Vibration measurement device

Abstract

A vibration measurement device (20) mounted on a transport vehicle (3) is provided with: a vibration measurement unit (21) that measures vibration; a position information acquisition unit (22) that acquires position information indicating the position of the transport vehicle (3); a state information acquisition unit (23) that acquires transport vehicle state information indicating the state of the transport vehicle (3); a recording unit (24) that records the measurement results by the vibration measurement unit (21), the transport vehicle state information, and the position information in association with each other; and an output unit (25) that outputs the information recorded in the recording unit (24).

Description

Technical Field

[0001] The present invention relates to a vibration measuring device mounted on a transport vehicle. Background Art

[0002] An example of such a vibration measuring device is disclosed in the following Patent Document 1 (Japanese Patent Application Laid-Open No. 2008-181245). In the following description of the background art, the symbols and names in Patent Document 1 are cited in parentheses.

[0003] The vibration measuring device (vibration measuring device 21) of patent document 1 is mounted on a transport vehicle (unmanned transport vehicle 10) that travels along a travel path (travel track 2). In addition, the transport vehicle (10) is also equipped with a travel position detection sensor (22) that detects the current travel position, and the transport vehicle (10) communicates the travel position at which a vibration value above a predetermined value is detected with a subsequent transport vehicle (10). Moreover, when the transport vehicle (10) is traveling at the position where a vibration value above a predetermined value is detected by communication from a preceding transport vehicle (10), control is performed to decelerate the travel speed. In addition, when the vibration detector (21) of the transport vehicle (10) detects a vibration value above a predetermined value, control is also performed to decelerate the travel speed of the transport vehicle (10). Summary of the invention

[0004] Patent document 1 states that by mounting a vibration measuring device (21) and a travel position detection sensor (22) on a transport vehicle (10), even in the event of an unexpected situation such as damage to the travel track, the abnormality can be confirmed by the passage of only one transport vehicle (10), thereby preventing the damage caused by vibration from expanding.

[0005] However, when the vibration measuring device is mounted on a transport vehicle, the vibration of the transport vehicle may be increased due to the influence of the transport vehicle's state such as acceleration and deceleration. Therefore, even if a large vibration is measured on a transport vehicle, it cannot be determined that the vibration is caused by a bad condition of the travel path such as the travel track.

[0006] Therefore, it is required to appropriately analyze the cause of the measured vibration.

[0007] In view of the above, the vibration measuring device is characterized in that it is a vibration measuring device mounted on a transport vehicle, comprising: a vibration measuring unit that measures vibration; a position information acquisition unit that acquires position information indicating the position of the transport vehicle; a state information acquisition unit that acquires transport vehicle state information indicating the state of the transport vehicle; a recording unit that records the measurement result of the vibration measuring unit, the transport vehicle state information, and the position information in association with each other; and an output unit that outputs the information recorded in the recording unit.

[0008] According to this configuration, it is possible to obtain information showing the vibration measured at each position of the travel path of the transport vehicle and the state of the transport vehicle at that position. As a result, the user who receives the output of this information can properly grasp the information about the position of the travel path of the transport vehicle where the vibration becomes larger and the state of the transport vehicle at that time. That is, according to the vibration measuring device involved in this configuration, it is possible to output information for properly analyzing the cause of the measured vibration.

[0009] Further features and advantages of the vibration measuring device will become apparent from the following description of the embodiments described with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 This is a top view of an article conveying facility that performs vibration measurement using a vibration measuring device. Figure 2 This is a side view of a transport vehicle equipped with a vibration measuring device. Figure 3 It is a schematic block diagram showing the configuration of a transport vehicle and a vibration measuring device. Figure 4 This is a diagram for explaining the operating state of the guide wheel. Figure 5 This is a diagram for explaining the operating state of the guide wheel. Figure 6 This is a diagram illustrating the detection area of ​​the object detection sensor of the transport vehicle. Figure 7 This is a diagram illustrating the detection area of ​​the object detection sensor of the transport vehicle. Figure 8 It is a schematic block diagram showing the configuration of a container and a vibration measuring device. DETAILED DESCRIPTION

[0011] An embodiment of the vibration measuring device 20 will be described with reference to the drawings. In this embodiment, an example will be described in which the vibration measuring device 20 is mounted on the transport vehicle 3 that transports articles and the vibration measuring device 20 performs vibration measurement. Figure 1 1 is a top view of the article transport facility 200 that performs vibration measurement using the vibration measuring device 20 . Figure 2 It is a side view of the transport vehicle 3 on which the vibration measuring device 20 is mounted. Figure 3 It is a schematic block diagram showing the configuration of the transport vehicle 3 and the vibration measuring device 20 . Figure 4 and Figure 5 1 is an explanatory diagram of the operating state of the guide wheel 17 provided in the transport vehicle 3. In the following description, the direction along the travel path 1 is referred to as the travel direction Y, and the direction along the horizontal plane and perpendicular to the travel direction Y is referred to as the width direction X. The vertical direction Z is a direction perpendicular to the travel direction Y and the width direction X.

