Graphite boat dismounting and mounting equipment

Abstract

The graphite boat disassembling and assembling equipment comprises a graphite boat disassembling and assembling machine main body, a graphite boat piece cache region and a graphite boat clamping point loading and unloading machine, the graphite boat disassembling and assembling machine main body is in butt joint with the graphite boat piece cache region, and the graphite boat piece cache region is in butt joint with the graphite boat clamping point loading and unloading machine. A graphite boat rotating carrying mechanism, two graphite boat disassembling and assembling assemblies, a graphite boat piece conveying device, a feeding and discharging turnover mechanism and a graphite boat piece carrying mechanism are arranged in the graphite boat disassembling and assembling machine body, and the two graphite boat disassembling and assembling assemblies are located on the two sides of the graphite boat piece conveying device. A graphite boat piece carrying mechanism is arranged above the two graphite boat dismounting assemblies and the graphite boat piece conveying device, and a graphite boat rotating carrying mechanism is arranged above the feeding and discharging turnover mechanism and the graphite boat piece carrying mechanism. The scrapped boat pieces, the nuts and the ceramic rings are automatically replaced, the automation degree of the whole process is high, the two graphite boat disassembly and assembly assemblies alternately work, disassembly and assembly are integrally completed, and the efficiency of correcting the graphite boat pieces and replacing accessories is greatly improved.

Description

Technical Field

[0001] The invention relates to the technical field of graphite boat disassembly and assembly, in particular to graphite boat disassembly and assembly equipment. Background Art

[0002] As the cost of photovoltaic power generation continues to decrease, solar power generation will have a broader market space. As a carrier for anti-reflection film coating of solar cells, the structure and size of graphite boat directly affect the conversion efficiency and production efficiency of silicon wafers.

[0003] After the graphite boat has been used for a period of time, the boat segments will become loose and the surface of the boat segments will be covered with dust, which will affect the efficiency of the graphite boat. Therefore, the graphite boat will be disassembled, the boat segments will be cleaned by blowing, and damaged accessories such as nuts, ceramic rings and card points will be replaced. After the accessories have been replaced and calibrated, the graphite boat segments can be assembled and used.

[0004] The existing graphite boat disassembly and assembly uses independent mechanical equipment in conjunction with manual labor to complete the disassembly and assembly, which is inefficient and the equipment is scattered and occupies a large area.

[0005] Therefore, we propose a graphite boat disassembly and assembly device to solve the above-mentioned problems. Summary of the invention

[0006] The object of the present invention is to provide a graphite boat disassembly and assembly device to solve the problems raised in the above background technology.

[0007] To achieve the above-mentioned object, the present invention provides the following technical solutions: a graphite boat disassembly and assembly equipment, comprising: a graphite boat disassembly and assembly machine body, a graphite boat sheet buffer area and a graphite boat card point loading and unloading machine, wherein the graphite boat disassembly and assembly machine body is connected to the graphite boat sheet buffer area, and the graphite boat sheet buffer area is connected to the graphite boat card point loading and unloading machine; A graphite boat rotating and transporting mechanism, two graphite boat disassembling and assembling assemblies, a graphite boat sheet transmission device, a loading and unloading turnover mechanism and a graphite boat sheet transporting mechanism are arranged in the main body of the graphite boat disassembling and assembling machine. The two graphite boat disassembling and assembling assemblies are located on both sides of the graphite boat sheet transmission device. A graphite boat sheet transporting mechanism is arranged above the two graphite boat disassembling and assembling assemblies and the graphite boat sheet transmission device. A graphite boat rotating and transporting mechanism is arranged above the loading and unloading turnover mechanism and the graphite boat sheet transporting mechanism. The loading and unloading turnover mechanism caches the graphite boat. The graphite boat disassembly and assembly assembly comprises a disassembly and assembly mechanism, a first placement platform, a disassembly and assembly platform and a second placement platform, the second placement platform is located on both sides of the graphite boat sheet transmission device, the disassembly and assembly platform and the first placement platform are sequentially arranged on the second placement platform in a direction away from the graphite boat sheet transmission device, and the disassembly and assembly mechanism is arranged above the disassembly and assembly platform and the first placement platform; The two ends of the disassembly and assembly platform are provided with a good product placement platform, an electrode block buffer column and a scrapped product recovery box, and the electrode block buffer column is connected to the electrode block pick-up and placement mechanism; A lifting and positioning mechanism is installed under the disassembly and assembly platform, and the lifting and positioning mechanism includes a fixed platform plate, which is fixedly installed on the outer frames on both sides of the disassembly and assembly platform. A lifting and positioning platform plate is provided above the fixed platform plate, and two linkage rods are slidably arranged on the lifting and positioning platform plate. Two third lifting drive mechanisms are arranged between the fixed platform plate and the lifting and positioning platform plate, and the third lifting drive mechanism drives the lifting and positioning platform plate to lift and lower. Two groups of horizontal pushing cylinders are respectively arranged under the two ends of the lifting and positioning platform plate, and the telescopic ends of the horizontal pushing cylinders are fixed to the connecting arms, and the other end of the connecting arms is fixedly connected to the linkage rods. A number of driving connecting rods are fixedly installed on the linkage rods, and clamping seats are installed at the ends of the driving connecting rods. The clamping seats are staggered and clamped, and graphite boat sheet series rods are clamped in the clamping seats. A number of pairs of nut positioning columns are fixedly installed on the fixed platform plate, and the nut positioning columns movably penetrate the disassembly and assembly platform and the clamping seats and then are plugged into the bottom of the fixed graphite boat sheet series rods; A boat caching mechanism is arranged in the graphite boat caching area, and the boat caching mechanism caches scrapped boats and good boats.

