Vacuum break membrane window

Abstract

The application provides a vacuum interrupter film window, comprising a first film assembly, a first biaxially stretched polyester film, a second film assembly, a second biaxially stretched polyester film and a third film assembly; wherein the first film assembly, the first biaxially stretched polyester film, the second film assembly, the second biaxially stretched polyester film and the third film assembly are sequentially connected through a first bolt along a first direction; the first film assembly comprises a first fiber cloth, and the first fiber cloth is attached to the first biaxially stretched polyester film; the second film assembly comprises a second fiber cloth, and the second fiber cloth is attached to the second biaxially stretched polyester film. The stress and deformation of the biaxially stretched polyester film of the vacuum interrupter film window structure are greatly reduced, the service life is effectively improved, and the long-term stable operation of the accelerator vacuum system is ensured.

Description

A vacuum-sealed membrane window Technical Field

[0001] This invention relates to the field of particle accelerator vacuum technology, and specifically to a vacuum isolation membrane window. Background Technology

[0002] The High-Intensity Modulated Metal Munitions (HIMM) carbon ion therapy system is my country's first carbon ion therapy device with independent intellectual property rights. Hailed as the ideal cancer treatment device of the 21st century, it can precisely and efficiently kill cancer cells while minimizing damage to surrounding normal cells. Its main components include a cyclotron accelerator, a synchrotron with an acceleration energy up to 400 MeV, and beam transmission lines connected to multiple treatment terminals. When the charged heavy ion beam runs in the accelerator, it collides with residual gas molecules in the pipe, causing a loss of beam lifetime. Therefore, the heavy ion accelerator needs to operate in an ultra-high vacuum range to meet the requirements for beam lifetime, beam intensity, and beam energy.

[0003] A vacuum barrier membrane is required between the beam transmission terminal conduit and the atmosphere. The function of this membrane is to ensure that the vacuum at the treatment terminal is not disturbed by atmospheric interference, thereby guaranteeing stable beam output. While currently used vacuum barrier membranes can ensure the vacuum in the terminal conduit meets design requirements, their lifespan is relatively short. For example, they may fail within a month. Damage to this membrane would disrupt the entire accelerator's vacuum, causing varying degrees of damage to equipment on the vacuum conduit beamline. Furthermore, if the membrane fails during patient treatment, it could potentially damage the patient's eardrum.

[0004] To address the lifespan issue of vacuum partition membrane windows, existing technologies have addressed this by changing the material. For example, choosing non-metallic materials, such as a non-metallic film (typically biaxially oriented polyester film) combined with a reinforcing fiber substrate, can ensure vacuum sealing while minimizing energy loss during beam passage and providing good mechanical strength to withstand atmospheric pressure. However, the existence of a gap between the biaxially oriented polyester film and the reinforcing fiber substrate leads to significant stress and deformation of the biaxially oriented polyester film during vacuum conditions, impacting the lifespan of the vacuum partition membrane window. Therefore, it is crucial to address the issue of reduced lifespan due to deformation in vacuum partition membrane windows.

[0005] The information disclosed in this section is only for understanding the background of the inventive concept of the present invention. Therefore, the above information may include information that does not constitute prior art. Summary of the Invention

[0006] In view of at least one of the above-mentioned technical problems, the present invention provides a vacuum barrier membrane window, comprising a first membrane assembly, a first biaxially oriented polyester film, a second membrane assembly, a second biaxially oriented polyester film, and a third membrane assembly; wherein the first membrane assembly, the first biaxially oriented polyester film, the second membrane assembly, the second biaxially oriented polyester film, and the third membrane assembly are sequentially connected along a first direction by a first bolt; the first membrane assembly includes a first fiber cloth, which is bonded to the first biaxially oriented polyester film; the second membrane assembly includes a second fiber cloth, which is bonded to the second biaxially oriented polyester film.

[0007] In some exemplary embodiments of the present invention, the first membrane assembly further includes a first flange, wherein a plurality of first holes are arranged in the circumference of the first flange; the first fiber cloth can pass through the plurality of first holes and be connected to the first flange by a second bolt.

