A particle size detection system

Abstract

The present application provides a particle size detection system, which relates to the field of defect detection technology. The particle size detection system includes: a stage, a box body, a first light source arranged on the box body, a first mirror group, a reflective mirror, a second light source, a second mirror group and a camera; the reflective mirror has a first working angle and a second working angle, the first light source is used to emit a first light beam to the first surface of the part to be detected when the reflective mirror is at the first working angle, the first light beam is reflected by the first mirror group and the first surface and then emitted to the reflective mirror, and then enters the camera after being reflected by the reflective mirror; the second light source is used to emit a second light beam to the second surface of the part to be detected when the reflective mirror is at the second working angle, the second light beam is reflected by the second mirror group and the second surface and then emitted to the reflective mirror, and then enters the camera after being reflected by the reflective mirror. After adding the reflective mirror, the particle size detection system can simplify the detection optical path, reduce costs, and at the same time will not increase the overall time consumption of the detection process.

Description

Technical Field

[0001] The present application relates to the technical field of defect detection, and in particular to a particle size detection system. Background Art

[0002] With the development of integrated circuit technology, photolithography, as the core key process of integrated circuits, is one of the most cutting-edge technologies in the semiconductor industry. As an indispensable and important carrier in the photolithography process, the mask carries the chip design circuit pattern on its surface and is transferred to the silicon wafer through the photolithography / etching process. Therefore, the surface quality of the mask will directly affect the quality of the pattern on the silicon wafer, and then affect the final chip function and performance, as well as the semiconductor production yield.

[0003] After repeated use, the mask will be contaminated with particles or scratched due to problems such as non-standard design and non-compliant operation. Therefore, it is particularly important to perform particle size detection on the mask before the start of the photolithography process. This test can not only detect particles or scratches on the mask surface in time, but also effectively prevent these problems from affecting the subsequent process. However, the existing particle size detection system requires the use of two cameras to respectively capture the upper and lower surfaces of the mask, and its detection optical path is relatively complex and costly. Summary of the invention

[0004] The purpose of the present application is to provide a particle size detection system to address the deficiencies in the above-mentioned prior art, which can simplify the detection optical path and reduce costs without increasing the overall time consumption of the detection process.

[0005] To achieve the above purpose, the technical solution adopted in the embodiment of the present application is as follows:

[0006] An embodiment of the present application provides a particle size detection system, including: a carrier, a box body, a first light source arranged on the box body, a first mirror group, a reflective movable mirror, a second light source, a second mirror group and a camera, the carrier is used to carry the part to be detected and drive the part to be detected in and out of the box body, the carrier can expose the first surface of the part to be detected and the second surface opposite to the first surface; the reflective movable mirror has a first working angle and a second working angle, the first light source is used to emit a first light beam to the first surface of the part to be detected when the reflective movable mirror is at the first working angle, the first light beam is reflected by the first mirror group and the first surface and then emitted to the reflective movable mirror, and then reflected by the reflective movable mirror and then enters the camera; the second light source is used to emit a second light beam to the second surface of the part to be detected when the reflective movable mirror is at the second working angle, the second light beam is reflected by the second mirror group and the second surface and then emitted to the reflective movable mirror, and then reflected by the reflective movable mirror and then enters the camera.

[0007] Optionally, it also includes a stage motor and a reflection mirror motor, the stage motor is used to drive the stage to move in a direction parallel to the first surface of the part to be detected so that the part to be detected moves between an initial position and a stop position, and the reflection mirror motor is used to drive the reflection mirror to switch from a first working angle to a second working angle when the part to be detected is in the stop position.

[0008] Optionally, the camera is electrically connected to the encoder of the stage motor, and the camera can obtain an encoder signal emitted by the encoder and take a picture when a preset number of encoder signals are received.

[0009] Optionally, it also includes a board-in sensor and a board-out sensor electrically connected to the camera, the board-in sensor being used to detect the position of the part to be detected when it moves from the initial position to the stop position, and the board-out sensor being used to detect the position of the part to be detected when it moves from the stop position to the initial position; when the part to be detected moves between the initial position and the stop position, the board-in sensor sends a first board-in position signal to the camera, and the camera photographs the first surface of the part to be detected after receiving the first board-in position signal; when the part to be detected moves to the stop position, the board-in sensor sends a second board-in position signal to the camera, and the camera stops photographing the first surface of the part to be detected after receiving the second board-in position signal; when the part to be detected moves between the stop position and the initial position, the board-out sensor sends a first board-out position signal to the camera, and the camera photographs the second surface of the part to be detected after receiving the first board-out position signal; when the part to be detected moves to the initial position, the board-out sensor sends a second board-out position signal to the camera, and the camera stops photographing the second surface of the part to be detected after receiving the second board-out position signal.

