Splash-proof device for single crystal furnace and single crystal furnace

Abstract

The invention discloses a splash-proof device for a single crystal furnace and the single crystal furnace, the single crystal furnace comprises a crucible and a water-cooling screen arranged above the crucible, the water-cooling screen is annular, the splash-proof device for the single crystal furnace comprises a protective part detachably arranged in the water-cooling screen, and the protective part is arranged in the water-cooling screen; the protection part is annular and at least covers the inner circumferential wall of the end, close to the crucible, of the water cooling screen, the protection part comprises a first protection layer and a second protection layer in the thickness direction, the first protection layer and the second protection layer are annular and are arranged in a stacked mode, and the first protection layer and the second protection layer are arranged in a stacked mode. The first protection layer is located on the side, away from the water cooling screen, of the second protection layer. According to the splash-proof device for the single crystal furnace, the good protection effect on the water-cooling screen can be ensured, the normal use of the water-cooling screen is ensured, and the crystallization rate and the production quality of single crystals are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal manufacturing, and more particularly to a splash-proof device for a single crystal furnace and a single crystal furnace. Background Art

[0002] In the related technology, the hydrogen content in the silicon material required for single crystal manufacturing is relatively high. During the heat and melting process of the silicon material, hydrogen jumping phenomenon will occur, which can easily cause the silicon liquid to splash out, causing the silicon liquid to be adsorbed on the water cooling screen, reducing the crystallization rate of single crystal production and affecting the production process.

[0003] Referring to the relevant technical document CN202111642121.2, it is disclosed that a circular sheath is arranged at the lower end of the water-cooling screen, and the circular sheath is connected to the lower end of the water-cooling screen, and is fixed above the quartz crucible through the water-cooling screen and the circular sheath, so as to prevent the water-cooling screen from melting or bursting due to high temperature, and can extend the length of the water-cooling screen, extend the thermal refraction of the water-cooling screen, and effectively ensure a good temperature gradient in the single crystal furnace.

[0004] This single crystal furnace mainly extends the length of the water-cooling screen by means of a circular ring-shaped sheath to prevent the water-cooling screen from melting or bursting due to high temperature. However, this method still causes hydrogen jump of the silicon material, which can easily cause the silicon liquid to be adsorbed on the water-cooling screen, reducing the crystallization rate of crystal production and affecting the production process. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one object of the present invention is to provide a splash-proof device for a single crystal furnace, which can ensure good protection effect on the water cooling screen, ensure the normal use of the water cooling screen, and improve the crystallization rate and production quality of the single crystal.

[0006] Another object of the present invention is to provide a single crystal furnace having the above-mentioned splash-proof device.

[0007] According to an embodiment of the present invention, a splash-proof device for a single crystal furnace includes: the single crystal furnace includes a crucible and a water-cooling screen arranged above the crucible, the water-cooling screen is annular, and the splash-proof device includes: a protective member, the protective member is detachably arranged in the water-cooling screen, the protective member is formed in a ring shape and at least covers the inner circumferential wall of one end of the water-cooling screen close to the crucible, the protective member includes a first protective layer and a second protective layer in the thickness direction, the first protective layer and the second protective layer are both formed in a ring shape, the first protective layer and the second protective layer are stacked, and the first protective layer is located on the side of the second protective layer away from the water-cooling screen.

[0008] According to the splash-proof device for a single crystal furnace according to an embodiment of the present invention, a protective member is detachably arranged in a water-cooling screen, and the protective member is formed in a ring shape and at least covers the inner circumferential wall of one end of the water-cooling screen close to the crucible, so that the protective member can protect the water-cooling screen, avoid the silicon material adhering to the water-cooling screen and affecting the use of the water-cooling screen, and in the single crystal processing process, avoid the silicon liquid adsorbed on the water-cooling screen from falling into the crucible and causing pollution to the silicon liquid, thereby ensuring the crystallization rate of the single crystal and making the production quality of the single crystal good; the protective member includes a first protective layer and a second protective layer in the thickness direction, and the first protective layer and the second protective layer are stacked, which can effectively improve the structural strength of the protective member, avoid deformation of the protective member and affect the protection of the water-cooling screen, and ensure that the protective member has a good protective effect on the water-cooling screen.

[0009] In addition, the splash protection device for a single crystal furnace according to the above embodiment of the present invention may also have the following additional technical features:

[0010] According to some embodiments of the splash-proof device for a single crystal furnace of the present invention, the inner peripheral wall of the water-cooling screen includes an inclined section, which is formed in a ring shape. In a direction from bottom to top, the inclined section extends obliquely in a direction away from the central axis of the water-cooling screen, and the protective member includes in the up and down directions: an abutment portion, which is formed in a ring shape. In a direction from bottom to top, the abutment portion extends obliquely in a radially outward direction of the water-cooling screen to abut against the inner peripheral wall of the water-cooling screen.

[0011] According to some embodiments of the present invention, the inner circumferential wall of the water-cooling screen also includes a straight tube section, which is formed in a ring shape, the upper end of the straight tube section is connected to the lower end of the inclined section, and the straight tube section has the same inner diameter in the up and down directions. The protective member also includes in the up and down directions: a first straight tube portion, which is formed in a ring shape, the upper end of the first straight tube portion is connected to the lower end of the abutment portion, the first straight tube portion has the same outer diameter in the up and down directions, and the first straight tube portion is located inside the straight tube section.

[0012] According to some embodiments of the present invention, the protective member further includes in the up and down directions: a second straight cylindrical portion, the second straight cylindrical portion is formed in a ring shape, the lower end of the second straight cylindrical portion is connected to the upper end of the abutting portion, and the second straight cylindrical portion has the same inner diameter in the up and down directions.

[0013] According to some embodiments of the present invention, the protective element further includes, in the thickness direction: a third protective layer, wherein the third protective layer is located on a side of the second protective layer away from the first protective layer.

[0014] According to some embodiments of the present invention, the second protective layer is a metal part or a carbon-carbon part; and / or the first protective layer and the third protective layer are silicon parts, graphite parts, carbon-carbon parts, silicon carbide parts, fiber-reinforced ceramic-based composite parts, silicon nitride or quartz parts.

