Motion device and method for realizing two-dimensional scanning of laser beam

Abstract

The present application relates to a motion device and method for realizing two-dimensional scanning of a laser beam. The motion device includes a base, a motor bracket, a first motor, a second motor, a mirror frame, and a reflective lens. The forward and reverse rotation of the first motor realizes the deflection of the mirror frame with a third direction as the axis, and the forward and reverse rotation of the second motor realizes the deflection of the mirror frame with a first direction as the axis; when the laser beam is irradiated to the reflective lens on the mirror frame, the deflection movement of the mirror frame in two directions can change the propagation direction of the laser beam, so that the laser beam moves along the second direction or the first direction, thereby realizing high-speed scanning processing of the laser beam in a two-dimensional plane. By adjusting the number of revolutions of the first motor and the second motor, the online adjustment of the laser processing range can be realized; by adjusting the rotation speed of the first motor and the second motor, the online adjustment of the laser processing speed can be realized, and high-precision digital control of laser scanning processing can be realized.

Description

Technical Field

[0001] The present application relates to the field of laser processing technology, and in particular to a motion device and method for realizing two-dimensional scanning of a laser beam. Background Art

[0002] Laser processing is a non-contact precision processing technology with the characteristics of high precision, flexibility, and strong adaptability to processing materials (it can process complex material systems such as ultra-hard, ultra-brittle, ultra-thin, single-layer, multi-layer, etc.). It is widely used in manufacturing and processing in the fields of aerospace, rail transportation, automotive electronics, biomedicine, etc. Therefore, higher requirements are placed on the efficiency of laser processing during the application process. Traditional laser processing is mostly single-point processing, which makes it difficult to achieve rapid scanning processing in a two-dimensional plane.

[0003] At present, one of the ways to solve this problem is to use a two-dimensional motion mechanism to carry a laser output head to achieve laser two-dimensional processing in coordination. For example, the patent CN201911195407.3 proposes a laser cutting machine for processing the back cover membrane of a mobile phone. The laser cutting head is installed and fixed on a two-dimensional motion platform, the workpiece is fixed, and the two-dimensional processing of the laser cutting head is achieved through the cooperation of the two-dimensional motion platform. Another way is that the laser output head does not move, and the workpiece moves quickly in a two-dimensional plane to achieve passive two-dimensional processing. For example, the patent CN200610159293.3 proposes a system and method for marking a sapphire substrate using a solid-state UV laser. In the system, the laser beam does not move, and the XY two-dimensional motion platform carried by the sapphire substrate moves to achieve laser two-dimensional processing. Both methods indirectly achieve two-dimensional scanning of the laser beam, and the two-dimensional deflection and posture adjustment range of the laser beam are small, which greatly limits the efficiency and forming accuracy of laser processing.

[0004] Based on the above defects and shortcomings, the art urgently needs to make further improvements to the existing laser processing devices and methods to solve the problems of low processing efficiency and small adjustment range of the existing laser processing devices and methods, and provide a motion device and method for realizing two-dimensional scanning of laser beams. Summary of the invention

[0005] Based on this, it is necessary to provide a motion device for realizing two-dimensional scanning of a laser beam in order to address the problems existing in the prior art.

[0006] A motion device for realizing two-dimensional scanning of a laser beam, the motion device comprising:

[0007] Base;

[0008] The first motor and the second motor are both arranged on the base;

[0009] a motor bracket, rotatably connected to the base and connected to the first motor; the first motor is used to drive the motor bracket to deflect relative to the base with the third direction as the axis;

[0010] A mirror frame, rotatably connected to the motor bracket and connected to the second motor; the second motor is used to drive the mirror frame to deflect relative to the motor bracket with a first direction as an axis; wherein the first direction is perpendicular to the second direction;

[0011] A reflective lens is installed on the mirror frame, and the reflective lens is used to reflect the laser beam.

[0012] In one embodiment, the motion device further includes a first limiting portion, the first limiting portion is connected to the base, and the first limiting portion is used to limit the deflection amplitude of the motor bracket.

[0013] In one embodiment, a first fixing column is disposed on the base, and the first limiting portion includes a tension spring, one end of the tension spring is fixedly connected to the first fixing column, and the other end of the tension spring is fixedly connected to the first motor bracket.

[0014] In one embodiment, the output end of the first motor is connected to a first thread pair, and one end of the motor bracket is connected to the first thread pair; the first motor is used to drive the first thread pair to move along a second direction so that the motor bracket deflects around the third direction, wherein the second direction, the first direction and the third direction are perpendicular to each other.