[0010] Optionally, a control component is also included, and the reflective mirror motor and the board entry sensor are electrically connected to the control component respectively. When the detection component moves to the stop position, the board entry sensor sends a second board entry position signal to the control component. After receiving the second board entry position signal, the control component controls the reflective mirror motor to drive the reflective mirror to switch from the first working angle to the second working angle.

[0011] Optionally, the carrier motor is also used to drive the carrier to move in a direction perpendicular to the first surface of the piece to be detected, and the particle size detection system also includes a film detection sensor electrically connected to the carrier motor, and the film detection sensor is used to detect whether the second surface of the piece to be detected is covered with a dust-proof film; if the film detection sensor detects that the second surface is covered with a dust-proof film, the film detection sensor sends a film existence signal to the carrier motor, and after receiving the film existence signal, the carrier motor drives the carrier to move a preset distance in the direction of the first surface.

[0012] Optionally, it also includes a limit position detection sensor electrically connected to the carrier motor. When the carrier motor drives the carrier to move in the direction of the first surface, if the limit position detection sensor detects that the part to be detected has reached the limit position, the limit position detection sensor sends a stop signal to the carrier motor. After receiving the stop signal, the carrier motor stops driving the carrier to continue moving.

[0013] Optionally, the first mirror group includes a first semi-transparent and semi-reflective mirror and a first reflective mirror, the first semi-transparent and semi-reflective mirror is located between the first light source and the carrier, the first light beam emitted by the first light source passes through the first semi-transparent and semi-reflective mirror and illuminates the first surface of the part to be detected, and enters the camera after being reflected by the first surface, the first semi-transparent and semi-reflective mirror, the first reflective mirror and the reflective moving mirror in sequence; the second mirror group includes a second semi-transparent and semi-reflective mirror and a second reflective mirror, the second semi-transparent and semi-reflective mirror is located between the second light source and the carrier, the second light beam emitted by the second light source passes through the second semi-transparent and semi-reflective mirror and illuminates the second surface of the part to be detected, and enters the camera after being reflected by the second surface, the second semi-transparent and semi-reflective mirror, the second reflective mirror and the reflective moving mirror in sequence.

[0014] Optionally, a focusing lens group is further included, which is located between the reflecting mirror and the camera, and is used to converge the first light beam or the second light beam reflected by the reflecting mirror.

[0015] Optionally, the camera is a time delay integration camera.

[0016] The beneficial effects of this application include:

[0017] The present application provides a particle size detection system, comprising: a stage, a box body, a first light source arranged on the box body, a first mirror group, a reflective mirror, a second light source, a second mirror group and a camera, the stage is used to carry the part to be detected and drive the part to be detected in and out of the box body, the stage can expose the first surface of the part to be detected and the second surface opposite to the first surface; the reflective mirror has a first working angle and a second working angle, the first light source is used to emit a first light beam to the first surface of the part to be detected when the reflective mirror is at the first working angle, the first light beam is reflected by the first mirror group and the first surface and then emitted to the reflective mirror, and then enters the camera after being reflected by the reflective mirror; the second light source is used to emit a second light beam to the second surface of the part to be detected when the reflective mirror is at the second working angle, the second light beam is reflected by the second mirror group and the second surface and then emitted to the reflective mirror, and then enters the camera after being reflected by the reflective mirror. After adding the reflective mirror capable of switching between two angles, the particle size detection system only needs one camera to complete the work of photographing the first surface and the second surface of the part to be detected, which effectively simplifies the detection optical path and reduces the cost. Moreover, when the inspected part enters and exits the board, there will be a process of deceleration, stopping and acceleration. As long as the rotation timing of the reflecting mirror is set when the inspected part stops, the rotation of the reflecting mirror can be cleverly integrated into the movement process of the inspected part, thereby not increasing the overall time consumption of the inspection process. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 One of the structural schematic diagrams of the particle size detection system provided in the embodiment of the present application;

[0020] Figure 2 The second structural diagram of the particle size detection system provided in the embodiment of the present application;

[0021] Figure 3 A schematic diagram of a particle size detection system provided in an embodiment of the present application detecting a first surface of a component to be detected;

[0022] Figure 4 A schematic diagram of the particle size detection system provided in an embodiment of the present application detecting the second surface of the object to be detected;

[0023] Figure 5 A comparison diagram of images taken by a camera in a particle size detection system provided in an embodiment of the present application when there is and when there is no stage motor encoder signal acting on it;

[0024] Figure 6 This is a control logic diagram of the particle size detection system provided in an embodiment of the present application.

