Atmosphere control device for sintering aluminum nitride

Abstract

The invention discloses an atmosphere control device for aluminum nitride sintering, and particularly relates to the technical field of atmosphere control devices.The atmosphere control device comprises a base, an input pipe, a connecting pipe and an output pipe which are used for adjusting the aluminum nitride sintering atmosphere are arranged at the top of the base, and an adjusting piece used for adjusting the circulation efficiency is arranged between the input pipe and the connecting pipe; the adjusting part comprises a branch pipe arranged between the input pipe and the connecting pipe, the interior of the branch pipe is in threaded connection with two spacer rings distributed at intervals, and an air bag ring is arranged between the two spacer rings. Air is conveyed into the air bag ring through the air pump via the outlet pipe, the air pipe and the communicating pipe, so that the air bag ring can be expanded, the diameter of the inner ring of the air bag ring can be changed due to expansion of the air bag ring, the diameter of the input pipe can be indirectly adjusted, the effect of accurately controlling the air flow is achieved, and therefore it is ensured that the atmosphere is stable; and the aluminum nitride sintering effect is prevented from being influenced by atmosphere fluctuation.

Description

Technical Field

[0001] The invention relates to the technical field of atmosphere control devices, and more specifically to an atmosphere control device for aluminum nitride sintering. Background Art

[0002] Aluminum nitride sintering is a process that converts aluminum nitride powder into dense ceramic materials through high-temperature treatment. Its core is to improve the density and thermal conductivity of the material while avoiding the penetration of oxygen atoms. Aluminum nitride is an advanced ceramic material with high thermal conductivity, low dielectric constant, good electrical insulation and mechanical strength. It is widely used in electronics, power and structural ceramics. In the sintering process, atmosphere control has a decisive influence on the performance of the final product.

[0003] The key to atmosphere control in aluminum nitride sintering is to select the appropriate atmosphere type and accurately control the atmosphere parameters to ensure that the final product has excellent thermal conductivity and structural stability. As shown in the prior art of publication number CN220083721U, although the prior art drives the electric regulating valve through the controller, so that the device can automatically adjust the atmosphere in the sintering furnace as needed, which not only saves time and effort, but also saves labor costs. However, the diameter of the pipeline used to transport gas for atmosphere adjustment in the prior art is fixed, so that the gas flow rate cannot be adjusted in time according to the processing reaction, resulting in certain limitations of the technical solution. Summary of the invention

[0004] In order to overcome the above-mentioned defects of the prior art, the present invention provides an atmosphere control device for aluminum nitride sintering, which uses an air pump to transport air to the interior of an airbag ring through an outlet pipe, an air pipe and a connecting pipe, so that the airbag ring can be expanded. The expansion of the airbag ring will cause the inner ring diameter of the airbag ring to change, thereby indirectly adjusting the diameter of the input pipe and achieving the effect of accurately controlling the gas flow rate, thereby ensuring atmosphere stability and avoiding the influence of atmosphere fluctuations on the aluminum nitride sintering effect, so as to solve the problems arising from the above-mentioned background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: an atmosphere control device for aluminum nitride sintering, comprising a base, an inlet pipe, a connecting pipe and an outlet pipe for adjusting the aluminum nitride sintering atmosphere are arranged on the top of the base, wherein an adjusting member for adjusting the flow efficiency is arranged between the inlet pipe and the connecting pipe;

[0006] The regulating member comprises a branch pipe arranged between the input pipe and the connecting pipe, wherein the branch pipe is internally threadedly connected with two spacer rings spaced apart, an air bag ring is arranged between the two spacer rings, the top of the air bag ring is fixedly connected with a connecting pipe, the top of the connecting pipe extends to the top of the branch pipe and is fixedly connected with an air pipe;

[0007] A fixing plate is installed on the rear side of the branch pipe, and an air pump is installed on the rear side of the fixing plate. An inlet pipe and an outlet pipe are installed on the top and bottom of the air pump respectively. The inlet pipe is arranged at the bottom of the outlet pipe, and the end of the outlet pipe away from the air pump extends to the top of the air pipe, and the outside of the end of the outlet pipe close to the air pipe is movably connected with a packaging ring through a bearing. The packaging ring is sleeved on the outside of the air pipe, and the inner wall of the packaging ring is threadedly connected to the outside of the air pipe.

