A wide range pressure MFC

Abstract

The invention discloses a wide-range pressure-type MFC, comprising a laminar flow device; the laminar flow device comprises a laminar flow body, a laminar flow cavity is arranged in the laminar flow body, and a laminar flow element is arranged in the laminar flow cavity; the laminar flow element comprises an elastic airbag and a plurality of laminar flow units freely stacked in the laminar flow cavity; clamping units for clamping and fixing the plurality of laminar flow units are arranged on both sides of the laminar flow cavity; in a natural state, the elastic airbag enables the laminar flow units to be tightly stacked together, so that the laminar flow cavity is in a blocked state; a laminar flow channel can be formed between adjacent laminar flow units; thereby, the effective flow area of ​​the laminar flow element is controlled, and the range is adjusted, so that the range can be flexibly adjusted according to the application scenario.

Description

Technical Field

[0001] The invention relates to the technical field of fluid control, in particular to a wide-range pressure-type MFC. Background Art

[0002] As a high-precision flow control device, pressure mass flow controller (MFC) is widely used in semiconductor manufacturing, chemical industry, medical treatment, scientific research and other fields. MFC achieves precise control of fluid mass flow by controlling the pressure difference between the inlet and outlet.

[0003] Existing MFCs usually use laminar flow elements to ensure the stable flow of fluid. The guide vanes inside the laminar flow element are designed to guide the fluid to form a laminar flow state, thereby reducing the impact of turbulence and eddy currents and improving the accuracy of flow control. However, in order to ensure the laminar flow effect of the fluid, the gaps between the guide vanes are often designed to be small, and the gaps between the guide vanes are fixed.

[0004] Although this design helps maintain the laminar flow state of the fluid, due to the fixed gap of the guide vane, the range of existing mass flow controllers is generally small and cannot be flexibly adjusted according to the needs of the application scenario. Summary of the invention

[0005] The purpose of the present invention is to overcome the above-mentioned shortcomings and provide a wide-range pressure MFC, so as to control the effective flow area of ​​the laminar flow element and realize the adjustment of the range, so as to flexibly adjust the range according to the application scenario.

[0006] To achieve the above object, the specific scheme of the present invention is as follows:

[0007] A wide-range pressure MFC includes a laminar flow device; the laminar flow device includes a laminar flow body, a laminar flow cavity is arranged in the laminar flow body, and a laminar flow element is arranged in the laminar flow cavity;

[0008] The laminar flow element includes an elastic airbag and a plurality of laminar flow units freely stacked in a laminar flow cavity; clamping units for clamping and fixing the plurality of laminar flow units are arranged on both sides of the laminar flow cavity; in a natural state, the elastic airbag enables the laminar flow units to be tightly stacked together, so that the laminar flow cavity is in a blocked state; and a laminar flow channel can be formed between adjacent laminar flow units.

[0009] Optionally, the laminar flow unit includes a guide plate, a first electrode disposed on one surface of the guide plate, and a second electrode disposed on another surface of the guide plate; the first electrode of the laminar flow unit is disposed opposite to the second electrode of an adjacent laminar flow unit, or the second electrode of the laminar flow unit is disposed opposite to the first electrode of an adjacent laminar flow unit;

[0010] The laminar flow body is provided with a capacitance measurement module on one side of the laminar flow cavity, and the capacitance measurement module is electrically connected to the first electrode and the second electrode of each laminar flow unit.

[0011] Optionally, the clamping unit includes a piezoelectric sheet arranged on a side wall of the laminar flow chamber and a clamping pad arranged on a surface of the piezoelectric sheet facing the laminar flow unit.

[0012] Optionally, the clamping pad is a friction pad.

[0013] Optionally, both ends of the laminar flow body are provided with an input port and an output port respectively connected to the laminar flow cavity;

[0014] The pressure MFC also includes a heating device arranged at the bottom of the laminar flow device and a measurement control module arranged at the top of the laminar flow device; the heating device is provided with a heating flow channel; one end of the heating flow channel is connected to the input port, and the other end is connected to the laminar flow chamber;

[0015] A temperature sensor is arranged at one end of the laminar flow cavity near the input port; a detection cavity is arranged at one end of the laminar flow body, a first pressure sensor is arranged in the detection cavity, and a second pressure sensor is arranged at one end of the laminar flow cavity near the output port of the laminar flow body;

[0016] The measurement control module is electrically connected to the heating device, the capacitance measurement module, the temperature sensor, the first pressure sensor and the second pressure sensor.