[0025] Icons: 10- particle size detection system; 11- stage; 111- gap; 12- box body; 13- first light source; 131- first light beam; 14- first lens group; 141- first semi-transparent and semi-reflective mirror; 142- first reflective mirror; 15- reflective moving mirror; 151- first working angle; 152- second working angle; 16- second light source; 161- second light beam; 17- second lens group; 171- second semi-transparent and semi-reflective mirror; 172- second reflective mirror; 18- camera; 19- reflective moving mirror motor; 20- board inlet sensor; 21- board outlet sensor; 22- membrane detection sensor; 23- limit position detection sensor; 24- focusing lens group; 100- part to be detected; V1- board inlet; V2- board outlet. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. It should be noted that, in the absence of conflict, the various features in the embodiments of the present application can be combined with each other, and the combined embodiments are still within the scope of protection of the present application.

[0028] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0029] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0030] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0031] Please refer to Figure 1 and Figure 2 The embodiment of the present application provides a particle size detection system 10, which is used to detect the particle size of the first surface and the second surface of the object to be detected 100. The object to be detected 100 can be a sheet-like part such as a mask, a silicon wafer, a substrate, etc. The first surface and the second surface are two opposite surfaces of the object to be detected 100. Generally speaking, one of the first surface and the second surface is an upper surface and the other is a lower surface.

[0032] Specifically, the particle size detection system 10 includes: a carrier 11, a box body 12, a first light source 13 arranged on the box body 12, a first lens group 14, a reflective mirror 15, a second light source 16, a second lens group 17 and a camera 18. The carrier 11 is used to carry the part to be detected 100, and drive the part to be detected 100 in and out of the box body 12, and the carrier 11 can expose the first surface of the part to be detected 100 and the second surface opposite to the first surface. For example, the carrier 11 includes two fork arms arranged opposite to each other, and there is a gap 111 between the two fork arms. The second surface of the part to be detected 100 is placed on the two fork arms and corresponds to the position of the gap 111. After the part to be detected 100 is placed, the first surface is exposed due to being away from the bearing surface, and the second surface is exposed by the gap 111.

[0033] The reflective mirror 15 is rotatably disposed in the box body 12, and the reflective mirror 15 has a first working angle 151 and a second working angle 152. The reflective mirror 15 is switched between the first working angle 151 and the second working angle 152 by rotating. Figure 3 When the reflective mirror 15 is at the first working angle 151, its reflective surface faces the first mirror group 14 and can reflect the first light beam 131. Figure 4 When the reflective mirror 15 is at the second working angle 152, its reflective surface faces the second mirror group 17 and can reflect the second light beam 161. It should be noted that in this embodiment, the way to realize the rotation of the reflective mirror 15 is not limited, and it can be driven manually or by a driving member such as a motor.

[0034] For example, the angle between the first working angle 151 and the second working angle 152 is 90°. When the reflective mirror 15 is at the first working angle 151, the reflective surface of the reflective mirror 15 is tilted upward by 45°; when the reflective mirror 15 is at the second working angle 152, the reflective surface of the reflective mirror 15 is tilted downward by 45°.

[0035] Please refer to Figure 2 and Figure 3 The first light source 13 is used to emit a first light beam 131 to the first surface of the object to be detected 100 when the reflective mirror 15 is at the first working angle 151. The first light beam 131 is reflected by the first mirror group 14 and the first surface and then emitted to the reflective mirror 15, and then reflected by the reflective mirror 15 and enters the camera 18. At this time, the particle size detection system 10 will detect the first surface of the object to be detected 100, and the camera 18 completes the image capture of the first surface of the object to be detected 100 during the movement of the stage 11.

[0036] Please refer to Figure 2 and Figure 4 The second light source 16 is used to emit a second light beam 161 to the second surface of the object to be detected 100 when the reflective mirror 15 is at the second working angle 152. The second light beam 161 is reflected by the second mirror group 17 and the second surface and then emitted to the reflective mirror 15, and then reflected by the reflective mirror 15 and enters the camera 18. At this time, the particle size detection system 10 will detect the second surface of the object to be detected 100, and the camera 18 completes the image capture of the second surface of the object to be detected 100 during the movement of the stage 11.

[0037] It should be noted that, in this embodiment, the order and number of reflections of the first light beam 131 by the first mirror group 14 and the first surface are not limited, as long as the first light beam 131 can be projected to the reflecting mirror 15 at the first working angle 151 after being reflected by the first mirror group 14 and the first surface. Similarly, the order and number of reflections of the second light beam 161 by the second mirror group 17 and the second surface are not limited, as long as the second light beam 161 can be projected to the reflecting mirror 15 at the second working angle 152 after being reflected by the second mirror group 17 and the second surface.

