Platform support compensation method and device, support platform, electronic equipment and medium

Abstract

The embodiment of the application provides a platform support compensation method and device, a support platform, electronic equipment and a medium, and belongs to the field of semiconductor equipment manufacturing. The method is applied to a support platform, a first surface of the platform is used for placing a material processing element, and a second surface is provided with fixed support points and auxiliary support points to support the platform. The method comprises the following steps: constructing a platform simulation structure based on the support platform; simulating the application of a support force to a target simulation support point to obtain a first deformation value; calculating according to the first deformation value and the support force to obtain a first deformation coefficient; calculating according to the first deformation value, the first deformation coefficient and an initial deformation value of the target simulation support point to obtain a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero; and supporting and compensating the platform simulation structure according to the target support force and a target simulation position. The embodiment can improve the accuracy of supporting and compensating the support platform, and further improve the flatness of the platform.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor device manufacturing, and particularly relates to a platform support compensation method and device, a support platform, electronic equipment and a medium. BACKGROUND

[0002] The flatness of a processed material, such as a semiconductor material, a building material and a mechanical material, affects the precision of a finally processed device or structure, and therefore, the flatness of a processing platform used for processing the material needs to be ensured. A semiconductor material, such as a wafer, can be used for manufacturing an integrated circuit chip, and the flatness of the wafer affects the manufacturing precision of the integrated circuit chip. During the production, processing and testing of the wafer, the flatness and stability of a semiconductor processing platform are required to be extremely high.

[0003] In the related art, the support force of the processing platform is adjusted according to human experience, which is prone to cause the adjustment force to be too large or too small, resulting in a large overall deformation degree of the processing platform and low flatness. How to accurately adjust the support force of the processing platform has become a problem to be solved. SUMMARY

[0004] The main purpose of the embodiments of the present application is to provide a platform support compensation method and device, a support platform, electronic equipment and a medium, which aims to improve the accuracy of support compensation of the support platform.

[0005] To achieve the above purpose, a first aspect of the embodiments of the present application provides a platform support compensation method, which is applied to a support platform. A first surface of the support platform is used for placing a material processing element. A second surface of the support platform is provided with a fixed support point and an auxiliary support point. The second surface is an opposite surface of the first surface. The auxiliary support point includes a first auxiliary support point. A support force is applied to the fixed support point and the auxiliary support point to support the support platform. The platform support compensation method comprises the following steps.

[0006] A platform simulation structure is constructed based on the support platform. The platform simulation structure includes a target simulation support point corresponding to the first auxiliary support point.

[0007] A preset support force is simulated to be applied to the target simulation support point, to obtain a first deformation value of the target simulation support point.

[0008] A first deformation coefficient of the target simulation support point is calculated according to the first deformation value and the support force.

[0009] A target simulation position corresponding to the target simulation support point in a target number of the target simulation support points in the platform simulation structure is obtained.

[0010] calculating, according to the first deformation value, the first deformation coefficient, and an initial deformation value of the target simulation support point, a target support force applied to the target simulation support point when a simulation deformation value of the platform simulation structure is zero;

[0011] supporting and compensating the platform simulation structure according to the target support force and the target simulation position.

[0012] In some embodiments, the calculating, according to the first deformation value and the support force, the first deformation coefficient of the target simulation support point comprises:

[0013] performing mean value calculation on the plurality of support forces to obtain a support force mean value;

[0014] performing mean value calculation on the first deformation values to obtain a first deformation value mean value;

[0015] calculating, according to the support force mean value and the first deformation value mean value, the first deformation coefficient of the target simulation support point.

[0016] In some embodiments, the auxiliary support points further comprise a second auxiliary support point, and the platform simulation structure further comprises an associated simulation support point corresponding to the second auxiliary support point, and the calculating, according to the first deformation value, the first deformation coefficient, and an initial deformation value of the target simulation support point, a target support force applied to the target simulation support point when a simulation deformation value of the platform simulation structure is zero, comprises:

[0017] obtaining a second deformation value of the associated simulation support point under the action of the support force, and performing mean value calculation on the second deformation value to obtain a second deformation value mean value;

[0018] calculating, according to the support force mean value and the second deformation value mean value, a second deformation coefficient of the associated simulation support point;

[0019] calculating, according to the first deformation coefficient, the second deformation coefficient, and the initial deformation value, a target simulation deformation value of the target simulation support point;

[0020] calculating a target support force applied to the target simulation support point when a target simulation deformation value of the target simulation support point is zero.

[0021] In some embodiments, the obtaining a target simulation position corresponding to the target number of target simulation support points on the platform simulation structure comprises:

[0022] obtaining an initial deformation image of the platform simulation structure under the fixed support point and gravity, the initial deformation image including an initial deformation value of each position on the platform simulation structure;

[0023] determining a plurality of target regions on the platform simulation structure based on the initial deformation image;

[0024] determining a target number of the target simulation support points and corresponding target simulation positions in the target regions according to the initial deformation value of each position in the target regions.

[0025] In some embodiments, after the platform simulation structure is supported and compensated according to the target support force and the target simulation position, the method further includes:

[0026] obtaining a deformation value of a target support point, the target support point including the fixed support point and the auxiliary support point;

[0027] obtaining a deformation value between any two target support points;

[0028] comparing the deformation value of the target support point with a preset first deformation value threshold, and comparing the deformation value between the any two support points with a preset second deformation value threshold;

[0029] when the deformation value of the target support point is greater than the first deformation value threshold, or the deformation value between the any two support points is greater than the second deformation value threshold, increasing the number of target simulation support points of the platform simulation structure.

[0030] To achieve the above object, a second aspect of the embodiment of the present application proposes a platform support compensation device, which includes:

[0031] a first simulation unit configured to construct a platform simulation structure based on the support platform, the platform simulation structure including a target simulation support point corresponding to the first auxiliary support point;

[0032] a second simulation unit configured to simulate applying a preset support force to the target simulation support point, to obtain a first deformation value of the target simulation support point;

[0033] a first calculation unit configured to calculate according to the first deformation value and the support force, to obtain a first deformation coefficient of the target simulation support point;

[0034] an obtaining unit configured to obtain a target simulation position corresponding to the target number of target simulation support points on the platform simulation structure;

[0035] a second computing unit, configured to perform calculation according to the first deformation value, the first deformation coefficient and an initial deformation value of the target simulation support point, to obtain a target support force applied to the target simulation support point when a simulation deformation value of the platform simulation structure is zero;

[0036] a compensation unit, configured to perform support compensation on the platform simulation structure according to the target support force and the target simulation position.

[0037] To achieve the above object, a third aspect of the embodiments of the present application provides a support platform, a first surface of the support platform is used for placing a material processing element, a second surface of the support platform is provided with a fixed support point and an auxiliary support point, the auxiliary support point includes a first auxiliary support point, a support force is applied to the fixed support point and the auxiliary support point to support the support platform, and the support platform further includes:

[0038] a controller, configured to control the auxiliary support structure to apply the target support force to the auxiliary support point according to a target support force and a target actual position of the auxiliary support point, to perform support compensation on the support platform, the target support force being obtained by the platform support compensation method of the first aspect.

