Discharge plasma type light source extreme ultraviolet light power measuring device and method

Abstract

The application provides a kind of discharge plasma type light source extreme ultraviolet light power measuring device and method, comprising: for DPP light source, ellipsoidal light beam of wide spectral band range from x-ray to visible light is generated by electrode discharge filtering, forming the light beam of set spectral band range;Spectrometer is used to detect the light beam of set spectral band range formed by the filter, the light intensity distribution of the light beam in spectral band range is obtained, and the light power proportion of extreme ultraviolet light in spectral band range is calculated by area integration;Photoelectric detector is used to convert the light power signal of the light beam of set spectral band range formed by the filter into current signal, and the total power of light beam in spectral band range is calculated by the response curve in the photoelectric detector;According to the light power proportion and the total power of light beam, the power of extreme ultraviolet light (13.5nm, ±2%) is calculated.The application has simple measurement structure and high measurement accuracy.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical power measurement, in particular to a discharge plasma type light source extreme ultraviolet light power measurement device and method. BACKGROUND

[0002] With the progress of science and technology, the measurement technology of extreme ultraviolet light source is also developing. Extreme ultraviolet light source has important applications in many fields, such as photolithography technology, angle-resolved photoemission spectroscopy (ARPES) measurement, etc. The measurement of extreme ultraviolet light source usually involves the measurement of its power, energy, spectrum, etc.

[0003] The existing measurement technology of extreme ultraviolet light source, such as Chinese invention application No. 202311864012.4, discloses a device for multi-angle measurement of extreme ultraviolet light generated by laser plasma, which can measure the light flux and spot size of extreme ultraviolet light generated by plasma when laser is incident at different angles by designing the optical path. However, it does not involve the measurement of extreme ultraviolet light power of DPP light source.

[0004] DPP light source can meet the detection needs of laboratory level such as photoresist detection and mask detection due to its relatively simple structure, small footprint and high output power. However, there is no mature solution for the monochromatic light power measurement of DPP light source containing extreme ultraviolet light. As one of the important evaluation criteria for DPP light source, power plays a great guiding role in the subsequent research and development and use of light source.

[0005] For the measurement of extreme ultraviolet light power of DPP light source, there are not many methods at present. One of the ideas is to filter DPP light source into monochromatic light through special optical devices and directly measure the monochromatic light power. However, in the long optical path, the energy loss caused by the propagation of light beam is large, the loss coefficient is unknown, and the measured monochromatic light power cannot be directly converted. Therefore, it may lead to inaccurate results. In particular, the measurement of extreme ultraviolet (13.5 nm, ±%2) light power in its spectral range is a difficult problem. SUMMARY

[0006] In view of the defects in the prior art, the purpose of the present application is to provide a discharge plasma type light source extreme ultraviolet light power measurement device and method, which can simply and effectively measure the discharge plasma type light source extreme ultraviolet light power, especially the extreme ultraviolet (13.5 nm, ±%2) light power.

[0007] According to a first aspect of the present application, a discharge plasma type light source extreme ultraviolet light power measurement method is provided, comprising:

[0008] filtering an ellipsoidal light beam of a wide spectral band range from x-ray to visible light generated by electrode discharge of a DPP light source, to form a light beam of a set spectral band range;

[0009] detecting the light beam of the set spectral band range formed after filtering by using a spectrometer, obtaining a light intensity distribution of the light beam in the spectral band range, and calculating a light power proportion of light of different wavelengths in the spectral band range by area integration, including a light power proportion of (13.5 nm, ±2%) extreme ultraviolet light in the spectral band range, and a light power proportion of light of each wavelength other than (13.5 nm, ±2%) extreme ultraviolet light in the spectral band range;

[0010] converting a light power signal of the light beam of the set spectral band range formed after filtering into a total current signal by using a photodetector, and obtaining a contribution ability of different wavelengths to the total current by a current, total power and wavelength response curve in the photodetector, and obtaining a plurality of results corresponding to different wavelengths according to the current contribution ability of different wavelengths multiplied by the total power and multiplied by a corresponding power proportion at the wavelength, and adding the plurality of results to calculate the total power of the light beam in the spectral band range;

[0011] calculating (13.5 nm, ±2%) extreme ultraviolet light power according to the light power proportion of light of different wavelengths in the spectral band range and the total power of the light beam.

