Mask clamps and dead angle preventing cleaning device

Abstract

The application relates to a mask plate clamp and a dead angle preventing cleaning device in the technical field of mask plate cleaning equipment. The mask plate clamp comprises a mounting frame, an electric sliding block is slidably connected to the upper side of the mounting frame through an electric sliding rail, a sliding frame is slidably connected to the electric sliding block, mirror image fixed rods are fixedly connected to the lower side of the sliding frame and are equidistantly distributed, sliding blocks are arranged on the lower side of the fixed rods, a supporting plate is slidably connected to the lower side of the sliding blocks, fixed shells are arranged on the opposite sides of the mirror image sliding blocks, suction shells are slidably connected to the lower side of the fixed shells, and rubber rings are arranged on the lower side of the suction shells. The suction shells are used for adsorbing and lifting the mask plate, the supporting plate is used for supporting, the mask plate can be stably clamped, the clamping force can be accurately controlled when the mask plate is clamped, and the safety during the clamping and moving of the mask plate is improved.

Description

Technical Field

[0001] This invention relates to a mask clamp and a blind-angle-prevention cleaning device in the field of mask cleaning equipment. Background Technology

[0002] Photomasks are core components used in semiconductor manufacturing and micro / nano fabrication. The intricate patterns on photomasks directly affect the functionality and quality of high-tech products such as integrated circuits and displays. After the photomask process is completed, its surface will have deposits such as photoresist, organic contaminants, metal debris, dust, and residual adhesive. Since quartz photomasks are crucial for wafer production in photolithography, these deposits directly impact the wafer yield. Therefore, after removing the photoresist, operators must thoroughly clean the quartz photomask. However, existing cleaning devices typically use a support to hold the lower side of the photomask and combine ultrasonic cleaning technology. During the process of moving the photomask under the support and immersing it in the cleaning solution for ultrasonic cleaning, the photomask moves... The inertia of movement and the flow of cleaning fluid can cause the quartz mask to move relative to the support, resulting in scratches on the back of the quartz mask due to friction with the support. These scratches reduce the light transmittance of the quartz mask during photolithography, affecting the quality of the wafers produced from the quartz mask. At the same time, if the quartz mask is moved by holding it on both sides with a fixture, it is difficult to accurately control the clamping force of the fixture, which may cause the quartz mask to break or fall, reducing the safety of the quartz mask. Therefore, it is necessary to develop a mask fixture with stable clamping and cleaning functions. Summary of the Invention

[0003] To address the problems mentioned in the background above, the present invention provides a mask plate clamp and a dead-angle-proof cleaning device.

[0004] The technical solution of the present invention is as follows: a mask plate clamp includes a mounting frame, an electric slider slidably connected to the upper side of the mounting frame via an electric slide rail, a sliding frame slidably connected to the electric slider, a first electric push rod fixedly connected to the electric slider, the telescopic end of the first electric push rod fixedly connected to the sliding frame, a mirror image of a fixed rod and equidistantly distributed fixed rods fixedly connected to the lower side of the sliding frame, a sliding block provided on the lower side of the fixed rod, a support plate slidably connected to the lower side of the sliding block, a tension spring fixedly connected between the support plate and the corresponding sliding block, a fixed shell provided on the opposite side of the mirror image of the sliding block, an adsorption shell slidably connected to the lower side of the fixed shell, a rubber ring provided on the lower side of the adsorption shell, a through hole provided on the upper side of the adsorption shell, an adsorption mechanism for controlling the adsorption of the corresponding adsorption shell provided on the side wall of the fixed shell, and a reset mechanism for controlling the reset of the mirror image of the equidistantly distributed support plates provided on the sliding frame.

[0005] As a preferred embodiment of the present invention, the adsorption mechanism includes an air extraction cylinder, which is fixedly connected to the side wall of the corresponding fixed shell. The air extraction cylinder communicates with the upper part of the corresponding fixed shell. A piston rod is slidably connected inside the air extraction cylinder. A tension spring is fixedly connected between the air extraction cylinder and the corresponding piston rod. A fixed plate is slidably connected inside the fixed shell. A through hole is provided in the middle of the fixed plate. A spring is fixedly connected between the fixed plate and the corresponding adsorption shell. A moving component for controlling the adsorption movement of the corresponding adsorption shell is provided on the fixed plate. A control component for controlling the movement and support of the corresponding support plate is provided on the air extraction cylinder. A clamping component for controlling the squeezing and clamping of the mask plate by the corresponding adsorption shell is provided on the lower side of the sliding block.

[0006] In a preferred embodiment of the present invention, the movable component includes a sliding plate slidably connected to a corresponding fixed plate. The sliding plate has a through hole that communicates with and engages with a through hole in the corresponding fixed plate. A spring is fixedly connected between the sliding plate and an adjacent fixed plate. A through hole is provided on the upper side of the fixed shell. A sliding plate that seals and engages with the through hole is slidably connected to the upper side of the fixed shell. A pressing rod that presses against the adjacent sliding plate is fixedly connected to the side of the piston rod near the adjacent fixed shell. The pressing rod penetrates the adjacent fixed shell and the adjacent suction cylinder. The pressing rod is limited and engaged with the adjacent fixed plate.

[0007] In a preferred embodiment of the present invention, the control component includes a first elastic telescopic rod, which is fixedly connected to the side wall of an adjacent suction cylinder. The telescopic end of the first elastic telescopic rod is press-fitted with an adjacent piston connecting rod. The first elastic telescopic rod is connected to a liquid guide tube. A cavity communicating with the liquid guide tube is provided on the lower side of the sliding block. A groove is provided on the support plate. A limiting block that is slidably connected to the cavity of the sliding block and is limited to the groove on the adjacent support plate is limited. A limiting plate is slidably connected to the side of the suction cylinder away from the adjacent fixed shell. A blind hole that is limited to the corresponding limiting plate is provided on one side of the piston connecting rod. A spring is fixedly connected between the limiting plate and the adjacent adsorption shell.

