Vacuum storage device and vacuum storage method

Abstract

The invention relates to a vacuum storage device and a vacuum storage method. The vacuum storage device comprises a vacuum storage box which is provided with a storage space used for storing materials, and the vacuum storage box is further provided with a first taking and placing opening which is communicated with the storage space and used for allowing the materials to pass through; the transfer pick-and-place box is arranged on the vacuum storage box and provided with a transfer space, a second pick-and-place opening and a third pick-and-place opening, the second pick-and-place opening and the third pick-and-place opening communicate with the transfer space and are used for allowing materials to pass through, and the second pick-and-place opening is opposite to the first pick-and-place opening; the first closing part is configured to selectively close the first pick-and-place opening and / or the second pick-and-place opening so as to isolate the transfer space from the storage space or conduct the transfer empty storage space; and the second closing piece is arranged on the transfer taking and placing box and is configured to selectively close or open the third taking and placing opening. According to the vacuum storage device, the contact between materials and external air in the storage process can be effectively reduced, and the risk that the materials are oxidized or impurities are adsorbed is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor chip manufacturing, and in particular to a vacuum storage device and a vacuum storage method.

[0002] The application scope of the present invention is not limited to chips, but can be applied to all materials that require vacuum storage. Background Art

[0003] Wafer cleavage, wafer sorting, and passivation coating are important links in the semiconductor chip manufacturing process. The current common practice in the industry is to perform cleavage in a non-vacuum environment. Although the chip is taken out and sent to the passivation chamber for surface treatment, the oxide layer and impurities are removed before the chip is coated. However, since the cleavage surface is extremely susceptible to oxygen, water vapor or impurities in the air during the cleavage process and transportation, oxidation and adsorption of impurities occur, which seriously affects the performance and reliability of the chip. Even after surface pretreatment, the performance of the manufactured chip is still not as good as that of the ultra-high vacuum cleavage process. The preparation cost of the ultra-high vacuum cleavage process is relatively high, and it is difficult to meet the needs of mass production. Summary of the invention

[0004] Based on this, it is necessary to provide a vacuum storage device and a vacuum storage method to address the problem that the cleavage surface is easily oxidized and adsorbs impurities during the cleavage process and transportation.

[0005] A vacuum storage device is used for vacuum storage of materials, and the vacuum storage device comprises: A vacuum storage box, having a storage space for storing materials, wherein the storage space is configured to form a vacuum environment, and the vacuum storage box is also provided with a first access opening connected to the storage space and used for materials to pass through; A transfer pick-up and release box, arranged on the vacuum storage box, the transfer pick-up and release box is provided with a transfer space and a second pick-up and release opening and a third pick-up and release opening connected to the transfer space and used for the material to pass through, the second pick-up and release opening being opposite to the first pick-up and release opening; A first closing member is configured to selectively close the first access opening and / or the second access opening to isolate the transfer space and the storage space, or to connect the transfer space and the storage space; The second closing piece is provided in the transfer pick-up and release box and is configured to selectively close or open the third pick-up and release opening.

[0006] In the above vacuum storage device, a vacuum storage space is formed in the vacuum storage box. When placing materials into the storage space, the transfer space and the storage space are firstly separated by the first closing piece, the materials are placed into the transfer space through the third access opening, and then the third access opening is closed by the second closing piece, and then the transfer space and the storage space are connected by the first closing piece, so that the materials can be transferred from the transfer space to the storage space. When taking materials out of the storage space, the materials are firstly transferred from the storage space to the transfer space, and then the transfer space and the storage space are separated by the first closing piece, and then the third access opening is opened by the second closing piece, and then the materials are taken out of the transfer space through the third access opening. Therefore, during the process of taking and placing materials in the hollow storage box, the vacuum storage space will not be connected to the outside world, which can improve the vacuum degree and sealing performance of the storage space, thereby reducing the risk of materials being oxidized or adsorbing impurities when stored in the storage space. The setting of the transfer space can also reduce the contact of materials with the outside air during the process of taking and placing materials in the vacuum storage device. The vacuum storage device can effectively reduce the contact of materials with the outside air during storage, reduce the risk of materials being oxidized or adsorbing impurities, and improve the performance and stability of materials.

[0007] In one embodiment, the vacuum storage device further includes a material storage element, which is used to store materials, and the material storage element can pass through the first access port, the second access port, and the third access port. The material storage element is provided to store materials and protect the materials, which is conducive to further reducing the risk of the materials coming into contact with the outside air or being scratched during transportation.