[0012] Optionally, according to the light power proportion of light of different wavelengths in the spectral band range and the total power of the light beam, including:

[0013] calculating extreme ultraviolet light (13.5 nm, ±2%) power of a DPP light source under a specific solid angle according to the light power proportion and the total power of the light beam obtained by the spectrometer and the photodetector;

[0014] integrating the extreme ultraviolet light (13.5 nm, ±2%) power under the specific solid angle to obtain extreme ultraviolet light (13.5 nm, ±2%) power in a 2π or 4π solid angle.

[0015] According to a second aspect of the present application, a device for measuring extreme ultraviolet light power of a discharge plasma light source is provided, including a spectrometer, a photodetector and an extreme ultraviolet light power calculation module, the spectrometer is provided with a first filtering component, and the photodetector is provided with a second filtering component, wherein:

[0016] The first filtering component filters an ellipsoidal light beam of a wide spectral band range from x-ray to visible light generated by electrode discharge of a DPP light source, to form a light beam of a set spectral band range;

[0017] Spectrometer: detecting the light beam of the set spectral range formed by the first filtering component, obtaining the light intensity distribution of the light beam in the spectral range, calculating the light power proportion of different wavelengths of light in the spectral range by area integration, including the light power proportion of (13.5nm, ±2%) extreme ultraviolet light in the spectral range, and the light power proportion of each wavelength of light other than (13.5nm, ±2%) extreme ultraviolet light in the spectral range;

[0018] Second filtering component: filtering the ellipsoidal light beam of a wide spectral range from x-rays to visible light generated by electrode discharge of the DPP light source, forming a light beam of a set spectral range;

[0019] Photodetector: converting the light power signal of the light beam of the set spectral range formed by the second filtering component into a current signal, and obtaining the contribution ability of different wavelengths to the total current through the current, total power and wavelength response curve in the photodetector, and obtaining a plurality of results corresponding to different wavelengths according to the current contribution ability of different wavelengths multiplied by the total power and multiplied by the corresponding power proportion at the wavelength, and adding the plurality of results to calculate the total power of the light beam in the spectral range;

[0020] Extreme ultraviolet light power calculation module: calculating the extreme ultraviolet light (13.5nm, ±2%) power according to the obtained light power proportion and the total power of the light beam.

[0021] Optionally, the extreme ultraviolet light power calculation module comprises:

[0022] First calculation module: calculating the extreme ultraviolet light power (13.5nm, ±2%) of the DPP light source under a specific solid angle according to the light power proportion and the total power of the light beam obtained by the spectrometer and the photodetector;

[0023] Second calculation module: integrating the extreme ultraviolet light power (13.5nm, ±2%) in the 2π or 4π solid angle according to the extreme ultraviolet light power of the DPP light source under the specific solid angle.

[0024] Optionally, a current detection module is further arranged after the photodetector, and the current detection module measures the current signal output by the photodetector to calculate the total power of the filtered light beam through the response curve of the photodetector.

[0025] Compared with the prior art, the embodiment of the present application has at least one of the following beneficial effects:

[0026] To separate 13.5nm extreme ultraviolet light alone measurement, need complex separation instrument and mirror surface, but for the wavelength of extreme ultraviolet light, every increase a device will cause the measurement precision to drop substantially. The discharge plasma type light source extreme ultraviolet light power measuring device and method provided by the application can reduce the loss caused by the device as much as possible. The power size of the wavelength range to be measured can be simply and accurately measured through the cooperation of the above-mentioned equipment. The measurement structure is simple and the measurement accuracy is high. BRIEF DESCRIPTION OF DRAWINGS

[0027] Other features, objects and advantages of the present application will become more apparent from the following detailed description of non-limiting embodiments, read in conjunction with the accompanying drawings:

[0028] Figure 1 The discharge plasma type light source extreme ultraviolet light power measurement principle diagram in an embodiment of the application;

[0029] Figure 2 The optical spectrum instrument working principle diagram in an embodiment of the application;

[0030] Figure 3 The Xe 5-20nm spectrum distribution obtained by the optical spectrum instrument in an embodiment of the application, and the 2% bandwidth at the wavelength 13.5nm is marked in purple;

[0031] Figure 4 The current, power and wavelength responsivity curve diagram of the photodetector in an embodiment of the application. DETAILED DESCRIPTION

[0032] The application will be described in detail below with specific embodiments. The following embodiments will help those skilled in the art to further understand the application, but do not limit the application in any form. It should be pointed out that, for those skilled in the art, without departing from the concept of the application, a number of modifications and improvements can be made, which are within the scope of protection of the application. The parts not described in detail in the following embodiments can be realized by using the prior art.

