Modular material handling robotic platform

Abstract

An apparatus comprising a first substrate, where the first substrate is configured to have at least one linear drive component and / or at least one power coupling component connected to a top side of the first substrate, where the first substrate is configured to be located in a vacuum chamber; and a plurality of guide rails or transport guides on the top side of the first substrate. The end of the first substrate includes at least one alignment feature configured to align the end of the first substrate with the end of the second substrate. The first substrate is configured to, in combination with the second substrate, provide a structural platform inside the vacuum chamber for moving the robotic drive in the vacuum chamber along the plurality of transport guides.

Description

[0001] This application is a divisional application of an application with a filing date of February 12, 2020, application number 202080028538.7, and invention name “Modular Material Handling Robot Platform”. Technical Field

[0002] Exemplary and non-limiting embodiments are generally directed to a substrate transport assembly. Background Art

[0003] Robots for transporting substrates are known. Linear drive systems for transport robots for transporting substrates are also known, such as those described in U.S. Patent Publication Nos. US2016 / 0229296A1, US2013 / 0071218 A1, US2015 / 0214086A1, and US2017 / 0028546A1, and these patents are incorporated herein by reference in their entirety. Summary of the invention

[0004] The following summary is intended to be exemplary only. This summary is not intended to limit the scope of the claims.

[0005] According to one aspect, an example embodiment provides an apparatus comprising: a first substrate, wherein the first substrate is configured to have at least one linear drive component and / or at least one power coupling component, wherein the at least one linear drive component and / or the at least one power coupling component are connected to a top side of the first substrate, wherein the first substrate is configured to be located inside a vacuum chamber; and a plurality of guide rails, wherein an end of the first substrate comprises at least one alignment feature, wherein the at least one alignment feature is configured to align the end of the first substrate with an end of a second substrate, wherein the first substrate is configured to be combined with the second substrate to provide a structural platform inside the vacuum chamber for a robotic drive to move in the vacuum chamber along the plurality of guides.

[0006] According to another aspect, an example method is provided, the method comprising: connecting a first substrate assembly inside a vacuum chamber, wherein the first substrate assembly includes a first substrate and a first plurality of guide rails, the first plurality of guide rails being on a top side of the first substrate; connecting a second substrate assembly inside the vacuum chamber, wherein the second substrate assembly includes a second substrate, wherein an end of the second substrate is connected to an end of the first substrate, wherein the first substrate assembly includes at least one alignment feature, the at least one alignment feature being configured to align an end of the first substrate with an end of the second substrate, wherein the first substrate is configured to be combined with the second substrate to provide a structural platform inside the vacuum chamber for a robotic drive to move in the vacuum chamber along the first plurality of guide rails.

[0007] According to another aspect, a method is provided, the method comprising: providing a substrate; providing a plurality of guide rails on a top side of the substrate; providing at least one alignment feature for an end of the substrate, the at least one alignment feature being configured to align an end of a first substrate with an end of a second substrate; connecting at least one of the following to the top side of the substrate: a power coupling component configured to transfer power to another power coupling component on a robotic drive, wherein the power transfer is performed by induction, or a linear motor component configured to provide a magnetic field to move the robotic drive along a plurality of tracks, wherein the substrate is configured to be connected to the second substrate inside a vacuum chamber to provide a structural platform inside the vacuum chamber for the robotic drive to move in the vacuum chamber along the first plurality of tracks. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] The above aspects and other features are explained in the following description taken in conjunction with the accompanying drawings, in which:

[0009] Figure 1 is a schematic top view of a substrate processing apparatus including features as described herein;

[0010] Figure 2 yes Figure 1 A perspective view of a substrate transport device of a substrate processing device shown;

[0011] Figure 3 yes Figure 2 A perspective view of a substrate transport device is shown.

[0012] Figure 4 yes Figure 2 and Figure 3 an end view of a perspective view of a substrate transport apparatus shown within a transport chamber of a substrate processing apparatus;

[0013] Figure 5 yes Figures 1 to 4 A side view of a robot of a substrate transport device is shown;

[0014] Figure 6 yes Figure 5 A top view of the robot shown;

[0015] Figure 7 yes Figure 5 and Figure 6 A schematic cross-sectional view of the robot shown;

[0016] Figure 8 is an end view of a substrate transport device within a transport chamber of a substrate processing device;

[0017] Fig. 9 Is the description and Figure 1 Block diagrams of various systems in which the illustrated apparatus may be used;

[0018] Fig.10 yes Figure 1 A schematic top view of a substrate transport device within a transport chamber of a substrate processing device is shown;

[0019] Fig. 10A yes Fig.10 An end cross-sectional view of a substrate transport device within a transport chamber of a substrate processing device is shown;

[0020] Fig.11 yes Fig.10 An end view of a substrate transport device within a transport chamber is shown;

[0021] Fig.12 It is shown Fig.10 and Fig.11 A perspective view of one of the magnetic drive and driven members of the linear motor shown in;

[0022] Fig.13 yes Fig.12 A perspective view of the magnetic drive shown;

[0023] Fig.14 is with Fig.10 and Fig.11 A perspective view of a power module for use with the apparatus shown in FIG.

[0024] Fig.14A Yes Description Fig.14 A perspective view of the relative arrangement of multiple power modules is shown.

[0025] Fig.15 Instructions for use Fig.14 and 14A A block diagram of power coupling of a power module shown in;

[0026] Fig.16 yes Fig.15 An isometric view of an exemplary embodiment coupling shown in;

[0027] Fig.17 Yes Description Fig.10 and Fig.11 A schematic diagram of some components of an optical communication system is shown;

[0028] Fig.18 is a view of a substrate transport device on the bottom wall of a transport chamber;

[0029] Fig.18A is a perspective view of an alternative embodiment of a substrate transport device on a bottom wall of a transport chamber;

[0030] Fig.19 is a schematic top view of a substrate processing apparatus including features as described herein;

[0031] Fig. 20A is a schematic side view of a material handling robotic platform including features as described herein;

[0032] Fig. 20B yes Fig. 20A an end view of the platform shown;

[0033] Fig. 20C yes Fig. 20A and 20B A top view of the platform shown;

[0034] Fig.20D yes FIG. 20A to FIG. 20C a partial perspective view of an end portion of one of the baseboard assemblies of the illustrated platform;

[0035] Fig.20E is a partial view of a guide rail or magnetic levitation guide integrally formed on a base plate assembly;

[0036] Fig.20F is a partial cross-sectional view of one of the base plate assemblies showing some of the holes and seals;

[0037] Fig.21A is a schematic side view of a cross-section of a material handling robotic platform and a chamber including features as described herein;

[0038] Fig.21B yes Fig.21A an end section view of the platform shown;

[0039] Fig. 21C yes Fig.21A and 21B a top cross-sectional view of the platform shown;

[0040] Fig.22A is a schematic side view of a cross-section of a material handling robotic platform and a chamber including features as described herein;

[0041] Fig. 22B yes Fig.22A an end section view of the platform shown;

[0042] Fig. 22C yes Fig.22A and Fig. 22B A top cross-sectional view of the platform shown in ;

[0043] Fig.23A is a schematic side view of a cross-section of a material handling robotic platform and a chamber including features as described herein;

[0044] Fig. 23B yes Fig.23A an end section view of the platform shown;

[0045] Fig.23C yes Fig.23A and 23B a top cross-sectional view of the platform shown;

[0046] Fig.24 is a block diagram illustrating the transition between a linear magnetic levitation track / guide and a magnetic levitation gap sensor target using multiple sensors;

[0047] Figures 25 to 30 is a block diagram illustrating various different example embodiments of an example linear robotic control system. DETAILED DESCRIPTION

[0048] Reference Figure 1 , a schematic top view of a device 10 incorporating features of an example embodiment is shown herein. Although features will be described with reference to the example embodiments shown in the drawings, it should be understood that features may be embodied in many alternative forms of embodiments. Furthermore, any suitable size, shape or type of element or material may be used.