[0008] In one embodiment, the vacuum storage device also includes a material storage mechanism arranged in the storage space, the material storage mechanism includes a rotating part and a storage part, the storage part is provided with a placement groove for storing materials, and the rotating part is used to drive the storage part to rotate relative to the vacuum storage box so that the placement groove is opposite to the first loading and unloading port.

[0009] In one embodiment, the material storage mechanism includes at least two storage members, at least two storage members are connected to the rotating member, and are sequentially spaced along the circumference of the storage member, and the rotating member is used to drive the at least two storage members to rotate around the axis of the rotating member. Providing at least two storage members can store multiple materials at the same time, improve the storage capacity of the vacuum storage device, and thus help improve production efficiency.

[0010] In one embodiment, the vacuum storage device further comprises a lifting mechanism disposed in the storage space and opposite to the first access port, the lifting mechanism comprising a main body disposed on the side of the storage member facing away from the first access port and a lifting part movably connected to the main body, the storage member further comprises a lifting passage connected to the placement slot and opposite to the first access port and the lifting mechanism, the lifting part is configured to be able to move relative to the main body in a direction close to or away from the first access port through the lifting passage. The lifting mechanism is provided to be able to lift up and eject (or push and pull out) the material stored in the placement slot so as to transfer the material from the storage space to the transfer space, or to lower and transfer the material from the transfer space to the storage space, which is conducive to improving the automation of the access operation of the vacuum storage device, and improving production efficiency and safety.

[0011] In one embodiment, the first closing member is arranged on the lifting part, and the lifting part is configured to drive the first closing member to move relative to the main body toward the direction close to the first access opening until the first closing member closes the first access opening or the second access opening, or drives the first closing member to move relative to the main body toward the direction away from the first access opening so that the first closing member is separated from the first access opening. The first closing member is arranged on the lifting part so that it can move with the lifting part to close the first access opening or separate from the first access opening, thereby eliminating the need for an additional driving member to drive the first closing member to operate, which is conducive to simplifying the structure of the vacuum storage device and improving operational stability and automation.

[0012] In one embodiment, the vacuum storage device further comprises a fixing fitting, which is arranged on the side of the first closing member facing away from the main body and is used to detachably fix the material. The first closing member can not only isolate or connect the storage space and the transfer space, but also fix and carry the material, which is conducive to simplifying the component structure of the vacuum storage device, making full use of the automation of the first closing member and the lifting mechanism, and improving the stability and safety of the material transfer between the transfer space and the storage space.

[0013] In one embodiment, the vacuum storage device further comprises a push-pull mechanism disposed in the transfer space and opposite to the second access opening, and at least a portion of the push-pull mechanism can move between the transfer space and the storage space through the first access opening and the second access opening, so as to transfer materials between the transfer space and the storage space. The diversified design of material transfer methods can enhance the setting flexibility of the vacuum storage device.

[0014] In one embodiment, the vacuum storage device further comprises a material identification part, which is arranged in the vacuum storage box and is configured to identify whether the material is stored in the placement slot opposite to the first access port. By identifying whether the material is stored in the placement slot opposite to the first access port through the material identification part, it is possible to avoid the stacking of materials in the same placement slot causing damage to the materials, and it is also possible to ensure that the corresponding placement slot has materials when the lifting mechanism is ejected, which is conducive to improving the operating stability and safety performance of the vacuum storage device.

[0015] In one embodiment, the vacuum storage device further comprises a vacuum mechanism, which is connected to the storage space and is used to evacuate the storage space; and / or, The vacuum storage device further comprises a vacuum mechanism, which is connected to the transfer space and is used to evacuate the transfer space.

[0016] In one embodiment, the vacuum storage device further comprises a vacuum seal provided on the vacuum storage box and arranged around the first access opening, and when the first closing member is located at the first access opening, the periphery of the first closing member is in sealing contact with the vacuum seal to close the first access opening. The vacuum seal is provided in cooperation with the first closing member, so that the isolation performance between the storage space and the transfer space can be improved when the first closing member closes the first access opening, which is beneficial to ensuring the vacuum degree in the storage space and improving the reliability of material storage in the storage space.

[0017] A vacuum storage method for taking and placing materials in a vacuum storage box, the vacuum storage method comprising: Providing a transfer pick-up and release box and a vacuum storage box, wherein the vacuum storage box is provided with a storage space, and the transfer pick-up and release box is provided with a transfer space and a third pick-up and release port communicating with the transfer space; Isolating the storage space and the transfer space, and opening the third access port; Putting materials into the transfer space from the third loading and unloading port; Closing the third access opening; The transfer space and the storage space are connected, and the material is transferred from the transfer space to the storage space.