[0008] In some exemplary embodiments of the present invention, the first membrane assembly further includes a first support plate and a first fixing plate, wherein the first support plate is disposed in a first hole within the circumference of the first flange; the first fixing plate is connected to the first support plate by a third bolt; and the first fixing plate is connected to the first fiber cloth and the first flange in sequence along a first direction by a second bolt.

[0009] In some exemplary embodiments of the present invention, a first sealing groove is provided between the first fixing plate and the first flange, and a rubber ring is provided in the first sealing groove.

[0010] In some exemplary embodiments of the present invention, the second membrane assembly further includes a second flange, wherein a plurality of second holes are provided on the circumference of the second flange; the second fiber cloth can pass through the plurality of second holes and be connected to the second flange by a fourth bolt.

[0011] In some exemplary embodiments of the present invention, the second membrane assembly further includes a second support plate and a second fixing plate, wherein the second support plate is disposed in a second hole within the circumference of the second flange; the second fixing plate is connected to the second support plate by a fifth bolt; and the second fixing plate is connected to the second fiber cloth and the second flange in sequence along the first direction by a fourth bolt.

[0012] In some exemplary embodiments of the present invention, a second sealing groove is provided between the second fixing plate and the second flange, and a rubber ring is provided in the second sealing groove.

[0013] In some exemplary embodiments of the present invention, a third sealing groove is provided between the first flange and the first biaxially oriented polyester film; a third sealing groove is provided between the second flange and the second biaxially oriented polyester film and the first biaxially oriented polyester film respectively; and a rubber ring is provided in each of the third sealing grooves.

[0014] In some exemplary embodiments of the present invention, the third membrane assembly includes a third flange, wherein a third sealing groove is provided between the third flange and the second biaxially oriented polyester film; and a rubber ring is provided in each of the third sealing grooves.

[0015] In some exemplary embodiments of the present invention, the second membrane assembly includes an air extraction port, wherein the air extraction port is used to connect a mechanical pump to obtain a vacuum in the vacuum-isolated membrane window.

[0016] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] Figure 1 schematically shows a cross-sectional view of a vacuum-sealed membrane window according to an embodiment of the present invention;

[0018] Figure 2 schematically shows a front view of a vacuum-sealed membrane window according to an embodiment of the present invention;

[0019] Figure 3 schematically shows an exploded view of a vacuum-sealed membrane window according to an embodiment of the present invention;

[0020] Figure 4 schematically shows a front view of a first flange according to an embodiment of the present invention;

[0021] Figure 5 schematically illustrates the deformation cloud diagram of the vacuum isolation membrane window structure according to an embodiment of the present invention;

[0022] Figure 6 schematically illustrates the stress cloud diagram of a vacuum isolation membrane window structure according to an embodiment of the present invention;

[0023] Figure 7 schematically illustrates the deformation cloud diagram of a vacuum-isolated membrane window structure in the prior art;

[0024] Figure 8 schematically illustrates the stress cloud diagram of a vacuum-isolated membrane window structure in the prior art. Detailed Implementation

[0025] Specific embodiments of the present invention will now be described in detail. It should be noted that the embodiments described herein are for illustrative purposes only and are not intended to limit the invention. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the invention. However, it will be apparent to those skilled in the art that these specific details are not necessary to practice the invention. In other instances, well-known structures, materials, or methods have not been specifically described to avoid obscuring the invention.

[0026] Throughout this specification, references to "an embodiment," "an example," or "an example" mean that a particular feature, structure, or characteristic described in connection with that embodiment or example is included in at least one embodiment of the invention. Therefore, the phrases "in an embodiment," "in an embodiment," "an example," or "an example" appearing in various places throughout the specification do not necessarily refer to the same embodiment or example. Furthermore, specific features, structures, or characteristics can be combined in one or more embodiments or examples in any suitable combination and / or sub-combination. Moreover, those skilled in the art will understand that the term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0027] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. The terms “comprising,” “including,” etc., as used herein indicate the presence of features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0028] All terms used herein, including technical and scientific terms, have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0029] In existing technologies, the main method to address the reduced service life of partition membrane windows is to seal the biaxially oriented polyester film and the reinforcing fiber cloth with epoxy resin, thereby shortening the distance between them. However, this solution has several problems. Firstly, the epoxy resin has a high permeability, and the mechanical pump used for vacuuming the partition membrane window operates at high load for extended periods, leading to a decrease in pumping speed and affecting the vacuum in the terminal pipeline. Secondly, the process of sealing the biaxially oriented polyester film and the reinforcing fiber cloth with epoxy resin is complex and time-consuming.