[0015] According to some embodiments of the present invention, the single crystal furnace includes a seed crystal rope, and the splash-proof device also includes: a suspension rod assembly, the upper end of which is connected to the seed crystal rope, the suspension rod assembly is suitable for being movably arranged in the water-cooling screen in the up and down directions to place the protective element in the water-cooling screen, and the suspension rod assembly is detachably connected to the protective element.

[0016] According to some embodiments of the present invention, a connecting portion is provided on the inner circumferential wall of the protective member, the suspension rod assembly includes a fixing member and a mating segment provided on the fixing member, the upper end of the fixing member is connected to the seed crystal rope, one end of the mating segment is connected to the fixing member, and the other end of the mating segment extends radially outward from the fixing member, the connecting portions are multiple and are arranged at intervals along the circumferential direction of the protective member, the mating segments are multiple and are arranged at intervals along the circumferential direction of the fixing member, and the multiple mating segments are detachably connected to the multiple connecting portions.

[0017] According to some embodiments of the present invention, the fixing member is formed as a rod-shaped structure extending in an up-down direction.

[0018] According to some embodiments of the present invention, the fixing member is formed as a charging cylinder, and one end of the matching section is connected to the outer peripheral wall of the charging cylinder.

[0019] According to some embodiments of the present invention, the plurality of mating segments are mated with the plurality of connecting parts in a one-to-one correspondence; or, the plurality of connecting parts are divided into a plurality of groups, each group of connecting parts includes a plurality of connecting parts, a plurality of connecting parts in the plurality of groups of connecting parts are alternately arranged along the circumferential direction of the protective member, and the plurality of connecting parts in each group of connecting parts are mated with the plurality of mating segments in a one-to-one correspondence.

[0020] According to some embodiments of the present invention, the lower end surface of the protective element extends below the lower end surface of the water-cooling shield.

[0021] The single crystal furnace according to the embodiment of the present invention includes the splash-proof device for the single crystal furnace according to the embodiment of the present invention.

[0022] According to the single crystal furnace of the embodiment of the present invention, the protective member is detachably arranged in the water-cooling screen through the protective member, and the protective member is formed in a ring shape and at least covers the inner circumferential wall of one end of the water-cooling screen close to the crucible, so that the protective member can protect the water-cooling screen, avoid the silicon material adhering to the water-cooling screen and affecting the use of the water-cooling screen, and in the single crystal processing process, avoid the silicon liquid adsorbed on the water-cooling screen from falling into the crucible and causing pollution to the silicon liquid, thereby ensuring the crystallization rate of the single crystal and making the production quality of the single crystal good; the protective member includes a first protective layer and a second protective layer in the thickness direction, and the first protective layer and the second protective layer are stacked, which can effectively improve the structural strength of the protective member, avoid deformation of the protective member and affect the protection of the water-cooling screen, and ensure that the protective member has a good protective effect on the water-cooling screen.

[0023] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0025] Figure 1 is a schematic structural diagram of a single crystal furnace according to a first embodiment of the present invention;

[0026] Figure 2 yes Figure 1 The middle circle shows the enlarged structural schematic diagram of A;

[0027] Figure 3 is a schematic structural diagram of a splash protection device according to a first embodiment of the present invention;

[0028] Figure 4 is a schematic structural diagram of a protective member of a splash protection device according to a first embodiment of the present invention;

[0029] Figure 5 is a schematic diagram of a partial structure of a splash-proof device according to an embodiment of the present invention;

[0030] Figure 6 is a schematic structural diagram of a chuck of a splash-proof device according to an embodiment of the present invention;

[0031] Figure 7 is a schematic structural diagram of a joint of a splash-proof device according to an embodiment of the present invention;

[0032] Figure 8 is a schematic structural diagram of a sleeve of a splash-proof device according to an embodiment of the present invention;

[0033] Fig. 9 is a schematic structural diagram of a boom assembly according to a second embodiment of the present invention;

[0034] Fig.10 yes Fig. 9 The middle circle shows the enlarged structural schematic diagram of B;

[0035] Fig.11 is a schematic structural diagram of a protective member of a splash protection device according to a third embodiment of the present invention;

[0036] Fig.12 4 is a schematic structural diagram of a protective component of a splash protection device according to a fourth embodiment of the present invention.

[0037] Reference numerals:

[0038] 100. Anti-splash device; 200. Single crystal furnace;

[0039] 11. Crucible; 12. Water cooling screen; 121. Inclined section; 122. Straight section;

[0040] 20, protective member; 21, first straight tube portion; 22, abutting portion; 23, connecting portion; 24, second straight tube portion; 201, first protective layer; 202, second protective layer; 203, third protective layer;

[0041] 31. Suspension rod assembly; 32. Lifting rod; 311. Fixing member; 312. Matching section;

[0042] 41. joint; 42. chuck; 43. sleeve; 411. stopper; 421. mounting hole; 422. notch; 423. support protrusion; 424. flange;

[0043] 50. Feeding cylinder; 51. Clamp; 511. Fixed body; 512. First locking part; 513. Second locking part; 514. Connecting hole. DETAILED DESCRIPTION

[0044] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0045] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0046] In the description of the present invention, "first feature" and "second feature" may include one or more such features, "plurality" means two or more, a first feature "above" or "below" the second feature may include the first and second features being directly in contact, or may include the first and second features not being in direct contact but being in contact through another feature between them, and a first feature "above", "above" and "above" the second feature may include the first feature being directly above or diagonally above the second feature, or may simply mean that the first feature is horizontally higher than the second feature.

[0047] The splash protection device 100 for a single crystal furnace 200 according to an embodiment of the present invention will be described below with reference to the accompanying drawings.

[0048] Reference Figure 1 and Figure 2 As shown, the single crystal furnace 200 according to the embodiment of the present invention includes a crucible 11 and a water cooling screen 12. The water cooling screen 12 is arranged above the crucible 11. The water cooling screen 12 is annular. During the single crystal manufacturing process, the water cooling screen 12 can quickly take away the heat at the root of the single crystal, thereby increasing the growth rate of the single crystal and accelerating the growth rate of the single crystal. For example, the single crystal is a silicon crystal used in the solar photovoltaic industry.