[0039] In some embodiments, the auxiliary support structure includes:

[0040] an auxiliary support component, configured to be in contact with the second surface of the support platform to support the support platform;

[0041] a pressure sensor, configured to detect a support force provided by the auxiliary support component to the support platform and output pressure value information;

[0042] an adjusting nut, one end of the adjusting nut being electrically connected with the controller, and the other end of the adjusting nut being connected with the auxiliary support component, the controller controlling the adjusting nut to move towards a direction close to or away from the support platform according to the target support force, to control the auxiliary support component to perform support compensation on the support platform.

[0043] To achieve the above object, a fourth aspect of the embodiments of the present application provides an electronic device, the electronic device including a memory and a processor, the memory storing a computer program, and the processor implementing the method of the first aspect when executing the computer program.

[0044] To achieve the above object, a fifth aspect of the embodiments of the present application provides a computer readable storage medium, the computer readable storage medium storing a computer program, and the computer program implementing the method of the first aspect when executed by a processor.

[0045] The platform support compensation method and device, support platform, electronic equipment and medium provided in the application, the method provided in the embodiment of the application is applied to the support platform, the first surface of the support platform is used for placing a material processing element, the second surface is provided with a fixed support point and an auxiliary support point, and the support platform is supported by applying a support force to the fixed support point and the auxiliary support point. The method provided in the embodiment of the application constructs a platform simulation structure based on the support platform, and the platform simulation structure includes a target simulation support point corresponding to the auxiliary support point of the support platform; a preset support force is simulated to be applied to the target simulation support point, and a first deformation value of the target simulation support point is obtained; the first deformation value and the support force are calculated to obtain a first deformation coefficient of the target simulation support point; a target simulation position corresponding to a target number of target simulation support points on the platform simulation structure is obtained; the first deformation value, the first deformation coefficient and an initial deformation value of the target simulation support point are calculated to obtain a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero; and finally, the platform simulation structure is supported and compensated according to the target support force and the target simulation position.

[0046] Under the self weight of the support platform, the deformation value and the deformation coefficient of each auxiliary support point are combined to simulate and calculate the target support force required to offset the deformation, and the accurate support force value can be calculated; then the support force provided by each auxiliary support point is adjusted by the target support force obtained by calculation, so as to offset the deformation at the auxiliary support point, so that the overall deformation of the platform and the deformation of the single support point are minimized, and finally the flatness of the support platform is improved. BRIEF DESCRIPTION OF DRAWINGS

[0047] Figure 1 FIG. 1 is a structural schematic diagram of a support platform provided by an embodiment of the application;

[0048] Figure 2 FIG. 2 is a platform deformation schematic diagram of three-point fixed support in the related art;

[0049] Figure 3 FIG. 3 is a schematic diagram of a support mode provided by an embodiment of the application;

[0050] Figure 4 FIG. 4 is a platform schematic diagram of increasing auxiliary support in the related art;

[0051] Figure 5 FIG. 5 is a platform deformation schematic diagram of applying auxiliary support force in the related art;

[0052] Figure 6 FIG. 6 is a flowchart of a platform support compensation method provided by an embodiment of the application;

[0053] Figure 7 FIG. 7 is an initial deformation schematic diagram of a platform simulation structure provided by an embodiment of the application;

[0054] Figure 8 is a schematic diagram of a target simulation support point provided by an embodiment of the present application;

[0055] Figure 9 is a schematic diagram of simulation calculation of support force of D point provided by an embodiment of the present application;

[0056] Figure 10 is a structural schematic diagram of a platform support compensation device provided by an embodiment of the present application;

[0057] Figure 11 is a schematic diagram of a spherical gasket support structure provided by an embodiment of the present application;

[0058] Figure 12 is a schematic diagram of an auxiliary support structure provided by an embodiment of the present application;

[0059] Figure 13 is a module schematic diagram of a control circuit provided by an embodiment of the present application;

[0060] Figure 14 is a hardware structure schematic diagram of an electronic device provided by an embodiment of the present application.

[0061] Corresponding reference signs: support platform 101, rack 102, fixed support point 301, auxiliary support point 302, spherical gasket support structure 1100, spherical gasket 1101, spherical contact surface 1102, support ring 1103, auxiliary support component 1201, pressure sensor 1202, adjusting nut 1203, locking screw 1204, sensor wiring jack 1205. DETAILED DESCRIPTION

[0062] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application is further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application.

[0063] It should be noted that although the functional modules are divided in the device schematic diagram, and the logical order is shown in the flowchart, in some cases, the steps shown or described can be executed in a different order than the module division in the device or the order in the flowchart. The terms "first", "second", etc. in the specification and claims and the above drawings are used to distinguish similar objects, and do not necessarily describe a specific order or sequence.

[0064] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms used herein are only for the purpose of describing the embodiments of the present application, and are not intended to limit the present application.

[0065] Before the embodiments of the present application are introduced, the platform support compensation scheme in the prior art is introduced. In semiconductor production testing, in order to better meet the needs of semiconductor production capacity, wafers are developing in the direction of large size (for example, 12 inches), therefore, the processing platform for processing and testing wafers is also larger, and the flatness of the processing platform has a higher requirement. Please refer to Figure 1 , Figure 1 is a structural schematic diagram of a support platform provided by the embodiments of the present application. Wherein, the semiconductor processing platform can include a support platform 101 and a rack 102, the rack 102 is used to carry the support platform 101, and the support platform 101 is used to carry the processing material (for example, a wafer).

[0066] In order to enable the support platform 101 to be placed flat on the rack 102, support points need to be set to support the platform. The load of a small platform is small, and a three-point support method can be used to support it. Since the deformation of a small platform is small, the deformation caused by three-point support is very small, which can meet the requirement of platform flatness. However, for a large platform, although three-point support can fix the platform, the platform outside the support points will deform obviously due to large span or cantilever, which causes the large platform to fail to meet the flatness requirement in the material production testing process. Please refer to Figure 2 , Figure 2 is a schematic diagram of three-point fixed support in the related art, it can be seen that the large platform will still deform obviously under three-point support, which causes the flatness of the platform to be not high. Figure 2 A shows that when the support force exerted by two of the three fixed support points is large, the two ends of the support platform deform in the opposite direction, Figure 2 B shows that when the support force exerted by the support point in the middle of the three fixed support points is too large, the middle of the support platform deforms in the opposite direction.