[0008] In a preferred embodiment, the top end of the connecting tube is externally sleeved with a screw ring installed on the top of the branch tube, the top of the screw ring is provided with a fixing ring sleeved on the outside of the connecting tube, and the inner wall of the fixing ring is threadedly connected to the outside of the connecting tube, the top of the fixing ring is provided with a packaging tube sleeved on the outside of the connecting tube, and the bottom end of the packaging tube is sleeved on the outside of the screw ring, and the inner wall of the packaging tube is threadedly connected to the outside of the screw ring.

[0009] In a preferred embodiment, a fixing seat is installed on the front side of the branch pipe, a control panel is installed on the front side of the fixing seat, a first air pressure sensor is provided on the rear side of the control panel, the first air pressure sensor is installed on the top of the branch pipe, and the detection end of the first air pressure sensor extends to the inside of the branch pipe, and the first air pressure sensor is arranged inside one end of the branch pipe close to the connecting pipe.

[0010] In a preferred embodiment, two movable rings are provided between the connecting pipe and the input pipe, the two movable rings are respectively sleeved on the outside of the two ends of the branch pipe, and the inner wall of the movable ring is movably connected to the outside of the branch pipe through a bearing;

[0011] A main bevel gear is sleeved on the outer side of the ends of the two movable rings away from each other, and a slave bevel gear is meshed on the top and bottom of the end of the main bevel gear away from the movable ring. Two mirror-distributed mounting plates are arranged between the two slave bevel gears, and the mounting plates are mounted on the end of the branch pipe close to the movable ring.

[0012] The two mounting plates are each provided with mounting grooves on the sides close to each other, and a threaded rod movably connected through a bearing is installed inside the mounting groove, and a clamping plate is connected to the external thread of one end of the threaded rod away from the mounting groove, and a clamping groove is provided on the side of the input pipe corresponding to the clamping plate and the side of the connecting pipe corresponding to the clamping plate, and the clamping plate extends from one end of the threaded rod to the inside of the clamping groove, and a linkage shaft is installed from the side of the bevel gear close to the mounting plate, and the linkage shaft extends from one end of the bevel gear to the inside of the mounting plate and is fixed to the threaded rod.

[0013] In a preferred embodiment, both ends of the output tube are sleeved with support seats for connecting to the base, and the top ends of the two support seats are sleeved on the outside of the output tube and the connecting tube respectively.

[0014] In a preferred embodiment, solenoid valves are installed outside the end of the output pipe away from the connecting pipe and outside the end of the input pipe away from the connecting pipe, and a second air pressure sensor is installed outside the end of the input pipe close to the solenoid valve.

[0015] In a preferred embodiment, a common mounting seat is provided between the output pipe and the input pipe, a controller is installed on the front side of the mounting seat, and two connecting brackets for connecting to a supporting seat are installed on both sides of the mounting seat.

[0016] In a preferred embodiment, an adjusting ring is sleeved on the outer side of one end of the movable ring away from the main bevel gear.

[0017] In a preferred embodiment, the cross-section of the clamping plate and the cross-section of the mounting groove are both set to be rectangular, and the outer portion of the clamping plate is in contact with the inner wall of the mounting groove.

[0018] Technical effects and advantages of the present invention:

[0019] 1. The air is pumped into the airbag ring through the outlet pipe, air pipe and connecting pipe, so that the airbag ring can be expanded. The expansion of the airbag ring will change the diameter of the inner ring of the airbag ring, thereby indirectly adjusting the diameter of the input pipe and achieving the effect of accurately controlling the gas flow rate, thereby ensuring the atmosphere is stable and avoiding the influence of the atmosphere fluctuation on the aluminum nitride sintering effect. Different sintering stages require different gas flow rates. A larger gas flow rate is required in the heating stage to promote the reaction, and a smaller gas flow rate is required in the insulation stage to maintain a stable temperature and pressure.