[0030] In view of this, to solve such problems, embodiments of the present invention provide a vacuum-separated membrane window. The embodiments of the vacuum-separated membrane window of the present invention will be described in detail below with reference to Figures 1 to 4.

[0031] Figure 1 schematically shows a cross-sectional view of a vacuum-isolated membrane window according to an embodiment of the present invention. Figure 2 schematically shows a front view of a vacuum-isolated membrane window according to an embodiment of the present invention. Figure 3 schematically shows an exploded view of a vacuum-isolated membrane window according to an embodiment of the present invention. Figure 4 schematically shows a front view of a first flange according to an embodiment of the present invention.

[0032] As shown in Figures 1 to 3, the vacuum barrier membrane window includes a first membrane assembly 1, a first biaxially oriented polyester film 2, a second membrane assembly 3, a second biaxially oriented polyester film 4, and a third membrane assembly 5. Along the first direction X1, the first membrane assembly 1, the first biaxially oriented polyester film 2, the second membrane assembly 3, the second biaxially oriented polyester film 4, and the third membrane assembly 5 are sequentially connected by a first bolt 6.

[0033] As shown in Figures 1 and 3, the first membrane assembly 1 includes a first fiber cloth 11, a first flange 12, a first support plate 13 and a first fixing plate 14.

[0034] Specifically, the first fiber cloth 11 can be made of reinforcing fiber cloth, which is made of reinforcing fibers, has excellent tensile strength, is lightweight, and is easy to operate and install.

[0035] As shown in Figure 4, the first flange 12 can be, for example, an annular shape. The first bolt 6 is arranged on the circumference of the first flange 12, and multiple first holes 120 are arranged in the circumference. For example, four first holes 120 are arranged in the circumference of the first flange 12 to facilitate the first fiber cloth 11 to pass through the four first holes 120 and be folded, and then connected to the first flange 12 by the second bolt 7.

[0036] For example, after the first fiber cloth 11 is connected to the first flange 12, the first support plate 13 is arranged in the first hole 120 within the circumference of the first flange 12. In this embodiment, the first support plate 13 and the first hole 120 are completely matched.

[0037] The first fixing plate 14 is connected to the first support plate 13 by the third bolt 8. The first fixing plate 14 is connected to the first fiber cloth 11 and the first flange 12 in sequence along the first direction X1 by the second bolt 7.

[0038] It should be noted that, as shown in Figures 1 to 3, the second bolt 7 and the third bolt 8 are both arranged along the two opposite sides of the first fixing plate 14.

[0039] A first sealing groove 121 is provided between the first fixing plate 14 and the first flange 12, and a rubber ring is provided in the first sealing groove 121.

[0040] Please refer to Figure 1. The first fiber cloth 11 in the first membrane assembly 1 is bonded to the first biaxially oriented polyester film 2.

[0041] Specifically, during the vacuum isolation membrane window's vacuum acquisition process, the rubber ring within the first sealing groove 121 increases the friction between the first fiber cloth 11, which passes through the first hole 120 and is folded, causing the first fiber cloth 11 to maintain a horizontal position under mutual tension along the second direction X2, where the first direction X1 is perpendicular to the second direction X2. Since the first fiber cloth 11 in the first membrane assembly 1 is bonded to the first biaxially oriented polyester film 2, the first fiber cloth 11 provides complete support to the first biaxially oriented polyester film 2 along the first direction X1, minimizing deformation of the first biaxially oriented polyester film 2. Furthermore, the first support plate 13 within the first hole 120 provides support during vacuum acquisition, reducing inward concavity of the first biaxially oriented polyester film 2 along the first direction X1, further reducing film deformation.

[0042] As shown in Figures 1 to 3, the second membrane assembly 3 includes a second fiber cloth 31, a second flange 32, a second support plate 33, and a second fixing plate 34.