[0008] As a preferred embodiment of the present invention, the clamping assembly includes a second elastic telescopic rod, which is fixedly connected to the side of the corresponding sliding block away from the corresponding fixed shell. The telescopic end of the second elastic telescopic rod is press-fitted with the adjacent support plate. The second elastic telescopic rod is connected to a first guide pipe. A double-headed hydraulic cylinder connected to the adjacent first guide pipe is fixedly connected to the upper side of the fixed shell. One telescopic end of the double-headed hydraulic cylinder is fixedly connected to the adjacent sliding plate. The other telescopic end of the double-headed hydraulic cylinder is fixedly connected to a sliding bent rod. The sliding bent rod is inserted into the adjacent fixed shell and press-fitted with the adjacent sliding plate.

[0009] As a preferred embodiment of the present invention, the reset mechanism includes a second electric push rod, which is fixedly connected to the sliding frame. The telescopic end of the second electric push rod penetrates the sliding frame. A connecting plate is fixedly connected to the telescopic end of the second electric push rod. The connecting plate is fixedly connected to a first extrusion bent plate and a second extrusion bent plate that are mirror-image and equidistantly distributed. The first extrusion bent plate is in extrusion engagement with the adjacent piston connecting rod, and the second extrusion bent plate is in extrusion engagement with the adjacent support plate.

[0010] The present invention also aims to provide a cleaning device for preventing dead angles, comprising a cleaning shell and a mask plate clamp as described above. The cleaning shell is fixedly connected to the mounting frame, and a motor is fixedly connected to one side of the mounting frame. The output shaft of the motor is fixedly connected to a lead screw that penetrates the mounting frame. The lead screw is rotatably connected to both the mounting frame and the cleaning shell. The lead screw is threadedly connected to a connecting frame, which is inserted into the cleaning shell. An electric roller is provided on the portion of the connecting frame located inside the cleaning shell.

[0011] As a preferred embodiment of the present invention, the electric roller is provided with circumferentially and equidistantly distributed arc-shaped plates, the concave surface of which faces the same direction as the rotation direction of the electric roller, for rinsing the surface of the quartz mask plate.

[0012] As a preferred embodiment of the present invention, it further includes a misalignment mechanism disposed on the connecting frame. The misalignment mechanism is used to control the movement of the adsorption shell. The misalignment mechanism includes mirror-shaped limiting slide rods, which are all fixedly connected to the connecting frame. The fixed shell is slidably connected to the corresponding fixed rod through a connecting block. The fixed rod is slidably connected to the corresponding sliding block. The three equally spaced suction cylinders are all pressed and engaged with the corresponding limiting slide rods. A swing roller is disposed on the lower side of the connecting frame. The swing roller is disposed with equally spaced nozzles. A fixed hydraulic cylinder is fixedly connected to each of the mirror-shaped and equally spaced fixed rods. The telescopic end of the fixed hydraulic cylinder is fixedly connected to the connecting block of the adjacent fixed shell. The fixed hydraulic cylinder is connected to a second guide pipe, which penetrates the corresponding fixed rod. A third elastic telescopic rod is fixedly connected to the lower side of the fixed rod and communicates with the adjacent second guide pipe. The telescopic end of the third elastic telescopic rod is fixedly connected to the adjacent sliding block.

[0013] As a preferred embodiment of the present invention, the portion of the limiting slide bar located inside the cleaning shell is configured as an isosceles trapezoid, the symmetry line of the upper side of the isosceles trapezoidal portion of the limiting slide bar is located on the same vertical plane as the axis of the electric roller, and the width of the upper side of the isosceles trapezoid is the same as the diameter of the total moving area of ​​the electric roller and its upper arc plate.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. The present invention achieves the purpose of stable clamping of the mask plate by adsorbing and lifting the mask plate through the adsorption shell and supporting the support plate, thereby avoiding the situation of inaccurate clamping force control when clamping the mask plate and improving the safety of the mask plate during clamping and moving.

[0015] 2. The present invention ensures the stability of the mask plate during the adsorption and movement process by blocking the through hole of the fixed plate by the sliding plate in the moving component, so that the adsorption force of the adsorption shell on the mask plate remains consistent.

[0016] 3. This invention, through the movement of the sliding bent rod in the clamping assembly, in conjunction with the movement of the sliding plate, enables the adsorption shell to quickly release its adsorption of the mask plate, avoiding damage to the mask plate caused by prolonged adsorption, while ensuring the accuracy of the clamping position during the subsequent movement of the mask plate.

[0017] 4. By moving the limiting slide bar in the misalignment mechanism, the adsorption shell holding the mask plate is released from fixing the mask plate in sequence, thereby achieving the purpose of thoroughly cleaning the surface of the mask plate and improving the comprehensiveness and quality of the cleaning of the mask plate surface by this device. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0019] Figure 2This is a three-dimensional structural diagram of the electric slider and sliding frame components of the present invention;

[0020] Figure 3 This is a three-dimensional structural diagram of the parts at the fixing rod and sliding block of the present invention;

[0021] Figure 4 This is a three-dimensional structural diagram of the parts at the air extraction cylinder and the fixing plate of the present invention;

[0022] Figure 5 This is a three-dimensional structural diagram of the parts at the sliding plate and the extrusion rod of the present invention;

[0023] Figure 6 This is a three-dimensional structural diagram of the sliding plate and sliding bent rod parts of the present invention;

[0024] Figure 7 This is a three-dimensional structural diagram of the parts at the liquid guide tube and the limiting block of the present invention;

[0025] Figure 8 This is a three-dimensional structural diagram of the parts at the connecting plate and the first extrusion bending plate of the present invention;

[0026] Figure 9 This is a three-dimensional structural diagram of the parts at the support plate and the second extrusion bending plate of the present invention.

[0027] Figure 10 This is a three-dimensional structural diagram of the parts at the motor and lead screw of the present invention;

[0028] Figure 11 This is a three-dimensional structural diagram of the connecting frame and the electric roller components of the present invention;

[0029] Figure 12 This is a three-dimensional structural diagram of the parts at the fixed hydraulic cylinder and the third elastic telescopic rod of the present invention.

