A PSN-PZT-based piezoelectric ceramic material with high mechanical quality factor and large piezoelectric coefficient and a preparation method thereof

Abstract

The application relates to a PSN-PZT-based piezoelectric ceramic material with high mechanical quality factor and large piezoelectric coefficient and a preparation method thereof. 1‑x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1‑y‑z O3-0.6mol% Mn; wherein: 0<=x<=0.16, 0.01<=y<=0.04, 0.50<=z<=0.52.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of piezoelectric ceramic material preparation, and particularly relates to a PSN-PZT-based piezoelectric ceramic material with high mechanical quality factor and large piezoelectric coefficient mainly used for high-power transducers and a preparation method thereof. BACKGROUND

[0002] The piezoelectric transducer has the characteristics of high electroacoustic efficiency and large power capacity, and is widely used in modern high-tech fields such as petroleum chemical industry, aerospace, medical equipment, etc. The PZT-based piezoelectric ceramic material as the core component of the piezoelectric transducer utilizes the positive / negative piezoelectric effect to realize efficient conversion between mechanical energy and electrical energy. However, in the operation process of the transducer, energy loss will inevitably lead to heat generation, which will directly affect the service life of the device. Therefore, the piezoelectric ceramic is required to have high mechanical quality factor to ensure that the energy loss is as low as possible. At the same time, in order to realize higher vibration speed and improve the output power, the piezoelectric ceramic needs to have large piezoelectric coefficient, which helps to promote the miniaturization and intelligent development of the electromechanical equipment.

[0003] For high-power piezoelectric applications, the piezoelectric ceramic should not only meet the high mechanical quality factor, but also have large piezoelectric coefficient and electromechanical coupling coefficient. However, for the piezoelectric ceramic, the mechanical quality factor and the piezoelectric coefficient usually present a mutual restriction relationship, which seriously limits the further development of high-power piezoelectric applications. SUMMARY

[0004] In view of the above technical problems, the purpose of the present application is to provide a PSN-PZT-based piezoelectric ceramic material with high mechanical quality factor and large piezoelectric coefficient and a preparation method thereof.

[0005] In the first aspect, the present application provides a PSN-PZT-based piezoelectric ceramic material, the chemical composition of the PSN-PZT-based piezoelectric ceramic material is Pb 1-x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1-y-z O3-0.6mol%Mn;

[0006] Wherein: 0≤x≤0.16, 0.01≤y≤0.04, 0.50≤z≤0.52.

[0007] Preferably, the mechanical quality factor of the PSN-PZT-based piezoelectric ceramic material is at least 546, preferably 546-726, and more preferably 679-726.

[0008] The PSN-PZT-based piezoelectric ceramic material has a piezoelectric coefficient of at least 423 pC / N, preferably 423-502 pC / N, and more preferably 474-502 pC / N.

[0009] The PSN-PZT-based piezoelectric ceramic material has a Curie temperature of 233-350℃.

[0010] In a second aspect, the present application provides a preparation method of the above-mentioned PSN-PZT-based piezoelectric ceramic material, which comprises the following steps:

[0011] (1) Pb3O4 powder, BaCO3 powder, Sb2O3 powder, Nb2O5 powder, ZrO2 powder, TiO2 powder and MnCO3 powder are weighed according to the chemical composition of the PSN-PZT-based piezoelectric ceramic material, and after mixing, drying and sieving, raw material powder is obtained;

[0012] (2) The raw material powder is calcined and finely ground to obtain ceramic powder;

[0013] (3) The ceramic powder is mixed with a binder, granulated, aged and formed to obtain ceramic green bodies;

[0014] (4) The ceramic green bodies are arranged, sintered and cooled to obtain the PSN-PZT-based piezoelectric ceramic material.

[0015] Preferably, in step (1), the purity of the raw material powder is > 99%;

[0016] The mixing method is ball milling, the ball milling medium is zirconium balls and water, and the weight ratio of material:water:ball is 0.9-1.1:1.1-1.3:2.5-3.5, preferably 1:1.2:3; the ball milling speed is 300-360 rpm, preferably 340 rpm, and the ball milling time is 3-5 hours, preferably 4 hours;

[0017] The drying temperature is 80-120℃, and the drying time is 6-12h;

[0018] The sieving screen is 30-50 mesh, preferably 40 mesh.