[0015] In one of the embodiments, a cylindrical pin is disposed on the base, and the cylindrical pin is used to support the first thread pair.

[0016] In one embodiment, the base is provided with a rotating part, the motor bracket is connected to the rotating part, and the axis of the rotating part is parallel to the third direction; the first motor is used to drive the motor bracket to rotate around the rotating part;

[0017] The base is provided with a bearing hole, the rotating part includes a bearing, the bearing is installed in the bearing hole, and the motor bracket is connected to the bearing.

[0018] In one embodiment, the motor bracket includes a mounting seat, and the motion device also includes a first connecting shaft, and the first connecting shaft passes through the mounting seat and the mirror frame so that the mirror frame can rotate around the first connecting shaft relative to the mounting seat.

[0019] In one of the embodiments, a torsion spring is sleeved on the first connecting shaft, one end of the torsion spring abuts against the mounting seat, and the other end of the torsion spring abuts against the frame, and the torsion spring is used to limit the deflection amplitude of the frame.

[0020] In one embodiment, the output end of the second motor is connected to a second thread pair, and one end of the mirror frame is connected to the second thread pair; the second motor is used to drive the second thread pair to move along a second direction so that the mirror frame deflects around the first direction.

[0021] A method for realizing two-dimensional scanning of a laser beam is realized by using the motion device for realizing two-dimensional scanning of a laser beam as described above; the method comprises:

[0022] Adjusting the number of rotations of the first motor to drive the mirror frame to deflect about the third direction as an axis, so that the laser beam moves along the first direction;

[0023] The number of rotations of the second motor is adjusted to drive the mirror frame to deflect around the first direction as the axis, so that the laser beam moves along the second direction.

[0024] The above-mentioned motion device for realizing two-dimensional scanning of laser beams includes a base, a motor bracket, a first motor, a second motor, a mirror frame and a reflective lens. The first motor is rotated forward and reversely to realize the deflection of the mirror frame with the third direction as the axis, and the second motor is rotated forward and reversely to realize the deflection of the mirror frame with the first direction as the axis. When the laser beam is irradiated to the reflective lens on the mirror frame, the deflection movement of the mirror frame in two directions can change the propagation direction of the laser beam, thereby changing the irradiation position of the laser beam, so that the laser beam moves along the second direction or the first direction, thereby realizing high-speed scanning processing of the laser beam in a two-dimensional plane. By adjusting the number of revolutions of the first motor and the second motor, the online adjustment of the laser processing range can be realized; by adjusting the speed of rotation of the first motor and the second motor, the online adjustment of the laser processing speed can be realized, and the area and efficiency of the laser processing can be regulated by controlling the movement range and speed of the laser beam, so as to realize high-precision digital control of laser scanning processing. Compared with the traditional mode in which the motion mechanism drives the laser output head to move, or the laser output head does not move and the workpiece moves quickly, etc., which indirectly realizes the two-dimensional motion of the laser, the structure of this motion device is simpler, and the scanning accuracy and speed are greatly improved. It can take into account both large and small scanning fields at the same time, and the processing range is more selective. At the same time, the overall structure of this motion device is compact and suitable for the integration and development of various optical systems. It can expand the two-dimensional scanning function to multiple fields that require laser scanning, such as laser micro-nano processing, laser scanning imaging, laser shock peening, laser 3D printing, etc., and has a wide range of applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1A schematic diagram of a motion device for realizing two-dimensional scanning of a laser beam provided in one embodiment of the present application.

[0026] Figure 2 for Figure 1 The schematic diagram of the motion device for realizing two-dimensional scanning of a laser beam from another perspective is shown.

[0027] Figure 3 for Figure 1 A schematic diagram of a base in a motion device for realizing two-dimensional scanning of a laser beam is shown.

[0028] Figure 4 for Figure 1 Schematic diagram of the motor bracket in the motion device for realizing two-dimensional scanning of the laser beam.

[0029] Figure 5 for Figure 1 A schematic diagram of the first motor is shown.

[0030] Figure 6 for Figure 1 A schematic diagram of a mirror frame in a motion device for realizing two-dimensional scanning of a laser beam is shown.

