horizontal deviation between the light path of the light source and the light through hole 111 on the optical path fixture 100 at the first entrance 610, until the light path of the light source is aligned with the light through hole 111 on the optical path fixture 100 at the first entrance 610.

[0093] Furthermore, after the optical path of the light source is aligned with the light through hole on the optical path fixture at the first entrance, the line light source 200 is fixed.

[0094] Step 706 : Adjust the line light source and the first module according to the position deviation between the light path of the light source and the light through hole on the light path fixture at the first outlet until the light path of the light source is aligned with the light through hole on the light path fixture at the first outlet.

[0095] It should be noted that after step 705 is completed, since the positions of the locating pins of each module or device are precisely calculated, the optical path fixture 100 at the module or device entrance is usually automatically centered after the optical path fixture 100 at the module or device exit. In other words, it is unlikely that the light path of the light source will deviate significantly from the optical path fixture 100 at the exit, and step 706 is not required. However, to further ensure the centering accuracy, step 706 can be continued after the optical path fixture 100 at the first entrance 610 and the light path light source are centered. Based on whether there is a positional deviation between the light path of the light source and the light through hole 111 on the optical path fixture 100 at the first exit 620, it is determined whether to adjust the line light source again. Accordingly, the first module 600 is not fixed in step 704, and the line light source 200 is not fixed in step 705. However, the first module 600 and the line light source 200 are fixed after step 706.

[0096] Regarding step 706, in the embodiment of the present disclosure, when there is a positional deviation between the light path of the light source and the light through hole 111 on the light path fixture 100 at the first exit 620, the line light source 200 and the first module 600 are fine-tuned, that is, the line light source 200 and the first module 600 only need to be fine-tuned to achieve the centering of the light path of the light source and the light through hole 111 of the light path fixture 100 at the first exit 620 while ensuring that the light path of the light source and the light path fixture 100 at the first entrance 610 are aligned.

[0097] Furthermore, after the light path of the light source is aligned with the light path fixture 100 at the first outlet 620 , the first module 600 and the linear light source 200 are fixed.

[0098] Step 707 : Install one optical path fixture at the second entrance and the second exit of the second module respectively.

[0099] In the disclosed embodiment, the inner cavity reference surface of the second module 700 is provided with positioning pins with pre-precisely calculated positions. The positioning holes 121 of the optical path fixture 100 engage with the positioning pins on the inner cavity reference surface to secure the optical path fixture 100 to the second module 700. Compared to the traditional optical path alignment fixture 7, the optical path fixture 100 is a universal component, low in cost, and can ensure alignment accuracy.

[0100] Furthermore, positioning pins are respectively provided at positions near the second entrance 710 and the second exit 720 of the inner cavity reference surface of the second module 700, and the positioning holes 121 of a pair of optical path tooling 100 are respectively engaged with the positioning pins near the second entrance 710 and the second exit 720 on the inner cavity reference surface of the second module 700, thereby fixing the pair of optical path tooling 100 and the second module 700.

[0101] Furthermore, before installing the optical path tooling for the second module, the ground corners of the second module 700 can be placed at positions corresponding to the positioning marks according to the ground positioning marks.

[0102] Step 708: Adjust the second module according to the projection angle and position deviation between the light path of the light source and the light holes on the light path tooling at the second entrance and the second exit of the second module until the light path of the light source is aligned with the light holes on the light path tooling at the second entrance and the second exit.

[0103] In the disclosed embodiment, the second module 700 is adjusted based on the included angle between the projection of the light path of the light source on the light-passing plate 110 of the optical path fixture 100 at the second entrance 710 and the second exit 720 and the light through hole 111, as well as the height deviation and horizontal deviation between the light path of the light source and the light through hole 111 on the optical path fixture 100 at the second entrance 710 and the second exit 720 until the light path of the light source is aligned with the light through hole 111 on the optical path fixture 100 at the second entrance 710 and the second exit 720. Thus, the horizontal state of the second module 700 and the alignment between the second module 700 and the first module 600 are completed.

[0104] Step 709: continuously adjust the distance between the second module and the first module, measure using the distance fixture and the feeler gauge, and fix the second module after the distance between the second module and the first module is within the tolerance range of the first spacing.