[0033] The discharge plasma (DPP) type light source is the first choice of desktop extreme ultraviolet light source due to its relatively simple structure and high light power. However, due to the extremely wide spectral range of the DPP type light source, covering all spectral band ranges from soft x-ray to visible light, the measurement of the extreme ultraviolet (13.5nm, ±2%) light power in the spectral band range is a difficult problem. Therefore, the present application provides a simple and effective discharge plasma type light source extreme ultraviolet light power measurement method and device.

[0034] REFERENCE Figure 1As shown, the embodiment of the present application provides a method for measuring the extreme ultraviolet light power of a discharge plasma light source, comprising the following steps:

[0035] S1, filtering the ellipsoidal light beam of a wide spectral band range from x-ray to visible light generated by electrode discharge of the DPP light source to form a light beam of a set spectral band range;

[0036] In an embodiment, the ellipsoidal light beam of a wide spectral band range from x-ray to visible light can be filtered to a spectral band range of 1-20 nm.

[0037] S2, detecting the light beam of the set spectral band range formed after filtering by using a spectrometer to obtain the light intensity distribution of the light beam in the spectral band range, and calculating the light power proportion of different wavelengths of light in the spectral band range by area integration, including the light power proportion of (13.5 nm, ±2%) extreme ultraviolet light in the spectral band range, and the light power proportion of each wavelength of light other than (13.5 nm, ±2%) extreme ultraviolet light in the spectral band range;

[0038] In this step, the each wavelength of light other than 13.5 nm ±2% extreme ultraviolet light refers to the light of the remaining wavelengths other than extreme ultraviolet light (13.5 nm, ±2%), i.e. the light from 1 nm to the visible light band other than the extreme ultraviolet light (13.5 nm, ±2%) range; after the same bandwidth is divided, the light power proportion of each wavelength represented by the center point in the spectral band range.

[0039] In an embodiment, the spectrometer detects the filtered light beam to calculate the light intensity distribution of the light beam in the spectral band range of 5-20 nm.

[0040] S3, converting the light power signal of the light beam of the set spectral band range formed after filtering into a current signal by using a photoelectric detector, and obtaining the contribution ability of different wavelengths to the total current by the response curves of current, total power and wavelength in the photoelectric detector, and calculating the total power of the light beam in a specific solid angle in the spectral band range by the sum of the product of the current contribution ability at different representative wavelengths and the total power and the corresponding power proportion;

[0041] In this step, the specific solid angle in the spectral band range is calculated by the size of the photoelectric detector and the distance between the detector and the light source.

[0042] In this step, the total power of the light beam in the spectral band range is calculated by adding a plurality of results corresponding to different wavelengths obtained by multiplying the current contribution ability of different wavelengths by the total power and then multiplying the corresponding power proportion at the representative wavelength.

[0043] In an embodiment, the photoelectric detector measures the filtered light beam, and calculates the total power of the light beam in the 5-370 nm spectral band.

[0044] S4, according to the light power ratio and the total power of the light beam, the extreme ultraviolet light (13.5 nm, ±2%) power in a specific solid angle is calculated.

[0045] In the above embodiments of the present application, steps S2 and S3 do not need to be strictly performed in sequence, can be executed in parallel, or can be performed in any order.

[0046] In the above embodiments of the present application, the filtered light beams of S1 respectively reach the spectrometer and the photoelectric detector. The filtering can be performed by using two identical filtering components. Preferably, the filtering of the light beam reaching the spectrometer can be directly performed by using the filter provided with the spectrometer, or can be performed by using another filter device. The filtering component can be a zirconium film filter, which filters the ellipsoidal light beam in a wide spectral band from x-rays to visible light into a spectral band of 1-20 nm.

[0047] The above embodiments of the present application can simply and effectively measure the extreme ultraviolet light power of the discharge plasma type light source.

[0048] In some preferred embodiments, when performing S4, according to the light power ratio and the total power of the light beam obtained by the spectrometer and the photoelectric detector, the extreme ultraviolet light (13.5 nm, ±2%) power can be further calculated by:

[0049] S401, according to the light power ratio and the total power of the light beam obtained by the spectrometer and the photoelectric detector, the extreme ultraviolet light (13.5 nm, ±2%) power of the DPP light source in a specific solid angle is calculated; wherein the specific solid angle is determined by the size of the photoelectric detector and the distance between the photoelectric detector and the light source.