[0018] In one embodiment, the vacuum storage method further comprises: Transferring the materials in the storage space to the transfer space; isolating the transfer space and the storage space; Opening the third access opening; The materials in the transfer space are taken out through the third taking and placing opening. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 Schematic diagram of the structure of a vacuum storage device in some embodiments.

[0020] Figure 2 for Figure 1 The structure diagram of the vacuum storage device shown is that the vacuum storage element is located in the transfer space.

[0021] Figure 3 for Figure 1 The schematic diagram of the structure of the vacuum storage device in which the vacuum storage element is located in the placement groove is shown.

[0022] Figure 4 Schematic diagram of the structure of the material storage mechanism in some embodiments.

[0023] Reference numerals: 10. Vacuum storage device; 11. Vacuum storage box; 111. Storage space; 112. First pick-up and release port; 12. Transfer pick-up and release box; 121. Transfer space; 122. Second pick-up and release port; 123. Third pick-up and release port; 13. First closing piece; 14. Second closing piece; 15. Material storage element; 16. Rotating piece; 17. Storage piece; 171. Placement slot; 172. Lifting channel; 18. Lifting mechanism; 181. Main body; 182. Lifting part. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0025] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0026] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0027] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0028] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0029] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0030] See also Figure 1 , Figure 1The schematic diagram of the structure of the vacuum storage device 10 in some embodiments of the present application is shown. The vacuum storage device 10 provided in the present application can be used to store materials in a vacuum environment to protect materials whose performance and stability are easily affected when in contact with the outside air during the process of manufacturing or transportation. The vacuum storage device 10 includes but is not limited to materials such as semiconductor chips whose performance and stability are easily affected by the outside air and impurities. When the vacuum storage device 10 is used to vacuum store chips, the vacuum storage device 10 can be used to store chips between the wafer cleavage and the passivation coating process of the chip during the manufacturing process of the chip. The wafer is cleaved and arranged to form a chip. The batch of chips can be first stored in the vacuum environment of the vacuum storage device 10, and then the chip is taken out to the passivation coating process, which is beneficial to reduce the contact of the cleavage surface of the chip with the outside air before the passivation coating process, reduce the risk of oxidation or adsorption of impurities on the cleavage surface, and help improve the performance and reliability of the chip.

[0031] In some embodiments, the vacuum storage device 10 includes a vacuum storage box 11, a transfer access box 12, a first closure member 13, and a second closure member 14. The vacuum storage box 11 has a storage space 111 for storing materials. The storage space 111 is configured to form a vacuum environment. When materials such as chips are stored in the vacuum storage device 10, the chips are stored in the storage space 111 that forms a vacuum environment to provide vacuum protection for the materials. The transfer access box 12 is provided on the vacuum storage box 11. The transfer access box 12 is provided with a transfer space 121. Materials can enter the storage space 111 through the transfer space 121, or be taken out of the vacuum storage device 10 from the storage space 111 through the transfer space 121. The transfer space 121 plays a role of transfer between the outside world and the storage space 111. The vacuum storage box 11 is also provided with a first access port 112 connected to the storage space 111. The first access port 112 is for materials to pass through, such as entering or leaving the storage space 111 through the materials. The transfer pick-up and release box 12 is further provided with a second pick-up and release port 122 and a third pick-up and release port 123 connected to the transfer space 121, and the second pick-up and release port 122 and the third pick-up and release port 123 are used for materials to pass through, and the second pick-up and release port 122 is opposite to the first pick-up and release port 112. It can be understood that the material can be transferred from the transfer space 121 to the storage space 111 through the second pick-up and release port 122 and the first pick-up and release port 112, or from the storage space 111 to the storage space 111, and the material can enter or leave the transfer space 121 through the third pick-up and release port 123.

[0032] The first closing member 13 is configured to selectively close the first access opening 112 and / or the second access opening 122 to isolate the transfer space 121 and the storage space 111, so that the transfer space 121 and the storage space 111 are not connected, or to disconnect the first access opening 112 and the second access opening 122 to connect the transfer space 121 and the storage space 111, so that the material can be transferred between the transfer space 121 and the storage space 111 through the first access opening 112 and the second access opening 122. The second closing member 14 is provided on the transfer access box 12, and is configured to selectively close or open the third access opening 123.

