A particle detection device and method for semiconductor bulk gas

Abstract

The present application relates to a semiconductor bulk gas particle detection device and method, belonging to the field of fluid particle detection technology, the semiconductor bulk gas particle detection device includes a circulation pool, the circulation pool is provided with a channel for passing through the detection hole, the circulation pool is provided with an input pipe, the input pipe is connected with the entrance of the channel, a rotating rod is rotatably provided in the input pipe, the rotation axis of the rotating rod is perpendicular to the length direction of the input pipe, the rotating rod is provided with a plurality of blades at intervals along its own circumference, the blades are provided with a plurality of first through holes and a plurality of second through holes, the blades are provided with an adjustment mechanism, the adjustment mechanism is used to adjust the first through hole to close the second through hole when it is opened or to adjust the second through hole to close the first through hole when it is opened. The present application has the effect of making it difficult for particles in the fluid to aggregate, improving the dispersion of particles, and ensuring the accuracy of particle detection to a certain extent.

Description

Technical Field

[0001] The present application relates to the technical field of fluid particle detection, and in particular to a particle detection device and method for semiconductor bulk gases. Background Art

[0002] Semiconductor bulk gases usually refer to gases with high consumption in electronic semiconductor processes. These gases are essential for manufacturing high-purity, high-quality semiconductor devices. Semiconductor bulk gases mainly include nitrogen, hydrogen, oxygen, argon, carbon dioxide, etc. Since the particle size quality of high-purity gas products directly affects the product quality of back-end electronic customers, it is usually necessary to use detection equipment to detect particles in semiconductor bulk gases.

[0003] In the related art, a Chinese patent document with publication number CN206002414U discloses a liquid particle detection device, which includes a laser, a circulation cell, a photodetector and a signal processing unit. The circulation cell is provided with a detection hole and a channel for fluid to pass through. The laser and the photodetector are respectively arranged on both sides of the detection hole. The channel runs from the upper end of the circulation cell to the lower end of the circulation cell. The channel is formed with an inlet at the upper part of the circulation cell and an outlet at the lower part. The signal processing unit is electrically connected to the photodetector. When in use, the fluid enters the channel from the inlet through the pipeline and then passes through the detection hole and is discharged from the outlet. The incident light beam of the laser is transmitted to the photodetector through the detection hole. The signal processing unit can process the signal converted by the photodetector to obtain the number and size of particles in the fluid flowing through the channel.

[0004] Regarding the above-mentioned related technologies, the fluid needs to pass through a relatively long pipe before entering the channel. Particles tend to aggregate in the fluid, resulting in poor dispersion and affecting the accuracy of particle detection. Summary of the invention

[0005] In order to help prevent particles in a fluid from agglomerating, improve the dispersion of particles, and ensure the accuracy of particle detection to a certain extent, the present application provides a particle detection device and method for semiconductor bulk gases.

[0006] In the first aspect, the present application provides a semiconductor bulk gas particle detection device, which adopts the following technical solution:

[0007] A particle detection device for semiconductor bulk gas, comprising a circulation pool, a channel for passing through a detection hole is provided on the circulation pool, an input pipe is provided on the circulation pool, the input pipe is connected to the entrance of the channel, a rotating rod is rotatably provided in the input pipe, the rotation axis of the rotating rod is perpendicular to the length direction of the input pipe, a plurality of blades are arranged on the rotating rod at intervals along its circumference, a plurality of first through holes and a plurality of second through holes are provided on the blades, and an adjusting mechanism is provided on the blades, the adjusting mechanism is used to close the second through holes when the first through holes are opened or to close the first through holes when the second through holes are opened.

[0008] Preferably, the adjustment mechanism includes an adjustment plate slidably arranged in the blade and a sliding assembly arranged in the blade, the sliding direction of the adjustment plate is perpendicular to the rotation axis of the rotating rod, and a first adjustment hole and a second adjustment hole are opened on the adjustment plate, the first adjustment hole corresponds to the first through hole one-to-one, and the second adjustment hole corresponds to the second through hole one-to-one, and the sliding assembly is used to drive the adjustment plate to move so that the first adjustment hole slides in a direction close to the corresponding first through hole or the second adjustment hole slides in a direction close to the corresponding second through hole, and when the first adjustment hole is aligned with the corresponding first through hole, the second adjustment hole is misaligned with the corresponding second through hole.

