Radiation structure clamping device and microwave applying method

Abstract

The invention relates to the field of precision measurement, in particular to a radiation structure clamping device and a microwave applying method. The radiation structure is clamped between the first connecting part and the second connecting part in the radiation structure clamping device, the displacement table moves to drive the radiation structure between the first connecting part and the second connecting part to move, and the position of the radiation structure is adjusted, so that the radiation structure has the property of being located at any position of the surface of the to-be-detected sample; the test requirements of multiple times and different measurement positions are met, and the measurement of different to-be-measured positions of the to-be-measured sample is realized; the radiation structure is cooled through the first refrigeration part and the second refrigeration part, and the temperature of the radiation structure is stabilized within a certain range, so that the temperature of the radiation structure is controllable, and the temperature drift phenomenon caused by heating of the to-be-tested sample due to temperature increase of the radiation structure is avoided, namely the phenomenon that the to-be-tested sample is heated to expand is avoided. And the color center position disappears from the test visual field, so that the test fails.

Description

Technical Field

[0001] The invention relates to the field of precision measurement, and in particular to a radiation structure clamping device and a microwave application method. Background Art

[0002] In the light detection magnetic resonance technology for quantum measurement, the radiation structure can generate microwave fields to regulate the spin distribution of color centers and is an important component of the light detection magnetic resonance device.

[0003] Since microwave efficiency is inversely proportional to the cube of the distance, during the test process, the radiation structure needs to be as close to the surface of the sample to be tested as possible to better control the color center. The commonly used method at present is to weld copper wire on the surface of the sample to be tested as a radiation structure. However, after welding the copper wire, the relative position of the copper wire and the sample to be tested is fixed, and only the position of the area near the welded copper wire can be tested. If other positions need to be tested, the copper wire needs to be re-welded at the new measurement position. Therefore, the existing method of welding copper wire cannot meet the needs of multiple rapid tests at different measurement positions; and as the microwave power increases, the heat generated by the copper wire will continue to increase, causing the temperature of the sample to be tested to increase with the heating of the copper wire. After the sample to be tested expands due to heat, the color center position changes, causing the color center position to disappear from the test field of view, and the microscope cannot collect the corresponding light signal, resulting in test failure and affecting the test results. Summary of the invention

[0004] In order to solve the above technical problems, the present invention provides a radiation structure clamping device and a microwave application method.

[0005] To achieve the above object, the present invention provides a radiant structure clamping device, comprising: A translation stage, a first radio frequency arm and a second radio frequency arm, wherein the first radio frequency arm and the second radio frequency arm are fixed to a surface of the translation stage and arranged opposite to each other, and the first radio frequency arm and the second radio frequency arm move with the translation stage; The first RF arm includes a first bracket, a first fixing portion, a first cooling portion, and a first connecting portion; the first fixing portion is disposed on the first bracket and close to one end of the first bracket, and the first fixing portion is used to fix the first RF arm to the surface of the translation stage; the first connecting portion and the first cooling portion are disposed at the other end of the first bracket, the first connecting portion and the first cooling portion are located on opposite sides of the first bracket, and the first cooling portion is connected to one end of the first connecting portion; The second RF arm includes a second bracket, a second fixing portion, a second cooling portion, and a second connecting portion; the second fixing portion is disposed on the second bracket and close to one end of the second bracket, and the second fixing portion is used to fix the second RF arm to the surface of the translation stage; the second connecting portion and the second cooling portion are disposed at the other end of the second bracket, the second connecting portion and the second cooling portion are located on opposite sides of the second bracket, and the second connecting portion is connected to one end of the second cooling portion; Among them, the other end of the first connecting part and the other end of the second connecting part are arranged opposite to each other, and a radiation structure is clamped between the other end of the first connecting part and the other end of the second connecting part. The movement of the displacement platform drives the radiation structure between the first connecting part and the second connecting part to move, and the position of the radiation structure is adjusted. The radiation structure is cooled by the first refrigeration part and the second refrigeration part.

[0006] Optionally, the first refrigeration part includes: a first heat sink, a first refrigeration fin and a first heat conductive sheet; one side of the first heat conductive sheet is arranged at the other end of the first bracket, and the other side of the first heat conductive sheet is sequentially provided with the first refrigeration fin and the first heat sink, and one side of the first heat conductive sheet is connected to one end of the first connecting part; the second refrigeration part includes: a second heat sink, a second refrigeration fin and a second heat conductive sheet; one side of the second heat conductive sheet is arranged at the other end of the second bracket, and the other side of the second heat conductive sheet is sequentially provided with the second refrigeration fin and the second heat sink, and one side of the second heat conductive sheet is connected to one end of the second connecting part.

[0007] Optionally, the first heat conducting plate and the second heat conducting plate are polycrystalline diamond plates; the first cooling plate and the second cooling plate are semiconductor cooling plates; the material of the first heat sink and the second heat sink is one of aluminum and copper.