[0017] Optionally, the heating device comprises a heating body arranged at the bottom of the laminar flow body, a heating channel is arranged on a surface of the heating body facing the laminar flow body, and a heating electrode is arranged in the heating channel.

[0018] Optionally, the heating channel is spirally coiled, and the heating electrode extends along the trajectory of the heating channel.

[0019] Optionally, flow-around portions are provided on both sides of the heating electrode, and a via hole is provided through the heating electrode at a position corresponding to each flow-around portion, and the flow-around portions on both sides of the heating electrode are alternately distributed in sequence.

[0020] Optionally, the laminar flow body is provided with a throttling cavity cross-connected with the output port at a position corresponding to the output port, and a push rod is provided at a position corresponding to the throttling cavity at the top of the laminar flow body;

[0021] An adjusting valve core is arranged in the throttling chamber, and the adjusting valve core comprises a plurality of valve core units stacked at intervals in the throttling chamber, and the valve core unit at the top is connected to the output end of the push rod; a guide channel is formed between adjacent valve core units, and the valve core unit is driven to move by the push rod, thereby adjusting the number of guide channels located in the output port.

[0022] Optionally, the valve core unit comprises a valve core body, a sliding hole is provided through the valve core body, sliders are slidably provided at both ends of the sliding hole, and a spring is connected between the two sliders;

[0023] Conical grooves are arranged on both sides of the throttling cavity, and the width of the conical grooves gradually increases from the bottom of the laminar flow body to the top of the laminar flow body; the slider extends out of the valve core body under the action of the spring and abuts against the groove wall of the conical groove.

[0024] The beneficial effects of the present invention are as follows: the present invention stacks a plurality of laminar flow units in a laminar flow chamber, and utilizes electrostatic repulsion to adjust the spacing between the laminar flow units to achieve adjustment of the flow channel width of the laminar flow channel, and adjusts the superposition state of the laminar flow units, thereby controlling the effective flow area of ​​the laminar flow element and achieving range adjustment, so as to flexibly adjust the range according to the application scenario. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the present invention;

[0026] Figure 2 It is a cross-sectional schematic diagram of the present invention;

[0027] Figure 3 is a cross-sectional schematic diagram of another viewing angle of the present invention;

[0028] Figure 4 It is a schematic diagram of the structure of the laminar flow device of the present invention after the cover plate is hidden;

[0029] Figure 5 It is a schematic structural diagram of the laminar flow unit of the present invention;

[0030] Figure 6 It is a structural schematic diagram of the laminar flow body of the present invention;

[0031] Figure 7 It is a structural schematic diagram of the heating device of the present invention;

[0032] Figure 8 It is a schematic diagram of the structure of the heating electrode of the present invention;

[0033] Fig. 9 It is a structural schematic diagram of the valve core unit of the present invention;

[0034] Explanation of the reference numerals: 11, laminar flow body; 111, laminar flow cavity; 112, input port; 113, output port; 114, throttling cavity; 115, conical groove; 121, elastic airbag; 122, laminar flow unit; 1221, guide plate; 1222, first electrode; 1223, second electrode; 131, piezoelectric sheet; 132, clamping pad; 14, capacitance measurement module; 15, temperature sensor; 16, first pressure sensor; 17, second pressure sensor; 18, valve core unit; 181, valve core body; 182, slider; 183, spring; 21, heating body; 211, heating flow channel; 22, heating electrode; 221, flow bypass portion; 222, through hole; 3, measurement control module; 4, push rod. DETAILED DESCRIPTION

[0035] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments, but the implementation scope of the present invention is not limited thereto.

[0036] like Figures 1 to 9 As shown, a wide-range pressure MFC described in this embodiment includes a laminar flow device; the laminar flow device includes a laminar flow body 11, a laminar flow cavity 111 is arranged in the laminar flow body 11, and a laminar flow element is arranged in the laminar flow cavity 111;

[0037] The laminar flow element includes an elastic airbag 121 and a plurality of laminar flow units 122 freely stacked in the laminar flow cavity 111; clamping units for clamping and fixing the plurality of laminar flow units 122 are arranged on both sides of the laminar flow cavity 111; in a natural state, the elastic airbag 121 makes the laminar flow units 122 tightly stacked together, so that the laminar flow cavity 111 is in a blocked state; a laminar flow channel can be formed between adjacent laminar flow units 122. The elastic airbag 121 is connected to the outside atmosphere.