[0050] S402, according to the extreme ultraviolet light power of the DPP light source in the specific solid angle, the extreme ultraviolet light (13.5 nm, ±2%) power in a 2π or 4π solid angle, i.e. the extreme ultraviolet light power, is integrated.

[0051] Based on the same technical concept, another embodiment of the present application further provides a measurement device for the extreme ultraviolet light power of a discharge plasma type light source, which comprises a spectrometer, a photoelectric detector, and an extreme ultraviolet light power calculation module, the spectrometer is provided with a first filtering component, and the photoelectric detector is provided with a second filtering component, wherein:

[0052] The first filtering component filters the ellipsoidal light beam in a wide spectral band from x-rays to visible light generated by the discharge of the DPP light source through the electrode, and forms a light beam in a set spectral band;

[0053] Spectrometer: detecting the light beam of the set spectral range formed by the first filter component, obtaining the light intensity distribution of the light beam in the spectral range, and calculating the extreme ultraviolet light (13.5 nm, ±2%) power and the light power proportion of each wavelength in the spectral range represented by the center point after dividing the remaining part into the same bandwidth;

[0054] Second filter component: filtering the ellipsoidal light beam of the wide spectral range from x-ray to visible light generated by the electrode discharge of the DPP light source, and forming a light beam of a set spectral range;

[0055] Photodetector: converting the light power signal of the light beam of the set spectral range formed by the second filter component into a current signal, and obtaining the contribution ability of different wavelengths to the total current through the response curve of current, power and wavelength in the photodetector, and obtaining a plurality of results corresponding to different wavelengths according to the current contribution ability of different wavelengths multiplied by the total power and multiplied by the corresponding power proportion at the representative wavelength, and calculating the total power of the light beam in the spectral range by adding the plurality of results;

[0056] Extreme ultraviolet light power calculation module: calculating the extreme ultraviolet light (13.5 nm, ±2%) power according to the obtained light power proportion and the total power of the light beam.

[0057] In some embodiments, the extreme ultraviolet light power calculation module comprises:

[0058] First calculation module: calculating the extreme ultraviolet light (13.5 nm, ±2%) power of the DPP light source under a specific solid angle according to the light power proportion and the total power of the light beam obtained by the spectrometer and the photodetector;

[0059] Second calculation module: integrating the extreme ultraviolet light (13.5 nm, ±2%) power under a specific solid angle to obtain the extreme ultraviolet light (13.5 nm, ±2%) power in a 2π or 4π solid angle.

[0060] In some embodiments, the filter is a zirconium film filter, which filters the ellipsoidal light beam of the wide spectral range from x-ray to visible light into a spectral range of 1-20 nm.

[0061] In some embodiments, the spectrometer detects the light beam filtered by the filter, and measures the light intensity distribution of the light beam in the spectral range of 5-20 nm.

[0062] In some embodiments, the photodetector measures the light beam filtered by the filter, and calculates the total power of the light beam in the spectral range of 5-370 nm.

[0063] In some embodiments, a current detection module is further arranged behind the photodetector, which measures the current signal output by the photodetector, and calculates the total power of the filtered light beam through the response curve of the photodetector.

[0064] In order to better understand the above-mentioned embodiments of the present application, the following will be described in combination with specific preferred application examples:

[0065] Specifically, the measurement method in the embodiment mainly includes DPP light source, photodetector, spectrometer, current detection module and the like. The photodetector and the spectrometer each are provided with a filter, and the two filters are the same in material and principle, but different in mounting manner. The implementation steps are as follows:

[0066] Step 1: Figure 1 The DPP light source generates an ellipsoidal light beam in a wide spectral range from x-ray to visible light through electrode discharge. The light beam is filtered into a light beam in a specific spectral range after passing through the first filter of the spectrometer. The light intensity distribution of the filtered light beam in the spectral range is detected by the spectrometer, and the light power ratio of the extreme ultraviolet light in the spectral range can be calculated by area integration.

[0067] Step 2: The light beam filtered by the second filter on the photodetector is incident on the photodetector, and the light power signal is converted into a current signal. The total power of the light beam in the spectral range is calculated through the response curve of the photodetector.

[0068] Step 3: The extreme ultraviolet light (13.5 nm, ±2%) power of the DPP light source under a specific solid angle is calculated according to the light power ratio and the total power of the light beam obtained in steps 1 and 2.