[0019] Preferably, in step (2), the calcination temperature is 840-860℃, preferably 850℃, the holding time is 1-3 hours, preferably 2 hours, and the heating rate is 1-2℃ / min, preferably 2℃ / min;

[0020] The fine grinding ball mill medium is water and zirconium ball, the weight ratio of material: water: ball is 0.9-1.1: 1.2-1.4: 3-5, preferably 1: 1.3: 4; the ball mill rotation speed is 350-400 rpm, preferably 360 rpm, the ball mill time is 5-8 hours, preferably 6 hours;

[0021] The particle size of the fine ground ceramic powder is controlled to be 1-3 um.

[0022] Preferably, in step (3), the binder is a polyvinyl alcohol aqueous solution with a concentration of 6-7 wt%; wherein the amount of the binder added is 5-7 wt% of the mass of the ceramic powder, preferably 6 wt%;

[0023] The aging temperature is 20-30℃, and the aging time is 12-36 hours, preferably 24 hours.

[0024] Preferably, in step (4), the plastic removal temperature is 600-700℃, preferably 650℃, the holding time is 1.5-3 hours, preferably 2 hours, and the heating rate is 1-2℃ / min, preferably 2℃ / min;

[0025] The sintering temperature is 1220-1270℃, preferably 1250℃, the holding time is 1-3 hours, preferably 2 hours, and the heating rate is 1-3℃ / min, preferably 2℃ / min;

[0026] The cooling process is: first cooling at a rate of 1-5℃ / min to 800-900℃, preferably first cooling at a rate of 2℃ / min to 850℃, and then naturally cooling to room temperature in the furnace.

[0027] Preferably, in step (4), the green body after cooling is also subjected to silver firing treatment and thermoelectric coupling treatment.

[0028] Preferably, the silver firing treatment process includes: grinding the green body after cooling to a thickness of 0.9-1.1mm, coating silver electrodes on the upper and lower surfaces of the green body by screen printing, and then silver firing treatment at 750-850℃ for 10-20 minutes.

[0029] Preferably, the green body after cooling is ground to a thickness of 1mm, silver electrodes are coated on the upper and lower surfaces of the green body by screen printing, and then silver firing treatment is carried out at 800℃ for 15 minutes.

[0030] Preferably, the thermoelectric coupling treatment process includes: heating the green body after silver firing treatment to 290-400℃, then adjusting the voltage through a voltage stabilizing source to make the electric field loaded on the green body after silver firing treatment be 100-500V / mm and remain unchanged, and then waiting for natural cooling to room temperature to complete the thermoelectric coupling treatment.

[0031] Advantages

[0032] The Pb 1-x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1-y-z O3-0.6mol%Mn piezoelectric ceramic material provided by the present application has excellent electromechanical properties and good temperature stability, and is a powerful candidate material for high-power transducers. BRIEF DESCRIPTION OF DRAWINGS

[0033] Figure 1 XRD patterns of PSN-PZT-based piezoelectric ceramic materials (Pb 1-x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1-y- z O3-0.6mol%Mn) prepared for Examples 1-5;

[0034] Figure 2 Dielectric temperature spectrum curves of PSN-PZT-based piezoelectric ceramic materials (Pb 1-x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1-y- z O3-0.6mol%Mn) prepared for Examples 1-5;

[0035] Figure 3 Graphs of mechanical quality factor and piezoelectric coefficient versus x of PSN-PZT-based piezoelectric ceramic materials (Pb 1-x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1-y- z O3-0.6mol%Mn) prepared for Examples 1-5. DETAILED DESCRIPTION

[0036] The present application is further illustrated by the following examples, which should be understood as merely illustrative of the present application and not limiting thereof.

