An x-ray photoelectron spectroscopy in-situ electric field sample stage

Abstract

The application discloses an X-ray photoelectron spectroscopy in-situ electric field sample stage, relates to the technical field of sample stages and comprises a base which is installed on the desktop of an X-ray photoelectron spectrometer, and further comprises a driving mechanism which is connected to the base, has a rotating plate connected to the output end, is provided with an adjusting groove in the top, has the rotating plate located in the adjusting groove and is used for driving the rotating plate to lift and overturn, and a detection groove which is provided with a detection channel penetrating through the rotating plate and has slidable bottom baffles installed on the two sides of the detection channel. The driving mechanism, the lifting assembly and the rotating assembly in the driving mechanism can control the lifting and overturning of the rotating plate, the multi-angle detection of sample raw materials in the detection groove of the rotating plate is facilitated, and the detection data is more comprehensive.

Description

Technical Field

[0001] This invention relates to the field of sample stage technology, and in particular to an in-situ electric field sample stage for X-ray photoelectron spectroscopy. Background Technology

[0002] X-ray photoelectron spectroscopy (XPS) utilizes the photoelectric effect to analyze the elemental composition and chemical states of a sample within a range of 1 to 10 nanometers below the sample surface when X-rays are irradiated onto the sample surface. XPS is characterized by its non-destructive, pollution-free, rapid, and highly accurate measurement capabilities, making it one of the most important tools in materials surface science research.

[0003] The X-ray photoelectron spectroscopy in-situ electric field sample stage is used to support sample materials. Existing sample stages have a simple structure, making them inconvenient for lifting, lowering, and flipping operations, reducing the efficiency of multi-angle detection of sample materials and affecting the comprehensiveness of sample detection data. Furthermore, they are not suitable for quickly processing and detecting compressible solid particle sample materials, requiring additional compression equipment to compress the sample material into regular sample blocks before detection, further reducing detection efficiency. Conversely, they are also inconvenient for quickly processing and detecting non-compressible solid particle sample materials, requiring additional material filling and compression operations, further reducing detection efficiency. Summary of the Invention

[0004] The purpose of this invention is to solve the problems of existing technologies where the sample stage structure is simple and inconvenient for rapid processing and detection of non-compressible solid particle sample materials, requiring additional filling of materials and compression operations that reduce detection efficiency. Therefore, this invention proposes an in-situ electric field sample stage for X-ray photoelectron spectroscopy.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: an in-situ electric field sample stage for X-ray photoelectron spectroscopy, comprising a base, wherein the base is mounted on the table of an X-ray photoelectron spectrometer, and further comprising:

[0006] A drive mechanism is connected to a base, and a rotating plate is connected to the output end of the drive mechanism. An adjustment groove is provided in the top of the base, and the gap of the rotating plate is located in the adjustment groove. The drive mechanism is used to drive the rotating plate to lift, lower, and rotate.

[0007] The detection groove has a detection channel through which the rotating plate is opened. Sliding bottom baffles are installed on both sides of the detection channel. The two bottom baffles initially abut against each other, and the upper surface of the two bottom baffles and the inner periphery of the detection channel form a detection groove with an upper opening.

[0008] A rotatable pressure plate is mounted on the top of the base, and the output end of the pressure plate engages with the detection slot after rotation.

[0009] A pretreatment mechanism is connected to the top of the rotating plate. The pretreatment mechanism is used to preheat the sample material and push the sample material into the detection tank.

[0010] The recycling shell is slidably connected to the bottom of the base, and the top of the recycling shell is connected to the bottom of the adjustment groove.

[0011] In the above-mentioned X-ray photoelectron spectroscopy in-situ electric field sample stage, the driving mechanism includes a lifting component and a rotating component. Slide grooves are opened on both sides of the adjustment groove. The two lifting components are connected to the two slide grooves in a one-to-one correspondence, and the output end is connected to the mounting block. The two rotating components are connected to the two sides of the rotating plate, and the output end is connected to the two mounting blocks in a one-to-one correspondence.

[0012] In the above-mentioned X-ray photoelectron spectroscopy in-situ electric field sample stage, the lifting assembly includes a first motor, which is installed at the bottom of the slide groove. A lead screw is coaxially fixedly connected to the output end of the first motor. The mounting block is threadedly connected to the lead screw and slidably connected in the slide groove. An outer shell is fixedly connected to the top of the slide groove, and the top end of the lead screw is rotatably connected to the bottom of the outer shell.