[0049] When a single crystal is manufactured by the Czochralski method, silicon material is placed in the crucible 11. Under vacuum conditions and the protection of inert gas, the heater of the single crystal furnace 200 generates heat to melt the silicon material in the single crystal furnace 200 to form silicon liquid. Then, a seed crystal is introduced into the silicon liquid. At a suitable temperature, the silicon atoms in the silicon liquid will form crystals at the solid-liquid interface according to the silicon atom arrangement structure of the seed crystal to form a single crystal. The seed crystal is rotated and lifted to finally crystallize into a single crystal rod. For example, the silicon material can be manufactured by a modified Siemens method or fluidized bed technology.

[0050] In the related art, when adding silicon material into a crucible or melting silicon material in a crucible, silicon material (such as solid silicon material, liquid silicon material or mixed silicon material) may splash onto the water cooling screen, resulting in silicon splashing. For example, when melting silicon material in a crucible, droplets or small particles containing bubbles in the silicon liquid in the crucible jump out of the liquid surface, causing the silicon liquid to splash onto the water cooling screen; or, when adding silicon material into a crucible, the silicon material falls into the silicon liquid and splashes the silicon liquid due to gravity, causing the silicon liquid to splash onto the water cooling screen.

[0051] For example, the silicon material is granular polysilicon produced by fluidized bed technology, that is, granular silicon. Granular silicon has the advantages of low production cost, high bulk density, and good fluidity. However, due to the high hydrogen content of granular silicon, hydrogen hopping phenomenon will occur in the process of melting when granular silicon is heated, making the silicon liquid easily adsorbed on the water-cooled screen. In the subsequent processes (such as seeding, shouldering, equal diameter and finishing), the silicon material adhering to the water-cooled screen will fall into the silicon liquid in the crucible due to factors such as airflow or gravity, which may easily cause the pulled single crystal to break and stop the pulling production, reduce the crystallization rate of single crystal production, and affect the efficiency of single crystal output of single crystal in single crystal furnace. The "hydrogen hopping phenomenon" is that when granular silicon is produced by silane fluidized bed method, the surface of granular silicon is easy to absorb more hydrogen, which may easily cause silicon liquid to splash out and affect the production process.

[0052] Therefore, in the present invention, if Figure 1 and Figure 2 As shown, the single crystal furnace 200 further includes a splash-proof device 100 according to an embodiment of the present invention. The splash-proof device 100 according to an embodiment of the present invention may include: a protective member 20 .

[0053] Specifically, the protective member 20 is detachably disposed in the water-cooling shield 12. The protective member 20 is formed in a ring shape, and the protective member 20 at least covers one end of the water-cooling shield 12 close to the crucible 11 (for example, Figure 1 The inner peripheral wall of the water cooling shield 12 is formed by the protective member 20 (shown in the figure below), so that the protective member 20 can protect the water cooling shield 12. When hydrogen jump occurs in the silicon material, the silicon material that has hydrogen jump can adhere to the protective member 20, isolating the splashed silicon material from falling on the water cooling shield 12, and avoiding the silicon material from adhering to the water cooling shield 12 and affecting the use of the water cooling shield 12. At the same time, before processing the single crystal, the protective member 20 is removed, so that there is no silicon material adhering to the inner wall of the water cooling shield 12, avoiding the influence of the silicon splashing phenomenon on the subsequent production of the single crystal, ensuring the crystallization rate of the single crystal, and ensuring the production quality of the single crystal.

[0054] Therefore, compared with the solution of using a small silicon material as a bottom to reduce silicon splashing, the present invention absorbs the splashed silicon material through the protective part 20, and there is no need to adjust the size and material of the silicon material. It can use a high proportion of silicon material that is easy to splash (such as granular silicon), thereby reducing the cost of silicon material, reducing carbon footprint, meeting production needs, and avoiding the problem of small silicon material easily absorbing impurities, thereby increasing the minority carrier lifetime of the single crystal, which is beneficial to improving the quality of the single crystal.

[0055] In addition, if Fig.11 and Fig.12 As shown, the protective member 20 includes a first protective layer 201 and a second protective layer 202 in the thickness direction. The first protective layer 201 and the second protective layer 202 are both formed in a ring shape. The first protective layer 201 and the second protective layer 202 are stacked, and the first protective layer 201 is located on the side of the second protective layer 202 away from the water-cooling screen 12. The first protective layer 201 and the second protective layer 202 can effectively improve the structural strength of the protective member 20, avoid deformation of the protective member 20 and affect the protection of the water-cooling screen 12, ensure that the protective member 20 has a good protective effect on the water-cooling screen 12, and effectively isolate the splashed silicon material from falling on the water-cooling screen 12.

[0056] In some embodiments, the first protective layer 201 may be attached to the second protective layer 202 by coating or sputtering, or the first protective layer 201 may be fixed to the second protective layer 202 by fasteners, both of which can ensure that the first protective layer 201 is reliably connected to the second protective layer 202 and facilitate processing and manufacturing. For example, the first protective layer 201 and the second protective layer 202 may be connected by rivets.

[0057] For example, before the single crystal furnace 200 is charged for the second time, the protective member 20 is placed in the water-cooled shield 12. During the silicon material chemical reaction, the hydrogen-jumped silicon material will adhere to the protective member 20. After the chemical reaction is completed and there is no hydrogen jumping phenomenon, the protective member 20 is taken out of the water-cooled shield 12 to perform the crystal pulling operation. This can ensure the normal use of the water-cooled shield 12 and prevent the silicon liquid adsorbed on the water-cooled shield 12 from falling into the crucible 11 and causing pollution to the silicon liquid, thereby ensuring the crystallization rate of the single crystal and improving the production quality of the single crystal.

[0058] In some embodiments, the protective member 20 can be cleaned. After the protective member 20 is at room temperature, the silicon material attached to the surface of the protective member 20 can be cleaned, which facilitates the continued use of the protective member 20 and prevents the silicone liquid from adhering to the water-cooled screen 12 when the protective member 20 is used again, which is beneficial to reducing production costs.