[0049] In this example, the device 10 is a substrate processing device. The substrate processing device 10 generally includes a substrate transport device 12 (also referred to as a linear vacuum robot), a plurality of substrate processing chambers 14, a transport chamber 15, an equipment front end module (EFEM) 16, and a substrate box elevator 18. The transport chamber 15 can be maintained as, for example, a vacuum chamber or an inert gas chamber. The transport device 12 is located in the chamber 15 and is suitable for transporting a substrate 20, such as a semiconductor wafer or a flat panel display, between the chambers 14, 15, and / or between the chambers 14, 15 and a fixed transport chamber or a load lock 22. The EFEM 16 is configured to transport the substrate 20 between the substrate box elevator 18 and the fixed transport chamber 22. In this example, the EFEM has a robot 24, and the robot 24 has a scara arm. The robot 24 is configured to move linearly in the EFEM as shown by arrow A. However, any suitable type of EFEM can be provided. The device 10 includes a controller 50. The controller 50 includes at least one processor 52 and at least one memory 54 including a computer program code 56. The controller 50 is configured to control operations of various devices of the apparatus 10 and the robot.

[0050] Also refer to Figures 2 to 4 , which shows a perspective view and an end view of the substrate transport device 12. In this example, the substrate transport device 12 includes a robot 26, a robot housing 28, and a linear drive system 30. Figure 2 and Figure 3 The substrate transport device 12 is shown on the bottom wall of the transport chamber 15 , wherein the side walls and the top wall of the transport chamber 15 are not shown. Figure 4A substrate transport device 12 is shown on the bottom wall or base plate of the transport chamber 15, wherein only the top wall of the transport chamber 15 is not shown. The robot 26 is connected to a robot housing 28, and the robot housing 28 is movable relative to the chamber 15 by means of a linear drive system 30. The linear drive system 30 includes a guide 32 on the floor of the transport chamber 15 and a transport vehicle 33 on the outer bottom side of the housing. For a linear drive system of the magnetic levitation type, the transport vehicle can be separated from the guide rail 32 by a spacing maintained by magnetic / electromagnetic forces. For a linear drive of a non-magnetic levitation type, the guide may include a rail, wherein the transport vehicle travels on the rail. In an alternative example, the guide may be a magnetic levitation transport guide or rail. In one example, the transport vehicle 33 may have wheels attached to the bottom side of the housing, which wheels travel on the track rail 32. The linear drive system 30 is configured to move the robot housing 28, and thus in accordance with the following. Figure 1 The linear path indicated by arrow B moves the substrate transport device 12 along the rails 32 in the transport chamber 15. In an alternative embodiment, instead of a housing, the robot 26 may be attached to an unfenced slide or platform with a transport cart and travel on guides / rails 32. In another alternative example, the guides and transport cart may be provided at the lateral side walls of the chamber 15 in addition to or as an alternative to being on the floor of the chamber 15.

[0051] Also refer to Figures 5 to 7 The robot 26 generally includes a robot drive 34 and a robot arm assembly 36 that is connected to the robot drive 34 . Figures 5 to 7 This is merely an example of a robot with an actuator for moving a substrate and should not be considered limiting. Any suitable type of robot, robot drive, and robot arm may be provided. In this example, the robot arm assembly 36 is a dual-arm arrangement. Each arm 36a, 36b of the robot arm assembly 36 has an arm link, a pulley, a belt, and an end effector 38 supporting a substrate, which is driven by a coaxial drive shaft 40a, 40b, 40c of the robot drive 34. In an alternative example, the drive may include drive shafts that are not coaxially positioned relative to each other. The robot drive 34 has: motors 42a, 42b, 42c for each drive shaft; a vertical drive system 44, including a motor 46; and various position encoders / sensors 48a, 48b, 48c for the motor 42 and / or the drive shaft 40, and the vertical drive system 44.

[0052] The robot 26 is mounted to the robot housing 28 such that substantially all of the robot 26 except for the robot arm assembly 36 is located within the robot housing 28. This may be accomplished, for example, by Figure 3 and Figure 4In particular, the robot arm assembly 36 is located outside the housing 28, near the top side of the robot housing 28, and the drive shafts 40a, 40b, 40c extend from the rest of the drive 34 located inside the housing 28 through holes 58 in the top side of the robot housing 28 (see FIG. Figure 3 ). A seal 60 is provided at the hole 58 to seal the hole 58, but still allow the drive shafts 40a, 40b, 40c to rotate axially and move vertically when the drive shafts 40a, 40b, 40c are moved by the vertical drive system 44. For this type of embodiment, the area inside the housing 28 can have a different environment than the area inside the chamber 15. For example, the area inside the housing can be only air at atmospheric pressure, and the area inside the chamber 15 (outside the housing 28) can be a vacuum environment or an inert gas environment.

[0053] Nested environments

[0054] Figure 8 The schematic diagram shows a "nested" type arrangement that can be used in one example. The robot housing 28 can provide an airtight sealed robot housing for the robot drive 34 (except for a small portion of the drive shaft extending through the hole 58). More specifically, all of the motors 42, 44, all of the sensors 48, all of the wires and most of the drive shaft 40 (see FIG. Figure 7 ) is hermetically enclosed inside the robot housing 28. All active electronic hardware of the robot drive 34, including sensors and motors, can also be kept in the area 29 inside the hermetically sealed robot housing 28, such as Figure 8 As shown; the area 17 of the transport chamber 15 is separated from the environment outside the robot housing 28. The area 17 can be maintained as a separate environment inside the transport chamber 15 and separated from the external atmospheric environment 13. Therefore, the environment 29 is nested inside the transport chamber 15, wherein the environment 17 separates the environment 29 from the external atmospheric environment 13 (the normal atmosphere 13 outside the chamber 15). The environment 29 can be a vacuum environment, but it does not have to be a vacuum environment, even if the environment 17 is a vacuum environment. Because the environment 29 inside the robot housing 28 does not need to be a vacuum environment, this can help prevent gas outgassing from the components inside the robot housing 28. This nested environment (area 29 nested inside area 17) is particularly suitable for the robot housing 28 to be movable inside the transport chamber without being damaged or interrupted by linear relative movement along the length of the transport chamber 15.

[0055] Also refer to Fig. 9, in this example, the device 10 has a linear actuation system 30, a power coupling system 62, a data communication coupling system 64, and a heat transfer coupling system 66. The power coupling system 62 can be used to provide power to components inside the housing 28. The data communication coupling system 64 can be used to send data signals to components inside the housing 28 (and / or through the housing to reach components in the arm) and / or send data from components inside the housing 28 to a data processor outside the chamber 15 (and / or from components in the arm through the housing). The heat transfer coupling system 66 can be used to transfer heat from components inside the housing 28 to outside the chamber 15. In alternative example embodiments, the power coupling system 62 and the data communication coupling system 64 can be at least partially combined to reduce the number of components inside the region 17 of the chamber 15. In some embodiments, a device that does not include all of the above systems can be provided.

[0056] In the example shown, all of these systems 30, 62, 64, 66 are configured not to disrupt or interfere with Figure 8 In other words, the systems 30, 62, 64, 66 are suitably configured so that the environment inside the housing 28 remains separate from the environment inside the chamber 15 when all four systems 30, 62, 64, 66 are in operation.

[0057] Linear Motors

[0058] Also refer to Fig.10 and Fig.11 , the linear drive system 30 typically includes a linear motor 70. The linear motor 70 is an electric motor with a stator and a rotor that are essentially "unfolded" and, instead of producing torque (rotation), produces a linear force along the length. Such an example is disclosed in U.S. Patent Publication No. US2015 / 0214086A1, which is incorporated herein by reference in its entirety. The accompanying drawings show a linear motor located below the housing 28. However, in alternative embodiments, one or more components of the linear drive may not be located below the housing 28. For example, the linear motor and / or components 30 of the linear drive system may be located to the side of the housing 28 and the chamber 15.

[0059] In one example embodiment, the linear drive system 30 may include a magnetic suspension system that utilizes a non-contact magnetic support guidance subsystem. Fig.12 and Fig.13 In the example shown, the linear motor 70 utilizes a modular design, including a fixed magnetic drive 72 and a driven member 76. In this example, the drive 72 has a generally "C" shape. The "C" shape forms a slot 73, and the top and bottom sides of the slot 73 have opposing electromagnets 74. The drive 72 is fixedly mounted to the bottom wall of the chamber 15 in a row, such as Fig.10As best shown, the driven member 76 is attached to the exterior of the underside of the robot housing 28. In an alternative example, the drive 72 may be attached to the robot housing 28 and the rails 76 may be fixedly attached to the transport chamber 15.