[0033] Combination Figure 2 and Figure 3 As shown, it can be understood that in the process of placing materials into the storage space 111 for vacuum storage of the materials, the transfer space 121 and the storage space 111 are first isolated by the first closing piece 13, the materials are placed in the transfer space 121 through the third taking and releasing port 123, and then the third taking and releasing port 123 is closed by the second closing piece 14, and then the transfer space 121 and the storage space 111 are connected by the first closing piece 13, so that the materials can be transferred from the transfer space 121 to the storage space 111. During the transfer process, the transfer space 121 and the storage space 111 are not connected to the outside air due to the closure of the third taking and releasing port 123. In the process of taking out materials from the storage space 111, the materials are first transferred from the storage space 111 to the transfer space 121. During the transfer process, the transfer space 121 and the storage space 111 are not connected to the outside air due to the closure of the third access port 123. Then, the transfer space 121 and the storage space 111 are isolated by the first closing component 13, and then the third access port 123 is opened by the second closing component 14. Then, the materials are taken out from the transfer space 121 through the third access port 123. During the taking out process, the storage space 111 is not connected to the outside air because the first closing component 13 isolates the transfer space 121 and the storage space 111.

[0034] Therefore, during the process of taking and placing materials in the hollow storage box, the vacuum storage space 111 will not be connected to the outside world, which can improve the vacuum degree and sealing performance of the storage space 111, thereby reducing the risk of materials being oxidized or adsorbing impurities when stored in the storage space 111. The setting of the transfer space 121 can also reduce the contact of materials with the outside air during the process of taking and placing materials in the vacuum storage device 10. The vacuum storage device 10 can effectively reduce the contact of materials with the outside air during storage, reduce the risk of materials being oxidized or adsorbing impurities, and improve the performance and stability of materials.

[0035] It should be noted that in the present application, the vacuum degree of the vacuum environment in the storage space 111 is not limited, and can be specifically designed according to the vacuum storage requirements of materials such as chips. As long as the vacuum storage device 10 can effectively protect the materials when the materials are stored in the storage space 111, and reduce the risk of the materials being oxidized or adsorbing impurities, the production quality and yield requirements of the materials can be met.

[0036] In some embodiments, the vacuum storage device 10 further includes a material storage element 15, which is used to store materials, and the material storage element 15 can pass through the first access port 112, the second access port 122, and the third access port 123. Therefore, in the manufacturing process, the material can be first stored in the material storage element 15, and then the material can be taken out and placed in the vacuum storage device 10, that is, the material is located in the material storage element 15 during the access process and storage process in the vacuum storage device 10. The material storage element 15 can provide structural support and protection for the material, reducing the risk of damage to the material due to scratches. A material storage element 15 can also store multiple materials, and multiple materials can be taken out and stored in the vacuum storage device 10 at the same time, which is conducive to improving production efficiency. In some embodiments, the space for storing materials in the material storage element 15 can be a closed space or a vacuum space, which can improve the protection of the material during the transportation and access process of the material, and reduce the risk of oxidation or adsorption of impurities.

[0037] In some embodiments, the vacuum storage device 10 further includes a material storage mechanism disposed in the storage space 111, the material storage mechanism includes a rotating member 16 and a storage member 17, the storage member 17 is provided with a placement slot 171 for storing materials, when the materials are stored in the storage space 111, the material storage elements 15 can be placed in the placement slot 171 one by one. The rotating member 16 is used to drive the storage member 17 to rotate relative to the vacuum storage box 11, so that the placement slot 171 is opposite to the first access port 112, so as to facilitate the material storage element 15 to be placed in the placement slot 171 through the first access port 112, or to facilitate the material storage element 15 to be taken out of the placement slot 171 through the first access port 112.

[0038] Furthermore, combined with Figure 2 and Figure 4As shown, in some embodiments, the material storage mechanism includes at least two storage members 17, at least two storage members 17 are connected to the rotating member 16, and are sequentially spaced along the circumference of the storage member 17, and the rotating member 16 is used to drive the at least two storage members 17 to rotate around the axis of the rotating member 16. It can be understood that after one of the material storage elements 15 is placed in the placement slot 171 opposite to the first access port 112 through the first access port 112, the rotating member 16 drives the multiple storage members 17 to rotate, and the placement slot 171 of another storage member 17 can be switched to be opposite to the first access port 112, so as to achieve the storage of the next material storage element 15. Similarly, in the process of taking out the material, after the material storage element 15 in one of the placement slots 171 is taken out through the first access port 112, the rotating member 16 can drive the multiple storage members 17 to rotate, so as to switch the placement slot 171 of another storage member 17 to be opposite to the first access port 112, so as to achieve the taking out of the material storage element 15 in the other placement slot 171. Providing at least two storage members 17 can store multiple materials at the same time, thereby increasing the storage capacity of the vacuum storage device 10 and thus facilitating the improvement of production efficiency.