[0038] After the above-mentioned particle size detection system 10 is added with the reflective moving mirror 15 capable of switching between two angles, only one camera 18 is needed to complete the work of photographing the first surface and the second surface of the detected part 100, which effectively simplifies the detection optical path and reduces the cost. Moreover, when the detected part 100 enters the plate V1 and exits the plate V2, there will be a process of deceleration, stopping and acceleration. As long as the rotation timing of the reflective moving mirror 15 is set when the detected part 100 stops, the rotation of the reflective moving mirror 15 can be cleverly integrated into the movement process of the detected part 100, thereby not increasing the overall time consumption of the detection process.

[0039] Optionally, see Figure 3 The first mirror group 14 includes a first semi-transparent mirror 141 and a first reflector 142. The first semi-transparent mirror 141 is located between the first light source 13 and the carrier 11. The first light beam 131 emitted by the first light source 13 is irradiated on the first surface of the to-be-detected component 100 after passing through the first semi-transparent mirror 141, and then enters the camera 18 after being reflected by the first surface, the first semi-transparent mirror 141, the first reflector 142 and the reflective mirror 15 in sequence, so that the camera 18 can shoot the first surface of the to-be-detected component 100.

[0040] Please refer to Figure 4 The second mirror group 17 includes a second semi-transparent mirror 171 and a second reflector 172. The second semi-transparent mirror 171 is located between the second light source 16 and the carrier 11. The second light beam 161 emitted by the second light source 16 is irradiated on the second surface of the to-be-detected component 100 after passing through the second semi-transparent mirror 171, and then enters the camera 18 after being reflected by the second surface, the second semi-transparent mirror 171, the second reflector 172 and the reflective mirror 15 in sequence, so that the camera 18 can shoot the second surface of the to-be-detected component 100.

[0041] The particle size detection system in the prior art adopts dark field detection, and realizes the detection of tiny particles on the surface of the part to be detected by collecting stray light. Since the light intensity of stray light is weak, the light source intensity and detection time are relatively large. The particle size detection system 10 of this embodiment adopts a semi-transparent and semi-reflective mirror and a light source perpendicular to the surface of the part to be detected 100 to directly use the part to be detected 100 as the imaging object surface, realizes bright field detection, and greatly shortens the detection time while ensuring the particle size detection performance. By performing algorithm analysis on the captured image, it is determined whether the particle size is a defect, and the detection of the particle size on the surface of the part to be detected 100 is completed.

[0042] Please refer to Figure 3 and Figure 4 In the actual detection process, it may happen that the imaging surface of the first light beam 131 and the second light beam 161 in front of the camera 18 is large and cannot completely enter the lens range of the camera 18. Therefore, optionally, the particle size detection system 10 also includes a focusing lens group 24, and the focusing lens group 24 is located between the reflecting mirror 15 and the camera 18. The focusing lens group 24 is used to converge the first light beam 131 or the second light beam 161 reflected by the reflecting mirror 15, so that the imaging surface of the first light beam 131 and the second light beam 161 can completely enter the lens range of the camera 18.

[0043] Optionally, the camera 18 of the particle size detection system 10 is a time delay integration camera (TDI camera).

[0044] The time-delayed integration camera is a new type of line scan camera, which has multiple photosensitive units arranged in parallel on the image sensor, which are perpendicular to the direction of target movement. During the image acquisition process, the image sensor reads and integrates the image data from each photosensitive unit. This integration method enhances the effective information. Therefore, even if the light intensity is low, it can be enhanced in each integration process. Moreover, the time-delayed integration camera is suitable for imaging high-speed moving objects and can reduce the time consumption of the particle size detection system 10. Compared with ordinary cameras, the time-delayed integration camera has the advantages of high sensitivity and wide dynamic range, and can output signals with high signal-to-noise ratio in low light environments.

[0045] Optionally, see Figure 1 and Figure 2 The particle size detection system 10 further includes a stage motor and a reflective mirror motor 19. The stage motor is connected to the stage 11, and is used to drive the stage 11 to move in a direction parallel to the first surface of the detected object 100, so that the detected object 100 moves between the initial position and the stop position. The reflective mirror motor 19 is connected to the reflective mirror 15, and is used to drive the reflective mirror 15 to switch from the first working angle 151 to the second working angle 152 when the detected object 100 is in the stop position.