[0037] First, the present invention provides a PSN-PZT-based piezoelectric ceramic material with both high mechanical quality factor and large piezoelectric coefficient. The chemical composition of the PSN-PZT-based piezoelectric ceramic material can be: Pb 1-x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1-y-z O3-0.6mol%Mn(Pb 1-x Ba x SNZT-Mn); where: 0≤x≤0.16, 0.01≤y≤0.04, 0.50≤z≤0.52.

[0038] The present invention uses a ternary system, PSN-PZT, as the matrix material. By equimolarly substituting Ba for Pb at the A-site of the perovskite and doping with 0.6 mol% Mn, a PZT-based piezoelectric material with a high mechanical quality factor and large piezoelectric coefficient is obtained. The high piezoelectric coefficient stems from the lattice distortion caused by Ba doping and the multiphase coexistence of the MPB region. Furthermore, the highly oriented domain structure resulting from thermoelectric coupling enhances the extrinsic contribution to the piezoelectric response, which is the primary reason for the high piezoelectric coefficient. The high mechanical quality factor is attributed to the defect dipoles formed by Mn doping and the additional oxygen vacancies in the lattice caused by Ba segregation, which inhibit domain wall motion. Furthermore, the ceramic obtained by Ba and Mn doping combines a high mechanical quality factor with a large piezoelectric coefficient, a high Curie temperature, and good temperature stability, making it promising for application in high-power transducers.

[0039] If the value of x is too large, the piezoelectric coefficient increases slightly, but due to the enhanced diffusion phase transition effect, the mechanical quality factor and Curie temperature will be significantly reduced. If the value of y is too large or too small, or if z is too large or too small, the phase structure will shift to the MPB region, the region where multiple phases coexist, which is not conducive to the piezoelectric coefficient. If the Mn doping level is too high, the defect dipoles formed will have an excessively strong pinning effect on the domain wall, resulting in a decrease in the piezoelectric coefficient. If the doping level is too low, the mechanical quality factor is small, and the performance characteristics of the piezoelectric coefficient are only high.

[0040] The piezoelectric coefficient of the PSN-PZT-based piezoelectric ceramic material was tested using a ZJ-3A quasi-static tester from the Institute of Acoustics, Chinese Academy of Sciences; and the mechanical quality factor of the PSN-PZT-based piezoelectric ceramic material was tested using an impedance analyzer (HP4294A).

[0041] In some embodiments, the PSN-PZT-based piezoelectric ceramic material has a mechanical quality factor of at least 546, preferably 546-726, more preferably 679-726; a piezoelectric coefficient of at least 423 pC / N, preferably 423-502 pC / N, more preferably 474-502 pC / N; and a Curie temperature of 233-350°C.

[0042] Hereinafter, the preparation method of the PSN-PZT-based piezoelectric ceramic material provided by the present application is exemplarily described. The preparation method of the PSN-PZT-based piezoelectric ceramic material can include the following steps:

[0043] (1) Pb3O4 powder, BaCO3 powder, Sb2O3 powder, Nb2O5 powder, ZrO2 powder, TiO2 powder and MnCO3 powder are weighed according to the stoichiometric ratio of Pb3O4 0.6 mol% Mn, and after mixing, drying and sieving, raw material powder is obtained; 1-x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1-y-z O3-0.6mol% Mn, and after mixing, drying and sieving, raw material powder is obtained;

[0044] (2) The raw material powder is calcined and finely ground to obtain ceramic powder;

[0045] (3) The ceramic powder is mixed with a binder, granulated, aged and formed to obtain ceramic green bodies;

[0046] (4) The ceramic green bodies are arranged, sintered and cooled to obtain the PSN-PZT-based piezoelectric ceramic material.

[0047] In some embodiments, in step (1), the purity of the raw material powder is > 99%; the mixing method can be ball milling, and the ball milling medium can be zirconium balls and water, wherein the weight ratio of material: water: balls can be 0.9-1.1: 1.1-1.3: 2.5-3.5, preferably 1: 1.2: 3; the ball milling speed can be 300-360 rpm, preferably 340 rpm, and the ball milling time can be 3-5 hours, preferably 4 hours; the drying temperature can be 80-120°C, and the drying time can be 6-12 hours; and the sieve mesh for sieving can be 30-50 mesh, preferably 40 mesh.