[0031] Figure numbers: 100, base; 110, first fixed column; 120, tension spring; 130, cylindrical pin; 140, bearing hole; 200, motor bracket; 210, mounting seat; 211, first mounting hole; 212, second mounting hole; 213, third mounting hole; 220, first connecting shaft; 230, torsion spring; 310, first motor; 311, first thread pair; 312, first coupling; 320, second motor; 321, second thread pair; 322, second coupling; 400, mirror frame; 410, rotating column; 420, lens mounting hole; 500, reflective lens. DETAILED DESCRIPTION

[0032] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0033] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0034] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0035] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0036] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0037] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0038] See also Figure 1 As shown, a motion device for realizing two-dimensional scanning of a laser beam provided by an embodiment of the present application includes a base 100, a first motor 310, a second motor 320, a motor bracket 200, a mirror frame 400 and a reflective lens 500, wherein the base 100 is used to fix the position of the motion device in the spatial optical path to ensure the operation stability of the motion device during high-speed scanning; the first motor 310 and the second motor 320 are both arranged on the base 100; the motor bracket 200 is rotatably connected to the base 100 and connected to the first motor 310; the first motor 310 is used to drive the motor bracket 200 to deflect relative to the base 100 with a third direction as the axis; the mirror frame 400 is rotatably connected to the motor bracket 200 and connected to the second motor 320; the second motor 320 is used to drive the mirror frame 400 to deflect relative to the motor bracket 200 with a first direction as the axis; the reflective lens 500 is installed on the mirror frame 400, and the reflective lens 500 is used to reflect the laser beam to change the propagation direction of the laser beam in the spatial optical path. Among them, the first direction is the X-axis direction in the figure, the second direction is the Y-axis direction in the figure, and the third direction is the Z-axis direction in the figure.

[0039] Specifically, during the scanning process, the first motor 310 rotates forward and reversely to realize the frame 400 to deflect with the third direction (Z direction) as the axis, and the second motor 320 rotates forward and reversely to realize the frame 400 to deflect with the first direction (X direction) as the axis; when the laser beam is irradiated to the reflective lens 500 on the frame 400, the frame 400 moves in two directions to change the propagation direction of the laser beam, thereby changing the irradiation position of the laser beam, so that the laser beam moves along the second direction (Y direction) or the first direction (X direction), thereby realizing high-speed scanning processing of the laser beam in a two-dimensional plane. By adjusting the number of revolutions of the first motor 310 and the second motor 320, the online adjustment of the laser processing range can be realized; by adjusting the speed of the first motor 310 and the second motor 320, the online adjustment of the laser processing speed can be realized, and the area and efficiency of the laser processing can be adjusted by controlling the range and speed of the laser beam, so as to realize high-precision digital control of the laser scanning processing. It can be understood that when the number of rotations of the first motor 310 and the second motor 320 changes, the irradiation position of the laser beam reflected by the reflective lens 500 changes accordingly.

[0040] In this way, two-dimensional scanning of the laser beam can be achieved through the rotation of the first motor 310 and the second motor 320, and digital control of the system scanning accuracy and speed can be achieved by changing the minimum step angle and rotation speed of the motor. Compared with the traditional mode in which the motion mechanism drives the laser output head to move, or the laser output head does not move and the workpiece moves quickly to indirectly achieve the two-dimensional motion of the laser, the structure of this motion device is simpler, and the scanning accuracy and speed are greatly improved. It can take into account both large and small scanning fields at the same time, and the processing range is more selective. At the same time, the overall structure of this motion device is compact and suitable for the integration and development of various optical systems. The two-dimensional scanning function can be expanded to multiple fields that require laser scanning, such as laser micro-nano processing, laser scanning imaging, laser shock strengthening, laser 3D printing, etc., and the application range is very wide.

[0041] See also Figure 1 and Figure 3 As shown, the base 100 can adjust the installation method and angle according to the actual processing environment and the beam propagation direction, including but not limited to upright installation, inverted installation, tilting within a certain angle range, etc. Figure 1 and Figure 4 As shown, the motor bracket 200 is provided with a first mounting hole 211 and a second mounting hole 212, which are respectively used for the output ends of the first motor 310 and the second motor 320 to pass through, and are used for the installation and positioning of the first motor 310 and the second motor 320, and can play a certain supporting role for the motors. The motor bracket 200 is used for the installation and positioning of the mirror frame 400.