[0046] When the first surface of the detected part 100 is detected, the stage 11 carries the detected part 100 and first arrives at the initial position, and then moves from the initial position to the stop position. In the process of the detected part 100 moving from the initial position to the stop position, the camera 18 takes pictures of the first surface of the detected part 100. When the detected part 100 arrives at the stop position, the stage 11 stops moving, and the detected part 100 is stationary. At this time, the reflection moving mirror motor 19 drives the reflection moving mirror 15 to rotate, realizes the switching from the first working angle 151 to the second working angle 152, and is ready to detect the second surface of the detected part 100. Afterwards, the stage 11 carries the detected part 100 and moves from the stop position to the initial position, and in the process, the camera 18 takes pictures of the second surface of the detected part 100. The particle size detection system 10 of the present embodiment sets the action of flipping the reflection moving mirror 15 at the stop position, and cleverly integrates it into the motion flow of the detected part 100, which will not increase the overall time-consuming of the detection process.

[0047] Optionally, the camera 18 is electrically connected to the encoder of the stage motor, and the camera 18 can obtain the encoder signal emitted by the encoder and take a picture when a preset number of encoder signals are received.

[0048] The particle size detection system 10 of this embodiment introduces the encoder signal of the stage motor into the camera 18, so that the camera 18 can obtain the encoder signal and then shoot at a preset frequency, ensuring that the camera 18 can shoot at each stage of the stage 11 acceleration, constant speed and deceleration, and can automatically adjust the shooting frequency according to the movement state of the stage 11. Even if the stage 11 is slightly shaken or the speed is unstable during movement, the captured image will not be stretched or shrunk. Figure 5 As shown, Figure 5 The left figure in FIG. 1 shows a picture taken when the camera 18 does not introduce the encoder signal of the stage motor. Figure 5 The right side figure in FIG. 1 shows a picture taken when the camera 18 in this embodiment introduces the encoder signal of the stage motor. Figure 5 It can be seen that by introducing the encoder signal of the stage motor into the camera 18, the camera 18 can shoot at a preset frequency according to the encoder signal, and can obtain uniform and high-quality images. At the same time, if a time delay integration camera is used in conjunction (a time delay integration camera is suitable for high-speed moving objects), the movement speed of the stage 11 can be greatly increased, thereby reducing the time consumption of shooting.

[0049] For example, the camera 18 takes a picture once every time it receives 8 encoder signals. When configuring the parameters of the camera 18, select "encoder signal 8:1 ratio" and "external trigger signal" to ensure the synchronization of the camera 18's picture taking and the movement speed of the stage 11, that is, the encoder of the stage motor generates eight pulses, and the camera 18 collects one pulse. In other embodiments, according to different encoders or different cameras 18, other numbers of pulse signals can also be set to set the acquisition frequency of the camera 18.

[0050] Optionally, the particle size detection system 10 further includes a board-in sensor 20 and a board-out sensor 21 electrically connected to the camera 18, the board-in sensor 20 is used to detect the position of the to-be-detected member 100 when the to-be-detected member 100 moves from the initial position to the stop position, and the board-out sensor 21 is used to detect the position of the to-be-detected member 100 when the to-be-detected member 100 moves from the stop position to the initial position. That is to say, the board-in sensor 20 is used when detecting the first surface of the to-be-detected member 100, and the board-out sensor 21 is used when detecting the second surface of the to-be-detected member 100, and the two are not triggered at the same time.

[0051] When the inspected part 100 moves from the initial position to the stop position, the board entry sensor 20 sends a first board entry position signal to the camera 18, and the camera 18 photographs the first surface of the inspected part 100 after receiving the first board entry position signal; when the inspected part 100 moves to the stop position, the board entry sensor 20 sends a second board entry position signal to the camera 18, and the camera 18 stops photographing the first surface of the inspected part 100 after receiving the second board entry position signal.

[0052] That is to say, when the carrier 11 carrying the to-be-detected part 100 is transported from the outside to the initial position, the board entry sensor 20 detects the board entry V1, and sends a signal to the camera 18 to start photographing the first surface (i.e., the first board entry position signal). Thereafter, when the carrier 11 carrying the to-be-detected part 100 moves from the initial position to the stop position, the board entry sensor 20 can always detect the to-be-detected part 100, and continuously sends a signal to the camera 18 to photograph the first surface (i.e., the first board entry position signal). When the carrier 11 carrying the to-be-detected part 100 moves to the stop position, the board entry sensor 20 can no longer detect the to-be-detected part 100, and sends a signal to the camera 18 to stop photographing the first surface (i.e., the second board entry position signal). By way of example, the first board entry position signal is a high-position trigger signal, and the second board entry position signal is a low-position trigger signal.