[0008] Preferably, the graphite boat rotating transport mechanism comprises two sets of symmetrical first slide rails and a first conveying device, a transport machine body is slidably arranged on the first slide rail, the transport machine body is fixedly connected to the first conveying device, and the first conveying device drives the transport machine body to move along the first slide rail passing over the graphite boat disassembly and assembly assembly and the loading and unloading turnover mechanism.

[0009] Preferably, the transport machine body includes a mobile platform seat, both ends of the mobile platform seat are slidably connected to the first slide rail, both ends of the mobile platform seat are fixedly connected to the first conveying device, two first lifting drive mechanisms are arranged on the mobile platform seat, the lower end of the first lifting drive mechanism is connected to the clamping claw lifting seat, both ends of the clamping claw lifting seat are installed with clamping claw assemblies, the clamping claw assembly is automatically slidably connected to the clamping claw lifting seat, and the clamping claw assembly is provided with a motor assembly for driving the clamping claw to flip.

[0010] Preferably, the graphite boat sheet transport mechanism comprises two sets of symmetrical second slide rails and a second conveying device, two movable beams are slidably arranged on the second slide rails, both ends of the movable beams are fixedly connected to the second conveying device, and the graphite boat sheet adsorption transport mechanism is centrally hoisted on the movable beams.

[0011] Preferably, the graphite boat sheet adsorption and transportation mechanism includes a fixed seat, which is fixedly mounted on a movable crossbeam, the fixed seat is slidably connected to an automatic lifting seat, the automatic lifting seat is hoisted on a cross frame, a plurality of vacuum suction nozzles and positioning needles and a ceramic ring clamping mechanism are provided on the cross frame, the vacuum suction nozzle adsorbs the boat sheet, and downward pressing pin assemblies are installed at both ends of the fixed seat.

[0012] Preferably, the disassembly and assembly mechanism comprises a bracket, the bracket is fixedly arranged, a Y-axis moving component is arranged on the bracket, two groups of X-axis moving components are arranged on the Y-axis moving component, and a Z-axis disassembly and assembly manipulator is arranged on the X-axis moving component; The Z-axis disassembly and assembly robot comprises a Z-axis moving seat, in which a nut disassembly and assembly machine and a visual inspection machine are installed; The Z-axis moving seat is an automatic Z-axis moving module, driving the nut disassembly and assembly machine and the visual inspection machine to rise and fall; The lower end of the Z-axis moving seat is also provided with an opening and closing clamping claw driven by a clamping cylinder.

[0013] Preferably, end positioning mechanisms are installed on the lower surfaces of both ends of the disassembly and assembly platform, and the end positioning mechanisms include a fourth lifting drive mechanism, which drives the lifting and connecting lifting seat, and the lifting seat is provided with supporting clamps, lifting cylinders and supporting positioning columns, and the lifting cylinders drive the lifting and connecting supporting clamps.

[0014] Preferably, the first placement platform comprises a fixed fixing plate, the fixing plate is centrally fixedly connected to the second lifting drive mechanism, the telescopic end of the second lifting drive mechanism is fixedly connected to the lifting plate, and a plurality of guide columns are arranged between the fixing plate and the lifting plate; A plurality of ceramic ring cache columns are installed on the upper surface of the fixed plate, and the ceramic ring cache columns movably penetrate the lifting plate. The ceramic ring cache columns cache the removed ceramic rings, and the removed nuts and other graphite boat accessories are placed on the upper surface of the lifting plate.

[0015] Preferably, a plurality of bottom positioning cylinders are installed below the disassembly and assembly platform, and the bottom positioning cylinders drive the positioning plates.

[0016] Preferably, the graphite boat sheet transmission device comprises a first conveyor line section and a second conveyor line section, the first conveyor line section and the second conveyor line section are butted against each other, a boat sheet carrier positioning mechanism is arranged in the first conveyor line section, and a detection camera and a wind knife are arranged at the end of the second conveyor line section.