[0030] In the attached diagram, the following are the reference numerals: 1-mounting bracket, 2-electric slider, 3-sliding frame, 4-first electric push rod, 5-fixed rod, 6-sliding block, 7-support plate, 8-fixed shell, 9-adsorption shell, 201-vacuum cylinder, 202-piston connecting rod, 203-fixed plate, 301-sliding plate, 302-sliding piece, 303-squeezing rod, 401-first elastic telescopic rod, 402-liquid guide tube, 403-limiting block, 404-limiting plate, 501-second elastic telescopic rod. Rod, 502-First guide pipe, 503-Double-headed hydraulic cylinder, 504-Sliding bending rod, 601-Second electric push rod, 602-Connecting plate, 603-First extrusion bending plate, 604-Second extrusion bending plate, 701-Cleaning shell, 702-Motor, 703-Screw, 704-Connecting frame, 705-Electric roller, 801-Limiting slide rod, 802-Swing roller, 803-Fixed hydraulic cylinder, 804-Second guide pipe, 805-Third elastic telescopic rod. Detailed Implementation

[0031] The following is in conjunction with the appendix Figures 1-12 The technical solutions in the embodiments of the present invention are clearly and completely described herein. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] Example 1: In the process of clamping and holding the quartz mask for cleaning, the existing quartz mask clamps use hydraulic or pneumatic systems for adjustment, combined with sensor feedback to achieve fine adjustment of the clamping force. This can easily lead to mechanical feedback delays or clamp wear, resulting in inaccurate control of the clamping force when the mask is clamped. Consequently, the mask may crack or be damaged when it is clamped, reducing the service life of the quartz mask.

[0033] A mask holder, as shown in the reference Figures 1-5As shown, the device includes a mounting frame 1 with a control panel (not shown). An electric slider 2 is slidably connected to the upper side of the mounting frame 1 via an electric slide rail. A sliding frame 3 is slidably connected to the electric slider 2, and the sliding frame 3 slides only up and down on the electric slider 2. A first electric push rod 4 is fixedly connected to the electric slider 2, and the telescopic end of the first electric push rod 4 is fixedly connected to the sliding frame 3. Six fixed rods 5, mirror-image and equidistantly distributed, are fixedly connected to the lower side of the sliding frame 3. A sliding block 6 is provided below the fixed rods 5, and a support plate 7 is slidably connected to the lower side of the sliding block 6. The support plates 7 slide only back and forth below the corresponding sliding block 6. The mirror-image support plates 7 are close to each other, and the six support plates 7 together provide support for the lower side of the mask, facilitating subsequent fixing and mask movement. A tension spring is fixed between the support plate 7 and the corresponding sliding block 6, and the tension spring is initially in a stretched state. A fixing shell 8 is provided on the opposite side of each mirror-image sliding block 6, and the mirror-image fixing shells 8 are located adjacent and mirror-image of the sliding blocks. Between blocks 6, an adsorption shell 9 is slidably connected to the lower side of the fixed shell 8. The upper side of the adsorption shell 9 is provided with a through hole for the flow of gas inside the adsorption shell 9, so as to achieve the purpose of adsorbing and releasing the mask plate. A rubber ring is provided on the lower side of the adsorption shell 9 to maintain the internal sealing when the adsorption shell 9 adsorbs the mask plate, and at the same time increase the friction when the adsorption shell 9 fixes the mask plate and moves, so as to ensure the stability of the mask plate during the movement process. An adsorption mechanism is provided on the side wall of the fixed shell 8 to control the adsorption of the corresponding adsorption shell 9. A reset mechanism is provided on the sliding frame 3 to control the reset of the six support plates 7. The electric slider 2, the first electric push rod 4 and the reset mechanism are all electrically connected to the control panel. By adsorbing and moving the mask plate through the adsorption shell 9, and with the support of the six support plates 7, the purpose of quickly clamping and holding the mask plate is achieved, avoiding the situation where the clamping force of the clamping mask plate is not accurately controlled, resulting in the deformation and breakage of the mask plate and reducing the service life of the mask plate.

[0034] Reference Figures 3-6As shown, taking the adsorption mechanism on the left front side as an example, the adsorption mechanism includes an air extraction cylinder 201, which is fixedly connected to the side wall of the corresponding fixed shell 8. The air extraction cylinder 201 communicates with the upper part of the corresponding fixed shell 8. A piston rod 202 is slidably connected inside the air extraction cylinder 201. A tension spring is fixedly connected between the air extraction cylinder 201 and the corresponding piston rod 202. The tension spring is initially in a stretched state. A fixing plate 203 is slidably connected inside the fixed shell 8. The fixing plate 203 is located below the communication hole between the air extraction cylinder 201 and the fixed shell 8. A through hole is provided in the middle of the fixing plate 203. A spring is fixedly connected between the fixing plate 203 and the corresponding adsorption shell 9. The fixing plate 203 and the corresponding fixed shell 8... A spring is fixedly connected between the fixed plate 203 and the adsorption shell 9. The elastic coefficient of the spring is greater than that of the spring between the fixed plate 203 and the adsorption shell 9. The fixed plate 203 is reset to its initial position by the connected spring after it moves. The adsorption shell 9 maintains the squeezing and fixing effect on the mask plate by the spring. The fixed plate 203 is provided with a moving component for controlling the adsorption and movement of the corresponding adsorption shell 9. The vacuum cylinder 201 is provided with a control component for controlling the movement and support of the corresponding support plate 7. The lower side of the sliding block 6 is provided with a clamping component for controlling the squeezing and clamping of the mask plate by the corresponding adsorption shell 9. The piston rod 202 inside the vacuum cylinder 201 moves backward, causing the adsorption shell 9 to adsorb the mask plate and move upward.

[0035] Reference Figure 5 and Figure 6 As shown, the moving component includes a sliding plate 301, which is slidably connected to a corresponding fixed plate 203. The sliding plate 301 has a through hole that communicates with the through hole in the corresponding fixed plate 203. Initially, gas flows between the upper and lower sides of the fixed plate 203 through its through hole and the through hole in the sliding plate 301. A spring is fixed between the sliding plate 301 and the adjacent fixed plate 203, and this spring is initially in a compressed state. A through hole is provided on the upper side of the fixed shell 8, and a sliding piece 302 is slidably connected to the upper side of the fixed shell 8. The sliding piece 302 communicates with the through hole on the upper side of the fixed shell 8. In the initial sealing operation, the through hole on the upper side of the fixed shell 8 is blocked by the corresponding sliding plate 302, so that the adsorption shell 9 can stably adsorb the mask plate. The piston connecting rod 202 is fixedly connected to the side of the adjacent fixed shell 8 with the extrusion rod 303. The extrusion rod 303 is in a pressing fit with the adjacent sliding plate 301. The extrusion rod 303 penetrates the adjacent fixed shell 8 and the adjacent air extraction cylinder 201. The extrusion rod 303 is in a limiting fit with the adjacent fixed plate 203. By moving the extrusion rod 303, the limiting of the adjacent fixed plate 203 is released, so that the air extraction cylinder 201 can draw air from the corresponding fixed shell 8, so as to achieve the purpose of adsorbing the mask plate upward by the adsorption shell 9.