[0009] Preferably, a fixed rod is provided in the input pipe, and the rotating rod is rotatably sleeved on the fixed rod. The sliding assembly includes a spring provided in the blade and an adsorbent provided on the fixed rod. The spring is used to push the adjusting plate to slide in a direction away from the fixed rod for resetting, and the adsorbent is used to adsorb the adjusting plate to slide in a direction close to the fixed rod. When the spring is in a natural state, the second adjusting hole is aligned with the corresponding second through hole, and when the adjusting plate slides in a direction close to the fixed rod, the first adjusting hole slides toward the corresponding first through hole.

[0010] Preferably, the adsorption component includes a first magnet arranged on the fixed rod and a second magnet arranged on the adjusting plate, the first magnet is used to adsorb the second magnet to drive the adjusting plate to slide toward the direction close to the fixed rod, the adsorption force between the first magnet and the second magnet is greater than the elastic force of the spring, and when the first magnet and the second magnet are adsorbed and matched, the first adjustment hole is aligned with the corresponding first through hole.

[0011] Preferably, the first magnets are symmetrically arranged along the axis of the fixing rod, and the arrangement direction of the two symmetrically arranged first magnets is perpendicular to the length direction of the corresponding portion of the input tube.

[0012] Preferably, the input pipe has a spiral section, and the rotation axis of the rotating rod is perpendicular to the flow direction of the fluid in the corresponding section of the input pipe.

[0013] Preferably, the inner wall of the input pipe and the outer wall of the blade are both covered with a smooth non-stick layer.

[0014] Preferably, the input pipe is detachably connected to the circulation pool via a flange.

[0015] In the second aspect, the present application provides a semiconductor bulk gas particle detection method, which adopts the following technical solution:

[0016] A semiconductor bulk gas particle detection method, using the semiconductor bulk gas particle detection device, further comprising the following steps:

[0017] The fluid enters from the end of the input tube away from the flow cell;

[0018] The blade drives the rotating rod to rotate under the impact of the fluid to stir and mix the fluid, and the first through hole and the second through hole are adjusted by the adjustment mechanism to be opened intermittently and alternately to change the flow direction of the fluid;

[0019] The fluid then enters the circulation pool from its inlet, and the particles are detected through the cooperation of the laser and the photodetector. The signal processing unit electrically connected to the photodetector processes the signal converted by the photodetector to obtain the number and size of particles in the fluid flowing through the channel, so that engineers can obtain data through the PLC control system.

[0020] In summary, this application includes the following beneficial technical effects:

[0021] The fluid enters the circulation pool through the end of the input tube away from the circulation pool, so that the blades drive the rotating rod to rotate under the impact of the fluid. When the blades rotate, the fluid is stirred and mixed to a certain extent. The first through hole and the second through hole are adjusted by the adjustment mechanism to be opened intermittently and alternately, so that part of the fluid passes through the first through hole and the second through hole alternately, and then enters the circulation pool, which helps to continuously change the flow direction of the fluid, improve the mixing effect of the fluid, make it difficult for particles in the fluid to aggregate, help improve the dispersion of the particles, and ensure the accuracy of particle detection to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application.

[0023] Figure 2 It is a partial structural sectional exploded diagram of an embodiment of the present application.

[0024] Figure 3 It is a partial structural diagram of an embodiment of the present application.

[0025] Figure 4 It is a partial structural cross-sectional view of an embodiment of the present application.

[0026] Explanation of the accompanying drawings: 1. circulation pool; 2. channel; 3. input tube; 4. rotating rod; 5. blade; 6. first through hole; 7. second through hole; 8. adjusting plate; 9. first adjusting hole; 10. second adjusting hole; 11. fixing rod; 12. spring; 13. adsorption part; 131. first magnet; 132. second magnet; 14. flange; 15. cavity; 16. connecting hole; 17. laser; 18. photodetector; 19. spatial filtering structure; 20. signal processing unit. DETAILED DESCRIPTION

[0027] The following is combined with Figure 1-4 This application is described in further detail.

[0028] The present application embodiment discloses a semiconductor bulk gas particle detection device. Figure 1 and Figure 2 The particle detection device for semiconductor bulk gas includes a flow cell 1, one side of the flow cell 1 is used to connect with a laser 17, and the other side is used to connect with a photodetector 18, wherein a spatial filtering structure 19 can be arranged between the flow cell 1 and the laser 17 to improve the detection accuracy; a channel 2 for passing through the detection hole is provided on the flow cell 1, and an input pipe 3 is detachably fixed on the flow cell 1 through a flange 14, the two ends of the input pipe 3 are straight pipes, and the middle is a spiral section, and the use of the spiral section facilitates mixing of fluids of different speeds and directions; one end of the input pipe 3 is connected to the inlet of the channel 2. The input pipe 3 is detachably connected to the flow cell 1, so that the input pipe 3 can be removed to clean the inner wall.

