A plasma power supply voltage output control method and system based on AVR

Abstract

The present invention relates to a plasma power supply voltage output control method and system based on AVR, belonging to the technical field of power supply voltage output control. The present invention includes: obtaining gas composition data through a gas sensor and transmitting it to an intelligent terminal, the intelligent terminal searches a database according to the gas composition data to obtain a first power value and a second power value; obtaining a plasma start signal, the intelligent terminal generates an adaptive signal to control the AVR actuator to boost the input voltage; obtaining plasma parameters through an active diagnosis method, comparing the plasma parameters with a comparison threshold to obtain a plasma start state identification result; the intelligent terminal generates an adaptive signal according to the plasma start state identification result and the second power value to control the AVR actuator to reduce the input voltage. The plasma generating device generates stable plasma and realizes automatic voltage adjustment.

Description

Technical Field

[0001] The present invention belongs to the technical field of power supply voltage output control, and in particular relates to a plasma power supply voltage output control method and system based on AVR. Background Art

[0002] In the preparation of isoelectronic materials, it is crucial to accurately control the power supply voltage, because unstable voltage may cause changes in material properties or damage to equipment. Therefore, it is particularly important to develop a plasma power supply voltage output control method and system based on AVR.

[0003] Current problems:

[0004] (1) In current plasma preparation, it is necessary to manually trigger the plasma starting device based on the gas composition in the generating device, which may cause accidental triggering.

[0005] (2) The voltage required in the plasma startup state and the plasma maintenance state is different. It is necessary to manually monitor the plasma state in real time and implement manual voltage adjustment according to the plasma state. When the plasma is always in the high voltage state of the startup state, it will cause damage to the discharge device. Summary of the invention

[0006] In order to solve the above problems existing in the prior art, the present invention provides a plasma power supply voltage output control method and system based on AVR.

[0007] The purpose of the present invention can be achieved by the following technical solutions:

[0008] S1: acquiring gas composition data through a gas sensor disposed inside a plasma generating device, and transmitting the gas composition data to an intelligent terminal, wherein the intelligent terminal searches a database according to the gas composition data to obtain a first power value and a second power value;

[0009] S2: obtaining a plasma start signal, the intelligent terminal generating a voltage-boosting adaptive signal according to the plasma start signal and the first power value and sending the signal to the AVR actuator, and the AVR actuator boosts the input voltage after receiving the voltage-boosting adaptive signal;

[0010] S3: acquiring plasma parameters by an active diagnosis method, and transmitting the plasma parameters to the smart terminal, wherein the smart terminal performs a database search according to the gas composition data to obtain a comparison threshold, and compares the plasma parameters with the comparison threshold to obtain a plasma start-up state recognition result;

[0011] S4: The intelligent terminal generates a voltage-reduction adaptive signal according to the plasma start-up state recognition result and the second power value and sends the signal to the AVR actuator. After receiving the voltage-reduction adaptive signal, the AVR actuator reduces the input voltage.

[0012] As a preferred technical solution of the present invention, the first power value is a high voltage value for starting plasma, and the second power value is a voltage value for maintaining a plasma state.

[0013] Specifically, the AVR actuator is composed of a controller, an actuator, a feedback circuit, a protection circuit and an input / output port; the controller is the core of the AVR actuator and is responsible for adjusting the output voltage according to the adaptive signal to reach a predetermined voltage level; the feedback circuit is used to feed back the measured voltage signal to the controller to form a closed-loop control system to achieve real-time regulation of the output voltage; the actuator is an excitation system, which changes the excitation current of the generator according to the instructions of the controller to achieve voltage regulation; the protection circuit is used to ensure the stable operation and safety of the AVR actuator; the input / output port is used to connect a power supply and a plasma generating device.