[0036] Reference Figures 3-5 and Figure 7As shown, the control assembly includes a first elastic telescopic rod 401, which is fixed to the side wall of an adjacent suction cylinder 201. The telescopic end of the first elastic telescopic rod 401 is in a pressing engagement with an adjacent piston connecting rod 202, which triggers the extension of the telescopic end of the first elastic telescopic rod 401 before the piston connecting rod 202 moves to its limit position. The first elastic telescopic rod 401 is connected to a liquid guide tube 402. A cavity is provided on the lower side of the sliding block 6, and the cavity of the sliding block 6 is in communication with the liquid guide tube 402. A groove is provided on the support plate 7, and a limit block 403 is slidably connected in the cavity of the sliding block 6. The limit block 403 is in a limiting engagement with the groove on the adjacent support plate 7. Initially, the limit block 403 limits the adjacent support plate 7. The support plate 7 stores force through a tension spring, which is used to make the first elastic telescopic rod 401 extend. After the telescopic end of the elastic telescopic rod 401 moves, the support plate 7 moves quickly to support the bottom of the mask plate, completing the clamping and subsequent holding of the mask plate. The side of the vacuum cylinder 201 away from the adjacent fixed shell 8 is limited and slidably connected to the limiting plate 404. A blind hole is provided on one side of the piston rod 202. The blind hole of the piston rod 202 is limited and matched with the corresponding limiting plate 404. A spring is fixed between the limiting plate 404 and the adjacent adsorption shell 9. When the adsorption shell 9 moves relative to the adjacent fixed shell 8 after contacting the mask plate, the piston rod 202 is released from the limit and begins to move. The cavities of the first elastic telescopic rod 401, the liquid guide tube 402 and the sliding block 6 are all filled with hydraulic oil. The adsorption shell 9 drives the mask plate to move upward to cooperate with the support plate 7, completing the clamping and holding of the mask plate.

[0037] Reference Figures 3-6 As shown, the clamping assembly includes a second elastic telescopic rod 501, which is fixed to the side of the corresponding sliding block 6 away from the corresponding fixed shell 8. The telescopic end of the second elastic telescopic rod 501 is pressed against the adjacent support plate 7, which is used to move the support plate 7 to support the lower side of the mask plate, and then quickly place and clamp the mask plate. The second elastic telescopic rod 501 is connected to a first guide pipe 502. A double-headed hydraulic cylinder 503 is fixed to the upper side of the fixed shell 8. The double-headed hydraulic cylinder 503 is connected to the adjacent first guide pipe 502. Taking the double-headed hydraulic cylinder 503 on the left front side as an example, the rear telescopic end of the double-headed hydraulic cylinder 503 is connected to the adjacent sliding plate 302. The adsorption shell 9 is fixed to the mask plate. The front telescopic end of the double-headed hydraulic cylinder 503 is fixed with a sliding bent rod 504, which is used to move the adsorption shell 9 down to cooperate with the support plate 7 to fix the mask plate. The sliding bent rod 504 is inserted into the adjacent fixed shell 8 and is pressed against the adjacent sliding plate 301. The second elastic telescopic rod 501, the first guide tube 502 and the double-headed hydraulic cylinder 503 are all filled with hydraulic oil. By moving the sliding plate 302 and the sliding plate 301, the adsorption shell 9 is released from adsorption of the mask plate and moves to cooperate with the support plate 7 to fix the mask plate, which ensures the stability and fixed position of the mask plate during the transportation and cleaning process.

[0038] Reference Figure 1 , Figure 2 , Figure 8 and Figure 9 As shown, the reset mechanism includes a second electric actuator 601, which is fixedly connected to the sliding frame 3. The telescopic end of the second electric actuator 601 penetrates the sliding frame 3. A connecting plate 602 is fixedly connected to the telescopic end of the second electric actuator 601. The connecting plate 602 is fixedly connected to six first compression bending plates 603, which are mirror images of each other and equidistantly distributed horizontally, and six second compression bending plates 604, which are mirror images of each other and equidistantly distributed horizontally. The first compression bending plates 603 are in compression engagement with the adjacent piston connecting rods 202. The first compression bending plates 603 are located above the corresponding piston connecting rods 202. The lower side of the first compression bending plates 603 is inclined, and the inclined part of the first compression bending plates 603 is on the horizontal plane. The corresponding length is the same as the moving distance of the piston connecting rod 202. The second extrusion bending plate 604 is extruded and fitted with the adjacent support plate 7. The second extrusion bending plate 604 is located above the corresponding support plate 7. The lower side of the second extrusion bending plate 604 is in an inclined state, and the corresponding length of the inclined part of the second extrusion bending plate 604 on the horizontal plane is the same as the moving distance of the support plate 7. The second electric push rod 601 is electrically connected to the control panel. Through the connecting plate 602, it drives all the first extrusion bending plates 603 and the second extrusion bending plates 604 to move up and down, so as to achieve the purpose of controlling the reset of the relevant parts in this device, ensuring the accuracy of the placement of the clamping mask plate in this device and the continuity of the processing of this device.

[0039] When the operator uses this device to clamp and fix the newly produced quartz mask, the operator first transports the small square quartz mask to be cleaned to the left side of the mounting frame 1. Then, the operator starts the first electric push rod 4 through the control panel. The telescopic end of the first electric push rod 4 drives the sliding frame 3 to move downward. The sliding frame 3 drives the parts on its lower side to move downward synchronously. As the sliding frame 3 moves downward, the rubber rings on the lower side of the six adsorption shells 9 first contact and squeeze the mask. Taking the adsorption shell 9 on the right front side as an example, since the mask is placed on the mounting frame 1 and does not move, the adsorption shell 9 moves upward relative to the fixed shell 8. The spring between the adsorption shell 9 and the fixed plate 203 is compressed. When the lower side of the support plate 7 contacts the mounting frame 1, the first electric push rod 4 stops.