[0020] 2. The main bevel gear is driven to rotate by operating the movable ring. The main bevel gear drives the two threaded rods to rotate synchronously with the help of the two meshing slave bevel gears, so that the threaded rod can drive the clamping plate limited by the installation groove to move into the inside of the clamping groove, so that the branch pipe can be conveniently installed between the input pipe and the connecting pipe. At the same time, the operation can be reversed to realize the effect of conveniently disassembling the branch pipe, thereby improving the convenience of the staff to disassemble and install the branch pipe;

[0021] 3. By rotating the packaging ring that is threadedly connected to the trachea, the outlet pipe is separated from the trachea, and then the packaging tube that is threadedly connected to the screw ring is rotated, and then the fixing ring that is threadedly connected to the connecting pipe is rotated, so that the trachea and the connecting pipe are not restricted, and finally the spacer ring that is threadedly connected to the branch pipe is rotated to make the airbag ring unrestricted and easy to disassemble, thereby making it convenient for the staff to disassemble and maintain the airbag ring. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 This is a front view of the branch pipe of the present invention;

[0024] Figure 3 It is a rear view of the branch pipe of the present invention;

[0025] Figure 4 It is a cross-sectional view of a branch pipe of the present invention;

[0026] Figure 5 For the present invention Figure 4 Enlarged view of part A;

[0027] Figure 6 For the present invention Figure 4 Enlarged view of part B;

[0028] Figure 7 It is a cross-sectional view of the input pipe of the present invention.

[0029] The accompanying drawings are marked as follows: 1. base; 2. input pipe; 3. connecting pipe; 4. output pipe; 5. branch pipe; 6. spacer ring; 7. air bag ring; 8. connecting pipe; 9. air pipe; 10. fixing plate; 11. air pump; 12. inlet pipe; 13. outlet pipe; 14. packaging ring; 15. screw ring; 16. fixing ring; 17. packaging tube; 18. fixing seat; 19. control panel; 20. first air pressure sensor; 21. movable ring; 22. main bevel gear; 23. slave bevel gear; 24. mounting plate; 25. mounting groove; 26. threaded rod; 27. clamping plate; 28. clamping groove; 29. ​​linkage shaft; 30. supporting seat; 31. solenoid valve; 32. second air pressure sensor; 33. mounting seat; 34. controller; 35. connecting bracket; 36. adjusting ring. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] Refer to the instruction manual Figure 1-7 The present invention provides an atmosphere control device for aluminum nitride sintering, comprising a base 1, wherein an input pipe 2, a connecting pipe 3 and an output pipe 4 for adjusting the aluminum nitride sintering atmosphere are arranged on the top of the base 1, wherein an adjusting member for adjusting the flow efficiency is arranged between the input pipe 2 and the connecting pipe 3;

[0032] like Figure 2 , 3As shown in , 4, 5 and 7, the regulating member includes a branch pipe 5 arranged between the input pipe 2 and the connecting pipe 3, the branch pipe 5 is internally threadedly connected with two spaced spacer rings 6, an air bag ring 7 is arranged between the two spacer rings 6, the top of the air bag ring 7 is fixedly connected with a connecting pipe 8, the top of the connecting pipe 8 extends to the top of the branch pipe 5 and is fixedly connected with an air pipe 9; a fixing plate 10 is installed on the rear side of the branch pipe 5, an air pump 11 is installed on the rear side of the fixing plate 10, an inlet pipe 12 and an outlet pipe 13 are respectively installed on the top and bottom of the air pump 11, the inlet pipe 12 is arranged at the bottom of the outlet pipe 13, the end of the outlet pipe 13 away from the air pump 11 extends to the top of the air pipe 9, and the end of the outlet pipe 13 close to the air pipe 9 is movably connected to a packaging ring 14 through a bearing, the packaging ring 14 is sleeved on the outside of the air pipe 9, and the inner wall of the packaging ring 14 is threadedly connected to the outside of the air pipe 9.

[0033] When in use, the solenoid valve 31 on the input pipe 2 is opened, so that the gas can be transported to the inside of the sintering furnace through the input pipe 2, the branch pipe 5 and the connecting pipe 3 for aluminum nitride sintering treatment. The solenoid valve 31 on the output pipe 4 can also be opened to discharge the gas in the sintering furnace through the output pipe 4, so that the gas in the sintering furnace can be regulated.