[0017] Compared with the prior art, the present invention has the following beneficial effects: The graphite boat is loaded onto the loading and unloading turnover mechanism. The graphite boat rotating transport mechanism rotates the graphite boat of the loading and unloading turnover mechanism by 90 degrees and then transports it to the graphite boat disassembly and assembly assembly for disassembly of the nuts, ceramic rings and electrode blocks. The graphite boat sheet transport mechanism sequentially adsorbs the boat sheets and places them into the graphite boat sheet transmission device and transports them to the boat sheet temporary buffer mechanism. After being inspected by the card point machine and the card points replaced, they are returned to the graphite boat disassembly and assembly assembly for assembly. The assembled graphite boat is then sent to the loading and unloading turnover mechanism for unloading. During this process, the scrapped boat sheets, nuts and ceramic rings are automatically replaced. The whole process has a high degree of automation. The two groups of graphite boat disassembly and assembly components work alternately, and the disassembly and assembly are completed in one piece, which greatly improves the efficiency of graphite boat sheet calibration and replacement of accessories. The overall structure of the equipment is compact and occupies a small area. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the present invention; Figure 2It is a schematic diagram of the main structure of the present invention; Figure 3 This is a disassembled diagram of the main structure of the present invention; Figure 4 It is a structural schematic diagram of the graphite boat rotating transport mechanism in the present invention; Figure 5 For the present invention Figure 4 A magnified image of point A; Figure 6 It is a structural schematic diagram of the graphite boat sheet transporting mechanism in the present invention; Figure 7 It is a structural schematic diagram of the graphite boat sheet adsorption and transportation mechanism in the present invention; Figure 8 It is a partial enlarged view of the graphite boat sheet adsorption and transportation mechanism in the present invention; Fig. 9 It is a structural schematic diagram of the graphite boat disassembly and assembly components in the present invention; Fig.10 It is an exploded view of the disassembly and assembly mechanism and the disassembly and assembly platform in the present invention; Fig.11 For the present invention Fig.10 The enlarged view of point B; Fig.12 It is a structural schematic diagram of the disassembly and assembly mechanism in the present invention; Fig.13 It is a partial structural schematic diagram of the Z-axis disassembly and assembly robot in the present invention; Fig.14 It is a structural schematic diagram of the end positioning mechanism in the present invention; Fig.15 It is a structural schematic diagram of the first placement platform in the present invention; Fig.16 It is a structural schematic diagram of the lifting and positioning mechanism in the present invention; Fig.17 It is a partial side elevation view of the lifting and positioning mechanism of the present invention; Fig.18 For the present invention Fig.16 The enlarged view of point D; Fig.19 For the present invention Fig.10 Enlarged view of point C; Fig. 20 It is a schematic diagram of the structure of the graphite boat sheet transmission device in the present invention.

[0019] In the figure: 1. Graphite boat disassembly and assembly machine body; 2. Graphite boat slice buffer area; 3. Graphite boat card point loading and unloading machine; 4. Graphite boat rotating transport mechanism; 41. First slide rail; 42. First conveying device; 44. Transport machine body; 441. Mobile platform seat; 442. First lifting drive mechanism; 443. Clamping claw hoisting seat; 444. Clamping claw assembly; 5. Graphite boat disassembly and assembly assembly; 51. Disassembly and assembly mechanism; 511. Bracket; 512. Y-axis moving assembly; 513. X-axis moving assembly; 514. Z-axis disassembly and assembly manipulator; 5141. Nut Disassembly and assembly machine; 5142, visual inspection machine; 5143, Z-axis moving seat; 5144, clamping cylinder; 5145, opening and closing clamping claw; 52, first placement platform; 521, fixed plate; 522, second lifting drive mechanism; 523, lifting plate; 524, guide column; 525, ceramic ring cache column; 53, disassembly and assembly platform; 531, good product placement platform; 532, electrode block cache column; 533, scrap product recovery box; 534, electrode block pick-up and placement mechanism; 54, second placement platform; 55, lifting and positioning mechanism; 551, Fixed platform plate; 552, lifting platform plate; 553, driving connecting rod; 554, clamping seat; 555, third lifting driving mechanism; 556, horizontal pushing cylinder; 557, nut positioning column; 558, connecting arm; 559, linkage rod; 56, end positioning mechanism; 561, fourth lifting driving mechanism; 562, supporting clamping claw; 563, lifting seat; 564, lifting cylinder; 565, supporting positioning column; 57, bottom positioning cylinder; 6, boat piece caching mechanism; 7, gantry handling mechanism; 8, boat piece temporary caching mechanism; 9 , graphite boat transmission device; 91, the first section of the conveyor line; 92, the second section of the conveyor line; 93, the detection camera; 94, the air knife; 10, the loading and unloading turnover mechanism; 11, the graphite boat handling mechanism; 111, the second slide rail; 112, the second conveying device; 113, the moving beam; 114, the graphite boat adsorption and handling mechanism; 1141, the fixed seat; 1142, the automatic lifting seat; 1143, the horizontal frame; 1144, the vacuum nozzle; 1145, the positioning needle; 1146, the ceramic ring clamping mechanism; 1147, the push-down pin assembly. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] See also Figure 1The present invention provides a technical solution: a graphite boat disassembly and assembly equipment, comprising: a graphite boat disassembly and assembly machine body 1, a graphite boat sheet buffer area 2 and a graphite boat card point loader and unloader 3, the graphite boat disassembly and assembly machine body 1 is connected to the graphite boat sheet buffer area 2, the graphite boat sheet buffer area 2 is connected to the graphite boat card point loader and unloader 3, after the graphite boat is disassembled by the graphite boat disassembly and assembly machine body 1, the boat sheet enters the graphite boat sheet buffer area 2, and then enters the graphite boat card point loader and unloader 3 to replace the card point, and then returns to the graphite boat disassembly and assembly machine body 1 for assembly.

