Capacitive film vacuum gauge

Abstract

The invention relates to the technical field of capacitive film vacuum gauges, and particularly discloses a capacitive film vacuum gauge, which comprises a diaphragm capsule shell, a thrust electrode, a metal diaphragm and a propelling device, and is characterized in that the interior of the diaphragm capsule shell is a vacuum chamber, and one side of the diaphragm capsule shell is provided with an opening; the thrust electrode is arranged in the diaphragm capsule shell, and the thrust electrode is clamped in the opening in a sliding manner; the metal diaphragm is connected to the opening so that the thrust electrode can abut against the metal diaphragm. The propelling device is arranged on the diaphragm capsule shell, located on the opposite side of the opening and used for applying pressure to the thrust electrode, and therefore the tensile force borne by the metal diaphragm is changed. Therefore, the magnitude of the tensile force of the metal diaphragm can be accurately controlled in real time through the propelling device, so that the multi-range adjustability of the capacitive film vacuum gauge is realized.

Description

Technical Field

[0001] The invention relates to the technical field of capacitive thin film vacuum gauges, and in particular to a capacitive thin film vacuum gauge. Background Art

[0002] Traditional pressure transmitters use diaphragms with different corrugations as sensitive elements, while currently commonly used pressure transmitters, such as high-precision capacitive thin-film vacuum gauges, usually use ultra-thin metal diaphragms with thicknesses ranging from tens of microns as sensitive elements. Vacuum gauges of different ranges depend on the tension of the metal diaphragm. Generally, the greater the tension, the smaller the deformation of the metal diaphragm caused by pressure changes, and the larger the range of the vacuum gauge. In order to achieve high-precision measurements of different ranges, the metal diaphragm needs to be pre-tensioned to a suitable tension. However, it is difficult to control the tension of the metal diaphragm in the above process, and the metal diaphragm is difficult to fasten to the vacuum gauge diaphragm box after tensioning. This also leads to the complicated preparation process of the capacitive thin-film vacuum gauge, the low yield rate, and the metal diaphragm can only measure a fixed range after being fastened, and the range cannot be changed according to process requirements. Summary of the invention

[0003] In view of this, the present invention provides a capacitive thin film vacuum gauge, which can accurately control the tension of the metal diaphragm in real time through a propulsion device, thereby achieving multi-range adjustment of the capacitive thin film vacuum gauge.

[0004] An embodiment of the present invention provides a capacitive diaphragm vacuum gauge, including a diaphragm box housing, a thrust electrode, a metal diaphragm, and a propulsion device, wherein the interior of the diaphragm box housing is a vacuum chamber, and an opening is provided on one side of the diaphragm box housing; the thrust electrode is provided inside the diaphragm box housing, and the thrust electrode can be slidably clamped in the opening; the metal diaphragm is connected to the opening so that the thrust electrode can rest against the metal diaphragm; the propulsion device is provided on the diaphragm box housing, and the propulsion device is located on the opposite side of the opening, and the propulsion device is used to apply pressure to the thrust electrode, thereby changing the tension force applied to the metal diaphragm.

[0005] Furthermore, the capacitive diaphragm vacuum gauge also includes a slide groove, a protrusion and a spring. The slide groove is opened on the inner wall of the membrane box shell; the protrusion is arranged on the side of the thrust electrode, and the protrusion is suitable for being slidably clamped in the slide groove; the spring is connected to the slide groove and the protrusion.

[0006] Furthermore, the thrust electrode includes a ceramic body, which is a cylindrical structure. The side of the ceramic body close to the metal diaphragm is covered with a metal coating, and a boss is arranged around the outer side of the metal coating so that the boss can rest on the metal diaphragm; wherein the bump is arranged on the side of the ceramic body.

[0007] Furthermore, the metal coating and the metal diaphragm form a capacitor, wherein the height of the boss and the area of ​​the metal coating determine the size of the capacitor.

