A box tool for cleaning a PECVD machine special gas nozzle

Abstract

The application discloses a box tool for cleaning a special gas nozzle of a PECVD machine, and belongs to the technical field of photovoltaic production. The tool comprises a cleaning box, a lifting mounting frame, a centrifugal component and a driving connection component. The lifting mounting frame is lowered when the box is closed, and the nozzle is clamped through a locking mechanism. The centrifugal component combines a driving motor and a self-centrifugal mechanism to realize stable locking and rotating centrifugation of the nozzle during the cleaning process. The driving connection component ensures the automation of the locking and separation process, and avoids the damage of the nozzle caused by impact during the cleaning. The tool solves the problems of easy damage of the nozzle and poor cleaning effect in the existing cleaning mode, improves the cleaning efficiency and quality of the special gas nozzle, and is suitable for the regular maintenance of the special gas nozzle of the PECVD machine.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photovoltaic technology, in particular to a box appliance for cleaning a special gas nozzle of a PECVD machine. BACKGROUND

[0002] Solar cells are a kind of environmentally friendly and pollution-free products that can directly convert solar energy into electricity without generating any harmful substances during use, so they are favored in solving energy and environmental problems and have excellent market prospects. When producing solar cells, PECVD is needed for film plating.

[0003] PECVD machine works in a low-pressure environment, and low-temperature plasma is generated in the process cavity by radio frequency (RF) or other forms of electric field. High-energy electrons, ions and active groups in these plasmas collide with the process gas molecules introduced, thereby activating and promoting chemical reactions between gas molecules. These reactions occur on the sample surface, resulting in the deposition of products and the formation of solid thin films.

[0004] The nozzle plays a crucial role in the PECVD machine, as it is responsible for introducing process gases (such as silane SiH4, argon Ar, etc.) into the reaction cavity at a certain flow rate and pressure. By precisely controlling the opening and closing of the nozzle, as well as the flow rate and pressure of the gas, a stable plasma can be ensured during the reaction, and chemical reactions between gas molecules can be promoted, thereby depositing high-quality thin films on the sample surface.

[0005] Currently, in the film plating process of the solar cell production process, the special gas nozzle in the ALD process furnace pipe often produces aluminum oxide residues after TMA reaction, which blocks the gas outlet hole of the special gas nozzle. Due to the limitation of commonly used tools, only the surface layer of the nozzle gas outlet hole can be cleaned, and the internal nozzle cannot be cleaned with commonly used tools. Long-term circulation, nozzle internal pipeline blockage, resulting in uneven or no special gas output, the common way is to place the nozzle in the cleaning box, then add potassium hydroxide in the box, potassium hydroxide reacts with the internal aluminum oxide residues of the nozzle and removes the aluminum oxide residues, achieving the effect of cleaning the surface and internal of the special gas nozzle. In order to improve the cleaning effect of the special gas nozzle, the circulation of the cleaning liquid in the cleaning box is accelerated, so that the flowing cleaning liquid impacts the special gas nozzle, which can cause the special gas nozzle to hit or hit each other in the cleaning box, which can easily cause damage to the special gas nozzle and affect the subsequent use of the special gas nozzle.

[0006] Therefore, in order to solve the above technical problems, the present application provides a box appliance for cleaning a special gas nozzle of a PECVD machine. SUMMARY

[0007] The present application aims to provide a box device for cleaning a PECVD machine special gas nozzle to solve the above-mentioned deficiencies in the prior art.

[0008] To achieve the above-mentioned purpose, the present application provides the following technical solutions: a box device for cleaning a PECVD machine special gas nozzle, comprising a cleaning box with a cavity formed inside, a box upper cover rotatably arranged at the opening position of the cavity of the cleaning box, and a water outlet pipe mounted on the box upper cover near one side of the cavity of the cleaning box, and a drain hand valve mounted at the bottom of the cleaning cavity, further comprising:

[0009] a lifting mounting frame slidingly arranged on the inner wall surface of the cleaning box, a pulling connecting rod cooperatively arranged between the box upper cover and the lifting mounting frame, the pulling connecting rod being used to lower / raise the lifting mounting frame when the box upper cover is closed / opened;

[0010] a centrifugal assembly, comprising a centrifugal frame mounted on the power output end of a driving motor, the centrifugal frame being provided with a locking mechanism for clamping the special gas nozzle to be cleaned placed at the central position thereof, the driving motor being slidingly mounted on the inner wall surface of the cleaning box;

[0011] a driving connecting assembly, comprising a locking driving mechanism for connecting the locking mechanism and the lifting mounting frame, the locking driving mechanism driving the locking mechanism to complete the locking action of the special gas nozzle when the box upper cover is closed and the lifting mounting frame is lowered, the locking driving mechanism further comprising an adaptive connecting part for disconnecting the locking mechanism from the locking driving mechanism and the lifting mounting frame when the locking mechanism completes the locking action of the special gas nozzle.