[0012] The article conveying device 200 includes: a travel track 2, which is suspended and supported on the ceiling and is arranged along the travel path 1; and a conveying vehicle 3, which is suspended and supported on the travel track 2, travels along the travel path 1 on the travel track 2, and conveys the container W. That is, the conveying vehicle 3 described in this embodiment is a so-called ceiling conveying vehicle. The conveying vehicle 3 conveys, for example, a FOUP (Front Opening Unified Pod) containing articles such as wafers as materials for semiconductor substrates as a container W.

[0013] like Figure 1 As shown, the travel path 1 includes, for example, a ring-shaped main path 1M, a plurality of ring-shaped sub-paths 1S passing through a plurality of processing devices 202, and a maintenance path 1C provided in a maintenance area E2 described later. The travel path 1 is one-way traffic. The transport vehicle 3 travels on the travel path 1 from the upstream side of the travel direction Y toward the downstream side of the travel direction Y. The travel path 1 includes a transport area E1 as an area passed when transporting a container W and a maintenance area E2 as an area passed when performing maintenance on the transport vehicle 3. In the maintenance area E2, for example, a maintenance elevator 204 is provided for maintenance, and the maintenance elevator 204 is used to lower the transport vehicle 3 suspended on the travel track 2 to the ground. As shown in FIG. Figure 4 and Figure 5 As shown, the transport vehicle 3 is guided by a pair of travel rails 2 .

[0014] The processing device 202 is, for example, a semiconductor processing device for performing various processes such as exposure processing or etching processing. In this case, the FOUP is transported as a container W in the article transport device 200. In addition, the container W and the article contained in the container W may also be other objects. For example, the transport vehicle 3 may also transport the intermediate mask used for the exposure processing of the wafer in the manufacturing process of the semiconductor substrate as an article and the intermediate mask box containing the intermediate mask as a container W. In each processing device 202, a loading table 203 is arranged in parallel.

[0015] like Figure 2As shown, the transport vehicle 3 includes: a travel mechanism 5, which is guided by a travel track 2 arranged to be suspended from the ceiling along the travel path 1, and travels along the travel path 1; and a transport vehicle body 12, which is located below the travel track 2 and is suspended from the travel mechanism 5. The transport vehicle 3 includes a holding mechanism 6 for suspending and holding the container W and a lifting mechanism 7 for raising and lowering the holding mechanism 6. Figure 2 As shown, the transport vehicle 3 transports the container W while traveling in a state where the holding mechanism 6 is raised.

[0016] like Figure 2 , Figure 4 as well as Figure 5 As shown, each traveling mechanism 5 is provided with a pair of traveling wheels 15 that are rotationally driven by an electric traveling actuator 35. The traveling actuator 35 is, for example, a motor (traveling motor). The traveling wheels 15 roll on a traveling surface formed by the upper surface of each traveling rail 2. Although not shown in detail, the traveling mechanism 5 is provided with a pair of traveling auxiliary wheels 16 that are freely rotatable around an axis along the vertical direction Z (around the vertical axis) in a state of contacting the inner side surfaces of each pair of traveling rails 2.

[0017] like Figure 4 and Figure 5 As shown, in the branch section of the travel path 1, there is a guide track 13 extending in the direction along the travel direction Y of the transport vehicle 3. In addition, although the illustration is omitted, the same guide track 13 is also provided in the confluence section of the travel path 1. The guide track 13 includes a pair of guide surfaces 14 (a first guide surface 14a and a second guide surface 14b). The pair of guide surfaces 14 (the first guide surface 14a and the second guide surface 14b) are the first guide surface 14a and the second guide surface 14b facing the opposite sides of the width direction X orthogonal to the travel direction Y and extending along the travel direction Y respectively. The transport vehicle 3 is provided with a guide wheel 17 that rotates around the longitudinal axis along the up-down direction Z (around the up-down axis). The guide wheel 17 is provided in a manner that allows the guide rail 13 disposed at the center between the pair of left and right travel rails 2 to change position further to the right and left, and the guide wheel 17 rotates in contact with the first guide surface 14a of the right guide surface 14 of the guide rail 13 or the second guide surface 14b of the left guide surface 14.