[0060] A shield may be provided around the linear guide. Fig. 10A , the transfer chamber 15 includes a robot and a transport vehicle 30 with linear guides 32, and the linear guides and the transport vehicle may be partially or completely enclosed in a shield 31. The purpose of the shield is to reduce or eliminate the migration of unwanted particles or contaminants from the track or the transport vehicle upward into the transfer chamber when the robot is allowed to move in the direction of the track. In addition, the shield may be a single component or a combination of components to prevent material, particles, broken wafer fragments from migrating from the transfer chamber to the operating area of ​​the linear guide. This helps prevent contamination / blockage of the linear guide mechanism.

[0061] The transfer chamber may also include an exhaust port 16 and a pump port 17, such that the exhaust port is substantially toward the top of the chamber 15 and the pump port is located in the shielded area of ​​the lower portion or shield 31. This arrangement further prevents contaminants from migrating from the shielded area into the transfer chamber. When the exhaust port is active, molecules from the exhaust port carrying any trace amounts of airborne contaminants therein will move toward the pump port. Even when the exhaust port is closed, active pumping will still pull any contaminants out of the chamber and into the shielded area.

[0062] like Fig.12 As best shown, the driven member 76 extends into a slot in the "C" shaped driver 72. Thus, the driver 72 can utilize the same guide rail 76 that extends from the bottom side of the robot housing 28 in an autonomous manner. In alternative aspects, other guide rail arrangements may be provided to a greater or lesser extent and mounted in alternative arrangements, for example, mounted on the side walls of the chamber 15. As described above, the modular linear drive system can utilize a non-contact magnetic drive force subsystem. The subsystem may include one or more linear motor modules and one or more position feedback modules. Using the above example, the housing 28 may be as shown. Figure 1 The linear motor 70 is completely outside the housing 28, so the arrangement of the linear motor 70 does not increase the risk of rupture between the two areas 17, 29. In addition, because the driven member 76 does not contact any driver 72, and the drive of the driven member is only controlled magnetically, the risk of contamination from the drive member 76 and the driver 72 in the area 17 is small. The power supply of the driver 72 can be provided by Figure 1The drive 72, or a portion of the drive 72, can be energized to generate a magnetic field to move (e.g., accelerate and decelerate) the driven member 76 in the linear direction B and magnetically positionally lock the housing 28 in a fixed position in the front chambers 14 and 22 as desired.

[0063] Each linear motor module can have a fixed passive magnetic stainless steel component. The fixed passive magnetic stainless steel component can have a toothed portion that interacts with the corresponding primary power device. The passive portion may or may not have a magnet. Multiple supports can use the same secondary in an autonomous manner. Each linear motor module can have a primary power device coupled to a support, wherein the primary power device can have a three-phase winding and a permanent magnet. In an alternative aspect, a permanent magnet can be provided as part of a driven member for the purpose of offsetting gravity and dynamic loads. In an alternative aspect, a permanent magnet can be provided as part of one or more magnetic bearings for the purpose of offsetting gravity and dynamic loads. The Siemens 1FN6 design provides an example of a potential primary and secondary topology. In an alternative aspect, any suitable forcer can be provided. The permanent magnet of the forcer can be provided as a component that simultaneously promotes the effective generation of thrust (coupled with the winding) and also offsets the effective load so that the magnetic bearing minimizes the use of power during normal operation. Here, the attraction between the forcer and the corresponding passive guide rail can be set at the nominal gap so that the force offsets the force caused by gravity, thereby resulting in minimal power consumption. Additionally, the set points for the gaps can be different so that as the payload changes, the gap is adjusted and the forces counteract the forces due to gravity, thereby producing minimal power consumption as the payload changes. For example, the gap on the left mover can be varied independently of the gap on the right mover. Voltage can be selectively applied to the magnetic coils of the primary movers by the advanced control subsystem to produce thrust against the support relative to the fixed passive magnetic stainless steel secondary. Each fixed passive magnetic stainless steel secondary can be mounted with teeth oriented vertically downward so that the attractive force of the permanent magnets of the primary movers can counteract the weight of the support and the payload, thereby minimizing the DC component that needs to be applied by the vertical coils of the non-contact magnetic support guidance subsystem.

[0064] Power coupling system

[0065] Also refer to Fig.14 In this example embodiment, the power coupling system 62 is configured to use the magnetic induction resonance effect to transfer electrical power to the substrate transport device 12, for example, for use by components inside the housing 28. The power coupling system 62 generally includes a power coupling or module 78 and a power coupling or module 80, wherein the power coupling or module 78 is on the bottom wall inside the transport chamber 15 and the power coupling or module 80 is on the outer bottom side of the robot housing 28. Fig.14A , Figure 4 , Fig.10 and Fig.11 As best shown, a plurality of primary modules 78 may be arranged in a row on the bottom wall of the transport chamber 15, and a secondary module 80 may be positioned above the row of primary modules 78, which is attached to the exterior bottom side of the housing 28. An example of inductive power transfer for a substrate transport device is disclosed in U.S. Patent Publication No. US2016 / 0229296A1, which is incorporated herein by reference in its entirety. Power coupling may be combined with a communication device.

[0066] refer to Fig.15 , a block diagram representation of an example embodiment of a power coupling system 62 is shown. As depicted, the power coupling system 62 may include an AC power source 82 that is coupled to at least one primary module 78, at least one secondary module 80, and an optional rectifier circuit 84. AC power 86 is provided to the primary 78, where the primary 78 in turn provides power to the secondary 80 through a gap 88, where the secondary 80 provides AC power 90 to the rectifier circuit 84. When the primary 78 remains stationary, the secondary 80 moves with the robot housing 28. However, in alternative examples, the primary and secondary modules can be configured so that they can move relative to each other, including translation, rotation, or a combination of both. The primary and secondary can be primary or secondary cores, or primary or secondary rails. In alternative aspects, any suitable combination or geometry can be provided. Wires from the module 80 may extend through sealed holes in the housing 28 to, for example, the motor 42 and / or controller (e.g., servo motor controller) of the robot and / or communications equipment and / or sensors inside the housing 28 or, for example, to be subsequently connected to equipment in or on the robot arm assembly 36. In alternative embodiments, more than one module 80 may be provided, and the module 80 may be on one or more lateral sides of the housing 28. Because the modules 78, 80 do not contact each other, there is less risk of contamination inside the chamber 15 when the module 80 is moved relative to the module 78.

[0067] Reference now Fig.16 , shows an isometric view of an alternative embodiment example of power coupling 62a. Fig.14As best shown, the primary module 78 may be comprised of a primary core or rail 94 and a primary winding or coil 96, which may be configured such that an AC current (e.g., provided by an AC power source 82) passes through the primary winding 96 to generate an alternating magnetic flux in the primary core or rail 94. The primary core or rail 94 may have an extension 98 along a direction of relative movement B between the primary module 78 and the secondary module 80. The secondary module 80 may be comprised of a secondary core or rail 100 and a secondary winding or coil 102, which may be configured such that an alternating magnetic flux in the secondary core or rail 100 induces a voltage in the secondary winding 102. The secondary core or rail 100 can be arranged so that it can be moved along the extension 98 of the primary core or rail 94 as part of the secondary module, and so that magnetic flux can pass between the primary core or rail and the extension 98 of the secondary core or rail 100 at the shoe across the air gap 104 between the primary core or rail and the extension 98 of the secondary core or rail 100. The output of the secondary winding 102 can be used directly as an AC power source, or, if DC power is required, the secondary winding can power the rectifier circuit 84 (e.g., inside the housing 28), which in turn can be used as a DC power source 92, such as Fig.15 As shown. The primary winding 96 and the secondary winding 102 may have substantially the same number of turns to achieve the purpose of making the magnitude of the output voltage of the secondary winding substantially equal to the magnitude of the voltage provided by the AC power source 82. If a higher output voltage is required, the number of turns of the secondary winding 102 may be higher than the number of turns of the primary winding 96. Conversely, if a lower output voltage is required, the number of turns of the secondary winding 102 may be lower than the number of turns of the primary winding 96. The primary core 94 and the secondary core 100 may be C-shaped (such as Fig.16 ), E-shaped, or they may have any suitable shape that allows inductive coupling between the primary module 78 and the secondary module 80. The extensions 98 of the primary core 94 may be straight to support linear motion between the primary module 78 and the secondary module 80, or they may be curved to support bending or rotational motion. The primary core 94, the extensions 98, and the secondary core 100 may be made of a soft magnetic material, such as silicon steel, a soft magnetic composite material, another material suitable for guiding magnetic flux, or a combination of these materials. A laminated structure may be used. Here, the primary and secondary may be considered to be inductive parts with windings as coils. All electrical wiring for the secondary module 80 may be positioned inside the robot housing 28 so that no wiring is required in area 17. All electrical wiring for the primary module 78 may be located outside the transport chamber 15 so that no wiring is positioned in area 17.