[0059] According to the splash-proof device 100 of the embodiment of the present invention, the protective member 20 is detachably arranged in the water-cooling screen 12, and the protective member 20 is formed in a ring shape and at least covers the inner peripheral wall of one end of the water-cooling screen 12 close to the crucible 11, so that the protective member 20 can protect the water-cooling screen 12, avoid the silicon material adhering to the water-cooling screen 12 and affecting the use of the water-cooling screen 12, and in the single crystal processing process, avoid the silicon liquid adsorbed on the water-cooling screen 12 from falling into the crucible 11 and causing pollution to the silicon liquid, ensure the crystallization rate of the single crystal, and make the production quality of the single crystal good; the protective member 20 includes a first protective layer 201 and a second protective layer 202 in the thickness direction, and the first protective layer 201 and the second protective layer 202 are stacked, which can effectively improve the structural strength of the protective member 20, avoid deformation of the protective member 20 and affect the protection of the water-cooling screen 12, and ensure that the protective member 20 has a good protective effect on the water-cooling screen 12.

[0060] Since the splash-proof device 100 according to the embodiment of the present invention has the above-mentioned beneficial technical effects, the single crystal furnace 200 according to the embodiment of the present invention is detachably arranged in the water-cooling screen 12 through the protective member 20, and the protective member 20 is formed in a ring shape and at least covers the inner peripheral wall of one end of the water-cooling screen 12 close to the crucible 11, so that the protective member 20 can protect the water-cooling screen 12, avoid the silicon material adhering to the water-cooling screen 12 and affecting the use of the water-cooling screen 12, and in the single crystal processing process, avoid the silicon liquid adsorbed on the water-cooling screen 12 from falling into the crucible 11 and causing pollution to the silicon liquid, ensure the crystallization rate of the single crystal, and make the production quality of the single crystal good; the protective member 20 includes a first protective layer 201 and a second protective layer 202 in the thickness direction, and the first protective layer 201 and the second protective layer 202 are stacked, which can effectively improve the structural strength of the protective member 20, avoid deformation of the protective member 20 and affect the protection of the water-cooling screen 12, and ensure that the protective member 20 has a good protective effect on the water-cooling screen 12.

[0061] In the embodiment of the present invention, the specific structure of the protective member 20 can be flexibly set according to the specific structure of the water-cooling shield 12 .

[0062] In some embodiments of the present invention, Figure 1 , Figure 2 , Fig.11 and Fig.12 As shown, the inner wall of the water-cooling shield 12 includes an inclined section 121, which is formed in a ring shape. From bottom to top, the inclined section 121 extends obliquely in a direction away from the central axis of the water-cooling shield 12, which is beneficial to improving the heat dissipation effect of the water-cooling shield 12 on the single crystal.

[0063] In addition, if Figure 1-Figure 4As shown, the protective member 20 includes an abutment portion 22 in the up and down directions, and the abutment portion 22 is formed in a ring shape. In the direction from bottom to top, the abutment portion 22 extends obliquely in the radial outward direction of the water-cooling screen 12, which can meet the placement requirements of the protective member 20 in the water-cooling screen 12, and the abutment portion 22 can abut against the inner circumferential wall of the water-cooling screen 12 to prevent the protective member 20 from moving downward, so that the protective member 20 can be firmly placed in the water-cooling screen 12, ensuring that the protective member 20 has a good protective effect on the water-cooling screen 12.

[0064] In some embodiments, Figure 1-Figure 4 As shown, the inner wall of the water-cooled shield 12 also includes a straight section 122, which is formed in a ring shape. The upper end of the straight section 122 is connected to the lower end of the inclined section 121, and the straight section 122 has the same inner diameter in the up and down directions. The straight section 122 is used to guide the movement of the single crystal and to cool the single crystal.

[0065] In addition, if Figure 1-Figure 4 , Fig.11 and Fig.12 As shown, the protective member 20 also includes a first straight cylindrical portion 21 in the up and down directions. The first straight cylindrical portion 21 is formed into a ring shape. The upper end of the first straight cylindrical portion 21 is connected to the lower end of the abutment portion 22. The first straight cylindrical portion 21 has the same outer diameter in the up and down directions. The first straight cylindrical portion 21 is located in the straight cylindrical section 122, which is convenient for placing the protective member 20 in the water-cooled shield 12 and can meet the placement requirements of the protective member 20 in the water-cooled shield 12. The protective member 20 has a simple structure and is easy to process and manufacture, which is beneficial to reducing production costs.

[0066] According to some embodiments of the present invention, Fig.11 and Fig.12 As shown, the protective member 20 also includes a second straight cylindrical portion 24 in the up and down directions. The second straight cylindrical portion 24 is formed in a ring shape. The lower end of the second straight cylindrical portion 24 is connected to the upper end of the abutment portion 22. The second straight cylindrical portion 24 has the same inner diameter in the up and down directions. The second straight cylindrical portion 24 can improve the structural strength of the protective member 20, avoid deformation of the protective member 20, and ensure that the protective member 20 has a good protective effect on the water-cooled screen 12.

[0067] In some specific embodiments, Fig.11 and Fig.12 As shown, the first protective layer 201 and the second protective layer 202 both include an abutment portion 22, a first straight tube portion 21 and a second straight tube portion 24. The first protective layer 201 is sleeved in the second protective layer 202, so that the abutment portion 22 of the second protective layer 202 can support the abutment portion 22 of the first protective layer 201 to prevent the first protective layer 201 from falling from the second protective layer 202, thereby ensuring that the first protective layer 201 and the second protective layer 202 are reliably connected.

[0068] In some embodiments of the present invention, Fig.11 and Fig.12 As shown, the protective member 20 also includes a third protective layer 203 in the thickness direction. The third protective layer 203 is located on the side of the second protective layer 202 away from the first protective layer 201. The third protective layer 203 can further improve the structural strength of the protective member 20, ensuring that the protective member 20 reliably protects the water cooling screen 12.

[0069] In some embodiments, the third protective layer 203 may be attached to the second protective layer 202 by coating or sputtering, or the third protective layer 203 may be fixed to the second protective layer 202 by fasteners, both of which can ensure that the third protective layer 203 is reliably connected to the second protective layer 202 and are easy to process and manufacture. For example, the third protective layer 203 and the second protective layer 202 may be connected by rivets.