[0012] Preferably, the locking mechanism comprises a first ring body rotatably arranged on the centrifugal frame and a second ring body rotatably arranged on the first ring body, a plurality of limiting grooves arranged in a circumferential array are formed on the first ring body, the second ring body is provided with a plurality of link pins corresponding to the plurality of limiting grooves, and a rotating lever is rotatably arranged on each link pin; and one side end of each rotating lever is slidingly fitted in the corresponding limiting groove, and the other side end is rotatably provided with a locking lever.

[0013] The centrifugal frame is provided with a penetrating rod at the center of a plurality of locking rotating rods, and the penetrating rod is used for inserting and placing the special gas nozzle, the first ring body is connected with the lifting mounting frame through a locking driving mechanism, and the locking driving mechanism is used for rotating the first ring body when the lifting mounting frame is lowered, a limiting rod is fixedly arranged on the second ring body, and the end of the limiting rod away from the second ring body abuts against the surface of the lifting mounting frame, and the limiting rod is used for preventing the second ring body from rotating synchronously with the first ring body when the first ring body rotates, so that the first ring body and the second ring body are relatively rotated.

[0014] Preferably, the locking driving mechanism comprises a first connecting rod and a second connecting rod which are inserted into each other, the end of the first connecting rod away from the second connecting rod is rotationally arranged on the centrifugal frame and connected with the first ring body, a rack is fixedly installed on the inner wall surface of the cleaning box body, and a gear plate is engaged with the rack, the gear plate is slidingly arranged on the inner wall surface of the cleaning box body through a mounting slide plate, and the mounting slide plate is fixedly connected with the lifting mounting frame.

[0015] The self-adaptive connecting part is arranged between the second connecting rod and the gear plate, and the self-adaptive connecting part is used for disconnecting the second connecting rod and the gear plate when a plurality of locking rotating rods complete the locking action of the special gas nozzle.

[0016] Preferably, the self-adaptive connecting part comprises a first face gear and a second face gear which are engaged with each other, the second face gear is fixedly arranged on the surface of the gear plate, and the first face gear is fixedly connected with the second connecting rod through a second spring.

[0017] Preferably, the centrifugal assembly further comprises a self-centrifugal mechanism installed on the centrifugal frame, and the self-centrifugal mechanism is used for synchronously rotating the locking rotating rods when the centrifugal frame and the locking mechanism are rotated as a whole by the driving motor.

[0018] The self-centrifugal mechanism comprises a first bevel gear and a second bevel gear which are engaged with each other, the first bevel gear is fixedly arranged on the power output shaft of the driving motor, the second bevel gear is rotatably arranged on the rotating shaft of the centrifugal frame through an anti-inversion mechanism, the anti-inversion mechanism is used for maintaining unidirectional transmission of power, the self-centrifugal mechanism further comprises an installation vertical plate which is fixedly arranged on the centrifugal frame and is provided with a slot, and an installation block is slidingly arranged in the slot of the installation vertical plate through a first spring, and one group of locking rotating rods and the installation block and the rotating shaft are respectively commonly sleeved with a synchronous belt through a synchronous pulley, and the first spring is used for keeping the synchronous belt in tension when the special gas nozzle is locked by the locking mechanism.

[0019] Preferably, the driving connection assembly further comprises a separation driving mechanism, which is used to separate the locking mechanism from the locking driving mechanism to realize the overall rotation of the centrifugal frame through the self-centrifugal mechanism when the lifting mounting frame is lowered into position;

[0020] The separation driving mechanism comprises a rotary joint sleeved on the second connecting rod and a separation adjusting plate fixedly arranged on the rotary joint, the separation adjusting plate is connected with the bottom surface of the cleaning box body through an elastic member, the inner wall surface of the cleaning box body is provided with a roller through a support, and the roller is rotationally arranged on the support. When the lifting mounting frame is lowered into position to separate the gear disc from the gear rack, the roller abuts against the surface of the separation adjusting plate.