[0008] Optionally, the first connecting part includes a first nut and a first connecting rod, one end of the first connecting rod is provided with an external thread, the first nut is provided with an internal thread matching the first connecting rod, the head end of the first nut is provided with a small hole for the radiation structure to pass through, and the other end of the first connecting rod is connected to the first refrigeration part; the second connecting part includes a second nut and a second connecting rod, one end of the second connecting rod is provided with an external thread, the second nut is provided with an internal thread matching the second connecting rod, the head end of the second nut is provided with a small hole for the radiation structure to pass through, and the other end of the second connecting rod is connected to the second refrigeration part.

[0009] Optionally, the first connection portion and the second connection portion are both downwardly inclined at a certain angle relative to each other, so that the distance between one end of the first connection portion and one end of the second connection portion is greater than the distance between the other end of the first connection portion and the other end of the second connection portion, and the first connection portion and the second connection portion are in the same vertical plane.

[0010] Optionally, the first fixing portion includes a first adjusting screw and a first fixing member matching the first adjusting screw, and the first bracket is fixed to the surface of the translation platform through the first adjusting screw and the first fixing member; the second fixing portion includes a second adjusting screw and a second fixing member matching the second adjusting screw, and the second bracket is fixed to the surface of the translation platform through the second adjusting screw and the second fixing member.

[0011] Optionally, by cooperating between the first adjusting screw and the first fixing member, and between the second adjusting screw and the second fixing member, the positions of the first RF arm and the second RF arm on the surface of the translation platform are respectively adjusted, thereby adjusting the tension of the radiation structure.

[0012] Optionally, the radiation structure is a copper wire.

[0013] Optionally, the temperature range of the radiation structure when operating is 20 degrees Celsius to 30 degrees Celsius.

[0014] The present invention also provides a microwave application method, comprising: Provide a radiant structure clamping device as described above; Installing the radiation structure between the first connection part and the second connection part of the radiation structure clamping device; Providing a microwave signal to the radiation structure, so that the heat generated by the radiation structure is transferred to the first refrigeration part and the second refrigeration part through the first connection part and the second connection part, and the radiation structure is cooled by the first refrigeration part and the second refrigeration part until the temperature of the radiation structure is stable; Providing a sample to be tested, and placing the sample to be tested on a sample stage; The positions of the sample stage and the displacement stage of the radiation structure clamping device are adjusted so that the first position to be tested on the surface of the sample to be tested and the radiation structure are close to each other for testing, and this step is repeated until all the positions to be tested are tested.

[0015] In summary, the advantages and beneficial effects of the present invention are: The present invention provides a radiation structure clamping device and a microwave application method. The radiation structure clamping device comprises: a first radio frequency arm and a second radio frequency arm, the first radio frequency arm and the second radio frequency arm are fixed to the surface of the displacement platform and arranged opposite to each other, and the first radio frequency arm and the second radio frequency arm move with the displacement platform; the first radio frequency arm comprises a first bracket, a first fixing part, a first cooling part, and a first connecting part, and the second radio frequency arm comprises a second bracket, a second fixing part, a second cooling part, and a second connecting part.

[0016] A radiation structure is clamped between the first connection part and the second connection part. The movement of the displacement stage drives the overall movement of the radiation structure between the first connection part and the second connection part, thereby adjusting the position of the radiation structure, so that the radiation structure has the property of being located at any position on the surface of the sample to be tested, meets the needs of rapid testing of multiple and different measurement positions, and realizes the measurement of different positions of the sample to be tested; the radiation structure is cooled by the first refrigeration part and the second refrigeration part and the temperature of the radiation structure is stabilized within a certain range, so that the temperature of the radiation structure is controllable, and it is avoided that the temperature of the radiation structure continues to increase, causing the sample to be tested to expand due to heat, causing the color center position to change, disappearing from the test field of view, and the microscope cannot collect the corresponding light signal, resulting in test failure. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a radiation structure clamping device according to an embodiment of the present invention; Figure 2 It is a schematic structural diagram of a first radio frequency arm of a radiating structure clamping device according to an embodiment of the present invention; Figure 3 It is a schematic structural diagram of a second radio frequency arm of a radiating structure clamping device according to an embodiment of the present invention; Figure 4 It is a front view schematic diagram of a first radio frequency arm of a radiating structure clamping device according to an embodiment of the present invention; Figure 5 A right side schematic diagram of a first radio frequency arm of a radiating structure clamping device according to an embodiment of the present invention Figure 6 It is a cross-sectional schematic diagram of a connection portion of a first radio frequency arm of a radiating structure clamping device according to an embodiment of the present invention; Figure 7 The figure is a schematic flow chart of a microwave application method according to an embodiment of the present invention.