[0013] In the aforementioned X-ray photoelectron spectroscopy in-situ electric field sample stage, the rotating assembly includes a second motor, which is installed inside the side of the rotating plate. The output end of the second motor passes through the rotating plate and is fixedly connected to the mounting block on the same side.

[0014] In the above-mentioned X-ray photoelectron spectroscopy in-situ electric field sample stage, an electric field generator and an energized probe are installed inside the side wall of the detection cell. The electric field generator and the energized probe are used to apply electric fields and electrical signals of different intensities and types according to different sample materials inside the detection cell.

[0015] In the aforementioned X-ray photoelectron spectroscopy in-situ electric field sample stage, the pretreatment mechanism includes a heating plate, a first pushing assembly, and a second pushing assembly. The top of the rotating plate has two preheating slots and two inclined slots. The two preheating slots are symmetrically distributed, with their middle sections connected to the detection slot and their edges connected to the inclined slots. The bottom ends of the two inclined slots are connected to the detection slot. The two heating plates are installed one-to-one at the bottom of the two preheating slots. The top of the rotating plate is connected to two first pushing assemblies, each corresponding to one of the two heating plates. The first pushing assemblies are used to push the sample material on the heating plates towards the detection slot and the two inclined slots. The two sides of the adjustment slot are symmetrically connected to two second pushing assemblies, which are used to push the sample material on the inclined slots into the detection slot and close the top opening of the detection slot.

[0016] In the above-mentioned X-ray photoelectron spectroscopy in-situ electric field sample stage, the first pusher assembly includes two third motors. Both third motors are installed in the preheating tank on the side away from the detection tank, and their output ends are fixedly connected to rotating frames. A pusher plate is slidably connected to the side of the preheating tank near the detection tank. A clearance groove is opened on the pusher plate. The ends of the two rotating frames away from the third motors are slidably and rotatably connected in the clearance groove. The bottom of the pusher plate abuts against the bottom of the preheating tank.

[0017] In the above-mentioned X-ray photoelectron spectroscopy in-situ electric field sample stage, the second pusher assembly includes a first electric pusher rod, which is installed inside the adjustment groove and has a sealing frame snapped onto its output end. The output axis of the first electric pusher rod is parallel to the upper surface of the inclined groove, and the sealing frame is in sliding contact with the bottom of the inclined groove.

[0018] In the above-mentioned X-ray photoelectron spectroscopy in-situ electric field sample stage, two second electric actuators are installed on both sides of the detection slot, and the output ends of the four second electric actuators are engaged with the two sides of the two closed frames one by one.

[0019] In the aforementioned X-ray photoelectron spectroscopy in-situ electric field sample stage, the top of the inclined groove is configured as an inclined shell. A first baffle is rotatably connected to the side of the inclined shell away from the detection groove, and a second baffle is rotatably connected to the side closer to the detection groove. The inclined shell is filled with supplementary material. Two third pushing assemblies are connected to the inner side of the adjustment groove. Each third pushing assembly includes a third electric push rod. The third electric push rod is installed inside the adjustment groove, and its output end is fixedly connected to a telescopic baffle. The output axis of the third electric push rod is parallel to the bottom of the inclined shell. The telescopic baffle slides in contact with the inside of the inclined shell.

[0020] Compared with existing technologies, the advantages of this invention are:

[0021] 1. By setting up a driving mechanism, the lifting and rotating components in the driving mechanism can control the lifting and flipping of the rotating plate, which facilitates multi-angle detection of sample raw materials in the detection groove on the rotating plate, making the detection data more comprehensive.

[0022] 2. By setting up a driving mechanism and a rotatable pressure plate, when the pressure plate rotates so that its output end is above the detection groove, the lifting component drives the rotating plate to rise, which can squeeze the sample material in the detection groove, so that the squeezeable solid particle sample material forms a regular sample block, thereby facilitating the detection of the squeezeable solid particle sample material and improving the detection effect.

[0023] 3. The present invention provides a pretreatment mechanism in which the heating plate in the pretreatment mechanism heats the sample material placed on it, causing volatile impurities on the surface of the sample material to evaporate. The preheated sample material is then pushed into the detection tank by the first and second pushing components in the pretreatment mechanism, which facilitates detection.