[0040] As the adsorption shell 9 moves into the fixed shell 8, the adsorption shell 9 moves upward via the spring, causing the limiting plate 404 to move upward. The limiting plate 404 releases its restriction on the piston rod 202. Inside the suction cylinder 201, the piston rod 202 moves backward under the tension of the spring. Gas from the fixed shell 8 and the adsorption shell 9 enters the suction cylinder 201, reducing the gas level in the adsorption shell 9. The quartz mask plate is then adsorbed by the rubber ring inside the adsorption shell 9. Simultaneously, the gas level between the fixed plate 203 and the adsorption shell 9 decreases. All six adsorption shells 9 together move the mask plate upward. As the piston rod 202 moves backward, it drives the extrusion rod 303 to move backward synchronously. The sliding plate 301 moves backward under the elastic force of the spring connected to it. Plate 301 gradually blocks the through hole of fixing plate 203. When the squeezing rod 303 releases the limiting position of fixing plate 203, sliding plate 301 completely blocks the through hole of fixing plate 203. Gas flow between adsorption shell 9 and fixing plate 203 stops, and adsorption shell 9 and fixing plate 203 are relatively fixed. The vacuum pump 201 only extracts the gas on the upper side of fixing plate 203 in fixing shell 8. As the gas on the upper side of fixing plate 203 decreases, fixing plate 203 drives adsorption shell 9 and mask plate to continue moving upward. The spring connected to the upper side of fixing plate 203 is compressed, thereby achieving the purpose of lifting mask plate. By adsorbing and lifting mask plate, the situation of clamping and squeezing mask plate to cause it to break is avoided, ensuring the accuracy of mask plate clamping and improving the safety of mask plate.

[0041] As the fixed plate 203 moves upward, the piston connecting rod 202 contacts and drives the extension end of the first elastic telescopic rod 401 to move backward. The extension end of the first elastic telescopic rod 401 extends, and the hydraulic oil in the cavity of the sliding block 6 enters the first elastic telescopic rod 401 through the guide pipe 402. The hydraulic oil in the cavity of the sliding block 6 decreases, the limiting block 403 moves upward and moves out of the groove of the support plate 7, the limiting of the support plate 7 is released, and the support plate 7 moves backward under the tension of the tension spring. The two mirror-image support plates 7 move closer to each other, and the movement of the six support plates 7 blocks the bottom of the mask plate, which facilitates the support and clamping of the mask plate when it falls later.

[0042] As the support plate 7 moves backward, it contacts and presses the telescopic end of the second elastic telescopic rod 501, causing the telescopic end of the second elastic telescopic rod 501 to retract. Hydraulic oil inside the second elastic telescopic rod 501 flows into the double-headed hydraulic cylinder 503 through the first guide pipe 502. The two telescopic ends of the double-headed hydraulic cylinder 503 extend. The rear telescopic end of the double-headed hydraulic cylinder 503 drives the sliding plate 302 to move backward, while the front telescopic end of the double-headed hydraulic cylinder 503 drives the sliding bent rod 504 to move forward. The sliding bent rod 504 contacts and drives the sliding plate 301 to move forward, compressing the spring connected to it. The upper through-holes of the fixed plate 203 and the fixed shell 8 open simultaneously. The ambient gas sequentially enters the fixed shell 8 and the adsorption shell 9. The adsorption effect of the adsorption shell 9 on the mask plate disappears, and the mask plate falls naturally onto the six support plates 7. The six support plates 7 support the lower side of the mask plate. At the same time, the fixed plate 203 and the adsorption shell 9 move downward to return to their initial positions under the elastic force of the springs connected to them. All six adsorption shells 9 are fixed to the upper side of the mask plate by rubber rings. The springs between the adsorption shell 9 and the limiting plate 404 are stretched, thus completing the clamping and fixing of the mask plate. The adsorption, lifting and falling fixing of the mask plate by the adsorption shell 9, combined with the movement of the support plates 7 to support the lower side of the mask plate, ensures the accuracy of the device in the process of clamping the mask plate.

[0043] After the mask plate is clamped and fixed, the control panel moves the sliding frame 3 and the clamped mask plate upward via the first electric actuator 4. Then, the control panel activates the electric slider 2, which moves the sliding frame 3 and its connected components, holding the mask plate, to the right. The electric slider 2 transports the mask plate to the desired position and then stops. Next, the control panel activates the first electric actuator 4, which moves the mask plate down via the sliding frame 3 to a position close to the mask plate placement platform. The first electric actuator 4 then stops. Finally, the control panel activates the second electric actuator 601. The telescopic end of 1 drives the connecting plate 602, the six first extrusion bending plates 603 and the six second extrusion bending plates 604 to move downwards synchronously. Taking the first extrusion bending plate 603 on the right front side as an example, the first extrusion bending plate 603 contacts the extrusion piston connecting rod 202, the piston connecting rod 202 moves forward and stretches the tension spring connected to it to return to the initial position, the gas in the vacuum cylinder 201 is discharged through the fixed shell 8 and its through hole, the piston connecting rod 202 drives the extrusion rod 303 to move forward, the extrusion rod 303 contacts the extrusion fixed plate 203, the fixed plate 203 is re-limited, and the fixed plate 203 returns to the initial position.

[0044] During the downward movement of the second extrusion bending plate 604, it contacts the extrusion support plate 7. The support plate 7 moves forward and stretches the tension spring connected to it. When the groove of the support plate 7 aligns with the limiting block 403, the telescopic end of the first elastic telescopic rod 401 retracts, and the hydraulic oil in the first elastic telescopic rod 401 flows back into the cavity of the sliding block 6 through the guide pipe 402. The limiting block 403 moves downward and re-inserts into the groove of the support plate 7, and the support plate 7 returns to its initial limiting state. When all six support plates 7 return to their initial state, the lower side of the mask plate loses support and falls onto the platform where the mask plate is placed. This completes the clamping and conveying of one mask plate. When the support plate 7 releases its support... After the extension end of the second elastic telescopic rod 501 is squeezed, the extension end of the second elastic telescopic rod 501 extends, and the hydraulic oil in the double-headed hydraulic cylinder 503 flows back into the second elastic telescopic rod 501. Both extension ends of the double-headed hydraulic cylinder 503 retract, and the sliding plate 302 re-seals the through hole on the fixing shell 8. At this point, all parts return to their initial positions. The control panel controls the extension end of the second electric push rod 601 to drive the connecting plate 602, the first extrusion bending plate 603, and the second extrusion bending plate 604 to return to their initial positions. Finally, the control panel moves to the initial position through the electric slider 2 and the first electric push rod 4, and repeats the above operation to clamp and transport the mask plate continuously conveyed to the mounting frame 1.