[0018] 1. displacement platform, 2. radiation structure, 10. first RF arm, 20. second RF arm, 31. first fixing part, 32. first cooling part, 33. first connecting part, 41. second fixing part, 42. second cooling part, 43. second connecting part, 301. first nut, 302 first connecting rod, 303. first heat conducting plate, 304. first cooling plate, 305. first heat sink, 306. first bracket, 307. first fixing part, 308. first RF line, 309. first adjusting screw, 401. second nut, 402 second connecting rod, 403. second heat conducting plate, 404. second cooling plate, 405. second heat sink, 406. second bracket, 407. second fixing part, 408. second RF line, 409. second adjusting screw. DETAILED DESCRIPTION

[0019] The color centers in materials such as diamond, silicon carbide or two-dimensional materials are subjected to optical detection magnetic resonance testing, and copper wire is used as a radiation structure to provide microwaves for the color centers. The existing radiation structure uses the operator's experience to determine the welding point and welds the copper wire to the surface of the sample to be tested. However, this method has limitations. On the one hand, after welding the copper wire, the copper wire cannot be moved, and the test position is relatively fixed. Only the area near the radiation structure can be tested. If the test position is incorrect and needs to be adjusted, it is necessary to use the operator's experience to find a new test position and weld the copper wire again. Each time the test position is determined by experience and welding is repeated, resulting in poor consistency and stability of the welding effect. In addition, when welding the copper wire, the copper wire needs to be tightened and pressed against the surface of the sample to be tested. The tension of the copper wire and its precise position on the surface of the sample to be tested are uncontrollable and affect the test effect. On the other hand, during the test, a microwave signal is provided to the copper wire, and the copper wire generates Joule heat under the action of microwaves. The temperature rises rapidly, and as the microwave signal power increases, the heat generated by the radiation structure will also increase, resulting in uncontrollable temperature rise of the copper wire. During the test, the copper wire needs to be as close to the sample to be tested as possible. The heat of the copper wire is transferred to the sample to be tested, causing the temperature of the sample to be tested to rise, causing the sample to be tested to expand due to heat, causing the color center (bright spot) observed under the microscope to move and disappear from the field of view, causing the temperature drift problem of the test point, which leads to the failure of micro positioning; and, because the diameter of the radiation structure is only a few hundred microns and the operating space is limited, it is difficult to directly provide a refrigeration unit for the radiation structure in the prior art, which makes it difficult for the radiation structure to maintain a stable temperature, affecting the test results. In order to solve the above problems, the present invention provides a radiation structure clamping device and a microwave application method.

[0020] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in combination with the specific implementation methods of the present invention and the corresponding drawings. Obviously, the described implementation methods are only part of the implementation methods of the present invention, not all implementation methods. Based on the implementation methods of the present invention, all other implementation methods obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0021] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0022] The present invention provides a radiation structure clamping device, such as Figure 1~Figure 5 As shown, including: A translation stage 1, a radiation structure 2, a first RF arm 10 and a second RF arm 20, wherein the first RF arm 10 and the second RF arm 20 are fixed to the surface of the translation stage 1 and arranged opposite to each other, the first RF arm 10 and the second RF arm 20 move with the translation stage 1, and the radiation structure 2 is fixed to one end of the first RF arm 10 and one end of the second RF arm 20; The first RF arm 10 includes a first bracket 306, a first fixing portion 31, a first cooling portion 32, and a first connecting portion 33; the first fixing portion 31 is disposed on the first bracket 306 and close to one end of the first bracket 306, and the first fixing portion 31 is used to fix the first RF arm 10 to the surface of the translation stage 1; one end of the first cooling portion 32 is disposed at the other end of the first bracket 306, and one end of the first connecting portion 33 is connected to the other end of the first cooling portion 32; The second RF arm 20 includes a second bracket 406, a second fixing portion 41, a second refrigeration portion 42, and a second connecting portion 43; the second fixing portion 41 is disposed on the second bracket 406 and close to one end of the first bracket 306, and the second fixing portion 41 is used to fix the second RF arm 20 to the surface of the translation stage 1; one end of the second refrigeration portion 42 is disposed at the other end of the second bracket 406, and one end of the second connecting portion 43 is connected to the other end of the second refrigeration portion 42; Among them, the other end of the first connection part 33 and the other end of the second connection part 43 are arranged opposite to each other, and a radiation structure 2 is clamped between the other end of the first connection part 33 and the other end of the second connection part 43. The movement of the displacement platform 1 drives the movement of the radiation structure 2 between the first connection part 33 and the second connection part 43 to adjust the position of the radiation structure 2. The radiation structure 2 is cooled by the first refrigeration part 32 and the second refrigeration part 42.

[0023] Specifically, in an embodiment of the present invention, the radiating structure 2 is a copper wire, which is clamped by the first connecting portion 33 of the first RF arm 10 and the second connecting portion 43 of the second RF arm 20 , so that the radiating structure 2 is fixed between the first RF arm 10 and the second RF arm 20 .