[0024] 4. This invention, by setting a second pushing component, a second electric push rod, and a sliding bottom baffle, allows the output end of the first electric push rod in the second pushing component to engage with the sealing frame. When the two sealing frames are driven to close the upper opening of the detection groove, the second electric push rod locks the two sealing frames, facilitating the separation of the output end of the first electric push rod from the sealing frame when it retracts, thus preventing the first electric push rod from affecting the flipping of the detection groove. The rotating component drives the detection groove to flip, and removes the bottom plate that forms the original bottom of the detection. The two flipped sealing frames and the inner wall of the detection channel form a new detection groove with an upper opening, facilitating the detection of the other side of the sample block.

[0025] 5. This invention comprises a driving mechanism, a rotatable pressure plate, a second pushing assembly, a second electric pusher, a sliding bottom baffle, and a third pushing assembly. When the third pushing assembly is in operation, it pushes the supplementary material inside the inclined shell into the detection groove, so that the supplementary material covers the solid particle sample material that cannot be compressed. The gaps between the sample materials are also filled by the supplementary material. Then, through the cooperation of the driving mechanism and the rotatable pressure plate, the two are pressed into a sample regular block. Finally, the detection groove is flipped by the second pushing assembly, the second electric pusher, and the sliding bottom baffle, which facilitates the detection of the side with more solid particle sample material in the sample regular block, so as to obtain accurate detection results.

[0026] 6. By setting up a recovery shell, the present invention allows the sample raw materials and supplementary materials in the detection tank to be directly poured into the recovery shell when the detection tank is rotated and reset after flipping, which facilitates collection and processing. Attached Figure Description

[0027] Figure 1This is a schematic diagram of the overall structure of an in-situ electric field sample stage for X-ray photoelectron spectroscopy proposed in this invention.

[0028] Figure 2 This is a schematic diagram of the structure of an in-situ electric field sample stage for X-ray photoelectron spectroscopy proposed in this invention from another perspective;

[0029] Figure 3 This is a schematic diagram of the internal structure of an in-situ electric field sample stage for X-ray photoelectron spectroscopy proposed in this invention.

[0030] Figure 4 This is a schematic diagram of the internal structure of the adjustment groove of an in-situ electric field sample stage for X-ray photoelectron spectroscopy proposed in this invention.

[0031] Figure 5 This is a schematic diagram of the rotating plate and mounting block of an X-ray photoelectron spectroscopy in-situ electric field sample stage proposed in this invention.

[0032] Figure 6 This is a half-section axonometric structural diagram of the rotating plate of an in-situ electric field sample stage for X-ray photoelectron spectroscopy proposed in this invention.

[0033] Figure 7 This is a schematic diagram of the internal structure of the rotating plate of an in-situ electric field sample stage for X-ray photoelectron spectroscopy proposed in this invention.

[0034] Figure 8 This is a schematic diagram of the closed rotating plate portion of the closed frame of an X-ray photoelectron spectroscopy in-situ electric field sample stage proposed in this invention.

[0035] Figure 9 This is a schematic diagram of the first pusher assembly structure of an in-situ electric field sample stage for X-ray photoelectron spectroscopy proposed in this invention.

[0036] Figure 10 This is a schematic diagram of the tilted shell and the third pusher assembly of an X-ray photoelectron spectroscopy in-situ electric field sample stage proposed in this invention.

[0037] In the diagram: 1. Base; 101. Recycling shell; 102. Outer shell; 2. Adjustment groove; 3. Pressure plate; 4. Slide groove; 5. First motor; 6. Lead screw; 7. Rotating plate; 701. Second motor; 702. Heating plate; 8. Mounting block; 9. Bottom baffle; 10. Third motor; 11. Rotating frame; 12. Push plate; 121. Clearance groove; 13. Detection groove; 14. Inclined shell; 141. First baffle; 142. Second baffle; 15. Enclosure frame; 151. First electric push rod; 16. Second electric push rod; 17. Telescopic baffle; 171. Third electric push rod. Detailed Implementation

[0038] The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0039] Reference Figure 1 An in-situ electric field sample stage for X-ray photoelectron spectroscopy includes a base 1, which is mounted on the table of an X-ray photoelectron spectrometer, and further includes:

[0040] Reference Figure 3 The drive mechanism is connected to the base 1. The output end of the drive mechanism is connected to the rotating plate 7. An adjustment groove 2 is provided in the top of the base 1. The gap of the rotating plate 7 is located in the adjustment groove 2. The drive mechanism is used to drive the rotating plate 7 to lift and flip.