[0105] In the embodiment of the present disclosure, the second module 700 is adjusted, and the distance between the second module 700 and the first module 600 is measured using a distance fixture 400 and a feeler gauge 500 until the distance between the second module 700 and the first module 600 meets the tolerance requirement of the first distance. The distance fixture 400 has a tool size smaller than the first distance. By using a distance fixture 400 and a feeler gauge 500 to measure the distance between the second module 700 and the first module 600, compared to the conventional method of directly using a distance fixture equal to the module distance, the distance fixture will not be pressed tightly against the mating surface between the modules. Therefore, during the adjustment and removal process, the mating surface will not be scratched or damaged, and the module sealing surface will not be scratched. This not only reduces the adjustment and maintenance costs, but also ensures the adjustment accuracy and avoids the occurrence of phenomena such as excessive adjustment.

[0106] Furthermore, after the distance between the second module and the first module is adjusted to be within the tolerance range of the first spacing, the second module 700 is fixed.

[0107] FIG8( a ) shows a schematic diagram of a centering method of a centering system according to a second exemplary embodiment of the present disclosure. As shown in FIG8( a ), the centering method of the centering system according to the second exemplary embodiment of the present disclosure includes the following steps:

[0108] In the embodiment of the present disclosure, the centering method of the centering system of the second embodiment of the present disclosure can be applied to the ion implanter as shown in FIG8( b ), which includes a reference module 1 , an energy module 2 , an acceleration module 3 and a mass selection module 4 .

[0109] Step 801 : Install one optical path fixture at the third inlet and the third outlet of the reference module respectively.

[0110] In the embodiment of the present disclosure, the installation of the optical path fixture of the reference module is the same as that of the first module 600, as detailed in step 701, which will not be repeated here.

[0111] Step 802: Place the line light source at a first light position, fix two levels along the light path of the line light source in the path direction and path normal of the light path, and adjust the line light source until the two levels are in a horizontal state.

[0112] In the embodiment of the present disclosure, since the centering system of the ion implanter needs to be aligned twice, the placement position of the line light source is different each time. Therefore, the line light source 200 is first placed at the first light position 200①, and the remaining steps 802 are the same as step 702 and will not be repeated here.

[0113] Step 803 : adjusting the line light source according to the position deviation between the light path of the light source and the light through hole on the light path fixture at the third entrance, until the light path of the light source passes through the light through hole on the light path fixture at the third entrance.

[0114] In the embodiment of the present disclosure, step 803 is the same as step 703 and will not be described again here.

[0115] Step 804 : adjusting the reference module according to the projection angle between the light path of the light source and the light through hole on the light path fixture at the third entrance, until the light path of the light source is parallel to the light through hole on the light path fixture at the third entrance.

[0116] In the embodiment of the present disclosure, step 804 is the same as step 704 and will not be described again here.

[0117] Step 805 , re-adjust the line light source according to the position deviation between the light path of the light source and the light through hole on the light path fixture at the third entrance, until the light path of the light source is aligned with the light through hole on the light path fixture at the third entrance.

[0118] In the embodiment of the present disclosure, step 805 is the same as step 705 and will not be described again here.

[0119] Step 806 : Adjust the line light source and the first module according to the position deviation between the light path of the light source and the light through hole on the light path fixture at the third exit, until the light path of the light source is aligned with the light through hole on the light path fixture at the third exit.

[0120] In the embodiment of the present disclosure, step 806 is the same as step 706 and will not be described again here.

[0121] In step 807 , one optical path fixture is installed at the fourth entrance and the fourth exit of the inclined reference surface of the energy module close to the reference module, and at the fifth entrance and the fifth exit of the inclined reference surface close to the acceleration module.

[0122] In the embodiment of the present disclosure, positioning pins with pre-precisely calculated positioning positions are provided on the inclined reference surfaces on both sides of the inner cavity of the energy module 2. The positioning holes 121 of the optical path tooling 100 are engaged with the positioning pins on the inclined reference surfaces to achieve the fixation of the optical path tooling 100 and the energy module 2.

[0123] Furthermore, the inclined reference surface of the energy module 2 close to the reference module 1 is provided with positioning pins at positions close to the fourth entrance 21 and the fourth exit 22, and the inclined reference surface close to the acceleration module 3 is provided with positioning pins at positions close to the fifth entrance 23 and the fifth exit 24, respectively. The positioning holes 121 of a pair of optical path tooling 100 are respectively engaged with the positioning pins close to the fourth entrance 21, the fourth exit 22, the fifth entrance 23, and the fifth exit 24, so as to fix a pair of optical path tooling 100 and the energy module 2.