[0039] In some embodiments, the distances between the placement slots 171 on the plurality of storage members 17 and the rotating member 16 are equal, and the axis of the rotating member 16 is parallel to the axis of the first access opening 112, so that when the rotating member 16 drives the plurality of storage members 17 to rotate, the placement slots 171 on the plurality of storage members 17 can be aligned with the first access opening 112 in sequence, thereby improving the stability of the material batch storage and access process. Figure 4 Four storage components 17 are shown in the figure. In fact, according to different storage requirements, the storage components 17 can also be provided with other quantities such as three, five, seven, eight, etc.

[0040] Combination Figure 2 and Figure 3 As shown, in some embodiments, the vacuum storage device 10 further includes a lifting mechanism 18 disposed in the storage space 111 and opposite to the first access port 112, and the lifting mechanism 18 includes a main body 181 disposed on the side of the storage member 17 facing away from the first access port 112 and a lifting portion 182 movably connected to the main body 181. The storage member 17 is further provided with a lifting channel 172 communicating with the placement groove 171 and opposite to the first access port 112 and the lifting mechanism 18, and the lifting portion 182 is configured to be able to move relative to the main body 181 in a direction close to or away from the first access port 112 through the lifting channel 172.

[0041] It is understandable that, in the process of the rotating member 16 driving the storage member 17 to rotate, the lifting part 182 is located on the side of the storage member 17 facing away from the first access opening 112, so as to avoid interference between the lifting part 182 and the storage member 17. When one of the placement slots 171 is opposite to the first access opening 112, if the material storage element 15 is to be stored, the lifting part 182 can be firstly moved relative to the main body 181 in the direction close to the first access opening 112, so that when the material is placed in the transfer space 121, the material storage element 15 and the lifting part 182 are in a linkage relationship, and then in the process of the lifting part 182 moving in the direction away from the first access opening 112, the lifting part 182 drives the material storage element 15 to transfer from the transfer space 121 to the storage space 111, until the material storage element 15 is placed in the placement slot 171, and the lifting part 182 continues to move in the direction away from the first access opening 112 until it is separated from the storage member 17. If the material storage element 15 in the placement slot 171 is to be taken out, the lifting part 182 can be driven to move in a direction close to the first access opening 112, so that the lifting part 182 can push the material storage element 15 out of the placement slot 171 and drive the material storage element 15 to transfer to the transfer space 121. The lifting mechanism 18 is arranged to be able to lift up and push out the material stored in the placement slot 171 so as to transfer the material from the storage space 111 to the transfer space 121, or to lower and transfer the material from the transfer space 121 to the storage space 111, which is conducive to improving the automation of the access operation of the vacuum storage device 10, and improving production efficiency and safety.

[0042] In some embodiments, the radial dimension of at least part of the placement slot 171 may be larger than the lifting channel 172, so that when the material storage element 15 is lowered to the placement slot 171 along with the lifting portion 182, it can stay in the placement slot 171 and will not fall to the side of the storage member 17 facing away from the first access port 112. The lifting mechanism 18 includes but is not limited to a hydraulic cylinder, etc., as long as the lifting mechanism 18 can have a lifting portion 182 that moves relative to the main body 181 toward or away from the first access port 112 to achieve the transfer of the material storage element 15 between the transfer space 121 and the storage space 111.