[0024] In the embodiment of the present invention, the first refrigeration part 32 includes: a first heat sink 305, a first refrigeration fin 304 and a first heat conductive sheet 303; one side of the first heat conductive sheet 303 is arranged at the other end of the first bracket 306, and the other side of the first heat conductive sheet 303 is sequentially provided with the first refrigeration fin 304 and the first heat sink 305, and one side of the first heat conductive sheet 303 is connected to one end of the first connecting part 33; the second refrigeration part 42 includes: a second heat sink 405, a second refrigeration fin 404 and a second heat conductive sheet 403; one side of the second heat conductive sheet 403 is arranged at the other end of the second bracket 406, and the other side of the second heat conductive sheet 403 is sequentially provided with the second refrigeration fin 404 and the second heat sink 405, and one side of the second heat conductive sheet 403 is connected to one end of the second connecting part 43.

[0025] In other embodiments, the first connection part and the first refrigeration part are both arranged at the other end of the first bracket, the first connection part and the first refrigeration part stand on opposite sides of the first bracket, and the first connection part is connected to the first refrigeration part through the first bracket; the second connection part and the second refrigeration part are both arranged at the other end of the second bracket, the second connection part and the second refrigeration part stand on opposite sides of the second bracket, and the second connection part is connected to the second refrigeration part through the second bracket.

[0026] In the embodiment of the present invention, the first refrigeration part 32 and the second refrigeration part 42 are connected to an external temperature controller so that the refrigeration temperature of the first refrigeration part 32 and the second refrigeration part 42 is stably maintained at a set temperature value, so that the temperature of the radiation structure 2 is stable at the set temperature value when working.

[0027] In the embodiment of the present invention, the first cooling fin 304 and the second cooling fin 404 are electric cooling fins, the cooling side of the first cooling fin 304 is connected to one end of the first connecting portion 33, and the heating side of the first cooling fin 304 is connected to one side of the first heat sink 305; the cooling side of the second cooling fin 404 is connected to one end of the second connecting portion 43, and the heating side of the second cooling fin 404 is connected to one side of the second heat sink 405.

[0028] In the embodiment of the present invention, the other side of the first heat sink 305 and the other side of the second heat sink 405 are both heat dissipation structures with a plurality of fins arranged in parallel, so as to facilitate heat dissipation for the cooling fins.

[0029] In the embodiment of the present invention, the first refrigeration unit 32 and the first bracket 306, and the second refrigeration unit 42 and the second bracket 406 are fixed by matching threads and screws.

[0030] In other embodiments, the first refrigeration unit and the second refrigeration unit are respectively adhered to the first bracket and the second bracket.

[0031] In an embodiment of the present invention, the first heat conductive sheet 303 and the second heat conductive sheet 403 are polycrystalline diamond sheets or other suitable heat conductive materials; the first cooling sheet 304 and the second cooling sheet 404 are semiconductor cooling sheets or other suitable cooling materials; the first heat sink 305 and the second heat sink 405 are made of aluminum, copper or other materials with good thermal conductivity.

[0032] In the embodiment of the present invention, the size of the first cooling fin 304 and the second cooling fin 404 is 2 cm×4 cm.

[0033] In the embodiment of the present invention, the temperature range of the radiation structure 2 during operation is 20 degrees Celsius to 30 degrees Celsius.

[0034] The first cooling plate 304 and the second cooling plate 404 are connected to the radiation structure 2 through the first heat conducting plate 303 and the second heat conducting plate 403, the first connecting part 33 and the second connecting part 43, so as to control the radiation structure 2 at a stable operating temperature and not be affected by the change in heat generation caused by the change in microwave power. The sample to be tested will not disappear from the observation field of view due to the temperature drift problem, so that the test is stable. In addition, the first cooling plate 304 and the second cooling plate 404 are small in size and are not affected by the operating space.

[0035] In other embodiments, the first refrigeration unit and the second refrigeration unit adopt structures and materials with rapid heat dissipation performance, so that the heat generated by the radiation structure is quickly transferred, thereby achieving the purpose of reducing the temperature of the radiation structure.

[0036] The heat generated by the radiation structure 2 during operation is transferred to the first heat conductive sheet 303 and the second heat conductive sheet 403 through the first connection part 33 and the second connection part 43 connected to the radiation structure 2. At the same time, the first cooling sheet 304 and the second cooling sheet 404 are powered on, and the first heat conductive sheet 303 and the second heat conductive sheet 403 are cooled by the first cooling sheet 304 and the second cooling sheet 404, thereby achieving the purpose of cooling the radiation structure 2, and making the temperature of the radiation structure 2 within a certain range, so that the temperature of the radiation structure 2 is stable during operation, avoiding the heating of the radiation structure 2 causing the temperature of the sample to be tested to rise and expand due to heat, causing the temperature drift problem of the test result, improving the stability of the test environment, and avoiding the traditional radiation structure 2 being welded to the surface of the sample to be tested. Since the diameter of the radiation structure 2 is only a few hundred microns, it is difficult to provide a cooling part for the radiation structure 2. The temperature of the sample to be tested is affected by the temperature increase of the radiation structure 2, causing the sample to be tested to expand due to heat, causing the temperature drift problem, and affecting the test effect.

