A multifunctional processing device for fine metal mask and a processing method thereof

Abstract

The present invention relates to the field of mask processing technology, in particular to a multifunctional processing device for fine metal mask and a processing method thereof. The comprehensive processing head includes a platform cleaning device, a laser cutting device, a laser repair device, a measuring device and a grinding device; an ESC electrostatic automatic tensioning adsorption platform is installed on the mounting seat, which cooperates with the laser cutting device to cut the ear materials in the waste area at both ends of the FMM plate; the porous ceramic suspended automatic tensioning adsorption platform is installed on the ESC electrostatic automatic tensioning adsorption platform, and cooperates with the measuring device and the grinding device to detect and grind the protrusions on the FMM plate surface; the large-format ESC electrostatic adsorption platform cooperates with the platform cleaning device and the laser repair device to repair the FMM plate; the comprehensive processing head can realize multiple repair functions; the processing platform is combined through a guide rail assembly, automatically adapts to the matching repair process, tensioning function, ESC adsorption, and is compatible with all current specifications, models and sizes and other multifunctional comprehensive processing platforms.

Description

Technical Field

[0001] The invention relates to the technical field of mask processing, in particular to multifunctional processing equipment for fine metal mask and a processing method thereof. Background Art

[0002] FMM stands for Fine Metal Mask, and its main materials are metal or metal and resin.

[0003] At present, the mainstream method for mass production of AMOLED panels is vacuum evaporation, and vacuum evaporation must use FMM evaporation technology. When OLED is evaporating, the FMM is placed close to the LTPS backplane, and the holes on the FMM are aligned with the pixel area where the organic layer needs to be evaporated, so that the organic film can be deposited on the specified pixel area. FMM is a key component for OLED manufacturing.

[0004] At present, the production method of FMM mainly involves thinning the raw material and engraving holes through etching. However, the etching process has a relatively low yield rate and will produce defects such as leaks, surface residual glue, and surface bumps that affect the use of the product. Fine masks are usually expensive, so in order to improve the production yield, a repair process is often added to the subsequent process. However, there are problems such as low integration in the current production repair process. Summary of the invention

[0005] The technical problem to be solved by the present invention is: in order to solve the problems existing in the prior art in the above-mentioned background technology, a multifunctional processing equipment for fine metal masks which can repair all common defects and a processing method thereof are provided which integrates laser cutting and repairing, grinding, detection and measurement, positioning, and platform cleaning.

[0006] The technical solution adopted by the present invention to solve the technical problem is: a multifunctional processing device for fine metal mask, comprising a comprehensive processing head and a processing platform, wherein the comprehensive processing head is installed on a mobile device and the comprehensive processing head is installed above the processing platform;

[0007] The comprehensive processing head includes a platform cleaning device, a laser cutting device, a laser repair device, a measuring device and a grinding device;

[0008] The processing platform includes a mounting seat, on which an ESC electrostatic automatic tensioning adsorption platform is installed to receive the FMM plate, tension and suspend the FMM plate, and cooperate with the laser cutting device to cut the ear materials in the waste area at both ends of the FMM plate;

[0009] The porous ceramic suspended automatic tensioning adsorption platform is installed on the ESC electrostatic automatic tensioning adsorption platform and is staggered up and down with the ESC electrostatic automatic tensioning adsorption platform to receive the FMM plate, tension and suspend the FMM plate, and cooperate with the measuring device and the grinding device to detect and grind the protrusions on the FMM plate surface;

[0010] And, the large-format ESC electrostatic adsorption platform, in conjunction with the platform cleaning device and laser repair device, is used to receive and repair the FMM version;

[0011] The backlight component is placed on the magnetic float of the electrostatic adsorption platform in the large-format ESC electrostatic adsorption platform to illuminate the entire electrostatic adsorption glass and observe the shape of the holes engraved on the FMM plate.