[0029] Reference Figure 2 and Figure 3 A fixed rod 11 is fixed in the spiral section of the input pipe 3, and a plurality of fixed rods 11 are distributed at intervals along the bending direction of the spiral section. A rotating rod 4 is rotatably sleeved on each fixed rod 11. The length direction of each fixed rod 11 and the rotation axis of the rotating rod 4 are both perpendicular to the length direction of the corresponding position of the input pipe 3, that is, the length direction of each fixed rod 11 and the rotation axis of the rotating rod 4 are both perpendicular to the flow direction of the fluid at the corresponding position of the input pipe 3; a plurality of blades 5 are fixed on the outer wall of the rotating rod 4, and the plurality of blades 5 are arranged at intervals along the circumference of the rotating rod 4, and the side of the blade 5 away from the fixed rod 11 is an arc edge, and is convex in the direction away from the fixed rod 11. In the embodiment of the present application, four blades 5 are arranged on each rotating rod 4.

[0030] Reference Figure 2 and Figure 3Each blade 5 is provided with a plurality of first through holes 6 and a plurality of second through holes 7, the plurality of first through holes 6 are arranged in a matrix, the plurality of second through holes 7 are also arranged in a matrix, and the first through holes 6 and the second through holes 7 are arranged crosswise and staggered, that is, the first through holes 6 in each row or column are staggered with the second through holes 7 in the adjacent row or column, wherein the distance from the first through holes 6 in a row close to the rotating rod 4 to the rotating rod 4 is smaller than the distance from the second through holes 7 in a row close to the rotating rod 4 to the rotating rod 4, and an adjusting mechanism for adjusting the first through holes 6 to close the second through holes 7 when opening or adjusting the second through holes 7 to close the first through holes 6 when opening is provided in the blade 5.

[0031] When in use, the fluid enters through the end of the input tube 3 away from the circulation pool 1, and the blade 5 drives the rotating rod 4 to rotate under the impact of the fluid, so that the rotation of the blade 5 can stir and mix the fluid to a certain extent, and the first through hole 6 and the second through hole 7 are adjusted by the adjustment mechanism to be intermittently opened alternately, so that part of the fluid passes through the first through hole 6 and the second through hole 7 alternately, which helps to continuously change the flow direction of the fluid, and then the fluid passing through the input tube 3 enters the circulation pool 1 from the entrance of the circulation pool 1, and the particles are detected by the mutual cooperation of the laser 17 and the photoelectric detector 18 to obtain the number and size of particles in the fluid flowing through the channel 2; This helps to prevent the particles in the fluid from agglomerating, improve the dispersion of the particles, and ensure the accuracy of particle detection to a certain extent.

[0032] Reference Figure 2 and Figure 4 In order to facilitate the adjustment of closing the second through hole 7 when the first through hole 6 is opened or closing the first through hole 6 when the second through hole 7 is opened, the adjustment mechanism includes an adjustment sheet 8 and a sliding assembly. The adjustment sheet 8 is slidably arranged in the blade 5. The outer wall of the adjustment sheet 8 abuts against the inner wall of the blade 5. The sliding direction of the adjustment sheet 8 is perpendicular to the rotation axis of the rotating rod 4. Specifically, the adjustment sheet 8 slides in a direction close to or away from the fixed rod 11; the adjustment sheet 8 is provided with a first adjustment hole 9 and a second adjustment hole 10, the first adjustment hole 9 corresponds to the first through hole 6 one by one, and the second adjustment hole 10 corresponds to the second through hole 7 one by one; the sliding assembly Arranged in the blade 5, the sliding assembly is used to drive the adjusting plate 8 to move so that the first adjusting hole 9 slides toward the direction close to the corresponding first through hole 6 or the second adjusting hole 10 slides toward the direction close to the corresponding second through hole 7; when the first adjusting hole 9 is aligned with the corresponding first through hole 6, the second adjusting hole 10 is misaligned with the corresponding second through hole 7 and the second adjusting hole 10 is located on the side of the corresponding second through hole 7 close to the rotating rod 4; when the second adjusting hole 10 is aligned with the corresponding second through hole 7, the first adjusting hole 9 is misaligned with the corresponding first through hole 6 and the first adjusting hole 9 is located on the side of the corresponding first through hole 6 away from the rotating rod 4.