[0037] In the embodiment of the present invention, Figure 6As shown, the first connecting part 33 includes a first nut 301 and a first connecting rod 302, one end of the first connecting rod 302 is provided with an external thread, the first nut 301 is provided with an internal thread matched with the first connecting rod 302, a small hole is provided at the head end of the first nut 301 for the radiation structure 2 (copper wire) to pass through, the other end of the first connecting rod 302 is connected to the first refrigeration part 32, one end of the radiation structure 2 (copper wire) passes through the small hole provided at the head of the first nut 301, and after being wound around one end of the first connecting rod 302 for several turns, the first nut 301 and the first connecting rod 302 are tightened through matching threads to fix one end of the radiation structure 2 (copper wire); the second connecting part 43 includes a second nut 4 01 and a second connecting rod 402, one end of the second connecting rod 402 is provided with an external thread, the second nut 401 is provided with an internal thread matching the second connecting rod 402, a small hole is provided at the head end of the second nut 401 for the radiation structure 2 (copper wire) to pass through, the other end of the second connecting rod 402 is connected to the second refrigeration part 42, after one end of the radiation structure 2 (copper wire) passes through the small hole provided on the head of the second nut 401, it is wrapped around one end of the second connecting rod 402 for several turns, and then the second nut 401 and the second connecting rod 402 are tightened through matching threads to fix the other end of the radiation structure 2 (copper wire), and the radiation structure 2 is fixed through the first connecting part 33 and the second connecting part 43.

[0038] In the embodiment of the present invention, the other end of the first connecting rod 302 serves as one end of the first connecting portion 33, and the first connecting portion 33 is adhered to the first heat conducting plate 303, so that the first connecting portion 33 is connected to the first refrigeration portion 32; the other end of the second connecting rod 402 serves as one end of the second connecting portion 43, and the second connecting portion 43 is adhered to the second heat conducting plate 403, so that the second connecting portion 43 is connected to the second refrigeration portion 42.

[0039] In the embodiment of the present invention, the first connection part 33 and the second connection part 43 are both downward and relatively inclined at a certain angle, so that the distance between one end of the first connection part 33 and one end of the second connection part 43 is greater than the distance between the other end of the first connection part 33 and the other end of the second connection part 43, so that the length of the radiation structure 2 (copper wire) between the other end of the first connection part 33 and the other end of the second connection part 43 is as short as possible, and the distance from the radiation structure 2 to the first refrigeration part 32 and the second refrigeration part 42 is reduced, so that the radiation structure 2 (copper wire) can quickly exchange heat with the first refrigeration part 32 and the second refrigeration part 42, thereby realizing rapid cooling of the radiation structure 2; at the same time, through a certain inclination angle, when the sample to be tested is subsequently tested, a certain space is reserved for the lens of the microscope, so as to facilitate the testing of the sample to be tested.

[0040] In the embodiment of the present invention, the first connection portion 33 and the second connection portion 43 are in the same vertical plane, and the first connection portion 33 and the second connection portion 43 are both inclined downward at an angle of 45 degrees.

[0041] In other embodiments, the downward tilt angle of the first connection part and the second connection part is determined according to actual conditions by rotating the first bracket and the second bracket to drive the first connection part and the second connection part to rotate a certain angle.

[0042] In the embodiment of the present invention, the ends of the first connecting rod 302 and the second connecting rod 402 with external threads are rounded, so that the first connecting rod 302 and the second connecting rod 402 can better match with the first nut 301 and the second nut 401.

[0043] In the embodiment of the present invention, the connection between the first connecting rod 302 and the first heat conducting part, and the connection between the second connecting rod 402 and the second heat conducting part are both insulated to prevent current leakage, short circuit or other electrical faults, thereby ensuring the safety and reliability of the equipment.

[0044] In the embodiment of the present invention, the first fixing portion 31 includes a first adjusting screw 309 and a first fixing piece 307 matching the first adjusting screw 309, the first fixing piece 307 is integrated on the first bracket 306, and the first bracket 306 is fixed to the surface of the translation platform 1 through the first adjusting screw 309 and the first fixing piece 307; the second fixing portion 41 includes a second adjusting screw 409 and a second fixing piece 407 matching the second adjusting screw 409, the second fixing piece 407 is integrated on the second bracket 406, and the second bracket 406 is fixed to the surface of the translation platform 1 through the second adjusting screw 409 and the second fixing piece 407.