[0018] As described below, the vehicle control unit 4 included in the transport vehicle 3 causes the travel mechanism 5 to perform a switching operation to switch which of the pair of guide surfaces 14 the guide wheels 17 selectively contact in the diverging section and the merging section.

[0019] Figure 4This is an example of a case where the transport vehicle 3 is caused to travel in a path to the right in the travel direction Y in the branch section (in this example, to travel straight). In this case, the vehicle control unit 4 positions the guide wheel 17 on the first guide surface 14a side of the guide rail 13 (to the right in the travel direction Y). As a result, the transport vehicle 3 travels in a state where the first guide surface 14a of the guide rail 13 is in contact with the guide wheel 17. Figure 4 As shown, when the transport vehicle 3 passes through the right side (the first side X1 in the width direction) of the branch section and goes straight, the left and right side (here, the left side) of the pair of travel tracks 2 is interrupted, and the left travel wheel 15 and the travel auxiliary wheel 16 are in a state of being disengaged. Figure 4 In the figure, the auxiliary travel wheels 16 are omitted for simplicity. However, the guide rail 13 receives and guides the load of the transport vehicle 3 via the guide wheels 17, thereby preventing the transport vehicle 3 from falling off the travel rail 2, and the transport vehicle 3 can travel straight in the branch section.

[0020] Figure 5 This is an example of making the transport vehicle 3 travel along a path to the left in the driving direction Y in the branch section (in this example, branching along a curved path). In this case, the vehicle control unit 4 makes the guide wheel 17 located on the second guide surface 14b side of the guide rail 13 (on the left side in the driving direction Y). As a result, the transport vehicle 3 is guided in a state where the second guide surface 14b of the guide rail 13 is in contact with the guide wheel 17. Figure 5 As shown, when the transport vehicle 3 branches through the path on the left side (the second side X2 in the width direction) in the branch section, the travel track 2 on one side (here, the right side) of the pair of travel tracks 2 is interrupted, and the right travel wheel 15 and the travel auxiliary wheel 16 become a wheel-off state. However, the guide rail 13 receives and guides the load supporting the transport vehicle 3 via the guide wheel 17, thereby preventing the transport vehicle 3 from falling off the travel track 2, and the transport vehicle 3 can branch and travel in the branch section.

[0021] like Figure 3 As shown, the transport vehicle 3 includes a position detection sensor 8 , a speed sensor 9 , an object detection sensor 10 , and a communication unit 11 in addition to the above.

[0022] The vehicle control unit 4 controls the movement of the transport vehicle 3. For example, the vehicle control unit 4 can communicate information with the device control unit H that manages the entire article transport facility 200 through wireless communication via the communication unit 11. Then, based on the transport instruction from the device control unit H, the vehicle control unit 4 autonomously controls the transport vehicle 3 to travel, transport the container W between different loading platforms 203, stop above the designated loading platform 203, and raise or lower the holding mechanism 6, thereby transferring the container W.

[0023] In order to detect the position of the transport vehicle 3, a position detection sensor 8 is used. Figure 3 As shown, on the driving path 1, a position mark B showing the position of the driving path 1 is arranged along the driving path 1. The position mark B can be, for example, a one-dimensional or two-dimensional bar code or a mark with numbers or characters recorded on it. The position detection sensor 8 can be a barcode reader or an image recognition device, or a character recognition device that recognizes numbers or characters. The position detection sensor 8 can derive the travel distance of the transport vehicle 3 using a sensor that detects the rotation angle of the axle (not shown) of the driving wheel 15. Then, the position detection sensor 8 can detect the current position of the transport vehicle 3 on the driving path 1 based on the travel distance of the transport vehicle 3 since the position mark B was detected. The position information detected by the position detection sensor 8 is transmitted to the vehicle control unit 4. In this way, the transport vehicle 3 can use multiple position marks B to detect the position of the driving path 1. The transport vehicle 3 sends the detected position information to the device control unit H in sequence, and the device control unit H can send the transport instruction generated based on the position information to the transport vehicle 3.

[0024] In order to detect the travel speed of the transport vehicle 3, a speed sensor 9 is used. The speed sensor 9 can be implemented, for example, using a sensor that detects the rotation angle of the axle (not shown) of the running wheel 15. In this case, the speed sensor 9 can derive the rotation speed of the axle based on the rotation angle of the axle (not shown) of the running wheel 15, and derive the travel speed of the transport vehicle 3 based on the rotation speed. Moreover, the speed sensor 9 only needs to transmit the derived travel speed to the vehicle control unit 4. Alternatively, the speed sensor 9 can sequentially transmit the measured rotation angles of the axle (not shown) of the running wheel 15 to the vehicle control unit 4, and the vehicle control unit 4 derives the travel speed of the transport vehicle 3 based on the value of the rotation angle.