[0014] Specifically, the controller is an optimized fusion controller improved by a particle swarm optimization algorithm based on a PI+PD cascade controller. The differential equation of the optimized fusion controller is:

[0015] U(t)=[(k p1 +k i D -λ ]*(k p2 +k d D -μ )]e(t),

[0016] Where U(t) is the controller output, e(t) is the error input of the controller, D is the first differential operator, λ is the integration order, μ is the differential order, k p1 is the proportionality factor 1, k p2 is the proportionality factor 2, k i is the integration coefficient, k d is the differential coefficient;

[0017] The transfer function of the optimized fusion controller is:

[0018]

[0019] Where C(s) is the transfer function value, s is the second differential operator, λ is the integration order, μ is the differential order, k p1 is the proportionality factor 1, k p2 is the proportionality factor 2, ki is the integration coefficient, k d is the differential coefficient.

[0020] Specifically, the active diagnosis method is a diagnosis method based on Thomson scattering, which uses a laser transmitter to emit photons and a receiver to receive photons, and utilizes elastic scattering between electrons and the photons to obtain the plasma parameters.

[0021] Specifically, the boosting process is:

[0022] S601: rectifying and filtering the input voltage of the AVR actuator to obtain a filtered voltage, and comparing the filtered voltage with the first power value to obtain an error voltage;

[0023] S602: Inputting the error voltage to an amplifying unit for amplification to obtain an amplified voltage, and using the amplified voltage as a control voltage of a phase shifting unit to increase a trigger pulse phase angle of a trigger unit;

[0024] S603: changing the conduction angle of the thyristor and the excitation voltage value of the AC exciter according to the trigger pulse phase angle, thereby increasing the output voltage of the AVR actuator;

[0025] The voltage reduction is achieved by reducing the trigger pulse phase angle to reduce the conduction angle of the thyristor and the excitation voltage value of the AC exciter, thereby reducing the output voltage of the AVR actuator.

[0026] Specifically, the plasma parameters include electron temperature and electron density, which are calculated based on the shape of the elastic scattering spectrum and the peak position of the spectrum. The electron temperature calculation formula is:

[0027]

[0028] Where T is the electron temperature, e is the electron charge, k is the Boltzmann constant, λ is the screening length, μ is the vacuum dielectric constant, and n is the number of electrons;

[0029] The electron density calculation formula is:

[0030] p=(N*I*r 2 sin 2 θ*S(k,w)*dw*du),

[0031] Where p is the electron density, N is the number of electrons that undergo Thomson scattering, I is the power density of the incident electromagnetic wave, S(k, w) is the shape factor, r is the classical electron radius, θ is the angle between the polarization direction of the incident electromagnetic wave and the scattering wave vector, dw is the scattering power shift with frequency, and du is the scattering solid angle.

[0032] A power supply voltage output control system based on an AVR actuator, characterized in that it includes an analysis module, a start-up module, a diagnosis module and a voltage transformation module;

[0033] The analysis module is used to obtain gas composition data through a gas sensor disposed inside the plasma generator, and transmit the gas composition data to the smart terminal, and the smart terminal searches the database according to the gas composition data to obtain the first power value and the second power value;

[0034] The start-up module is used to obtain a start-up plasma signal, and the intelligent terminal generates a boost adaptive signal according to the start-up plasma signal and the first power value and sends the signal to the AVR actuator, and the AVR actuator boosts the input voltage after receiving the boost adaptive signal;

[0035] The diagnostic module is used to obtain plasma parameters through an active diagnostic method, and transmit the plasma parameters to the smart terminal, the smart terminal performs a database search based on the gas composition data to obtain a comparison threshold, and compares the plasma parameters with the comparison threshold to obtain a plasma start-up state recognition result;

[0036] The voltage transformation module is used in the intelligent terminal to generate a voltage reduction adaptive signal according to the plasma start-up state recognition result and the second power value and send it to the AVR actuator. After receiving the voltage reduction adaptive signal, the AVR actuator reduces the input voltage.

[0037] An electronic device comprises a memory, a processor and a computer program stored in the memory and executable on the processor, wherein when the processor executes the program, the AVR-based plasma power supply voltage output control method as described above is implemented.