[0042] See also Figure 1 and Figure 5 As shown, the specific structures of the first motor 310 and the second motor 320 can be consistent, and the frame 400 can be deflected in two vertical directions in space through rotation and transmission in the forward / reverse directions, thereby realizing two-dimensional scanning of the laser beam. The first motor 310 and the second motor 320 can also be replaced with motors with different parameters or different types according to specific processing requirements, including but not limited to various rotating motors such as servo motors, stepper motors, and piezoelectric ceramics.

[0043] See also Figure 1 and Figure 6 As shown, the frame 400 is a mounting frame for the reflective lens 500. The frame 400 is provided with a lens mounting hole 420. The lens mounting hole 420 is used for mounting, positioning and fastening the reflective lens 500. The reflective lens 500 is fastened in the frame 400. The fastening method ensures the clamping stability of the reflective lens 500 during high-speed deflection. Specifically, the frame 400 can be replaced with a different size or thickness according to the actual spatial optical path transmission requirements, including but not limited to sizes such as 1 inch and 2 inches. The reflective lens 500 can select a matching single-wavelength reflective lens 500 according to the wavelength range of the laser beam, such as 355nm, 532nm, 1064nm and other wavelength ranges, or it can be adjusted to a broadband multi-wavelength reflective lens 500 according to the actual spatial light beam transmission situation, and the reflected wavelength range is consistent with the wavelength of the laser beam.

[0044] See also Figure 1 and Figure 2 As shown, in one embodiment, the motion device further includes a first limiting portion, which limits the deflection amplitude of the motor bracket 200 to prevent the laser beam from deviating from the target irradiation area, thereby improving the irradiation reliability of the laser beam on the irradiation area.

[0045] See also Figure 1 and Figure 2 As shown, in one embodiment, the base 100 is provided with a first fixing column 110, and the first limiting portion includes a tension spring 120, one end of the tension spring 120 is fixedly connected to the first fixing column 110, and the other end is fixedly connected to the first motor 310 bracket 200. Since the position of the base 100 is fixed, when the motor bracket 200 deflects, the tension spring 120 will be subjected to a certain pulling force to limit the deflected position of the motor bracket 200.

[0046] See also Figure 1 and Figure 5As shown, in one embodiment, the output end of the first motor 310 is connected to the first thread pair 311, and one end of the motor bracket 200 is connected to the first thread pair 311; the first motor 310 is used to drive the first thread pair 311 to move along the second direction (Y direction) so that the motor bracket 200 deflects around the third direction (Z direction). Figure 1 In the illustrated embodiment, when the first motor 310 drives the left end of the motor bracket 200 to move forward (moving forward is along the positive direction of the Y axis), the right end of the motor bracket 200 moves backward (moving backward is along the negative direction of the Y axis). The first coupling 312 is connected to the output shaft of the first motor 310, and the first coupling 312 is connected to the first thread pair 311. When the first motor 310 rotates, the kinetic energy is transmitted to the first thread pair 311 through the first coupling 312. At this time, the rotational motion of the first motor 310 can be converted into the feeding motion of the first thread pair 311. Since one end of the motor bracket 200 is connected to the first thread pair 311, it can drive the motor bracket 200 to deflect with the third direction (Z direction) as the axis.

[0047] See also Figure 1 and Figure 5 As shown, in one embodiment, the output end of the second motor 320 is connected to the second thread pair 321, and one end of the mirror frame 400 is connected to the second thread pair 321; the second motor 320 is used to drive the second thread pair 321 to move along the second direction (Y direction) so that the mirror frame 400 deflects around the first direction (X direction). Figure 1 In the illustrated embodiment, the lower end of the frame 400 is connected to a rotating column 410. When the second motor 320 drives the rotating column 410 to move forward (moving forward, i.e., along the positive direction of the Y axis), the upper end of the frame 400 moves backward (moving backward, i.e., along the negative direction of the Y axis). The output shaft of the second motor 320 is connected to a second coupling 322, and the second coupling 322 is connected to a second thread pair 321. When the second motor 320 rotates, the kinetic energy is transmitted to the second thread pair 321 through the second coupling 322. At this time, the rotational motion of the second motor 320 can be converted into the feeding motion of the second thread pair 321. Since the rotating column 410 is connected to the second thread pair 321, it can drive the frame 400 to deflect.