[0021] Preferably, the anti-overturning mechanism comprises a centrifugal wheel rotationally arranged on the centrifugal frame and fixedly connected with the second bevel gear, and a connecting disc fixedly connected with the rotating shaft, and the connecting disc is provided with a clamping tooth near the inner edge surface of the centrifugal wheel, a plurality of rotating clamps and a plurality of rotating heads corresponding to the rotating clamps are rotationally arranged on the centrifugal wheel, the rotating heads are rotationally arranged on the surface of the centrifugal wheel and connected with the corresponding rotating clamps through a return spring, and the rotating clamps abut against the clamping tooth on the inner edge surface of the connecting disc when the centrifugal wheel rotates and generates centrifugal force.

[0022] Preferably, the cleaning box body is made of acid and alkali resistant material.

[0023] Compared with the prior art, the present application has the following beneficial effects:

[0024] 1. Through the design of the locking mechanism, the special gas nozzle can be effectively clamped during the cleaning process, avoiding the case that the special gas nozzle collides with each other or collides with the box body when the circulation of the cleaning liquid is accelerated, thereby protecting the special gas nozzle from being damaged and prolonging the service life of the nozzle.

[0025] 2. The centrifugal assembly is designed inside the box appliance, which can simultaneously shake out the residual liquid inside and outside the nozzle through the overall centrifugal action and the self-centrifugal action when the special gas nozzle is locked and cleaned, thereby improving the cleaning efficiency.

[0026] 3. The locking mechanism adopts a self-adaptive connection part design, which realizes the clamping of special gas nozzles with different diameters through the first end face gear, the second end face gear and the second spring, so that the box appliance has wide applicability and can meet the cleaning needs of special gas nozzles of different types and specifications.

[0027] 4. The design of the box appliance fully considers the convenience of operation, and the lifting and locking / unlocking actions of the lifting mounting frame and the locking mechanism can be realized through simple opening and closing operation of the upper cover of the box, without complex operation steps and tools, thereby greatly improving the cleaning efficiency. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0029] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0030] Figure 2 This is a schematic diagram of the structure of the present invention from a top view cross section.

[0031] Figure 3 This is a schematic diagram of the structure of a side view cross-section from one angle in this invention;

[0032] Figure 4 In this invention Figure 3 Enlarged structural diagram at point A;

[0033] Figure 5 This is a schematic diagram of the locking mechanism in this invention;

[0034] Figure 6 This is a structural schematic diagram of a side view cross-section from another angle in this invention;

[0035] Figure 7 This is a schematic diagram of the cross-section of the front view in this invention;

[0036] Figure 8 In this invention Figure 7 Enlarged structural diagram at point C;

[0037] Figure 9 This is a partial structural schematic diagram of the centrifuge assembly in this invention;

[0038] Figure 10 In this invention Figure 9 Enlarged structural diagram at point D;

[0039] Figure 11 This is a schematic diagram of the anti-tumble mechanism in this invention;

[0040] Figure 12 This is a schematic diagram of the centrifugal wheel in this invention;

[0041] Figure 13 For the present invention Figure 6 Enlarged structural diagram at point B;

[0042] Figure 14 This is a schematic diagram of the structure of the first connecting rod and the second connecting rod in this invention.

[0043] 1, cleaning box; 2, locking mechanism; 21, limiting rod; 22, first ring body; 23, second ring body; 24, through rod; 25, locking rotating rod; 26, limiting groove; 28, connecting pin; 29, rotating lever; 3, pulling connecting rod; 4, water outlet pipeline; 5, driving motor; 6, box upper cover; 7, centrifugal assembly; 71, centrifugal frame; 72, self-centrifugal mechanism; 721, rotating shaft; 722, first spring; 723, mounting block; 724, mounting vertical plate; 725, pulling synchronous belt; 726, first bevel gear; 727, second bevel gear; 73, anti-overturning mechanism; 731, centrifugal wheel; 732, connecting disc; 733, rotating claw; 734, return spring; 735, rotating head; 8, drain hand valve; 9, driving connecting assembly; 91, locking driving mechanism; 911, rack; 912, first connecting rod; 914, second connecting rod; 915, toothed disc; 916, mounting slide plate; 92, separation driving mechanism; 921, separation adjusting plate; 922, roller; 923, support; 924, rotary joint; 925, baffle; 93, first face gear; 94, second face gear; 95, second spring; 10, lifting mounting frame. DETAILED DESCRIPTION

[0044] In order to make the technical personnel in the art better understand the technical solutions of the present application, the present application will be further described in detail below with reference to the drawings.