[0041] The drive mechanism includes a lifting component and a rotating component. Slide grooves 4 are opened on both sides of the adjustment groove 2. The two lifting components are connected to the two slide grooves 4 in a one-to-one correspondence, and the output end is connected to the mounting block 8. The two rotating components are connected to the two sides of the rotating plate 7, and the output end is connected to the two mounting blocks 8 in a one-to-one correspondence.

[0042] The lifting assembly includes a first motor 5, which is installed at the bottom of the slide 4. The output end of the first motor 5 is coaxially fixedly connected to a lead screw 6. The mounting block 8 is threadedly connected to the lead screw 6 and slidably connected in the slide 4. The top of the slide 4 is fixedly connected to an outer shell 102, and the top end of the lead screw 6 is rotatably connected to the bottom of the outer shell 102.

[0043] The rotating assembly includes a second motor 701, which is installed inside the side of the rotating plate 7. The output end of the second motor 701 passes through the rotating plate 7 and is fixedly connected to the mounting block 8 on the same side.

[0044] The detection groove 13 has a detection channel through which the rotating plate 7 is opened. Sliding bottom baffles 9 are installed on both sides of the detection channel. The two bottom baffles 9 initially abut against each other, and the upper surfaces of the two bottom baffles 9 and the inner periphery of the detection channel form the detection groove 13 with an upper opening.

[0045] An electric field generator and an energized probe are installed inside the side wall of the detection tank 13. The electric field generator and the energized probe are used to apply electric fields and electrical signals of different intensities and types according to different sample materials inside the detection tank 13.

[0046] A rotatable pressure plate 3 is installed on the top of the base 1. After the output end of the pressure plate 3 rotates, it engages with the detection groove 13.

[0047] Reference Figures 4-7 The pretreatment mechanism is connected to the top of the rotating plate 7. The pretreatment mechanism is used to preheat the sample material and push the sample material into the detection tank 13.

[0048] The pretreatment mechanism includes a heating plate 702, a first pushing component, and a second pushing component. The top of the rotating plate 7 has two preheating grooves and two inclined grooves. The two preheating grooves are symmetrically distributed, and the middle of one side is connected to the detection groove 13, while the edge is connected to the inclined groove. The bottom of the two inclined grooves is connected to the detection groove 13. The two heating plates 702 are installed one-to-one at the bottom of the two preheating grooves. The top of the rotating plate 7 is connected to two first pushing components, which correspond one-to-one with the two heating plates 702. The first pushing components are used to push the sample material on the heating plate 702 onto the detection groove 13 and the two inclined grooves. The two second pushing components are symmetrically connected to both sides inside the adjustment groove 2. The second pushing components are used to push the sample material on the inclined groove into the detection groove 13 and close the top opening of the detection groove 13.

[0049] Reference Figure 9 The first feeding assembly includes two third motors 10. Both third motors 10 are installed in the preheating tank on the side away from the detection tank 13, and their output ends are fixedly connected to rotating frames 11. A push plate 12 is slidably connected to the side of the preheating tank near the detection tank 13. A clearance groove 121 is provided on the push plate 12. The ends of the two rotating frames 11 away from the third motors 10 are slidably and rotatably connected in the clearance groove 121. The bottom of the push plate 12 abuts against the bottom of the preheating tank.

[0050] Reference Figure 8 The second pusher assembly includes a first electric pusher 151, which is installed inside the adjustment groove 2 and has a closing frame 15 attached to its output end. The output axis of the first electric pusher 151 is parallel to the upper surface of the inclined groove, and the closing frame 15 slides in contact with the bottom of the inclined groove.

[0051] Two second electric actuators 16 are installed on both sides of the detection slot 13. The output ends of the four second electric actuators 16 are engaged with the two sides of the two enclosure frames 15 one by one.