[0124] Furthermore, before installing the optical path tooling for the energy module 2, the ground corners of the energy module 2 can be placed at the positions of the corresponding positioning marks according to the ground positioning marks.

[0125] Step 808, adjust the energy module according to the projection angle and position deviation between the light path of the light source and the light holes on the light path tooling at the fourth entrance and the fourth exit, until the light path of the light source is aligned with the light holes on the light path tooling at the fourth entrance and the fourth exit.

[0126] In the embodiment of the present disclosure, step 808 is the same as step 708 and will not be repeated here.

[0127] Step 809 , continuously adjusting the distance between the energy module and the reference module, measuring using the distance fixture and the feeler gauge, and fixing the energy module after the distance between the energy module and the reference module is within the tolerance range of the second spacing.

[0128] In the embodiment of the present disclosure, step 809 is the same as step 709 and will not be repeated here.

[0129] Step 810: Place the line light source at a second light position, fix two levels along the light path of the line light source in the path direction and path normal of the light path, and adjust the line light source until the two levels are in a horizontal state.

[0130] In the embodiment of the present disclosure, the line light source 200 is placed at the second light position 200②, and the remaining steps 810 are the same as step 702, which will not be repeated here.

[0131] Step 811, adjust the line light source according to the projection angle and position deviation between the light path of the light source and the light through holes on the light path tooling at the fifth entrance and the fifth exit, until the light path of the light source is aligned with the light through holes on the light path tooling at the fifth entrance and the fifth exit, and fix the line light source.

[0132] In the embodiment of the present disclosure, since the energy module 2 has been fixed after the adjustment in step 809 is completed, the energy module 2 is not only in a horizontal state, but also the right inclined section is aligned with the reference module 1. Therefore, after the line light source 200 is placed in the second light position 200②, only the line light source 200 is adjusted. While the line light source 200 remains in a horizontal state, the line light source 200 is continuously adjusted so that the light path of the line light source 200 is aligned with the light through hole 111 on the light path tooling 100 at the fifth entrance 23 and the fifth exit 24, so that the left inclined section of the energy module 2 is aligned with the line light source 200.

[0133] Furthermore, after the left inclined section of the energy module 2 is aligned with the linear light source 200 , the linear light source 200 is fixed.

[0134] Step 812: Install one optical path fixture at the sixth inlet and the sixth outlet of the acceleration module respectively.

[0135] In the disclosed embodiment, a positioning pin with a pre-precisely calculated positioning position is provided on the external reference surface of the acceleration module 3, and the positioning hole 121 of the optical path tooling 100 is engaged with the positioning pin on the external reference surface to achieve the fixation of the optical path tooling 100 and the acceleration module 3.

[0136] Furthermore, the external reference surface of the acceleration module 3 is provided with positioning pins at positions close to the sixth entrance 31 and the sixth exit 32, and the positioning holes 121 of a pair of optical path tooling 100 are respectively engaged with the positioning pins close to the sixth entrance 31 and the sixth exit 32, thereby fixing the pair of optical path tooling 100 and the acceleration module 3.

[0137] Furthermore, before installing the optical path fixture for the acceleration module 3 , the ground corners of the acceleration module 3 can be placed at positions corresponding to the positioning marks according to the ground positioning marks.

[0138] Step 813: Adjust the acceleration module according to the projection angle and position deviation between the light path of the light source and the light holes on the light path tooling at the sixth entrance and the sixth exit, until the light path of the light source is aligned with the light holes on the light path tooling at the sixth entrance and the sixth exit.

[0139] In the embodiment of the present disclosure, step 813 is the same as step 708 and will not be repeated here.

[0140] Step 814: continuously adjust the distance between the acceleration module and the energy module, measure using the distance fixture and the feeler gauge, and fix the acceleration module after the distance between the acceleration module and the energy module is within the tolerance range of the third spacing.

[0141] In the embodiment of the present disclosure, step 814 is the same as step 709 and will not be repeated here.

[0142] It should be noted that the centering fixture of the acceleration module 3 may not use the optical path fixture 100 disclosed in the present invention, but may still use the traditional optical path centering fixture 9 to fully utilize the old components, as shown in FIG8( c ).

[0143] Step 815 , installing one optical path fixture at the seventh inlet and the seventh outlet of the mass selection module respectively.