[0048] In some embodiments, in step (2), the calcination temperature can be 840-860℃, preferably 850℃, the holding time can be 1-3 hours, preferably 2 hours, and the heating rate can be 1-2℃ / min, preferably 2℃ / min. The purpose of calcination is to perform chemical reactions and synthesize a single phase. If the calcination temperature is too low, the reaction is insufficient and the performance is reduced. If the calcination temperature is too high, a large amount of lead oxide is easily volatilized, making it difficult to crush the pre-fired material.

[0049] In some embodiments, in step (2), the ball milling medium can be water and zirconium balls, and the weight ratio of material:water:ball can be 0.9-1.1:1.2-1.4:3-5, preferably 1:1.3:4; the ball milling speed can be 350-400 rpm, preferably 360 rpm, and the ball milling time can be 5-8 hours, preferably 6 hours.

[0050] In some embodiments, in step (2), the particle size of the ceramic powder after fine grinding can be controlled to be 1-3um. Through the process of calcination and fine grinding, the following effects can be achieved: (1) particle uniformization: the particle size of the ceramic powder after calcination is not uniform, fine grinding can break and uniformize these particles, ensuring the density and uniformity of the material during subsequent forming and sintering; (2) improve sintering activity: the powder after fine grinding has a larger specific surface area, which helps to improve the activity during sintering, so that dense sintering can be achieved at a lower temperature, thereby reducing the grain growth and improving the mechanical properties and piezoelectric properties of the material; (3) improve the forming performance: the powder after fine grinding has better flowability and is easy to form, which can reduce defects during the forming process, improve the density and uniformity of the green body, and thus improve the quality of the final product.

[0051] In some embodiments, in step (3), the binder can be a polyvinyl alcohol aqueous solution with a concentration of 6-7wt%; and the amount of the binder added can be 5-7wt% of the mass of the ceramic powder, preferably 6wt%.

[0052] In some embodiments, in step (3), the aging temperature can be 20-30℃, and the aging time can be 12-36 hours, preferably 24 hours. Aging can rearrange and adjust the particles inside the material, eliminate internal stress, and thus improve the uniformity and stability of the green body.

[0053] In some embodiments, in step (4), the plastic removal temperature can be 600-700℃, preferably 650℃, the holding time can be 1.5-3 hours, preferably 2 hours, and the heating rate can be 1-2℃ / min, preferably 2℃ / min.

[0054] In some embodiments, in step (4), the sintering temperature may be 1220-1270°C, preferably 1250°C, the holding time may be 1-3 hours, preferably 2 hours, and the heating rate may be 1-3°C / min, preferably 2°C / min. If the sintering temperature is too high or the holding time is too long, the grains may grow abnormally, resulting in abnormally large and irregularly shaped grains, and lead volatilization may be severe. If the sintering temperature is too low or the holding time is too short, the ceramic material may not be fully densified, leaving a large number of pores, which may affect the mechanical strength and piezoelectric properties of the material.

[0055] In some embodiments, in step (4), the cooling process can be: first cooling to 800-900°C (e.g., 850°C) at a rate of 1-5°C / min (e.g., 2°C / min), and then naturally cooling to room temperature in the furnace. This cooling rate can promote the segregation of Ba in this material system, forming internal defect vacancies, thereby obtaining a higher mechanical quality factor.

[0056] In some embodiments, step (4) may further include silver sintering and thermoelectric coupling treatment of the cooled blank.

[0057] In some embodiments, the silver sintering process may include: polishing the cooled blank to a thickness of 0.9-1.1 mm (e.g., 1 mm), coating silver electrodes on the upper and lower surfaces of the blank by screen printing, and then sintering the silver at 750-850° C. (e.g., 800° C.) for 10-20 minutes (e.g., 15 minutes).