[0012] Furthermore, the ESC electrostatic automatic tensioning adsorption platform includes symmetrically arranged support column assemblies, two support column assemblies are installed along the length direction of the mounting seat, each support column assembly is installed with a magnetic levitation substrate, each magnetic levitation substrate is installed with a first magnetic levitation stator, both ends of the first magnetic levitation stator are installed with cut electrostatic adsorption magnetic levitation beams, and both ends of the bottom surface of each cut electrostatic adsorption magnetic levitation beam are installed with a second magnetic levitation stator that cooperates with the first magnetic levitation stator, and the two cut electrostatic adsorption magnetic levitation beams perform relative magnetic levitation sliding along the first magnetic levitation stator.

[0013] Furthermore, the porous ceramic suspended automatic tensioning adsorption platform includes a third magnetic levitation stator and a grinding porous ceramic beam. The third magnetic levitation stator is installed on the magnetic levitation substrate in the ESC electrostatic automatic tensioning adsorption platform. The grinding porous ceramic beams are installed at both ends of the magnetic levitation substrate. The fourth magnetic levitation stator that cooperates with the third magnetic levitation stator is installed at both ends of each grinding porous ceramic beam. The two grinding porous ceramic beams perform relative magnetic levitation sliding along the third magnetic levitation stator, and an operating area is enclosed between the two third magnetic levitation stators and the two grinding porous ceramic beams.

[0014] Furthermore, the vertical cross-sectional shape of the magnetic levitation substrate is stepped, and is divided into a first mounting substrate and a second mounting substrate. The first magnetic levitation stator is mounted on the first mounting substrate, and the third magnetic levitation stator in the porous ceramic suspended automatic tensioning adsorption platform is mounted on the second mounting substrate.

[0015] Furthermore, the distance L between the bottom surface of the cut electrostatically adsorbed magnetic levitation beam in the ESC electrostatic automatic tensioning adsorption platform and the upper surface of the second mounting substrate in the magnetic levitation substrate is greater than the sum of the heights H of the third magnetic levitation stator, the fourth magnetic levitation stator and the ground porous ceramic beam in the porous ceramic suspended automatic tensioning adsorption platform.

[0016] Furthermore, the large-format ESC electrostatic adsorption platform includes an electrostatic adsorption platform magnetic floater mounting seat and a glass electrostatic platform, and a plurality of magnetic springs and electric push rods are installed on both sides of the length direction between the electrostatic adsorption platform magnetic floater mounting seat and the glass electrostatic platform, an electrostatic adsorption glass is installed in the glass electrostatic platform, and an electrostatic adsorption platform magnetic floater is installed on the electrostatic adsorption platform magnetic floater mounting seat, the width of the electrostatic adsorption platform magnetic floater is smaller than the length width of the glass electrostatic platform, and the backlight assembly is placed on the upper plate surface of the electrostatic adsorption platform magnetic floater and is magnetically suspended on the electrostatic adsorption platform magnetic floater.

[0017] Furthermore, a mounting plate is installed on the mounting seat, a slide rail assembly is installed between the mounting plate and the electrostatic adsorption platform magnetic floating sub-mounting seat, and an X-axis motor group is installed on the bottom surface of the electrostatic adsorption platform magnetic floating sub-mounting seat to drive the large-format ESC electrostatic adsorption platform to move along the slide rail assembly.

[0018] Furthermore, a product cleaning mechanism is installed on one side of the platform cleaning device.

[0019] Furthermore, a visual positioning device is installed on one side of the laser cutting device, and the visual positioning device performs visual positioning on the positioning points on the FMM plate.

[0020] Furthermore, a plazma cleaning device is installed on the mounting base for cleaning laser residues on the electrostatically adsorbed glass in the large-format ESC electrostatic adsorption platform.

[0021] A processing method of a fine metal mask multifunctional processing device, comprising any one of the fine metal mask multifunctional processing devices described above, comprising the following steps:

[0022] Step 1: The platform cleaning device cleans the surface of the electrostatically adsorbed glass and removes the residual dust on the surface of the electrostatically adsorbed glass. At the same time, some dust can also be removed by the product cleaning mechanism. The product is transported to the large-format ESC electrostatic adsorption platform, and the visual positioning device is started to visually locate the positioning points on the product;

[0023] Step 2:

[0024] a. Cutting process:

[0025] The electrostatically-adsorbed magnetic suspension beam slides along the magnetic suspension base plate to receive the product, and then the product is tensioned and suspended. Then, the laser cutting device is started to cut the waste area ear materials at both ends of the product.