[0045] Example 2: When existing mask cleaning devices clamp and fix the mask and clean it, they usually use immersion cleaning to avoid damage to the coating on the surface of the mask by the cleaning solution. However, the process of immersing the mask in the cleaning solution is time-consuming. Prolonged immersion will cause the cleaning solution to penetrate into the fine structure of the pattern on the surface of the mask, resulting in blurred pattern edges, affecting the accuracy of subsequent photolithography processes, and reducing the cleaning quality of the mask.

[0046] Based on Example 1, a cleaning device that prevents dead angles is described, with reference to... Figure 1 , Figure 2 , Figure 10 and Figure 11As shown, the system includes a cleaning housing 701 filled with cleaning fluid. The cleaning housing 701 is fixedly attached to a mounting bracket 1. A cleaning fluid removal device (not shown) is located on the right side of the mounting bracket 1. A motor 702 is fixedly attached to the right side of the mounting bracket 1. A lead screw 703, penetrating the mounting bracket 1, is fixedly connected to the output shaft of the motor 702. The lead screw 703 is rotatably connected to both the mounting bracket 1 and the cleaning housing 701. The lead screw 703 is located between the cleaning housing 701 and the motor 702. A connecting bracket 704 is threadedly connected to the lead screw 703. The threaded connection between the connecting bracket 704 and the lead screw 703 is initially located on the right side, and the moving distance of the connecting bracket 704 is... The total spacing between the three equidistant fixed shells 8 is greater than the total distance between them. The connecting frame 704 is inserted into the cleaning shell 701. An electric roller 705 is installed in the part of the connecting frame 704 located inside the cleaning shell 701. Several circumferentially distributed arc-shaped plates are installed on the electric roller 705. The concave surface of the arc-shaped plates faces the same direction as the rotation direction of the electric roller 705. This is used to rinse the surface of the quartz mask and guide the water flow for cleaning the mask. The motor 702 and the electric roller 705 are both electrically connected to the control panel. By moving the connecting frame 704 and rotating the arc-shaped plates on the electric roller 705, the immersion cleaning efficiency of the mask surface by this device is accelerated.

[0047] Repeat the mask clamping and holding operations described in the above embodiments. After the six adsorption shells 9 press and fix the upper side of the mask, repeat the operation of the electric slider 2 driving the sliding frame 3 and its connected parts to clamp the mask and move it to the right. When the center of the sliding frame 3 is aligned with the center of the cleaning shell 701, the electric slider 2 stops moving. At the same time, the control panel activates the first electric push rod 4. The telescopic end of the first electric push rod 4 drives the sliding frame 3 and its connected parts to clamp the mask and move it downward, finally immersing the mask into the cleaning shell 701. After the first electric push rod 4 stops in the internal cleaning fluid, the control panel starts the motor 702 and the electric roller 705. The output shaft of the motor 702 drives the lead screw 703 to rotate. The lead screw 703 drives the connecting frame 704 and the electric roller 705 to move to the left in sync. During the leftward movement, the electric roller 705 stirs the cleaning fluid in the cleaning shell 701 through its upper arc plate. The cleaning fluid flows and washes the upper side of the mask plate, achieving the effect of cleaning the mask plate, ensuring the effectiveness of cleaning the mask plate surface, and improving the efficiency of mask plate immersion cleaning.

[0048] During the leftward movement of the connecting frame 704, when the connecting frame 704 reaches its leftward limit position, the output shaft of the motor 702 reverses. After the connecting frame 704 moves to the right and resets, the motor 702 stops, and the electric roller 705 stops rotating. Then, the first electric push rod 4 drives the mask plate upward through the sliding frame 3, and then continues to transport the mask plate to the right through the electric slider 2. When the mask plate moves to the cleaning liquid removal device, the above mask plate placement and reset operation is repeated. When the mask plate falls onto the platform where the mask plate is placed, the cleaning liquid removal device removes the cleaning liquid from the surface, thus completing the cleaning of one mask plate.

[0049] In the above embodiments, the fixed rod 5 and the corresponding fixed shell 8 are fixedly connected, and the fixed rod 5 and the corresponding sliding block 6 are fixedly connected. However, in the lower embodiment, the fixed shell 8 is slidably connected to the corresponding fixed rod 5 through a connecting block, and the fixed rod 5 and the corresponding sliding block 6 are slidably connected.

[0050] Example 3: When existing mask cleaning devices clamp and fix the mask and clean it, the clamped position of the mask is often neglected and cannot be cleaned. As a result, some dust and impurities remain on the surface of the mask after it has been cleaned by the mask cleaning device, which leads to a decrease in the yield of wafers produced by the photolithography process and reduces the production quality of the entire batch of masks.