[0069] Step 4: The extreme ultraviolet light (13.5 nm, ±2%) power in a 2π or 4π solid angle is obtained by integrating the extreme ultraviolet light power of the DPP light source under a specific solid angle obtained in step 3.

[0070] In the embodiment, the DPP light source is the research object of the entire measurement method, which generates an ellipsoidal light beam in a wide spectral range from x-ray to visible light. The first filter in the spectrometer mainly filters the light beam to a spectral range of 1-20 nm, and the filtered light beam passes through the spectrometer.

[0071] Figure 2 The working principle diagram of the spectrometer in the embodiment is shown in FIG. 1. Figure 2As shown, the spectrometer comprises a slit, a grating and a CCD in addition to the first filter. The incident light passes through the first filter and the slit, is diffracted by the grating and reaches the detection plane, and finally the spectrum is recorded by the area array CCD. In order to improve the diffraction efficiency, the grating surface is gold-plated and works in the grazing incidence mode.

[0072] After passing through the spectrometer, the 5-20 nm spectral distribution can be obtained as shown in Figure 3 The power ratio of the extreme ultraviolet light in the spectral band range is calculated by area integration. Referring to Figure 3 As shown, the Xe 5-20 nm spectral distribution obtained by the spectrometer is shown, and the purple marked part is the 4% bandwidth at the wavelength of 13.5 nm.

[0073] Referring to Figure 4 As shown, the responsivity curve of the photodetector to different wavelengths in this embodiment is shown. The light beam filtered by the second filter is measured by the photodetector, the current detection module measures the current signal output by the photodetector, and the total power of the filtered light beam is calculated according to the response curve of the photodetector as shown in Figure 4

[0074] In this embodiment, the response range of the photodetector is between 5-370 nm, and the spectral band of the light beam filtered by the second filter is between 1-20 nm, so the photodetector can obtain the total power in the 5-20 nm spectral band range, and the extreme ultraviolet light (13.5 nm, ±2%) power of the DPP light source based on the above ratio calculation is 0.000069 sr solid angle (the distance between the light source and the detector is 30 cm).

[0075] In the above embodiment of the present application, the measurement of the extreme ultraviolet light power of the discharge plasma type light source is mainly: the light is filtered by the first zirconium film filter (1-20 nm), the filtered light beam is first measured by the spectrometer, and the light intensity distribution of the light beam in the 5-20 nm spectral band range is measured. The light beam filtered by the second zirconium film filter (1-20 nm) is measured by the photodetector, and the total power of the light beam in the 5-370 nm spectral band range is calculated. Finally, the extreme ultraviolet (13.5 nm, ±2) light power of the discharge plasma type light source is calculated by the ratio of the extreme ultraviolet (13.5 nm, ±2) light in the 5-20 nm spectral band range.

[0076] The principle of the above embodiment of the present application can be extended to the measurement of other monochromatic light, which solves the problem of measuring the extreme ultraviolet light power in the spectral band range (13.5 nm, ±2%), and can accurately detect the extreme ultraviolet light (13.5 nm, ±2%) power of the DPP type light source.

[0077] ​The specific embodiments of the present application are described above. It needs to be understood that the present application is not limited to the specific embodiments described above, and various modifications or changes can be made by those skilled in the art within the scope of the claims, which does not affect the essential content of the present application. The above preferred features can be combined in any manner without conflict, and used.

Claims

1. A method for measuring the extreme ultraviolet light power of a discharge plasma type light source, characterized in that: include: The DPP light source generates an ellipsoidal beam with a wide spectrum range from X-rays to visible light through electrode discharge, and filters it to form a beam with a set spectrum range; A spectrometer is used to detect the light beam within a set spectral band range formed after filtering to obtain the light intensity distribution of the light beam within the spectral band range. The light power proportion of light of different wavelengths within the spectral band range is obtained by area integration calculation, including the light power proportion of extreme ultraviolet light (13.5 nm, ±2%) within the spectral band range, and the light power proportion of each wavelength of light other than the extreme ultraviolet light (13.5 nm, ±2%) within the spectral band range; A photodetector is used to convert the optical power signal of the light beam within the set spectral band formed after filtering into a total current signal, and the contribution of different wavelengths to the total current is obtained through a response curve of current, total power and wavelength in the photodetector. Multiple results corresponding to different wavelengths are obtained by multiplying the current contribution of different wavelengths by the total power and then by the corresponding power ratio at the representative wavelength. The multiple results are added together to calculate the total power of the light beam within the spectral band; According to the optical power proportions of the light of different wavelengths within the spectral band and the total power of the light beam, the extreme ultraviolet light power (13.5 nm, ±2%) is calculated.

