Coupling body of roller holder, cross roller guide, and table device

Abstract

The invention provides a connecting body of a roller holder, a cross roller guide and a workbench device, wherein the connecting body enables a roller and a guide rail to be in proper contact. The roller holder connecting body according to the present embodiment is a connecting body formed by connecting a plurality of roller holders each housing a roller. Each roller holder includes: a base portion; the first block is arranged at one end of the base part; the first block is arranged at one end of the base part, the second block is arranged at the other end of the base part, a roller is accommodated in a roller accommodating part between the first block and the second block, and connecting parts are respectively arranged on the end surface of the outer side of the first block and the end surface of the outer side of the second block. The connecting portions of the plurality of roller holders are connected to each other such that the rollers accommodated in the roller accommodating portions of the plurality of roller holders rotate around different axes including rotation around the connecting axes.

Description

[0001] Related Applications

[0002] This application claims priority based on Japanese Patent Application No. 2023-099407 (filing date: June 16, 2023). This application incorporates the entire contents of the basic application by reference. Technical Field

[0003] The present invention relates to a roller retainer coupling body, a cross roller guide and a table device. Background Art

[0004] The charged particle beam drawing device draws a predetermined pattern on the mask while adjusting the position of the mask by a stage device. The linear motion stage used as the stage device has a guide rail, a plurality of rollers, and a long plate-shaped holder (roller gauge) for holding the plurality of rollers, and a lubricant is used for the purpose of reducing wear of each part.

[0005] When the viscosity of the lubricant is high, micro vibration occurs when the roller jumps onto the lubricant, the table position measurement accuracy decreases, and the drawing accuracy deteriorates. Therefore, the lubricant used in the table device is preferably a low-viscosity lubricant such as vacuum oil.

[0006] However, it is difficult for vacuum oil (low-viscosity lubricant) to stay between the guide rail and the roller for a long time, and there is a tendency for the oil supply frequency to increase. In order to reduce the oil supply frequency, it is known to provide a recess (pocket) for oil retention on the roller gauge, but in order to provide the oil retention recess, the cross-sectional area (thickness) of the roller gauge becomes larger and the rigidity becomes higher. In the case of a high rigidity of the roller gauge, it is prevented that the guide rail and the roller are properly in contact, an undesirable gap is generated between the guide rail and the roller, and the posture stability of the worktable and the rigidity of the worktable itself are affected. Summary of the invention

[0007] The present invention provides a roller holder coupling body, a cross roller guide, and a table device capable of appropriately bringing a roller into contact with a guide rail.

[0008] A roller retainer connection body according to one embodiment of the present invention is a connection body formed by connecting multiple roller retainers that respectively store rollers, each roller retainer comprising: a base portion; a first block, which is arranged at one end of the base portion; and a second block, which is arranged at the other end of the base portion, wherein the rollers are stored in the roller storing portion between the first block and the second block, and connecting portions are respectively arranged on the outer end surface of the first block and the outer end surface of the second block, and the connecting portions of the multiple roller retainers are connected to each other so that the rollers stored in the roller storing portions of the multiple roller retainers rotate about different axes including rotation around the connecting axis.

[0009] A cross roller guide according to one aspect of the present invention includes: a pair of guide rails arranged in parallel and having V-grooves formed on opposing surfaces thereof; and a coupling body of the roller retainer arranged between the guide rails.

[0010] A table device according to one aspect of the present invention includes: the cross roller guide; a fixed plate connected to one of the pair of guide rails; and a table connected to the other of the pair of guide rails so as to be horizontally movable. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a schematic configuration diagram of a charged particle beam imaging device having a stage device according to an embodiment of the present invention.

[0012] Figure 2 It is a perspective view showing an example of the structure of the table device.

[0013] Figure 3 This is a schematic diagram of the workbench device.

[0014] Figure 4 It is a perspective view of the roller retainer.

[0015] Figure 5 yes Figure 4 A-direction view.

[0016] Figure 6 It is a perspective view of the roller holder which accommodates the roller.

[0017] Figure 7 It is a figure which shows the state after the roller retainer is connected.

[0018] Figure 8 It is a diagram for explaining the rotation of the roller holder.

[0019] Fig. 9 is a cross-sectional view of a cross roller guide.

[0020] Fig. 10A is a perspective view of a roller retainer according to another embodiment. Fig. 10B It is a three-dimensional diagram of the connecting parts.

[0021] Fig.11 It is a diagram for explaining a method of connecting the roller cage. DETAILED DESCRIPTION

[0022] Figure 1 It is a schematic diagram showing an example of the structure of the charged particle beam imaging device including the stage device 3 according to the embodiment of the present invention. Figure 1The charged particle beam drawing device shown, for example, irradiates an electron beam to a processing object (mask W) to draw a predetermined pattern. In addition, in addition to the drawing device, this embodiment may also be a device that irradiates an electron beam (charged particle beam) or light to the processing object, such as an exposure device, an electron microscope, and an optical microscope. Therefore, the processing object may be a semiconductor substrate, etc., in addition to the mask.