[0067] Therefore, in order to reduce the deformation of the platform, a structure that reduces deformation, such as a reinforcing rib, can be used, or the thickness of the platform can be increased to reduce the deformation. However, these two methods will increase the volume of the platform and also increase the additional processing cost. In addition, some auxiliary support points can be added on the basis of three-point fixed support. Please refer to Figure 3 , Figure 3 is a schematic diagram of a support method provided by the embodiments of the present application. Figure 3 The method in is to add three auxiliary support points on the basis of the three fixed support points 301 to adjust the local deformation of the platform. When adjusting, the support force exerted by the three fixed support points 301 is adjusted first, and then the support force exerted by the auxiliary support points is adjusted. Please refer to Figure 4 , Figure 4is a diagram of a platform in the related art that increases auxiliary support. Adding auxiliary support points to a large platform can reduce platform deformation. For example, for the platform in Figure 2 A that deforms, refer to Figure 4 A, in the case of applying a fixed support point at both ends of the platform, applying an auxiliary support point in the middle region between the two fixed support points can reduce the deformation of the middle region of the platform; for the platform in Figure 2 B, a fixed support point is applied in the middle of the platform, but due to the excessive support force applied, the platform deforms significantly, and on this basis, refer to Figure 4 B, Figure 4 B, on the basis of applying a fixed support point in the middle of the platform, an auxiliary support point is added at each end of the platform to reduce the overall deformation of the platform.

[0068] However, in the related art, the support force applied by the auxiliary support point is adjusted based on human experience. If the support force applied is too small, the auxiliary support point cannot support the platform, and if the support force applied is too large, the platform will deform in the opposite direction. Refer to Figure 5 , Figure 5 is a diagram of platform deformation in the related art that applies auxiliary support. Figure 5 A shows a diagram of the platform deforming in the opposite direction due to the excessive support force applied by the auxiliary support points on both sides, Figure 5 B shows a diagram of the platform deforming in the opposite direction due to the excessive support force applied by the auxiliary support point in the middle.

[0069] Therefore, the embodiments of the present application provide a platform support compensation method and device, a support platform, electronic equipment, and a medium, which are aimed at improving the accuracy of supporting and compensating the support platform 101, and thus improving the flatness of the platform. It should be noted that the platform support compensation method provided by the embodiments of the present application can be applied not only to a processing platform for producing and manufacturing processing materials (such as semiconductor materials, building materials, or mechanical materials), but also to some building structures, such as beam structures (long-distance gantry guide rails), without limitation.

[0070] The platform support compensation method and device, the support platform 101, the electronic equipment, and the medium provided by the embodiments of the present application are specifically described as follows. First, the platform support compensation method in the embodiments of the present application is described.

[0071] The application is operable in a multitude of generic or specific computer system environments or configurations. Examples of well known computing systems, environments, and / or configurations that can be suitable for use with the application include, but are not limited to, personal computers, server computers, handheld or laptop devices, tablet devices, multiprocessor systems, microprocessor-based systems, set top boxes, programmable consumer electronics, network PCs, minicomputers, mainframe computers, distributed computing environments that include any of the above systems or devices, and the like. The application can be described in the general context of computer-executable instructions, such as program modules, being executed by a computer. Generally, program modules include routines, programs, objects, components, data structures, and the like, that perform particular tasks or implement particular abstract data types. The application can also be practiced in distributed computing environments where tasks are performed by remote processing devices that are linked through a communications network. In a distributed computing environment, program modules can be located in both local and remote computer storage media including memory storage devices.

[0072] Figure 6 is an optional flowchart of the platform support compensation method provided by the embodiments of the application, Figure 6 The method in the embodiment of the application can include, but is not limited to, steps 601 to 606.

[0073] Step 601, constructing a platform simulation structure based on a support platform;

[0074] Step 602, applying a preset support force to a target simulation support point to obtain a first deformation value of the target simulation support point;

[0075] Step 603, calculating a first deformation coefficient of the target simulation support point according to the first deformation value and the support force;

[0076] Step 604, obtaining target simulation positions corresponding to a target number of target simulation support points on the platform simulation structure;

[0077] Step 605, calculating a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero according to the first deformation value, the first deformation coefficient, and an initial deformation value of the target simulation support point;

[0078] Step 606, supporting and compensating the platform simulation structure according to the target support force and the target simulation positions.

[0079] Specifically, the platform support compensation method provided by the embodiments of the application is applied to the support platform 101. Please refer to Figure 1The support platform 101 shown in the figure. The support platform 101 includes a first surface and a second surface, the second surface is the opposite surface of the first surface, specifically, the first surface can be an upper surface, the first surface is used to carry a material processing element, for example, a semiconductor processing material or a building material, etc. The second surface can be a lower surface, the second surface is provided with a fixed support point 301 and an auxiliary support point 302. The fixed support point 301 is three support points not on the same straight line, used to determine a plane. The three fixed support points 301 form a triangular structure, which can be an equilateral triangle or an irregular triangle, if it is an equilateral triangle, the center of gravity of the support platform 101 is close to the center of gravity of the triangle. In addition to the fixed support point 301, the remaining support points are auxiliary support points 302.

[0080] In step 601 of some embodiments, the platform simulation structure can be constructed according to simulation software, which is not limited here. Please refer to Figure 7 , Figure 7 is the initial deformation schematic diagram of the platform simulation structure provided by the embodiments of the application. Among them, Figure 7 The platform deformation schematic diagram of the platform simulation structure under the action of the three-point fixed support point 301 and the platform self-weight is shown in the figure. The platform simulation structure can also include a target simulation support point corresponding to the first auxiliary support point 302, which is an auxiliary support point 302 simulated in the simulation environment. The number of target simulation support points can be one or three, or multiple. Please refer to Figure 8 , Figure 8 is a schematic diagram of the target simulation support point provided by the embodiments of the application, three target simulation support points are set in the platform simulation structure. A, B, and C are fixed support points 301, D, E, and F are target simulation support points, and G is the center of gravity position of the platform simulation structure.

[0081] In step 602 of some embodiments, a preset support force is simulated on the target simulation support point. In order to ensure the accuracy of the calculated support force value, the preset support force can be multiple. Under the action of the applied support force, the target simulation support point will deform, and the first deformation value represents the deformation value of the target simulation support point itself corresponding to the applied support force. For example, multiple preset support forces can be applied to the D point, and the first deformation value of the D point under the action of the support force; or multiple preset support forces can be applied to the E point, and the first deformation value of the E point under the action of the support force. For example, a support force F D is applied to the target simulation support point D, wherein F D includes multiple preset support forces, for example, F D1 , F D2 , F D3 , F D4Support force F D1 The first deformation value of the corresponding target simulation support point D is represented as y DD1 Support force F D2 The first deformation value of the corresponding target simulation support point D is represented as y DD2 , etc.

[0082] The first deformation value can be obtained from the simulation software, for example, by clicking a certain position point in the platform simulation structure, the first deformation value of the point can be read. In some embodiments, the deformation value of a certain region in the platform simulation structure can also be obtained, please continue to refer to Figure 7 , Figure 7 The same color region in the same color region represents the same deformation, and the deformation unit is mm, which can also be expressed by other units. Under the action of the gravitational acceleration, the red color represents the maximum deformation, which can be 0.0044012 mm, and the dark blue region is the region with the minimum deformation.