[0068] Data communication coupling system

[0069] In this example, the data communication coupling system 64 includes an optical communication system 106, such as Figure 10 to Figure 11 and Fig.17 As best shown in FIG. 1 , the optical communication system 106 includes a first member 108 and a second member 110. The first member 108 is connected to the exterior bottom side of the robot housing 28. In an alternative example, the first member 108 can be inside the housing, with an optical window through the housing, or can be located on a side of the housing other than the bottom side. The second member 110 is connected to the side wall of the transport chamber 15. The second member 110 can be located outside of the area 17 and the transport chamber 15 can have a window for the two members 108, 110 to still be in optical communication with each other. In an alternative example, the second member 110 can be inside the chamber 15.

[0070] As the housing moves within the chamber 15, the two components 108, 110 can use one or more laser beams or other optical signals 112 to send and receive data signals in the changing distance between the housing 28 and the chamber 15. The data signals can then be transmitted to components inside the robot housing 28 and from inside the robot housing 28 to, for example, control the robot 26 and / or the linear drive system 30, and for data of sensors of the substrate transport device 12 sent to the controller 50. All wiring (electrical and / or optical) of the first component 108 can be located inside the robot housing 28, so that no wiring is located in the area 17. All wiring (electrical and / or optical) of the second component 110 can be located outside the transfer chamber 15, so that no wiring is located in the area 17. This reduces the risk of contamination in the area 17, such as outgassing of these wires. Communication can be combined with power delivery.

[0071] Heat Transfer Coupled System

[0072] As noted above, the apparatus 10 may also include a heat transfer coupling system 66. The heat transfer coupling system 66 may be used to provide thermal management of components of the substrate transport device 12 within the robot housing 28; for transferring heat from the interior of the robot housing 28 to the exterior of the transfer chamber 15. It may be particularly important whether the region 17 is a vacuum environment with poor heat transfer capabilities. The mobile robot housing 28 is used to house all high-level control subsystems that move with the substrate transport device 12. The mobile robot housing 28 is also used to support a robot transfer arm that cooperates with the mobile support to transport one or more substrates between multiple locations. Due to the presence of active components coupled to the mobile robot housing 28, such as the motor 42, the heat generated by the active components can be dissipated by the thermal management subsystem. For a mobile support in a vacuum, the heat can be dissipated through a medium by radiation or conduction, such as through a gas, by coupling a bellows to the mobile support and circulating a gas or liquid coolant through a chiller. In the case of cooling by radiation alone (or a combination of radiation and convection), the allowed temperature difference between all or part of the moving part and the chamber can be specified as, for example, 50 degrees Celsius or otherwise. For the example embodiment shown in the figure, a non-contact staggered fin structure 120, 122 (see Figures 2 to 4 and Figure 10 to Figure 11 ) to maximize the relative surface area. High emissivity coatings can also be utilized to maximize the surface area associated with heat transfer. Examples of suitable coatings can be aluminum oxide, aluminum nitride, or any suitable high emissivity coating. In alternative aspects, any suitable surface or coating can be provided. For a mobile support in a gas or inert environment, heat can be dissipated by radiation or convection or both. Due to the presence of active components 28 coupled to the mobile support, power and communications can be transmitted to the mobile support subsystem having a power coupling 62 and a communication coupling 64, as described above. Power and communications can be wirelessly transmitted to the mobile support subsystem by inductive coupling, via a servo loop, or a combination of these methods, as described above.

[0073] Active components coupled to the support may be encapsulated by vacuum compatible potting or epoxy, or alternatively, hermetically sealed in the housing 28, or a combination of both. Examples of suitable heat sink subsystems for moving supports are disclosed in Hosek M., Hofmeister C., Low Variability Robots, US U.S. Patent Application No. 13 / 618117, September 14, 2012, US Patent Publication No. US2013 / 0071218A1, which is incorporated herein by reference in its entirety. However, due to the use of the robot housing 28, the use of potting or epoxy can be reduced or eliminated.

[0074] Example alternatives

[0075] Also refer to Fig.18 , shows an alternative example embodiment. This embodiment is similar to Figures 2 to 4 The embodiment shown in , but with a reduced form factor. The linear motor is enclosed, there are shielded linear bearings and protected optical links. In some cases heat transfer fins may not be required. Also refer to Fig.18A , shows another alternative exemplary embodiment. This embodiment is similar to Fig.18 , but in this example, the housing 28 does not include heat transfer fins. In this type of embodiment, wall cooling can be provided in the walls of the housing 28 and / or the walls of the vacuum chamber, such as by flowing a coolant through the chamber walls when there are no fins for cooling. However, such a cooling system can be used in combination with fins. Fig.18A An example of a cooling duct 15a in the wall of the chamber 15' is shown.

[0076] In some embodiments, the cooling of the robot can be enhanced by cooling the vacuum chamber wall. Heat can be transferred from the robot drive to the vacuum chamber wall by radiation or convection or some combination of the two. Regardless of the heat transfer mechanism from the robot drive to the vacuum chamber, the amount and rate of heat transfer can be increased by cooling the chamber wall. The cooling of the chamber wall can be achieved by several different methods or their combination. In an exemplary embodiment, cooling can be achieved by integrating the cooling channel of the vent directly or indirectly on the vacuum chamber wall. The continuous or intermittent flow of the working fluid, which can be a liquid, or a gas, or a combination of the two, can be used so that the working fluid has an initial inlet temperature lower than the vacuum chamber wall temperature to achieve cooling of the vacuum wall temperature. This will result in enhanced cooling of the robot drive. In an alternative embodiment, thermoelectric cooling tiles can be used to cool the surface of the vacuum chamber so that heat is discharged at a higher temperature on the hot side of the thermoelectric tiles, thereby achieving more effective cooling.

[0077] Also refer to Fig.19 , an alternative example embodiment is shown. In this example, the system is used between two cluster tools 150a, 150b. The chamber 15 has a load lock 152 at the opposite end that is coupled to the tools 150a, 150b. The robot housing 28 and attached robot 26 can transport substrates between tool robots 154a, 154b as shown by arrow B. The robot can also be used in Figure 1 The vacuum EFEM shown.

[0078] feature

[0079] One of the features as described herein is the ability for the robot housing 28 to behave as a cart that moves linearly inside the transport chamber 15, carrying all the necessary components of the substrate transport device 12, and the only physical contact with the transport chamber 15 is on the rails 32. However, if a magnetic levitation system is used, contact with the rails 32 may even be eliminated.

[0080] Another feature as described herein is that, with the exception of the robot arm assembly 36 and the top portion of the robot drive shaft, substantially all of the components of the substrate transport device 12 can be isolated inside the robot housing 28 in region 29. Region 29 can have an atmosphere rather than a vacuum; even if region 17 is in a vacuum. This allows the robot 26 to be other than a vacuum compatible robot (a non-vacuum compatible robot). For a non-vacuum compatible robot, degassing is not an important factor in its design and manufacture. Therefore, non-vacuum compatible robots are cheaper than vacuum compatible robots because there is no need to provide a low or zero degassing design. The robot housing 28 can also have a window for optical communication so that the component 108 can be located entirely inside the robot housing 28. The power coupling 80 can also be located entirely inside the robot housing 28, with a portion of the robot housing 28 having a magnetically transparent portion that enables the two power couplings 78, 80 to operate properly by induction. The transport chamber 15 can be provided with a configuration such as Fig.10 A linear encoder 156 is shown to sense the linear position of the robot housing 28 on the guide rail 32. All communications with components in and / or on the robot housing 28 can be accomplished optically or wirelessly, or by power coupling, so that no communication wires or optical cables are required to pass through the area 17.