[0022] See also Figure 2 and Figure 3 A graphite boat rotating and transporting mechanism 4, two graphite boat disassembling and assembling components 5, a graphite boat sheet transmission device 9, a loading and unloading turnover mechanism 10 and a graphite boat sheet transmission mechanism 11 are arranged in the main body 1 of the graphite boat disassembling and assembling machine. The two graphite boat disassembling and assembling components 5 are located on both sides of the graphite boat sheet transmission device 9. A graphite boat sheet transmission mechanism 11 is arranged across the two graphite boat disassembling and assembling components 5 and the graphite boat sheet transmission device 9. A graphite boat rotating and transporting mechanism 4 is arranged across the loading and unloading turnover mechanism 10 and the graphite boat sheet transmission mechanism 11. The loading and unloading turnover mechanism 10 buffers the graphite boat. The graphite boat rotating conveying mechanism 4 conveys the graphite boat on the loading and unloading turnover mechanism 10 and turns it 90 degrees to place it on the graphite boat disassembly and assembly component 5 to be disassembled into boat pieces. The graphite boat piece conveying mechanism 11 places the disassembled boat pieces on the graphite boat piece transmission device 9 and transports them to the graphite boat piece buffer area 2. The boat pieces after replacing the card points are put back into the graphite boat piece transmission device 9 and transported back. They are transported to the graphite boat disassembly and assembly component 5 by the graphite boat piece conveying mechanism 11 for assembly, and then the assembled graphite boat is transported to the loading and unloading turnover mechanism 10 for unloading by the graphite boat rotating conveying mechanism 4.

[0023] See also Figure 4 The graphite boat rotating transport mechanism 4 includes two sets of symmetrical first slide rails 41 and a first conveying device 42. A set of transport machine bodies 44 are slidably arranged on the first slide rails 41. The transport machine bodies 44 are fixedly connected to the first conveying device 42. The first conveying device 42 drives the transport machine bodies 44 to move along the first slide rails 41 and pass over the graphite boat disassembly and assembly components 5 and the loading and unloading turnover mechanism 10.

[0024] See also Figure 5The conveyor body 44 includes a mobile platform seat 441, both ends of the mobile platform seat 441 are slidably connected to the first slide rail 41, both ends of the mobile platform seat 441 are fixedly connected to the first conveying device 42, and two first lifting drive mechanisms 442 are arranged on the mobile platform seat 441. The lower end of the first lifting drive mechanism 442 is connected to the clamping claw hanging seat 443, and the two ends of the clamping claw hanging seat 443 are installed with a clamping claw assembly 444. The clamping claw assembly 444 is automatically slidably connected with the clamping claw hanging seat 443. The clamping claw assembly 444 is provided with a motor assembly for clamping claw flipping drive to realize the three-axial movement of the clamping claw assembly 444, so as to grab the graphite boat and travel back and forth between the graphite boat disassembly assembly assembly 5 and the loading and unloading turnover mechanism 10. At the same time, after the clamping claw assembly 444 grabs the graphite boat, it is driven to rotate by the motor assembly to flip the graphite boat 90°.

[0025] See also Figure 6 The graphite boat transport mechanism 11 includes two sets of symmetrical second slide rails 111 and a second conveying device 112. Two movable beams 113 are slidably arranged on the second slide rails 111. Both ends of the movable beams 113 are fixedly connected to the second conveying device 112. A graphite boat adsorption and transport mechanism 114 is centrally suspended on the movable beams 113. The second conveying device 112 drives the graphite boat adsorption and transport mechanism 114 to move linearly along the second slide rails 111, so that the graphite boat adsorption and transport mechanism 114 adsorbs the graphite boat and travels back and forth between the graphite boat transmission device 9 and the graphite boat disassembly and assembly component 5.