[0034] At the same time, in order to ensure the stability of gas delivery, the staff can start the air pump 11 to deliver air to the inside of the airbag ring 7 through the outlet pipe 13, the air pipe 9 and the connecting pipe 8, so that the airbag ring 7 can expand, and the expansion of the airbag ring 7 will also cause the inner ring diameter of the airbag ring 7 to change, thereby indirectly adjusting the diameter of the input pipe 2, and thus achieving the effect of accurately controlling the gas flow rate, thereby ensuring the stability of the atmosphere in the sintering furnace and avoiding the influence of atmosphere fluctuations on the aluminum nitride sintering effect. Different sintering stages will require different gas flow rates. A larger gas flow rate will be required in the heating stage to promote the reaction, and the gas flow rate needs to be reduced in the insulation stage to maintain a stable temperature and pressure.

[0035] In order to facilitate the inspection and maintenance of the airbag ring 7, it is necessary to realize the convenient disassembly and assembly of the airbag ring 7, such as Figure 4 and 5As shown, the top end of the connecting tube 8 is externally sleeved with a screw ring 15 installed on the top of the branch pipe 5, the top of the screw ring 15 is provided with a fixing ring 16 sleeved on the outside of the connecting tube 8, and the inner wall of the fixing ring 16 is threadedly connected to the outside of the connecting tube 8, the top of the fixing ring 16 is provided with a packaging tube 17 sleeved on the outside of the connecting tube 8, and the bottom end of the packaging tube 17 is sleeved on the outside of the screw ring 15, the inner wall of the packaging tube 17 is threadedly connected to the outside of the screw ring 15, the packaging ring 14 threadedly connected to the trachea 9 is rotated to separate the outlet pipe 13 from the trachea 9, then the packaging tube 17 threadedly connected to the screw ring 15 is rotated, and then the fixing ring 16 threadedly connected to the connecting tube 8 is rotated, so that the trachea 9 and the connecting tube 8 are not restricted, and finally the spacer ring 6 threadedly connected to the branch pipe 5 is rotated, so that the airbag ring 7 is not restricted and is easy to disassemble, thereby making it convenient for the staff to disassemble and maintain the airbag ring 7.

[0036] In order to intuitively understand the gas flow rate, such as Figure 2 , 3 As shown in Figures 4 and 7, a fixing seat 18 is installed on the front side of the branch pipe 5, a control screen 19 is installed on the front side of the fixing seat 18, and a first air pressure sensor 20 is provided on the rear side of the control screen 19. The first air pressure sensor 20 is installed on the top of the branch pipe 5, and the detection end of the first air pressure sensor 20 extends to the inside of the branch pipe 5. The first air pressure sensor 20 is arranged inside one end of the branch pipe 5 close to the connecting pipe 3. The output gas pressure is detected by the first air pressure sensor 20, so that the change in the caliber of the airbag ring 7 can be accurately known.

[0037] In order to facilitate the disassembly and assembly of the branch pipe 5, Figure 1 , 2, 3, 4, 6 and 7, two movable rings 21 are provided between the connecting pipe 3 and the input pipe 2, and the two movable rings 21 are respectively sleeved on the outside of the two ends of the branch pipe 5, and the inner wall of the movable ring 21 is movably connected to the outside of the branch pipe 5 through a bearing; the outer ends of the two movable rings 21 away from each other are sleeved with a main bevel gear 22, because the outer ends of the movable rings 21 away from the main bevel gear 22 are sleeved with an adjusting ring 36, which can enhance the stability of the staff in rotating the movable ring 21 to avoid loosening, and the main bevel gear 2 The top and bottom of the end away from the movable ring 21 are meshed with a sub-bevel gear 23, and two mirror-distributed mounting plates 24 are arranged between the two sub-bevel gears 23. The mounting plates 24 are installed at the end of the branch pipe 5 close to the movable ring 21; the two mounting plates 24 are each provided with a mounting groove 25 on the side close to each other, and a threaded rod 26 movably connected through a bearing is installed inside the mounting groove 25, and the end of the threaded rod 26 away from the mounting groove 25 is externally threadedly connected with a clamping plate 27, and the input pipe 2 is connected to the side of the clamping plate 27 corresponding to the input pipe 2 and the connecting pipe A slot 28 is provided on one side of the corresponding card plate 27. The end of the card plate 27 away from the threaded rod 26 extends to the inside of the slot 28. A linkage shaft 29 is installed on the side of the slave bevel gear 23 close to the mounting plate 24. The end of the linkage shaft 29 away from the slave bevel gear 23 extends to the inside of the mounting plate 24 and is fixed to the threaded rod 26. The operating ring 21 drives the main bevel gear 22 to rotate. The main bevel gear 22 drives the two threaded rods 26 to rotate synchronously with the help of the two meshing slave bevel gears 23, so that the threaded rods 26 can be rotated. 26 drives the clamping plate 27 limited by the installation groove 25 to move into the clamping groove 28, so that the branch pipe 5 can be conveniently installed between the input pipe 2 and the connecting pipe 3. By reversing the above steps, the branch pipe 5 can be disassembled, which improves the convenience of the staff to disassemble and assemble the branch pipe 5. Because the cross-section of the clamping plate 27 and the cross-section of the installation groove 25 are both set as rectangles, and the outside of the clamping plate 27 is in contact with the inner wall of the installation groove 25, the installation groove 25 can limit the clamping plate 27, so as to ensure the stability of the clamping plate 27 when it is displaced.