[0045] As Figures 1-14 shown, the present application provides a kind of box appliance for cleaning PECVD machine special gas nozzle, including the cleaning box 1 with cavity formed inside, the cavity opening position of the cleaning box 1 is rotationally arranged box upper cover 6, and water outlet pipeline 4 is installed on the box upper cover 6 near the cavity side of the cleaning box 1, the drain hand valve 8 is installed at the bottom of the cleaning cavity, when needing to clean special gas nozzle, the special gas nozzle to be cleaned is placed into the cleaning box 1, then pours into lye in the cleaning box 1, lye reacts with the internal alumina residue of special gas nozzle and removes alumina residue, to reach the effect that special gas nozzle surface and internal can be cleaned simultaneously, wherein lye can be potassium hydroxide, it also can be sodium hydroxide and other alkaline solution, after cleaning special gas nozzle in the cleaning box 1, the water outside is in the form of spray to the special gas nozzle after cleaning and the waste liquid residue in the box interior by water outlet pipeline 4, so that the pH value reaches safe neutral value, then opens the drain hand valve 8, and the waste liquid in the cleaning box 1 is discharged;

[0046] When the upper cover 6 of the box is closed or opened, the upper cover 6 can be lowered or raised by pulling the connecting rod 3 when the upper cover 6 of the box is closed or opened, so that the lifting mount 10 is lowered or raised.

[0047] The box device for cleaning the PECVD machine special gas nozzle further comprises a centrifugal assembly 7, the centrifugal assembly 7 comprises a centrifugal frame 71 installed on the power output end of the driving motor 5, the driving motor 5 is slidably installed on the inner wall surface of the cleaning box 1, and the special gas nozzle needs to be clamped and locked by the locking mechanism 2 arranged on the centrifugal frame 71 when the special gas nozzle needs to be put into the cleaning box 1. Thus, even if the cleaning effect of the special gas nozzle is improved by accelerating the circulation of the cleaning liquid, the special gas nozzle will not collide with each other or collide with other objects in the cleaning box 1, effectively protecting the special gas nozzle.

[0048] In an embodiment of the present application, the locking mechanism 2 comprises a first ring body 22 rotatably arranged on the centrifugal frame 71 and a second ring body 23 rotatably arranged on the first ring body 22, a plurality of limiting grooves 26 arranged in a circumferential array are formed on the first ring body 22, a plurality of connecting pins 28 corresponding to the plurality of limiting grooves 26 are arranged on the second ring body 23, and a rotating lever 29 is rotatably arranged on each connecting pin 28. One side end of each rotating lever 29 is slidably fitted in the corresponding limiting groove 26, and the other side end is rotatably provided with a locking lever 25. The first ring body 22 is connected with the lifting mount 10 through the locking driving mechanism 91 in the driving connection assembly 9. When the lifting mount 10 is lowered, the locking driving mechanism 91 drives the first ring body 22 to rotate. At this time, since the limiting rod 21 arranged on the second ring body 23 abuts against the surface of the lifting mount 10, the rotation of the second ring body 23 is prevented when the first ring body 22 rotates, so that the first ring body 22 and the second ring body 23 rotate relatively. At this time, since the rotating lever 29 is limited by the connecting pin 28, it can only rotate through the connecting pin 28. Thus, when the first ring body 22 and the second ring body 23 rotate relatively, the end of each rotating lever 29 slides in the limiting groove 26, and each limiting groove 26 is arc-shaped. Thus, under the limitation of the arc-shaped limiting groove 26 and the connecting pin 28, each rotating lever 29 can only move in two directions, either approaching each other along the axis of the second ring body 23 or moving away from each other along the opposite direction of the axis.

[0049] When the special gas nozzle needs to be clamped, the centrifugal frame 71 is provided with the penetrating rod 24 at the center position of the plurality of locking rotating rods 25, most of the nozzles are through structure, the penetrating rod 24 with a small caliber is penetrated through each special gas nozzle which needs to be cleaned, and the preliminary placement of the special gas nozzle is completed. At this time, the upper cover 6 of the closed box is closed, the lifting mounting frame 10 is lowered, the first ring body 22 is rotated through the locking driving mechanism 91 in the driving connection assembly 9, each rotating lever 29 is rotated towards the axis direction close to the second ring body 23, and each rotating lever 29 is abutted to the surface of the special gas nozzle. At this time, the clamping work of the special gas nozzle is completed, and the collision of the special gas nozzle is prevented when the special gas nozzle is placed into the cleaning box 1 without clamping.