[0026] See also Figure 7 and Figure 8 The graphite boat sheet adsorption and transportation mechanism 114 includes a fixed seat 1141, which is fixedly installed on the moving crossbeam 113. The fixed seat 1141 is slidably connected to an automatic lifting seat 1142. The automatic lifting seat 1142 is hoisted on a cross frame 1143. The cross frame 1143 is provided with a plurality of vacuum suction nozzles 1144, positioning needles 1145 and a ceramic ring clamping mechanism 1146. The vacuum suction nozzle 1144 adsorbs the boat sheet, and the positioning needles 1145 are used to position the boat sheet during adsorption. The ceramic ring clamping mechanism 1146 clamps the ceramic ring. Pressing pin assemblies 1147 are installed at both ends of the fixed seat 1141 for pressing down the graphite rods or ceramic rods at both ends of the graphite boat to keep the graphite boat electrode block in a state to be grasped.

[0027] See also Fig. 9The graphite boat disassembly assembly 5 comprises a disassembly assembly mechanism 51, a first placement platform 52, a disassembly assembly platform 53 and a second placement platform 54. The second placement platform 54 is located on one side of the graphite boat sheet transmission device 9. The disassembly assembly platform 53 and the first placement platform 52 are sequentially arranged in the direction away from the graphite boat sheet transmission device 9. The disassembly assembly mechanism 51 is arranged above the disassembly assembly platform 53 and the first placement platform 52. The graphite boat is flipped 90° and placed on the disassembly assembly platform 53 for positioning. The disassembly assembly mechanism 51 removes the nuts of the graphite boat. The graphite boat sheet adsorption and transportation mechanism 114 sequentially places the graphite boat sheet on the graphite boat sheet. It is adsorbed and placed on the graphite boat transmission device 9, and then the graphite boat adsorption and transportation mechanism 114 clamps the ceramic ring and places it on the first placement platform 52. When returning, the boat on the graphite boat transmission device 9 is adsorbed and transported to the second placement platform 54 for buffering. After all the boats are returned, the boat on the second placement platform 54 and the ceramic ring on the first placement platform 52 are transported to the disassembly and assembly platform 53 in turn. Finally, the disassembly and assembly mechanism 51 assembles the nuts and other parts and inspects them. After the inspection is completed, the graphite boat rotating transportation mechanism 4 transports them to the loading and unloading turnover mechanism 10 for unloading.

[0028] See also Fig.10 and Fig.11 A good product placement platform 531, an electrode block cache column 532 and a scrap product recovery box 533 are provided at both ends of the disassembly and assembly platform 53. The electrode block cache column 532 is connected to the electrode block pick-up and placement mechanism 534. The good product placement platform 531 pre-stores good product nuts and ceramic rings for replacing the worn nuts and ceramic rings removed from the graphite boat. The worn nuts and ceramic rings are put into the scrap product recovery box 533 for recycling. The electrode block cache column 532 is used to cache the disassembled electrode sheets. The electrode block pick-up and placement mechanism 534 is used to lift the electrode block to the top of the cache column to facilitate the removal of the electrode block.

[0029] See also Fig.12 and Fig.13 The disassembly mechanism 51 includes a bracket 511, the bracket 511 is fixedly arranged, a Y-axis moving component 512 is arranged on the bracket 511, two groups of X-axis moving components 513 are arranged on the Y-axis moving component 512, and a Z-axis disassembly manipulator 514 is arranged on the X-axis moving component 513, so as to realize the movement of the Z-axis disassembly manipulator 514 along the three axes of X, Y and Z; The Z-axis disassembly and assembly robot 514 comprises a Z-axis moving seat 5143, in which a nut disassembly and assembly machine 5141 and a visual inspection machine 5142 are installed. The nut disassembly and assembly machine 5141 is used to disassemble and assemble nuts and other accessories, and the disassembled nuts are placed on the first placement platform 52. The visual inspection machine 5142 is used to take pictures of nuts and other accessories, locate nuts and other accessories, and detect whether they are worn; The Z-axis moving seat 5143 is an automatic Z-axis moving module, driving the nut disassembly machine 5141 and the visual inspection machine 5142 to rise and fall; The lower end of the Z-axis movable seat 5143 is also provided with an opening and closing clamping jaw 5145 driven by a clamping cylinder 5144. The opening and closing clamping jaw 5145 is used to clamp the electrode block and the ceramic ring, and place the electrode block on the electrode block cache column 532, or remove it from the electrode block cache column 532 and place it on the graphite boat, and the scrapped nuts and ceramic rings are put into the scrap recycling box 533.