[0038] In order to ensure the stability of the output pipe 4, the input pipe 2 and the connecting pipe 3, the output pipe 4, the input pipe 2 and the connecting pipe 3 need to be supported, such as Figure 1As shown, both ends of the output tube 4 are sleeved with support seats 30 for connecting to the base 1, and the top ends of the two support seats 30 are sleeved on the outside of the output tube 4 and the connecting tube 3 respectively. The output tube 4, the input tube 2 and the connecting tube 3 are supported and fixed by the two support seats 30, so as to ensure the stability of the output tube 4, the input tube 2 and the connecting tube 3, and avoid the output tube 4, the input tube 2 and the connecting tube 3 from being skewed. In addition, since the outside of the end of the output tube 4 away from the connecting tube 3 and the outside of the end of the input tube 2 away from the connecting tube 3 are both installed with electromagnetic valves 31, and the outside of the end of the input tube 2 close to the electromagnetic valve 31 is installed with a second air pressure sensor 32, the staff can open and close the output tube 4 and the input tube 2 by means of the electromagnetic valve 31, and can also monitor the pressure in the sintering furnace by means of the second air pressure sensor 32, so as to achieve the effect of timely adjusting the pressure.

[0039] To improve the convenience of operating the solenoid valve 31, Figure 1 As shown, a common mounting base 33 is provided between the output pipe 4 and the input pipe 2, a controller 34 is installed on the front side of the mounting base 33, and two connecting brackets 35 for connecting the supporting base 30 are installed on both sides of the mounting base 33. The opening and closing of the solenoid valve 31 are intelligently operated by the controller 34, and the controller 34 is supported and fixed by the mounting base 33 and the connecting bracket 35 to ensure the stability of the controller 34.

[0040] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An atmosphere control device for aluminum nitride sintering, comprising a base (1), characterized in that: An input pipe (2), a connecting pipe (3) and an output pipe (4) for adjusting the aluminum nitride sintering atmosphere are provided on the top of the base (1), wherein an adjusting member for adjusting the flow efficiency is provided between the input pipe (2) and the connecting pipe (3); The regulating member comprises a branch pipe (5) arranged between the input pipe (2) and the connecting pipe (3); the branch pipe (5) is internally threadedly connected with two spacer rings (6) spaced apart; an air bag ring (7) is arranged between the two spacer rings (6); the top end of the air bag ring (7) is fixedly connected to a connecting pipe (8); the top end of the connecting pipe (8) extends to the top of the branch pipe (5) and is fixedly connected to an air pipe (9); A fixing plate (10) is installed on the rear side of the branch pipe (5), and an air pump (11) is installed on the rear side of the fixing plate (10). An inlet pipe (12) and an outlet pipe (13) are installed on the top and bottom of the air pump (11) respectively. The inlet pipe (12) is arranged at the bottom of the outlet pipe (13). One end of the outlet pipe (13) away from the air pump (11) extends to the top of the air pipe (9), and the outer side of the end of the outlet pipe (13) close to the air pipe (9) is movably connected to a packaging ring (14) through a bearing. The packaging ring (14) is sleeved on the outside of the air pipe (9), and the inner wall of the packaging ring (14) is threadedly connected to the outer side of the air pipe (9).