[0144] In the embodiment of the present disclosure, a positioning pin with a pre-precisely calculated positioning position is provided on the inner cavity reference surface of the mass selection module 4, and the positioning hole 121 of the optical path tooling 100 is engaged with the positioning pin on the inner cavity reference surface to achieve the fixation of the optical path tooling 100 and the mass selection module 4.

[0145] Furthermore, positioning pins are provided on the external cavity reference surface of the mass selection module 4 at positions close to the seventh entrance 41 and the seventh exit 42, respectively. The positioning holes 121 of a pair of optical path tooling 100 are respectively engaged with the positioning pins close to the seventh entrance 41 and the seventh exit 42, thereby fixing the pair of optical path tooling 100 and the mass selection module 4.

[0146] Furthermore, before installing the optical path fixture for the mass selection module 4 , the ground corner of the acceleration module 3 can be placed at the position of the corresponding positioning mark according to the ground positioning mark.

[0147] Step 816, adjust the quality selection module according to the projection angle and position deviation between the light path of the light source and the light holes on the light path tooling at the seventh entrance and the seventh exit, until the light path of the light source is aligned with the light holes on the light path tooling at the seventh entrance and the seventh exit.

[0148] In the embodiment of the present disclosure, step 816 is the same as step 708 and will not be repeated here.

[0149] Step 817: continuously adjust the distance between the mass selection module and the acceleration module, use the distance fixture and the feeler gauge to measure, and fix the mass selection module after the distance between the mass selection module and the acceleration module is within the tolerance range of the fourth spacing.

[0150] In the embodiment of the present disclosure, step 817 is the same as step 709 and will not be repeated here.

[0151] It should be noted that the centering tooling of the mass selection module 4 may not adopt the optical path tooling 100 disclosed in the present invention, but may still use the traditional optical path centering tooling 9 to fully utilize the old components, as shown in FIG8( c ).

[0152] In the embodiment of the present disclosure, the centering method of the present disclosure can not only unify the traditional multi-type and multi-size tooling, realize the universality of tooling, avoid the cumulative error of tooling, reduce the tooling cost and system complexity, and improve the accuracy of proofreading and centering, but also use the line light source as the reference benchmark for the horizontal state, without the need to observe the horizontal state of each module or device with the naked eye, so that the horizontal state control of the centering system is simple and convenient, and the horizontal state of each module and device is highly consistent, avoiding the cumulative error of multiple adjustments, simplifying the horizontal state adjustment process, and also improving the accuracy of proofreading and centering. Moreover, the combination of fixed-distance tooling and feeler gauges to adjust the spacing between modules or devices will not scratch or knock the docking surface, let alone the sealing surface, further reducing the adjustment cost and maintenance cost, and improving the accuracy of proofreading and centering.

Claims

1. A centering method for a centering system, used for centering a linear light source, a first module, and a second module, characterized in that: The centering system includes an optical path fixture, a linear light source, a level, a distance fixture and a feeler gauge. The optical path fixture includes a light-through plate, wherein: the light-through plate is processed with a light-through hole, and the light-through hole is a rectangular long hole. The optical path fixture also includes a support portion, and the support portion is processed with a positioning hole for cooperating with a positioning pin to fix the optical path fixture; The light through hole has the same light source shape as the linear light source, and the horizontal width of the linear light source is greater than the horizontal width of the light through hole. The level and the line light source are separately provided, or the level and the line light source are integrated; The centering method includes: Installing one optical path tooling at the first entrance and the first exit of the first module respectively; Along the light path of the linear light source, two levels are fixed in the path direction and path normal of the light path, respectively, and the linear light source is adjusted until the two levels are in a horizontal state; According to the positional deviation between the light path of the light source and the light through hole on the light path fixture at the first entrance, adjusting the line light source until the light path of the light source passes through the light through hole on the light path fixture at the first entrance; Adjusting the first module according to a projection angle between the light path of the light source and the light through hole on the light path fixture at the first entrance until the light path of the light source is parallel to the light through hole on the light path fixture at the first entrance; Re-adjusting the line light source according to the positional deviation between the light path of the light source and the light through hole on the light path fixture at the first entrance until the light path of the light source is aligned with the light through hole on the light path fixture at the first entrance; According to the positional deviation between the optical path of the light source and the light through hole on the optical path fixture at the first outlet, adjust the line light source and the first module until the optical path of the light source is aligned with the light through hole on the optical path fixture at the first outlet, and fix the first module and the line light source; Install one optical path tooling at the second entrance and the second exit of the second module respectively; Adjust the second module according to the projection angle and position deviation between the light path of the light source and the light through holes on the light path fixtures at the second entrance and the second exit of the second module until the light path of the light source is aligned with the light through holes on the light path fixtures at the second entrance and the second exit; The distance between the second module and the first module is continuously adjusted, and the distance fixture and the feeler gauge are used for measurement. After the distance between the second module and the first module is within the tolerance range of the first spacing, the second module is fixed.