[0070] In some embodiments, Fig.11 and Fig.12 As shown, the first protective layer 201, the second protective layer 202 and the third protective layer 203 all include an abutment portion 22, a first straight tube portion 21 and a second straight tube portion 24. The first protective layer 201 is sleeved in the second protective layer 202, and the third protective layer 203 is sleeved outside the second protective layer 202, so that the abutment portion 22 of the third protective layer 203 can support the abutment portion 22 of the second protective layer 202, and the abutment portion 22 of the second protective layer 202 can support the abutment portion 22 of the first protective layer 201, thereby ensuring that the first protective layer 201, the second protective layer 202 and the third protective layer 203 support each other reliably, avoiding the first protective layer 201 from falling off from the second protective layer 202 and the second protective layer 202 from falling off from the third protective layer 203, and ensuring that the first protective layer 201, the second protective layer 202 and the third protective layer 203 are reliably connected.

[0071] In some embodiments, the second protective layer 202 may be a metal part, which can improve the structural strength of the protective part 20, ensure that the protective part 20 is reliably supported in the water-cooling shield 12, avoid deformation of the protective part 20, and ensure that the protective part 20 reliably protects the water-cooling shield 12; or, the second protective layer 202 may be a carbon-carbon part, which has good high temperature resistance, can meet the requirements of the protective part 20, and is conducive to extending the service life of the protective part 20. For example, the second protective layer 202 may be a molybdenum part, so that the second protective layer 202 has good structural strength.

[0072] In some embodiments, the first protective layer 201 and the third protective layer 203 can be silicon parts, graphite parts, carbon-carbon parts, silicon carbide parts, fiber-reinforced ceramic matrix composite parts, silicon nitride or quartz parts, so that after the first protective layer 201 and the third protective layer 203 come into contact with the splashed silicon liquid, they will not bring metal pollution to the adhered silicon liquid, and even if the splashed silicon liquid falls back into the crucible 11, it will not bring metal pollution to the silicon liquid in the crucible 11, avoiding affecting the growth quality of the single crystal. At the same time, the first protective layer 201 and the third protective layer 203 can have good high temperature resistance, can meet the required requirements of the protective member 20, and are conducive to extending the service life of the protective member 20.

[0073] It is understandable that the "silicon part" is a structural part formed using silicon liquid.

[0074] In some specific embodiments, the second protective layer 202 is a metal part, and the first protective layer 201 and the third protective layer 203 are silicon parts, graphite parts, carbon-carbon parts, silicon carbide parts, fiber-reinforced ceramic-based composite parts, silicon nitride or quartz parts. The metal second protective layer 202 can ensure that the protective part 20 has good structural strength, so that the protective part 20 is reliably supported in the water-cooled shield 12, ensuring that the protective part 20 reliably protects the water-cooled shield 12, and the second protective layer 202 is located between the first protective layer 201 and the third protective layer 203, which can prevent the splashed silicon liquid from contacting the metal, thereby preventing the splashed silicon liquid from falling back into the crucible 11 and bringing metal contamination to the silicon liquid in the crucible 11, thereby ensuring the growth quality of the single crystal.

[0075] In some embodiments, the protective member 20 includes a first protective layer 201 and a second protective layer 202 in the thickness direction, the second protective layer 202 is a metal member, and the first protective layer 201 is a silicon member, a graphite member, a carbon-carbon member, a silicon carbide member, a fiber-reinforced ceramic-based composite member, silicon nitride or a quartz member. The metal second protective layer 202 can ensure that the protective member 20 has good structural strength, so that the protective member 20 is reliably supported in the water-cooled shield 12, ensuring that the protective member 20 reliably protects the water-cooled shield 12, and the first protective layer 201 is located on the side of the second protective layer 202 away from the water-cooled shield 12, which can prevent the splashed silicon liquid from contacting the metal, thereby preventing the splashed silicon liquid from falling back into the crucible 11 and causing metal contamination to the silicon liquid in the crucible 11, thereby ensuring the growth quality of the single crystal.

[0076] In some embodiments, there may be multiple (greater than or equal to two) first protective layers 201, and multiple first protective layers 201 are stacked in the thickness direction. The multiple first protective layers 201 can further improve the structural strength of the protective member 20, and the multiple first protective layers 201 can provide good protection for the second protective layer 202, effectively preventing the splashed silicon liquid from contacting the metal, thereby ensuring the growth quality of the single crystal.

[0077] In some embodiments, there may be multiple (greater than or equal to two) third protective layers 203, and multiple third protective layers 203 are stacked in the thickness direction. The multiple third protective layers 203 can further improve the structural strength of the protective member 20, and the multiple third protective layers 203 can have a good protection effect on the second protective layer 202, effectively preventing the splashed silicon liquid from contacting the metal, thereby ensuring the growth quality of the single crystal.

[0078] According to some embodiments of the present invention, Figure 3 , Figure 5 and Fig. 9 As shown, the single crystal furnace 200 includes a seed crystal rope, and the splash-proof device 100 also includes a suspension rod assembly 31. The upper end of the suspension rod assembly 31 is connected to the seed crystal rope. The suspension rod assembly 31 can be movably arranged in the water-cooling screen 12 in the up-down direction through the seed crystal rope, and the suspension rod assembly 31 is detachably connected to the protective member 20. Therefore, when the suspension rod assembly 31 is connected to the protective member 20, the suspension rod assembly 31 can be controlled to be movably arranged in the water-cooling screen 12 through the seed crystal rope, which is convenient for placing the protective member 20 in the water-cooling screen 12 or taking the protective member 20 out of the water-cooling screen 12, which is convenient for placing and taking out the protective member 20, which is conducive to improving the processing efficiency; when the protective member 20 is located in the water-cooling screen 12 and the suspension rod assembly 31 is disassembled from the protective member 20, it can avoid the suspension rod assembly 31 from interfering with subsequent operations, which is conducive to improving the processing efficiency.

[0079] For example, when the protective member 20 is located in the water-cooling shield 12 and the suspension rod assembly 31 is disassembled from the protective member 20 , it is convenient to add material into the crucible 11 . While the protective member 20 protects the water-cooling shield 12 , material addition is achieved, which is beneficial to improving processing efficiency.

[0080] In some embodiments of the present invention, Figure 2-Figure 5 , Fig. 9 and Fig.10 As shown, a connecting portion 23 is provided on the inner wall of the protective member 20, and the suspension rod assembly 31 includes a fixing member 311, and the upper end of the fixing member 311 is connected to the seed crystal rope, which can realize the connection between the suspension rod assembly 31 and the seed crystal rope and ensure that the suspension rod assembly 31 and the seed crystal rope are reliably connected.