2. The atmosphere control device for aluminum nitride sintering according to claim 1, characterized in that: The top of the connecting tube (8) is externally sleeved with a screw ring (15) mounted on the top of the branch tube (5); the top of the screw ring (15) is provided with a fixing ring (16) sleeved on the outside of the connecting tube (8); the inner wall of the fixing ring (16) is threadedly connected to the outside of the connecting tube (8); the top of the fixing ring (16) is provided with a packaging tube (17) sleeved on the outside of the connecting tube (8); the bottom end of the packaging tube (17) is sleeved on the outside of the screw ring (15); the inner wall of the packaging tube (17) is threadedly connected to the outside of the screw ring (15).

3. The atmosphere control device for aluminum nitride sintering according to claim 1, characterized in that: A fixing seat (18) is installed on the front side of the branch pipe (5), a control panel (19) is installed on the front side of the fixing seat (18), a first air pressure sensor (20) is provided on the rear side of the control panel (19), the first air pressure sensor (20) is installed on the top of the branch pipe (5), and a detection end of the first air pressure sensor (20) extends into the inside of the branch pipe (5), and the first air pressure sensor (20) is arranged inside one end of the branch pipe (5) close to the connecting pipe (3).

4. The atmosphere control device for aluminum nitride sintering according to claim 1, characterized in that: Two movable rings (21) are provided between the connecting pipe (3) and the input pipe (2), the two movable rings (21) are respectively sleeved on the outside of the two ends of the branch pipe (5), and the inner wall of the movable ring (21) is movably connected to the outside of the branch pipe (5) through a bearing; A main bevel gear (22) is sleeved on the outer side of the ends of the two movable rings (21) that are away from each other, and a slave bevel gear (23) is meshed on the top and bottom of the end of the main bevel gear (22) that is away from the movable ring (21), and two mirror-distributed mounting plates (24) are arranged between the two slave bevel gears (23), and the mounting plates (24) are mounted on the end of the branch pipe (5) close to the movable ring (21); A mounting groove (25) is provided on one side of the two mounting plates (24) close to each other, and a threaded rod (26) movably connected via a bearing is installed inside the mounting groove (25), and a clamping plate (27) is externally threadedly connected to one end of the threaded rod (26) away from the mounting groove (25), and a clamping groove (28) is provided on one side of the input pipe (2) corresponding to the clamping plate (27) and one side of the connecting pipe (3) corresponding to the clamping plate (27), and one end of the clamping plate (27) away from the threaded rod (26) extends to the inside of the clamping groove (28), and a linkage shaft (29) is installed from one side of the bevel gear (23) close to the mounting plate (24), and the linkage shaft (29) extends from one end of the bevel gear (23) to the inside of the mounting plate (24) and is fixed to the threaded rod (26).

5. The atmosphere control device for aluminum nitride sintering according to claim 1, characterized in that: Support seats (30) for connecting to the base (1) are sleeved on the outside of both ends of the output pipe (4), and the top ends of the two support seats (30) are sleeved on the outside of the output pipe (4) and the connecting pipe (3) respectively.

6. The atmosphere control device for aluminum nitride sintering according to claim 1, characterized in that: An electromagnetic valve (31) is installed on the outside of one end of the output pipe (4) away from the connecting pipe (3) and on the outside of one end of the input pipe (2) away from the connecting pipe (3), and a second air pressure sensor (32) is installed on the outside of one end of the input pipe (2) close to the electromagnetic valve (31).

7. The atmosphere control device for aluminum nitride sintering according to claim 5, characterized in that: A common mounting seat (33) is provided between the output pipe (4) and the input pipe (2), a controller (34) is installed on the front side of the mounting seat (33), and two connecting brackets (35) for connecting to the support seat (30) are installed on both sides of the mounting seat (33).

8. The atmosphere control device for aluminum nitride sintering according to claim 4, characterized in that: An adjusting ring (36) is sleeved on the outer side of one end of the movable ring (21) away from the main bevel gear (22).

9. The atmosphere control device for aluminum nitride sintering according to claim 4, characterized in that: The cross-sections of the clamping plate (27) and the mounting groove (25) are both set to be rectangular, and the outside of the clamping plate (27) is in contact with the inner wall of the mounting groove (25).

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