[0045] In the embodiment of the present invention, the first adjusting screw 309 cooperates with the first fixing member 307 to adjust the first bracket 306, and the second adjusting screw 409 cooperates with the second fixing member 407 to adjust the second bracket 406, and the positions of the first RF arm 10 and the second RF arm 20 on the surface of the translation stage 1 are correspondingly adjusted, so as to adjust the opening angle between the first RF arm 10 and the second RF arm 20, so as to adjust the tension of the radiation structure 2 (copper wire). Specifically, the first bracket 306 adjusts the position of the first bracket 306 on the surface of the translation stage 1 with the first fixing member 307 as the center, and the second bracket 406 adjusts the position of the second bracket 406 on the surface of the translation stage 1 with the second fixing member 407 as the center, and accordingly, the positions of the first RF arm 10 and the second RF arm 20 on the surface of the translation stage 1 can be adjusted.

[0046] In an embodiment of the present invention, the first fixing member 307 includes a circular ring structure connected to the first bracket 306, and the first fixing member 307 has an internal thread that matches the first adjusting screw 309; the second fixing member 407 includes a circular ring structure connected to the second bracket 406, and the second fixing member 407 has an internal thread that matches the second adjusting screw 409.

[0047] When the first adjusting screw 309 and the second adjusting screw 409 are loosened, the positions of the first RF arm 10 and the second RF arm 20 on the surface of the translation platform 1 are adjusted until the radiation structure 2 between the first connecting portion 33 and the second connecting portion 43 is tensioned, and then the first adjusting screw 309 and the second adjusting screw 409 are tightened to fix the first RF arm 10 and the second RF arm 20 on the surface of the translation platform 1 to avoid movement of the first RF arm 10 and the second RF arm 20 and affect the test results.

[0048] In an embodiment of the present invention, the radiation structure clamping device also includes a first RF line 308 and a second RF line 408; the first RF line 308 is arranged along the first bracket 306, one end of the first RF line 308 is connected to the other end of the first connecting rod 302, and the other end of the first RF line 308 is connected to a RF source; the second RF line 408 is arranged along the second bracket 406, one end of the second RF line 408 is connected to the other end of the second connecting rod 402, and the other end of the second RF line 408 is grounded, and the microwave signal is provided to the radiation structure 2 through the first RF line 308 and the second RF line 408.

[0049] In other embodiments, the positions of the first radio frequency line and the second radio frequency line are determined according to actual conditions.

[0050] The present invention also provides a microwave field application method, such as Figure 7 As shown, including: Step S10, providing the above-mentioned radiation structure clamping device; Step S20, installing the radiation structure between the first connecting portion and the second connecting portion of the radiation structure clamping device; Step S30, providing a microwave signal to the radiation structure, so that the heat generated by the radiation structure is transferred to the first refrigeration part and the second refrigeration part through the first connection part and the second connection part, and the radiation structure is cooled by the first refrigeration part and the second refrigeration part until the temperature of the radiation structure is stable; Step S40, providing a sample to be tested, and placing the sample to be tested on a sample stage; Step S50, adjusting the positions of the sample stage and the displacement stage of the radiation structure clamping device so that the first position to be tested on the surface of the sample to be tested and the radiation structure are close to each other for testing, and repeating this step until all positions to be tested are tested.

[0051] Specifically, step S10 is performed to provide the above-mentioned radiation structure clamping device.

[0052] Execute S20 to install the radiation structure 2 between the first connection portion 33 and the second connection portion 43 of the radiation structure clamping device.

[0053] The two ends of the radiation structure 2 respectively pass through the first nut 301 of the first connection part 33 and the second nut 401 of the second connection part 43 and are wrapped around the corresponding first connecting rod 302 and the second connecting rod 402 for several turns. Then, the first nut 301 and the first connecting rod 302 are tightened, and the second nut 401 and the second connecting rod 402 are tightened, so that the radiation structure 2 is fixed between the first connection part 33 and the second connection part 43.

[0054] In the embodiment of the present invention, the first fixing portion 31 and the second fixing portion 41 are adjusted to tighten the radiation structure 2. The first adjusting screw 309 of the first fixing portion 31 and the second adjusting screw 409 of the second fixing portion 41 are loosened, and the positions of the first RF arm 10 and the second RF arm 20 on the surface of the translation stage 1 are adjusted until the radiation structure 2 between the first connecting portion 33 and the second connecting portion 43 is tightened, and the first RF arm 10 and the second RF arm 20 are fixed on the surface of the translation stage 1, so as to avoid the movement of the first RF arm 10 and the second RF arm 20, which may affect the test results.

[0055] Execute step S30 to provide a microwave signal to the radiation structure 2. The heat generated by the radiation structure 2 is transferred to the first refrigeration part 32 and the second refrigeration part 42 through the first connection part 33 and the second connection part 43. The refrigeration temperature is set. The radiation structure 2 is cooled by the first refrigeration part 32 and the second refrigeration part 42 until the temperature of the radiation structure 2 is stable.