[0053] In addition, the board entry sensor 20 can also be used as a protection under the stage 11, that is, after detecting the board entry V1, the stage 11 is prohibited from moving in the direction of the second surface, thereby protecting the safety of the stage 11 and preventing collision. If the particle size detection system 10 does not need to move in the direction of the second surface, the initial position at the board entry V1 can be set to the lowest position of the stage 11.

[0054] When the part to be inspected 100 moves from the stop position to the initial position, the plate-out sensor 21 sends a first plate-out position signal to the camera 18, and the camera 18 photographs the second surface of the part to be inspected 100 after receiving the first plate-out position signal; when the part to be inspected 100 moves to the initial position, the plate-out sensor 21 sends a second plate-out position signal to the camera 18, and the camera 18 stops photographing the second surface of the part to be inspected 100 after receiving the second plate-out position signal.

[0055] That is to say, when the carrier 11 carries the part to be detected 100 and moves to the stop position, the plate-out sensor 21 detects the plate-out V2, and sends a signal to the camera 18 to start photographing the second surface (i.e., the first plate-out position signal). Thereafter, when the carrier 11 carries the part to be detected 100 and moves from the stop position to the initial position, the plate-out sensor 21 can always detect the part to be detected 100, and continuously sends a signal to the camera 18 to photograph the second surface (i.e., the first plate-out position signal). When the carrier 11 carries the part to be detected 100 and moves to the initial position, the plate-out sensor 21 can no longer detect the part to be detected 100, and sends a signal to the camera 18 to stop photographing the second surface (i.e., the second plate-out position signal). By way of example, the first plate-out position signal is a high-position trigger signal, and the second plate-out position signal is a low-position trigger signal.

[0056] In the above process, when the board is fed in, only the signal of the board feed sensor 20 is valid. When the board reaches the stop position, the board feed sensor 20 stops reading the signal, and the board exit sensor 21 starts reading the signal, that is, when the board exits, only the board exit sensor 21 signal is valid. Setting the board feed sensor 20 and the board exit sensor 21 enables the particle size detection system 10 to have better process adaptability. During installation and adjustment, the positions of the board feed sensor 20 and the board exit sensor 21 can be adjusted to obtain images of different areas of the first surface and the second surface of the part to be detected 100. Compared with taking the entire image and then cropping the image of the required area, the amount of calculation and complexity of the algorithm for cropping the image can be reduced.

[0057] The board entry sensor 20 and the board exit sensor 21 can be photoelectric reflective sensors. When the light of the board entry sensor 20 or the board exit sensor 21 is blocked, the part to be detected 100 is detected and photography starts; when the part to be detected 100 cannot be detected, photography ends.

[0058] Optionally, the particle size detection system 10 also includes a control component, and the reflection mirror motor 19 and the board feed sensor 20 are respectively electrically connected to the control component. When the detection component 100 moves to the stop position, the board feed sensor 20 sends a second board feed position signal to the control component. After receiving the second board feed position signal, the control component controls the reflection mirror motor 19 to operate, and drives the reflection mirror 15 to switch from the first working angle 151 to the second working angle 152.

[0059] In this embodiment, the information that the detected part 100 is in the stop position is obtained by the board feed sensor 20 , and the position information is transmitted to the control component, so that the control component controls the reflection mirror motor 19 to operate and adjust the angle of the reflection mirror 15 .

[0060] For example, please refer to Figure 6 The control component includes an upper computer and a lower computer electrically connected to the upper computer, and the reflective moving mirror motor 19 and the board-entering sensor 20 are electrically connected to the lower computer respectively. When the detected part 100 moves to the stop position, the board-entering sensor 20 sends a second board-entering position signal to the upper computer through the lower computer. After receiving the second board-entering position signal, the upper computer sends a control instruction to the lower computer, so that the lower computer controls the reflective moving mirror 15 to switch from the first working angle 151 to the second working angle 152.

[0061] The particle size detection system 10 provided in this embodiment can make the first surface and the second surface of the detected part 100 both be at the best focal plane position of the camera 18 by setting the first lens group 14 and the second lens group 17 when the detected part 100 has no dustproof film. When the plate is moved in and out, there is no need to focus, and the position where the first surface and the second surface of the detected part 100 are located is the best focal plane. However, when the second surface of the detected part 100 is provided with a dustproof film, due to the certain thickness of the dustproof film, the lower surface of the dustproof film will be lower than the original preset best focal plane; at this time, the detected part 100 needs to be lifted to a certain height, so that the lower surface of the dustproof film can be just at the best camera focal plane position. Therefore, before the plate is moved out, it is necessary to first confirm whether the second surface of the detected part 100 has a dustproof film. After confirming that there is a dustproof film, it is also necessary to lift the detected part 100 to a certain height.