[0051] Based on Example 2, referring to Figure 1 , Figure 3 , Figure 4 and Figures 8-12As shown, it also includes a misalignment mechanism, which is mounted on the connecting frame 704. The misalignment mechanism is used to control the movement of the adsorption shell 9. The misalignment mechanism includes two front-to-back mirror-image limiting slide rods 801, both of which are fixed to the connecting frame 704. The limiting slide rods 801 are located above the electric roller 705. The fixed shell 8 is slidably connected to the corresponding fixed rod 5 through a connecting block. The fixed rod 5 is slidably connected to the corresponding sliding block 6. The three suction cylinders 201, which are equidistantly distributed in the left and right directions, are pressed against the corresponding limiting slide rods 801. The limiting slide rods 801 are located on the cleaning shell 705. The portion inside 01 is designed as an isosceles trapezoid, used to sequentially squeeze the three suction cylinders 201 from right to left, so that the adsorption shell 9 temporarily moves upward at this position to release the fixation of the mask plate. The symmetry line of the upper side of the isosceles trapezoidal portion of the limiting slide bar 801 is on the same vertical plane as the axis of the electric roller 705, and the width of the upper side of the isosceles trapezoid is the same as the diameter of the total moving area of ​​the electric roller 705 and its upper arc plate. A swing roller 802 is provided on the lower side of the connecting frame 704. The swing roller 802 is located below the electric roller 705. The swing roller 802 is located at the six supports during mask plate cleaning. Below the support plate 7, several nozzles are evenly distributed on the swing roller 802. These nozzles are connected to a hydraulic pump, which draws cleaning fluid from the cleaning housing 701. The cleaning fluid is then sprayed out from the nozzles on the swing roller 802, achieving the purpose of cleaning the bottom of the mask plate in conjunction with the swing roller 802's swing. Each of the six fixed rods 5 has a fixed hydraulic cylinder 803 fixedly connected inside. The telescopic end of the fixed hydraulic cylinder 803 is fixed to the adjacent fixed housing 8 via a connecting block. The fixed hydraulic cylinder 803 is connected to a second guide pipe 804, which penetrates the corresponding fixed rod 5. The lower side of the fixed rod 5... A third elastic telescopic rod 805 is fixedly connected to the device. The third elastic telescopic rod 805 is connected to the adjacent second guide pipe 804. The telescopic end of the third elastic telescopic rod 805 is fixedly connected to the adjacent sliding block 6. The external hydraulic pump, swing roller 802 and its upper nozzle are all electrically connected to the control panel. The fixed hydraulic cylinder 803, the second guide pipe 804 and the third elastic telescopic rod 805 are all filled with hydraulic oil. By moving the fixed shell 8 and moving the support plate 7 to offset the movement, the cleaning fluid is ensured to clean the upper and lower sides of the mask plate comprehensively, and the cleaning quality of the mask plate by this device is improved.

[0052] Repeat the above-described mask clamping, moving, and cleaning operations. When cleaning the mask begins, motor 702 starts, and connecting frame 704 moves its components to the left. Connecting frame 704 moves limiting slide bar 801 and swing roller 802 synchronously. When electric roller 705 starts, the hydraulic pump connected to the spray head of swing roller 802 starts synchronously. The spray head sprays cleaning fluid to clean the bottom of the mask. Swing roller 802 swings back and forth within a fixed angle range on connecting frame 704. Taking the front limiting slide bar 801 as an example, during the leftward movement of limiting slide bar 801, it passes from right to left between three pairs of fixed shells 8, air extraction cylinder 201, adsorption shell 9, and limiting plate 404. When the left inclined surface of the isosceles trapezoidal part on the left side of limiting slide bar 801 contacts the extruder... The suction cylinder 201 on the right front side is pressed. The suction cylinder 201 drives the adsorption shell 9 and its connected parts to move upward through the fixed shell 8. When the fixed shell 8 moves to the upper side of the isosceles trapezoidal part on the left side of the limiting slide bar 801, the electric roller 705 rotates to clean the clamping part of the adsorption shell 9. As the limiting slide bar 801 moves to the left, when the right side of the isosceles trapezoidal part of the limiting slide bar 801 loses contact with the corresponding suction cylinder 201, the right front fixed shell 8 moves downward to return to the initial position. The adsorption shell 9 re-fixes the mask plate. Through the movement of the two limiting slide bars 801, the two mirrored fixed shells 8 rise synchronously. At the same time, the four adsorption shells 9 are always kept stably fixed to the mask plate, so as to achieve the purpose of the electric roller 705 moving to thoroughly clean the mask plate and its clamping position, ensuring the comprehensiveness of the cleaning of this device.

[0053] As the fixed shell 8 moves upward, it retracts the telescopic end of the fixed hydraulic cylinder 803. Hydraulic oil in the fixed hydraulic cylinder 803 flows into the third elastic telescopic rod 805 through the second guide pipe 804. The telescopic end of the third elastic telescopic rod 805 extends, causing the sliding block 6 and its adjacent parts to move to the left. The support plate 7 moves out of position, ensuring the thoroughness and cleanliness of the cleaning fluid sprayed from the nozzles on the swing roller 802 on the bottom of the mask. When the isosceles trapezoidal portion of the limiting slide rod 801 loses its squeezing force on the fixed shell 8... After pressing, the extension end of the third elastic telescopic rod 805 drives the sliding block 6 to reset, and at the same time, the relevant hydraulic oil flows in the reverse direction. The fixed shell 8 moves downward to return to its initial position. The upper and lower surfaces of the mask are cleaned gradually from right to left. After the connecting frame 704 drives the relevant parts to move and reset in the reverse direction, the above-mentioned mask placement and device reset operations are repeated. Finally, the hydraulic pump, motor 702, electric roller 705 and swing roller 802 are turned off to complete the cleaning of a single mask. The above work process is repeated continuously to continuously clean the mask.