[0081] With features as described herein, the robot drive 34 can be sealed by the hermetically sealed robot housing 28. Therefore, the transport chamber 15 may only require the rails 32 for the substrate transporter 12 to move, without other physical contacts created by the transport chamber 15 with the robot housing 28 or the substrate transporter 12. Even for non-magnetic levitation embodiments, gaps or spacings can always be provided between the transport chamber 15 and the substrate transporter 12 at all other locations except at the rails 32. Because of this non-contact, this reduces contamination of the area 17 by the substrate transporter 12.

[0082] Modular Platform

[0083] Features as described herein can be used to provide a material handling platform with a traversing vacuum environment robot that is modular. A modular system can allow for scalability and eliminate the need to manufacture and transport oversized components. The modular feature can be used in conjunction with one or more of the above features, or in a completely different system.

[0084] The material handling robot platform 200 example embodiment is FIG. 20A to FIG. 20D , the example embodiment includes features as described herein. As shown in these figures, the platform 200 can be composed of a robot drive unit 202 having a robot arm 36, a controller 50, and one or more substrate assemblies (modules) 204. As an example, three substrate assemblies 204 are FIG. 20A to FIG. 20C . However, more or less than three base plate assemblies 204 may be provided. The controller 50 includes at least one processor 52 and at least one memory 54 including computer program code 56. The controller 50 is configured to control the operation of the various devices and robots of the apparatus 200. The robot drive unit 202 may include the features described above, including the linear drive system 30 and the robot drive 34. However, other types of drives may alternatively be used. In addition, any suitable robot arm assembly may be provided.

[0085] The baseboard assemblies 204 may be identical or may have different features. Each baseboard assembly 204 may include a baseboard 206 and modules 208 that may facilitate lateral movement of the robot drive unit 202 along each baseboard assembly 204. For example, the modules 208 may include guide rails (such as, for example, for mechanical linear bearings or magnetic bearings), power delivery devices (such as, for example, servo loops, arms, contactless power coupling modules), communication devices (such as, for example, servo loops, arms, wireless radio frequency modules, optical communication modules, communication via contactless power coupling), linear electric motors (such as, for example, magnetic tracks, stator segments, etc.), and linear position encoders (such as, for example, scales for optical, magnetic, inductive or capacitive position encoder read heads). The modules may be completely contained on a single baseboard assembly 204. Alternatively, the modules may be mounted so that they span two or more adjacent baseboards.

[0086] like Fig.10As shown, the transport chamber 15 may be provided with a linear encoder 156 to sense the linear position of the robot housing 28 on the guide rail 32. The linear position encoder may include one continuous position track or multiple in-line position tracks and use multiple read heads. All communications with components in and / or on the robot housing 28 may be accomplished optically or wirelessly or by power coupling, so that no communication wires or light passing through the area 17 is required. The sensor may include a position encoder, such as an optical, magnetic, inductive or capacitive position encoder, a laser interferometer or any other suitable device capable of measuring the position of the robot drive unit along the direction of the desired lateral movement (such as, for example, relative to the chamber 15). Using the measurement results from the position sensor, the force generated by the linear actuator can be used to control the position of the robot drive unit along the direction of the desired lateral movement of the robot. In order to support the modular design of the vacuum chamber (i.e., a vacuum chamber composed of multiple parts), additional encoder read heads for the linear actuation system and / or additional position sensors for the magnetic support system can be used to enable smooth transitions between the various parts of the vacuum chamber. Specifically, in the case of mechanical linear bearings, the fixed rails may extend a small distance outside the base plate 206 to allow smooth transfer in the case of a rectangular arrangement of linear rails. Other arrangements such as a triangle may not require this feature.

[0087] The baseboard assemblies 204 can be configured so that they can be arranged adjacent to each other. This arrangement is configured to allow the robot drive unit 202 to traverse from one baseboard assembly 204 to another baseboard assembly 204, as shown by arrow B. To this end, for example Fig.20D As shown, each base plate assembly 204 may have an alignment device 210 to allow two adjacent base plate assemblies 204 to be vertically and laterally aligned at a joint 211 and to provide a smooth transition of the robot drive unit 202 between two adjacent base plate assemblies 204. As an example, the alignment device 210 may be formed by a precision mating surface of a suitable geometry, or by a system of pins and cylindrical holes and / or elliptical cylindrical holes.

[0088] The substrate assembly 204 may also include a sealing feature 212 that, when installed into a vacuum chamber, may facilitate a sealed joint at the joint 211. As examples, the sealing feature 212 may include a polished sealing surface, a coated sealing surface, a groove for a sealing element, and / or a sealing element, such as an O-ring.

[0089] The base plate assembly 204 may also include mechanical connection features 214 between the base plate assembly 204 and the vacuum chamber, such as, for example, holes, studs, threaded fasteners, or clips. The mechanical connection features 214 and the base plate 206 itself may be configured so that each module 204 that facilitates lateral movement of the robotic drive unit 202 may be directly aligned with a corresponding module of an adjacent base plate assembly 204.

[0090] Also refer to Fig.20E , the base plate 206 can be constructed of metal and the rails 32 can be integrally formed therewith. Alternatively, the rails can be formed separately and then connected to the top side 207 of the base plate 206. In this example, the module 208 is attached to the top side 207 of the base plate 206. For example, the module can include a plurality of magnetic drives 72 and a plurality of power couplings 78; aligned along the longitudinal length of the base plate 206. As shown in FIG. Fig.20F As shown, the substrate 206 may include holes 209, 211 that pass between the top side 207 and the bottom side 213 of the substrate 206. Wires 215, 217 from the modules 72, 78 may pass through the holes 209, 211 to the controller 50 or other power source / controller. Seals 219, 221 may be provided at the holes 209, 211 to seal the holes 209, 211.

[0091] like FIG. 21A to FIG. 21C As shown, a plurality of substrate assemblies 204 may be integrated into a vacuum chamber 220. FIG. 21A to FIG. 21C In the embodiment of the present invention, three substrate assemblies 204 are used. As shown, the vacuum chamber 220 may include one or more transverse ribs 222 for providing structural strength. The chamber may also be equipped with one or more covers 224. As a feature of the present invention, due to the transverse ribs 222, the above-mentioned design of the substrate assembly 204 allows the substrate assembly to be installed from the top of the chamber as shown by arrow C so that each substrate assembly directly faces another substrate assembly without interruption; thereby facilitating uninterrupted lateral movement of the robot drive unit 202 along the entire length of the vacuum chamber 220 as shown by arrow B.

[0092] In this embodiment, the base plate 206 has ledges 223 at the bottom side and at opposite ends of the opposite lateral sides (see, for example, Fig.20F and 20A ).like Fig.21A As best shown, the frame of the vacuum chamber has a hole that passes through the bottom side of the frame. A substrate 206 can be placed at the hole to close the hole and form at least a portion of the bottom wall of the vacuum chamber. A protrusion 223 can be located on top of the bottom portion of the vacuum chamber frame together with a seal 225 (see Fig.20F ) forms a seal at the joint.

[0093] To further avoid the manufacture and transportation of oversized components, the vacuum chamber may be divided into a plurality of sections 240, such as FIG. 22A to FIG. 22C As shown. FIG. 22A to FIG. 22C In the example, three sections 240 are shown. The chamber section can be equipped with one or more lids 224. Each section 240 can utilize one or more substrate assemblies 204, which are described above with reference to FIG. 21A to FIG. 21C The portion 240 may include connection and sealing features 242 at the joints of the portion 240, such as Fig.20D 212 in. Sealing features may also be used at other areas, such as the ends of the chamber. This allows one section 240 to be attached to the next section 240 with a seal around the entire open area of ​​the interior, such as see Fig. 22B The shape of the seal is a square or rectangle in this example. As an example, a flange with a fastener or a clamp can be used for the mechanical connection. Polished sealing surfaces, coated sealing surfaces, grooves for sealing elements, and / or various sealing elements (such as O-rings) can be used to achieve a suitable seal. These are just some examples and should not be considered as limiting.