2. A centering method for a centering system, used for centering a linear light source, a first module, and a second module, characterized in that: The centering system includes an optical path fixture, a linear light source, a level, a distance fixture and a feeler gauge. The optical path fixture includes a light-through plate, wherein: the light-through plate is processed with a light-through hole, and the light-through hole is a rectangular long hole. The optical path fixture also includes a support portion, and the support portion is processed with a positioning hole for cooperating with a positioning pin to fix the optical path fixture; The light through hole has the same light source shape as the linear light source, and the horizontal width of the linear light source is greater than the horizontal width of the light through hole. The level and the line light source are separately provided, or the level and the line light source are integrated; The ion implanter includes a reference module, an energy module, an acceleration module and a mass selection module, and one optical path tooling is installed at the third inlet and the third outlet of the reference module respectively; Place the line light source at a first light position, fix two levels along the light path of the line light source in the path direction and path normal of the light path, and adjust the line light source until the two levels are in a horizontal state; According to the positional deviation between the light path of the light source and the light through hole on the light path fixture at the third entrance, adjusting the line light source until the light path of the light source passes through the light through hole on the light path fixture at the third entrance; Adjusting the reference module according to a projection angle between the light path of the light source and the light through hole on the light path fixture at the third entrance until the light path of the light source is parallel to the light through hole on the light path fixture at the third entrance; Re-adjusting the line light source according to the position deviation between the light path of the light source and the light through hole on the light path tooling at the third entrance until the light path of the light source is aligned with the light through hole on the light path tooling at the third entrance; According to the positional deviation between the optical path of the light source and the light through hole on the optical path tooling at the third exit, adjusting the line light source and the first module until the optical path of the light source is aligned with the light through hole on the optical path tooling at the third exit; Installing one optical path fixture respectively at the fourth entrance and the fourth exit of the inclined reference surface of the energy module close to the reference module, and at the fifth entrance and the fifth exit of the inclined reference surface close to the acceleration module; Adjusting the energy module according to the projection angle and position deviation between the light path of the light source and the light through holes on the light path fixtures at the fourth entrance and the fourth exit until the light path of the light source is aligned with the light through holes on the light path fixtures at the fourth entrance and the fourth exit; Continuously adjusting the distance between the energy module and the reference module, measuring using the distance fixture and the feeler gauge, and fixing the energy module after the distance between the energy module and the reference module is within a tolerance range of a second spacing; Place the line light source at the second light position, fix two levels along the light path of the line light source in the path direction and path normal of the light path, and adjust the line light source until the two levels are in a horizontal state; According to the projection angle and position deviation between the light path of the light source and the light through holes on the light path fixtures at the fifth entrance and the fifth exit, adjust the line light source until the light path of the light source is aligned with the light through holes on the light path fixtures at the fifth entrance and the fifth exit, and fix the line light source; Installing one optical path tooling at the sixth entrance and the sixth exit of the acceleration module respectively; Adjust the acceleration module according to the projection angle and position deviation between the light path of the light source and the light through holes on the light path fixtures at the sixth entrance and the sixth exit until the light path of the light source is aligned with the light through holes on the light path fixtures at the sixth entrance and the sixth exit; Continuously adjusting the distance between the acceleration module and the energy module, measuring using the distance fixture and the feeler gauge, and fixing the acceleration module after the distance between the acceleration module and the energy module is within a tolerance range of a third spacing; Installing one optical path tooling at the seventh entrance and the seventh exit of the mass selection module respectively; Adjusting the mass selection module according to the projection angle and position deviation between the light path of the light source and the light through holes on the light path fixtures at the seventh entrance and the seventh exit until the light path of the light source is aligned with the light through holes on the light path fixtures at the seventh entrance and the seventh exit; The distance between the mass selection module and the acceleration module is continuously adjusted, and the distance between the mass selection module and the acceleration module is measured using the distance fixture and the feeler gauge. After the distance between the mass selection module and the acceleration module is within a tolerance range of a fourth spacing, the mass selection module is fixed.

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