[0052] Reference Figure 10 The top of the inclined groove is set as an inclined shell 14. The side of the inclined shell 14 away from the detection groove 13 is rotatably connected to a first baffle 141, and the side closer to the detection groove 13 is rotatably connected to a second baffle 142. The inclined shell 14 is filled with supplementary material. The inner side of the adjustment groove 2 is connected to two third pusher assemblies. The third pusher assembly includes a third electric push rod 171. The third electric push rod 171 is installed inside the adjustment groove 2, and the output end is fixedly connected to a telescopic baffle 17. The output axis of the third electric push rod 171 is set parallel to the bottom of the inclined shell 14. The telescopic baffle 17 slides and contacts the inside of the inclined shell 14.

[0053] Reference Figure 2 and Figure 3 The recycling shell 101 is slidably connected to the bottom of the base 1, and the top of the recycling shell 101 is connected to the bottom of the adjustment groove 2.

[0054] In this invention, the base 1 is installed on the tabletop of the X-ray photoelectron spectrometer, and the two bottom baffles 9 at the bottom of the rotating plate 7 are initially in a closed state, forming the detection groove 13;

[0055] When testing the sample material, the two first motors 5 work, and their output ends rotate to drive the lead screw 6 to rotate. Under the restriction of the slide groove 4, the mounting block 8 connected to the thread on the lead screw 6 slides up and down, thereby adjusting the height of the rotating plate 7 connected to the two mounting blocks 8. After the rotating plate 7 is raised, it is convenient for the staff to place the sample material into the testing groove 13 of the rotating plate 7.

[0056] When testing the sample material in the testing tank 13, the first motor 5 works to raise and lower the rotating plate 7 to a suitable height, and the two second motors 701 work, their output ends rotate, driving the rotating plate 7 and the mounting block 8 to rotate relative to each other, thereby realizing the adjustment of the rotation angle of the entire rotating plate 7.

[0057] Controlling the first motor 5 and the second motor 701 can easily and quickly realize the lifting and angle adjustment of the rotating plate 7, which is convenient for multi-angle detection and makes the data more comprehensive. An electric field generator and an energized probe are installed inside the side wall of the detection tank 13, which can apply electric fields and electrical signals of different intensities and types, such as DC and AC, to the sample material inside the detection tank 13 as needed, so as to facilitate more accurate detection of the sample material.

[0058] When testing sample materials in the form of tiny solid particles or even powder, it is often necessary to compact these materials into regular sample materials and then measure their surface condition in order to improve the detection.

[0059] First, the rotating plate 7 is driven to rise upward to facilitate the staff to place the sample material into the preheating tank. The rotating plate 7 continues to be driven to rise and fall, so that the telescopic baffle 17 is exactly aligned with the position of the first baffle 141. At this time, the closed frame 15 abuts against the top of the inclined groove formed by the inclined shell 14.

[0060] Then restart the electric heating plate 702 in the preheating tank. The electric heating plate 702 heats the sample material in the preheating tank, causing volatile impurities on the surface of the sample material to evaporate. The small particle solid sample material has a large flat area, the electric heating plate 702 has a good heating effect, and the pretreatment time is shorter.

[0061] After the sample material is preheated, the third motor 10 operates and its output end rotates to drive the rotating frame 11 to rotate. The two rotating frames 11 are initially open to both sides, so that the push plate 12 is located in the preheating tank on the side away from the detection tank 13. When the two rotating frames 11 are driven to rotate and close in the middle, the push plate 12 is pushed to move through the clearance groove 121 to push the preheated sample material in the preheating tank into the inclined groove and the detection tank 13.

[0062] At the same time, the first electric push rod 151 works, and its output end extends, causing the closed frame 15 to slide against the upper surface of the inclined shell 14, pushing the sample on the upper surface of the inclined shell 14 into the detection groove 13, and then retracting.

[0063] Finally, control the pressure plate 3 to rotate so that the output end of the pressure plate 3 rotates above the detection groove 13. Control the rotating plate 7 to rise so that the output end of the pressure plate 3 can compact the sample material inside the detection groove 13 to form a regular sample block. After compaction, the pressure plate 3 rotates open so that the sample material can be better detected.