[0058] In some embodiments, the thermoelectric coupling treatment process may include: heating the silver-sintered blank to 30-100° C. (e.g., 290-400° C.) above the Curie temperature, then adjusting the voltage through a voltage regulator so that the electric field applied to the silver-sintered blank is 100-500 V / mm (e.g., 500 V / mm) and remains unchanged, and waiting for natural cooling to room temperature to complete the thermoelectric coupling treatment.

[0059] If the temperature is too low (below the Curie temperature), the domain structure cannot be re-nucleated; if the temperature is too high (more than 100°C above the Curie temperature), the domain structure control effect will be affected. At the same time, if the electric field is too small, the domain structure cannot be fully oriented; if the electric field is too large, it is easy to break through the ceramic.

[0060] The PSN-PZT-based piezoelectric ceramic material is prepared by the steps of batching, mixing, calcining, fine grinding, molding, plastic removal, sintering, silver sintering and thermocouple coupling treatment through a solid phase sintering method, and the process flow is simple, the repeatability is good, the material performance is excellent and easy to control. Meanwhile, the piezoelectric ceramic material provided by the application has simple composition, high mechanical quality factor, large piezoelectric coefficient and high Curie temperature, and is suitable for high-power transducer application fields.

[0061] The following examples are further illustrated to explain the application. It should be understood that the following examples are only used to further illustrate the application, and cannot be understood as the limitation of the protection scope of the application. Some non-essential improvements and adjustments made by the person skilled in the art according to the above content of the application are within the protection scope of the application. The specific process parameters in the following examples are only one example in the appropriate range, that is, the person skilled in the art can select in the appropriate range through the description herein, and is not limited to the specific values in the following examples. In the following examples and comparative examples, if not specially stated, Pb3O4, BaCO3, Sb2O3, Nb2O5, ZrO2, TiO2 and MnCO3 powders with a purity of more than 99% are used for batching according to the chemical formula.

[0062] Example 1

[0063] The preparation method of the PSN-PZT-based piezoelectric ceramic material (Pb 1-x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1-y-z The preparation method of the PSN-PZT-based piezoelectric ceramic material (Pb

[0064] (1) The weighed raw materials are put into a nylon tank, zirconium oxide balls and deionized water are used as the ball milling medium, and the raw materials are mixed according to the mass ratio of raw materials: deionized water: zirconium oxide balls = 1:1.2:3, and fully mixed on a planetary ball mill for 4 hours; after drying, the raw material powder is obtained by passing through a 40-mesh sieve;

[0065] (2) The raw material powder is pressed into a cylindrical bulk by a pressure machine; the temperature is raised to 850℃ at a rate of 2℃ / min in a muffle furnace, and then the temperature is kept for 2 hours, and then the ceramic pre-synthesized powder is obtained by crushing and passing through a 40-mesh sieve; the ceramic pre-synthesized powder is further finely ground on a planetary ball mill according to the mass ratio of ceramic pre-synthesized powder: deionized water: zirconium oxide balls = 1:1.3:4 for 6 hours, and then the ceramic powder is obtained by drying;

[0066] (3) After adding PVA binder into the ceramic powder and granulating, the ceramic green body is obtained by pressing at 1.5 MPa after aging for 24 hours and passing through a 40-mesh sieve;

[0067] (4) The ceramic green body is heated to 650℃ at a heating rate of 2℃ / min, and plastic is removed after holding for 2 hours; then, it is placed in a crucible and heated to 1250℃ at a heating rate of 2℃ / min, and holding for 2 hours, and then cooled to 850℃ at a cooling rate of 2℃ / min, and then cooled to room temperature with the furnace;

[0068] After the green body is cooled and thinned to 1mm on both sides, ultrasonic cleaning and drying, silver electrodes are plated on the green body by screen printing method, and the green body is fired at 800℃ for 20 minutes;

[0069] The green body after silver firing is placed in a muffle furnace and heated to 400℃, and then the voltage is adjusted by a constant voltage source to make the electric field loaded on the green body after silver firing be 500V / mm and remain unchanged, and then the green body is naturally cooled to room temperature to complete the thermoelectric coupling treatment, and the PSN-PZT-based piezoelectric ceramic material is obtained.