[0026] b. Grinding process:

[0027] The porous ceramic crossbeam in the porous ceramic suspended automatic tensioning adsorption platform slides along the magnetic suspension base plate to receive the product, and tensions and suspends the product. Then, the measuring device performs thickness and bulge detection on the product. Finally, the grinding device grinds the bulge and thickness of the product to meet the process requirements.

[0028] c. Repair process:

[0029] The glass electrostatic platform is pushed upward by the electric push rod and magnetic spring until it is flush with or slightly higher than the ESC electrostatic automatic tensioning adsorption platform. The product is adsorbed on the glass electrostatic platform, and the backlight component moves on the magnetic float of the electrostatic adsorption platform to illuminate the product placed on the glass electrostatic platform. The engraved holes on the product are inspected, and then the laser repair device is started to repair the leaking holes, holes that have not been punched, irregular holes, or holes that have not been etched in place on the product.

[0030] Step 3: After cutting and / or grinding and / or repairing, the product is transported to the next process. The plazma cleaning device cleans the laser residues generated on the electrostatically adsorbed glass to prevent interference with the processing of the next product, and the cycle continues.

[0031] Beneficial effects of the invention: The invention comprises a comprehensive processing head and a processing platform; the comprehensive processing head can realize repair functions such as laser cutting, laser drilling, laser cleaning, physical grinding, 3D measurement, positioning detection, and processing platform cleaning;

[0032] The processing platform includes porous ceramic suspended automatic tensioning adsorption platform, ESC electrostatic automatic tensioning adsorption platform, large-format ESC electrostatic adsorption platform, backlight source, plazma cleaning and other main components; the processing platform is combined through the guide rail assembly to automatically adapt to the matching repair process, tensioning function, ESC adsorption, and is compatible with all current specifications, models and sizes and other multifunctional comprehensive processing platforms. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0034] Figure 1 It is a structural schematic diagram of the present invention.

[0035] Figure 2 It is a structural schematic diagram of the processing platform of the present invention.

[0036] Figure 3 It is an exploded view of the processing platform of the present invention.

[0037] Figure 4 The present invention Figure 3 A partial enlarged view of point A in the middle.

[0038] Figure 5 The present invention Figure 3 Exploded view from the other direction.

[0039] Figure 6 It is a structural schematic diagram of the large-format ESC electrostatic adsorption platform of the present invention.

[0040] In the figure: 1. Comprehensive processing head, 10. Platform cleaning device, 11. Laser cutting device, 12. Laser repair device, 13. Measuring device, 14. Grinding device, 15. Product cleaning mechanism, 16. Visual positioning device, 2. Processing platform, 20. Mounting seat, 21. ESC electrostatic automatic tensioning adsorption platform, 211. Support column assembly, 212. Magnetic suspension substrate, 213. Cutting electrostatic adsorption magnetic suspension beam, 214. First magnetic suspension stator, 215. Second magnetic suspension stator, 22. Porous ceramic suspended automatic tensioning adsorption platform, 221. Third magnetic suspension stator, 222. Fourth magnetic suspension stator, 223. Grinding porous ceramic beam, 23. Large-format ESC electrostatic adsorption platform, 231. Electrostatic adsorption platform magnetic floater mounting seat, 232. Electrostatic adsorption platform magnetic floater, 233. Glass electrostatic platform, 234. Magnetic spring, 235. Electric push rod, 236. Electrostatic adsorption glass, 237. Slide rail assembly, 238. X-axis motor assembly, 24. Backlight assembly, 25. Plazma cleaning device. DETAILED DESCRIPTION

[0041] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0042] like Figure 1 to Figure 6 A multifunctional processing device for fine metal mask shown in the figure comprises a comprehensive processing head 1 and a processing platform 2, wherein the comprehensive processing head 1 is mounted on a moving device and the comprehensive processing head 1 is mounted above the processing platform 2;