[0094] It should be noted that as the X-axis motion range of the linear vacuum robot becomes very large, it becomes challenging to build a position track for the position sensor that is part of the linear actuator system described earlier. To overcome this limitation, a segmented position tracking method with dual position sensors is disclosed herein. Fig.24 , when the robot drive moves laterally in the X direction, in all cases except when one or the other of the sensors RH1, RH2 is aimed at the transition between the ends of the two position rails E1, E2, the position sensors RH1, RH2 generate valid position data offset by the interval length F. Note the gap or transition N. The disclosed solution overcomes the period when the sensor data is invalid by switching to another sensor. Since the sensors RH1, RH2 are physically offset relative to the length of the guide / rail E1, E2, at least one of the sensors RH1, RH2 always reports a valid position. Since the position of the transition N between the rails E1, E2 is a design quantity, it is known in advance, and the controller 2406 makes a decision to switch between the sensors RH1, RH2 based on the known position of the transition N. In other embodiments, an algorithm can be implemented to use, merge or combine the data from the sensors RH1, RH2 to achieve a gradual or smooth transition of the data when switching the active sensor. During the time period when the data from both sensors is valid, the data from both sensors can be combined or merged in various ways to achieve higher accuracy, resolution, reliability or noise suppression.

[0095] It should be noted that as the X-axis motion range of the maglev-supported robot becomes very large, it becomes challenging to construct a smooth and continuous surface for gap sensor targeting. Fig.24 , there are two vertical sensors P, Q targeting targets T1, T2. There is a break / transition in targets T1, T2 at position L. As long as they do not cross position L, the gap measurement from either sensor is valid. At the instant when the gap sensor crosses the L transition, the controller 2406 makes a decision based on the X motion position from sensors RH1, RH2. A notification algorithm is implemented on the controller 2406 to use the gap data from P or Q.

[0096] An exemplary embodiment may provide an apparatus comprising: a first substrate, wherein the first substrate is configured to have at least one linear drive component and / or at least one power coupling component connected to the top side of the first substrate, wherein the first substrate is configured to be located inside a vacuum chamber; and a plurality of guide rails or transport guides on the top side of the first substrate; wherein an end of the first substrate comprises at least one alignment feature, the at least one alignment feature being configured to align the end of the first substrate with the end of a second substrate, wherein the first substrate is configured to provide, in combination with the second substrate, a structural platform inside the vacuum chamber for a robotic drive to move in the vacuum chamber along the plurality of transport guides.

[0097] The at least one alignment feature may be configured to align a plurality of transport guides with the transport guides of the second substrate. The at least one alignment feature may include at least one protrusion extending from an end of the first substrate and at least one recess extending to a first end of the first substrate. The end of the first substrate may include at least one mechanical connection feature protruding from the end of the first substrate, wherein the at least one mechanical connection feature is configured to be mechanically attached to the second substrate using a fastener. The first substrate may be configured to be mechanically attached directly to the vacuum chamber at the bottom side of the vacuum chamber. The first substrate may be configured to form at least a portion of the bottom wall of the vacuum chamber. The first substrate may close the hole through the bottom of the vacuum chamber. The first substrate may include a first protrusion on two opposite lateral sides of the first substrate, wherein the first protrusion is configured to be located on top of a gantry formed by the vacuum chamber, the gantry being on opposite lateral sides of the vacuum chamber. The first substrate may include a second protrusion on two opposite ends of the first substrate, wherein the second protrusion is configured to be located on top of a stage formed by the vacuum chamber, the stage extending laterally across the vacuum chamber. The first substrate may include a hole through the first substrate, the hole is configured to have a wire extending from the bottom side of the first substrate through the first substrate to the top side of the first substrate, and the device also includes a seal configured to seal the hole with the wire. The device may also include: a vacuum chamber, wherein the vacuum chamber includes a plurality of main portions, the plurality of main portions are configured to be attached to each other in an end-to-end configuration to form an elongated frame, the elongated frame having the first substrate connected thereto, wherein the main portions include opposing lateral side walls and a bottom wall portion, and at least one cover portion, the at least one cover portion is configured to be removably connected to the top side of the opposing lateral side walls. The apparatus may also include at least one linear drive component connected to the top side of the first substrate, wherein the at least one linear drive component is configured to provide a magnetic field to move the robotic drive along the plurality of transport guides. The apparatus may also include a power coupling component, wherein the power coupling component is configured to transfer power to another power coupling component on the robotic drive, wherein the transfer of power is by induction.

[0098] An example method can be provided, comprising: connecting a first substrate assembly within a vacuum chamber, wherein the first substrate assembly includes a first substrate and a plurality of first rails or transport guides on a top side of the first substrate; and connecting a second substrate assembly within the vacuum chamber, wherein the second substrate assembly includes a second substrate, wherein an end of the second substrate is connected to an end of the first substrate, wherein the first substrate assembly includes at least one alignment feature, the at least one alignment feature being configured to align an end of the first substrate with an end of the second substrate, wherein the first substrate is configured to combine with the second substrate to provide a structural platform within the vacuum chamber for a robotic drive to move in the vacuum chamber along the first plurality of transport guides.

[0099] The second substrate assembly may include a second plurality of tracks or transport guides on the second substrate, wherein connecting the second substrate assembly inside the vacuum chamber includes: at least one alignment feature aligns the second plurality of transport guides with the first plurality of transport guides. Connecting the first substrate assembly inside the vacuum chamber may include: the first substrate forms at least a portion of the bottom wall of the vacuum chamber. The first substrate may close the hole through the bottom of the vacuum chamber. Connecting the first substrate assembly inside the vacuum chamber includes: the first substrate includes a first protrusion on two opposite lateral sides of the first substrate, wherein the first protrusion is located on the top of a stage formed by the vacuum chamber, which is on opposite lateral sides of the vacuum chamber. Connecting the first substrate assembly inside the vacuum chamber includes: the first substrate includes a second protrusion, which is located on the top of a stage formed by the vacuum chamber, which extends laterally through the vacuum chamber.

[0100] An example method can be provided, comprising: providing a substrate; providing a plurality of rails or transport guides on a top side of the substrate; providing at least one alignment feature for an end of the substrate, the at least one alignment feature being configured to align an end of a first substrate with an end of a second substrate; connecting at least one of the following to the top side of the substrate: a power coupling component configured to transfer power to another power coupling component on a robotic drive, wherein the power transfer is performed by induction, or a linear motor component configured to provide a magnetic field to move the robotic drive along a plurality of transport guides, wherein the substrate is configured to be connected to the second substrate within a vacuum chamber to provide a structural platform within the vacuum chamber for the robotic drive to move in the vacuum chamber along the first plurality of transport guides.

[0101] An apparatus of an exemplary embodiment may be provided, the apparatus comprising components for connecting a first substrate assembly within a vacuum chamber, wherein the first substrate assembly comprises a first substrate and a first plurality of rails or transport guides on a top side of the first substrate; and components for connecting a second substrate assembly within the vacuum chamber, wherein the second substrate assembly comprises a second substrate, wherein an end of the second substrate is connected to an end of the first substrate, wherein the first substrate assembly comprises at least one alignment feature configured to align an end of the first substrate with an end of the second substrate, wherein the first substrate is configured to combine with the second substrate to provide a structural platform within the vacuum chamber for a robotic drive to move in the vacuum chamber along the first plurality of transport guides.