[0030] See also Fig.10 and Fig.14 The end positioning mechanism 56 is installed on the lower surface of both ends of the disassembly and assembly platform 53, and the end positioning mechanism 56 includes a fourth lifting drive mechanism 561. The fourth lifting drive mechanism 561 drives the lifting and connecting lifting seat 563. The lifting seat 563 is provided with a supporting clamp 562, a lifting cylinder 564 and a supporting positioning column 565. The lifting cylinder 564 drives the lifting and connecting supporting clamp 562. When the boat piece is disassembled, the lower end of the serial rod of the graphite boat piece is lifted and fixed by the supporting positioning column 565, which is convenient for the top nut to rotate and disassemble. After the boat piece is disassembled, the supporting positioning column 565 descends, and the supporting clamp 562 is lifted to clamp the serial rod to prevent the serial rod from shaking.

[0031] See also Fig.15 The first placement platform 52 includes a fixed fixed plate 521, the fixed plate 521 is centrally fixedly connected to the second lifting drive mechanism 522, the telescopic end of the second lifting drive mechanism 522 is fixedly connected to the lifting plate 523, and a plurality of guide columns 524 are arranged between the fixed plate 521 and the lifting plate 523, and the guide columns 524 are used for guiding, so that the fixed plate 521 and the lifting plate 523 can be lifted and lowered vertically; A plurality of ceramic ring cache columns 525 are installed on the upper surface of the fixed plate 521. The ceramic ring cache columns 525 movably penetrate the lifting plate 523. The ceramic ring cache columns 525 are used to cache the removed ceramic rings. The upper surface of the lifting plate 523 is used to place removed nuts and other accessories.

[0032] See also Fig.10 , Figures 15 to 18A lifting and positioning mechanism 55 is installed below the disassembly and assembly platform 53. The lifting and positioning mechanism 55 includes a fixed platform plate 551. The fixed platform plate 551 is suspended below the disassembly and assembly platform 53. A lifting and positioning mechanism 55 is installed above the fixed platform plate 551. Two linkage rods 559 are slidably arranged on the lifting and positioning mechanism 55. Two third lifting and positioning mechanisms 555 are arranged between the fixed platform plate 551 and the lifting and positioning mechanism 55. The third lifting and positioning mechanism 555 drives the lifting and positioning mechanism 552 to move up and down. Two groups of horizontal push cylinders 556 are respectively arranged below both ends of the platform plate 552, the telescopic ends of the horizontal push cylinders 556 are fixed to the connecting arms 558, the other end of the connecting arms 558 is fixedly connected to the linkage rod 559, a plurality of driving connecting rods 553 are fixedly installed on the linkage rod 559, a clamping seat 554 is installed at the end of the driving connecting rod 553, the clamping seat 554 is staggered and clamped, a plurality of pairs of nut positioning columns 557 are installed on the fixed platform plate 551, the nut positioning columns 557 movably penetrate the clamping seat 554 and the disassembly platform 53; The nut positioning column 557 fixes the nut at the bottom of the graphite boat series rod from below, so that the series rod is fixed, which makes it easier to disassemble and assemble the nut at the top of the series rod. The third lifting drive mechanism 555 drives the lifting platform plate 552 to lift and lower the clamping seat 554, and the horizontal pushing cylinder 556 drives the two linkage rods 559 to approach through the connecting arm 558, so that the clamping seat 554 clamps the graphite boat series rod to make it vertically stable.

[0033] See also Fig.10 and Fig.19 A plurality of bottom positioning cylinders 57 are installed below the disassembly and assembly platform 53. The bottom positioning cylinders 57 drive the positioning plates to clamp the graphite boat sheet from the side and position the side of the graphite boat.

[0034] See also Fig. 20 The graphite boat sheet transmission device 9 includes a first conveyor line 91 and a second conveyor line 92, which are butted against each other. A boat sheet carrier positioning mechanism is arranged in the first conveyor line 91, and the boat sheet carrier positioning mechanism is composed of a cylinder driving a convex shaft to plug the boat sheet to realize the boat sheet positioning. An inspection camera 93 and a wind knife 94 are arranged at the end of the second conveyor line 92. The inspection camera 93 is used to inspect the appearance and card points on the boat sheet, and the wind knife 94 cleans the dust on the surface of the boat sheet and the graphite boat residue on the carrier.

[0035] See also Figure 2 A boat cache mechanism 6 is provided in the graphite boat cache area 2, and the boat cache mechanism 6 is used to cache scrapped boats and good boats. Unqualified boats are put into the boat cache mechanism 6 for unloading, and good boats are taken away to replace the scrapped boats. The boat sheet buffer mechanism 6 is connected to the boat sheet temporary buffer mechanism 8, the boat sheet temporary buffer mechanism 8 is connected to the boat sheet carding machine, a gantry conveying mechanism 7 is arranged across the boat sheet temporary buffer mechanism 8 and the boat sheet buffer mechanism 6, the gantry conveying mechanism 7 goes back and forth through the boat sheet temporary buffer mechanism 8, the boat sheet buffer mechanism 6 and the graphite boat sheet transmission device 9, and is used for three-way boat conveying.