[0056] In the embodiment of the present invention, the RF source is turned on, and a microwave signal is provided to the radiation structure 2 using a first RF line 308 arranged along the first bracket 306 and a second RF line 408 arranged along the second bracket 406, one end of the first RF line 308 is connected to the other end of the first connecting rod 302, the other end of the first RF line 308 is connected to the microwave source, one end of the second RF line 408 is connected to the other end of the second connecting rod 402, and the other end of the second RF line 408 is grounded.

[0057] In other embodiments, the positions of the first radio frequency line and the second radio frequency line are determined according to actual conditions.

[0058] In the embodiment of the present invention, a refrigeration temperature is set for the first refrigeration part 32 and the second refrigeration part 42 so that the temperature of the radiation structure 2 is maintained within a certain range. Specifically, the refrigeration temperature setting range of the first refrigeration part 32 and the second refrigeration part 42 is 20 degrees Celsius to 30 degrees Celsius.

[0059] In an embodiment of the present invention, the heat generated by the radiation structure 2 during operation is transferred to the first heat conducting plate 303 and the second heat conducting plate 403 through the first connecting part 33 and the second connecting part 43 connected to the radiation structure 2, that is, transferred to the first refrigeration part 32 and the second refrigeration part 42. At the same time, the first refrigeration plate 304 and the second refrigeration plate 404 are powered on, and the first refrigeration plate 304 and the second refrigeration plate 404 are used to cool the first refrigeration part 32 and the second refrigeration part 42, thereby achieving the purpose of cooling the radiation structure 2, avoiding the temperature drift problem caused by the heat of the radiation structure 2, and improving the stability of the test environment.

[0060] Step S40 is executed to provide a sample to be tested, and the sample to be tested is placed on a sample stage.

[0061] In the embodiment of the present invention, the test surface of the test sample is arranged to be opposite to and close to the radiation structure 2, so that the radiation structure 2 can better control the color center of the test sample in the subsequent test process.

[0062] Execute step S50, adjust the positions of the sample stage and the displacement stage 1 of the radiation structure clamping device so that the first position to be tested on the surface of the sample to be tested and the radiation structure 2 are close to each other for testing, and repeat this step until all the positions to be tested are tested.

[0063] In the embodiment of the present invention, the radiating structure 2 is brought as close to the sample as possible by using the displacement stage 1, and after reaching a suitable test position, measurement is performed. Specifically, the step of adjusting the sample to be tested and the radiating structure 2 to a suitable test position includes: By adjusting the position of the translation stage 1, the radiation structure 2 and the sample to be measured are both located in the field of view of the microscope; The distance between the displacement stage 1 and the sample surface is adjusted so that the radiation structure 2 is close to the surface of the sample to be measured.

[0064] In the embodiment of the present invention, the positions of the sample to be tested and the radiation structure 2 are adjusted to a suitable test state by adjusting the displacement stage 1 or adjusting the sample stage.

[0065] In an embodiment of the present invention, after the measurement of the first position to be measured of the sample to be measured is completed, the displacement stage 1 is adjusted to make the radiation structure 2 leave the surface of the sample to be measured, and as needed, the displacement stage 1 and the sample stage are moved in coordination to make the radiation structure 2 reach the next position to be measured, and measurement is performed until the measurement of the position to be measured is completed.

[0066] Since the radiation structure 2 is clamped and fixed by the radiation structure clamping device and moves with the displacement stage 1, the radiation structure 2 has the property of moving, which means that the radiation structure 2 can adjust its position relative to the sample to be measured, so that the radiation structure 2 can be attached to any position on the surface of the sample to be measured, thereby avoiding the position fixation caused by welding of the existing radiation structure 2 to the surface of the sample to be measured, and realizing the measurement of multiple positions to be measured of the sample to be measured; Furthermore, the heat generated during the operation of the radiation structure 2 is cooled and maintained within a certain temperature range through the first refrigeration unit 32 and the second refrigeration unit 42, thereby avoiding the problem that the existing radiation structure 2 is welded to the surface of the sample to be tested, and the heat generated during the operation of the radiation structure 2 cannot be quickly dissipated, causing the sample to be tested to expand due to heat and resulting in temperature drift of the test point. The temperature of the radiation structure 2 is controllable, and the interference with the measurement result caused by the continuous increase in the temperature of the radiation structure 2 is avoided.

[0067] Finally, it is to be noted that any modification or equivalent replacement of part or all of the technical features based on the device structure of the present invention and the technical solution of the described embodiment, which does not deviate from the essence of the corresponding technical solution of the present invention, belongs to the patent scope of the device structure of the present invention and the described implementation scheme.