[0070] Example 2

[0071] The preparation method of the PSN-PZT-based piezoelectric ceramic material provided in the embodiment mainly differs from that of Example 1 in that (1) x=0.04, and (2) the thermoelectric coupling treatment temperature is 370℃.

[0072] Example 3

[0073] The preparation method of the PSN-PZT-based piezoelectric ceramic material provided in the embodiment mainly differs from that of Example 1 in that (1) x=0.08, and (2) the thermoelectric coupling treatment temperature is 340℃.

[0074] Example 4

[0075] The preparation method of the PSN-PZT-based piezoelectric ceramic material provided in the embodiment mainly differs from that of Example 1 in that (1) x=0.12, and (2) the thermoelectric coupling treatment temperature is 320℃.

[0076] Example 5

[0077] The preparation method of the PSN-PZT-based piezoelectric ceramic material provided in the embodiment mainly differs from that of Example 1 in that (1) x=0.16, and (2) the thermoelectric coupling treatment temperature is 290℃.

[0078] Figure 1 The PSN-PZT-based piezoelectric ceramic material (Pb 1-x Ba x (Sb 0.5Nb 0.5 ) y Zr z Ti 1-y- z XRD patterns of PSN-PZT based piezoelectric ceramic materials (Pb 1-x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1-y-z O3-0.6mol%Mn) prepared in Example 1-5. As can be seen from the figure, Pb

[0079] Figure 2 XRD patterns of PSN-PZT based piezoelectric ceramic materials (Pb 1-x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1-y- z Dielectric temperature spectrum curves of PSN-PZT based piezoelectric ceramic materials (Pb

[0080] Figure 3 Dielectric temperature spectrum curves of PSN-PZT based piezoelectric ceramic materials (Pb 1-x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1-y- z Mechanical quality factor and piezoelectric coefficient curves of PSN-PZT based piezoelectric ceramic materials (Pb

[0081] Comparative Example 1

[0082] The preparation method of the PSN-PZT based piezoelectric ceramic material provided in the present comparative example refers to Example 1, the main difference being that (1) x = 0.20; (2) the thermal coupling treatment temperature is 260°C.

[0083] The piezoelectric coefficient of the ceramic material prepared in the present comparative example only slightly increases, but the mechanical quality factor and Curie temperature of the ceramic material obviously decrease.

[0084] Comparative Example 2

[0085] The preparation method of the PSN-PZT-based piezoelectric ceramic material provided in the present comparative example refers to that of Example 1, and the main difference lies in that (1) x = 0.12, and the Mn doping content is 1.4 mol% in excess; (2) the heat coupling treatment temperature is 320°C.

[0086] The mechanical quality factor of the ceramic material prepared in the present comparative example is greatly improved, but the piezoelectric coefficient of the ceramic material obviously decreases.

[0087] Table 1 below shows the piezoelectric and dielectric performance parameters of the piezoelectric ceramic materials prepared in Examples 1-5 and Comparative Examples 1-2:

[0088] Sample x d 33 (pC / N) Q m ]]> T c (°C) e r ]] k p ]]> Example 1 0.00 423 582 350 1733 0.64 Example 2 0.04 449 658 320 1928 0.67 Example 3 0.08 474 679 291 2126 0.68 Example 4 0.12 502 726 267 2405 0.69 Example 5 0.16 507 546 233 2691 0.67 Comparative Example 1 0.20 514 370 203 3139 0.64 Comparative Example 2 0.12 410 1200 267 2437 0.65

[0089] Although the present application has been described in detail by the above preferred embodiments, it should be recognized that the above description should not be considered as limiting the present application. Various modifications and alternatives to the present application will be apparent to those skilled in the art after reading the above description. Therefore, the scope of protection of the present application should be defined by the appended claims.