[0023] like Figure 1 As shown, the charged particle beam drawing apparatus includes a chamber 1, an electron source 2, a stage device 3, and a laser length measuring unit 4. The interior of the chamber 1 is evacuated to accommodate the stage device 3. The electron source 2 is provided at the top of the chamber 1 to irradiate the mask W with an electron beam. The stage device 3 is supported by a plurality of spacers 6.

[0024] The stage device 3 includes an XY stage 31 , a Z stage 32 , and a top stage 33 , and adjusts the position of the mask W placed on the top stage 33 .

[0025] like Figure 2 As shown, the XY table 31 has a cross roller guide G extending in the X-axis and Y-axis directions, so that the Z table 32 and the top table 33 can be moved in the X-axis direction and the Y-axis direction. Specifically, the Z table 32 and the top table 33 can be moved in the X-axis direction by the cross roller guide G1. In addition, the Z table 32 and the top table 33 can be moved in the Y-axis direction by the cross roller guide G2.

[0026] The Z stage 32 can move the top stage 33 in the Z-axis direction. Thus, the top stage 33 can be moved in the three-axis directions of X, Y, and Z, and the mask W can be arranged at a desired position.

[0027] Laser length measuring unit 4 (refer to Figure 1 ) measures the position of the top stage 33. The position of the top stage 33 is feedback-controlled based on the measurement result of the laser length measuring unit 4. While the position of the top stage 33 is controlled, the mask W is irradiated with an electron beam to draw a pattern.

[0028] Figure 3 is from Figure 2 The figure is viewed in the Y direction. Figure 3 The Z stage 32 is omitted. The cross roller guide G (G2) includes guide rails 41, 42, a plurality of rollers R disposed between the guide rails 41 and 42, and a roller retainer 10 for retaining the rollers R (see Figures 4 to 6 At least two rail groups consisting of guide rails 41 and 42 are provided. The guide rails 41 and 42 are prism-shaped, arranged in parallel, and V-grooves are formed on the opposing surfaces.

[0029] The guide rail 41 is connected to the lower part (fixed plate) of the XY table 31. The guide rail 42 is connected to the upper part (horizontally movable table) of the XY table 31. The upper part of the XY table 31 and the guide rail 42 move in the Y-axis direction by rolling on the rollers R. The lower part of the XY table 31 and the guide rail 41 do not move.

[0030] like Figure 4 , Figure 5 As shown in FIG. 1 , the roller retainer 10 includes a plate-shaped base portion 11 that is rectangular in plan view, and a first block 12 and a second block 13 provided at both ends of the base portion 11 in the longitudinal direction. The area surrounded by the first block 12, the second block 13, and the central portion of the base portion 11 is a roller storage portion S. Hereinafter, the long side direction of the base portion 11 and the short side direction of the base portion 11 are respectively described as "long side direction" and "short side direction".

[0031] A flanged protrusion 16 (connecting portion) is provided on the longitudinal outer end surface 12a of the first block 12. A recess 14a for holding lubricant is formed on the lateral outer side of the first block 12. One end of the recess 14a is connected to the roller housing S.

[0032] The side surface 12b on the inner side in the longitudinal direction of the first block 12 faces the roller housing portion S and is curved according to the outer shape of the roller R. A groove 18a for retaining a lubricant is formed on the side surface 12b (inner peripheral surface). The groove 18a is parallel to the main surface of the base portion 11 . Figure 5 Although an example in which two grooves 18 a are formed is shown, the number of grooves 18 a may be one or three or more.

[0033] A stopper 19 (see FIG. 1 ) for mounting the stopper 19 described later is formed on the upper surface 12c of the first block 12. Figure 6 ) of the concave portion 15a.

[0034] A dovetail-shaped (roughly T-shaped in cross section) engagement groove 17 (connection portion) is formed on the end surface 13a on the outside in the longitudinal direction of the second block 13 in a direction perpendicular to the rotation axis of the roller R. A recessed portion 14b for retaining lubricant is formed on the side surface on the outside in the short-side direction of the second block 13. One end of the recessed portion 14b is connected to the roller housing portion S.

[0035] The side surface 13b on the inner side in the longitudinal direction of the second block 13 faces the roller housing portion S and is curved according to the outer shape of the roller R. A groove 18b for retaining a lubricant is formed on the side surface 13b. The groove 18b is parallel to the main surface of the base portion 11 (the surface orthogonal to the rotation axis of the roller R). Figure 4 Although an example in which two grooves 18 b are formed is shown, the number of grooves 18 b may be one or three or more.