Claims

1. A radiant structure clamping device, characterized in that: include: A translation stage, a radiation structure, a first radio frequency arm and a second radio frequency arm, wherein the first radio frequency arm and the second radio frequency arm are fixed to a surface of the translation stage and arranged opposite to each other, the first radio frequency arm and the second radio frequency arm move with the translation stage, and the radiation structure is fixed to one end of the first radio frequency arm and one end of the second radio frequency arm; The first RF arm includes a first bracket, a first fixing portion, a first cooling portion, and a first connecting portion; the first fixing portion is disposed on the first bracket and close to one end of the first bracket, and the first fixing portion is used to fix the first RF arm to the surface of the translation stage; one end of the first cooling portion is disposed at the other end of the first bracket, and one end of the first connecting portion is connected to the other end of the first cooling portion; The second RF arm includes a second bracket, a second fixing portion, a second cooling portion, and a second connecting portion; the second fixing portion is disposed on the second bracket and close to one end of the second bracket, and the second fixing portion is used to fix the second RF arm to the surface of the translation stage; one end of the second cooling portion is disposed at the other end of the second bracket, and one end of the second connecting portion is connected to the other end of the second cooling portion; Among them, the other end of the first connecting part and the other end of the second connecting part are arranged opposite to each other, and a radiation structure is clamped between the other end of the first connecting part and the other end of the second connecting part. The movement of the displacement platform drives the radiation structure between the first connecting part and the second connecting part to move, and the position of the radiation structure is adjusted. The radiation structure is cooled by the first refrigeration part and the second refrigeration part.

2. A radiant structure clamping device as claimed in claim 1, characterized in that: The first refrigeration part includes: a first heat sink, a first refrigeration fin and a first heat conductive sheet; one side of the first heat conductive sheet is arranged at the other end of the first bracket, and the other side of the first heat conductive sheet is sequentially provided with the first refrigeration fin and the first heat sink, and one side of the first heat conductive sheet is connected to one end of the first connecting part; the second refrigeration part includes: a second heat sink, a second refrigeration fin and a second heat conductive sheet; one side of the second heat conductive sheet is arranged at the other end of the second bracket, and the other side of the second heat conductive sheet is sequentially provided with the second refrigeration fin and the second heat sink, and one side of the second heat conductive sheet is connected to one end of the second connecting part.

3. A radiating structure clamping device as claimed in claim 2, characterized in that: The first heat conducting plate and the second heat conducting plate are polycrystalline diamond plates; the first cooling plate and the second cooling plate are semiconductor cooling plates; the material of the first heat sink and the second heat sink is one of aluminum and copper.

4. A radiant structure clamping device as claimed in claim 1, characterized in that: The first connecting part includes a first nut and a first connecting rod, one end of the first connecting rod is provided with an external thread, the first nut is provided with an internal thread matching the first connecting rod, the head end of the first nut is provided with a small hole for the radiation structure to pass through, and the other end of the first connecting rod is connected to the first refrigeration part; the second connecting part includes a second nut and a second connecting rod, one end of the second connecting rod is provided with an external thread, the second nut is provided with an internal thread matching the second connecting rod, the head end of the second nut is provided with a small hole for the radiation structure to pass through, and the other end of the second connecting rod is connected to the second refrigeration part.

5. A radiant structure clamping device as claimed in claim 1, characterized in that: The first connection portion and the second connection portion are both downward and relatively inclined at a certain angle, so that the distance between one end of the first connection portion and one end of the second connection portion is greater than the distance between the other end of the first connection portion and the other end of the second connection portion, and the first connection portion and the second connection portion are in the same vertical plane.

6. A radiating structure clamping device as claimed in claim 1, characterized in that: The first fixing portion includes a first adjusting screw and a first fixing member matching the first adjusting screw, and the first bracket is fixed to the surface of the translation platform through the first adjusting screw and the first fixing member; the second fixing portion includes a second adjusting screw and a second fixing member matching the second adjusting screw, and the second bracket is fixed to the surface of the translation platform through the second adjusting screw and the second fixing member.

7. A radiant structure clamping device as claimed in claim 6, characterized in that: The positions of the first RF arm and the second RF arm on the surface of the translation stage are adjusted respectively by the cooperation between the first adjusting screw and the first fixing member, and the second adjusting screw and the second fixing member, so as to adjust the tension of the radiation structure.

8. A radiant structure clamping device as claimed in claim 1, characterized in that: The radiation structure is a copper wire.

9. A radiating structure clamping device as claimed in claim 1, characterized in that: The temperature range of the radiation structure when working is 20 degrees Celsius to 30 degrees Celsius.

10. A microwave application method, characterized in that: include: Provide a radiating structure clamping device as claimed in claim 1; Installing the radiation structure between the first connection part and the second connection part of the radiation structure clamping device; Providing a microwave signal to the radiation structure, so that the heat generated by the radiation structure is transferred to the first refrigeration part and the second refrigeration part through the first connection part and the second connection part, and the radiation structure is cooled by the first refrigeration part and the second refrigeration part until the temperature of the radiation structure is stable; Providing a sample to be tested, and placing the sample to be tested on a sample stage; The positions of the sample stage and the displacement stage of the radiation structure clamping device are adjusted so that the first position to be tested on the surface of the sample to be tested and the radiation structure are close to each other for testing, and this step is repeated until all the positions to be tested are tested.

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