Claims

1. A PSN-PZT-based piezoelectric ceramic material, characterized in that: The chemical composition of the PSN-PZT based piezoelectric ceramic material is Pb 1-x Ba x (Sb 0.5 Nb 0.5 ) y Zr z Ti 1-y-z O3-0.6mol%Mn; Among them: 0.04≤x≤0.16, 0.01≤y≤0.04, 0.50≤z≤0.52; During the preparation process of the PSN-PZT-based piezoelectric ceramic material, the sintering temperature is 1220-1270°C, the holding time is 1-3 hours, and the heating rate is 1-3°C / min; the cooling process is first cooling to 800-900°C at a rate of 1-5°C / min, and then naturally cooling to room temperature in the furnace.

2. The PSN-PZT-based piezoelectric ceramic material according to claim 1, characterized in that: The mechanical quality factor of the PSN-PZT-based piezoelectric ceramic material is at least 546; The piezoelectric coefficient of the PSN-PZT-based piezoelectric ceramic material is at least 423 pC / N; The Curie temperature of the PSN-PZT-based piezoelectric ceramic material is 233-350°C.

3. A method for preparing the PSN-PZT-based piezoelectric ceramic material according to claim 1, characterized in that: The preparation method comprises the following steps: (1) According to the chemical composition ratio of the above-mentioned PSN-PZT-based piezoelectric ceramic material, Pb3O4 powder, BaCO3 powder, Sb2O3 powder, Nb2O5 powder, ZrO2 powder, TiO2 powder, and MnCO3 powder are weighed respectively, and raw material powders are obtained after mixing, drying, and sieving; (2) calcining and finely grinding the raw material powder to obtain ceramic powder; (3) mixing the ceramic powder with a binder, granulating, aging and molding to obtain a ceramic green body; (4) The ceramic green body is subjected to plastic removal, sintering, and cooling to obtain the PSN-PZT-based piezoelectric ceramic material.

4. The preparation method according to claim 3, characterized in that In step (1), the purity of the raw material powder is greater than 99%; The mixing method is ball milling, the ball milling medium is zirconium balls and water, wherein the weight ratio of material: water: balls is 0.9-1.1: 1.1-1.3: 2.5-3.5; the ball milling speed is 300-360 rpm, and the ball milling time is 3-5 hours; The drying temperature is 80-120°C and the drying time is 6-12h; The sieve used for the screening is 30-50 mesh.

5. The preparation method according to claim 3, characterized in that In step (2), the calcination temperature is 840-860°C, the holding time is 1-3 hours, and the heating rate is 1-2°C / min; The ball milling medium for fine grinding is water and zirconium balls, and the weight ratio of material: water: balls is 0.9-1.1:1.2-1.4:3-5; the ball milling speed for fine grinding is 350-400 rpm, and the ball milling time is 5-8 hours; The particle size of the finely ground ceramic powder is controlled to be 1-3 μm.

6. The preparation method according to claim 3, characterized in that In step (3), the binder is a polyvinyl alcohol aqueous solution with a concentration of 6-7 wt%; wherein the amount of the binder added is 5-7 wt% of the mass of the ceramic powder; The aging temperature is 20-30° C., and the aging time is 12-36 hours.

7. The preparation method according to claim 3, characterized in that In step (4), the temperature of the plastic discharge is 600-700°C, the holding time is 1.5-3 hours, and the heating rate is 1-2°C / min.

8. The preparation method according to claim 3, characterized in that Step (4) also includes silver firing and thermoelectric coupling treatment of the cooled blank.

9. The preparation method according to claim 8, characterized in that The silver-burning treatment process includes: grinding the cooled blank to a thickness of 0.9-1.1 mm, coating silver electrodes on the upper and lower surfaces of the blank by screen printing, and then silver-burning treatment at 750-850° C. for 10-20 minutes.

10. The preparation method according to claim 8, characterized in that The thermoelectric coupling treatment process includes: heating the silver-sintered blank to 290-400°C, then adjusting the voltage through a voltage regulator so that the electric field applied to the silver-sintered blank is 100-500V / mm and remains constant, and waiting for natural cooling to room temperature to complete the thermoelectric coupling treatment.

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