[0043] Each device in the comprehensive processing head 1 is selected to be used one, several or all according to the actual situation of each FMM plate during the production process. The comprehensive processing head 1 includes a platform cleaning device 10. The electrostatic adsorption glass 236 of the large-format ESC electrostatic adsorption platform 23 will have some dust residue after processing, which is used to clean the electrostatic adsorption glass 236;

[0044] A product cleaning mechanism 15 is installed on one side of the platform cleaning device 10 to absorb dust on the glass platform by electrostatic adhesion;

[0045] The laser cutting device 11 is used to cut off the waste area ear materials generated at both ends of the product after the previous process;

[0046] A visual positioning device 16 is installed on one side of the laser cutting device 11. The visual positioning device 16 performs visual positioning on the positioning points on the FMM plate to determine the position of the FMM plate on the large-format ESC electrostatic adsorption platform 23. If the positioning points of the same product after loading are within a certain range, the visual positioning device 16 can quickly complete the search and positioning;

[0047] The laser repair device 12 is used to repair leaking holes, holes that have not been punched, or holes that have been processed irregularly, or holes that have not been etched in place on the FMM plate. It can also be used for detection and positioning functions. The laser repair device 12 integrates CCD detection and matches multiple sets of objective lenses with different magnifications to detect and observe specific processing effects;

[0048] Measuring device 13, the thickness of the raw material is relatively thick, and the thickness of the FMM plate needs to be controlled within 20um. Some products need to be thinned by etching according to processing requirements. At the same time, due to etching processing, a few microns of protrusions will be generated, and the flatness will be slightly different. The measuring device 13 is used to detect the protrusions, detect the contour and height of the protrusions, thereby establishing coordinates and transmitting the scanning information to the host computer;

[0049] and a grinding device 14 for grinding the protrusions and thickness detected by the measuring device 13, which is physical grinding and is performed by a grinding belt;

[0050] In addition, dust collecting devices are installed below the laser cutting device 11 and the laser repair device 12;

[0051] The processing platform 2 includes a mounting seat 20. The three platforms installed on the mounting seat 20 are all equipped with a lifting function. The three working platforms can be lifted and lowered according to the needs. The mounting seat 20 is equipped with an ESC electrostatic automatic tensioning adsorption platform 21, which is used to receive the FMM plate, tension and suspend the FMM plate, and cooperate with the laser cutting device 11 to cut the ear materials in the waste area at both ends of the FMM plate. The full-stroke coverage movement is used to be compatible with products of various specifications and lengths. At the same time, it also has a tensioning function, and there is no need to use a force sensor. The tensioning force of the ESC electrostatic automatic tensioning adsorption platform 21 is controlled by comparing the current feedback with the preset current;

[0052] The porous ceramic suspended automatic tensioning adsorption platform 22 is installed on the ESC electrostatic automatic tensioning adsorption platform 21. The movement between the porous ceramic suspended automatic tensioning adsorption platform 22 and the ESC electrostatic automatic tensioning adsorption platform 21 is relatively independent, and the porous ceramic suspended automatic tensioning adsorption platform 22 is staggered with the ESC electrostatic automatic tensioning adsorption platform 21 up and down, so as to receive the FMM plate, tension and suspend the FMM plate, and cooperate with the measuring device 13 and the grinding device 14 to detect and grind the protrusions on the FMM plate.

[0053] In addition, the positions of the porous ceramic suspended automatic tensioning adsorption platform 22 and the ESC electrostatic automatic tensioning adsorption platform 21 are also interchangeable and can be set according to customer needs;

[0054] And, the large-format ESC electrostatic adsorption platform 23 cooperates with the platform cleaning device 10 and the laser repair device 12 to receive and repair the FMM plate. The diameter of the engraved hole on the FMM plate is about 10um, so a flat and stable operating space is required for repair. The entire FMM plate needs to be adsorbed, and then the engraved hole is processed on this basis. The electrostatic adsorption glass 236 has good flatness;

[0055] like Figure 2 As shown in the figure, the height of the ESC electrostatic automatic tensioning adsorption platform 21 is the working position of each platform when working, and the ESC electrostatic automatic tensioning adsorption platform 21 moves to the two ends to avoid positions when other working platforms are working; in the figure, the position of the porous ceramic suspended automatic tensioning adsorption platform 22 is the avoidance layer of the porous ceramic suspended automatic tensioning adsorption platform 22; in the figure, the position of the large-format ESC electrostatic adsorption platform 23 is the avoidance layer of the large-format ESC electrostatic adsorption platform 23;