[0036] A recessed portion 15 b is formed on the upper surface 13 c of the second block 13 .

[0037] like Figure 6 As shown, a substantially cylindrical roller R is disposed in the roller housing portion S. The width of the base portion 11 in the short-side direction is smaller than the diameter of the roller R, and the side circumference of the roller R protrudes outward from the side surfaces of the first block 12 and the second block 13 .

[0038] The rod-shaped stopper 19 is arranged so as to straddle the first block 12 and the second block 13. One end of the stopper 19 is inserted into the recess 15a, and the stopper 19 is fastened to the first block 12 using a fastening member such as a bolt (not shown). The other end of the stopper 19 is inserted into the recess 15b, and the stopper 19 is fastened to the second block 13 using a fastening member such as a bolt (not shown). Thus, the roller holder 10 can hold the roller R. The roller R held by the roller holder 10 can rotate (rotate).

[0039] When bolts are used as the fastening means of the stopper 19, bolt insertion holes (not shown) penetrating from the recessed portions 15a and 15b to the lower surface of the base portion 11 are formed in the first block 12 and the second block 13, respectively. The ends of the stopper 19 are fixed to the first block 12 and the second block 13 by bolts inserted through the bolt insertion holes.

[0040] The materials of the roller retainer 10 and the stopper 19 can be resins such as PEEK (PEEK). For example, the roller retainer 10 can be manufactured by processing a concave portion corresponding to the roller housing portion S, a groove for retaining a lubricant, etc. on a rectangular parallelepiped resin. The material of the roller R can be a superhard alloy, etc.

[0041] The size of the roller holder 10 may be appropriately determined according to the size of the roller R to be used. For example, the base portion 11 has a length of about 18 mm in the longitudinal direction, a length of about 8 mm in the lateral direction, and a thickness of about 1 mm.

[0042] A plurality of roller retainers 10 holding rollers R are prepared. The protrusion 16 of one roller retainer 10 is engaged with the engagement groove 17 of another roller retainer 10 to connect the roller retainers 10 to each other. By repeating this operation, a roller retainer 10 is obtained. Figure 7 The coupled body 100 of the roller retainer 10 is shown.

[0043] The coupling body 100 of the roller retainer 10 is arranged between the V-groove of the guide rail 41 and the V-groove of the guide rail 42. The side circumference of the roller R contacts the upper inclined surface of the V-groove of the guide rail 41 and the lower inclined surface of the V-groove of the guide rail 42. Alternatively, the side circumference of the roller R contacts the lower inclined surface of the V-groove of the guide rail 41 and the upper inclined surface of the V-groove of the guide rail 42 (see Fig. 9 ).

[0044] Figure 7An example is shown in which rollers R that contact the upper inclined surface of the V-groove of guide rail 41 and the lower inclined surface of the V-groove of guide rail 42 and rollers R that contact the lower inclined surface of the V-groove of guide rail 41 and the upper inclined surface of the V-groove of guide rail 42 are alternately arranged, but the arrangement method of rollers R is not limited to this.

[0045] The guide rail 42 moves along the moving axis direction by applying a force in the moving axis direction to the upper portion of the XY stage 31. At this time, the roller R rotates and the guide rail 42 is transported.

[0046] In this embodiment, the roller retainers 10 are connected to each other in a row by engaging the protrusions 16 with the engagement grooves 17. Figure 8 As shown in FIG. 1 , the roller retainers 10 can be independently rotated around the travel axis TA (axis in the connecting direction). Fig. 9 As shown, the roller retainer 10 can move (translate) in the radial load direction LD1. Therefore, the rollers R housed in each roller retainer 10 can rotate (rotate) about different axes. In addition, in order to avoid unintended wear caused by the contact between the roller retainer 10 and the guide rail, the roller retainer 10 cannot move (translate) in the rotation axis direction LD2 of the roller R.

[0047] The V-groove surface of the guide rail 41 undergoes slight angle and straightness changes due to deformation of the rail material during processing, the accuracy of the tool or the processing device, etc. Even in the case of such angle and straightness changes, the roller holder 10 rotates around the travel axis in a manner that follows the angle of the V-groove surface of the guide rail 41, thereby absorbing the angle difference between the roller R and the V-groove surface, maintaining good contact between the roller R and the V-groove surface, and eliminating the risk of the table stopping / vibrating by improving the posture stability of the table and stabilizing the rigidity of the table itself.

[0048] Furthermore, even when the hole processing position of the roller housing portion S deviates from the designed position, appropriate contact between the roller R and the V-groove surface can be achieved by translating the roller holder 10 in the radial load direction.

