Stick-slip driven positioning platform

Abstract

The present application relates to a kind of stick and slip drive positioning platform, it includes fixed seat, movable table, movable block, first drive mechanism and clutch mechanism;Movable table is set on fixed seat, and can move on fixed seat along X direction and Y direction;Movable block and first drive mechanism are all set on movable table, clutch mechanism is used to connect movable block and fixed seat, or disconnect the connection of movable block and fixed seat;Stick and slip drive positioning platform has first state and second state;In first state, clutch mechanism connects movable block and fixed seat, first drive mechanism exerts force to movable block, to drive movable table to move along X direction or Y direction under the drive of the reaction force of movable block;In second state, clutch mechanism disconnects the connection of movable block and fixed seat, first drive mechanism exerts force to movable block, so that movable block moves to the preset position on movable table.According to the technical scheme of the present application, positioning platform can simultaneously realize the characteristics of large stroke movement and high-precision positioning.

Description

Technical Field

[0001] This invention relates to the field of positioning platform technology, and in particular to a stick-slip driven positioning platform. Background Technology

[0002] With the continuous development of fields such as semiconductor defect detection systems, precision optical systems, micro-nano manipulation, and ultra-precision machining, these fields have placed higher demands on the large stroke and high precision characteristics of precision positioning platforms. Traditional large stroke positioning systems often use a structure of motor drive and guide rail, which can achieve large stroke motion and large load capacity. However, the accuracy and resolution limitations of motor drive cannot meet the positioning accuracy requirements at the micro-nano level.

[0003] To achieve planar three-degree-of-freedom positioning accuracy at the micro-nano and micro-arc levels, nanometer-level precision positioning can be achieved by using piezoelectric ceramic actuators in conjunction with compliant hinges. However, due to the limitations of actuator stroke and hinge stress, the maximum stroke is often limited to the micrometer level. Summary of the Invention

[0004] In view of this, the present invention provides a stick-slip driven positioning platform, the main technical problem to be solved is: how to enable the positioning platform to simultaneously achieve the characteristics of large stroke motion and high-precision positioning.

[0005] To achieve the above objectives, the present invention mainly provides the following technical solutions:

[0006] Embodiments of the present invention provide a stick-slip driven positioning platform, which includes a fixed base, a movable platform, a movable block, a first driving mechanism, and a clutch mechanism;

[0007] The movable platform is mounted on the fixed base and can move along the X and Y directions on the fixed base, wherein the X direction is perpendicular to the Y direction;

[0008] Both the movable block and the first driving mechanism are mounted on the movable platform. The clutch mechanism is used to connect the movable block and the fixed seat, so that the movable block and the fixed seat remain relatively fixed. The clutch mechanism is also used to disconnect the movable block from the fixed seat, so that the movable block can move relative to the fixed seat.

[0009] The stick-slip driven positioning platform has a first state and a second state, wherein...

[0010] In the first state, the clutch mechanism connects the movable block and the fixed seat, and the first drive mechanism applies a force to the movable block to drive the movable platform to move along the X direction or Y direction under the reaction force of the movable block.

[0011] In the second state, the clutch mechanism disconnects the movable block from the fixed base, and the first drive mechanism applies force to the movable block, causing the movable block to move to a preset position on the movable platform.

[0012] In some embodiments, the stick-slip driven positioning platform also has a third state;

[0013] In the third state, the clutch mechanism disconnects the movable block from the fixed seat, and the first drive mechanism applies force to the movable block to make it rotate; wherein the rotation axis of the movable block is perpendicular to both the X and Y directions.

[0014] In some embodiments, the stick-slip driven positioning platform further includes a rotary output block and a second drive mechanism, wherein the rotary output block is provided with two clamping blocks;

[0015] The second driving mechanism is used to drive the two clamping blocks to move closer or further apart; wherein, when the two clamping blocks are closer together, they clamp the movable block so that the rotating output block and the movable block remain relatively fixed; when the two clamping blocks are further apart, they release the movable block so that the movable block can rotate relative to the rotating output block.

[0016] In some embodiments, the two clamping blocks are a first clamping block and a second clamping block, and the second driving mechanism includes a driving component. The second driving mechanism drives the first clamping block to move closer to or further away from the second clamping block through the driving component, so that the two clamping blocks move closer to or further away from each other.