[0050] Moreover, it is worth noting that the locking driving mechanism 91 also includes an adaptive connection part. When the locking mechanism 2 completes the locking action of the special gas nozzle, the adaptive connection part is used for disconnecting the locking mechanism 2 from the locking driving mechanism 91 and the lifting mounting frame 10. In this way, even if the lifting mounting frame 10 is still descending, the first ring body 22 in the locking mechanism 2 will not be rotated through the locking driving mechanism 91. That is to say, when the special gas nozzle with a large caliber is clamped, even if each rotating lever 29 has been abutted to the surface of the special gas nozzle, the first ring body 22 will not be rotated when the lifting mounting frame 10 is still descending. The locking and clamping of the special gas nozzle by the locking mechanism have a certain elastic space, which can meet the locking and clamping requirements of the special gas nozzle with different calibers, and the universal effect of the present application is improved.

[0051] In another embodiment of the present application, the locking driving mechanism 91 includes the first connecting rod 912 and the second connecting rod 914 which are inserted into each other. The end of the first connecting rod 912 away from the second connecting rod 914 is rotationally arranged on the centrifugal frame 71 and connected with the first ring body 22. The rack 911 is fixedly installed on the inner wall surface of the cleaning box 1, and the gear disc 915 is engaged with the rack 911. The gear disc 915 is slidingly arranged on the inner wall surface of the cleaning box 1 through the installation sliding plate 916, and the installation sliding plate 916 is fixedly connected with the lifting mounting frame 10. When the upper cover 6 of the closed box is closed, the lifting mounting frame 10 moves downward, so that the installation sliding plate 916 moves downward together with the gear disc 915. At this time, the gear disc 915 is rotated through the meshing structure with the rack 911. The adaptive connection part is arranged between the second connecting rod 914 and the gear disc 915. In this way, the first connecting rod 912 and the second connecting rod 914 are rotated through the rotation of the gear disc 915 through the adaptive connection part, so that the first ring body 22 is rotated, the locking and clamping of the special gas nozzle by the locking mechanism 2 are realized, and the stability of the soaking cleaning of the special gas nozzle is improved.

[0052] In still another embodiment of the present application, the self-adaptive connecting part comprises a first face gear 93 and a second face gear 94 which are engaged with each other, wherein the second face gear 94 is fixedly arranged on the surface of the toothed disc 915, and the first face gear 93 is fixedly connected with the second connecting rod 914 through the second spring 95; when each rotating lever 29 is abutted against the outer circumferential surface of the special gas nozzle due to the lowering of the lifting mounting frame 10, the rotating levers 29 cannot continue to approach each other in the axial direction, so that the first ring body 22 cannot continue to rotate, and the first face gear 93 and the second face gear 94 produce the gear meshing phenomenon by compressing the second spring 95, thereby achieving the self-adaptive clamping operation and meeting the clamping operation of the special gas nozzle with different diameters, and the use is more convenient;

[0053] After the cleaning of the special gas nozzle in the cleaning box body 1 is completed and the spraying is finished, the driving motor 5 is started to rotate the centrifugal frame 71 as a whole, and at this time, the locking mechanism 2 is rotated along the driving axis of the driving motor 5 by the centrifugal frame 71; the rotation direction can throw out the residual liquid in the nozzle of the special gas nozzle by the centrifugal force, so as to prevent the residual liquid from being evaporated and dried in time due to the internal diameter effect of the special gas nozzle, thereby affecting the subsequent use.

[0054] It should be noted that, in order to enable the driving motor 5 to rotate the centrifugal frame 71 and the locking mechanism, the first connecting rod 912 and the second connecting rod 914 are separated by the separation driving mechanism 92 in the driving connection assembly 9, and at this time, the locking driving mechanism 91 is disconnected by the separation driving mechanism 92, so that the centrifugal frame 71 and the locking mechanism 2 will not be limited during rotation.