[0025] The object detection sensor 10 is used to detect an object that becomes an obstacle to the traveling transport vehicle 3. For example, there are a plurality of transport vehicles 3 on the travel path 1, and the plurality of transport vehicles 3 travel simultaneously. Therefore, in order to prevent collision with other transport vehicles 3, the transport vehicle 3 is provided with an object detection sensor 10 that detects an object that exists in a set area in front of the travel direction Y.

[0026] Figure 6 and Figure 7 3 is a diagram illustrating the detection area 18 of the object detection sensor 10 of the transport vehicle 3. Figure 6 As shown in FIG. 1 , when the front of the transport vehicle 3 in the driving direction Y is a straight section, the detection area 18 set in front of the transport vehicle 3 in the driving direction Y is shaped to extend longer along the driving direction Y than the width direction X. In contrast, Figure 7As shown, when there is a curved section ahead of the transport vehicle 3 in the driving direction Y, the detection area 18 set ahead of the transport vehicle 3 in the driving direction Y is shaped to extend longer along the width direction X than the driving direction Y in accordance with the curved driving path 1.

[0027] Next, the vibration measuring device 20 mounted on the transport vehicle 3 will be described. Figure 3 As shown, the vibration measuring device 20 includes: a vibration measuring unit 21 that measures vibration; a position information acquisition unit 22 that acquires position information indicating the position of the transport vehicle 3; a state information acquisition unit 23 that acquires transport vehicle state information indicating the state of the transport vehicle 3; a recording unit 24 that records the measurement result of the vibration measuring unit 21, the transport vehicle state information, and the position information in association with each other; and an output unit 25 that outputs the information recorded in the recording unit 24. In addition, the vibration measuring device 20 includes an information communication function, an information calculation processing function, an information storage function, etc. As described later, at least a part of these functions may be used to realize the functions of the vibration measuring unit 21, the position information acquisition unit 22, the state information acquisition unit 23, the recording unit 24, and the output unit 25. The vibration measuring device 20 may be realized by a single device equipped with these functions, or may be realized by a plurality of devices equipped with these functions.

[0028] The vibration measuring unit 21 can be implemented using a sensor that can measure physical quantities representing vibrations, such as the amplitude, frequency, and acceleration of vibrations. The vibration measuring unit 21 can also be configured to measure vibrations in three mutually orthogonal directions, namely, the X direction, the Y direction, and the Z direction, for example. Alternatively, the vibration measuring unit 21 can also be configured to measure vibrations in two directions or one direction among the X direction, the Y direction, and the Z direction. The vibration measuring unit 21 can also obtain time information for the time when the measurement result of the vibration is obtained together with the measurement result of the vibration.

[0029] The position information acquisition unit 22 acquires position information indicating the position of the transport vehicle 3. For example, the position information acquisition unit 22 acquires position information indicating the position of the transport vehicle 3 detected by the position detection sensor 8 of the transport vehicle 3 using the information communication function of the vibration measurement device 20. The position information acquisition unit 22 may acquire time information for the time when the position information is detected together with the position information.

[0030] The state information acquisition unit 23 acquires the transport vehicle state information indicating the state of the transport vehicle 3. For example, the state information acquisition unit 23 acquires the transport vehicle state information measured by the transport vehicle 3 using the information communication function of the vibration measurement device 20. The state information acquisition unit 23 may acquire the time information of the time when the transport vehicle state information is obtained together with the transport vehicle state information.

[0031] The transport vehicle state information includes at least one of the travel speed of the transport vehicle 3 , the acceleration state of the transport vehicle 3 , the operation state of the operation mechanism of the transport vehicle 3 , and the detection state of the sensor (eg, the object detection sensor 10 ) of the transport vehicle 3 .

[0032] The travel speed of the transport vehicle 3 is a value measured by the speed sensor 9 of the transport vehicle 3. The acceleration state of the transport vehicle 3 (i.e., the acceleration indicating the accelerated state, decelerated state, constant speed state, etc.) can be determined by calculating the change in the travel speed measured by the speed sensor 9 of the transport vehicle 3. Alternatively, the vehicle control unit 4 of the transport vehicle 3 calculates the acceleration state of the transport vehicle 3, and the state information acquisition unit 23 of the vibration measuring device 20 obtains the calculated acceleration state. Alternatively, the state information acquisition unit 23 of the vibration measuring device 20 may also calculate the acceleration state based on the obtained travel speed of the transport vehicle 3 using the calculation processing function of the vibration measuring device 20. For example, it can be considered that the vibration of the transport vehicle 3 is relatively large when the transport vehicle 3 is accelerated and when it is decelerated, and the vibration of the transport vehicle 3 is relatively small when the transport vehicle 3 is traveling at a constant speed.