[0038] Specifically, the laminar flow unit 122 includes a guide plate 1221, a first electrode 1222 arranged on one surface of the guide plate 1221, and a second electrode 1223 arranged on the other surface of the guide plate 1221; the first electrode 1222 of the laminar flow unit 122 is arranged opposite to the second electrode 1223 of the adjacent laminar flow unit 122, or the second electrode 1223 of the laminar flow unit 122 is arranged opposite to the first electrode 1222 of the adjacent laminar flow unit 122; the laminar flow body 11 is provided with a capacitance measurement module 14 on one side of the laminar flow cavity 111, and the capacitance measurement module 14 is electrically connected to the first electrode 1222 and the second electrode 1223 of each laminar flow unit 122.

[0039] Specifically, in the pressure-type MFC described in this embodiment, at the beginning, each laminar flow unit 122 is tightly stacked together under the elastic force of the elastic airbag 121. At this time, the elastic airbag 121 and each laminar flow unit 122 block the laminar flow cavity 111. When it is necessary to measure the fluid mass flow rate, by introducing the same charge into the first electrode 1222 of the laminar flow unit 122 and the second electrode 1223 of the adjacent laminar flow unit 122, an electrostatic repulsive force is generated between the two adjacent laminar flow units 122. At this time, the gap between the two adjacent laminar flow units 122 is the laminar flow channel. According to the number of laminar flow channels and the width of the flow channel required by the current fluid, the number of laminar flow units 122 introduced with the charge is controlled, thereby controlling the number of laminar flow channels. The capacitance measurement module 14. The capacitance value of the capacitor formed between the first electrode 1222 and the second electrode 1223 of the adjacent laminar flow units 122 is measured to obtain the flow channel width of the laminar flow channel. If the flow channel width exceeds the preset threshold range, the charge amount of the corresponding first electrode 1222 and the second electrode 1223 is adjusted until the flow channel width of the laminar flow channel meets the preset threshold range requirement. After completion, the clamping units on both sides clamp and fix each laminar flow unit 122, so that the laminar flow element is maintained in the state of the current number of laminar flow channels and the current flow channel width, so as to measure the mass flow rate of the fluid, so that when the fluid enters the laminar flow chamber 111, the fluid flows through each laminar flow channel, thereby converting the fluid in the turbulent state into the fluid in the laminar state;

[0040] When the range needs to be adjusted, the clamping unit releases each laminar flow unit 122, and then controls the capacitance value of the capacitor formed between the first electrode 1222 and the second electrode 1223 of the adjacent laminar flow units 122 to adjust the gap size between the adjacent laminar flow units 122, that is, adjusts the flow channel width of the laminar flow channel, and controls the number of laminar flow units 122 that are charged, thereby adjusting the effective flow area of ​​the laminar flow element. After the adjustment is completed, the adjusted laminar flow units 122 are clamped and fixed by the clamping unit to achieve range adjustment.

[0041] In this embodiment, multiple laminar flow units 122 are stacked in the laminar flow chamber 111, and the spacing between the laminar flow units 122 is adjusted by electrostatic repulsion to adjust the flow channel width of the laminar flow channel and adjust the superposition state of the laminar flow units 122, thereby controlling the effective flow area of ​​the laminar flow element and achieving range adjustment, so as to flexibly adjust the range according to the application scenario.

[0042] For example, Figures 1 to 3 As shown, a cover plate is disposed on the top of the laminar flow body 11, and the cover plate and the laminar flow body 11 together enclose a laminar flow chamber 111. The arrangement is changed so as to install the laminar flow element and the clamping unit.