[0056] The backlight assembly 24 is placed on the electrostatic adsorption platform magnetic float 232 in the large-format ESC electrostatic adsorption platform 23 to illuminate the entire electrostatic adsorption glass 236, so as to observe the shape of the holes engraved on the FMM plate. At the same time, the backlight assembly 24 adopts the principle of magnetic suspension and has a certain inclination angle. The width of the electrostatic adsorption platform magnetic float 232 is smaller than the width of the glass electrostatic platform 233. The magnetic suspension has a characteristic that it has six degrees of freedom and can be tilted slightly, so that the backlight of the entire glass electrostatic platform 233 can be illuminated. That is to say, the edges of the glass electrostatic platform 233 can also be illuminated, reducing the existence of blind spots, and moving to the required position according to needs for illumination;

[0057] The mounting seat 20 is also equipped with a plazma cleaning device 25 for cleaning the laser residues on the electrostatic adsorption glass 236 in the large-format ESC electrostatic adsorption platform 23, and an ultrasonic cleaning head for cleaning the laser residues generated on the electrostatic adsorption glass 236 after processing to prevent interference with the processing of the next product.

[0058] like Figure 2 to Figure 4As shown, the ESC electrostatic automatic tensioning adsorption platform 21 includes symmetrically arranged support column assemblies 211, and the two support column assemblies 211 are installed along the length direction of the mounting seat 20. A magnetic levitation substrate 212 is installed on each support column assembly 211, and a first magnetic levitation stator 214 is installed on each magnetic levitation substrate 212. Cutting electrostatic adsorption magnetic levitation beams 213 are installed at both ends of the first magnetic levitation stator 214, and second magnetic levitation stators 215 cooperating with the first magnetic levitation stator 214 are installed at both ends of the bottom surface of each cutting electrostatic adsorption magnetic levitation beam 213. The two cutting electrostatic adsorption magnetic levitation beams 213 perform relative magnetic levitation sliding along the first magnetic levitation stator 214.

[0059] like Figure 2 to Figure 4 As shown, the porous ceramic suspended automatic tensioning adsorption platform 22 includes a third magnetic suspension stator 221 and a grinding porous ceramic beam 223. The third magnetic suspension stator 221 is installed on the magnetic suspension substrate 212 in the ESC electrostatic automatic tensioning adsorption platform 21. The grinding porous ceramic beams 223 are installed at both ends of the magnetic suspension substrate 212. The fourth magnetic suspension stator 222 that cooperates with the third magnetic suspension stator 221 is installed at both ends of each grinding porous ceramic beam 223. The two grinding porous ceramic beams 223 perform relative magnetic suspension sliding along the third magnetic suspension stator 221. An operating area is enclosed between the two third magnetic suspension stators 221 and the two grinding porous ceramic beams 223. The large-format ESC electrostatic adsorption platform 23 is located in the operating area.

[0060] like Figure 2 As shown, the vertical cross-sectional shape of the magnetic levitation substrate 212 is stepped, and is divided into a first mounting substrate and a second mounting substrate. The first magnetic levitation stator 214 is mounted on the first mounting substrate, and the third magnetic levitation stator 221 in the porous ceramic suspended automatic tensioning adsorption platform 22 is mounted on the second mounting substrate.

[0061] like Figure 2 As shown, the distance L between the bottom surface of the cutting electrostatic adsorption magnetic levitation beam 213 in the ESC electrostatic automatic tensioning adsorption platform 21 and the upper surface of the second mounting substrate in the magnetic levitation substrate 212 is greater than the sum of the heights H of the third magnetic levitation stator 221, the fourth magnetic levitation stator 222 and the grinding porous ceramic beam 223 in the porous ceramic suspended automatic tensioning adsorption platform 22. That is to say, there is a certain gap between the cutting electrostatic adsorption magnetic levitation beam 213 and the grinding porous ceramic beam 223, and they are relatively independent of each other.