[0083] In step 603 of some embodiments, the first deformation coefficient of the target simulation support point is calculated according to the first deformation value of the target simulation support point and the corresponding support force causing the deformation, the first deformation coefficient is used to represent the relationship between the support force applied by the target simulation support point and the first deformation value generated by the target simulation support point itself, and is a linear slope calculated by the first deformation value and the support force. Step 603 can include but is not limited to the following steps:

[0084] The mean value of the support force is calculated to obtain the support force mean value;

[0085] The mean value of the first deformation value is calculated to obtain the first deformation value mean value;

[0086] The first deformation coefficient of the target simulation support point is calculated according to the support force mean value and the first deformation value mean value.

[0087] Specifically, the plurality of support forces can be a plurality of support forces applied to a certain target simulation support point, and the corresponding support force mean value is calculated according to these support forces, each support force corresponds to a first deformation value, and the first deformation value mean value can be obtained according to these first deformation values.

[0088] For example, n support forces are applied to the target simulation support point D in turn, and the first deformation coefficient of the D point can be calculated by the following formula:

[0089]

[0090] Wherein, k DD represents the support force applied to the target simulation support point D, the first deformation coefficient of the D point, n represents the total number of support forces applied to the target simulation support point D, F Direpresents the i-th support force applied, represents the mean value of all support forces applied to the D point, y DDi represents the support force F applied to the D point, Di represents the first deformation value generated by the D point when the support force F is applied to the D point, represents the mean value of all first deformation values of the D point, i.e., the mean value of the first deformation values of the D point.

[0091] In other embodiments, the target simulation support points E and F can be calculated in the foregoing manner to obtain corresponding k EE and k FF , which will not be repeated here.

[0092] In some embodiments, the auxiliary support points 302 of the support platform 101 further include a second auxiliary support point, and accordingly, the platform simulation structure further includes associated simulation support points corresponding to the second auxiliary support point. For example, if the target simulation support point is the D point, the E point and the F point are the associated simulation support points of the target simulation support point D; if the target simulation support point is the E point, the D point and the F point are the associated simulation support points of the target simulation support point E, which will be described in detail later.

[0093] In step 604 of some embodiments, the target simulation positions corresponding to the target number of target simulation support points on the platform simulation structure can be obtained. The target number is the number of the set target simulation support points, and the target simulation positions can be obtained by clicking the platform simulation structure to obtain specific coordinates. The target simulation support points can be applied with multiple support forces at the target simulation positions. Please continue to refer to Figure 8 , Figure 8 The red arrows in the above figure can indicate the target simulation positions corresponding to the D, E, and F points, or the directions in which the support forces are applied.

[0094] Step 604 includes but is not limited to the following steps:

[0095] Obtain an initial deformation image of the platform simulation structure under the action of the fixed support points and gravity. The initial deformation image includes the initial deformation value of each position on the platform simulation structure.

[0096] Determine a plurality of target regions on the platform simulation structure based on the initial deformation image.

[0097] According to the initial deformation value of each position in the target region, determine the target number of target simulation support points in the target region and the corresponding target simulation positions.

[0098] Specifically, please refer to Figure 7 , Figure 7The initial deformation image of the platform simulation structure under the action of the fixed support point 301 and the platform self-weight is shown, and the initial deformation image includes the initial deformation value of each position on the platform simulation structure. For example, the initial deformation value of the target simulation support point D can be represented as y 0D , the initial deformation value of the target simulation support point E can be represented as y 0E , and the initial deformation value of the target simulation support point F can be represented as y 0F .

[0099] Further, a plurality of target regions can be determined on the platform simulation structure according to the initial deformation image. The target region can represent a region with a large initial deformation value on the platform simulation structure, for example, a red region, and a target simulation support point can be added in a red region with a large span; the target region can also be a region with a total deformation value exceeding a preset threshold. For each target region, the number of target simulation support points to be added can be determined according to the initial deformation value of each position point in the region, for example, a target simulation support point can be added at two positions with a large difference in initial deformation value, or a target simulation support point can be applied at a position with the largest initial deformation value, or three target simulation support points not on the same straight line can be added in a target region with a large area. The number and position of the target simulation support points can be adaptively adjusted according to the deformation value of the platform simulation structure.

[0100] In step 605 of some embodiments, the target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero can be calculated according to the first deformation value, the first deformation coefficient, and the initial deformation value of the target simulation support point. Specifically, step 605 can include but is not limited to the following steps:

[0101] Obtain the second deformation value of the associated simulation support point under the action of the support force, and perform mean value calculation on the second deformation value to obtain the second deformation value mean;

[0102] Calculate the second deformation coefficient of the associated simulation support point according to the support force mean and the second deformation value mean;

[0103] Calculate the target simulation deformation value of the target simulation support point according to the first deformation coefficient, the second deformation coefficient, and the initial deformation value;

[0104] Calculate the target support force applied to the target simulation support point when the target simulation deformation value of the target simulation support point is zero.

[0105] Specifically, the applied support force of each auxiliary support point 302 affects the deformation value of the platform as a whole and the deformation values of other auxiliary support points 302, so when a support force is applied to each target simulation support point, the second deformation value of the associated simulation support point is also affected. The associated simulation support point is another auxiliary support point affected other than the target simulation support point to which the support force is applied. The second deformation value represents the deformation value generated by the associated simulation support point when the support force is applied to the target simulation support point, and the second deformation value can be directly obtained from the platform simulation structure. Please refer to Figure 9 is a schematic diagram of the platform simulation structure provided by the embodiment of the present application for applying a support force to point D. For example, multiple support forces F D are applied to the target simulation support point D, and the associated simulation support points E and F also generate corresponding second deformation values. If a support force F D1 is applied to point D, the second deformation value generated by point E is represented as y DE1 , and the second deformation value generated by point F is represented as y DF1 . If a support force F E2 is applied to point E, the second deformation value of point D is represented as y ED2 , and the second deformation value of point F is represented as y EF2 . Taking three target simulation support points as an example, when a support force is applied to point D, the first deformation value of point D and the second deformation values of points E and F are shown in Table 1 as follows:

[0106] Table 1 Relationship table of support force and first deformation value, second deformation value

[0107] Pre-set support force F D ]]> Target simulation support point D Associated simulation support point E Associated simulation support point F F D1 ]]> [[ y DD1 ]]> <![CDATA[y DE1 ]]> y DF1 <!-- 8 -->]]> F D2 ]]> [[ y DD2 ]]> y DE2 ]] [[ y DF2 ]]> F D3 ]]> [[ y DD3 ]]> [[ y DE3 ]]> [[ y DF3 ]]> <![CDATA[F D4 ]]> [[ y DD4 ]]> [[ y DE4 ]]> [[ y DF4 ]]> ... ... ... ...