[0043] like Figure 4As shown, in the pressure-type MFC described in this embodiment, in some embodiments, the clamping unit includes a piezoelectric sheet 131 arranged on the side wall of the laminar flow chamber 111 and a clamping pad 132 arranged on the surface of the piezoelectric sheet 131 facing the laminar flow unit 122. Preferably, the clamping pad 132 is a friction pad, which clamps the laminar flow unit 122 more firmly. Specifically, after the laminar flow unit 122 is adjusted, the piezoelectric sheet 131 works to drive the clamping pad 132 to move toward the laminar flow unit 122, thereby clamping and fixing each laminar flow unit 122, and completing the state maintenance of the adjusted laminar flow element; when the range needs to be adjusted, the piezoelectric sheet 131 drives the clamping pad 132 to move away from the laminar flow unit 122, thereby loosening each laminar flow unit 122 for range adjustment.

[0044] like Figures 1 to 4 , Figures 6 to 8 As shown, in the pressure-type MFC described in this embodiment, in some embodiments, the two ends of the laminar flow body 11 are provided with an input port 112 and an output port 113 respectively connected to the laminar flow chamber 111; the pressure-type MFC also includes a heating device arranged at the bottom of the laminar flow device and a measurement control module 3 arranged at the top of the laminar flow device; the heating device is provided with a heating channel 211; one end of the heating channel 211 is connected to the input port 112, and the other end is connected to the laminar flow chamber 111; a temperature sensor 15 is provided at one end of the laminar flow chamber 111 near the input port 112; a detection chamber connected to the laminar flow chamber 111 is provided at one end of the laminar flow body 11, and a first pressure sensor 16 is provided in the detection chamber, and a second pressure sensor 17 is provided at one end of the laminar flow chamber 111 near the output port 113 of the laminar flow body 11;

[0045] The measurement control module 3 is electrically connected to the heating device, the capacitance measurement module 14 , the temperature sensor 15 , the first pressure sensor 16 and the second pressure sensor 17 .

[0046] Specifically, the fluid enters the heating channel 211 from the input port 112, and after being heated to a preset temperature in the heating device, enters the laminar flow chamber 111 from the heating channel 211. At this time, the temperature sensor 15 in the laminar flow chamber 111 measures the temperature of the fluid, and transmits the measured temperature data to the measurement control module 3. The measurement control module 3 controls the heating temperature of the heating device and determines the density value of the fluid according to the current fluid and the currently measured temperature data (the density value of the fluid at the current temperature is determined by the temperature-density correspondence table, and the fluid has corresponding density values ​​at different temperatures). At the same time, A pressure sensor 16 measures the input fluid pressure value and transmits the measurement to the measurement control module 3 to obtain a pressure value P1. The fluid is rectified into a laminar flow state by the laminar flow element and flows out from the output port 113. At this time, the second pressure sensor 17 measures the pressure value of the fluid and transmits the measurement to the measurement control module 3 to obtain a pressure value P2. The measurement control module 3 can calculate the mass flow rate of the fluid at this time based on the Poiseuille principle, using the pressure difference ΔP=P1-P2 between the first pressure sensor 16 and the second pressure sensor 17, and the density value of the fluid at the current temperature.

[0047] like Figure 7 and Figure 8 As shown, in the pressure-type MFC described in this embodiment, in some embodiments, the heating device includes a heating body 21 disposed at the bottom of the laminar body 11, and a heating channel 211 is disposed on the surface of the heating body 21 facing the laminar body 11, and a heating electrode 22 is disposed in the heating channel 211. In actual use, the fluid entering through the input port 112 enters the heating channel 211, and the measurement control module 3 controls the heating electrode 22 to heat the fluid flowing through the heating channel 211, so that the fluid is heated to a preset temperature, thereby determining the density value of the fluid at the current temperature according to the corresponding temperature data.

[0048] like Figure 7 and Figure 8 As shown, in the pressure-type MFC described in this embodiment, in some embodiments, the heating channel 211 is spirally coiled, and the heating electrode 22 extends along the trajectory of the heating channel 211. In this embodiment, the heating channel 211 is arranged to be spirally coiled so as to fully heat the fluid to a preset temperature, thereby ensuring the accuracy of the fluid mass flow measurement.

[0049] like Figure 7 and Figure 8As shown, in the pressure-type MFC described in this embodiment, in some embodiments, a flow-around portion 221 is provided on both sides of the heating electrode 22, and a through hole 222 is provided at the position of each flow-around portion 221 of the heating electrode 22, and the flow-around portions 221 on both sides of the heating electrode 22 are alternately distributed in sequence. In this embodiment, by providing the flow-around portion 221, the fluid flowing through the heating flow channel 211 is disturbed and mixed, so that the fluid is fully mixed in the heating flow channel 211, and the fluid can alternately flow on both sides of the heating electrode 22, thereby extending the flow path of the fluid in the heating flow channel 211, so that the overall temperature of the fluid is more balanced, which is conducive to improving the accuracy of temperature detection.