[0049] In addition, the roller retainer 10 has a thick structure including the first block 12 and the second block 13, and can easily form areas for retaining sufficient lubricant, such as the recessed portions 14a, 14b and the grooves 18a, 18b. Therefore, even when a low-viscosity lubricant such as vacuum oil is used, the frequency of oil supply can be reduced, thereby reducing maintenance costs.

[0050] Preferably, one roller R is housed in one roller holder 10 , but two or more rollers R may be housed. For example, a roller holder that houses a plurality of rollers can be manufactured by processing a plurality of recessed portions corresponding to the roller housing portions in a rectangular parallelepiped resin.

[0051] In the above embodiment, the roller cages 10 are connected to each other by engaging the protrusion 16 of one roller cage 10 with the engagement groove 17 of another roller cage 10 . However, the connection structure of the roller cages 10 is not limited to this.

[0052] For example, you can also use Fig. 10A As shown in the figure, the protrusion 16 is omitted, and the engaging grooves 17 (connecting portions) are formed on the outer end surfaces of the first block 12 and the second block 13 in the longitudinal direction, respectively, and the roller retainer 10A is used. Fig. 10B The connecting member 50 as shown connects the roller holder 10A.

[0053] The connecting member 50 includes a cylindrical shaft portion 51 and flange portions 52 provided at both ends of the shaft portion 51 .

[0054] like Fig.11 As shown, one flange 52 of the connecting member 50 is engaged with the engagement groove 17 of one roller retainer 10A. Then, the other flange 52 of the connecting member 50 is engaged with the engagement groove 17 of the other roller retainer 10A. In this way, the roller retainers 10A can be connected to each other.

[0055] In addition, the present invention is not limited to the above-mentioned embodiments. In the implementation stage, the constituent elements can be deformed and embodied within the scope of the main purpose. In addition, various inventions can be formed by appropriate combinations of multiple constituent elements disclosed in the above-mentioned embodiments. For example, several constituent elements can also be deleted from all the constituent elements shown in the embodiments. Furthermore, the constituent elements of different embodiments can also be appropriately combined.

[0056] [Explanation of Reference Numerals]

[0057] 1 Chamber

[0058] 2 Electron source

[0059] 3 working table device

[0060] 4 Laser length measurement unit

[0061] 6 Spacers

[0062] 10, 10A Roller Retainer

[0063] 11. Base

[0064] 12 First Block

[0065] 13 The second piece

[0066] 16 protrusion (connecting part)

[0067] 17 engagement groove (connection portion)

[0068] 19 Blocking piece

[0069] 31 XY table

[0070] 32 Z workbench

[0071] 33 Top workbench

[0072] 41, 42 guide rails

[0073] 100 roller cage connection body

[0074] G, G1, G2 cross roller guides

[0075] R Roller

[0076] S Roller Storage Section

Claims

1. A roller retainer connection body, which is formed by connecting a plurality of roller retainers each accommodating a roller, Each roller holder has: Base part; A first block is disposed at one end of the base portion; and The second block is arranged at the other end of the base portion, The roller is stored in the roller storage portion between the first block and the second block. A connecting portion is provided on the outer end surface of the first block and the outer end surface of the second block, respectively. The coupling portions of the plurality of roller holders are coupled to one another so that the rollers housed in the roller housing portions of the plurality of roller holders rotate about different axes including rotation about a coupling axis.

2. The roller retainer coupling body according to claim 1, wherein: The connecting portion provided on the outer end surface of the first block is a protrusion, The connecting portion provided on the outer end surface of the second block is a snap-fit ​​groove. The engagement groove is formed in a direction orthogonal to the rotation axis of the roller. The protrusions of the plurality of roller retainers are connected to the engagement grooves.

3. The roller retainer coupling body according to claim 1, wherein: Concave portions for retaining lubricant are formed on side surfaces of the first block and the second block.

4. The roller retainer coupling body according to claim 2, wherein: Concave portions for retaining lubricant are formed on side surfaces of the first block and the second block.

5. The roller retainer coupling body according to claim 1, wherein: The plurality of roller holders are respectively movable in the direction of a radial load to which they are subjected by traveling through one of the pair of guide rails.

6. The roller retainer coupling body according to claim 2, wherein: The plurality of roller holders are respectively movable in the direction of a radial load to which they are subjected by traveling through one of the pair of guide rails.

7. A cross roller guide, comprising: a pair of guide rails arranged in parallel and having V-grooves formed on opposing surfaces; and The roller retainer connection body according to claim 1 is arranged between the guide rails.

8. A workbench device, comprising: The cross roller guide according to claim 7; a fixing plate connected to one of the pair of guide rails; and The workbench is connected to the other of the pair of guide rails and is capable of horizontal movement.

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