[0081] In addition, if Figure 3-Figure 5As shown, the suspension rod assembly 31 also includes a matching section 312, which is arranged on the fixing member 311, one end of the matching section 312 is connected to the fixing member 311, and the other end of the matching section 312 extends in the radial outward direction of the fixing member 311. There are multiple connecting parts 23 and matching sections 312, and multiple connecting parts 23 are arranged at intervals along the circumferential direction of the protective member 20. Multiple matching sections 312 are arranged at intervals along the circumferential direction of the fixing member 311, and multiple matching sections 312 are detachably connected to multiple connecting parts 23. Therefore, through the cooperation of multiple matching sections 312 and multiple connecting parts 23, it can ensure that the suspension rod assembly 31 lifts the protective member 20 more stably, and avoids the problem of the protective member 20 falling off, and the suspension rod assembly 31 has a simple structure, which is easy to process and manufacture, and is conducive to reducing production costs.

[0082] In some embodiments, Figure 3 and Figure 4 As shown, the connecting portion 23 is formed as an arc segment, and the middle portion of the arc segment protrudes upward. When the matching segment 312 is matched with the connecting portion 23, the matching segment 312 is not easy to fall out of the connecting portion 23, ensuring that the suspension rod assembly 31 lifts the protective member 20 more stably.

[0083] According to some embodiments of the present invention, Figure 3 and Figure 5 As shown, the fixing member 311 is formed into a rod-shaped structure extending in the up-down direction, so that the fixing member 311 has a simple structure, is easy to process and manufacture, and is conducive to reducing production costs.

[0084] In some embodiments, when the matching section 312 needs to be disassembled from the connecting portion 23, the seed crystal rope is moved downward to drive the fixing member 311 to move downward, and then the seed crystal rope is rotated so that the seed crystal rope drives the fixing member 311 to rotate, so that the matching section 312 can be staggered with the connecting portion 23, and finally, the seed crystal rope is moved upward to drive the fixing member 311 to move upward, so as to realize the separation of the suspension rod assembly 31 from the protective member 20 and avoid the suspension rod assembly 31 from interfering with subsequent operations; when the matching section 312 needs to be matched with the connecting portion 23, the seed crystal rope is moved downward to drive the fixing member 311 to rotate, so that the matching section 312 can be staggered with the connecting portion 23, and finally, the seed crystal rope is moved upward to drive the fixing member 311 to move upward, so as to realize the separation of the suspension rod assembly 31 from the protective member 20 and avoid the interference of the suspension rod assembly 31 with subsequent operations. The dynamic fixing part 311 moves downward, and the matching section 312 is offset from the connecting part 23 and is located below the connecting part 23. Then, the seed crystal rope is rotated so that the seed crystal rope drives the fixing part 311 to rotate, so that the matching section 312 is opposite to the connecting part 23. Finally, the seed crystal rope is moved upward to drive the fixing part 311 to move upward, so as to achieve the matching between the matching section 312 and the connecting part 23. The seed crystal rope is further controlled to move upward to drive the fixing part 311 to move upward, so that the matching section 312 drives the connecting part 23 to move upward, so as to remove the protective part 20 from the water-cooled shield 12.

[0085] In some embodiments, Figure 3 and Figure 5As shown, the fixing member 311 and the matching section 312 can be an integral part, which is easy to manufacture, so that the connection strength between the fixing member 311 and the matching section 312 is high, which is conducive to improving production efficiency.

[0086] In the embodiment of the present invention, the number of the connecting parts 23 can be flexibly set according to the actual situation. For example, the connecting parts 23 can be as follows: Figure 4 Four are shown, but there may be two, three, five, six or more, all of which are within the protection scope of the present invention.

[0087] In the embodiment of the present invention, the number of the matching segments 312 can be flexibly set according to actual conditions. For example, the matching segments 312 can be Figure 5 Five are shown, but there may be two, three, four, six or more, all of which are within the protection scope of the present invention.

[0088] In some embodiments, the protective member 20 includes a second straight cylindrical portion 24 in the up-down direction, such as Fig.11 and Fig.12 As shown, the connecting portion 23 is arranged on the inner circumferential wall of the second straight tube portion 24. Since the second straight tube portion 24 has the same inner diameter in the up and down directions, the connecting portion 23 is more convenient to manufacture on the protective member 20, which is beneficial to reducing structural complexity and reducing production costs.

[0089] In some embodiments of the present invention, Fig. 9 and Fig.10 As shown, the fixing member 311 is formed as a feeding barrel 50, and one end of the matching section 312 is connected to the outer peripheral wall of the feeding barrel 50, thereby, the feeding barrel 50 and the protective member 20 can be simultaneously controlled to move up and down in the water-cooling shield 12. When the seed crystal rope is controlled to move downward, the feeding barrel 50 and the protective member 20 can be simultaneously placed in the water-cooling shield 12, and it is convenient for the feeding barrel 50 to add silicon material to the crucible 11; when the seed crystal rope is controlled to move upward, the feeding barrel 50 and the protective member 20 can be simultaneously taken out of the water-cooling shield 12, which reduces the operation steps and is conducive to improving production efficiency.

[0090] According to some embodiments of the present invention, Fig. 9 and Fig.10 As shown, the suspension rod assembly 31 also includes a clamp 51, which is sleeved on the feeding barrel 50, and one end of the matching section 312 is connected to the clamp 51. The clamp 51 is used to facilitate the connection between the matching section 312 and the feeding barrel 50, which is beneficial to reduce the processing complexity of the feeding barrel 50 and facilitate the disassembly of the matching section 312, which is convenient for maintenance or replacement, etc., and can meet different usage requirements.

[0091] In some embodiments, Fig.10As shown, the clamp 51 includes a fixed body 511, a first locking portion 512 and a second locking portion 513. The fixed body 511 is an open ring. One end of the mating section 312 is connected to the fixed body 511. The first locking portion 512 and the second locking portion 513 are arranged opposite to each other, and the first locking portion 512 and the second locking portion 513 are respectively connected to the two ends of the fixed body 511 in the circumferential direction. The first locking portion 512 and the second locking portion 513 are both provided with connecting holes 514. The connecting holes 514 are used for fasteners to pass through. The clamp 51 can be locked by the fasteners to ensure that the clamp 51 is reliably fixed on the feeding barrel 50. The structure of the clamp 51 is simple and convenient for processing and manufacturing.