[0062] Specifically, the stage motor is also used to drive the stage 11 to move in a direction perpendicular to the first surface of the detected object 100. That is to say, the stage motor can drive the stage 11 to move in a direction parallel to the first surface of the detected object 100 to transport the detected object 100 into and out of the box body 12 for detection, and can also drive the stage 11 to move in a direction perpendicular to the first surface of the detected object 100 to adjust the horizontal height position of the detected object 100.

[0063] The particle size detection system 10 further includes a film detection sensor 22 electrically connected to the stage motor, and the film detection sensor 22 is used to detect whether the second surface of the detected object 100 is covered with a dustproof film. It should be noted that if a certain surface of the detected object 100 is covered with a dustproof film, then the surface is defined as the second surface of the detected object 100, and when the detected object 100 is placed on the stage 11, the dustproof film needs to face the bearing surface of the stage 11.

[0064] If the film detection sensor 22 detects that the second surface is covered with a dustproof film, the film detection sensor 22 sends a film presence signal to the stage motor. After receiving the film presence signal, the stage motor drives the stage 11 to move a preset distance in the direction of the first surface.

[0065] The particle size detection system 10 of the present embodiment realizes the detection of the dust-proof film of the part to be detected 100 through the film detection sensor 22, and directly gives the signal of the film detection sensor 22 to the stage motor. Such a setting can simplify the process, realize process automation, reduce loops, increase reliability, reduce time, and increase output. If it is detected that the part to be detected 100 has no dust-proof film, the preset height of the stage 11 does not change, and the plate movement is directly performed (that is, the part to be detected 100 follows the stage 11 from the stop position to the initial position and finally leaves the box body 12), and the second surface of the part to be detected 100 is photographed. If it is detected that the part to be detected 100 has a dust-proof film, the stage motor drives the stage 11 to rise a preset distance toward the first light source 13 in a direction perpendicular to the first surface of the part to be detected 100, and then the plate movement is performed to photograph the second surface of the part to be detected 100. Therefore, the particle size detection system 10 of the present embodiment has the function of detecting two kinds of parts to be detected 100 (parts to be detected 100 with dust-proof film and parts to be detected 100 without dust-proof film).

[0066] It should be noted that the above-mentioned preset distance is determined by the thickness of the dustproof film. For the parts to be inspected 100 with dustproof films of different thicknesses, the upward movement height of the stage 11 can be calculated according to the thickness of the dustproof film and pre-set in the system, thereby ensuring fast displacement and accurate focusing. In addition, different light source intensities need to be set for inspecting the parts to be inspected 100 with dustproof films of different thicknesses, which can be controlled by the host computer or local mode.

[0067] Optionally, the particle size detection system 10 also includes a limit position detection sensor 23 electrically connected to the carrier motor. When the carrier motor drives the carrier 11 to move in the direction of the first surface, if the limit position detection sensor 23 detects that the part to be detected 100 has reached the limit position, the limit position detection sensor 23 sends a stop signal to the carrier motor. After receiving the stop signal, the carrier motor stops driving the carrier 11 to continue moving.

[0068] The particle size detection system 10 of this embodiment directly introduces the signal detected by the limit position detection sensor 23 into the stage motor, and the stage motor directly executes. That is, when the limit position detection sensor 23 detects that the object to be detected 100 has reached the limit position, the object to be detected 100 is restricted from continuing to move in the direction of the first light source 13, so as to protect the particle size monitoring system and the object to be detected 100.

[0069] The limit position detection sensor 23 may be a photoelectric sensor, which confirms the position of the to-be-detected member 100 by detecting the vertical distance between the limit position detection sensor 23 and the to-be-detected member 100 .

[0070] In summary, the particle size detection system 10 provided in the embodiment of the present application takes about 5 seconds to shoot the first surface and the second surface of a to-be-detected object 100 (the time can be calculated based on the movement speed, acceleration, stop time, etc. of the stage 11, and the board entry time and board exit time are both about 2 seconds), while the prior art takes about 30 seconds. Therefore, the particle size detection system 10 provided in the embodiment of the present application greatly reduces the shooting time and improves the efficiency.