[0062] like Figure 6As shown, the large-format ESC electrostatic adsorption platform 23 includes an electrostatic adsorption platform magnetic floating sub-mounting seat 231 and a glass electrostatic platform 233. A plurality of magnetic springs 234 and an electric push rod 235 are installed on both sides of the length direction between the electrostatic adsorption platform magnetic floating sub-mounting seat 231 and the glass electrostatic platform 233. The extended end of the electric push rod 235 faces the glass electrostatic platform 233. The electric push rod 235 is suitable for a wider platform to balance the weight of the electrostatic adsorption platform. The installation of multiple magnetic springs 234 at the same time also improves the flatness of the glass electrostatic platform 233. The magnetic spring 234 is unpowered and relies on magnetic force. In this way, the electric push rod 235 can complete the lifting without a large load, and has a simple structure and miniaturization.

[0063] Among them, the height of the large-format ESC electrostatic adsorption platform 23 is flush with or slightly higher than the height of the cutting electrostatic adsorption magnetic suspension beam 213 in the ESC electrostatic automatic tensioning adsorption platform 21, which effectively prevents the grinding device 14 from colliding with the cutting electrostatic adsorption magnetic suspension beam 213 during the grinding process;

[0064] When other processing is performed, the large-format ESC electrostatic adsorption platform 23 is lowered, which will not affect other processes (repairing and cutting).

[0065] An electrostatic adsorption glass 236 is installed in the glass electrostatic platform 233, and an electrostatic adsorption platform magnetic float 232 is installed on the electrostatic adsorption platform magnetic float mounting seat 231. The width of the electrostatic adsorption platform magnetic float 232 is smaller than the length and width of the glass electrostatic platform 233. The backlight component 24 is placed on the upper plate surface of the electrostatic adsorption platform magnetic float 232 and is magnetically suspended on the electrostatic adsorption platform magnetic float 232.

[0066] A mounting plate is installed on the mounting seat 20, and a slide rail assembly 237 is installed between the mounting plate and the electrostatic adsorption platform magnetic floating sub-mounting seat 231. An X-axis motor group 238 is installed on the bottom surface of the electrostatic adsorption platform magnetic floating sub-mounting seat 231 to drive the large-format ESC electrostatic adsorption platform 23 to move along the slide rail assembly 237, thereby adapting to products of multiple specifications.

[0067] A processing method of a fine metal mask multifunctional processing device, comprising any one of the fine metal mask multifunctional processing devices described above, comprising the following steps:

[0068] Step 1: The platform cleaning device 10 cleans the surface of the electrostatic adsorption glass 236 to remove the residual dust on the surface of the electrostatic adsorption glass 236. At the same time, some dust can also be removed by the product cleaning mechanism 15. The product is transported to the large-format ESC electrostatic adsorption platform 23, and the visual positioning device 16 is started to visually locate the positioning points on the product.

[0069] Step 2:

[0070] a. Cutting process:

[0071] The cutting electrostatic adsorption magnetic suspension beam 213 in the ESC electrostatic automatic tensioning adsorption platform 21 slides along the magnetic suspension base plate 212 to receive the product, and tensions and suspends the product. Then, the laser cutting device 11 is started to cut the waste area ear materials at both ends of the product respectively.

[0072] b. Grinding process:

[0073] The porous ceramic cross beam 223 for grinding in the porous ceramic suspended automatic tensioning adsorption platform slides along the magnetic suspension substrate 212 to receive the product, and tensions and suspends the product. Then, the measuring device 13 performs thickness detection and protrusion detection on the product. Finally, the grinding device 14 grinds the protrusion and thickness of the product to meet the process requirements.

[0074] c. Repair process:

[0075] The glass electrostatic platform 233 is pushed upward by the electric push rod 235 and the magnetic spring 234 until it is flush with or slightly higher than the ESC electrostatic automatic tensioning adsorption platform 21, and the product is adsorbed on the glass electrostatic platform 233. The backlight component 24 moves in suspension on the magnetic floater 232 of the electrostatic adsorption platform, thereby illuminating the product placed on the glass electrostatic platform 233, and inspecting the engraved holes on the product. Then, the laser repair device 12 is started, and the leaking holes, holes that have not been punched, holes that are irregularly processed, or holes that have not been etched in place on the product are repaired;

[0076] Step 3: After the cutting and / or grinding and / or repairing, the product is transported to the next process, and the plazma cleaning device 25 cleans the laser residues generated on the electrostatically adsorbed glass 236 to prevent interference with the processing of the next product, and the cycle continues.