[0043] Further, in some embodiments, the first closing member 13 is disposed on the lifting portion 182, and the lifting portion 182 is configured to drive the first closing member 13 to move relative to the main body 181 toward the direction close to the first access opening 112 until the first closing member 13 closes the first access opening 112 or the second access opening 122, or drives the first closing member 13 to move relative to the main body 181 toward the direction away from the first access opening 112, so that the first closing member 13 is separated from the first access opening 112. The lifting portion 182 can be roughly columnar, the first closing member 13 can be roughly in the shape of a push plate, and the shape and size of the first closing member 13 are roughly adapted to the first access opening 112. During the storage of materials, the lifting part 182 drives the first closing member 13 to move to the first access opening 112 and closes the first access opening 112. When the material is placed into the transfer space 121 from the third access opening 123, it will fall into the side of the first closing member 13 facing away from the main body 181, and then descend along with the first closing member 13 and the lifting part 182 until it is placed into the placement slot 171. During the removal of materials, the lifting part 182 drives the first closing member 13 to move in the direction close to the first access opening 112, and can push the material storage element 15 in the placement slot 171 toward the first access opening 112 until the material storage element 15 is transferred from the storage space 111 to the transfer space 121. Therefore, the first closing member 13 is arranged on the lifting part 182 so that it can move with the lifting part 182 to close the first taking and releasing port 112 or detach from the first taking and releasing port 112, and at the same time realize the transfer of the material storage element 15 between the transfer space 121 and the storage space 111, so that there is no need to set up an additional driving member to drive the first closing member 13 to operate, and there is no need to set up a driving member to transfer the material storage element 15, which is conducive to simplifying the structure of the vacuum storage device 10 and improving the operational stability and automation.

[0044] In some embodiments, the vacuum storage device 10 further includes a fixing fitting (not shown), which is disposed on the side of the first closure member 13 facing away from the main body 181 and is used to detachably fix the material. For example, when the material storage element 15 is placed in the transfer space 121 and falls onto the first closure member 13, or when the first closure member 13 moves toward the direction close to the first access opening 112 until it contacts the material storage element 15, the fixing fitting can be detachably fixed to the material storage element 15, thereby improving the stability and safety of the material storage element 15 when transferring between the transfer space 121 and the storage space 111. The fixing fitting can be a protrusion or groove structure that can be engaged with a groove or protrusion on the material storage element 15, and the fixing fitting and the material storage element 15 can also adopt any other applicable detachable connection method. It can be understood that the first closing member 13 can not only isolate or connect the storage space 111 and the transfer space 121, but also play the role of fixing and carrying materials, which is beneficial to simplify the component structure of the vacuum storage device 10, fully utilize the automation of the first closing member 13 and the lifting mechanism 18, and improve the stability and safety of material transfer between the transfer space 121 and the storage space 111.

[0045] In other embodiments, the vacuum storage device 10 may also use a push-pull mechanism (not shown) disposed in the transfer space 121 instead of the lifting mechanism 18 to realize the transfer of materials between the transfer space 121 and the storage space 111. The push-pull mechanism is disposed in the transfer space 121 and is opposite to the second access port 122. At least part of the push-pull mechanism can move between the transfer space 121 and the storage space 111 through the first access port 112 and the second access port 122. For example, the push-pull mechanism may be a basket mechanism, including a body and a basket movably connected to the body, and the basket can move relative to the body to move between the transfer space 121 and the storage space 111. When it is necessary to transfer materials from the transfer space 121 to the storage space 111, the materials may be placed on the basket of the push-pull mechanism in the transfer space 121 first, and the materials may be transferred to the storage space 111 by driving the basket to descend from the transfer space 121 to the storage space 111 relative to the body, and then the basket is retracted to the transfer space 121. When materials need to be transferred from the storage space 111 to the transfer space 121, the basket can be first lowered from the transfer space 121 to the storage space 111 relative to the main body, so that the materials in the storage space 111 are fixed on the basket, and then the basket is driven to rise from the storage space 111 to the transfer space 121, thereby driving the materials from the storage space 111 to the transfer space 121.

[0046] In some embodiments, the vacuum storage device 10 further includes a vacuum seal (not shown) disposed on the vacuum storage box 11 and around the first access port 112. When the first closing member 13 is located at the first access port 112, the periphery of the first closing member 13 is in sealing contact with the vacuum seal to close the first access port 112, thereby improving the sealing performance between the transfer space 121 and the storage space 111. The vacuum seal includes but is not limited to any suitable sealing structure such as a rubber sealing strip.

[0047] In some embodiments, the vacuum storage device 10 further includes a material identification member (not shown), which is disposed in the vacuum storage box 11, for example, in the storage space 111 and opposite to the first access port 112. The material identification member is configured to be able to identify whether a material is stored in the placement slot 171 opposite to the first access port 112. The material identification method adopted by the material identification member includes but is not limited to any applicable sensing method such as optical sensing and pressure sensing. It can be understood that during the storage process of the material, the material identification member identifies whether a material is stored in the placement slot 171 opposite to the first access port 112. When the first access port 112 stores the material, the placement slot 171 where no material is placed is switched to be opposite to the first access port 112 through the rotating member 16, so as to avoid the stacking of materials in the same placement slot 171 and cause the material to be damaged. The material identification member can also identify whether the material storage element 15 is placed in the placement slot 171. During the process of taking out the material, the material identification component can identify whether there is material stored in the placement slot 171, and then perform the process of taking out the material storage element 15 to avoid misoperation. Therefore, by identifying whether there is material stored in the placement slot 171 opposite to the first access port 112 through the material identification component, it can avoid the material being stacked in the same placement slot 171 and causing damage to the material, and it can also ensure that there is material in the corresponding placement slot 171 when the lifting mechanism 18 is ejected, which is conducive to improving the operating stability and safety performance of the vacuum storage device 10.

