A probe welding height alignment detection method, device and system

Abstract

The present invention discloses a method, device, and system for detecting the welding height alignment of a probe. The method comprises: starting from a preset initial image capture position, moving an image capture device along the probe height direction, and triggering the image capture device to capture a probe image each time it moves a preset capture interval, and calculating the area of ​​the captured probe image; after the image capture device has moved a preset number of times, determining the position corresponding to the area of ​​the minimum probe image based on the area of ​​all captured probe images; and obtaining the current probe height detection value based on the position corresponding to the initial image capture position and the area of ​​the minimum probe image. The present invention determines the actual position of the probe end face by capturing multiple images at different positions along the probe height direction, thereby obtaining the actual height data of the probe.

Description

Technical Field

[0001] The present invention belongs to the technical field of probe welding, and in particular relates to a method, equipment and system for detecting probe welding height alignment. Background Art

[0002] During the probe soldering process on wafer test probe cards, to ensure that each probe has the same height after soldering, the probes must be aligned before soldering. However, the current probe height must be known before alignment. However, due to the extremely small size of the probe tip, it is impossible to accurately measure it using a traditional laser rangefinder. Summary of the Invention

[0003] The purpose of the present invention is to address the problems existing in the prior art and provide a probe welding height alignment detection method, equipment and system. By capturing multiple images at different positions along the probe height direction, the actual position of the probe end face is determined, and the actual height data of the probe is obtained.

[0004] According to one aspect of the present invention, a method for detecting probe welding height alignment is provided, comprising:

[0005] Starting from a preset image capture initial position, the image capture device is moved along the probe height direction, and each time it moves a preset capture interval, the image capture device is triggered to capture a probe image, and the area of ​​the captured probe image is calculated;

[0006] After the image capture device has moved a preset number of times, determining a position corresponding to the smallest probe image area based on the areas of all captured probe images;

[0007] The height detection value of the current probe is obtained according to the position corresponding to the initial position of image capture and the area of ​​the minimum probe image.

[0008] As a further technical solution, the method further includes: obtaining height measurement accuracy, and determining the capture interval according to the height measurement accuracy.

[0009] As a further technical solution, the method further includes: obtaining an error value of the image capturing device, and determining the number of movements of the image capturing device according to the error value.

[0010] As a further technical solution, starting from a preset image capture initial position, moving the image capture device along the probe height direction also includes: starting from a preset image capture initial position, moving the image capture device from bottom to top along the height direction; or starting from a preset image capture initial position, moving the image capture device from top to bottom along the height direction.

[0011] As a further technical solution, after obtaining the height detection value of the current probe, the method further includes: moving the probe up and down according to the height detection value.

[0012] According to one aspect of the present invention, there is provided a probe welding height alignment detection device, comprising: a moving device and an image capturing device, wherein the moving device is configured to move the image capturing device along the probe height direction starting from a preset image capturing initial position, and to send a trigger signal to the image capturing device each time it moves a preset capturing interval; the image capturing device is configured to capture a probe image according to the trigger signal, calculate the area of ​​the captured probe image, and after the image capturing device has moved a preset number of times, determine the position corresponding to the area of ​​the minimum probe image according to the areas of all captured probe images, and obtain the height detection value of the current probe according to the position corresponding to the image capturing initial position and the area of ​​the minimum probe image.

[0013] As a further technical solution, the image capture device includes: a probe focusing detection objective lens, a probe focusing detection lens and a probe focusing detection camera. The probe focusing detection objective lens is used to concentrate light onto a focus, the probe focusing detection lens is used to focus light onto a camera sensor, and the probe focusing detection camera is used to convert the light captured by the lens into an image and record and process the image.

[0014] As a further technical solution, the moving device is connected to the probe focusing detection lens and is used to lift and lower the probe focusing detection lens.

[0015] As a further technical solution, the probe focusing detection lens is also connected to a lens level adjustment mechanism.

[0016] According to one aspect of the present invention, a probe welding automatic alignment system is provided, comprising a probe clamping and moving mechanism, and the probe welding height alignment detection device. The probe clamping and moving mechanism is used to lift and move the probe according to the probe height detection value output by the probe welding height alignment detection device.