[0071] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A particle size detection system, characterized in that: include: A carrier, a box body, a first light source, a first mirror group, a reflective mirror, a second light source, a second mirror group and a camera arranged on the box body, wherein the carrier is used to carry the object to be detected and drive the object to be detected to enter and exit the box body, and the carrier can expose a first surface of the object to be detected and a second surface opposite to the first surface; The reflective moving mirror has a first working angle and a second working angle. The first light source is used to emit a first light beam toward the first surface of the to-be-detected part when the reflective moving mirror is at the first working angle. The first light beam is reflected by the first lens group and the first surface and then emitted toward the reflective moving mirror. The first light beam is reflected by the reflective moving mirror and then enters the camera. The second light source is used to emit a second light beam toward the second surface of the to-be-detected part when the reflective moving mirror is at the second working angle. The second light beam is reflected by the second lens group and the second surface and then emitted toward the reflective moving mirror. The second light beam is reflected by the reflective moving mirror and then enters the camera. The first mirror group includes a first semi-transparent mirror and a first reflector, the first semi-transparent mirror is located between the first light source and the stage, the first light beam emitted by the first light source is irradiated on the first surface of the to-be-detected component after passing through the first semi-transparent mirror, and enters the camera after being reflected by the first surface, the first semi-transparent mirror, the first reflector and the reflective mirror in sequence; The second mirror group includes a second semi-transparent and semi-reflective mirror and a second reflective mirror. The second semi-transparent and semi-reflective mirror is located between the second light source and the carrier. The second light beam emitted by the second light source is irradiated on the second surface of the part to be inspected after passing through the second semi-transparent and semi-reflective mirror. After being reflected by the second surface, the second semi-transparent and semi-reflective mirror, the second reflective mirror and the reflective mirror in sequence, it enters the camera.

2. The particle size detection system according to claim 1, characterized in that: It also includes a stage motor and a reflection mirror motor, the stage motor is used to drive the stage to move in a direction parallel to the first surface of the part to be detected so that the part to be detected moves between an initial position and a stop position, and the reflection mirror motor is used to drive the reflection mirror to switch from the first working angle to the second working angle when the part to be detected is in the stop position.

3. The particle size detection system according to claim 2, characterized in that: The camera is electrically connected to the encoder of the stage motor, and the camera can obtain the encoder signal sent by the encoder and take a picture when receiving a preset number of encoder signals.

4. The particle size detection system according to claim 2, characterized in that: It also includes a board-in sensor and a board-out sensor electrically connected to the camera, wherein the board-in sensor is used to detect the position of the part to be detected when the part to be detected moves from the initial position to the stop position, and the board-out sensor is used to detect the position of the part to be detected when the part to be detected moves from the stop position to the initial position; When the part to be detected moves to between the initial position and the stop position, the board-entering sensor sends a first board-entering position signal to the camera, and the camera photographs the first surface of the part to be detected after receiving the first board-entering position signal; when the part to be detected moves to the stop position, the board-entering sensor sends a second board-entering position signal to the camera, and the camera stops photographing the first surface of the part to be detected after receiving the second board-entering position signal; When the part to be inspected moves to between the stop position and the initial position, the plate-out sensor sends a first plate-out position signal to the camera, and the camera photographs the second surface of the part to be inspected after receiving the first plate-out position signal; when the part to be inspected moves to the initial position, the plate-out sensor sends a second plate-out position signal to the camera, and the camera stops photographing the second surface of the part to be inspected after receiving the second plate-out position signal.

5. The particle size detection system according to claim 4, characterized in that: The invention also includes a control component, wherein the reflective moving mirror motor and the board entry sensor are electrically connected to the control component respectively. When the part to be detected moves to the stop position, the board entry sensor sends the second board entry position signal to the control component. After receiving the second board entry position signal, the control component controls the reflective moving mirror motor to operate, and drives the reflective moving mirror to switch from the first working angle to the second working angle.

6. The particle size detection system according to claim 2, characterized in that: The carrier motor is also used to drive the carrier to move in a direction perpendicular to the first surface of the piece to be detected. The particle size detection system also includes a film detection sensor electrically connected to the carrier motor, and the film detection sensor is used to detect whether the second surface of the piece to be detected is covered with a dust-proof film; if the film detection sensor detects that the second surface is covered with the dust-proof film, the film detection sensor sends a film existence signal to the carrier motor, and after receiving the film existence signal, the carrier motor drives the carrier to move a preset distance in the direction of the first surface.

7. The particle size detection system according to claim 6, characterized in that: It also includes a limit position detection sensor electrically connected to the carrier motor. When the carrier motor drives the carrier to move in the direction of the first surface, if the limit position detection sensor detects that the part to be detected has reached the limit position, the limit position detection sensor sends a stop signal to the carrier motor. After receiving the stop signal, the carrier motor stops driving the carrier to continue moving.

8. The particle size detection system according to claim 1, characterized in that: It also includes a focusing lens group, which is located between the reflecting mirror and the camera, and is used to converge the first light beam or the second light beam reflected by the reflecting mirror.

9. The particle size detection system according to claim 1, characterized in that: The camera is a time delay integration camera.

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