[0008] Furthermore, the propulsion device includes a sealing joint and a bellows. The sealing joint is arranged on the membrane box housing, and the sealing joint is used to connect to the controllable air pressure device; the bellows is arranged inside the membrane box housing, the first end of the bellows is sealed, and the second end of the bellows is connected to the sealing joint.

[0009] Furthermore, the propulsion device includes a screw and a motor. A threaded hole is opened on the membrane box shell, and the screw is screwed into the threaded hole so that the first end of the screw can be against the thrust electrode; the motor is connected to the second end of the screw, and the motor is used to drive the screw to rotate.

[0010] The beneficial effects of the technical solution provided by the embodiment of the present invention include at least: a capacitive film vacuum gauge, including a diaphragm housing, a thrust electrode, a metal diaphragm, and a propulsion device, wherein the interior of the diaphragm housing is a vacuum chamber, and an opening is provided on one side of the diaphragm housing; the thrust electrode is provided inside the diaphragm housing, and the thrust electrode can be slidably clamped in the opening; the metal diaphragm is connected to the opening so that the thrust electrode can be pressed against the metal diaphragm; the propulsion device is provided on the diaphragm housing, and the propulsion device is located on the opposite side of the opening, and the propulsion device is used to apply pressure to the thrust electrode, thereby changing the tension force on the metal diaphragm. Therefore, by accurately controlling the propulsion device to push the thrust electrode, the tension force of the metal diaphragm can be accurately controlled in real time, thereby realizing the multi-range adjustment of the capacitive film vacuum gauge, and then realizing high-precision measurement.

[0011] Among them, the main body of the thrust electrode adopts a ceramic body, so that the main body of the thrust electrode has insulating properties; by arranging a metal coating and a boss on the ceramic body, a capacitor is formed between the metal coating and the metal diaphragm; by changing the height of the boss and the area of ​​the metal coating, the size of the capacitor can be changed, so that the capacitive film vacuum gauge has different initial ranges.

[0012] Among them, the propulsion device can be a sealing joint and a bellows, and a controllable air pressure device is used to pass controllable air pressure of different pressures into the inside of the bellows through the sealing joint, so that the air pressure is fed to the thrust electrode through the deformation of the bellows, and then the pressure applied by the propulsion device to the thrust electrode is adjusted, and the tension of the metal diaphragm is adjusted to achieve the change of the range of the capacitive film vacuum gauge.

[0013] Among them, the propulsion device can be a screw and a motor, and the motor is used to drive the screw to rotate, so that the screw applies a precisely adjustable pressure to the thrust electrode, thereby adjusting the tension of the metal diaphragm to change the range of the capacitive film vacuum gauge.

[0014] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Moreover, the same reference symbols are used throughout the accompanying drawings to represent the same components. Among them:

[0016] Figure 1 A schematic structural diagram of a capacitive thin film vacuum gauge provided by an embodiment of the present invention is shown;

[0017] Figure 2 Shows Figure 1 A schematic structural diagram of a thrust electrode of the illustrated embodiment;

[0018] Figure 3 Shows Figure 1 A schematic structural diagram of the metal diaphragm of the embodiment shown in FIG. 1 in a free state;

[0019] Figure 4 Shows Figure 1 A schematic structural diagram of the metal diaphragm of the illustrated embodiment is in a tensioned state.

[0020] in, Figures 1 to 4 The corresponding relationship between the reference numerals and the component names is as follows:

[0021] 1 diaphragm box housing, 11 vacuum chamber, 2 thrust electrode, 21 bump, 22 spring, 23 ceramic body, 24 metal coating, 25 boss, 3 metal diaphragm, 41 sealing joint, 42 bellows, 5 capacitor. DETAILED DESCRIPTION

[0022] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0023] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the specific embodiments disclosed below.

[0024] Refer to the following Figures 1 to 4A capacitive diaphragm vacuum gauge is described according to some embodiments of the present invention.