[0017] Optionally, the probe is equipped with a probe clamping jaw, and the probe clamping jaw is connected to a clamping driving mechanism and a probe clamping jaw lifting mechanism.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] The present invention provides a probe welding height alignment detection method, which adopts a method of layer-by-layer image capture at different positions along the probe height direction to determine the actual position of the probe end face, and determines the current probe height detection value through the relative distance between the actual position of the probe end face and the initial position of image capture, thereby realizing the height measurement of extremely small probe vertices.

[0020] The present invention provides a probe welding height alignment detection device, which moves an image capture device layer by layer through a moving device and triggers the image capture device to work. The image capture device captures probe images at different positions along the probe height direction, and determines the actual position of the probe end face by calculating and comparing the probe image area, thereby realizing the detection of the actual height position of the probe.

[0021] The present invention provides an automatic probe welding alignment system, which adjusts the probe height according to the actual probe height data provided by the probe welding height alignment detection equipment, ensuring that the height of each probe after welding is consistent, thereby increasing the contact effectiveness during the wafer testing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic flow chart of a probe welding height alignment detection method provided in an embodiment of the present invention.

[0023] Figure 2 A schematic structural diagram of a probe welding height alignment detection device provided in an embodiment of the present invention.

[0024] Figure 3 A schematic diagram of probe focusing height detection provided by an embodiment of the present invention.

[0025] Figure 4 A schematic structural diagram of an automatic probe welding alignment system provided in an embodiment of the present invention.

[0026] In the figure: 1-probe clamping jaw lifting mechanism; 2-probe clamping jaw angle adjustment mechanism; 3-clamping jaw clamping drive mechanism; 4-probe clamping jaw; 5-probe; 6-probe welding carrier mechanism; 7-probe focusing detection objective lens; 8-lens fixing seat; 9-coaxial laser point light source; 10-lens horizontal adjustment mechanism; 11-probe focusing detection lens; 12-focusing detection lens lifting mechanism; 13-probe focusing detection camera. DETAILED DESCRIPTION

[0027] The following will clearly and completely describe the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] An embodiment of the present invention provides a method for detecting the welding height alignment of a probe. The method obtains the actual position of the probe end face by taking multiple layers of high-definition photos along the height direction of the probe, and then determines the actual height data of the probe, thereby solving the problem that traditional laser rangefinders cannot accurately measure extremely small probe vertex height information.

[0029] like Figure 1 As shown, the probe welding height alignment detection method provided by the embodiment of the present invention includes:

[0030] Step 1: Starting from a preset image capture initial position, move the image capture device along the probe height direction, and trigger the image capture device to capture a probe image every time it moves a preset capture interval, and calculate the area of ​​the captured probe image;

[0031] Step 2, after the image capture device moves a preset number of times, determining the position corresponding to the smallest probe image area based on the areas of all captured probe images;

[0032] Step 3: Obtain the height detection value of the current probe according to the position corresponding to the initial position of image capture and the area of ​​the minimum probe image.

[0033] It should be noted that the initial image capture position is a pre-set position that can be set according to actual needs and is not limited in this invention. This initial image capture position can be considered the initial layer of image capture. Starting from this initial layer, the image capture device is moved along the probe height direction. Each movement of one capture spacing triggers the image capture device to capture a probe image, thereby achieving multi-layer image capture. Image capture can be understood as the act of obtaining a probe image by photographing, imaging, or capturing using a camera or other image capture device.

[0034] In this embodiment of the present invention, before step 1, the process further includes obtaining a height measurement accuracy and determining a capture pitch based on the height measurement accuracy. The capture pitch can be considered the distance between two adjacent layers. Specifically, if the height measurement accuracy is 1 μm, then the layer-to-layer spacing is 1 μm, i.e., the image capture pitch is 1 μm.

[0035] In this embodiment of the present invention, prior to step 1, the process further includes obtaining an error value of the image capture device and determining a number of image capture device movements based on the error value. The number of image capture device movements corresponds to the number of image captures, with each capture considered as capturing one probe image layer. Specifically, the number of captured layers is correlated with the product's error value. The greater the error, the more layers are captured to cover the product's error. Ideally, at least 10 layers are required.

[0036] As a preferred embodiment, the probe welding height alignment detection method provided in the embodiment of the present invention determines the actual height data of the probe end face by setting the initial image capture position of the focus detection lens, which is the reference position of the height calculation origin, and then focusing the detection lens downward to take pictures layer by layer. If the spacing between each layer is 1μm and the smallest area calculated by the layer is 12, then the current probe end face height is the origin -12μm. Since the origin position is a calibrated known height, the actual height of the current probe end face can be calculated based on the relationship between the origin and 12μm.