[0092] In some embodiments, Fig.10 As shown, there are multiple connecting holes 514 of the first locking portion 512, and the multiple connecting holes 514 are spaced apart on the first locking portion 512 along the up and down directions. The connecting holes 514 of the second locking portion 513 are multiple and correspond one to one with the connecting holes 514 of the first locking portion 512. By cooperating with the multiple connecting holes 514 of the second locking portions 513 and the multiple connecting holes 514 of the first locking portions 512, it is possible to ensure that the clamp 51 is reliably locked and that the mating section 312 can reliably support the protective member 20.

[0093] In the embodiment of the present invention, the number of the connecting holes 514 of the first locking portion 512 can be flexibly set according to actual conditions. For example, the connecting holes 514 of the first locking portion 512 can be as follows: Fig.10 Two are shown, but three, four, five, six or more may also be provided, all of which are within the protection scope of the present invention.

[0094] According to some embodiments of the present invention, Figure 3 As shown, the multiple mating segments 312 and the multiple connecting parts 23 are matched one by one, so that the mating segments 312 and the connecting parts 23 can be matched more reliably, ensuring that the suspension rod assembly 31 can lift the protective part 20 more stably, avoiding the protective part 20 from tilting, facilitating the placement of the protective part 20, and avoiding the protective part 20 from colliding with other positions of the water-cooled screen 12 and causing damage.

[0095] Alternatively, the multiple connecting parts 23 can be divided into multiple groups (greater than or equal to two groups), each group of connecting parts 23 includes multiple connecting parts 23, and the multiple connecting parts 23 in the multiple groups of connecting parts 23 are alternately arranged along the circumferential direction of the protective part 20. The multiple connecting parts 23 in each group of connecting parts 23 are matched with the multiple matching sections 312 in a one-to-one manner, so that the matching sections 312 and the connecting parts 23 are more convenient to match, reducing the complexity of matching, which is beneficial to reducing the production cost of the suspension rod assembly 31, and at the same time can prevent the protective part 20 from being skewed, facilitate the placement of the protective part 20, and avoid the protective part 20 from colliding with other positions of the water cooling screen 12 and causing damage.

[0096] In some embodiments, Figure 3 As shown, there can be four matching sections 312 and four connecting parts 23. The four matching sections 312 and the four connecting parts 23 match one by one, so that the matching sections 312 and the connecting parts 23 match more reliably, ensuring that the suspension rod assembly 31 lifts the protective part 20 more stably and avoiding the protective part 20 from tilting.

[0097] In some embodiments, there can be two mating segments 312 and four connecting parts 23. The four connecting parts 23 can be divided into two groups, each group of connecting parts 23 includes two connecting parts 23, and the two connecting parts 23 in the two groups of connecting parts 23 are alternately arranged along the circumferential direction of the protective member 20. The two connecting parts 23 of one group of connecting parts 23 in the two groups can be matched with the two mating segments 312 in a one-to-one correspondence, so that the mating segments 312 and the connecting parts 23 are more convenient to match, reducing the complexity of matching, which is beneficial to reducing the production cost of the suspension rod assembly 31 and avoiding the protective member 20 from being skewed.

[0098] In some embodiments of the present invention, Figure 3 , Figure 5 and Figure 6 As shown, the splash-proof device 100 also includes a lifting rod 32, and the lifting rod 32 includes a joint 41 and a chuck 42. The upper end of the chuck 42 is connected to the seed crystal rope, so that the lifting rod 32 and the seed crystal rope can be connected. The lower end of the joint 41 is connected to the upper end of the suspension rod assembly 31, so that the lifting rod 32 and the suspension rod assembly 31 can be connected. The lifting rod 32 can be controlled to move up and down by moving the seed crystal rope up and down, so that the suspension rod assembly 31 connected to the lifting rod 32 moves up and down, which is convenient for placing and removing the protective part 20.

[0099] The chuck 42 has a mounting hole 421, and the mounting hole 421 is arranged along the axial direction (for example Figure 3 ), the peripheral wall of the chuck 42 is provided with a notch 422, the notch 422 is connected with the mounting hole 421, the width of the notch 422 is greater than the maximum diameter of the joint 41, the inner wall of the mounting hole 421 is provided with a support protrusion 423, the support protrusion 423 extends along the circumferential direction of the mounting hole 421, and the upper end of the joint 41 is provided with a limit portion 411, and the limit portion 411 extends along the circumferential direction of the joint 41. Thus, the joint 41 can extend into the mounting hole 421 through the notch 422, and the lower end of the limit portion 411 abuts against the upper end of the support protrusion 423, so that the chuck 42 can limit the joint 41, and the assembly of the joint 41 and the chuck 42 is realized, and the joint 41 and the chuck 42 are easy to install and disassemble, which is conducive to improving the assembly effect, and at the same time, it is convenient for the chuck 42 to be connected with other structures to meet different connection requirements. The structure of the joint 41 and the chuck 42 is simple, which is conducive to reducing the production cost.

[0100] In some embodiments, Figure 3 and Figure 5 As shown, the lower end of the joint 41 can be connected to the upper end of the fixing member 311 of the rod-shaped structure extending in the up-down direction; or, the lower end of the joint 41 can be connected to the upper end of the feeding barrel 50; or, there can be two joints 41, the lower end of one of the joints 41 is connected to the upper end of the fixing member 311 of the rod-shaped structure extending in the up-down direction, and the lower end of the other joint 41 is connected to the upper end of the feeding barrel 50. By replacing the joint 41 that cooperates with the chuck 42, the connection requirements of the chuck 42 and different structures can be realized, which can meet the usage requirements in different situations.

[0101] In some embodiments, the chuck 42 may be a stainless steel chuck. The stainless steel has good high temperature resistance, meets the use requirements of the chuck 42 , and is conducive to extending the service life of the chuck 42 .