[0108] Similarly, when multiple support forces are applied to the target simulation support point E, the first deformation value of point E is generated, and the associated simulation support points D and F also generate corresponding second deformation values; when multiple support forces are applied to the target simulation support point F, the first deformation value of point F is generated, and the associated simulation support points D and E also generate corresponding second deformation values.

[0109] Further, according to the data in Table 1, the average support force applied to point D can be calculated as and based on the calculated average support force and the second deformation values of points E and F, the first deformation coefficient k DD of point D and the second deformation coefficients k DE and k DF of the corresponding associated simulation support points E and F can be calculated. Specifically, the calculation formula of k DE is as follows:

[0110]

[0111] wherein, kDE represents the second deformation coefficient of the associated simulation support point E when the target simulation support point D is subjected to the support force F Di represents the i-th support force applied, represents the average of all support forces applied to the D point, y DEi represents the second deformation value of the E point when the D point is subjected to the support force F Di represents the average of all second deformation values of the E point when the D point is subjected to the support force, i.e., the average of the second deformation values of the E point.

[0112] Further, k DF is calculated according to the following formula:

[0113]

[0114] wherein k DF represents the second deformation coefficient of the associated simulation support point F when the target simulation support point D is subjected to the support force F Di represents the i-th support force applied, represents the average of all support forces applied to the D point, y DFi represents the second deformation value of the F point when the D point is subjected to the support force F Di represents the average of all second deformation values of the F point when the D point is subjected to the support force, i.e., the average of the second deformation values of the F point.

[0115] According to the calculation method of the first deformation coefficient and the second deformation coefficient described in the foregoing steps, the deformation coefficients of the target simulation support point and the associated simulation support point can be calculated in turn. For example, when the E point is subjected to the support force F E , a series of first deformation values y EEi of the E point and a series of second deformation values y EDi and y EFi of the associated simulation support points D and F can be obtained, and further, the first deformation coefficient k EE of the E point, the second deformation coefficient k ED of the D point, and the second deformation coefficient k EF of the F point can be calculated.

[0116] For another example, when the F point is subjected to the support force F F , a series of first deformation values y FFi of the F point and a series of second deformation values y FDi and y FEi of the associated simulation support points D and E can be obtained, and further, the first deformation coefficient k​​FF , the second deformation coefficient k of point D FD and the second deformation coefficient k at point E FE Taking the three target simulation support points D, E, and F as an example, the corresponding relationship between the deformation coefficient, support force, and initial deformation value is shown in Table 2 below:

[0117] Table 2 Deformation coefficients of D, E, and F and corresponding support forces and initial deformation values

[0118] Support force D E F 0 [[ y 0D ]]> <![CDATA[y 0E ]]> <![CDATA[y 0F ]]> <![CDATA[F D ]]> <![CDATA[k DD ]]> k DE ]]> k EF <!-- 9 -->]]> F E ]]> k DD ]]> k DD ]]> <![CDATA[k EF ]]> F F ]]> k FD ]]> k FE ]]> k FF ]]>

[0119] Among them, y 0D 、y 0E 、y 0F They represent the initial deformation values ​​of D, E, and F when the applied support force is 0 and there are only fixed support points and the platform's own weight. D Indicates that point D is the target simulation support point and multiple support forces are applied to point D; F E Indicates that point E is the target simulation support point and multiple support forces are applied to point E; F F It represents the multiple supporting forces applied to point F as the target simulation support point. The remaining parameters have been introduced with examples in the above steps. Those skilled in the art can deduce the meaning of the remaining parameters by the same logic, so they will not be repeated here.

[0120] Furthermore, we will introduce in detail how to solve the target support force. Since the deformation value of a target simulation support point caused by multiple support forces is the same as the deformation value caused by each support force acting on the target simulation support point, the deformation value obtained by linearly superimposing it is the same. Based on this, the target simulation deformation value formula of any target simulation support point can be obtained. For example, F D 、F E 、F F The total deformation at point D can be calculated by F D The deformation value of point D plus F E The deformation value of point D, plus F F The sum of the deformation values ​​produced at point D.

[0121] Specifically, taking point D as the target simulation support point, the target simulation deformation value formula of point D is as follows:

[0122] y D =k DD F D +k ED F E +k FD F F +y 0D

[0123] Among them, yD The target simulation deformation value of the target simulation support point D, other parameters in the formula have been introduced in the foregoing steps, and will not be described here.

[0124] Similarly, taking the target simulation support point E as an example, the target simulation deformation value y E The formula is as follows:

[0125] y E = k DE F D + k EE F E + k FE F F + y 0E

[0126] For another example, the target simulation support point is F, and the target simulation deformation value y F The formula is as follows:

[0127] y F = k DF F D + k EF F E + k FF F F + y 0F

[0128] Further, the target support force applied to the target simulation support point when the target simulation deformation value of the target simulation support point is zero can be calculated. For example, when the target simulation deformation value y D of the target simulation support point D is zero, the target support force applied to the target simulation support point D can be calculated by the following formula:

[0129] k DD F D + k ED F E + k FD F F = -y 0D

[0130] Similarly, the target support forces applied to the target simulation support points E and F can also be obtained by similar calculation formulas. The target support forces applied by the target simulation support points obtained by calculation make the simulation deformation value of the platform simulation structure zero.

[0131] In some embodiments, the formula for calculating the target support force can also be represented by the following matrix:

[0132] KF = Y

[0133] Wherein, the equation group can be used to calculate the support force corresponding to different target simulation support points, K and Y in the above formula are known, and specifically, K can be represented by the following matrix:

[0134]

[0135] F can be represented by the following matrix:

[0136]

[0137] Y can be represented by the following matrix:

[0138]

[0139] Under the action of the target support force, the deformation values of the support points of the support platform are close to 0, so that the overall deformation of the support platform 101 is minimized. In order to ensure that the overall deformation of the large platform is minimized, multiple support points can be used, and the formula KF=Y can be upgraded, for example, if the target simulation support points are i, K can be represented by the following general matrix:

[0140]

[0141] Wherein, k 11 represents the first deformation coefficient of the first target simulation support point to which the support force is applied, k 1i represents the second deformation coefficient of the ith associated simulation support point to which the support force is applied, and the other parameters in the matrix are the same.

[0142] F can be represented by the following general matrix:

[0143]

[0144] Wherein, F i represents the support force applied to the ith target simulation support point, and Y can be represented by the following general matrix

[0145]

[0146] Wherein, y 0i represents the initial deformation value of the ith target simulation support point, and the other parameters are the same.

[0147] The foregoing steps 601 to 605 are to calculate the target support force applied to each target simulation support point according to the simulation structure. In step 606 of some embodiments, the platform simulation structure can be supported and compensated according to the target support force and the target simulation position. On this basis, the first auxiliary support point of the support platform and the corresponding actual position can be applied with the support force calculated by simulation to support and compensate the support platform.