[0077] Based on the above ideal embodiments of the present invention, the relevant staff can make various changes and modifications without departing from the technical concept of the present invention through the above description. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A multifunctional processing device for fine metal mask, characterized in that: It comprises a comprehensive processing head (1) and a processing platform (2), wherein the comprehensive processing head (1) is mounted on a moving device, and the comprehensive processing head (1) is mounted above the processing platform (2); The comprehensive processing head (1) comprises a platform cleaning device (10), a laser cutting device (11), a laser repair device (12), a measuring device (13) and a grinding device (14); The processing platform (2) comprises a mounting seat (20) on which a The ESC electrostatic automatic tensioning adsorption platform (21) is used to receive the FMM plate, tension and suspend the FMM plate, and cooperate with the laser cutting device (11) to cut the ear materials in the waste area at both ends of the FMM plate; The porous ceramic suspended automatic tensioning adsorption platform (22) is installed on the ESC electrostatic automatic tensioning adsorption platform (21) and is arranged to be offset up and down with the ESC electrostatic automatic tensioning adsorption platform (21) to receive the FMM plate, tension and suspend the FMM plate, and cooperate with the measuring device (13) and the grinding device (14) to detect and grind the protrusions on the FMM plate surface; and, a large-format ESC electrostatic adsorption platform (23), which cooperates with a platform cleaning device (10) and a laser repair device (12) to receive and repair the FMM plate; A backlight assembly (24) is placed on the electrostatic adsorption platform magnetic float (232) in the large-format ESC electrostatic adsorption platform (23) to illuminate the entire electrostatic adsorption glass (236) so as to observe the shape of the holes engraved on the FMM plate; The ESC electrostatic automatic tensioning adsorption platform (21) comprises symmetrically arranged support column assemblies (211), two support column assemblies (211) are installed along the length direction of the mounting seat (20), each support column assembly (211) is installed with a magnetic suspension base plate (212), each magnetic suspension base plate (212) is installed with a first magnetic suspension stator (214), both ends of the first magnetic suspension stator (214) are installed with cut electrostatic adsorption magnetic suspension cross beams (213), both ends of the bottom surface of each cut electrostatic adsorption magnetic suspension cross beam (213) are installed with a second magnetic suspension stator (215) that cooperates with the first magnetic suspension stator (214), and the two cut electrostatic adsorption magnetic suspension cross beams (213) slide in relative magnetic suspension along the first magnetic suspension stator (214); The porous ceramic suspended automatic tensioning adsorption platform (22) comprises a third magnetic suspension stator (221) and a grinding porous ceramic crossbeam (223); the third magnetic suspension stator (221) is mounted on a magnetic suspension base plate (212) in the ESC electrostatic automatic tensioning adsorption platform (21); grinding porous ceramic crossbeams (223) are mounted at both ends of the magnetic suspension base plate (212); fourth magnetic suspension stators (222) that cooperate with the third magnetic suspension stator (221) are mounted at both ends of each grinding porous ceramic crossbeam (223); the two grinding porous ceramic crossbeams (223) slide in relative magnetic suspension along the third magnetic suspension stator (221); and an operating area is enclosed between the two third magnetic suspension stators (221) and the two grinding porous ceramic crossbeams (223); The large-format ESC electrostatic adsorption platform (23) comprises an electrostatic adsorption platform magnetic floater mounting seat (231) and a glass electrostatic platform (233); a plurality of magnetic springs (234) and electric push rods (235) are mounted on both sides in the length direction between the electrostatic adsorption platform magnetic floater mounting seat (231) and the glass electrostatic platform (233); an electrostatic adsorption glass (236) is mounted in the glass electrostatic platform (233); an electrostatic adsorption platform magnetic floater (232) is mounted on the electrostatic adsorption platform magnetic floater mounting seat (231); the width of the electrostatic adsorption platform magnetic floater (232) is smaller than the length and width of the glass electrostatic platform (233); and a backlight assembly (24) is placed on the upper plate surface of the electrostatic adsorption platform magnetic floater (232) and is magnetically suspended and displaced on the electrostatic adsorption platform magnetic floater (232).