[0048] In some embodiments, the vacuum storage device 10 further includes a vacuum mechanism (not shown), which is connected to the storage space 111 and used to evacuate the storage space 111. The vacuum mechanism can also be used to monitor the vacuum degree in the storage space 111 to improve the vacuum preservation effect of the material. The vacuum mechanism includes but is not limited to any applicable vacuum equipment such as a sliding valve vacuum pump and a rotary vane vacuum pump. In some embodiments, the vacuum mechanism can also be used to evacuate the transfer space 121 of the transfer pick-up and place box 12 at the same time, so that the transfer space 121 can be connected to the storage space 111 after the transfer space 121 is evacuated, so as to avoid the influence of the environment of the transfer space 121 on the vacuum degree of the storage space 111.

[0049] In the above embodiment, the first closing member 13 realizes the automatic closing or opening operation of the first access opening 112 by following the lifting part 182. In other embodiments, the second closing member 14 can also realize the automatic closing or opening operation of the third access opening 123 by setting a driving member such as a motor. For example, the second closing member 14 can be roughly in a cover plate structure, and can slide or rotate relative to the transfer access box 12 by the driving member to close the third access opening 123 or disengage from the third access opening 123. The automated setting can improve the storage efficiency of the vacuum storage device 10, which is conducive to improving the production efficiency of materials, reducing labor costs, and improving operational reliability and safety performance.

[0050] In some embodiments, the first closing piece 13 can move to the first access port 112 to close the first access port 112. In other embodiments, the first closing piece 13 can also move to be located at both the first access port 112 and the second access port 122, or at the second access port 122, so as to at least isolate the transfer space 121 and the storage space 111 and realize the transfer of materials between the transfer space 121 and the storage space 111.

[0051] In some embodiments, the third access port 123 can be opened on the side of the transfer access box 12 facing away from the vacuum storage box 11, so that the third access port 123, the second access port 122, the first access port 112 and the placement slot 171 are arranged in sequence on a straight line. During the storage process, it is only necessary to vertically place the material storage element 15 into the transfer space 121 or take it out from the transfer space 121, which is beneficial to improving the automation and stability of the access operation of the vacuum storage device 10.

[0052] In some embodiments, the present application further provides a vacuum storage method for taking and placing materials in a vacuum storage box 11, such as taking and placing a material storage element 15 containing materials. The vacuum storage method can be implemented by using the vacuum storage device 10 described in any of the above embodiments, or any other applicable device, as long as the corresponding steps can be implemented to provide vacuum protection for the materials. During the storage of materials, the vacuum storage method may include the following steps: Isolate the storage space 111 and the transfer space 121, and open the third access port 123; Put the material into the transfer space 121 from the third loading and unloading port 123; Closing the third access opening 123; The transfer space 121 and the storage space 111 are connected, and the materials are transferred from the transfer space 121 to the storage space 111 .

[0053] In the process of taking out the material from the vacuum storage box 11, the vacuum storage method may further include the following steps: Transferring materials in the storage space 111 to the transfer space 121; Isolate the transfer space 121 and the storage space 111; Open the third access opening 123; The materials in the transfer space 121 are taken out through the third taking-in and putting-out opening 123 .

[0054] It is understandable that when the vacuum storage device 10 of any of the above embodiments is used to implement the above vacuum storage method, the third access opening 123 can be closed and opened by the second closing member 14, and the storage space 111 and the transfer space 121 can be isolated and connected by the cooperation of the lifting mechanism 18 and the first closing member 13, and the material can be transferred between the transfer space 121 and the storage space 111. The implementation of the specific steps can be obtained by referring to the above records, which will not be repeated here. The above vacuum storage method is used to vacuum store materials, and the various effects of the above vacuum storage device 10 can be obtained.