[0043] Specifically, the second fiber cloth 31 can be made of reinforcing fiber cloth. The second flange 32 differs from the first flange 12 only in thickness along the first direction X1; the other structures of the two flanges are completely identical. Multiple second holes 321 are provided within the circumference of the second flange 32, for example, a total of four second holes 321. The size of the second holes 321 is the same as that of the first holes 120, to facilitate the passing of the second fiber cloth 31 through the four second holes 321 and its folding, before connecting it to the second flange 32 via the fourth bolt 9.

[0044] For example, after the second fiber cloth 31 is connected to the second flange 32, the second support plate 33 is arranged in the second hole 321 within the circumference of the second flange 32. In this embodiment, the second support plate 33 and the second hole 321 are completely matched.

[0045] The second fixing plate 34 is connected to the second support plate 33 by the fifth bolt 10. The second fixing plate 34 is connected to the second fiber cloth 31 and the second flange 32 in sequence along the first direction X1 by the fourth bolt 9.

[0046] It should be noted that, as shown in Figures 1 to 3, similar to the first membrane assembly 1, in the second membrane assembly 3, the fourth bolt 9 and the fifth bolt 10 are both arranged along the two opposite sides of the second fixing plate 34.

[0047] A second sealing groove 122 is provided between the second fixing plate 34 and the second flange 32, and a rubber ring is provided in the second sealing groove 122.

[0048] Please refer to Figure 1. The second fiber cloth 31 in the second membrane assembly 3 is bonded to the second biaxially oriented polyester film 4.

[0049] As shown in Figure 1, the second membrane module 3 also includes an air extraction port 35. The long tube of the air extraction port 35 extends into the second flange 32 on one side of the second membrane module 3 along the second direction X2. The length of the long tube is less than or equal to the thickness of the second flange 32 along the second direction X2. In this embodiment, the length of the long tube and the thickness of the second flange 32 along the second direction X2 can be set according to actual needs and are not limited.

[0050] It should be noted that, in this embodiment, the materials of the flange, support plate, and fixing plate can be set according to actual needs and are not limited.

[0051] In an embodiment of the present invention, the entire vacuum partition membrane window obtains a vacuum through a mechanical pump connected to the air extraction port 35 during the vacuum process.

[0052] Specifically, a mechanical pump is connected through the suction port 35. During the vacuum isolation membrane window's vacuum acquisition process, the rubber ring inside the second sealing groove 122 increases the friction between the second fiber cloth 31, which passes through the second hole 321 and is folded, allowing the second fiber cloth 31 to maintain a horizontal position under mutual tension along the second direction X2. Since the second fiber cloth 31 in the second membrane assembly 3 is bonded to the second biaxially oriented polyester film 4, the second fiber cloth 31 can provide complete support for the second biaxially oriented polyester film 4 along the first direction X1, minimizing the deformation of the second biaxially oriented polyester film 4. Furthermore, the first support plate 13 provided inside the second hole 321 provides support during the vacuum isolation membrane window's vacuum acquisition process, reducing the inward concavity of the second biaxially oriented polyester film 4 along the first direction X1, further reducing membrane deformation.

[0053] Based on the above description of the first and second membrane components, as shown in Figure 1, in the structure of the vacuum isolation membrane window, the first fiber cloth 11 in the first membrane component 1 is bonded to the first biaxially oriented polyester film 2, and the second fiber cloth 31 in the second membrane component 3 is bonded to the second biaxially oriented polyester film 4. A mechanical pump is connected to the extraction port 35, which reduces gas permeation in a vacuum environment when a vacuum is obtained between the two membranes, the first biaxially oriented polyester film 2 and the second biaxially oriented polyester film 4. Simultaneously, during the vacuum process, the stress and deformation borne by the biaxially oriented polyester film in the vacuum isolation membrane window and vacuum chamber are significantly reduced, thereby increasing the lifespan of the vacuum isolation membrane window and significantly reducing the downtime of the vacuum system to the accelerator, ensuring the long-term stable operation of the accelerator vacuum system. Through the embodiments of the present invention, the problem of frequent rupture of the biaxially oriented polyester film leading to damage to the accelerator vacuum system is efficiently solved.

[0054] Please refer to Figures 1 and 3. The third membrane module 5 includes the third flange 51.