[0050] like Figures 1 to 4 , Figure 6 As shown, in the pressure-type MFC described in this embodiment, in some embodiments, a throttling chamber 114 cross-connected with the output port 113 is provided at a position corresponding to the output port 113 of the laminar flow body 11, and a push rod 4 is provided at a position corresponding to the throttling chamber 114 at the top of the laminar flow body 11; an adjusting valve core is provided in the throttling chamber 114, and the adjusting valve core includes a plurality of valve core units 18 stacked at intervals in the throttling chamber 114, and the valve core unit 18 at the top is connected to the output end of the push rod 4; a guide channel is formed between adjacent valve core units 18, and the valve core unit 18 is driven to move by the push rod 4, so as to adjust the number of guide channels located in the output port 113. In this embodiment, a plurality of spaced and stacked valve core units 18 are arranged in the throttling chamber 114, and a guide channel is formed between adjacent valve core units 18, so that when the fluid flowing out of the laminar flow chamber 111 enters the throttling chamber 114, the fluid flows out to the output port 113 through each guide channel, thereby rectifying the outflowing fluid; compared with the throttling valve structure of the integrated valve core, the regulating valve core of this embodiment can stably output the fluid in the laminar flow state, so as to effectively prevent the fluid from changing from the stable laminar flow state to the turbulent flow state after passing through the regulating valve core;

[0051] When it is necessary to control the effective flow area, the measurement control module 3 controls the push rod 4 to drive the topmost valve core unit 18 to move toward the output port 113, thereby adjusting the number of guide channels located in the output port 113, thereby controlling the effective flow area of ​​the output port 113 and adjusting the mass flow rate of the fluid. In this way, in conjunction with the laminar flow element, the pressure MFC has a larger range of adjustment and a more flexible range adjustment.

[0052] In this embodiment, Figure 2 , Figure 3 and Fig. 9As shown, the valve core unit 18 includes a valve core body 181, a sliding hole is set through the valve core body 181, and sliders 182 are slidably set at both ends of the sliding hole, and a spring 183 is connected between the two sliders 182; conical grooves 115 are set on both sides of the throttling chamber 114; the slider 182 extends out of the valve core body 181 under the action of the spring 183 and abuts against the groove wall of the conical groove 115.

[0053] Specifically, since the width of the conical groove 115 gradually increases from the bottom of the laminar body 11 to the top of the laminar body 11, the length of the spring 183 of the valve core unit 18 also gradually increases from the bottom to the top, so that each valve core unit 18 is stacked in the throttling chamber 114 at intervals under the action of the spring 183; the push rod 4 places each valve core unit 18 in the output port 113, and each valve core unit 18 blocks the output port 113. In this way, the number of valve core units 18 located in the output port 113 is controlled by the push rod 4, thereby achieving the number of adjusted diversion channels and realizing the regulation of fluid flow. In addition, the stacked valve core units 18 can also divert the fluid to form a stable laminar output.

[0054] When the push rod 4 squeezes the valve core unit 18 to move toward the output port 113, the sliders 182 on both sides of the valve core body 181 are squeezed by the conical groove 115, and the sliders 182 are compressed by squeezing the spring sheet 183 and retracted into the valve core body 181; when the push rod 4 releases the squeezing of the valve core unit 18, the spring sheet 183 resets and pushes the slider 182 to extend. At this time, with the cooperation of the slider 182 and the conical groove 115, the valve core unit 18 moves upward until the spring sheet 183 returns to its initial state, thereby realizing the automatic reset of the valve core unit 18.

[0055] Exemplarily, the end of the slider 182 is provided with an inclined surface matched with the tapered groove 115 .

[0056] The above is only a preferred embodiment of the present invention. Therefore, any equivalent changes or modifications made according to the structure, characteristics and principles described in the scope of the patent application of the present invention are included in the protection scope of the patent application of the present invention.