[0017] In some embodiments, the drive assembly includes a power unit and a lever having an input end and an output end. The drive assembly is connected to a first clamping block through the output end of the lever. The drive assembly applies a force to the input end of the lever through the power unit, causing the output end of the lever to move the first clamping block relatively closer to or further away from the second clamping block.

[0018] In some embodiments, the drive assembly further includes a guide mechanism and a connecting rod, wherein the output end of the lever is hinged to one end of the connecting rod, and the other end of the connecting rod is hinged to a first clamping block, so that the output end of the lever is connected to the first clamping block through the connecting rod; wherein the guide mechanism is used to guide the movement of the first clamping block, so that the first clamping block moves in a straight line.

[0019] In some embodiments, the power unit includes a first piezoelectric ceramic actuator, which applies force to the input end of the lever via the first piezoelectric ceramic actuator.

[0020] In some embodiments, the movable platform is provided with a 3-RRR parallel mechanism, which has three branches and a triangular component as the working platform of the mechanism, and each of the three branches has a rotatable crank.

[0021] The movable block is the triangular component, which is connected to the movable platform through three branches; the first drive mechanism includes three power mechanisms, which drive the corresponding cranks to rotate one by one to apply force to the movable block.

[0022] In some embodiments, each of the power mechanisms includes a second piezoelectric ceramic actuator, and each power mechanism drives a corresponding crank to rotate via the corresponding second piezoelectric ceramic actuator.

[0023] In some embodiments, the clutch mechanism includes a third drive mechanism and a telescopic portion disposed on the movable block;

[0024] The clutch mechanism drives the telescopic part to extend to abut against the fixed seat via the third drive mechanism to connect the movable block and the fixed seat; the clutch mechanism also drives the telescopic part to retract to separate from the fixed seat via the third drive mechanism to disconnect the connection between the movable block and the fixed seat.

[0025] In some embodiments, the third drive mechanism includes a third piezoelectric ceramic actuator, which drives the telescopic portion to extend or retract via the third piezoelectric ceramic actuator.

[0026] By employing the above technical solution, the stick-slip driven positioning platform of the present invention has at least the following beneficial effects:

[0027] 1. High-frequency, micro-nano level displacement decoupling input with three degrees of freedom in a plane is achieved through parallel compliant mechanisms, and large-stroke motion output is achieved through micro-nano displacement step accumulation using a stick-slip drive mechanism.

[0028] 2. The friction between the drive foot and the fixed base is dynamically adjusted using piezoelectric ceramics to achieve high load capacity and no motion retraction during the stick-slip drive process. The telescopic part on the aforementioned movable block is the drive foot.

[0029] 3. Planar linear displacement decoupling output is achieved by arranging two sets of cross roller guides, and planar angular displacement output is achieved by micro-clamping rotating output block.

[0030] 4. The displacement output with large stroke, high precision, large load, full input decoupling, and linear motion output decoupling is achieved by using parallel compliant mechanisms and series-arranged motion guide mechanisms.

[0031] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the structure of a stick-slip driven positioning platform provided in an embodiment of the present invention;

[0034] Figure 2 This is a cross-sectional view of a stick-slip driven positioning platform;

[0035] Figure 3 This is an assembly diagram of the two clamping blocks on the rotating output block and the connecting shaft on the movable block;

[0036] Figure 4 yes Figure 3 Enlarged view of point A in the middle;

[0037] Figure 5 yes Figure 3 A simplified structural diagram of the drive component;

[0038] Figure 6 This is an assembly diagram of the movable block and the movable platform;

[0039] Figure 7 yes Figure 6 Enlarged view of point B in the middle;

[0040] Figure 8 This is a simplified structural diagram of the 3-RRR parallel mechanism on the moving platform.

[0041] Reference numerals: 1. Fixed base; 2. Movable platform; 3. Connector; 4. First guide rail; 5. Second guide rail; 6. Rotary output block; 7. Movable block; 8. Third piezoelectric ceramic actuator; 9. First piezoelectric ceramic actuator; 10. Lever; 11. First telescopic rod; 12. Second telescopic rod; 13. Connecting rod; 14. Second piezoelectric ceramic actuator; 15. First connecting rod; 16. Second connecting rod; 17. Third connecting rod; 18. Fourth connecting rod; 19. Fifth connecting rod; 20. Sixth connecting rod; 21. Telescopic part; 61. First clamping block; 62. Second clamping block; 71. Connecting shaft; 72. Ball bearing; 101. Input end of lever; 102. Output end of lever. Detailed Implementation

[0042] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0043] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0044] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0045] like Figures 1 to 7 As shown, an embodiment of the present invention provides a stick-slip driven positioning platform, which includes a fixed base 1, a movable platform 2, a movable block 7, a first driving mechanism, and a clutch mechanism. The movable platform 2 is disposed on the fixed base 1 and can move along the X and Y directions on the fixed base 1, wherein the X direction is perpendicular to the Y direction.