[0037] It should be noted that capturing a probe image using an image capture device such as a camera and calculating the area of ​​the probe image is essentially calculating the number of pixels in the image. This calculation method is a mature technology in this field and will not be described in detail in this invention. For example, among the captured probe images, the position corresponding to the probe image with the least number of image pixels is the position of the probe end face. The distance between this position and the initial position of the image capture is the distance deviation of the probe end face relative to the initial position. Based on this distance deviation and the pre-calibrated origin position, the actual height of the probe can be obtained.

[0038] As a preferred embodiment, in the probe welding height alignment detection method provided in the embodiment of the present invention, starting from a preset image capture initial position, the image capture device is moved along the probe height direction, and also includes: starting from a preset image capture initial position, the image capture device is moved from bottom to top along the height direction.

[0039] Specifically, the focus detection lens sets its initial image capture position, which serves as the reference point for height calculation. The focus detection lens then moves upward, capturing each layer. If the layer spacing is 1μm and the smallest layer area calculated is 12, then the current probe end face height is 12μm minus the origin. Since the origin is a known, calibrated height, the actual probe end face height can be calculated using the 12μm-origin equation.

[0040] As a preferred embodiment, the probe welding height alignment detection method provided in an embodiment of the present invention further includes, after obtaining the current probe height detection value, raising and lowering the probe based on the height detection value. After the probe height detection is completed, the probe is raised and lowered, and the movement amount is the detection value, thereby ensuring that the height of all welded probes is consistent.

[0041] Based on the same inventive concept as the aforementioned method, an embodiment of the present invention further provides a probe welding height alignment detection device. During execution, the device implements the aforementioned probe welding height alignment detection method to obtain actual height data of the probe.

[0042] like Figure 2As shown, the probe welding height alignment detection equipment provided by the embodiment of the present invention includes: a moving device and an image capturing device, wherein the moving device is used to move the image capturing device along the probe height direction starting from a preset image capturing initial position, and sends a trigger signal to the image capturing device every time it moves a preset capturing interval; the image capturing device is used to capture the probe image according to the trigger signal, calculate the area of ​​the captured probe image, and after the image capturing device moves a preset number of times, determine the position corresponding to the area of ​​the minimum probe image according to the areas of all captured probe images, and obtain the height detection value of the current probe according to the position corresponding to the image capturing initial position and the area of ​​the minimum probe image.

[0043] The moving device is connected to the probe focus detection lens and is used to lift the probe focus detection lens. Therefore, in the following description, the moving device is regarded as a focus detection lens lifting mechanism.

[0044] Preferably, the image capture device includes: a probe focus detection objective lens, a probe focus detection lens and a probe focus detection camera, wherein the probe focus detection objective lens is used to concentrate light onto a focus, the probe focus detection lens is used to focus light onto a camera sensor, and the probe focus detection camera is used to convert light captured by the lens into an image and record and process the image.

[0045] When the device is used to detect the probe height, the visual system composed of the probe focus detection objective lens, the probe focus detection lens and the probe focus detection camera takes multiple layers of photos of the probe end point. The number of photo layers can be determined according to the measurement accuracy. Then the area of ​​each layer of image is calculated and compared based on the principle that the image area of ​​the probe end face is the smallest under positive focus (e.g. Figure 3 As shown in the figure, the smallest layer is the actual height of the probe end face. The actual height data of the probe end face can be calculated through the position relationship of the lifting axis corresponding to each layer.

[0046] Furthermore, during the photographing process, the visual system consisting of the probe focusing detection objective lens, the probe focusing detection lens and the probe focusing detection camera is moved by the focusing detection lens lifting mechanism, and each time the preset capture interval is moved, the camera is triggered to capture a probe image.

[0047] Optionally, the probe focus detection lens is further connected to a lens level adjustment mechanism for adjusting the horizontal position of the lens.

[0048] Optionally, the probe focusing detection lens is further configured with a lens fixing seat for fixing the lens.

[0049] Optionally, the visual system is further configured with a coaxial laser point light source for providing light source when capturing images.