2. The method for measuring the extreme ultraviolet light power of a discharge plasma light source according to claim 1, wherein: The proportion of the optical power of the light of different wavelengths within the spectral band and the total power of the light beam include: Calculate the extreme ultraviolet light (13.5 nm, ±2%) power of the DPP light source at a specific solid angle based on the light power ratio and the total light beam power obtained by the spectrometer and the photodetector; According to the extreme ultraviolet light power of the DPP light source at the specific solid angle, the extreme ultraviolet light (13.5 nm, ±2%) power at a solid angle of 2π or 4π is obtained by integration.

3. The method for measuring the extreme ultraviolet light power of a discharge plasma light source according to claim 1, wherein: The DPP light source generates an ellipsoidal beam with a wide spectrum range from x-rays to visible light through electrode discharge and filters the ellipsoidal beam with a wide spectrum range from x-rays to visible light into a spectrum range of 1-20 nm.

4. The method for measuring the extreme ultraviolet light power of a discharge plasma light source according to claim 1, wherein: The spectrometer detects the filtered light beam and calculates the light intensity distribution of the light beam within the 5-20nm spectral band.

5. The method for measuring the extreme ultraviolet light power of a discharge plasma light source according to claim 1, wherein: The photoelectric detector measures the filtered light beam and calculates the total power of the light beam within the 5-370 nm spectrum band.

6. A device for measuring the extreme ultraviolet light power of a discharge plasma light source, characterized in that: include: A spectrometer, a photodetector, and an extreme ultraviolet light power calculation module, wherein the spectrometer is provided with a first filtering component, and the photodetector is provided with a second filtering component, wherein: The first filtering component is used to filter the ellipsoidal beam with a wide spectrum range from X-rays to visible light generated by the DPP light source through electrode discharge to form a beam with a set spectrum range; A spectrometer detects the light beam within the set spectral band formed by the first filtering component to obtain the light intensity distribution of the light beam within the spectral band, and calculates the optical power proportion of light of different wavelengths within the spectral band through area integration, including the optical power proportion of (13.5nm, ±2%) extreme ultraviolet light within the spectral band, and the optical power proportion of light of each wavelength other than (13.5nm, ±2%) extreme ultraviolet light within the spectral band; The second filtering component is used to filter the ellipsoidal beam with a wide spectrum range from X-rays to visible light generated by the DPP light source through electrode discharge to form a beam with a set spectrum range; A photodetector converts the optical power signal of the light beam within the set spectral band formed by the second filtering component into a current signal, and obtains the contribution of different wavelengths to the total current through a response curve of current, total power, and wavelength in the photodetector. The current contribution of different wavelengths is multiplied by the total power and then by the corresponding power ratio at the representative wavelength to obtain multiple results corresponding to different wavelengths. The multiple results are added together to calculate the total power of the light beam within the spectral band. The extreme ultraviolet light power calculation module calculates the extreme ultraviolet light (13.5 nm, ±2%) power according to the obtained optical power ratio and the total power of the light beam.

7. The device for measuring the extreme ultraviolet light power of a discharge plasma light source according to claim 6, characterized in that: The extreme ultraviolet light power calculation module includes: A first calculation module: calculates the extreme ultraviolet light power (13.5nm, ±2%) of the DPP light source at a specific solid angle based on the light power ratio and the total light beam power obtained by the spectrometer and the photodetector; The second calculation module is: integrating the extreme ultraviolet light power of the DPP light source at the specific solid angle to obtain the extreme ultraviolet light (13.5 nm, ±2%) power at a solid angle of 2π or 4π.

8. The device for measuring the extreme ultraviolet light power of a discharge plasma light source according to claim 7, characterized in that: The first filtering component and the second filtering component use zirconium film filters, which filter the ellipsoidal beam with a wide spectrum range from X-rays to visible light into a spectrum range of 1-20 nm.

9. The device for measuring the extreme ultraviolet light power of a discharge plasma light source according to claim 6, characterized in that: The spectrometer detects the light beam filtered by the first filter component and measures the light intensity distribution of the light beam within a 5-20 nm spectrum band.

10. The device for measuring the extreme ultraviolet light power of a discharge plasma light source according to claim 6, characterized in that: A current detection module is further provided after the photodetector. The current detection module measures the current signal output by the photodetector and calculates the total power of the filtered light beam through the response curve of the photodetector.

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