[0033] Reference Figure 2 and Figure 4In order to facilitate driving the adjusting piece 8 to slide in a direction close to or away from the fixed rod 11, the sliding assembly includes a spring 12 and an adsorbent 13. Each adjusting piece 8 corresponds to two springs 12. The spring 12 is located in the blade 5. The extension direction of the spring 12 is parallel to the moving direction of the adjusting piece 8. One end of the spring 12 is fixed to the inner wall of the blade 5, and the other end is fixed to the adjusting piece 8. The spring 12 is used to push the adjusting piece 8 to slide in a direction away from the fixed rod 11 for reset. The adsorbent 13 is arranged on the fixed rod 11. The adsorbent 13 is used to adsorb the adjusting piece 8 to slide in a direction close to the fixed rod 11. When the spring 12 is in a natural state, the second adjusting hole 10 is aligned with the corresponding second through hole 7; when the adjusting piece 8 slides in a direction close to the fixed rod 11, the first adjusting hole 9 slides in a direction close to the corresponding first through hole 6.

[0034] Reference Figure 2 and Figure 4 In order to facilitate the adsorption and adjustment sheet 8 to slide in the direction close to the fixed rod 11, the adsorption member 13 includes a first magnet 131 and a second magnet 132. The first magnet 131 is fixed on the outer wall of the fixed rod 11, and the second magnet 132 is fixed on the side of the adjustment sheet 8 close to the fixed rod 11. A cavity 15 for avoiding the first magnet 131 is provided in the rotating rod 4. The first magnet 131 is located in the cavity 15, so that when the rotating rod 4 rotates, the rotating rod 4 will not interfere with the first magnet 131; a cavity 15 for the second magnet 132 to pass through is provided on the rotating rod 4. The connecting hole 16 connects the interior of the blade 5 with the cavity 15; the second magnet 132 is located between the two springs 12 corresponding to the adjusting plate 8, and the first magnet 131 is used to adsorb the second magnet 132 to drive the adjusting plate 8 to slide toward the direction close to the fixing rod 11, and the adsorption force between the first magnet 131 and the second magnet 132 is greater than the sum of the elastic forces of the two springs 12; when the first magnet 131 and the second magnet 132 are adsorbed and matched, the first adjusting hole 9 is aligned with the corresponding first through hole 6, and the adjusting plate 8 closes the second through hole 7.

[0035] When the rotating rod 4 rotates, the blade 5 on the rotating rod 4 rotates to align with the first magnet 131 on the fixed rod 11, and the first magnet 131 attracts the second magnet 132 to drive the adjusting piece 8 to slide in the direction close to the fixed rod 11, compressing the spring 12. At this time, the first adjusting hole 9 moves in the direction close to the corresponding first through hole 6, and the second adjusting hole 10 moves in the direction away from the corresponding second through hole 7, until the first adjusting hole 9 is aligned with the corresponding first through hole 6, and the second adjusting hole 10 is misaligned with the corresponding second through hole 7, so that the first through hole 6 is opened and the second through hole 7 is closed, so that the fluid can pass through the first through hole 6; as the rotating rod 4 continues to rotate, the blade 5 moves The first adjusting hole 9 is moved away from the first through hole 6, and the second adjusting hole 10 is moved towards the corresponding second through hole 7, until the second adjusting hole 10 is aligned with the corresponding second through hole 7, and the first adjusting hole 9 is misaligned with the corresponding first through hole 6, so that the first through hole 6 is closed and the second through hole 7 is opened, thereby staggeredly changing the flow direction of the fluid, improving the mixing effect of the fluid, making it difficult for particles in the fluid to gather, and ensuring the accuracy of particle detection to a certain extent.

[0036] Reference Figure 2 and Figure 4 The first magnets 131 are symmetrically arranged along the axis of the fixed rod 11. In the embodiment of the present application, the first magnets 131 are symmetrically arranged in two groups, and the arrangement direction of the two first magnets 131 in one group is perpendicular to the length direction of the corresponding part of the input tube 3, and the arrangement direction of the two first magnets 131 in the other group is parallel to the length direction of the corresponding part of the input tube 3.