[0055] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0056] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A vacuum storage device for vacuum storage of materials, characterized in that: The vacuum storage device comprises: A vacuum storage box, having a storage space for storing materials, wherein the storage space is configured to form a vacuum environment, and the vacuum storage box is also provided with a first access opening connected to the storage space and used for materials to pass through; A transfer pick-up and release box, arranged on the vacuum storage box, the transfer pick-up and release box is provided with a transfer space and a second pick-up and release opening and a third pick-up and release opening connected to the transfer space and used for the material to pass through, the second pick-up and release opening being opposite to the first pick-up and release opening; A first closing member is configured to selectively close the first access opening and / or the second access opening to isolate the transfer space and the storage space, or to connect the transfer space and the storage space; The second closing piece is provided in the transfer pick-up and release box and is configured to selectively close or open the third pick-up and release opening.

2. The vacuum storage device according to claim 1, characterized in that: The vacuum storage device further includes a material storage element, which is used to store materials, and the material storage element can pass through the first access port, the second access port and the third access port.

3. The vacuum storage device according to claim 1, characterized in that: The vacuum storage device also includes a material storage mechanism arranged in the storage space, the material storage mechanism includes a rotating part and a storage part, the storage part is provided with a placement groove for storing materials, and the rotating part is used to drive the storage part to rotate relative to the vacuum storage box so that the placement groove is opposite to the first loading and unloading port.

4. The vacuum storage device according to claim 3, characterized in that: The material storage mechanism comprises at least two storage members, at least two storage members are connected to the rotating member and are sequentially spaced apart along the circumference of the storage member, and the rotating member is used to drive at least two storage members to rotate around the axis of the rotating member.

5. The vacuum storage device according to claim 3, characterized in that: The vacuum storage device also includes a lifting mechanism disposed in the storage space and opposite to the first access port, the lifting mechanism including a main body disposed on the side of the storage component facing away from the first access port and a lifting portion movably connected to the main body, the storage component is also provided with a lifting channel connected to the placement groove and opposite to the first access port and the lifting mechanism, and the lifting portion is configured to be able to move relative to the main body toward or away from the first access port through the lifting channel.

6. The vacuum storage device according to claim 5, characterized in that: The first closing piece is arranged on the lifting part, and the lifting part is configured to drive the first closing piece to move relative to the main body in a direction close to the first access port until the first closing piece closes the first access port or the second access port, or drives the first closing piece to move relative to the main body in a direction away from the first access port so that the first closing piece is separated from the first access port.

7. The vacuum storage device according to claim 6, characterized in that: The vacuum storage device further comprises a fixing fitting, which is arranged on a side of the first closing member facing away from the main body and is used for detachably fixing the material.

8. The vacuum storage device according to claim 3, characterized in that: The vacuum storage device also includes a push-pull mechanism disposed in the transfer space and opposite to the second access port, at least a portion of the push-pull mechanism being able to move between the transfer space and the storage space through the first access port and the second access port, so as to transfer materials between the transfer space and the storage space.

9. The vacuum storage device according to claim 3, characterized in that: The vacuum storage device further includes a material identification component, which is disposed in the vacuum storage box and is configured to identify whether the material is stored in the placement slot opposite to the first access opening.

10. The vacuum storage device according to any one of claims 1 to 9, characterized in that: The vacuum storage device further comprises a vacuum mechanism, which is connected to the storage space and is used to evacuate the storage space; and / or, The vacuum storage device further comprises a vacuum mechanism, which is connected to the transfer space and is used to evacuate the transfer space.

11. The vacuum storage device according to any one of claims 1 to 9, characterized in that: The vacuum storage device further comprises a vacuum seal disposed on the vacuum storage box and arranged around the first access opening. When the first closing member is located at the first access opening, the periphery of the first closing member is in sealing contact with the vacuum seal to close the first access opening.

12. A vacuum storage method for placing and retrieving materials in a vacuum storage box, characterized in that: The vacuum storage method comprises: Providing a transfer pick-up and release box and a vacuum storage box, wherein the vacuum storage box is provided with a storage space, and the transfer pick-up and release box is provided with a transfer space and a third pick-up and release port communicating with the transfer space; Isolating the storage space and the transfer space, and opening the third access port; Put the material into the transfer space from the third loading and unloading port; Closing the third access opening; The transfer space and the storage space are connected, and the material is transferred from the transfer space to the storage space.

13. The vacuum storage method according to claim 12, characterized in that: The vacuum storage method further comprises: Transferring the materials in the storage space to the transfer space; isolating the transfer space and the storage space; Opening the third access opening; The materials in the transfer space are taken out through the third taking-in and putting-out opening.

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