[0046] In order for the movable platform 2 to move along the X and Y directions on the fixed base 1, in some embodiments, such as Figure 1 As shown, the stick-slip driven positioning platform of the present invention may include a connector 3, which is movably mounted on a fixed base 1. The fixed base 1 is provided with an X-axis guiding mechanism, which guides the movement of the connector 3 on the fixed base 1, allowing the connector 3 to move along the X-axis on the fixed base 1. The X-axis guiding mechanism may include a first guide rail 4 to guide the movement of the connector 3 on the fixed base 1. To ensure guiding accuracy, preferably, there may be two or more first guide rails 4, which may be crossed roller guide rails.

[0047] The aforementioned movable stage 2 is movably mounted on the connecting member 3. The connecting member 3 is equipped with a Y-axis guiding mechanism, which guides the movement of the movable stage 2 on the connecting member 3, allowing the movable stage 2 to move along the Y-axis on the connecting member 3. The Y-axis guiding mechanism may include a second guide rail 5 to guide the movement of the movable stage 2 on the connecting member 3. To ensure guiding accuracy, preferably, there can be two or more second guide rails 5, which can be crossed roller guide rails.

[0048] The movable platform 2 is indirectly connected to the fixed base 1 via the aforementioned connector 3. The movable platform 2 moves along the X-direction on the fixed base 1 via the connector 3. Specifically, when the connector 3 moves along the X-direction on the fixed base 1, it drives the movable platform 2 to move along the X-direction as well. Since the connector 3 is mounted on the fixed base 1, when the movable platform 2 moves along the Y-direction on the connector 3, the movable platform 2 also moves relative to the fixed base 1 along the Y-direction.

[0049] Both the aforementioned movable block 7 and the first drive mechanism are mounted on the movable platform 2. The aforementioned clutch mechanism is used to connect the movable block 7 and the fixed base 1, keeping the movable block 7 and the fixed base 1 relatively fixed. The clutch mechanism is also used to disconnect the movable block 7 from the fixed base 1, allowing the movable block 7 to move relative to the fixed base 1.

[0050] The stick-slip driven positioning platform of the present invention has a first state and a second state. In the first state, the aforementioned clutch mechanism connects the movable block 7 and the fixed base 1, and the first drive mechanism applies force to the movable block 7, causing the movable platform 2 to move along the X or Y direction under the drive of the reaction force of the movable block 7. In the second state, the aforementioned clutch mechanism disconnects the movable block 7 from the fixed base 1, and the first drive mechanism applies force to the movable block 7, causing the movable block 7 to move to a preset position on the movable platform 2.

[0051] In the above example, when the stick-slip drive positioning platform of the present invention is in the first state, the clutch mechanism connects the movable block 7 and the fixed seat 1. At this time, the movable block 7 and the fixed seat 1 remain relatively fixed to lock the movable block 7. The first drive mechanism applies force to the movable block 7. Since the movable block 7 is locked at this time, the movable block 7 will apply a reverse force to the first drive mechanism. Since the first drive mechanism is set on the movable platform 2, the first drive mechanism will drive the movable platform 2 to move in the X or Y direction under the drive of the reverse force. When the stick-slip drive positioning platform of the present invention is in the second state, the clutch mechanism disconnects the connection between the movable block 7 and the fixed seat 1. At this time, the movable block 7 is unlocked and released, allowing the movable block 7 to move relative to the fixed seat 1. The first drive mechanism applies force to the movable block 7, causing the movable block 7 to move to a preset position on the movable platform 2 to achieve the reset of the movable block 7 on the movable platform 2.