[0038] A storage medium containing computer executable instructions, characterized in that the computer executable instructions are used to execute the AVR-based plasma power supply voltage output control method as described above when executed by a computer processor.

[0039] The beneficial effects of the present invention are:

[0040] 1. A gas sensor is set in the plasma generator to obtain gas composition data, and the gas composition data is transmitted to the intelligent terminal. The intelligent terminal retrieves the database according to the gas composition data to obtain the first power value and the second power value corresponding to the gas, and generates an adaptive signal according to the first power value and the start signal to control the AVR actuator to implement the boost, thereby reducing manual participation and avoiding damage to the equipment caused by manual misjudgment.

[0041] 2. By setting up active monitoring equipment, plasma parameters are obtained in real time and transmitted to the intelligent terminal. The intelligent terminal judges the plasma state according to the plasma parameters to obtain a judgment result, and generates an adaptive signal according to the judgment result to control the AVR actuator to adjust the voltage, so that the output voltage of the AVR actuator is maintained at the second power value to maintain the plasma state, thereby achieving no need for manual or mechanical voltage adjustment after the plasma is generated, thereby improving the discharge stability and controllability of the plasma. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0043] Figure 1 The figure is a flow chart of a plasma power supply voltage output control method based on AVR of the present invention. DETAILED DESCRIPTION

[0044] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation methods, structures, features and effects of the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0045] See also Figure 1 , a plasma power supply voltage output control method based on AVR,

[0046] S1: acquiring gas composition data through a gas sensor disposed inside a plasma generating device, and transmitting the gas composition data to an intelligent terminal, wherein the intelligent terminal searches a database according to the gas composition data to obtain a first power value and a second power value;

[0047] S2: obtaining a plasma start signal, the intelligent terminal generating a voltage-boosting adaptive signal according to the plasma start signal and the first power value and sending the signal to the AVR actuator, and the AVR actuator boosts the input voltage after receiving the voltage-boosting adaptive signal;

[0048] S3: acquiring plasma parameters by an active diagnosis method, and transmitting the plasma parameters to the smart terminal, wherein the smart terminal performs a database search according to the gas composition data to obtain a comparison threshold, and compares the plasma parameters with the comparison threshold to obtain a plasma start-up state recognition result;

[0049] S4: The intelligent terminal generates a voltage-reduction adaptive signal according to the plasma start-up state recognition result and the second power value and sends the signal to the AVR actuator. After receiving the voltage-reduction adaptive signal, the AVR actuator reduces the input voltage.

[0050] In this embodiment, a gas sensor is set in the plasma generating device to obtain gas composition data, and the gas composition data is transmitted to the intelligent terminal. The intelligent terminal retrieves the database according to the gas composition data to obtain the first power value and the second power value corresponding to the gas, and generates an adaptive signal according to the first power value and the start signal to control the AVR actuator to implement voltage boost, thereby reducing manual participation and avoiding damage to the equipment due to manual misjudgment.

[0051] As a preferred technical solution of the present invention, the first power value is a high voltage value for starting plasma, and the second power value is a voltage value for maintaining a plasma state.

[0052] Specifically, the AVR actuator is composed of a controller, an actuator, a feedback circuit, a protection circuit and an input / output port; the controller is the core of the AVR actuator and is responsible for adjusting the output voltage according to the adaptive signal to reach a predetermined voltage level; the feedback circuit is used to feed back the measured voltage signal to the controller to form a closed-loop control system to achieve real-time regulation of the output voltage; the actuator is an excitation system, which changes the excitation current of the generator according to the instructions of the controller to achieve voltage regulation; the protection circuit is used to ensure the stable operation and safety of the AVR actuator; the input / output port is used to connect a power supply and a plasma generating device.