[0033] The operating state of the operating mechanism of the transport vehicle 3 is information on the operating state of the operating mechanism such as the travel mechanism 5, the holding mechanism 6 and the lifting mechanism 7 of the transport vehicle 3. Figure 4 and Figure 5 The guide wheel 17 shown is a part of the traveling mechanism 5, and its operation is controlled by the vehicle control unit 4. Moreover, the state information acquisition unit 23 can obtain information showing whether the guide wheel 17 is located on the right side or the left side in the traveling direction Y from the vehicle control unit 4 of the transport vehicle 3. In addition, the operation state is not limited to the state of the guide wheel 17 (that is, the traveling mechanism 5). For example, it can also be the operation state of the lifting mechanism 7, the operation state of the holding mechanism 6, etc. For example, it can be considered that when the guide wheel 17 of the traveling mechanism 5 is in operation (that is, when the position of the guide wheel 17 is switched left and right), the vibration of the transport vehicle 3 is relatively large.

[0034] The detection state of the object detection sensor 10 provided in the transport vehicle 3 is, for example, Figure 6 and Figure 7The shape of the detection area 18 of the object detection sensor 10 shown in the figure or the information on whether an object is detected, etc. The vehicle control unit 4 controls the state of the detection area 18 of the object detection sensor 10 of the transport vehicle 3. The information on whether the object detection sensor 10 detects an object is transmitted to the vehicle control unit 4. In addition, the state information acquisition unit 23 can acquire the information on the detection state of the object detection sensor 10 of the transport vehicle 3 from the vehicle control unit 4 of the transport vehicle 3. For example, it can be considered that when the object detection sensor 10 detects an object, the vibration of the transport vehicle 3 is relatively large due to the deceleration of the transport vehicle 3, etc.

[0035] As described above, the state information acquisition unit 23 can acquire, as the transport vehicle state information, information indicating the behavior of the transport vehicle 3 that may affect the vibration measured by the vibration measurement unit 21. Therefore, the user can easily analyze whether the vibration is strongly affected by the state of the transport vehicle 3 by referring to such transport vehicle state information.

[0036] The recording unit 24 records the measurement results (vibration information) of the vibration measuring unit 21, the state information of the transport vehicle, and the position information in association with each other. The recording unit 24 can be implemented by using the information storage function possessed by the vibration measuring device 20. For example, as described above, in the case where the measurement results of the vibration measuring unit 21, the state information of the transport vehicle, and the position information are all associated with the time information, the recording unit 24 can record the measurement results of the vibration measuring unit 21, the state information of the transport vehicle, and the position information at the same time or within a predetermined time range in association with each other. In addition, in the case where this information is not associated with the time information, the recording unit 24 only needs to record the measurement results of the vibration measuring unit 21, the state information of the transport vehicle, and the position information recorded at the same time or within a predetermined time as a data set in association with each other.

[0037] The vibration information may be a physical quantity representing vibration, such as the amplitude, frequency, acceleration, etc., measured by the vibration measuring unit 21, or a value calculated from these. For example, the vibration information may be an effective value (RMS: root mean square) calculated from the vibration waveform.

[0038] In this way, the recording unit 24 can record the transport vehicle travel data that at least associates the position information showing the position of the transport vehicle 3 with the vibration information showing the vibration measured on the transport vehicle 3, or the transport vehicle travel data as data that at least associates the position information showing the position of the transport vehicle 3, the vibration information showing the vibration measured on the transport vehicle 3, and the transport vehicle state information showing the state of the transport vehicle 3. The time information can also be associated with the position information, the vibration information, and the transport vehicle state information included in the transport vehicle travel data. The recording unit 24 can record the information of the position that the transport vehicle 3 has passed during travel as the path map data that is the data of the map of the travel path 1 that the transport vehicle 3 has traveled. The time information can also be associated with the information of the position that the transport vehicle 3 has passed during travel.

[0039] The output unit 25 outputs the information recorded in the recording unit 24. For example, the output unit 25 can output the information recorded in the recording unit 24 to other devices that can communicate with the vibration measuring device 20 using the information communication function of the vibration measuring device 20. In addition, the output unit 25 not only outputs the information in the form of sending it to other devices, but also can display and output the information to the display device 41, print and output it on paper, and output the information to a portable storage device.