[0064] Multi-face detection of the sample block will be more accurate. After one face detection of the sample block, the two first electric actuators 151 continue to work, and their output ends extend to push the two closing frames 15 to fit together. At this time, the four second electric actuators 16 work and their output ends extend to lock the two closing frames 15. Then, the output ends of the two first electric actuators 151 retract. Under the limitation of the second electric actuators 16 on the closing frames 15, the clamping force between the first electric actuators 151 and the closing frames 15 is overcome, and the first electric actuators 151 and the closing frames 15 are separated, thus completing the limitation and sealing effect of the sample block.

[0065] Then the second motor 701 works to control the rotating plate 7 to flip. After the rotating plate 7 has flipped, it controls the two bottom baffles 9 to open. The two closed frames 15 after flipping and the inner wall of the detection channel form a new detection slot 13 with an upper opening, which facilitates the detection of the other side of the sample regular block.

[0066] After the test is completed, the control plate 7 is flipped directly, so that the sample material falls into the recovery shell 101;

[0067] It also controls the first electric actuator 151 and the second electric actuator 16 to work in opposite directions, so that the output end of the first electric actuator 151 is once again snapped into connection with the enclosure 15, and the enclosure 15 is reset.

[0068] The inclined shell 14 is filled with carbon powder and polymer that will not affect the detection results of the sample material. These auxiliary materials have small particle size and can be used as supplementary materials. Moreover, these materials will not generate interference signals during detection.

[0069] When testing solid particle samples that cannot be compressed, the test results are easily affected by irregular surface shapes.

[0070] After the solid particle sample material that cannot be squeezed is preheated and collected into the detection tank 13, the third electric push rod 171 operates and its output end extends, pushing the telescopic baffle 17 to move. The telescopic baffle 17 moves and pushes open the first baffle 141, so that the supplementary material inside the inclined shell 14 pushes open the second baffle 142. The supplementary material falls into the detection tank 13 and covers the top of the solid particle sample material. The originally loose solid particle sample material is at the bottom of the detection tank 13, and the gaps between the solid particle sample material are also filled. Then, the pressure plate 3 is controlled to rotate so that its output end is above the detection tank 13, and the rotating plate 7 is controlled to rise, squeezing the sample material and supplementary material in the detection tank 13 to form a sample regular block.

[0071] Next, the first electric push rod 151 and the second electric push rod 16 control the sealing frame 15 to close the sample block again. Then, the second motor 701 controls the rotating plate 7 to flip, and the side with more solid particle sample raw material in the sample block is detected to obtain accurate detection results. After the detection is completed, the material inside the detection tank 13 falls into the recovery shell 101.

[0072] The recovery shell 101 is detachable and can be further separated, such as by using soluble supplementary materials and then dissolving and separating the sample raw materials with appropriate solvents, or by using low-adhesion materials and then physically peeling and scraping to separate the sample raw materials.

[0073] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An in-situ electric field sample stage for X-ray photoelectron spectroscopy comprising a base (1) mounted on a tabletop of an X-ray photoelectron spectrometer, characterized in that, Also include: Drive mechanism, drive mechanism is connected on the base (1), the drive mechanism output end is connected with the rotating plate (7), the base (1) top inside is provided with adjusting groove (2), the rotating plate (7) gap is located in adjusting groove (2), the drive mechanism is used for driving rotating plate (7) to lift and overturn; Detection groove (13), the rotating plate (7) is provided with detection channel through, the detection channel both sides are installed with the slidable bottom baffle (9), two the bottom baffle (9) initial state abuts each other, the upper surface of two the bottom baffle (9) and the detection channel inner circumferential side surround the detection groove (13) of upper opening; Rotatable pressing plate (3), the pressing plate (3) is installed on the base (1) top, the pressing plate (3) output end rotates and is engaged with detection groove (13); Pretreatment mechanism, the pretreatment mechanism is connected on the rotating plate (7) top, the pretreatment mechanism is used for preheating treatment to sample material and pushes sample material to detection groove (13); Recycling shell (101), the recycling shell (101) is slidably connected on the base (1) bottom, and the recycling shell (101) top is communicated with the adjusting groove (2) bottom.

2. The in-situ electric field sample stage for X-ray photoelectron spectroscopy according to claim 1, wherein, The drive mechanism includes lifting assembly and rotating assembly, the adjusting groove (2) both sides are provided with sliding slot (4), two lifting assemblies are connected in two sliding slots (4) one by one, and the output end is connected with mounting block (8), two the rotating assembly is connected in the rotating plate (7) both sides, and the output end is connected with two mounting blocks (8) one by one.