[0050] Based on the same inventive concept as the above embodiment, the embodiment of the present invention also provides a probe welding automatic alignment system, such as Figure 4 As shown, it includes a probe clamping and moving mechanism, and the probe welding height alignment detection device. The probe clamping and moving mechanism is used to lift and move the probe according to the probe height detection value output by the probe welding height alignment detection device.

[0051] Optionally, the probe is equipped with a probe jaw connected to a jaw clamping drive mechanism and a probe jaw lifting mechanism. The probe jaw is used to clamp the probe. The jaw clamping drive mechanism is used to drive the jaw to clamp. The probe jaw lifting mechanism is used to raise and lower the probe according to the probe height detection value output by the probe welding height alignment detection device to ensure that the height of all welded probes is consistent.

[0052] Furthermore, the probe clamp is also connected to a probe clamp angle adjustment mechanism for adjusting the angle of the probe clamp. It should be noted that the embodiment of the present invention does not involve the angle adjustment of the probe clamp when performing probe height alignment detection. The angle adjustment function is used for other welding positioning requirements besides height alignment.

[0053] Furthermore, the automatic probe welding alignment system provided in the embodiment of the present invention is also provided with a probe welding carrier mechanism for probe welding.

[0054] In summary, the present invention solves the problem of probe height measurement before welding. By utilizing the probe welding height alignment method provided by the present invention, all welded probes can be on a reference plane, ensuring that all probes can fully contact the wafer PAD area when testing the wafer, protecting the needle marks on the wafer surface from being too large or too deep and damaging the wafer body, thereby increasing the test yield.

[0055] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A probe welding height alignment detection method, characterized in that: include: Starting from a preset image capture initial position, the image capture device is moved along the probe height direction, and each time it moves a preset capture interval, the image capture device is triggered to capture a probe image, and the area of ​​the captured probe image is calculated; After the image capture device has moved a preset number of times, determining a position corresponding to the smallest probe image area based on the areas of all captured probe images; The height detection value of the current probe is obtained according to the position corresponding to the initial position of image capture and the area of ​​the minimum probe image.

2. A probe welding height alignment detection method according to claim 1, characterized in that: The method further includes: acquiring height measurement accuracy, and determining the capture interval according to the height measurement accuracy.

3. The method for detecting probe welding height alignment according to claim 1, wherein: The method further includes obtaining an error value of the image capturing device, and determining the number of movements of the image capturing device according to the error value.

4. The method for detecting probe welding height alignment according to claim 1, wherein: Starting from a preset image capture initial position, moving the image capture device along the probe height direction also includes: starting from a preset image capture initial position, moving the image capture device from bottom to top along the height direction; or starting from a preset image capture initial position, moving the image capture device from top to bottom along the height direction.

5. The method for detecting probe welding height alignment according to claim 1, wherein: After obtaining the height detection value of the current probe, the method further includes: moving the probe up and down according to the height detection value.

6. A probe welding height alignment detection device, characterized in that: include: A moving device and an image capturing device, wherein the moving device is configured to move the image capturing device along the probe height direction starting from a preset image capturing initial position and to send a trigger signal to the image capturing device each time the moving device moves a preset capturing interval; The image capture device is used to capture the probe image according to the trigger signal, calculate the area of ​​the captured probe image, and after the image capture device moves a preset number of times, determine the position corresponding to the area of ​​the minimum probe image based on the areas of all captured probe images, and obtain the height detection value of the current probe based on the position corresponding to the initial position of image capture and the area of ​​the minimum probe image.

7. The probe welding height alignment detection device according to claim 6, characterized in that: The image capture device includes: a probe focus detection objective lens, a probe focus detection lens and a probe focus detection camera. The probe focus detection objective lens is used to concentrate light onto a focus, the probe focus detection lens is used to focus light onto a camera sensor, and the probe focus detection camera is used to convert the light captured by the lens into an image and record and process the image.

8. The probe welding height alignment detection device according to claim 7, characterized in that: The moving device is connected to the probe focusing detection lens and is used to lift and lower the probe focusing detection lens.

9. The probe welding height alignment detection device according to claim 6, characterized in that: The probe focusing detection lens is also connected to a lens level adjustment mechanism.

10. A probe welding automatic alignment system, characterized in that: It comprises a probe clamping and moving mechanism, and the probe welding height alignment detection device according to any one of claims 6 to 9, wherein the probe clamping and moving mechanism is used to lift and move the probe according to the probe height detection value output by the probe welding height alignment detection device.

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