[0040] As described above, by using the vibration measuring device 20 of the present embodiment, it is possible to obtain information showing the vibration measured at each position of the travel path 1 where the transport vehicle 3 has traveled and the state of the transport vehicle 3 at that position. As a result, the user who receives the output of this information can appropriately grasp the information about which position of the travel path 1 of the transport vehicle 3 the vibration becomes larger and what state the transport vehicle 3 is in at that time. That is, according to the vibration measuring device 20 involved in the present embodiment, it is possible to output information for appropriately analyzing the cause of the measured vibration.

[0041] Next, an example of installing the vibration measuring device 20 in the container W will be described. Figure 8 2 is a schematic block diagram showing the configuration of the container W and the vibration measuring device 20. The vibration measuring device 20 is accommodated in the container W transported by the transport vehicle 3. Then, the transport vehicle 3 transports the container W (i.e., while traveling), and the vibration measuring device 20 performs vibration measurement. That is, the vibration measuring unit 21 of the vibration measuring device 20 can measure vibrations close to the vibrations transmitted to the article while the transport vehicle 3 is traveling with the article contained in the container W.

[0042] As shown in the figure, the container W is a box-shaped container with a rectangular or nearly rectangular longitudinal section. One of the sides of the container W can be opened and closed by a door (not shown). When the door is open, objects can be placed in and taken out of the container W. Figure 8The plate-shaped part 30 of the article in the container W shown is, for example, an actual wafer or a part imitating the wafer. Figure 8 As shown, the transport vehicle 3 may be driven in a state where only the vibration measuring device 20 is accommodated in the container W, or in a state where the container W accommodates the vibration measuring device 20 and the plate-shaped member 30 is accommodated in the container W.

[0043] The container W has a plurality of slots 19 therein into which plate-shaped members 30 or the like, which are articles to be contained in the container W and transported by the transport vehicle 3, can be inserted. Specifically, a plurality of partitions 27 are arranged side by side in the vertical direction Z on the inner surface of the container W. The slots 19 are formed between these partitions 27.

[0044] Figure 8 The vibration measuring device 20 shown is configured so as to be installed inside the container W without changing the internal structure of such an existing container W. Specifically, the vibration measuring device 20 is equipped with the functions of the position information acquisition unit 22, the state information acquisition unit 23, the recording unit 24, and the output unit 25 in two devices. One device includes the vibration measuring unit 21, and the other device includes the information processing device C. The information processing device C can be implemented using a portable computer device or tablet terminal having an information communication function, an information storage function, an information calculation processing function, etc.

[0045] The vibration measuring device 20 includes a first supporting member 31 and a second supporting member 32 which are inserted into different slots 19. The vibration measuring unit 21 includes a vibration sensor 21a and a transmitter 21b which transmits the measurement result by the vibration sensor 21a, and is supported by the first supporting member 31. For example, the vibration sensor 21a can be realized by using an acceleration sensor as described above.

[0046] The second supporting member 32 supports the information processing device C. The information processing device C includes a position information acquisition unit 22, a state information acquisition unit 23, a recording unit 24, and an output unit 25. The recording unit 24 includes a receiver 24a that receives the measurement result from the transmitter 21b and a recording device 24b such as a flash memory that stores the measurement result received by the receiver 24a, and is supported by the second supporting member 32. In this case, the communication between the transmitter 21b and the receiver 24a may be wired or wireless.

[0047] The transmitter 21b of the vibration measuring unit 21 supported by the first supporting member 31 and the receiver 24a of the recording unit 24 supported by the second supporting member 32 are configured to communicate in accordance with various communication standards such as Bluetooth (registered trademark). The measurement results of the vibration sensor 21a are sequentially recorded in the recording device 24b.

[0048] exist Figure 8 In the example shown, among the functions of the vibration measuring unit 21, the position information acquiring unit 22, the state information acquiring unit 23, the recording unit 24, and the output unit 25 included in the vibration measuring device 20, the function of the vibration measuring unit 21 is mounted on the first supporting member 31, and the functions of the position information acquiring unit 22, the state information acquiring unit 23, the recording unit 24, and the output unit 25 are mounted on the second supporting member 32, and the first supporting member 31 and the second supporting member 32 are inserted into the respective slots 19. By adopting such a configuration, the vibration measuring unit 21, the position information acquiring unit 22, the state information acquiring unit 23, the recording unit 24, and the output unit 25 included in the vibration measuring device 20 can be easily provided inside the container W.