[0102] An alternative measure to reduce the manufacturing and transportation of oversized components is to eliminate Figures 20A-20C , Figure 21A-Figure 21C substrate 204. FIG. 23A to FIG. 23C An example embodiment is shown in which the substrate is an integral part of the chamber 241. Fig.23A As shown, the chamber can be one-piece or segmented. All features and components required to facilitate lateral movement of the robotic drive unit 202 can be mounted directly on the floor (or wall) of the chamber 241, such as tracks or transport guides (such as, for example, for mechanical linear bearings or magnetic bearings), power delivery devices (such as servo loops, arms, contactless power coupling modules), communication devices (such as servo loops, arms, wireless radio frequency modules, optical communication modules, communication via contactless power couplers), linear electric motors (such as magnetic tracks, stator segments, etc.) and linear position encoders (such as scales for optical, magnetic, inductive or capacitive position encoder read heads). The chamber sections 241 can include connection and sealing features 242 at the joints of the sections 241. Sealing features can also be used at other areas, such as the ends of the chamber. This allows one section 241 to be attached to the next section 241 with a seal around the entire interior open area; such as see Fig. 23B The shape of the seal is a square or rectangle in this example. For example, a flange with a fastener or a clamp can be used for mechanical connection. Polished sealing surfaces, coated sealing surfaces, grooves for sealing elements, and / or various sealing elements (such as O-rings) can be used to achieve a suitable seal. These are just some examples and should not be considered as limiting.

[0103] Linear vacuum robot control system architecture

[0104] Fig.25 A block diagram of an example embodiment of a linear robotic control system is provided in FIG. Fig.25 include Figure 25A-Figure 25C .

[0105] The master controller may perform the following functions: user interface, communication with a host controller (e.g., using serial or Ethernet communication), configuration data management, high-level motion planning (i.e., sequencing of the robot's moves), trajectory generation (calculating the motion profile for each motion of each axis of motion), position control of all axes of motion, and APS (Adaptive Placement System). An example of an adaptive placement system is described in U.S. Patent No. 10,058,996, which is hereby incorporated by reference in its entirety.

[0106] The master controller can receive various commands from the host controller, including configuration, request, and action commands, such as commands to perform a pick or place operation, and it can report the completion of commands and other information to the host controller.

[0107] The master controller can receive the positions of all motion axes (periodically from the motor amplifiers), the status of digital and analog inputs (from I / O modules and, if applicable, from the motor amplifiers) and the timing of digital input changes (from I / O modules and, if applicable, from the motor amplifiers) over the high-speed network. The master controller can send command currents (periodically to the motor amplifiers) and information to set digital and analog outputs (to I / O modules and, if applicable, to the motor amplifiers) for each motion axis over the high-speed network. Whether the track is based on a linear system or a magnetically suspended linear system, the control system can include the use of optical communication links or other wireless communication links. For example, Fig.25 As shown, the system may include two optical communication modules with corresponding viewports in the vacuum chamber wall and the robot drive wall. Thus, an optical communication link may be provided between the external controller and the robot drive, which optical communication link may include closed-loop control as described above.

[0108] The I / O module can read digital and analog inputs (which can include inputs from APS sensors) and set digital and analog outputs. The I / O module can receive information over the high-speed network to set digital and analog outputs (from the host controller), and it can send the status of digital and analog inputs (to the host controller) and the timing of digital input changes (also to the host controller) over the high-speed network.

[0109] Each motor amplifier can perform the following functions: execution of the motor commutation algorithm, execution of the current control loop, reading digital and analog inputs, and setting digital and analog outputs. Each motor amplifier can periodically read the measured position from the position encoder and set the output voltage for controlling the motor. Each motor amplifier can receive the command current and information for setting digital and analog outputs for one or more supported motion axes from the main controller (periodically) via the high-speed network. It can send the measured position of one or more supported motion axes (periodically), the status of digital and analog inputs, and the timing of digital input changes (if applicable) to the main controller via the high-speed network.

[0110] A high-speed network (e.g., EtherCAT) can facilitate communication between the main controller and the I / O modules and motor amplifiers. Outbound traffic (i.e., from the main controller to the I / O modules and motor amplifiers) can include command currents for each axis of motion (sent periodically from the main controller to the motor amplifiers) and information for setting digital and analog outputs (sent from the main controller to the I / O modules and, if applicable, to the motor amplifiers). Inbound traffic (i.e., from the I / O modules and motor amplifiers to the main controller) can include measured position (from the motor amplifier), the status of digital and analog inputs (from the I / O modules and, if applicable, from the motor amplifiers), and the timing of digital input changes (from the I / O modules and, if applicable, from the motor amplifiers).

[0111] If APS (Adaptive Placement System) functionality is required, APS sensors can be routed to one or more inputs of the I / O module directly or through an I / O connector board. The purpose of the optional I / O connector board is to reduce the number of inputs that are routed to the I / O module.

[0112] Fig.26 A block diagram of another example embodiment of a linear robotic control system is provided in FIG. Fig.26 include Figure 26A-26C In this example embodiment, the main controller may be located in the robot drive rather than being part of an external controller.

[0113] exist Fig.26 In an exemplary embodiment of the present invention, the host controller can communicate with the motor amplifier via a high-speed network in substantially the same manner as in the previous embodiments. However, another communication means can be used for communication between the host controller and the I / O module. As an example, a separate communication network (e.g., Ethernet) can be used. The same communication network can also be used for communication with the host controller, such as Fig.26In this case, the network router can be conveniently incorporated into the external controller board. Alternatively, separate communication devices can be used for communication between the host controller and the main controller and communication between the main controller and the I / O modules. These two communication channels can occur on the same physical medium (e.g., serial communication over Ethernet) or use different physical media.

[0114] Communication between the master controller and the I / O modules may allow synchronization of clocks running on the two devices or feature another mechanism to properly determine the timing of digital input changes on the I / O modules for use in APS calculations (e.g., an offset between the two clocks may be periodically identified and applied when a digital input change occurs).

[0115] In yet another example embodiment, high-speed communication via bidirectional beams can be routed through power coupling. Power coupling can use the same set of coils as power transmission or an additional set of coils to transmit data. Fig. 27 The schematic diagram of Fig.25 Equivalent example embodiments, Fig. 27 include Figure 27A-27C . And in Fig.28 The schematic diagram shows Fig.26 Equivalent Example Embodiments. Fig.28 include Figure 28A-28C .

[0116] Block diagrams of additional example embodiments of linear robot control systems are provided in Fig.29 and Fig.30 As shown in FIG. 1 , the linear robot control system includes control of a magnetic support system (magnetic levitation). Fig.29 include Figure 29A-29C . Fig.30 include Figure 30A-Figure 30C .

[0117] The magnetic levitation controller can perform position control of the robot drive (e.g., control five degrees of freedom associated with the lateral position, vertical position, pitch angle, roll angle, and yaw angle of the robot drive) and run a current control loop for each actuator of the magnetic support system. In the process, the magnetic levitation controller can periodically read the measured position from the position sensors of the magnetic support system (e.g., two horizontal sensors and three vertical sensors), and set the output voltage for the force actuators of the magnetic support system (e.g., two horizontal actuator pairs and three vertical actuator pairs). The magnetic levitation controller can receive various commands (including lifting commands) from the main controller via the high-speed network to maintain a given position (which can be conveniently expressed in the form of a gap between the robot drive and the magnetic levitation support system guide) and land the robot drive. Alternatively, the magnetic levitation controller can receive a command position stream (e.g., in the form of periodically transmitted data frames) from the main controller.

[0118] As another alternative, the main controller can perform position control of the robot drive through the magnetic support system. In this process, the main controller can periodically receive the measured position from the magnetic support system sensor from the magnetic suspension controller through the high-speed network, and periodically send the command current of each force actuator of the magnetic support system to the magnetic suspension controller through the high-speed network. In this arrangement, the magnetic suspension controller can still run the current control loop for each actuator of the magnetic support system.

[0119] In order to support modular designs of vacuum chambers (i.e. vacuum chambers consisting of multiple sections), additional encoder read heads for the linear actuation system and / or additional position sensors for the magnetic support system may be utilized to enable smooth transitions between the various sections of the vacuum chamber. Fig.29 and Fig.30 It is schematically shown in FIG.

[0120] For simplicity, the above embodiments may include features removed from the figures. For example, the external controller may include support for a teach pendant, an e-stop, an interlock, a safety circuit (including solid-state components and electromechanical contactors), and an energy storage device (e.g., a battery and / or capacitor). Similarly, the onboard controller may feature a safety circuit (including solid-state components and electromechanical contactors), a back-EMF regeneration system, and an energy storage device (e.g., a battery and / or capacitor).