[0055] In embodiments of the present invention, the thickness of the third flange 51 and the first flange 12 along the first direction X1 can be the same or different. The thickness of the third flange 51 and the second flange 32 along the first direction X1 can also be the same or different. In this embodiment, the thickness of the first flange 12, the second flange 32, and the third flange 51 along the first direction X1 is set according to actual needs and is not limited. It should be noted that, as shown in Figure 3, the third flange 51 does not have multiple holes arranged within its circumference.

[0056] Please refer to Figure 2. A third sealing groove 123 is provided between the first flange 12 and the first biaxially oriented polyester film 2 in the first membrane assembly 1. A third sealing groove 123 is provided between the second flange 32 and the second biaxially oriented polyester film 4 and the first biaxially oriented polyester film 2 in the second membrane assembly 3. A third sealing groove 123 is provided between the third flange 51 and the second biaxially oriented polyester film 4. Rubber rings are provided in these third sealing grooves 123.

[0057] Specifically, based on the fact that a rubber ring is arranged between the first flange 12 and the first biaxially oriented polyester film 2; a rubber ring is arranged between the second flange 32 and the second biaxially oriented polyester film 4 and the first biaxially oriented polyester film 2 respectively; and a rubber ring is arranged between the third flange 51 and the second biaxially oriented polyester film 4, when the first membrane assembly 1, the first biaxially oriented polyester film 2, the second membrane assembly 3, the second biaxially oriented polyester film 4 and the third membrane assembly 5 are tightened together by the first bolt 6 along the first direction X1, each rubber ring is tightly attached to each layer of biaxially oriented polyester film, so that the entire vacuum isolation membrane window structure is completely sealed, improving the service life of the vacuum isolation membrane window, thereby ensuring the long-term stable operation of the accelerator vacuum system.

[0058] Based on the above-described vacuum isolation membrane window structure, the following examples further illustrate the use of the vacuum isolation membrane window in the accelerator vacuum system.

[0059] For example, the first flange 12 in the vacuum isolation membrane window structure is sealed to the accelerator beamline vacuum pipeline. First, a mechanical pump is used to evacuate the accelerator beamline vacuum pipeline at a low pumping speed. When the vacuum level reaches 5e-2 mbar, the mechanical pump connected to the evacuation port 35 is turned on, also using a low pumping speed. The pumping speed of the mechanical pump is adjusted by a diaphragm valve installed before the mechanical pump. Under normal circumstances, the vacuum at the vacuum isolation membrane window can reach 5e-2 mbar after 10 minutes, entering the working state.

[0060] Figure 5 schematically illustrates a deformation cloud diagram of a vacuum partition membrane window structure according to an embodiment of the present invention; Figure 6 schematically illustrates a stress cloud diagram of a vacuum partition membrane window structure according to an embodiment of the present invention; Figure 7 schematically illustrates a deformation cloud diagram of a vacuum partition membrane window structure in the prior art; Figure 8 schematically illustrates a stress cloud diagram of a vacuum partition membrane window structure in the prior art.

[0061] In embodiments of the present invention, based on the use of vacuum-sealed membrane windows, the deformation and stress of the corresponding vacuum-sealed membrane window structure were verified. As shown in Figures 5 and 6, in this application, by completely bonding the biaxially oriented polyester film and the reinforcing fiber cloth of the vacuum-sealed membrane window, the maximum deformation of the middle part of both the biaxially oriented polyester film and the reinforcing fiber cloth when a vacuum is obtained is 4.05 mm, the stress in the middle part of the biaxially oriented polyester film is 3.7924 MPa, and the stress in the middle part of the reinforcing fiber cloth is 168.86 MPa. Compared with the prior art, since there is a flange, for example, a distance of about 14 mm, between the biaxially oriented polyester film and the reinforcing fiber cloth in the vacuum-sealed membrane window, as shown in Figures 7 and 8, the maximum deformation of the middle part of the biaxially oriented polyester film when a vacuum is obtained is 17.397 mm, the maximum deformation of the middle part of the reinforcing fiber cloth is 3.397 mm, the stress in the middle part of the biaxially oriented polyester film is 134.26 MPa, and the stress in the middle part of the reinforcing fiber cloth is 131.71 MPa. Therefore, through the embodiments of the present invention, by changing the structure of the vacuum barrier membrane window to make the biaxially oriented polyester film and the reinforcing fiber cloth fully bonded, the stress and deformation of the vacuum barrier membrane window structure during operation are reduced.