[0055] In still another embodiment of the present application, the separation driving mechanism 92 comprises a rotary joint 924 arranged on the second connecting rod 914 and a separation adjusting plate 921 fixedly arranged on the rotary joint 924; the inner wall surface of the cleaning box body 1 is provided with a roller 922 mounted on a support 923, and the roller 922 is rotatably arranged on the support 923; when the lifting mounting frame 10 is lowered and the toothed disc 915 on the lifting slide plate is separated from the rack 911, the roller 922 abuts against the separation adjusting plate 921; since the separation adjusting plate 921 is arranged obliquely, the roller 922 will form a pulling effect on the separation adjusting plate 921; the separation adjusting plate 921 drives the rotary joint 924 to abut against the baffle 925, and drives the first connecting rod 912 and the second connecting rod 914 to be separated by pushing the baffle 925; at this time, the locking driving mechanism 91 is separated; the separation adjusting plate 921 is connected with the bottom surface of the cleaning box body 1 through an extension piece, so as to prevent the rotary joint 924 from rotating with the second connecting rod 914; wherein the extension piece can be a hydraulic telescopic rod or a telescopic column.

[0056] It should be noted that the surfaces of the first connecting rod 912 and the second connecting rod 914 in contact with each other are provided with teeth, so that the first connecting rod 912 and the second connecting rod 914 are engaged with each other to rotate the first ring body 22 through the locking driving mechanism 91, and the bottom of the first connecting rod 912 is provided with a notch, so that the second connecting rod 914 is inserted, and the stroke of the rack 911 is set to be below the notch formed in the first connecting rod 912 when the toothed disc 915 is separated from the rack 911, and the teeth and the notch are corresponding in direction;

[0057] In order to improve the drying effect of the special gas nozzle after cleaning, the centrifugal assembly 7 further comprises a self-centrifugal mechanism 72 mounted on the centrifugal frame 71, and the self-centrifugal mechanism 72 is used for synchronous rotation of the locking rotating rod 25 when the centrifugal frame 71 and the locking mechanism 2 are rotated as a whole through the driving motor 5, so that the special gas nozzle can be rotated as a whole in the direction of the rotating axis of the driving motor 5 to realize centrifugal drying of the inside of the nozzle, or the special gas nozzle can be rotated along the axis direction of the special gas nozzle to complete centrifugal drying of the surface of the special gas nozzle;

[0058] In an embodiment of the present application, the self-centrifugal mechanism 72 comprises a first bevel gear 726 and a second bevel gear 727 engaged with each other, wherein the first bevel gear 726 is fixedly arranged on the power output shaft of the driving motor 5, the second bevel gear 727 is rotatably arranged on the rotating shaft 721 of the centrifugal frame 71 through the anti-inversion mechanism 73, and the second bevel gear 727 is rotatably arranged on the rotating shaft 721 of the centrifugal frame 71 through the anti-inversion mechanism 73, when the centrifugal frame 71 is driven to rotate through the driving motor 5, the rotating shaft 721 can be synchronously rotated through the first bevel gear 726, the second bevel gear 727 and the anti-inversion mechanism 73, the self-centrifugal mechanism 72 further comprises a mounting vertical plate 724 fixedly arranged on the centrifugal frame 71 and provided with a notch, and the mounting block 723 is slidably arranged in the notch of the mounting vertical plate 724 through the first spring 722, wherein a group of the locking rotating rods 25 and the mounting block 723 and the rotating shaft 721 are respectively installed and pulled through the synchronous belt 725 through the synchronous pulley, so that the rotating rod 29 can be rotated through the pulling of the synchronous belt 725 when the rotating shaft 721 rotates, so that the special gas nozzle is directly rotated in the axis direction through the rotation of the rotating rod 29, so that the centrifugal drying and cleaning of the inside of the nozzle and the surface of the special gas nozzle are realized at the same time, and the practicability is improved;

[0059] It needs to be explained that in one of the cases, the plurality of rotating lever 29 is close to each other to clamp the special gas nozzle, the rotating lever 29 forms a pulling effect on the pulling synchronous belt 725, at this time the first spring 722 is pulled up and deformed, then after cleaning is completed and the box upper cover 6 is opened, the plurality of rotating lever 29 is away from each other, at this time the first spring 722 restores the deformation, maintains the pulling state of the pulling synchronous belt 725, so that the pulling synchronous belt 725 always maintains the tension state;