[0052] When the first driving mechanism employs a high-precision driving mechanism such as a piezoelectric ceramic actuator, nanometer-level precision positioning of the positioning plane can be achieved, thereby realizing the high-precision positioning characteristics of the positioning platform. Furthermore, when the stick-slip driven positioning platform of this invention switches back and forth between the first and second states, the movable stage 2 can achieve creeping motion on the fixed base 1. When the first driving mechanism employs a high-precision driving mechanism such as a piezoelectric ceramic actuator, although the movable stage 2 undergoes only micro-nano displacements each time, the accumulation of multiple micro-nano displacement steps can achieve large strokes at the ten-millimeter and ten-radian levels, thereby realizing the large-stroke motion characteristics of the positioning platform.

[0053] The aforementioned stick-slip drive positioning platform also has a third state. In the third state, the aforementioned clutch mechanism disconnects the movable block 7 from the fixed base 1, and the first drive mechanism applies force to the movable block 7, causing the movable block 7 to rotate. The rotation axis of the movable block 7 is perpendicular to both the X and Y directions.

[0054] In the above example, the stick-slip drive positioning platform of the present invention can realize planar three-degree-of-freedom output, specifically, it can realize displacement output in the X direction, displacement output in the Y direction, and rotational displacement output of the movable block 7.

[0055] In some implementations, such as Figure 1 and Figure 2 As shown, the aforementioned stick-slip driven positioning platform may further include a rotary output block 6 and a second drive mechanism. The rotary output block 6 is equipped with two clamping blocks. The second drive mechanism is used to drive the two clamping blocks to move closer or further apart. Specifically, when the two clamping blocks are relatively close, they clamp the movable block 7, keeping the rotary output block 6 and the movable block 7 relatively fixed. When the two clamping blocks are relatively far apart, they release the movable block 7, allowing the movable block 7 to rotate relative to the rotary output block 6.

[0056] In the above example, the rotary output block 6 is used to connect with an external component to drive the external component to move, such as rotate. Specifically, the rotary output block 6 is fixedly connected to the external component, for example, by screws. The second drive mechanism drives two clamping blocks to clamp the movable block 7, keeping the rotary output block 6 and the movable block 7 relatively fixed. Then, when the first drive mechanism drives the movable block 7 to rotate, the movable block 7 can drive the rotary output block 6 and the external component to rotate together. Then, the second drive mechanism drives the two clamping blocks to release the movable block 7, allowing the movable block 7 to rotate relative to the rotary output block 6; then, the first drive mechanism drives the movable block 7 to rotate, causing the movable block 7 to return to its initial angle. Then, the second drive mechanism drives the two clamping blocks to clamp the movable block 7 again, and so on, to achieve the micro-rotational displacement creep of the rotary output block 6 in the circumferential direction, and to achieve a large stroke rotational displacement through the accumulation of micro-rotational displacement.

[0057] The aforementioned second drive mechanism can drive the two clamping blocks to move simultaneously, causing the two clamping blocks to move closer or further apart.

[0058] In some implementations, such as Figure 4 and Figure 5 As shown, the two clamping blocks are a first clamping block 61 and a second clamping block 62, respectively. The second driving mechanism includes a driving component, which drives the first clamping block 61 to move closer to or further away from the second clamping block 62, so that the two clamping blocks move closer to or further away from each other.

[0059] In some implementations, such as Figure 4 and Figure 5 As shown, the aforementioned drive assembly may include a power unit and a lever 10. The lever 10 has an input end 101 and an output end 102. The drive assembly is connected to the first clamping block 61 through the output end 102 of the lever. The drive assembly applies force to the input end 101 of the lever through the power unit, so that the output end 102 of the lever drives the first clamping block 61 to move relatively closer to or away from the second clamping block 62.

[0060] In the example above, the output displacement of the power unit can be amplified by the lever 10. The power unit can employ a high-precision drive mechanism to achieve precise control.

[0061] In some implementations, such as Figure 4 and Figure 5 As shown, the aforementioned drive assembly may further include a guide mechanism and a connecting rod 13. The output end 102 of the lever is hinged to one end of the connecting rod 13, and the other end of the connecting rod 13 is hinged to the first clamping block 61, so that the output end 102 of the lever is indirectly connected to the first clamping block 61 through the connecting rod 13. The guide mechanism is used to guide the movement of the first clamping block 61, causing the first clamping block 61 to move in a straight line.