[0148] In some embodiments, after the platform simulation structure is supported and compensated according to the target support force and the target simulation position, the method provided by the embodiments of the present application further comprises:

[0149] Obtaining the deformation value of the target support point;

[0150] Obtaining the deformation value between any two target support points;

[0151] Comparing the deformation value of the target support point with the preset first deformation value threshold, and comparing the deformation value between any two support points with the preset second deformation value threshold;

[0152] When the deformation value of the target support point is greater than the first deformation value threshold, or the deformation value between any two support points is greater than the second deformation value threshold, the number of target simulation support points of the platform simulation structure is increased.

[0153] Specifically, the deformation value of a support point in the simulation structure can be obtained and compared with the preset first deformation value threshold. If the deformation value of a target support point is greater than the first deformation value threshold, the number of target simulation support points in the vicinity of the support point in the platform simulation structure can be increased, and the simulation calculation as described in the foregoing steps is performed to fine-tune the support force, so as to further reduce the deformation of the platform and improve the flatness of the platform.

[0154] In other embodiments, the target support points include fixed support points 301 and auxiliary support points 302, and any two target support points can be fixed support points 301 and auxiliary support points 302, or fixed support points 301 and fixed support points 301, or auxiliary support points 302 and auxiliary support points 302. For example, in the platform simulation structure, the deformation value between the fixed support point A and the target simulation support point E can be obtained, and the deformation value between the target simulation support points D and E can also be obtained. According to the obtained deformation value between any two support points and the preset second deformation value threshold, if the deformation value between any two support points is greater than the second deformation value threshold, the number of target simulation support points in the region between the two support points in the platform simulation structure can be increased, and the simulation calculation as described in the foregoing steps is performed to further reduce the deformation of the platform.

[0155] In addition, the overall deformation image of the platform after the target supporting force is exerted on the platform simulation structure can also be obtained, for example, an image similar to Figure 7 If there is still a red area in the image, it indicates that the supporting platform 101 still has large deformation, which can be caused by insufficient number of auxiliary supporting points 302. In this case, the number of auxiliary supporting points 302 needs to be increased for simulation calculation again.

[0156] Please refer to Figure 10 The platform supporting compensation method and device provided in the embodiments of the present application can be used to solve the above technical problems.

[0157] The first simulation unit 1010 is configured to construct a platform simulation structure based on the supporting platform, and the platform simulation structure includes a target simulation supporting point corresponding to the first auxiliary supporting point. The second simulation unit 1020 is configured to simulate exertion of a preset supporting force on the target simulation supporting point to obtain a first deformation value of the target simulation supporting point. The first calculation unit 1030 is configured to calculate, according to the first deformation value and the supporting force, a first deformation coefficient of the target simulation supporting point. The acquisition unit 1040 is configured to acquire a target simulation position corresponding to a target number of target simulation supporting points on the platform simulation structure. The second calculation unit 1050 is configured to calculate, according to the first deformation value, the first deformation coefficient, and an initial deformation value of the target simulation supporting point, a target supporting force exerted on the target simulation supporting point when the simulation deformation value of the platform simulation structure is zero. The compensation unit 1060 is configured to perform supporting compensation on the platform simulation structure according to the target supporting force and the target simulation position.

[0158] The specific implementation of the platform supporting compensation device is basically the same as that of the above-mentioned platform supporting compensation method, and will not be described here again.

[0159] The embodiments of the present application also provide a supporting platform 101, please refer to Figure 1 The first surface of the supporting platform 101 is configured to place a material processing element, and the second surface of the supporting platform is provided with a fixed supporting point 301 and an auxiliary supporting point 302. The auxiliary supporting point 302 includes a first auxiliary supporting point. The fixed supporting point 301 and the auxiliary supporting point 302 are exerted with a supporting force to support the supporting platform 101. The fixed supporting point 301 is exerted with a supporting force by the spherical gasket supporting structure 1100, and the actual position of the fixed supporting point 301 of the supporting platform 101 is taken as an example of the fixed supporting points A, B, and C of the platform simulation structure, and the fixed supporting point 301 is exerted with a supporting force by the spherical gasket supporting structure 1100.

[0160] Please refer to Figure 11 , Figure 11Figure 1 is a schematic diagram of a spherical gasket support structure provided by an embodiment of the present application. The spherical gasket support structure 1100 includes a spherical gasket 1101, a spherical contact surface 1102, and a support ring 1103. Before adjusting the auxiliary support point, the three-point support needs to be fixed first, and the spherical gasket support structure 1100 of the three-point support point is locked using a locking screw. Among them, the spherical gasket 1101 is used to contact the support platform 101 to support the support platform 101, and after the support force exerted by the spherical gasket 1101 reaches the target support force, it is locked by a screw. Due to the spherical action, the spherical gasket 1101 rotates a small amount to make the upper surface of the gasket contact the platform as much as possible, so that the support platform 101 will not deform due to locking.

[0161] In some embodiments, the support platform 101 further includes a controller, and the controller 1303 can automatically control the aforementioned spherical gasket support structure 1100 to support the fixed support point 301, and can also automatically control the auxiliary support structure to exert the target support force on the auxiliary support point 302 at the target actual position of the support platform 101, so as to support and compensate the support platform 101. Among them, the auxiliary support structure can be adjusted by a motor, and the target support force can be calculated by the aforementioned steps. The embodiment of the present application can accurately calculate the auxiliary support force required by the platform according to the platform deformation without increasing the thickness of the support platform 101, thereby reducing the manufacturing cost of the platform and improving the flatness of the platform.

[0162] In some embodiments, please refer to Figure 12 , Figure 12 Figure 1 is a schematic diagram of an auxiliary support structure provided by an embodiment of the present application, wherein Figure 12 The left drawing in Figure 1 is a schematic diagram of the overall structure of the auxiliary support structure, and the right drawing is a schematic diagram of the disassembled structure of the auxiliary support structure. The auxiliary support structure can include an auxiliary support component 1201, a pressure sensor 1202, an adjusting nut 1203, a locking screw 1204, and a sensor wiring jack 1205. Among them, the auxiliary support component 1201 can be an auxiliary support nut, such as a specially-shaped custom nut, which is used to contact the second surface of the platform to support the support platform 101. The adjusting nut 1203 can be threadedly connected with the auxiliary support component 1201, the upper end of the adjusting nut 1203 contacts the support platform 101, and the other end of the adjusting nut 1203 can be electrically connected with the controller 1303. The controller 1303 controls the adjusting nut 1203 to move towards the support platform 101 to push the platform upwards to exert a support force on the support platform 101 according to the target support force; the controller 1303 can also control the adjusting nut 1203 to move away from the support platform 101 to reduce the support force exerted on the support platform 101 to prevent over-adjustment.