[0060] When the rotating lever 29 is rotated by the self-centrifugal mechanism 72, the anti-rollover mechanism 73 is used for maintaining the one-way transmission of power, the anti-rollover mechanism 73 comprises a centrifugal wheel 731 rotatably arranged on the centrifugal frame 71 and fixedly connected with the second bevel gear 727, and a connecting disc 732 fixedly connected with the rotating shaft 721, and the inner edge surface of the connecting disc 732 close to the centrifugal wheel 731 is provided with a clamping tooth, a plurality of rotating clamping jaws 733 and a plurality of rotating heads 735 corresponding to the plurality of rotating clamping jaws 733 are rotatably arranged on the centrifugal wheel 731, the plurality of rotating heads 735 are rotatably arranged on the surface of the centrifugal wheel 731 and connected with the corresponding rotating clamping jaws 733 through the return spring 734, when the centrifugal wheel 731 rotates and generates centrifugal force, the rotating clamping jaw 733 abuts against the clamping tooth on the inner edge of the connecting disc 732, so that when the anti-rollover mechanism 73 is rotated by the driving motor 5, the centrifugal force generated by the centrifugal wheel 731 in the anti-rollover mechanism 73 will throw the rotating clamping jaw 733 outward, and the rotating clamping jaw 733 abuts against the clamping tooth on the inner surface of the connecting disc 732 after rotating outward, so as to rotate the connecting disc 732, and conversely, if the locking mechanism 2 is adjusted to lock or unlock the special gas nozzle, the locking rotating lever 25 on the locking mechanism 2 will also rotate, but the rotating amplitude is much smaller than that of the driving motor 5, and the caliber of the connecting disc 732 is larger than that of the centrifugal wheel 731, so that no matter how the locking rotating lever 25 rotates, the centrifugal wheel 731 will not rotate, so that the rotating shaft 721 of the driving motor 5 will not be passively moved, thereby effectively protecting the driving motor 5, and the problem that the first connecting rod 912 cannot be accurately inserted into the second connecting rod 914 to make the corresponding teeth accurately correspond to each other can also be effectively prevented.

[0061] The above only describes some exemplary embodiments of the present application in a descriptive manner, and it is needless to say that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present application. Therefore, the above drawings and descriptions are illustrative in nature and should not be understood as limiting the scope of protection of the claims of the present application.