[0049] The slots 19 into which the first supporting member 31 and the second supporting member 32 are inserted can be changed as appropriate. For example, the first supporting member 31 supporting the vibration measuring unit 21 may be inserted into the slot 19 which is considered to have the largest vibration.

[0050] As described above, the plate-shaped member 30 that is the object to be transported can be inserted into the plurality of slots 19 provided in the container W, and the first support member 31 that supports the vibration sensor 21a provided in the vibration measuring unit 21 can be inserted. That is, the vibration sensor 21a can be arranged in the same environment as the plate-shaped member 30 that is the object to be transported inside the container W. Therefore, when the first support member 31 that supports the vibration sensor 21a is inserted into the slot 19 and the container W is transported by the transport vehicle 3, the vibration measuring unit 21 can measure vibrations close to the vibrations acting on the plate-shaped member 30 that is the object to be transported. Furthermore, even if a special transport vehicle 3 for vibration measurement is not prepared, a vibration measuring device 20 that can perform vibration measurement using any transport vehicle 3 can be realized. According to this embodiment, the first supporting component 31 supporting the vibration sensor 21a and the second supporting component 32 supporting the receiver 24a and the recording device 24b are different components and are inserted into different slots 19. Therefore, the influence of the receiver 24a and the recording device 24b on the measurement of vibration using the vibration sensor 21a can be suppressed to a small extent, which has the advantage of easily improving the accuracy of vibration measurement.

[0051] Next, another embodiment of the vibration measuring device 20 will be described.

[0052] (1) In the above-mentioned embodiment, the transport vehicle 3 is described as a ceiling transport vehicle. However, the present invention is not limited to such a structure. For example, the transport vehicle 3 may also be an AGV (Automatic Guided Vehicle), an STV (Sorting Transfer Vehicle), a stacking crane, or an autonomous transport robot AMR (Autonomous Mobile Robot).

[0053] (2) In the above embodiment, an example is described in which the position detection sensor 8 detects the position of the transport vehicle 3 based on the position mark B indicating the position of the travel path 1, but the position detection sensor 8 may detect the position of the transport vehicle 3 by other means. For example, the position detection sensor 8 may also detect the position of the transport vehicle 3 by receiving a signal from a GNSS satellite constituting a GNSS (Global Navigation Satellite System).

[0054] (3) In the above-mentioned embodiment, the content of the transport vehicle status information can be appropriately changed. For example, it can also include information on the detection status of various sensors provided by the transport vehicle 3. Examples of various sensors provided by the transport vehicle 3 include a sensor for detecting the operating status of the holding mechanism 6 for holding the container W, a sensor for detecting the operating status of the lifting mechanism 7 for lifting the holding mechanism 6, and the like.

[0055] (4) In the above embodiment, an example is described in which the transport vehicle 3 is driven in a state where the container W contains plate-like components 30 that are actual wafers or substrates that simulate the wafers, but the number of plate-like components 30 contained in the container W can be appropriately changed. For example, the container W may not contain plate-like components 30. Alternatively, the number of plate-like components 30 contained may be adjusted so as to be close to the weight of the container W in the case where the transport vehicle 3 actually transports wafers as articles.

[0056] (5) In addition, the configurations disclosed in the above-mentioned embodiments can also be combined and applied with the configurations disclosed in other embodiments as long as no contradiction occurs. With regard to other configurations, the embodiments disclosed in this specification are merely illustrative in all respects. Therefore, various changes can be appropriately made without departing from the scope of the present disclosure.

[0057] As one scheme, a vibration measuring device is a vibration measuring device mounted on a transport vehicle, comprising: a vibration measuring unit that measures vibration; a position information acquisition unit that acquires position information indicating the position of the transport vehicle; a state information acquisition unit that acquires transport vehicle state information indicating the state of the transport vehicle; a recording unit that records the measurement result of the vibration measuring unit, the transport vehicle state information, and the position information in association with each other; and an output unit that outputs the information recorded in the recording unit.

[0058] According to this configuration, it is possible to obtain information showing the vibration measured at each position of the travel path of the transport vehicle and the state of the transport vehicle at that position. As a result, the user who receives the output of this information can properly grasp the information about the position of the travel path of the transport vehicle where the vibration becomes larger and the state of the transport vehicle at that time. That is, according to the vibration measuring device involved in this configuration, it is possible to output information for properly analyzing the cause of the measured vibration.

[0059] As one embodiment, the transport vehicle status information includes at least one of a travel speed of the transport vehicle, an acceleration state of the transport vehicle, an operation state of a travel mechanism of the transport vehicle, and a detection state of a sensor of the transport vehicle.