[0062] In the above example, the guide mechanism cooperates with the connecting rod 13 to ensure that the first clamping block 61 moves closer to or further away from the second clamping block 62 in a straight line under the drive of the lever 10, so as to facilitate the first clamping block 61 and the second clamping block 62 to cooperate in clamping the movable block 7.

[0063] It should be noted that the lever 10 described above can rotate around the fulcrum via a compliant hinge. The output end 102 of the lever can also be hinged to one end of the connecting rod 13 via a compliant hinge, and the other end of the connecting rod 13 can also be hinged to the first clamping block 61 via a flexible hinge.

[0064] In some implementations, such as Figure 4 and Figure 5 As shown, the power unit described above may include a first piezoelectric ceramic actuator 9, which applies force to the input end 101 of the lever.

[0065] In the above example, the first piezoelectric ceramic actuator 9 is a high-precision drive mechanism that can achieve high-precision displacement control.

[0066] It should be noted that piezoelectric ceramic actuators can convert electrical energy into mechanical motion. By controlling the applied voltage, the deformation of the piezoelectric ceramic can be precisely controlled, thereby achieving precise positioning and control. The specific structure of the piezoelectric ceramic actuator is existing technology and will not be described in detail here.

[0067] In some implementations, such as Figure 4 and Figure 5 As shown, the aforementioned guiding mechanism includes a guiding assembly, which comprises a first telescopic rod 11 and a second telescopic rod 12. The first telescopic rod 11 and the second telescopic rod 12 are disposed on opposite sides of the first clamping block 61. One end of the first telescopic rod 11 is hinged to the rotating output block 6, and the other end is hinged to a first side of the first clamping block 61. One end of the second telescopic rod 12 is hinged to the rotating output block 6, and the other end is hinged to a second side of the first clamping block 61. The first side and the second side are opposite sides of the first clamping block 61. The guiding assembly guides the movement of the first clamping block 61 through the cooperation of the first telescopic rod 11 and the second telescopic rod 12, causing the first clamping block 61 to move in a straight line.

[0068] It should be noted here that: (as...) Figure 4 As shown, one end of the first telescopic rod 11 can be flexibly hinged to the rotary output block 6, and the other end of the first telescopic rod 11 is also flexibly hinged to the first side of the first clamping block 61. One end of the second telescopic rod 12 can be flexibly hinged to the rotary output block 6, and the other end of the second telescopic rod 12 is also flexibly hinged to the second side of the first clamping block 61. Both the first telescopic rod 11 and the second telescopic rod 12 can extend and retract through their own elastic deformation. There can be two or more of the above-mentioned guiding mechanisms to improve the guiding accuracy of the first clamping block 61.

[0069] In a specific application example, the second drive mechanism drives the two clamps to move simultaneously, causing the two clamps to move closer or further apart.

[0070] Among them, such as Figure 4 and Figure 5 As shown, the aforementioned driving components can be two, each corresponding to one of the two clamping blocks. One driving component drives the first clamping block 61 to move, and the other driving component drives the second clamping block 62 to move. The second driving mechanism drives the two clamping blocks to move closer or further apart through these two driving components.

[0071] In some implementations, such as Figures 2 to 5 As shown, the aforementioned movable block 7 may be provided with a connecting shaft 71, which is fixed to the movable block 7. The movable block 7 is held or released by two clamping blocks through the connecting shaft 71.

[0072] In some implementations, such as Figures 6 to 8 As shown, the aforementioned movable platform 2 can be equipped with a 3-RRR parallel mechanism. The 3-RRR parallel mechanism has three branches and a triangular component serving as the working platform of the mechanism. Each of the three branches has a rotatable crank. It should be noted that the specific structure of the 3-RRR parallel mechanism is prior art and will not be described in detail here.

[0073] The aforementioned movable block 7 is a triangular component of the 3-RRR parallel mechanism, so that the movable block 7 is indirectly connected to the movable platform 2 through three branches. The aforementioned first drive mechanism includes three power mechanisms, which drive the corresponding cranks to rotate one by one through each power mechanism to apply force to the movable block 7.