[0048] See also Figure 1 , Figure 2 and Figure 5As shown, in one embodiment, a cylindrical pin 130 is provided on the base 100, and the cylindrical pin 130 extends along the first direction (X direction). The cylindrical pin 130 is used to support the first thread pair 311, thereby improving the force stability of the first thread pair 311. Further, two cylindrical pins 130 are provided, and the first thread pair 311 is sandwiched between the first two cylindrical pins 130. In this way, the cylindrical pin 130 can also play a certain guiding role for the feeding movement of the first thread pair 311, thereby improving the deflection reliability of the motor bracket 200.

[0049] See also Figure 1 and Figure 3 As shown, in one embodiment, the base 100 is provided with a rotating part, the motor bracket 200 is connected to the rotating part, and the axis of the rotating part is parallel to the third direction (Z direction); the first motor 310 is used to drive the motor bracket 200 to rotate around the rotating part. By setting the rotating part, the deflection direction of the motor bracket 200 is further limited, and the reliability of laser scanning is improved. Specifically, the base 100 is provided with a bearing hole 140, the rotating part includes a bearing, the outer ring of the bearing is installed in the bearing hole 140, and the motor bracket 200 can be connected to the inner ring of the bearing. In this way, the rotation of the motor bracket 200 relative to the base 100 is realized.

[0050] See also Figure 1 and Figure 3 As shown, in one embodiment, the motor bracket 200 includes a mounting seat 210, and the motion device further includes a first connecting shaft 220, and the first connecting shaft 220 is penetrated through the mounting seat 210 and the mirror frame 400, so that the mirror frame 400 can rotate around the first connecting shaft 220 relative to the mounting seat 210. Specifically, the motor bracket 200 is also provided with a third mounting hole 213, and correspondingly, the mirror frame 400 is provided with a mounting hole, and the first connecting shaft 220 passes through the third mounting hole 213 on the mirror frame 400 and the motor bracket 200, so that the mirror frame 400 can be installed on the motor bracket 200; at the same time, the mirror frame 400 can also be deflected around the first connecting shaft 220 relative to the motor bracket 200.

[0051] See also Figure 1 and Figure 2 As shown, in one embodiment, a torsion spring 230 is sleeved on the first connecting shaft 220, one end of the torsion spring 230 abuts against the mounting seat 210, and the other end abuts against the frame 400, and the torsion spring 230 is used to limit the deflection amplitude of the frame 400. By limiting the deflection amplitude of the frame 400 through the torsion spring 230, the laser beam is prevented from deviating from the target irradiation area, thereby improving the irradiation reliability of the laser beam on the irradiation area.

[0052] In addition to the basic two-dimensional laser beam scanning processing, the above-mentioned motion device can also expand the two-dimensional scanning function to application fields that require laser beam scanning, such as laser micro-nano processing, laser scanning imaging, laser shock peening, and laser 3D printing. Furthermore, combined with a dynamic focusing lens group, laser scanning processing of three-dimensional curved surfaces in space can be realized.

[0053] Furthermore, an embodiment of the present application also provides a method for realizing two-dimensional scanning of a laser beam, which is realized by the motion device for realizing two-dimensional scanning of a laser beam as described above; the method comprises: adjusting the number of rotations of the first motor 310 to drive the mirror frame 400 to deflect with the third direction (Z direction) as the axis, so that the laser beam moves along the first direction (X direction); adjusting the number of rotations of the second motor 320 to drive the mirror frame 400 to deflect with the first direction (X direction) as the axis, so that the laser beam moves along the second direction (Y direction). The above steps are repeated continuously until the laser processing of the preset area is completed.

[0054] Take the example of the motion device realizing laser beam scanning of a square area of ​​100mm×100mm as an example: when the motion device is powered on, the second motor 320 and the first motor 310 return to zero and return to the initial zero-position balance state. The second motor 320 rotates forward to drive the mirror frame 400 and the reflector lens 500 to rotate clockwise around the X-axis, and the second motor 320 rotates reversely to drive the mirror frame 400 and the reflector lens 500 to rotate counterclockwise around the X-axis. When the laser beam is transmitted to the center of the reflector lens 500 at an angle of 45°, during the process of the second motor 320 rotating forward for 10 circles, the laser beam continuously moves from the zero point position along the negative direction of the Y axis until it moves to the -50mm position; during the process of the second motor 320 rotating reversely for 10 circles, the laser beam continuously moves from the zero point position along the positive direction of the Y axis until it moves to the +50mm position. The laser beam moves 100mm (-50mm to +50mm) along the Y axis through 20 positive and negative rotations totaling 7200°, and the rotation resolution is about 0.0139mm / °. Similarly, when the first motor 310 rotates 10 times in the forward direction, the laser beam moves 50mm in the positive direction of the X axis; when the first motor 310 rotates 10 times in the reverse direction, the laser beam moves 50mm in the reverse direction of the X axis. The movement of 100mm along the X axis is completed through 20 positive and negative rotations totaling 7200°, and the rotation resolution is about 0.0139mm / °. Through 20 positive and negative rotations of the second motor 320 and the first motor 310, the reciprocating motion of the torsion spring 230 and the tension spring 120 is coordinated to achieve high-precision scanning of the laser beam of 100mm×100mm in a two-dimensional plane.