[0163] Furthermore, in the process of applying the supporting force, the support platform 101 generates downward pressure on the adjusting nut 1203, and the pressure is transmitted to the auxiliary support component 1201, and then transmitted to the pressure sensor 1202. The lower end surface of the pressure sensor 1202 is connected to the frame 102 of the support platform 101, and the applied supporting force is controlled by the value displayed by the pressure sensor 1202. When the adjusting nut 1203 is adjusted, the adjusting nut 1203 is locked using the locking screw 1204 to fix the position of the adjusting nut 1203 and the auxiliary support component 1201. The pressure sensor 1202 also includes a sensor wiring jack 1205, which can be used to connect to the controller to input the obtained pressure value into the controller. It can be understood that if there are multiple auxiliary support points 302, there are also multiple auxiliary support structures, and there can also be multiple pressure sensors 1202. By setting the pressure sensor 1202 in the auxiliary support structure, the pressure can be monitored in real time and automatic adjustments can be made in time.

[0164] In some embodiments, see Figure 13 , Figure 13 1306. It is a module diagram of the control circuit provided in the embodiment of the present application. Specifically, the control circuit 1300 may include a data input module 1301, a data processing center 1302, a controller 1303, a display module 1304, an audible and visual alarm module 1305 and a data storage module 1306. Among them, the data input module 1301 is used to input the target support force of the auxiliary support point calculated in the above steps into the data processing center 1302. The data processing center 1302 can be a single-chip microcomputer, a computer, a processor based on a reduced instruction set computing architecture (Advanced RISC Machines, ARM), etc., which are not limited here. The controller 1303 is the controller described in the above steps, which is used to connect with the pressure sensor 1202 in the auxiliary support structure, obtain the pressure value of the auxiliary support point 302, and input the pressure value into the data processing center 1302. The controller 1303 is also used to control the auxiliary support structure to support and compensate the support platform 101 according to the preset target support force. The data processing center 1302 can compare the obtained pressure value with the preset target support force and display the obtained pressure value through the display module 1304 for easy viewing by the staff. If the pressure value exceeds the preset pressure value range, the data processing center 1302 can also issue an alarm through the sound and light alarm module 1305 to remind the staff, and can also save the preset pressure value threshold and the adjusted pressure data and support force data to the data storage module 1306 for subsequent query. The control circuit 1300 provided in the embodiment of the present application can improve the convenience of supporting force adjustment and automatically adjust the support compensation process according to the target supporting force and the obtained pressure value.

[0165] The embodiment of the present application further provides an electronic device, which comprises a memory and a processor. The memory stores a computer program, and the processor executes the computer program to realize the platform support compensation method. The electronic device can be any intelligent terminal, such as a tablet computer or a vehicle-mounted computer.

[0166] Please refer to Figure 14 , Figure 14 The hardware structure of the electronic device of another embodiment is illustrated, which comprises:

[0167] The processor 1401 can be implemented in the form of a general central processing unit (CPU), a microprocessor, an application specific integrated circuit (ASIC), or one or more integrated circuits, and is used to execute related programs to realize the technical solutions provided by the embodiments of the present application.

[0168] The memory 1402 can be implemented in the form of a read-only memory (ROM), a static storage device, a dynamic storage device, or a random access memory (RAM). The memory 1402 can store an operating system and other application programs. When the technical solutions provided by the embodiments of the present application are implemented by software or firmware, the related program codes are stored in the memory 1402 and are called and executed by the processor 1401 to realize the platform support compensation method of the embodiments of the present application.

[0169] The input / output interface 1403 is used to realize information input and output.

[0170] The communication interface 1404 is used to realize the communication interaction between the device and other devices. The communication can be realized by a wired manner (such as a USB, a network cable, etc.) or a wireless manner (such as a mobile network, WIFI, Bluetooth, etc.).

[0171] The bus 1405 is used to transmit information between various components (such as the processor 1401, the memory 1402, the input / output interface 1403, and the communication interface 1404) of the device.

[0172] The processor 1401, the memory 1402, the input / output interface 1403, and the communication interface 1404 are connected to each other through the bus 1405 to realize the communication connection between them in the device.

[0173] The embodiment of the present application further provides a computer readable storage medium, which stores a computer program, and the computer program is executed by a processor to implement the platform support compensation method.

[0174] The memory, as a non-transitory computer readable storage medium, can be used to store non-transitory software programs and non-transitory computer executable programs. In addition, the memory can include a high-speed random access memory, and can also include a non-transitory memory, such as at least one magnetic disk storage device, a flash memory device, or other non-transitory solid-state memory device. In some embodiments, the memory can optionally include a memory remotely arranged relative to the processor, and the remote memory can be connected to the processor through a network. Examples of the network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and a combination thereof.

[0175] The embodiments described in the embodiments of the present application are used to more clearly illustrate the technical solutions of the embodiments of the present application, and do not constitute a limitation on the technical solutions provided by the embodiments of the present application. Those skilled in the art can know that, with the evolution of technology and the appearance of new application scenarios, the technical solutions provided by the embodiments of the present application are also applicable to similar technical problems.

[0176] Those skilled in the art can understand that the technical solutions shown in the figures do not constitute a limitation on the embodiments of the present application, and can include more or fewer steps than the figures shown, or combine certain steps, or different steps.

[0177] The device embodiments described above are only schematic, and the units described as separate components can or can not be physically separate, that is, can be located in one place, or can be distributed on multiple network units. According to actual needs, part or all of the modules can be selected to achieve the purpose of the embodiments of the present application.

[0178] Those skilled in the art can understand that all or some steps in the above disclosed method, the functions of the modules / units in the system and the device can be implemented as software, firmware, hardware and their appropriate combinations.

[0179] The terms "first", "second", "third", "fourth", and the like in the description and in the claims of this application, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the use of the terms so termed is interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of orderly or chronological mundane operation, reverse order operation, based on circuitry availability, based on stated preference or the like, and that "default" or other orderings are thus permissible. Further, the terms "comprise", "comprising", "include", "including", and the like, are specifically intended to be open-ended. That is, references to individual steps and the like do not suhstantially exclude the presence of two or more of a recited step or its integral sub-steps or additional steps whether or not readily ascertainable from the description or the like.

[0180] It should be understood that, in this application, "at least one" means one or more, "multiple" means two or more. "And / or", used to describe the relationship between associated objects, means that there can be three relationships, for example, "A and / or B" can mean: only A, only B, and A and B exist at the same time, where A and B can be singular or plural. The character " / " generally represents an "or" relationship between the associated objects. "At least one of the following" or the like means any combination of these items, including single or multiple combinations. For example, at least one of a, b or c, can mean: a, b, c, "a and b", "a and c", "b and c", or "a and b and c", where a, b, and c can be single or multiple.

[0181] In several embodiments provided in the present application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the above-mentioned units is only a logical function division, and actual implementation can have another division manner, for example, a plurality of units or components can be combined or integrated into another system, or some features can be omitted or not executed. In addition, the coupling or direct coupling or communication connection between the displayed or discussed objects can be indirect coupling or communication connection through some interfaces, devices or units, which can be electrical, mechanical or other forms.