3. The in-situ electric field sample stage for X-ray photoelectron spectroscopy according to claim 2, wherein, The lifting assembly includes first motor (5), the first motor (5) is installed in the sliding slot (4) bottom, the first motor (5) output end coaxial fixed connection has lead screw (6), the mounting block (8) is connected on the lead screw (6), and is slidably connected in the sliding slot (4), the sliding slot (4) top fixed connection has external shell (102), the lead screw (6) top end rotationally connected in the external shell (102) bottom.

4. The in-situ electric field sample stage for X-ray photoelectron spectroscopy of claim 2, wherein, The rotating assembly includes second motor (701), the second motor (701) is installed in the rotating plate (7) side, the second motor (701) output end penetrates the rotating plate (7), and is fixedly connected with the mounting block (8) on the same side.

5. The in-situ electric field sample stage for X-ray photoelectron spectroscopy of claim 1, wherein, The detection groove (13) side wall inside is installed with electric field generator and electrified probe, the electric field generator and electrified probe are used for exerting different intensity and type electric field, electrical signal according to the different sample material in detection groove (13) interior.

6. The in-situ electric field sample stage for X-ray photoelectron spectroscopy of claim 1, wherein, The pre-treatment mechanism includes electric heating plates (702), a first pushing assembly and a second pushing assembly, the top of the rotating plate (7) is provided with two preheating grooves and two inclined grooves, the two preheating grooves are symmetrically distributed, and the middle of the opposite side is communicated with the detection groove (13), the edge is communicated with the inclined groove, the bottom of the two preheating grooves is one-to-one correspondingly installed with the two electric heating plates (702), the top of the rotating plate (7) is connected with two first pushing assemblies, the two first pushing assemblies are one-to-one correspondingly connected with the two electric heating plates (702), the first pushing assembly is used for pushing the sample raw material on the electric heating plate (702) to the detection groove (13) and the two inclined grooves, the inside of the adjusting groove (2) is symmetrically connected with two second pushing assemblies on both sides, the second pushing assembly is used for pushing the sample raw material on the inclined groove into the detection groove (13), and the top opening of the detection groove (13) forms a closed state.

7. An in-situ electric field sample stage for X-ray photoelectron spectroscopy according to claim 6, wherein, The first pushing assembly includes two third motors (10), the two third motors (10) are installed on the side of the preheating groove away from the detection groove (13), and the output ends are fixedly connected with rotating frames (11), the side of the preheating groove close to the detection groove (13) is slidably connected with a push plate (12), the push plate (12) is provided with a let go groove (121), the ends of the two rotating frames (11) away from the third motor (10) are slidably and rotatably connected in the let go groove (121), and the bottom of the push plate (12) abuts against the bottom of the preheating groove.

8. The in-situ electric field sample stage for X-ray photoelectron spectroscopy of claim 6, wherein, The second pushing assembly includes a first electric push rod (151), the first electric push rod (151) is installed on the inner side of the adjusting groove (2), and the output end is clamped with a closing frame (15), the output shaft of the first electric push rod (151) is arranged in parallel with the upper surface of the inclined groove, and the closing frame (15) is in sliding contact with the inner bottom of the inclined groove.

9. An in-situ electric field sample stage for X-ray photoelectron spectroscopy according to claim 8, wherein, Two second electric push rods (16) are installed on both sides in the detection groove (13), and the output ends of the four second electric push rods (16) are clamped and matched with both sides of the two closing frames (15) one by one.

10. The in-situ electric field sample stage for X-ray photoelectron spectroscopy of claim 8, wherein, The top of the inclined groove is provided with an inclined shell (14), the side of the inclined shell (14) away from the detection groove (13) is rotatably connected with a first baffle (141), the end close to the detection groove (13) is rotatably connected with a second baffle (142), the inside of the inclined shell (14) is filled with a supplement material, the inner side of the adjusting groove (2) is connected with two third pushing assemblies, the third pushing assembly includes a third electric push rod (171), the third electric push rod (171) is installed on the inner side of the adjusting groove (2), and the output end is fixedly connected with a telescopic baffle (17), the output shaft of the third electric push rod (171) is arranged in parallel with the inner bottom of the inclined shell (14), and the telescopic baffle (17) is in sliding contact with the inside of the inclined shell (14).

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