[0053] Specifically, the controller is an optimized fusion controller improved by a particle swarm optimization algorithm based on a PI+PD cascade controller. The differential equation of the optimized fusion controller is:

[0054] U(t)=[(k p1 +k i D -λ ]*(k p2 +k d D -μ )]e(t),

[0055] Where U(t) is the controller output, e(t) is the error input of the controller, D is the first differential operator, λ is the integration order, μ is the differential order, k p1 is the proportionality factor 1, k p2 is the proportionality factor 2, k i is the integration coefficient, k d is the differential coefficient;

[0056] The transfer function of the optimized fusion controller is:

[0057]

[0058] Where C(s) is the transfer function value, s is the second differential operator, λ is the integration order, μ is the differential order, k p1 is the proportionality factor 1, k p2 is the proportionality factor 2, k i is the integration coefficient, k d is the differential coefficient.

[0059] Specifically, the active diagnosis method is a diagnosis method based on Thomson scattering, which uses a laser transmitter to emit photons and a receiver to receive photons, and utilizes elastic scattering between electrons and the photons to obtain the plasma parameters.

[0060] Specifically, the boosting process is:

[0061] S601: rectifying and filtering the input voltage of the AVR actuator to obtain a filtered voltage, and comparing the filtered voltage with the first power value to obtain an error voltage;

[0062] S602: Inputting the error voltage to an amplifying unit for amplification to obtain an amplified voltage, and using the amplified voltage as a control voltage of a phase shifting unit to increase a trigger pulse phase angle of a trigger unit;

[0063] S603: changing the conduction angle of the thyristor and the excitation voltage value of the AC exciter according to the trigger pulse phase angle, thereby increasing the output voltage of the AVR actuator;

[0064] The voltage reduction is achieved by reducing the trigger pulse phase angle to reduce the conduction angle of the thyristor and the excitation voltage value of the AC exciter, thereby reducing the output voltage of the AVR actuator.

[0065] Specifically, the plasma parameters include electron temperature and electron density, which are calculated based on the shape of the elastic scattering spectrum and the peak position of the spectrum. The electron temperature calculation formula is:

[0066]

[0067] Where T is the electron temperature, e is the electron charge, k is the Boltzmann constant, λ is the screening length, μ is the vacuum dielectric constant, and n is the number of electrons;

[0068] The electron density calculation formula is:

[0069] p=(N*I*r 2 sin 2 θ*S(k,w)*dw*du),

[0070] Where p is the electron density, N is the number of electrons that undergo Thomson scattering, I is the power density of the incident electromagnetic wave, S(k, w) is the shape factor, r is the classical electron radius, θ is the angle between the polarization direction of the incident electromagnetic wave and the scattering wave vector, dw is the scattering power shift with frequency, and du is the scattering solid angle.

[0071] A power supply voltage output control system based on an AVR actuator, characterized in that it includes an analysis module, a start-up module, a diagnosis module and a voltage transformation module;

[0072] The analysis module is used to obtain gas composition data through a gas sensor disposed inside the plasma generator, and transmit the gas composition data to the smart terminal, and the smart terminal searches the database according to the gas composition data to obtain the first power value and the second power value;

[0073] The start-up module is used to obtain a start-up plasma signal, and the intelligent terminal generates a boost adaptive signal according to the start-up plasma signal and the first power value and sends the signal to the AVR actuator, and the AVR actuator boosts the input voltage after receiving the boost adaptive signal;

[0074] The diagnostic module is used to obtain plasma parameters through an active diagnostic method, and transmit the plasma parameters to the smart terminal, the smart terminal performs a database search based on the gas composition data to obtain a comparison threshold, and compares the plasma parameters with the comparison threshold to obtain a plasma start-up state recognition result;

[0075] The voltage transformation module is used in the intelligent terminal to generate a voltage reduction adaptive signal according to the plasma start-up state recognition result and the second power value and send it to the AVR actuator. After receiving the voltage reduction adaptive signal, the AVR actuator reduces the input voltage.