[0182] The units described above as separate components can or can not be physically separate, and the components shown as units can or can not be physical units, i.e. they can be located in one place or distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the embodiments of the present application.

[0183] In addition, each function unit in each embodiment of the present application can be integrated in one processing unit, or each unit can be physically present separately, or two or more units can be integrated in one unit. The integrated unit can be realized in the form of hardware or in the form of a software function unit.

[0184] When the integrated unit is realized in the form of a software function unit and sold or used as an independent product, it can be stored in a computer readable storage medium. Based on such understanding, the technical solutions of the present application, essentially or in part, or all or part of the technical solutions can be embodied in the form of a software product. The computer software product is stored in a storage medium, and includes multiple instructions used to cause a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the methods in the embodiments of the present application. The foregoing storage medium includes: a U disk, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk, and various other media that can store programs.

[0185] The preferred embodiments of the embodiments of the present application are described above with reference to the accompanying drawings, and are not intended to limit the scope of the embodiments of the present application. Any modifications, equivalent replacements and improvements made by those skilled in the art without departing from the scope and essence of the embodiments of the present application shall be within the scope of the embodiments of the present application.

Claims

1. A platform support compensation method, characterized in that: The platform support compensation method is applied to a support platform, wherein a first surface of the support platform is used to place a material processing element, a second surface of the support platform is provided with fixed support points and auxiliary support points, the second surface is an opposite surface of the first surface, and the auxiliary support points include a first auxiliary support point. Support forces are applied to the fixed support points and the auxiliary support points to support the support platform. The method includes: Building a platform simulation structure based on the support platform, the platform simulation structure including a target simulation support point corresponding to the first auxiliary support point; Applying a preset support force to the target simulation support point in a simulated manner to obtain a first deformation value of the target simulation support point; Calculating according to the first deformation value and the support force to obtain a first deformation coefficient of the target simulation support point; Obtain target simulation positions corresponding to a target number of target simulation support points on the platform simulation structure; Calculating, based on the first deformation value, the first deformation coefficient, and the initial deformation value of the target simulation support point, to obtain a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero; Support compensation is performed on the platform simulation structure according to the target support force and the target simulation position.

2. The method according to claim 1, characterized in that The calculating according to the first deformation value and the support force to obtain a first deformation coefficient of the target simulation support point includes: Calculating the average of the plurality of support forces to obtain an average support force; Calculating the mean of the first deformation values ​​to obtain a first deformation value mean; A first deformation coefficient of the target simulation support point is obtained by calculation based on the support force mean and the first deformation value mean.

3. The method according to claim 2, characterized in that The auxiliary support point further includes a second auxiliary support point, and the platform simulation structure further includes an associated simulation support point corresponding to the second auxiliary support point. The calculation based on the first deformation value, the first deformation coefficient, and the initial deformation value of the target simulation support point to obtain a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero includes: Obtaining a second deformation value of the associated simulation support point under the action of the support force, and performing mean calculation on the second deformation values ​​to obtain a second deformation value mean; Calculating according to the support force mean and the second deformation value mean to obtain a second deformation coefficient of the associated simulation support point; Calculating according to the first deformation coefficient, the second deformation coefficient and the initial deformation value to obtain a target simulation deformation value of the target simulation support point; A target support force applied to the target simulation support point when the target simulation deformation value of the target simulation support point is zero is calculated.

4. The method according to claim 1, wherein The obtaining target simulation positions corresponding to the target number of target simulation support points on the platform simulation structure includes: Acquire an initial deformation image of the platform simulation structure under the action of the fixed support point and gravity, wherein the initial deformation image includes an initial deformation value of each position on the platform simulation structure; determining a plurality of target areas on the platform simulation structure based on the initial deformation image; A target number of target simulation support points and corresponding target simulation positions within the target area are determined according to the initial deformation value of each position within the target area.

5. The method according to claim 1, wherein After performing support compensation on the platform simulation structure according to the target support force and the target simulation position, the method further includes: Acquire a deformation value of a target support point, where the target support point includes the fixed support point and the auxiliary support point; Obtaining the deformation value between any two target support points; Comparing the deformation value of the target support point with a preset first deformation value threshold, and comparing the deformation value between any two support points with a preset second deformation value threshold; When the deformation value of the target support point is greater than the first deformation value threshold, or the deformation value between any two support points is greater than the second deformation value threshold, the number of target simulation support points of the platform simulation structure is increased.

6. A platform support compensation device, characterized in that: The platform support compensation device includes: a first simulation unit, configured to construct a platform simulation structure based on a support platform, the platform simulation structure including a target simulation support point corresponding to a first auxiliary support point, the first surface of the support platform being used to place a material processing element, the second surface of the support platform being provided with a fixed support point and auxiliary support points, the second surface being an opposite surface of the first surface, the auxiliary support points including the first auxiliary support point, and applying a supporting force to the fixed support point and the auxiliary support point to support the support platform; a second simulation unit, configured to simulate applying a preset support force to the target simulation support point to obtain a first deformation value of the target simulation support point; a first calculation unit, configured to calculate according to the first deformation value and the support force to obtain a first deformation coefficient of the target simulation support point; An acquiring unit, configured to acquire target simulation positions corresponding to a target number of target simulation support points on the platform simulation structure; a second calculation unit, configured to calculate, based on the first deformation value, the first deformation coefficient, and the initial deformation value of the target simulation support point, to obtain a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero; A compensation unit is used to perform support compensation on the platform simulation structure according to the target support force and the target simulation position.

7. A support platform, characterized in that: The first surface of the support platform is used to place the material processing element, and the second surface of the support platform is provided with fixed support points and auxiliary support points, the auxiliary support points including a first auxiliary support point, and a supporting force is applied to the fixed support points and the auxiliary support points to support the support platform. The support platform further includes: A controller is used to control the auxiliary support structure to apply the target support force to the auxiliary support point based on the target support force and the target actual position of the auxiliary support point, so as to support compensate the support platform, and the target support force is obtained by the platform support compensation method described in any one of claims 1 to 5.

8. The support platform according to claim 7, characterized in that: The auxiliary support structure comprises: an auxiliary supporting component, configured to contact the second surface of the supporting platform to support the supporting platform; a pressure sensor, configured to detect the supporting force provided by the auxiliary supporting component to the supporting platform and output pressure value information; An adjusting nut, one end of which is electrically connected to the controller, and the other end of which is connected to the auxiliary support component. The controller controls the adjusting nut to move toward or away from the support platform according to the target support force, so as to control the auxiliary support component to support and compensate the support platform.

9. An electronic device, characterized in that: The electronic device includes a memory and a processor, the memory stores a computer program, and the processor implements the platform support compensation method according to any one of claims 1 to 5 when executing the computer program.

10. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is executed by a processor, the platform support compensation method according to any one of claims 1 to 5 is implemented.

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