[0074] Figure 8 A simplified structural diagram of a 3-RRR parallel mechanism is shown, where A1B1C1 is the first branch, A2B2C2 is the second branch, and A3B3C3 is the third branch. C1C2C3 are triangular components, A1B1 is the first crank, A2B2 is the second crank, and A3B3 is the third crank. A1, B1, C1, A2, B2, C2, A3, B3, and C3 are all revolute joints, such as flexible hinge revolute joints. Specifically, the link between A1 and B1 is the first link 15, which is the first crank mentioned above; the link between B1 and C1 is the second link 16; the link between A2 and B2 is the third link 17, which is the second crank mentioned above; the link between B2 and C2 is the fourth link 18; the link between A3 and B3 is the fifth link 19, which is the third crank mentioned above; and the link between B3 and C3 is the sixth link 20. Figure 7 A schematic diagram of a 3-RRR parallel mechanism set on the movable platform 2 is shown.

[0075] In order to achieve the function of the aforementioned power mechanism, in some embodiments, each of the aforementioned power mechanisms may include a second piezoelectric ceramic actuator 14, and each power mechanism drives the corresponding crank to rotate through the corresponding second piezoelectric ceramic actuator 14.

[0076] In the above example, the second piezoelectric ceramic actuator 14 is a high-precision drive mechanism that can achieve high-precision displacement control.

[0077] To achieve the aforementioned clutch mechanism function, in some implementations, such as... Figure 2As shown, the aforementioned clutch mechanism may include a third drive mechanism and a telescopic part 21 disposed on the movable block 7. The clutch mechanism drives the telescopic part 21 to extend until it abuts against the fixed seat 1 via the third drive mechanism, connecting the movable block 7 and the fixed seat 1, thus keeping the movable block 7 relatively fixed to the fixed seat 1. The clutch mechanism also drives the telescopic part 21 to retract until it separates from the fixed seat 1 via the third drive mechanism, thereby disconnecting the movable block 7 from the fixed seat 1 and allowing the movable block 7 to move relative to the fixed seat 1.

[0078] In the above example, the third drive mechanism cooperates with the telescopic part 21 to realize the function of the aforementioned clutch mechanism.

[0079] In some embodiments, the telescopic portion 21 described above can extend or retract through its own elastic deformation. The telescopic portion 21 can be integrally formed onto the movable block 7, making it a part of the movable block 7. When the third drive mechanism applies force to the telescopic portion 21, it can extend. When the third drive mechanism releases the telescopic portion 21, it can spring back, thus retracting.

[0080] In a specific application example, such as Figure 2 As shown, the telescopic part 21 may be provided with ball bearings 72, which allow the telescopic part 21 to abut or separate from the fixed seat 1. The ball bearings 72 help reduce damage to the fixed seat 1 when abutting.

[0081] In some implementations, such as Figure 2 As shown, the aforementioned third driving mechanism may include a third piezoelectric ceramic actuator 8, which drives the telescopic part 21 to extend or retract via the third piezoelectric ceramic actuator 8.

[0082] In the example above, the third piezoelectric ceramic actuator 8 is a high-precision drive mechanism that can achieve high-precision displacement control.

[0083] The present invention has the following advantages:

[0084] 1. High-frequency, micro-nano level displacement decoupling input with three degrees of freedom in a plane is achieved through parallel compliant mechanisms, and large-stroke motion output is achieved through micro-nano displacement step accumulation using a stick-slip drive mechanism.

[0085] 2. The friction between the drive foot and the fixed base 1 is dynamically adjusted using piezoelectric ceramics to achieve the characteristics of high load and no motion return during the stick-slip drive process. The telescopic part 21 on the aforementioned movable block 7 is the drive foot.

[0086] 3. Planar linear displacement decoupling output is achieved by arranging two sets of cross roller guides, and planar angular displacement output is achieved by micro-clamping rotary output block 6.

[0087] 4. The displacement output with large stroke, high precision, large load, full input decoupling, and linear motion output decoupling is achieved by using parallel compliant mechanisms and series-arranged motion guide mechanisms.