[0036] Working principle: The graphite boat is loaded to the loading and unloading turnover mechanism 10, the graphite boat rotating conveying mechanism 4 rotates the graphite boat of the loading and unloading turnover mechanism 10 by 90 degrees and then conveys it to the graphite boat disassembly assembly component 5 for disassembly of nuts, ceramic rings and electrode blocks, the graphite boat sheet conveying mechanism 11 sequentially adsorbs the boat sheets and puts them into the graphite boat sheet transmission device 9 and conveys them to the boat sheet temporary buffer mechanism 8, and then after the card point machine detection and card point replacement, it is sent back to the graphite boat disassembly assembly component 5 for assembly, and the assembled graphite boat is then sent to the loading and unloading turnover mechanism 10 for unloading; During this process, scrapped boat pieces, nuts and ceramic rings are automatically replaced; The whole process is highly automated, and two groups of graphite boat disassembly and assembly components 5 work alternately, and disassembly and assembly are completed in one piece, which greatly improves the efficiency of graphite boat piece calibration and replacement of accessories, has a compact structure, and occupies a small area.

[0037] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0038] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A graphite boat disassembly and assembly device, comprising: A graphite boat disassembly and assembly machine body (1), a graphite boat sheet buffer area (2) and a graphite boat card point loading and unloading machine (3), wherein the graphite boat disassembly and assembly machine body (1) is connected to the graphite boat sheet buffer area (2), and the graphite boat sheet buffer area (2) is connected to the graphite boat card point loading and unloading machine (3); The invention is characterized in that: a graphite boat rotating and transporting mechanism (4), two graphite boat disassembly and assembly components (5), a graphite boat sheet transmission device (9), a loading and unloading turnover mechanism (10) and a graphite boat sheet transmission mechanism (11) are arranged in the main body (1) of the graphite boat disassembly and assembly machine; the two graphite boat disassembly and assembly components (5) are located on both sides of the graphite boat sheet transmission device (9); a graphite boat sheet transmission mechanism (11) is arranged above the two graphite boat disassembly and assembly components (5) and the graphite boat sheet transmission device (9); a graphite boat rotating and transporting mechanism (4) is arranged above the loading and unloading turnover mechanism (10) and the graphite boat sheet transmission mechanism (11); and the loading and unloading turnover mechanism (10) buffers the graphite boat; The graphite boat disassembly assembly component (5) comprises a disassembly assembly mechanism (51), a first placement platform (52), a disassembly assembly platform (53) and a second placement platform (54), wherein the second placement platform (54) is located on both sides of the graphite boat sheet transmission device (9), and the disassembly assembly platform (53) and the first placement platform (52) are sequentially arranged in a direction away from the graphite boat sheet transmission device (9) on the second placement platform (54), and the disassembly assembly platform (53) and the first placement platform (52) are arranged above the disassembly assembly platform (53) and the first placement platform (52); The two ends of the disassembly and assembly platform (53) are provided with a good product placement platform (531), an electrode block buffer column (532) and a scrapped product recovery box (533); the electrode block buffer column (532) is connected to an electrode block taking and placing mechanism (534); A lifting and positioning mechanism (55) is installed below the disassembly and assembly platform (53). The lifting and positioning mechanism (55) comprises a fixed platform plate (551). The fixed platform plate (551) is fixedly installed on the outer frames on both sides. A lifting platform plate (552) is arranged above the fixed platform plate (551). Two linkage rods (559) are slidably arranged on the lifting platform plate (552). Two third lifting drive mechanisms (555) are arranged between the fixed platform plate (551) and the lifting platform plate (552). The third lifting drive mechanisms (555) drive the lifting platform plate (552) to rise and fall. Two sets of horizontal push rods are respectively arranged below the two ends of the lifting platform plate (552). A moving cylinder (556), a telescopic end of the horizontally pushing cylinder (556) is fixedly connected to a connecting arm (558), the other end of the connecting arm (558) is fixedly connected to a linkage rod (559), a plurality of driving connecting rods (553) are installed on the linkage rod (559), a clamping seat (554) is installed at the end of the driving connecting rod (553), the clamping seat (554) is staggered and clamped, a graphite boat sheet series rod is clamped in the clamping seat (554), a plurality of pairs of nut positioning columns (557) are fixedly installed on the fixed platform plate (551), the nut positioning columns (557) movably penetrate the disassembly platform (53) and the clamping seat (554) and then are plugged into the bottom of the fixed graphite boat sheet series rod; A boat cache mechanism (6) is arranged in the graphite boat cache area (2), and the boat cache mechanism (6) caches scrapped boats and good boats.

2. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: The graphite boat rotating transport mechanism (4) comprises two sets of symmetrical first slide rails (41) and a first conveying device (42); a transport machine body (44) is slidably arranged on the first slide rails (41); the transport machine body (44) is fixedly connected to the first conveying device (42); the first conveying device (42) drives the transport machine body (44) to move along the first slide rails (41) and pass over the graphite boat disassembly and assembly assembly (5) and the loading and unloading turnover mechanism (10).

3. The graphite boat disassembly and assembly equipment according to claim 2, characterized in that: The conveyor body (44) comprises a mobile platform seat (441), the two ends of the mobile platform seat (441) are slidably connected to the first slide rail (41), the two ends of the mobile platform seat (441) are fixedly connected to the first conveying device (42), two first lifting drive mechanisms (442) are arranged on the mobile platform seat (441), the lower ends of the first lifting drive mechanisms (442) are connected to the clamping claw hoisting seat (443), the two ends of the clamping claw hoisting seat (443) are installed with clamping claw assemblies (444), the clamping claw assembly (444) is automatically slidably connected to the clamping claw hoisting seat (443), and the clamping claw assembly (444) is provided with a motor assembly for driving the clamping claw to flip.

4. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: The graphite boat transport mechanism (11) comprises two sets of symmetrical second slide rails (111) and a second conveying device (112); two movable beams (113) are slidably arranged on the second slide rails (111); both ends of the movable beams (113) are fixedly connected to the second conveying device (112); and a graphite boat adsorption transport mechanism (114) is centrally mounted on the movable beams (113).

5. The graphite boat disassembly and assembly equipment according to claim 4, characterized in that: The graphite boat sheet adsorption and transport mechanism (114) comprises a fixed seat (1141), the fixed seat (1141) is fixedly mounted on the movable crossbeam (113), the fixed seat (1141) is slidably connected to an automatic lifting seat (1142), the automatic lifting seat (1142) is hoisted on a cross frame (1143), a plurality of vacuum suction nozzles (1144) and positioning pins (1145) and a ceramic ring clamping mechanism (1146) are provided on the cross frame (1143), the vacuum suction nozzle (1144) adsorbs the boat sheet, and downward pressing pin assemblies (1147) are installed at both ends of the fixed seat (1141).

6. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: The disassembly and assembly mechanism (51) comprises a bracket (511), the bracket (511) is fixedly arranged, a Y-axis moving assembly (512) is arranged on the bracket (511), two groups of X-axis moving assemblies (513) are arranged on the Y-axis moving assembly (512), and a Z-axis disassembly and assembly robot (514) is arranged on the X-axis moving assembly (513); The Z-axis disassembly and assembly robot (514) comprises a Z-axis moving seat (5143), and a nut disassembly and assembly machine (5141) and a visual inspection machine (5142) are installed in the Z-axis moving seat (5143); The Z-axis moving seat (5143) is an automatic Z-axis moving module, driving the nut disassembly and assembly machine (5141) and the visual inspection machine (5142) to rise and fall; The lower end of the Z-axis movable seat (5143) is also provided with an opening and closing clamping claw (5145) driven by a clamping cylinder (5144).

7. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: The lower surfaces of both ends of the disassembly and assembly platform (53) are provided with end positioning mechanisms (56), the end positioning mechanisms (56) comprising a fourth lifting drive mechanism (561), the fourth lifting drive mechanism (561) driving the lifting connection to the lifting seat (563), the lifting seat (563) being provided with a supporting clamping claw (562), a lifting cylinder (564) and a supporting positioning column (565), the lifting cylinder (564) driving the lifting connection to the supporting clamping claw (562).

8. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: The first placement platform (52) comprises a fixed fixing plate (521), the fixed plate (521) is centrally fixedly connected to a second lifting drive mechanism (522), a telescopic end of the second lifting drive mechanism (522) is fixedly connected to a lifting flat plate (523), and a plurality of guide columns (524) are provided between the fixed plate (521) and the lifting flat plate (523); A plurality of ceramic ring cache columns (525) are installed on the upper surface of the fixed plate (521). The ceramic ring cache columns (525) movably penetrate the lifting plate (523). The ceramic ring cache columns (525) cache the removed ceramic rings. The removed graphite boat accessories are placed on the upper surface of the lifting plate (523).

9. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: A plurality of bottom positioning cylinders (57) are installed below the disassembly and assembly platform (53), and the bottom positioning cylinders (57) drive the positioning plates.

10. The graphite boat disassembly and assembly equipment according to claim 1, characterized in that: The graphite boat sheet transmission device (9) comprises a first section conveying line (91) and a second section conveying line (92), the first section conveying line (91) and the second section conveying line (92) are butted against each other, a boat sheet carrier positioning mechanism is arranged in the first section conveying line (91), and a detection camera (93) and a wind knife (94) are arranged at the end of the second section conveying line (92).

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