[0062] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0063] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents. Those skilled in the art will understand that the features recited in the various embodiments and / or claims of the invention can be combined and / or combined in various ways, even if such combinations or combinations are not explicitly stated in the invention. In particular, the features recited in the various embodiments and / or claims of the invention can be combined and / or combined in various ways without departing from the spirit and teachings of the invention. All such combinations and / or combinations fall within the scope of the invention.

Claims

1. A vacuum-sealed membrane window, characterized in that, The assembly includes a first membrane module (1), a first biaxially oriented polyester film (2), a second membrane module (3), a second biaxially oriented polyester film (4), and a third membrane module (5); wherein the first membrane module (1), the first biaxially oriented polyester film (2), the second membrane module (3), the second biaxially oriented polyester film (4), and the third membrane module (5) are connected sequentially along a first direction by a first bolt (6); the first membrane module (1) includes a first fiber cloth (11), which is bonded to the first biaxially oriented polyester film (2); the second membrane module (3) includes a second fiber cloth (31), which is bonded to the second biaxially oriented polyester film (4); the third membrane module (5) includes a third flange (51), wherein a third sealing groove (123) is provided between the third flange (51) and the second biaxially oriented polyester film (4); and each of the third sealing grooves (123) is provided with a rubber ring.

2. The vacuum barrier membrane window according to claim 1, characterized in that, The first membrane assembly (1) further includes a first flange (12), wherein a plurality of first holes (120) are arranged in the circumference of the first flange (12); the first fiber cloth (11) can pass through the plurality of first holes (120) and be connected to the first flange (12) by a second bolt (7).

3. The vacuum barrier membrane window according to claim 2, characterized in that, The first membrane assembly (1) further includes a first support plate (13) and a first fixing plate (14), wherein the first support plate (13) is disposed in the first hole (120) within the circumference of the first flange (12); the first fixing plate (14) is connected to the first support plate (13) by a third bolt (8); the first fixing plate (14) is connected to the first fiber cloth (11) and the first flange (12) in sequence along the first direction by a second bolt (7).

4. The vacuum barrier membrane window according to claim 3, characterized in that, A first sealing groove (121) is provided between the first fixing plate (14) and the first flange (12), and a rubber ring is provided in the first sealing groove (121).

5. The vacuum barrier membrane window according to claim 2, characterized in that, The second membrane assembly (3) further includes a second flange (32), wherein a plurality of second holes (321) are provided on the circumference of the second flange (32); the second fiber cloth (31) can pass through the plurality of second holes (321) and be connected to the second flange (32) by a fourth bolt (9).

6. The vacuum barrier membrane window according to claim 5, characterized in that, The second membrane assembly (3) further includes a second support plate (33) and a second fixing plate (34), wherein the second support plate (33) is disposed in the second hole (321) within the circumference of the second flange (32); the second fixing plate (34) is connected to the second support plate (33) by a fifth bolt (10); the second fixing plate (34) is connected to the second fiber cloth (31) and the second flange (32) in sequence along the first direction by a fourth bolt (9).

7. The vacuum barrier membrane window according to claim 6, characterized in that, A second sealing groove (122) is provided between the second fixing plate (34) and the second flange (32), and a rubber ring is provided in the second sealing groove (122).

8. The vacuum barrier membrane window according to claim 6, characterized in that, A third sealing groove (123) is provided between the first flange (12) and the first biaxially oriented polyester film (2); a third sealing groove (123) is provided between the second flange (32) and the second biaxially oriented polyester film (4) and the first biaxially oriented polyester film (2) respectively; a rubber ring is provided in each of the third sealing grooves (123).

9. The vacuum barrier membrane window according to claim 1, characterized in that, The second membrane assembly (3) includes an air extraction port (35), wherein the air extraction port (35) is used to connect a mechanical pump to obtain a vacuum in the vacuum barrier membrane window.

Images