[0025] like Figures 1 to 3 As shown, a capacitive film vacuum gauge provided according to an embodiment of the present invention includes a diaphragm housing 1, a thrust electrode 2, a metal diaphragm 3, and a propulsion device. The interior of the diaphragm housing 1 is a high vacuum chamber 11, and one side of the diaphragm housing 1 is provided with an opening; the thrust electrode 2 is arranged inside the diaphragm housing 1, and the thrust electrode 2 can be slidably clamped in the opening; the metal diaphragm 3 is connected to the opening so that the thrust electrode 2 can be pressed against the metal diaphragm 3, so that a capacitor 5 is formed between the metal diaphragm 3 and the thrust electrode 2 for measurement, and the other side of the metal diaphragm 3 is used to be connected to the chamber to be measured; the propulsion device is arranged on the diaphragm housing 1, and the propulsion device is located on the opposite side of the opening. The propulsion device is used to apply pressure to the thrust electrode 2, so that the thrust electrode 2 can squeeze the metal diaphragm 3, thereby changing the tension force on the metal diaphragm 3. Therefore, by accurately controlling the propulsion device to push the thrust electrode 2, the size of the tension force of the metal diaphragm 3 can be accurately controlled in real time, thereby realizing the multi-range adjustment of the capacitive film vacuum gauge, and then realizing high-precision measurement.

[0026] Specifically, when the propulsion device applies pressure to the thrust electrode 2, the metal diaphragm 3 is in a tensioned state under the action of the thrust electrode 2. By adjusting the pressure applied by the propulsion device to the thrust electrode 2, the metal diaphragm 3 can be controlled to be in different degrees of tension, thereby achieving multi-range adjustment and setting different ranges according to actual needs.

[0027] Among them, when fastening the metal diaphragm 3 to the opening, it is only necessary to place the metal diaphragm 3 in a free state at the opening position in the center of the diaphragm box shell 1 and weld it, which can avoid the preparation process of pre-tensioning the metal diaphragm 3 in advance and then fastening it to the diaphragm box shell 1, thereby reducing the difficulty of preparation.

[0028] like Figure 1 As shown, the capacitive diaphragm vacuum gauge also includes a slide groove, a protrusion 21 and a spring 22. The slide groove is opened on the inner wall of the membrane box housing 1; the protrusion 21 is arranged on the side of the thrust electrode 2, and the protrusion 21 is suitable for being slidably clamped in the slide groove so that the thrust electrode 2 can slide along the slide groove; the spring 22 is connected to the slide groove and the protrusion 21, so that when the propulsion device reduces the pressure applied to the thrust electrode 2, the thrust electrode 2 can be reset, that is, multiple ranges of repeated adjustment are achieved.

[0029] like Figure 4As shown, the thrust electrode 2 includes a ceramic body 23, so that the main body of the thrust electrode 2 has an insulating property; the ceramic body 23 is a cylindrical structure, so that it can be slidably clamped in the opening; the side of the ceramic body 23 close to the metal diaphragm 3 is covered with a metal coating 24, and a boss 25 is arranged around the outer side of the metal coating 24, so that the boss 25 can be against the metal diaphragm 3, that is, the boss 25 forms a capacitor 5 between the metal coating 24 and the metal diaphragm 3. Among them, the bump 21 is arranged on the side of the ceramic body 23, so as to avoid affecting the function of the capacitor 5 while realizing the sliding of the thrust electrode 2 along the slide groove.

[0030] like Figure 1 As shown, the height of the boss 25 and the area of ​​the metal coating 24 determine the size of the capacitor 5. By changing the size of the capacitor 5, the capacitive thin film vacuum gauge has different initial ranges.

[0031] like Figure 1 As shown, in some possible embodiments, the propulsion device includes a sealing joint 41 and a bellows 42. The sealing joint 41 is arranged on the diaphragm box housing 1, and the sealing joint 41 is used to connect to the controllable air pressure device. The bellows 42 is arranged inside the diaphragm box housing 1. The first end of the bellows 42 is sealed so that the interior of the vacuum chamber 11 always maintains a vacuum state; the second end of the bellows 42 is connected to the sealing joint 41, so that the air pressure input by the controllable air pressure device is fed to the thrust electrode 2 through the deformation of the bellows 42.