[0121] Although the above reference Figure 25 to Figure 28 While the described example embodiment shows three axes of rotational motion (T1, T2, and T3), any number of axes of rotation or no axes of rotation may be used. Figure 25 to Figure 28 The example embodiment shows one z-axis, any number of z-axes or no z-axis may be used.

[0122] It should be understood that the foregoing description is illustrative only. Those skilled in the art may devise various alternatives and modifications. For example, the features described in the various dependent claims may be combined with each other in any suitable combination. In addition, the features of the different embodiments described above may be selectively combined into new embodiments. Therefore, this specification is intended to include all such alternatives, modifications and variations that fall within the scope of the appended claims.

Claims

1. A transport device, comprising: a first substrate having a first position track, wherein the first substrate is configured to have at least one first linear drive component and / or at least one first power coupling component connected to a top side of the first substrate, wherein the first substrate is configured to be located inside a vacuum chamber; a second substrate having a second position track, wherein the second substrate is configured to have at least one second linear drive component and / or at least one second power coupling component connected to a top side of the second substrate, wherein the second substrate is configured to be located outside the vacuum chamber, wherein an end of the second substrate is aligned with an end of the first substrate, and an end of the second position track is aligned with an end of the first position track to form a gap between the second position track and the first position track; a plurality of transport guides on a top side of the first substrate and a top side of the second substrate; and a robotic drive configured to move along the first position track and the second position track on the plurality of transport guides, the robotic drive comprising a first position sensor configured to sense the first position track and the second position track and a second position sensor configured to sense the first position track and the second position track, the first position sensor being spaced apart from the second position sensor such that when the first position sensor engages the gap, the second position sensor senses a position of the robotic drive on one of the first position track or the second position track, and when the second position sensor engages the gap, the first position sensor senses a position of the robotic drive on one of the first position track or the second position track, wherein the position of the robotic drive on the first position track or the second position track is used to determine operation of the robotic drive; Wherein an end of the first substrate comprises at least one alignment feature configured to align an end of the first substrate with an end of the second substrate, and wherein the first substrate comprises a seal between an interior of the vacuum chamber and an exterior of the vacuum chamber.

2. The transport device according to claim 1, in, The first position sensor is spaced apart from the second position sensor relative to a length of the first position track or a length of the second position track.

3. The transport device of claim 1, further comprising a controller on the robotic drive, the controller configured to switch between activation of the first position sensor and activation of the second position sensor based on the position of the gap.

4. The transport device of claim 3, wherein an algorithm is implemented to use data from the first position sensor and the second position sensor to obtain a gradual transition of data during switching between activation of the first position sensor and the second position sensor.

5. The transport device according to claim 3, in, When both the first position sensor and the second position sensor are activated, an algorithm is executed to combine data from the first position sensor and the second position sensor.

6. The transport device according to claim 1, in, The at least one alignment feature is configured to align a plurality of transport guides on the first substrate with a plurality of transport guides on the second substrate.

7. The transport device according to claim 1, in, The at least one alignment feature includes at least one protrusion extending from an end of the first substrate and at least one recess extending into the first end of the first substrate.

8. The transport device according to claim 1, in, The end of the first substrate includes at least one mechanical connection feature protruding from the end of the first substrate, wherein the at least one mechanical connection feature is configured to be mechanically attached to the second substrate via at least one fastener.

9. The transport device according to claim 1, in, The first substrate is configured to be mechanically attached directly to the vacuum chamber at a bottom side of the vacuum chamber.

10. The transport device of claim 1 , further comprising the vacuum chamber, wherein the vacuum chamber comprises a plurality of main portions and at least one cover portion, the plurality of main portions being configured to be attached to each other in an end-to-end configuration to form an elongated frame having the first base plate connected thereto, wherein the main portions comprise opposing lateral side walls and a bottom wall portion, and the at least one cover portion being configured to be removably connected to top sides of the opposing lateral side walls.

11. The transport device of claim 1 , further comprising the at least one linear drive component coupled to a top side of the first base plate, wherein the at least one linear drive component is configured to provide a magnetic field to move the robotic actuator along the plurality of transport guides.

12. The transport device of claim 1, further comprising the power coupling component, wherein the power coupling component is configured to transfer power to another power coupling component on the robotic drive, wherein the transfer of power is performed by induction.

13. A method for manufacturing a transport device, comprising: connecting a first substrate assembly within the interior of the vacuum chamber, wherein the first substrate assembly includes a first substrate having a first position track and a first plurality of transport guides located on a top side of the first substrate; and connecting a second substrate assembly inside the vacuum chamber, wherein the second substrate assembly includes a second substrate having a second position track and a second plurality of transport guides located on a top side of the second substrate, wherein one end of the second substrate is connected to one end of the first substrate, and one end of the second position track is aligned with one end of the first position track to form a gap between the second position track and the first position track, A robot drive is provided, the robot drive being configured to move along the first position track and the second position track on a transport guide, the robot drive comprising a first position sensor configured to sense the first position track and the second position track and a second position sensor configured to sense the first position track and the second position track, the first position sensor being spaced apart from the second position sensor so that when the first position sensor engages the gap, the second position sensor senses the position of the robot drive on one of the first position track or the second position track, and when the second position sensor engages the gap, the first position sensor senses the position of the robot drive on one of the first position track or the second position track, wherein the position of the robot drive on the first position track or the second position track is used to determine the operation of the robot drive, wherein the first substrate assembly includes at least one alignment feature configured to align an end of the first substrate with an end of the second substrate, wherein the first substrate includes a seal between an interior of the vacuum chamber and an exterior of the vacuum chamber, wherein the first substrate is configured to provide, in combination with the second substrate, a structural platform for the interior of the vacuum chamber and the exterior of the vacuum chamber for the robotic drive to move along the first plurality of transport guides within the interior of the vacuum chamber and for the robotic drive to move along the second plurality of transport guides outside the vacuum chamber.

14. The method of claim 13, further comprising spacing the first position sensor from the second position sensor relative to a length of the first position track or a length of the second position track.

15. The method of claim 13, further comprising providing a controller on the robotic actuator and using the controller to switch between activation of the first position sensor and activation of the second position sensor based on the position of the gap.

16. The method of claim 15, further comprising implementing an algorithm to use data from the first position sensor and the second position sensor to obtain a gradual transition of data during a switch between activation of the first position sensor and the second position sensor. 17 . The method of claim 15 , further comprising implementing an algorithm to combine data from the first position sensor and the second position sensor when both the first position sensor and the second position sensor are activated.

18. A method for manufacturing a transport device, comprising: providing a first substrate having a first position track; providing a second substrate having a second position track, wherein one end of the second substrate is aligned with one end of the first substrate, and one end of the second position track is aligned with one end of the first position track to form a gap between the first position track and the second position track; providing a first plurality of transport guides on a top side of the first substrate and providing a second plurality of transport guides on a top side of the second substrate; providing at least one alignment feature at one end of the first substrate, the alignment feature being configured to align one end of the first substrate with one end of the second substrate; providing a robotic drive configured to move along the first position track on the first plurality of transport guides and along the second position track on the second plurality of transport guides, the robotic drive comprising a first position sensor configured to sense the first position track and the second position track and a second position sensor configured to sense the first position track and the second position track, the first position sensor being spaced apart from the second position sensor such that when the first position sensor engages the gap, the second position sensor senses a position of the robotic drive on one of the first position track or the second position track, and when the second position sensor engages the gap, the first position sensor senses a position of the robotic drive on one of the first position track or the second position track, wherein the position of the robotic drive on the first position track or the second position track determines operation of the robotic drive; At least one of the following is attached to the top side of the first substrate: a power coupling component configured to transfer power to another power coupling component on the robot actuator, wherein the transfer of power is performed by induction, or a linear motor assembly configured to provide a magnetic field to move the robotic actuator along the plurality of transport guides, wherein the first substrate comprises a seal between the interior of the vacuum chamber and the exterior of the vacuum chamber, wherein the first substrate is configured to be connected to the second substrate inside the vacuum chamber to provide a structural platform inside the vacuum chamber and outside the vacuum chamber for a robotic drive to move along the first plurality of transport guides inside the vacuum chamber and along the second plurality of transport guides outside the vacuum chamber.

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