2. The multifunctional processing equipment for fine metal mask according to claim 1, characterized in that: The vertical cross-sectional shape of the magnetic suspension substrate (212) is stepped, and is divided into a first mounting substrate and a second mounting substrate. The first magnetic suspension stator (214) is mounted on the first mounting substrate, and the third magnetic suspension stator (221) in the porous ceramic suspended automatic tensioning adsorption platform (22) is mounted on the second mounting substrate.

3. The multifunctional processing equipment for fine metal mask according to claim 1, characterized in that: A mounting plate is mounted on the mounting seat (20); a slide rail assembly (237) is mounted between the mounting plate and the electrostatic adsorption platform magnetic floating sub-mounting seat (231); an X-axis motor group (238) is mounted on the bottom surface of the electrostatic adsorption platform magnetic floating sub-mounting seat (231) for driving the large-format ESC electrostatic adsorption platform (23) to move along the slide rail assembly (237).

4. The multifunctional processing equipment for fine metal mask according to claim 1, characterized in that: A product cleaning mechanism (15) is installed on one side of the platform cleaning device (10).

5. The multifunctional processing equipment for fine metal mask according to claim 1, characterized in that: A visual positioning device (16) is installed on one side of the laser cutting device (11), and the visual positioning device (16) performs visual positioning on the positioning points on the FMM plate.

6. The multifunctional processing equipment for fine metal mask according to claim 1, characterized in that: The mounting seat (20) is also provided with a plazma cleaning device (25) for cleaning laser residues on the electrostatic adsorption glass (236) in the large-format ESC electrostatic adsorption platform (23).

7. A processing method of a fine metal mask multifunctional processing device, comprising the fine metal mask multifunctional processing device according to any one of claims 1 to 6, characterized in that: The steps are as follows: Step 1: The platform cleaning device (10) cleans the surface of the electrostatic adsorption glass (236) to remove residual dust on the surface of the electrostatic adsorption glass (236). At the same time, some dust is removed by the product cleaning mechanism (15). The product is transported to the large-format ESC electrostatic adsorption platform (23). The visual positioning device (16) is started to visually locate the positioning points on the product. Step 2: a. Cutting process: The cutting electrostatic adsorption magnetic suspension beam (213) in the ESC electrostatic automatic tensioning adsorption platform (21) slides along the magnetic suspension base plate (212) to receive the product, and tensions and suspends the product in the air. Then, the laser cutting device (11) is started to cut the waste area ear materials at both ends of the product respectively. b. Grinding process: The porous ceramic crossbeam (223) for grinding in the porous ceramic suspended automatic tensioning adsorption platform slides along the magnetic suspension base plate (212) to receive the product, and tensions and suspends the product. Then, the measuring device (13) performs thickness detection and protrusion detection on the product. Finally, the grinding device (14) grinds the protrusion and thickness of the product to meet the process requirements. c. Repair process: The glass electrostatic platform (233) is pushed upward by the electric push rod (235) and the magnetic spring (234) until it is flush with or slightly higher than the ESC electrostatic automatic tensioning adsorption platform (21), and the product is adsorbed on the glass electrostatic platform (233). The backlight component (24) moves in suspension on the magnetic floater (232) of the electrostatic adsorption platform, thereby illuminating the product placed on the glass electrostatic platform (233) and inspecting the engraved holes on the product. Then, the laser repair device (12) is started to repair the leaking holes, holes that have not been punched, holes that are irregularly processed, or holes that have not been etched in place on the product. Step 3: After the product has been cut and / or ground and / or repaired, it is transported to the next process, and the plazma cleaning device (25) cleans the laser residues generated on the electrostatically adsorbed glass (236) to prevent interference with the processing of the next product, and the cycle continues.

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