[0076] In this embodiment, an active monitoring device is provided to obtain plasma parameters in real time and transmit them to the intelligent terminal. The intelligent terminal judges the plasma state according to the plasma parameters to obtain a judgment result, and generates an adaptive signal according to the judgment result to control the AVR actuator to adjust the voltage, so that the output voltage of the AVR actuator is maintained at the second power value to maintain the plasma state, thereby achieving the goal of not needing to use manual or mechanical voltage adjustment after the plasma occurs, thereby improving the discharge stability and controllability of the plasma.

[0077] An electronic device comprises a memory, a processor and a computer program stored in the memory and executable on the processor, wherein when the processor executes the program, the AVR-based plasma power supply voltage output control method as described above is implemented.

[0078] A storage medium containing computer executable instructions, characterized in that the computer executable instructions are used to execute the AVR-based plasma power supply voltage output control method as described above when executed by a computer processor.

[0079] The program code included in the method in the embodiment of the present invention can be transmitted with any appropriate medium, including but not limited to wireless, electric wire, optical cable, etc., or any suitable combination mentioned above. The computer program code for performing the operation of the present invention can be written with one or more programming languages ​​or their combination, and the programming language includes object-oriented programming languages--such as Java, Smalltalk, C++, and also includes conventional procedural programming languages--such as "C" language or similar programming languages. The program code can be executed completely on the user's computer, partially on the user's computer, executed as an independent software package, partially on the user's computer and partially on the remote computer, or executed completely on the remote computer or server. In the case of a remote computer, the remote computer can be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or can be connected to an external computer (for example, using an Internet service provider to connect through the Internet).

[0080] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A plasma power supply voltage output control method based on AVR, characterized in that: The following steps are involved: S1: acquiring gas composition data through a gas sensor disposed inside a plasma generating device, and transmitting the gas composition data to an intelligent terminal, wherein the intelligent terminal searches a database according to the gas composition data to obtain a first power value and a second power value; S2: obtaining a plasma start signal, the intelligent terminal generating a voltage-boosting adaptive signal according to the plasma start signal and the first power value and sending the signal to the AVR actuator, and the AVR actuator boosts the input voltage after receiving the voltage-boosting adaptive signal; S3: acquiring plasma parameters by an active diagnosis method, and transmitting the plasma parameters to the smart terminal, wherein the smart terminal performs a database search according to the gas composition data to obtain a comparison threshold, and compares the plasma parameters with the comparison threshold to obtain a plasma start-up state recognition result; S4: The intelligent terminal generates a voltage-reduction adaptive signal according to the plasma start-up state recognition result and the second power value and sends the signal to the AVR actuator. After receiving the voltage-reduction adaptive signal, the AVR actuator reduces the input voltage.

2. The AVR-based plasma power supply voltage output control method according to claim 1, characterized in that: The first power value is a high voltage value for starting plasma, and the second power value is a voltage value for maintaining a plasma state.

3. The AVR-based plasma power supply voltage output control method according to claim 1, characterized in that: The AVR actuator is composed of a controller, an actuator, a feedback circuit, a protection circuit and an input / output port; the controller is the core of the AVR actuator and is responsible for adjusting the output voltage according to the adaptive signal to reach a predetermined voltage level; the feedback circuit is used to feed back the measured voltage signal to the controller to form a closed-loop control system to achieve real-time regulation of the output voltage; the actuator is an excitation system, which changes the excitation current of the generator according to the instructions of the controller to achieve voltage regulation; the protection circuit is used to ensure the stable operation and safety of the AVR actuator; the input / output port is used to connect a power supply and a plasma generating device.

4. The AVR-based plasma power supply voltage output control method according to claim 3, characterized in that: The controller is an optimized fusion controller improved by particle swarm optimization algorithm based on PI+PD cascade controller. The differential equation of the optimized fusion controller is: U(t)=[(k p1 +k i D -λ ]*(k p2 +k d D -μ )]e(t), Where U(t) is the controller output, e(t) is the error input of the controller, D is the first differential operator, λ is the integration order, μ is the differential order, k p1 is the proportionality factor 1, k p2 is the proportionality factor 2, k i is the integration coefficient, k d is the differential coefficient; The transfer function of the optimized fusion controller is: Where C(s) is the transfer function value, s is the second differential operator, λ is the integration order, μ is the differential order, k p1 is the proportionality factor 1, k p2 is the proportionality factor 2, k i is the integration coefficient, k d is the differential coefficient.