[0054] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A mask holder, comprising a mounting frame (1), wherein an electric slider (2) is slidably connected to the upper side of the mounting frame (1) via an electric slide rail, the electric slider (2) is slidably connected to a sliding frame (3), and a first electric push rod (4) is fixedly connected to the electric slider (2), the telescopic end of the first electric push rod (4) being fixedly connected to the sliding frame (3), characterized in that: It also includes mirror-image and equidistantly distributed fixed rods (5), all of which are fixed to the lower side of the sliding frame (3). A sliding block (6) is provided on the lower side of the fixed rod (5), and a support plate (7) is slidably connected to the lower side of the sliding block (6). A tension spring is fixed between the support plate (7) and the corresponding sliding block (6). A fixed shell (8) is provided on the opposite side of the mirror-image sliding block (6). An adsorption shell (9) is slidably connected to the lower side of the fixed shell (8). A rubber ring is provided on the lower side of the adsorption shell (9). A through hole is provided on the upper side of the adsorption shell (9). An adsorption mechanism for controlling the adsorption of the corresponding adsorption shell (9) is provided on the side wall of the fixed shell (8). A reset mechanism for controlling the reset of the mirror-image and equidistantly distributed support plate (7) is provided on the sliding frame (3). The adsorption mechanism includes an air extraction cylinder (201), which is fixed to the side wall of the corresponding fixed shell (8). The air extraction cylinder (201) communicates with the upper part of the corresponding fixed shell (8). A piston rod (202) is slidably connected inside the air extraction cylinder (201). A tension spring is fixed between the air extraction cylinder (201) and the corresponding piston rod (202). A fixing plate (203) is slidably connected inside the fixed shell (8). A through hole is provided in the middle of the fixing plate (203). A spring is fixed between the fixed plate (203) and the corresponding adsorption shell (9), and a spring is fixed between the fixed plate (203) and the corresponding fixed shell (8). A moving component for controlling the adsorption movement of the corresponding adsorption shell (9) is provided on the fixed plate (203). A control component for controlling the movement of the corresponding support plate (7) is provided on the air pump (201). A clamping component for controlling the squeezing and clamping of the mask plate by the corresponding adsorption shell (9) is provided on the lower side of the sliding block (6). The moving component includes a sliding plate (301), which is slidably connected to the corresponding fixed plate (203). The sliding plate (301) is provided with a through hole that communicates with the through hole of the corresponding fixed plate (203). A spring is fixedly connected between the sliding plate (301) and the adjacent fixed plate (203). A through hole is provided on the upper side of the fixed shell (8). A sliding piece (302) that seals the through hole is slidably connected to the upper side of the fixed shell (8). A pressing rod (303) that presses against the adjacent sliding plate (301) is fixedly connected to the side of the piston rod (202) near the adjacent fixed shell (8). The pressing rod (303) penetrates the adjacent fixed shell (8) and the adjacent vacuum cylinder (201). The pressing rod (303) is limited to the adjacent fixed plate (203). The control component includes a first elastic telescopic rod (401), which is fixed to the side wall of the adjacent vacuum cylinder (201). The telescopic end of the first elastic telescopic rod (401) is pressed and engaged with the adjacent piston rod (202). The first elastic telescopic rod (401) is connected to a liquid guide tube (402). The lower side of the sliding block (6) is provided with a cavity connected to the liquid guide tube (402). The support plate (7) is provided with a groove. The cavity of the sliding block (6) is slidably connected with a limiting block (403) that is limited and engaged with the groove on the adjacent support plate (7). The side of the vacuum cylinder (201) away from the adjacent fixed shell (8) is slidably connected with a limiting plate (404). The side of the piston rod (202) is provided with a blind hole that is limited and engaged with the corresponding limiting plate (404). A spring is fixed between the limiting plate (404) and the adjacent adsorption shell (9). The clamping assembly includes a second elastic telescopic rod (501), which is fixed to the side of the corresponding sliding block (6) away from the corresponding fixed shell (8). The telescopic end of the second elastic telescopic rod (501) is pressed against the adjacent support plate (7). The second elastic telescopic rod (501) is connected to a first guide pipe (502). A double-headed hydraulic cylinder (503) connected to the adjacent first guide pipe (502) is fixed to the upper side of the fixed shell (8). One telescopic end of the double-headed hydraulic cylinder (503) is fixed to the adjacent sliding plate (302). The other telescopic end of the double-headed hydraulic cylinder (503) is fixed to a sliding bent rod (504). The sliding bent rod (504) is inserted into the adjacent fixed shell (8) and is pressed against the adjacent sliding plate (301).

2. The mask plate fixture according to claim 1, characterized in that: The reset mechanism includes a second electric push rod (601), which is fixed to the sliding frame (3). The telescopic end of the second electric push rod (601) penetrates the sliding frame (3). The telescopic end of the second electric push rod (601) is fixed to a connecting plate (602). The connecting plate (602) is fixed to a first extrusion bending plate (603) and a second extrusion bending plate (604) that are mirrored and equidistantly distributed. The first extrusion bending plate (603) is extruded and engaged with the adjacent piston connecting rod (202), and the second extrusion bending plate (604) is extruded and engaged with the adjacent support plate (7).

3. A cleaning device that prevents dead angles, characterized in that: The device includes a cleaning shell (701) and a mask plate fixture as described in claim 2. The cleaning shell (701) is fixedly connected to the mounting frame (1). A motor (702) is fixedly connected to one side of the mounting frame (1). The output shaft of the motor (702) is fixedly connected to a lead screw (703) that penetrates the mounting frame (1). The lead screw (703) is rotatably connected to both the mounting frame (1) and the cleaning shell (701). The lead screw (703) is threadedly connected to a connecting frame (704). The connecting frame (704) is inserted into the cleaning shell (701). An electric roller (705) is provided on the part of the connecting frame (704) located inside the cleaning shell (701).

4. The anti-dead-angle cleaning device according to claim 3, characterized in that: The electric roller (705) is provided with circumferentially and equidistantly distributed arc-shaped plates, the concave surface of which faces the same direction as the rotation direction of the electric roller (705), for rinsing the surface of the quartz mask plate.

5. The anti-dead-angle cleaning device according to claim 4, characterized in that: It also includes a misalignment mechanism, which is disposed on the connecting frame (704). The misalignment mechanism is used to control the movement of the adsorption shell (9). The misalignment mechanism includes a mirror-image limiting slide bar (801). The mirror-image limiting slide bar (801) is fixedly connected to the connecting frame (704). The fixed shell (8) is slidably connected to the corresponding fixed rod (5) through a connecting block. The fixed rod (5) is slidably connected to the corresponding sliding block (6). The three equally spaced suction cylinders (201) are all pressed and engaged with the corresponding limiting slide bar (801). A swing roller (802) is provided on the lower side of the connecting frame (704). The oscillating roller (802) is provided with nozzles that are evenly distributed. Each of the fixed rods (5) that are mirrored and evenly distributed is fixed with a fixed hydraulic cylinder (803). The telescopic end of the fixed hydraulic cylinder (803) is fixed with the connecting block of the adjacent fixed shell (8). The fixed hydraulic cylinder (803) is connected to a second guide pipe (804). The second guide pipe (804) penetrates the corresponding fixed rod (5). The lower side of the fixed rod (5) is fixed with a third elastic telescopic rod (805) that is connected to the adjacent second guide pipe (804). The telescopic end of the third elastic telescopic rod (805) is fixed with the adjacent sliding block (6).

6. The anti-dead-angle cleaning device according to claim 5, characterized in that: The portion of the limiting slide bar (801) located inside the cleaning shell (701) is configured as an isosceles trapezoid. The symmetry line of the upper side of the isosceles trapezoidal portion of the limiting slide bar (801) is located on the same vertical plane as the axis of the electric roller (705), and the width of the upper side of the isosceles trapezoid is the same as the diameter of the total moving area of ​​the electric roller (705) and its upper arc plate.

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