[0060] According to this configuration, information indicating the behavior of the transport vehicle that may affect the vibration measured by the vibration measuring unit can be obtained as the transport vehicle state information. Therefore, by referring to such transport vehicle state information, the user can easily analyze whether the vibration is strongly affected by the state of the transport vehicle.

[0061] As one embodiment, the vibration measuring unit is accommodated in a container transported by the transport vehicle.

[0062] According to this configuration, the vibration measuring unit can measure the vibration inside the container during transportation. That is, the vibration measuring unit can measure the vibration close to the vibration transmitted to the article while the transport vehicle is traveling with the article contained in the container.

[0063] As one scheme, the above-mentioned container has a plurality of slots for inserting plate-like members as articles contained in the container and transported by the above-mentioned transport vehicle, and has a first supporting member and a second supporting member inserted into the above-mentioned slots which are different from each other, the above-mentioned vibration measuring unit has a vibration sensor and a transmitter for transmitting the above-mentioned measurement results using the above-mentioned vibration sensor, and is supported by the above-mentioned first supporting member, and the above-mentioned recording unit has a receiver for receiving the above-mentioned measurement results from the above-mentioned transmitter and a storage device for storing the above-mentioned measurement results received by the above-mentioned receiver, and is supported by the above-mentioned second supporting member.

[0064] According to this configuration, by inserting the first support member and the second support member into the slot, the vibration measuring unit and the recording unit can be easily set in the container. According to this configuration, the plate-shaped member that will be the object of transportation can also be inserted into the multiple slots provided by the container, and the first support member that supports the vibration sensor provided by the vibration measuring unit can also be inserted. That is, inside the container, the vibration sensor can be arranged in the same environment as the plate-shaped member that will be the object of transportation. Therefore, in the state where the first support member that supports the vibration sensor is inserted into the slot and the container is transported by the transport vehicle, the vibration measuring unit can measure the vibration close to the vibration of the plate-shaped member that will be the object of transportation. Furthermore, even if a special transport vehicle for vibration measurement is not prepared, a vibration measuring device that can perform vibration measurement with any transport vehicle can be realized. According to this configuration, the first support member that supports the vibration sensor and the second support member that supports the receiver and the storage device are different components and are inserted into different slots, so that the influence of the receiver and the storage device on the measurement of the vibration using the vibration sensor can be suppressed to a small extent, and there is an advantage that the accuracy of vibration measurement can be easily improved.

[0065] The vibration measuring device according to the present disclosure only needs to achieve at least one of the above-mentioned effects. Industrial Applicability

[0066] The present invention can be used in a vibration measuring device that can output information for appropriately analyzing the cause of the measured vibration. Explanation of symbols

[0067] 3: Transport vehicle 5: Traveling mechanism 19: Slot 20: Vibration measuring device 21: Vibration measurement unit 21a: Vibration sensor 21b: Transmitter 22: Location information acquisition unit 23: Status information acquisition unit 24: Records Department 24a: Receiver 25: Output 30: Plate-like parts 31: First support member 32: Second supporting member W: container.

Claims

1. A vibration measuring device, which is a vibration measuring device mounted on a transport vehicle, It has the following characteristics: have: a vibration measuring unit that measures vibration; a position information acquisition unit that acquires position information indicating the position of the transport vehicle; a state information acquisition unit that acquires transport vehicle state information indicating a state of the transport vehicle; a recording unit that records the measurement result of the vibration measuring unit, the state information of the transport vehicle, and the position information in association with each other; and An output unit outputs the information recorded in the recording unit.

2. The vibration measuring device according to claim 1, in, The transport vehicle state information includes at least one of a travel speed of the transport vehicle, an acceleration state of the transport vehicle, an operation state of a travel mechanism of the transport vehicle, and a detection state of a sensor of the transport vehicle.

3. The vibration measuring device according to claim 1 or 2, in, The vibration measuring unit is accommodated in a container transported by the transport vehicle.

4. The vibration measuring device according to claim 3, in, The container includes a plurality of slots into which plate-shaped members serving as articles to be contained in the container and transported by the transport vehicle are inserted. A first supporting member and a second supporting member are provided which are inserted into the slots which are different from each other. The vibration measuring unit includes a vibration sensor and a transmitter for transmitting the measurement result using the vibration sensor, and is supported by the first supporting member. The recording unit includes a receiver that receives the measurement result from the transmitter and a storage device that stores the measurement result received by the receiver, and is supported by the second supporting member.

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