[0055] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0056] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A motion device for realizing two-dimensional scanning of a laser beam, characterized in that: The sports device comprises: base(100); A first motor (310) and a second motor (320), both disposed on the base (100); a motor bracket (200) rotatably connected to the base (100) and connected to the first motor (310); the first motor (310) is used to drive the motor bracket (200) to deflect relative to the base (100) with a third direction as an axis; A mirror frame (400) is rotatably connected to the motor support (200) and is connected to the second motor (320); the second motor (320) is used to drive the mirror frame (400) to deflect relative to the motor support (200) with a first direction as an axis; A reflective lens (500) mounted on the lens frame (400), the reflective lens (500) being used to reflect a laser beam; The motion device further comprises a first limiting portion, the first limiting portion being connected to the base (100), and the first limiting portion being used to limit the deflection amplitude of the motor bracket (200); The output end of the first motor (310) is connected to a first thread pair (311), and one end of the motor bracket (200) is connected to the first thread pair (311); the first motor (310) is used to drive the first thread pair (311) to move along a second direction, so that the motor bracket (200) deflects around the third direction, wherein the second direction, the first direction and the third direction are perpendicular to each other.

2. The motion device for realizing two-dimensional scanning of a laser beam according to claim 1, characterized in that: A first fixing column (110) is provided on the base (100), and the first limiting portion comprises a tension spring (120), one end of the tension spring (120) is fixedly connected to the first fixing column (110), and the other end is fixedly connected to the first motor (310) bracket (200).

3. The motion device for realizing two-dimensional scanning of a laser beam according to claim 1, characterized in that: A cylindrical pin (130) is provided on the base (100), and the cylindrical pin (130) is used to support the first thread pair (311).

4. The motion device for realizing two-dimensional scanning of a laser beam according to claim 1, characterized in that: The base (100) is provided with a rotating part, the motor bracket (200) is connected to the rotating part, and the axis of the rotating part is parallel to the third direction; the first motor (310) is used to drive the motor bracket (200) to rotate around the rotating part; The base (100) is provided with a bearing hole (140), the rotating part comprises a bearing, the bearing is mounted in the bearing hole (140), and the motor bracket (200) is connected to the bearing.

5. The motion device for realizing two-dimensional scanning of a laser beam according to claim 1, characterized in that: The motor bracket (200) comprises a mounting seat (210), and the motion device further comprises a first connecting shaft (220), wherein the first connecting shaft (220) passes through the mounting seat (210) and the mirror frame (400), so that the mirror frame (400) can rotate relative to the mounting seat (210) around the first connecting shaft (220).

6. The motion device for realizing two-dimensional scanning of a laser beam according to claim 5, characterized in that: A torsion spring (230) is sleeved on the first connecting shaft (220), one end of the torsion spring (230) abuts against the mounting seat (210), and the other end abuts against the mirror frame (400), and the torsion spring (230) is used to limit the deflection amplitude of the mirror frame (400).

7. The motion device for realizing two-dimensional scanning of a laser beam according to claim 1, characterized in that: The output end of the second motor (320) is connected to a second thread pair (321), and one end of the mirror frame (400) is connected to the second thread pair (321); the second motor (320) is used to drive the second thread pair (321) to move along a second direction, so that the mirror frame (400) is axially offset with the first direction as the axis.

8. A method for realizing two-dimensional scanning of a laser beam, characterized in that: The method is implemented by using the motion device for realizing two-dimensional scanning of a laser beam according to any one of claims 1 to 7; the method comprises: Adjusting the number of rotations of the first motor to drive the mirror frame to deflect about the third direction as an axis, so that the laser beam moves along the first direction; The number of rotations of the second motor is adjusted to drive the mirror frame to deflect around the first direction as the axis, so that the laser beam moves along the second direction.

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