Claims

1. A housing for cleaning the special gas nozzles of a PECVD machine, comprising a cleaning housing (1) with an internal cavity, wherein a housing cover (6) is rotatably disposed at the cavity opening of the cleaning housing (1), and a water outlet pipe (4) is installed on the housing cover (6) near the cavity of the cleaning housing (1), and a drain valve (8) is installed at the bottom of the cleaning housing (1), characterized in that: Also includes: A lifting mounting bracket (10) is slidably set on the inner wall surface of the cleaning box (1). A pull connecting rod (3) is provided between the box cover (6) and the lifting mounting bracket (10). When the box cover (6) is closed / opened, the pull connecting rod (3) is used to lower / raise the lifting mounting bracket (10). Centrifugal assembly (7), the centrifugal assembly (7) includes a centrifugal frame (71) mounted on the power output end of a drive motor (5), a locking mechanism (2) is provided on the centrifugal frame (71), the locking mechanism (2) is used to clamp the special gas nozzle to be cleaned placed in the center of it, and the drive motor (5) is slidably mounted on the inner wall surface of the cleaning chamber (1). The drive connection assembly (9) includes a locking drive mechanism (91) for connecting the locking mechanism (2) and the lifting mounting bracket (10). When the top cover (6) of the housing is closed and the lifting mounting bracket (10) is lowered, the locking drive mechanism (91) drives the locking mechanism (2) to complete the locking action on the special gas nozzle. The locking drive mechanism (91) also includes an adaptive connection part. When the locking mechanism (2) completes the locking action on the special gas nozzle, the adaptive connection part is used to disconnect the locking mechanism (2) from the locking drive mechanism (91) and the lifting mounting bracket (10). The locking mechanism (2) includes a first ring body (22) rotatably mounted on the centrifugal frame (71) and a second ring body (23) rotatably mounted on the first ring body (22). The first ring body (22) has multiple sets of circumferentially arrayed limiting grooves (26). The second ring body (23) has the same number of connecting pins (28) as the multiple sets of limiting grooves (26) and they correspond one-to-one. Each connecting pin (28) is rotatably mounted with a rotating lever (29). One side of each rotating lever (29) is slidably fitted into the corresponding limiting groove (26), and the other side is rotatably mounted with a locking lever (25). The centrifugal frame (71) has an insertion rod (24) at the center of multiple sets of locking rotating rods (25). The insertion rod (24) is used to insert and place the special gas nozzle. The first ring body (22) is connected to the lifting mounting frame (10) through the locking drive mechanism (91). When the lifting mounting frame (10) descends, the locking drive mechanism (91) is used to rotate the first ring body (22). A limit rod (21) is fixedly provided on the second ring body (23), and the end of the limit rod (21) away from the second ring body (23) abuts against the surface of the lifting mounting frame (10). When the first ring body (22) rotates, the limit rod (21) is used to prevent the second ring body (23) from rotating synchronously with the first ring body (22), so that the first ring body (22) and the second ring body (23) rotate relative to each other. The locking drive mechanism (91) includes a first connecting rod (912) and a second connecting rod (914) that are inserted into each other. The end of the first connecting rod (912) away from the second connecting rod (914) is rotatably mounted on the centrifuge frame (71) and connected to the first ring body (22). A rack (911) is fixedly installed on the inner wall surface of the cleaning box (1), and a toothed disc (915) meshes on the rack (911). The toothed disc (915) is slidably mounted on the inner wall surface of the cleaning box (1) through the mounting plate (916), and the mounting plate (916) is fixedly connected to the lifting mounting frame (10). The adaptive connection is disposed between the second connecting rod (914) and the gear plate (915). When the multiple sets of locking rotating rods (25) complete the locking action on the special gas nozzle, the adaptive connection is used to disconnect the second connecting rod (914) and the gear plate (915). The adaptive connection includes a first end face gear (93) and a second end face gear (94) that mesh with each other, wherein the second end face gear (94) is fixedly mounted on the surface of the gear disk (915), and the first end face gear (93) is fixedly connected to the second connecting rod (914) by a second spring (95); The centrifugal assembly (7) also includes a self-centrifugal mechanism (72) mounted on the centrifugal rack (71). When the centrifugal rack (71) and the locking mechanism (2) are rotated as a whole by the drive motor (5), the self-centrifugal mechanism (72) is used to make the locking rod (25) rotate synchronously. The self-centrifugal mechanism (72) includes a first bevel gear (726) and a second bevel gear (727) that mesh with each other. The first bevel gear (726) is fixedly mounted on the power output shaft of the drive motor (5), and the second bevel gear (727) is mounted on a rotating shaft (721) on the centrifugal frame (71) via an anti-rollover mechanism (73). The anti-rollover mechanism (73) is used to maintain unidirectional power transmission. The self-centrifugal mechanism (72) also includes a shaft (721) fixedly mounted on the centrifugal frame (71). The mounting plate (724) has a slot, and a mounting block (723) is slidably arranged in the slot of the mounting plate (724) by a first spring (722). A set of locking rods (25) and the mounting block (723) are connected to the rotating shaft (721) by a synchronous pulley to install the tensioning synchronous belt (725). When the special gas nozzle is locked by the locking mechanism (2), the first spring (722) is used to keep the tensioning synchronous belt (725) taut. The drive connection assembly (9) also includes a separation drive mechanism (92). When the lifting mounting frame (10) is lowered into place, the separation drive mechanism (92) is used to separate the locking mechanism (2) from the locking drive mechanism (91) so as to realize the overall rotation of the centrifugal frame (71) through the centrifugal mechanism (72). The separation drive mechanism (92) includes a rotary joint (924) sleeved on the second connecting rod (914) and a separation adjustment plate (921) fixedly mounted on the rotary joint (924). The separation adjustment plate (921) is connected to the bottom surface of the cleaning box (1) through a telescopic member. The inner wall surface of the cleaning box (1) is equipped with rollers (922) through a bracket (923), and the rollers (922) are rotatably mounted on the bracket (923). When the lifting mounting frame (10) descends to the position to separate the gear plate (915) from the rack (911), the rollers (922) abut against the surface of the separation adjustment plate (921).

2. The housing device for cleaning the special gas nozzle of a PECVD machine according to claim 1, characterized in that: The anti-overturning mechanism (73) includes a centrifugal wheel (731) rotatably mounted on the centrifugal frame (71) and fixedly connected to the second bevel gear (727) and a connecting disk (732) fixedly connected to the rotating shaft (721). The connecting disk (732) has a locking tooth on the inner edge surface near the centrifugal wheel (731). The centrifugal wheel (731) is rotatably mounted with multiple rotating claws (733) and multiple rotating heads (735) corresponding to the multiple rotating claws (733). The multiple rotating heads (735) are all rotatably mounted on the surface of the centrifugal wheel (731) and connected to the corresponding rotating claws (733) through a return spring (734). When the centrifugal wheel (731) rotates and generates centrifugal force, the rotating claws (733) abut against the locking teeth on the inner edge of the connecting disk (732).

3. The housing device for cleaning the special gas nozzle of a PECVD machine according to claim 2, characterized in that: The cleaning chamber (1) is made of acid and alkali resistant material.

Images