[0102] In some embodiments, the joint 41 and the suspension rod assembly 31 may be connected by threads to ensure that the joint 41 and the suspension rod assembly 31 are reliably connected and easy to disassemble.

[0103] According to some embodiments of the present invention, Figure 3 , Figure 5 , Figure 6 and Figure 8 As shown, a flange 424 is provided on the outer peripheral wall of the chuck 42, and the flange 424 extends along the circumferential direction of the chuck 42, which is beneficial to improve the structural strength of the chuck 42. The lifting rod 32 also includes a sleeve 43, which is sleeved outside the supporting protrusion 423 and the limiting portion 411, and the lower end of the sleeve 43 abuts against the upper end of the flange 424. The sleeve 43 can limit the joint 41 to prevent the joint 41 from falling out of the chuck 42, ensuring that the joint 41 is reliably fixed in the chuck 42, and the flange 424 can limit the sleeve 43 to ensure that the sleeve 43 is reliably fixed on the chuck 42 to prevent it from falling off.

[0104] In some embodiments of the present invention, Figure 2 As shown, the lower end surface of the protective member 20 extends to below the lower end surface of the water-cooling screen 12, so that the protective member 20 can more reliably protect the water-cooling screen 12, effectively isolate the splashed silicon material from falling on the water-cooling screen 12, avoid the silicon material from adhering to the water-cooling screen 12 and affecting the use of the water-cooling screen 12, and ensure the good production quality of the single crystal.

[0105] Other structures and operations of the splash protection device 100 and the single crystal furnace 200 according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail here.

[0106] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0107] In the description of this specification, the description with reference to the terms "embodiment", "specific embodiment", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0108] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A splash-proof device for a single crystal furnace, characterized in that: The single crystal furnace comprises a crucible and a water-cooling screen arranged above the crucible, wherein the water-cooling screen is annular, and the splash-proof device comprises: A protective member, wherein the protective member is detachably disposed in the water-cooling shield, the protective member is formed in a ring shape and covers at least the inner circumferential wall of the water-cooling shield at one end close to the crucible, the protective member comprises a first protective layer and a second protective layer in a thickness direction, the first protective layer and the second protective layer are both formed in a ring shape, the first protective layer and the second protective layer are stacked, and the first protective layer is located on a side of the second protective layer away from the water-cooling shield.

2. The splash-proof device for a single crystal furnace according to claim 1, characterized in that: The inner peripheral wall of the water-cooling panel includes an inclined section, which is formed in a ring shape. In the direction from bottom to top, the inclined section extends obliquely in a direction away from the central axis of the water-cooling panel. The protective member includes in the up and down directions: The abutting portion is formed in a ring shape. In a direction from bottom to top, the abutting portion extends obliquely toward the radial outward direction of the water-cooling panel to abut against the inner peripheral wall of the water-cooling panel.

3. The splash-proof device for a single crystal furnace according to claim 2, characterized in that: The inner peripheral wall of the water-cooling screen further includes a straight section, which is formed into a ring shape, the upper end of which is connected to the lower end of the inclined section, and the straight section has the same inner diameter in the up and down directions. The protective member further includes in the up and down directions: The first straight tube portion is formed into a ring shape, the upper end of the first straight tube portion is connected to the lower end of the abutment portion, the first straight tube portion has the same outer diameter in the up and down directions, and the first straight tube portion is located in the straight tube section.

4. The splash-proof device for a single crystal furnace according to claim 2, characterized in that: The protective member further comprises in the up and down directions: The second straight tube portion is formed in a ring shape, the lower end of the second straight tube portion is connected to the upper end of the abutting portion, and the second straight tube portion has the same inner diameter in the up-down direction.

5. The splash-proof device for a single crystal furnace according to claim 1, characterized in that: The protective member further comprises, in the thickness direction: A third protective layer is located on a side of the second protective layer away from the first protective layer.

6. The splash-proof device for a single crystal furnace according to claim 5, characterized in that: The second protective layer is a metal part or a carbon-carbon part; And / or, the first protective layer and the third protective layer are silicon parts, graphite parts, carbon-carbon parts, silicon carbide parts, fiber-reinforced ceramic matrix composite parts, silicon nitride or quartz parts.

7. The splash-proof device for a single crystal furnace according to claim 1, characterized in that: The single crystal furnace includes a seed crystal rope, and the splash-proof device also includes: A suspension rod assembly, the upper end of which is connected to the seed crystal rope, the suspension rod assembly is suitable for being movably arranged in the water-cooling screen in the up-down direction so as to place the protective element in the water-cooling screen, and the suspension rod assembly is detachably connected to the protective element.

8. The splash-proof device for a single crystal furnace according to claim 7, characterized in that: A connecting portion is provided on the inner circumferential wall of the protective member, and the suspension rod assembly includes a fixing member and a mating segment provided on the fixing member, the upper end of the fixing member is connected to the seed crystal rope, one end of the mating segment is connected to the fixing member, and the other end of the mating segment extends radially outward from the fixing member, the connecting portions are multiple and are arranged at intervals along the circumferential direction of the protective member, the mating segments are multiple and are arranged at intervals along the circumferential direction of the fixing member, and the multiple mating segments are detachably connected to the multiple connecting portions.

9. The splash-proof device for a single crystal furnace according to claim 8, characterized in that: The fixing member is formed into a rod-shaped structure extending in an up-down direction.

10. The splash-proof device for a single crystal furnace according to claim 8, characterized in that: The fixing member is formed as a charging cylinder, and one end of the matching section is connected to the outer peripheral wall of the charging cylinder.

11. The splash-proof device for a single crystal furnace according to claim 8, characterized in that: The plurality of matching sections match the plurality of connecting parts in a one-to-one correspondence; Alternatively, the multiple connecting parts are multiple groups, each group of connecting parts includes multiple connecting parts, the multiple connecting parts in the multiple groups of connecting parts are alternately arranged along the circumferential direction of the protective member, and the multiple connecting parts in each group of connecting parts are matched with the multiple matching sections one by one.

12. The splash-proof device for a single crystal furnace according to claim 1, characterized in that: The lower end surface of the protective member extends below the lower end surface of the water-cooling shield.

13. A single crystal furnace, characterized in that: The invention comprises a splash-proof device for a single crystal furnace according to any one of claims 1 to 12.

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