[0037] Symmetrically arranging a plurality of first magnets 131 helps to make the adjustment plate 8 slide intermittently to adjust the opening and closing of the first through hole 6 and the second through hole 7, which is convenient for changing the flow direction of the fluid, improving the mixing effect of the fluid, and ensuring the accuracy of particle detection to a certain extent.

[0038] Refer to 2 and Figure 4 The inner wall of the input pipe 3 and the outer wall of the blade 5 are both covered with a smooth non-stick layer (not shown in the figure), specifically, the smooth non-stick layer is a polytetrafluoroethylene layer. The provision of the smooth non-stick layer makes it difficult for particles in the fluid to adhere, reducing the impact on the detection.

[0039] The implementation principle of the particle detection device for semiconductor bulk gas in the embodiment of the present application is as follows: when in use, the fluid enters through the end of the input tube 3 away from the circulation pool 1, and the blades 5 drive the rotating rod 4 to rotate under the impact of the fluid, and the rotation of the blades 5 can stir and mix the fluid to a certain extent; when the blades 5 on the rotating rod 4 rotate to align with the first magnet 131 on the fixed rod 11, the first magnet 131 attracts the second magnet 132 to drive the adjustment plate 8 to slide toward the fixed rod 11, so that the first adjustment hole 9 moves toward the direction close to the corresponding first through hole 6, and the second adjustment hole 10 moves toward the direction away from the corresponding second through hole 7, until the first magnet 131 and the second magnet 132 are attracted and matched, the first adjustment hole 9 is aligned with the corresponding first through hole 6, and the second adjustment hole 10 is misaligned with the corresponding second through hole 7, so that the first through hole 6 is opened and the second through hole 7 is closed. The first through hole 6 is closed so that the fluid can pass through the first through hole 6; as the rotating rod 4 continues to rotate, the blade 5 moves to be offset from the first magnet 131, so that the second magnet 132 is disengaged from the first magnet 131. At this time, the compressed spring 12 pushes the adjusting plate 8 to move in the direction away from the fixed rod 11, so that the first adjusting hole 9 moves in the direction away from the corresponding first through hole 6, and the second adjusting hole 10 moves in the direction close to the corresponding second through hole 7, until the spring 12 is in a natural state, the second adjusting hole 10 is aligned with the corresponding second through hole 7, and the first adjusting hole 9 is offset from the corresponding first through hole 6, so as to achieve the closure of the first through hole 6 and the opening of the second through hole 7, and this reciprocating process helps to continuously change the flow direction of the fluid, improve the mixing effect of the fluid, and make it difficult for particles in the fluid to aggregate, thereby helping to improve the dispersion of the particles and ensure the accuracy of particle detection to a certain extent.

[0040] Then the fluid passing through the input pipe 3 enters the circulation pool 1 from the entrance of the circulation pool 1, and the particles are detected through the cooperation of the laser 17 and the photodetector 18. The signal processing unit 20 electrically connected to the photodetector 18 can process the signal converted by the photodetector 18 to obtain the number and size of particles in the fluid flowing through the channel 2, so that engineers can obtain data through the PLC control system.

[0041] The embodiment of the present application also discloses a semiconductor bulk gas particle detection method. The semiconductor bulk gas particle detection method uses the semiconductor bulk gas particle detection device described above and also includes the following steps:

[0042] Step 1: The fluid enters through the end of the input tube 3 away from the circulation pool 1;

[0043] Step 2: The blade 5 drives the rotating rod 4 to rotate under the impact of the fluid to stir and mix the fluid to a certain extent. During the rotation of the rotating rod 4, the first through hole 6 and the second through hole 7 are intermittently opened and staggered by the cooperation of the first magnet 131, the second magnet 132 and the spring 12 to continuously change the flow direction of the fluid;

[0044] Step 3: The fluid then enters the circulation pool 1 from the inlet of the circulation pool 1, and the particles are detected through the cooperation of the laser 17 and the photodetector 18. The signal processing unit 20 electrically connected to the photodetector 18 processes the signal converted by the photodetector 18 to obtain the number and size of particles in the fluid flowing through the channel 2, so that the engineer can obtain data through the PLC control system.

[0045] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A semiconductor bulk gas particle detection device, comprising a flow cell (1), wherein the flow cell (1) is provided with a channel (2) for passing through a detection hole, characterized in that: The circulation pool (1) is provided with an input pipe (3), the input pipe (3) being connected to the inlet of the channel (2), a rotating rod (4) being rotatably arranged in the input pipe (3), the rotating axis of the rotating rod (4) being perpendicular to the length direction of the input pipe (3), a plurality of blades (5) being arranged at intervals along the circumference of the rotating rod (4), a plurality of first through holes (6) and a plurality of second through holes (7) being formed on the blades (5), and an adjusting mechanism being provided on the blades (5), the adjusting mechanism being used to adjust the first through hole (6) to close the second through hole (7) when it is opened or to adjust the second through hole (7) to close the first through hole (6) when it is opened.