Claims

1. A wide range pressure MFC, characterized in that: It comprises a laminar flow device; the laminar flow device comprises a laminar flow body, a laminar flow cavity is arranged in the laminar flow body, and a laminar flow element is arranged in the laminar flow cavity; The laminar flow element includes an elastic airbag and a plurality of laminar flow units freely stacked in a laminar flow cavity; clamping units for clamping and fixing the plurality of laminar flow units are provided on both sides of the laminar flow cavity; in a natural state, the elastic airbag makes the laminar flow units tightly stacked together, so that the laminar flow cavity is in a blocked state; a laminar flow channel can be formed between adjacent laminar flow units; The laminar flow unit comprises a guide plate, a first electrode arranged on one surface of the guide plate, and a second electrode arranged on the other surface of the guide plate; the first electrode of the laminar flow unit is arranged opposite to the second electrode of the adjacent laminar flow unit, or the second electrode of the laminar flow unit is arranged opposite to the first electrode of the adjacent laminar flow unit; The laminar flow body is provided with a capacitance measurement module on one side of the laminar flow chamber, and the capacitance measurement module is electrically connected to the first electrode and the second electrode of each laminar flow unit; When the fluid mass flow rate needs to be measured, like charges are introduced into the first electrode of the laminar flow unit and the second electrode of the adjacent laminar flow unit, so that an electrostatic repulsive force is generated between the two adjacent laminar flow units. At this time, the gap between the two adjacent laminar flow units is the laminar flow channel.

2. A wide range pressure MFC according to claim 1, characterized in that: The clamping unit comprises a piezoelectric sheet arranged on the side wall of the laminar flow chamber and a clamping pad arranged on the surface of the piezoelectric sheet facing the laminar flow unit.

3. A wide range pressure MFC according to claim 2, characterized in that: The clamping pad is a friction pad.

4. A wide range pressure MFC according to claim 1, characterized in that: An input port and an output port are provided at both ends of the laminar flow body, which are respectively connected to the laminar flow cavity; The pressure MFC also includes a heating device arranged at the bottom of the laminar flow device and a measurement control module arranged at the top of the laminar flow device; the heating device is provided with a heating flow channel; one end of the heating flow channel is connected to the input port, and the other end is connected to the laminar flow chamber; A temperature sensor is arranged at one end of the laminar flow cavity near the input port; a detection cavity is arranged at one end of the laminar flow body, a first pressure sensor is arranged in the detection cavity, and a second pressure sensor is arranged at one end of the laminar flow cavity near the output port of the laminar flow body; The measurement control module is electrically connected to the heating device, the capacitance measurement module, the temperature sensor, the first pressure sensor and the second pressure sensor.

5. A wide range pressure MFC according to claim 4, characterized in that: The heating device comprises a heating body arranged at the bottom of the laminar flow body, a heating channel is arranged on the surface of the heating body facing the laminar flow body, and a heating electrode is arranged in the heating channel.

6. A wide range pressure MFC according to claim 5, characterized in that: The heating channel is spirally coiled, and the heating electrode extends along the trajectory of the heating channel.

7. A wide range pressure MFC according to claim 6, characterized in that: Flow-around parts are arranged on both sides of the heating electrode, and a via hole is arranged through the position of each flow-around part of the heating electrode, and the flow-around parts on both sides of the heating electrode are alternately distributed in sequence.

8. A wide range pressure MFC according to claim 1, characterized in that: The laminar flow body is provided with a throttling cavity cross-connected with the output port at a position corresponding to the output port, and a push rod is provided at a position corresponding to the throttling cavity at the top of the laminar flow body; An adjusting valve core is arranged in the throttling chamber, and the adjusting valve core comprises a plurality of valve core units stacked at intervals in the throttling chamber, and the valve core unit at the top is connected to the output end of the push rod; a guide channel is formed between adjacent valve core units, and the valve core unit is driven to move by the push rod, thereby adjusting the number of guide channels located in the output port.

9. A wide range pressure MFC according to claim 8, characterized in that: The valve core unit comprises a valve core body, a sliding hole is provided through the valve core body, sliders are slidably provided at both ends of the sliding hole, and a spring is connected between the two sliders; Conical grooves are arranged on both sides of the throttling cavity, and the width of the conical grooves gradually increases from the bottom of the laminar flow body to the top of the laminar flow body; the slider extends out of the valve core body under the action of the spring and abuts against the groove wall of the conical groove.

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