[0032] Specifically, the controllable air pressure device introduces controllable air pressure of different pressures into the bellows 42. By precisely controlling the air pressure, the pressure applied by the propulsion device to the thrust electrode 2 can be adjusted, thereby adjusting the propulsion amplitude of the thrust electrode 2 on the metal diaphragm 3, so that the tensioning force on the metal diaphragm 3 can be controlled, thereby changing the range of the capacitive film vacuum gauge.

[0033] In some possible embodiments, the propulsion device includes a screw and a motor. A threaded hole is provided on the diaphragm housing 1. The screw is screwed into the threaded hole so that the first end of the screw can be against the thrust electrode 2. The screw applies pressure to the thrust electrode 2, thereby adjusting the range of the capacitive film vacuum gauge by changing the tension of the metal diaphragm 3. The motor is connected to the second end of the screw, and the motor is used to drive the screw to rotate, so that the pressure applied by the screw to the thrust electrode 2 can be accurately adjusted.

[0034] In the description of the present invention, the term "plurality" refers to two or more than two. Unless otherwise clearly defined, the orientation or positional relationship indicated by the terms "upper" and "lower" is based on the orientation or positional relationship of the drawings. It is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present invention. The terms "connection", "installation", "fixation", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] In the description of the present invention, the description of the terms "one embodiment", "some embodiments", "specific embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In the present invention, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0036] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A capacitive thin film vacuum gauge, characterized in that: include: A membrane box housing (1), the interior of the membrane box housing (1) being a vacuum chamber (11), and one side of the membrane box housing (1) being provided with an opening; A thrust electrode (2), the thrust electrode (2) being arranged inside the membrane box housing (1), and the thrust electrode (2) being slidably clamped in the opening; a metal diaphragm (3), the metal diaphragm (3) being connected to the opening so that the thrust electrode (2) can abut against the metal diaphragm (3); A propulsion device is arranged on the membrane box housing (1), the propulsion device is located on the opposite side of the opening, and the propulsion device is used to apply pressure to the thrust electrode (2), thereby changing the tension force applied to the metal diaphragm (3).

2. The capacitive thin film vacuum gauge according to claim 1, characterized in that: Also includes: A slide groove, the slide groove being formed on the inner wall of the membrane box housing (1); A convex block (21), the convex block (21) being arranged on a side surface of the thrust electrode (2), the convex block (21) being suitable for being slidably clamped in the slide groove; A spring (22), wherein the spring (22) is connected to the slide groove and the protrusion (21).

3. The capacitive thin film vacuum gauge according to claim 2, characterized in that: The thrust electrode (2) comprises: A ceramic body (23), the ceramic body (23) being a cylindrical structure, a side of the ceramic body (23) close to the metal diaphragm (3) being covered with a metal coating (24), and a boss (25) being arranged around the outer side of the metal coating (24) so ​​that the boss (25) can abut against the metal diaphragm (3); Wherein, the protrusion (21) is arranged on the side surface of the ceramic body (23).

4. The capacitive thin film vacuum gauge according to claim 3, characterized in that: The metal coating (24) and the metal diaphragm (3) form a capacitor (5); The height of the boss (25) and the area of ​​the metal coating (24) determine the size of the capacitor (5).

5. The capacitive thin film vacuum gauge according to claim 1, characterized in that: The propulsion device comprises: A sealing joint (41), the sealing joint (41) being arranged on the membrane box housing (1), the sealing joint (41) being used to be connected to a controllable air pressure device; A bellows (42), wherein the bellows (42) is arranged inside the membrane box housing (1), a first end of the bellows (42) is sealed, and a second end of the bellows (42) is connected to the sealing joint (41).

6. The capacitive thin film vacuum gauge according to claim 1, characterized in that: The propulsion device comprises: A screw rod, wherein a threaded hole is provided on the membrane box housing (1), and the screw rod is screwed into the threaded hole so that the first end of the screw rod can abut against the thrust electrode (2); A motor is connected to the second end of the screw rod, and the motor is used to drive the screw rod to rotate.

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