5. The AVR-based plasma power supply voltage output control method according to claim 1, characterized in that: The active diagnosis method is a diagnosis method based on Thomson scattering, which uses a laser transmitter to emit photons and a receiver to receive photons, and utilizes elastic scattering between electrons and the photons to obtain the plasma parameters.

6. The AVR-based plasma power supply voltage output control method according to claim 1, characterized in that: The boost process is: S601: rectifying and filtering the input voltage of the AVR actuator to obtain a filtered voltage, and comparing the filtered voltage with the first power value to obtain an error voltage; S602: Inputting the error voltage to an amplifying unit for amplification to obtain an amplified voltage, and using the amplified voltage as a control voltage of a phase shifting unit to increase a trigger pulse phase angle of a trigger unit; S603: changing the conduction angle of the thyristor and the excitation voltage value of the AC exciter according to the trigger pulse phase angle, thereby increasing the output voltage of the AVR actuator; The voltage reduction is achieved by reducing the trigger pulse phase angle to reduce the conduction angle of the thyristor and the excitation voltage value of the AC exciter, thereby reducing the output voltage of the AVR actuator.

7. The AVR-based plasma power supply voltage output control method according to claim 1, characterized in that: The plasma parameters include electron temperature and electron density, which are calculated based on the shape of the elastic scattering spectrum and the peak position of the spectrum. The electron temperature calculation formula is: Where T is the electron temperature, e is the electron charge, k is the Boltzmann constant, λ is the screening length, μ is the vacuum dielectric constant, and n is the number of electrons; The electron density calculation formula is: p=(N*I*r 2 sin 2 θ*S(k,w)*dw*du), Where p is the electron density, N is the number of electrons that undergo Thomson scattering, I is the power density of the incident electromagnetic wave, S(k, ω) is the shape factor, r is the classical electron radius, θ is the angle between the polarization direction of the incident electromagnetic wave and the scattering wave vector, dω is the scattering power shift with frequency, and du is the scattering solid angle.

8. A power supply voltage output control system based on an AVR actuator, used to execute the method as claimed in any one of claims 1 to 7, characterized in that: It includes analysis module, startup module, diagnosis module and voltage transformation module; The analysis module is used to obtain gas composition data through a gas sensor disposed inside the plasma generator, and transmit the gas composition data to the smart terminal, and the smart terminal searches the database according to the gas composition data to obtain the first power value and the second power value; The start-up module is used to obtain a start-up plasma signal, and the intelligent terminal generates the boost adaptive signal according to the start-up plasma signal and the first power value and sends it to the AVR actuator, and the AVR actuator boosts the input voltage after receiving the boost adaptive signal; The diagnostic module is used to obtain plasma parameters through an active diagnostic method, and transmit the plasma parameters to the smart terminal, the smart terminal performs a database search based on the gas composition data to obtain a comparison threshold, and compares the plasma parameters with the comparison threshold to obtain a plasma start-up state recognition result; The voltage transformation module is used in the intelligent terminal to generate a voltage reduction adaptive signal according to the plasma start-up state recognition result and the second power value and send it to the AVR actuator. After receiving the voltage reduction adaptive signal, the AVR actuator reduces the input voltage.

9. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that: When the processor executes the program, the AVR-based plasma power supply voltage output control method as described in any one of claims 1 to 7 is implemented.

10. A storage medium containing computer executable instructions, characterized in that: When the computer executable instructions are executed by a computer processor, they are used to perform the AVR-based plasma power supply voltage output control method as described in any one of claims 1 to 7.

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