2. The semiconductor bulk gas particle detection device according to claim 1, characterized in that: The adjusting mechanism comprises an adjusting plate (8) slidably arranged in the blade (5) and a sliding assembly arranged in the blade (5); the sliding direction of the adjusting plate (8) is perpendicular to the rotation axis of the rotating rod (4); a first adjusting hole (9) and a second adjusting hole (10) are opened on the adjusting plate (8); the first adjusting hole (9) corresponds to the first through hole (6) one by one, and the second adjusting hole (10) corresponds to the second through hole (7) one by one; the sliding assembly is used to drive the adjusting plate (8) to move so that the first adjusting hole (9) slides in a direction close to the corresponding first through hole (6) or the second adjusting hole (10) slides in a direction close to the corresponding second through hole (7); when the first adjusting hole (9) is aligned with the corresponding first through hole (6), the second adjusting hole (10) is misaligned with the corresponding second through hole (7).

3. The semiconductor bulk gas particle detection device according to claim 2, characterized in that: A fixed rod (11) is arranged in the input pipe (3), and the rotating rod (4) is rotatably sleeved on the fixed rod (11). The sliding assembly comprises a spring (12) arranged in the blade (5) and an adsorption member (13) arranged on the fixed rod (11). The spring (12) is used to push the adjustment plate (8) to slide in a direction away from the fixed rod (11) for reset. The adsorption member (13) is used to adsorb the adjustment plate (8) to slide in a direction close to the fixed rod (11). When the spring (12) is in a natural state, the second adjustment hole (10) is aligned with the corresponding second through hole (7). When the adjustment plate (8) slides in a direction close to the fixed rod (11), the first adjustment hole (9) slides in a direction close to the corresponding first through hole (6).

4. The semiconductor bulk gas particle detection device according to claim 3, characterized in that: The adsorption member (13) comprises a first magnet (131) arranged on the fixed rod (11) and a second magnet (132) arranged on the adjustment plate (8); the first magnet (131) is used to adsorb the second magnet (132) to drive the adjustment plate (8) to slide in a direction close to the fixed rod (11); the adsorption force between the first magnet (131) and the second magnet (132) is greater than the elastic force of the spring (12); when the first magnet (131) and the second magnet (132) are adsorbed and matched, the first adjustment hole (9) is aligned with the corresponding first through hole (6).

5. The semiconductor bulk gas particle detection device according to claim 4, characterized in that: The first magnets (131) are symmetrically arranged along the axis of the fixing rod (11), and the arrangement direction of the two symmetrically arranged first magnets (131) is perpendicular to the length direction of the corresponding portion of the input tube (3).

6. The semiconductor bulk gas particle detection device according to claim 1, characterized in that: The input pipe (3) has a spiral section, and the rotation axis of the rotating rod (4) is perpendicular to the flow direction of the fluid in the corresponding section of the input pipe (3).

7. The semiconductor bulk gas particle detection device according to claim 1, characterized in that: The inner wall of the input pipe (3) and the outer wall of the blade (5) are both covered with a smooth non-stick layer.

8. A semiconductor bulk gas particle detection device according to any one of claims 1 to 7, characterized in that: The input pipe (3) is detachably connected to the circulation pool (1) via a flange (14).

9. A semiconductor bulk gas particle detection method, using the semiconductor bulk gas particle detection device according to any one of claims 1 to 8, characterized in that: The following steps are also included: The fluid enters from the end of the input tube (3) away from the circulation pool (1); The blades (5) drive the rotating rod (4) to rotate under the impact of the fluid to stir and mix the fluid, and the first through hole (6) and the second through hole (7) are adjusted by the adjustment mechanism to be opened intermittently and alternately to change the flow direction of the fluid; Then the fluid enters the circulation pool (1) from the inlet of the circulation pool (1), and the particles are detected through the cooperation of the laser (17) and the photodetector (18). The signal processing unit (20) electrically connected to the photodetector (18) processes the signal converted by the photodetector (18) to obtain the number and size of particles in the fluid flowing through the channel (2), so that the engineer can obtain data through the PLC control system.

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