[0088] The above description is merely a preferred embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention's specification and drawings under the inventive concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A stick-slip driven positioning platform, characterized in that, Includes a fixed base (1), a movable platform (2), a movable block (7), a first drive mechanism, and a clutch mechanism; The movable platform (2) is mounted on the fixed base (1) and can move along the X and Y directions on the fixed base (1), wherein the X direction is perpendicular to the Y direction; The movable block (7) and the first driving mechanism are both mounted on the movable platform (2). The clutch mechanism is used to connect the movable block (7) and the fixed seat (1) so that the movable block (7) and the fixed seat (1) remain relatively fixed. The clutch mechanism is also used to disconnect the connection between the movable block (7) and the fixed seat (1) so that the movable block (7) can move relative to the fixed seat (1). The stick-slip driven positioning platform has a first state and a second state, wherein... In the first state, the clutch mechanism connects the movable block (7) and the fixed seat (1), and the first drive mechanism applies force to the movable block (7) to drive the movable platform (2) to move along the X direction or Y direction under the reaction force of the movable block (7). In the second state, the clutch mechanism disconnects the movable block (7) from the fixed seat (1), and the first drive mechanism applies force to the movable block (7) to move the movable block (7) to a preset position on the movable platform (2); The stick-slip drive positioning platform also has a third state; in the third state, the clutch mechanism disconnects the connection between the movable block (7) and the fixed seat (1), and the first drive mechanism applies force to the movable block (7) to make the movable block (7) rotate; wherein, the rotation axis of the movable block (7) is perpendicular to both the X direction and the Y direction; The stick-slip drive positioning platform further includes a rotating output block (6) and a second drive mechanism. The rotating output block (6) is provided with two clamping blocks. The second drive mechanism is used to drive the two clamping blocks to move closer or further apart. When the two clamping blocks are relatively close, they clamp the movable block (7) so that the rotating output block (6) and the movable block (7) remain relatively fixed. When the two clamping blocks are relatively far apart, they release the movable block (7) so that the movable block (7) can rotate relative to the rotating output block (6).

2. The stick-slip driven positioning platform as described in claim 1, characterized in that, The two clamping blocks are a first clamping block (61) and a second clamping block (62), and the second driving mechanism includes a driving component. The second driving mechanism drives the first clamping block (61) to move closer to or further away from the second clamping block (62) through the driving component, so that the two clamping blocks move closer to or further away from each other.

3. The stick-slip driven positioning platform as described in claim 2, characterized in that, The drive assembly includes a power unit and a lever (10). The lever (10) has an input end and an output end. The drive assembly is connected to the first clamp (61) through the output end of the lever (10). The drive assembly applies force to the input end (101) of the lever through the power unit, causing the output end of the lever (10) to move the first clamp (61) relatively closer to or away from the second clamp (62).

4. The stick-slip driven positioning platform as described in claim 3, characterized in that, The drive assembly further includes a guide mechanism and a connecting rod (13). The output end (102) of the lever is hinged to one end of the connecting rod (13), and the other end of the connecting rod (13) is hinged to the first clamping block (61), so that the output end (102) of the lever is connected to the first clamping block (61) through the connecting rod (13); wherein, the guide mechanism is used to guide the movement of the first clamping block (61) so that the first clamping block (61) moves in a straight line.

5. The stick-slip driven positioning platform as described in claim 3 or 4, characterized in that, The power unit includes a first piezoelectric ceramic actuator (9), which applies force to the input end (101) of the lever via the first piezoelectric ceramic actuator (9).

6. The stick-slip driven positioning platform as described in any one of claims 1 to 4, characterized in that, The movable platform (2) is provided with a 3-RRR parallel mechanism. The 3-RRR parallel mechanism has three branches and a triangular component as the working platform of the mechanism. All three branches have rotatable cranks. The movable block (7) is the triangular component, so that the movable block (7) is connected to the movable platform (2) through the three branches; the first drive mechanism includes three power mechanisms, and the first drive mechanism drives the corresponding crank to rotate one by one through each power mechanism to apply force to the movable block (7).

7. The stick-slip driven positioning platform as described in claim 6, characterized in that, Each of the aforementioned power mechanisms includes a second piezoelectric ceramic actuator (14), and each power mechanism drives the corresponding crank to rotate through the corresponding second piezoelectric ceramic actuator (14).

8. The stick-slip driven positioning platform as described in any one of claims 1 to 4 and 7, characterized in that, The clutch mechanism includes a third drive mechanism and a telescopic part (21) disposed on the movable block (7); The clutch mechanism drives the telescopic part (21) to extend to abut against the fixed seat (1) through the third drive mechanism to connect the movable block (7) and the fixed seat (1); the clutch mechanism also drives the telescopic part (21) to retract to separate from the fixed seat (1) through the third drive mechanism to disconnect the connection between the movable block (7) and the fixed seat (1).

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