A multi-axis rotating center coplanar microscope and its adjustment method

Abstract

The present invention relates to a multi-axis rotation center coplanar microscope and a debugging method, wherein a multi-axis rotation center coplanar microscope comprises a whole machine support, the whole machine support is equipped with a No. 1 adjustment assembly, the No. 1 adjustment assembly comprises a No. 1 turntable, the No. 1 turntable is equipped with a No. 2 adjustment assembly, the No. 2 adjustment assembly comprises a No. 2 turntable, the No. 2 turntable can move along the first axis direction and the vertical direction, and the No. 2 turntable is equipped with a stage; the whole machine support is also equipped with an optical high-power microscope microscope assembly, the optical high-power microscope microscope assembly comprises an optical high-power microscope microscope assembly, and the optical high-power microscope microscope assembly is located directly above the stage. The technical solution of the present invention can improve the existing optical microscope platform, which has the problem of deflection and defocusing at low magnification, and needs to be refocused after defocusing to find the characteristic field of view, while the high-power magnification microscope has no turntable and cannot be deflected for observation.

Description

Technical Field

[0001] The present invention relates to the technical field of optical microscopic imaging, and in particular to a multi-axis rotation center coplanar microscope and a debugging method. Background Art

[0002] Existing optical microscope equipment is mainly divided into two categories: ordinary optical 3D microscopes and high-power optical microscopes.

[0003] Ordinary optical 3D microscopes generally include a microscope base, a load support and tilt frame fixed on the top of the base, and a movable stage. The tilt frame can be used to fix the focusing imaging lens, and the lens can be fine-tuned up and down with the focusing knob until the focal plane is adjusted to the observation surface. Ordinary optical 3D microscopes have a small magnification, a large depth of field, and their platforms are often single-axis platforms. The characteristic is that the deflection defocus becomes more obvious as the lens magnification increases. During the deflection observation process, the focus position needs to be fine-tuned several times after the deflection lens is defocused to make the field of view clear, and finally the observation point is translated to the center of the field of view.

[0004] A high-power optical microscope generally includes a microscope base, a carrier support and a magnifying mirror frame above the fixed base, and a movable stage. The magnifying mirror frame can fix the focusing imaging lens, and the lens can be fine-tuned up and down with the focusing knob until the focal plane is adjusted to the observation surface. Because the depth of field of a high-power optical microscope is small, the deviation between the center of the rotating shaft and the focus center of the high-power mirror is large, and it is easy to cause defocus during the optional offset process, and the image cannot be found. Therefore, this type of high-power microscope is often set to a fixed lens, and image information at each deflection angle cannot be observed. Summary of the invention

[0005] The present invention aims to solve the technical problems that the existing optical microscope platform will deflect and defocus at low magnification and needs to be refocused to find the feature field of view after defocusing, while the high-magnification microscope has no turntable and cannot be deflected for observation. A multi-axis rotation center coplanar microscope and a debugging method are provided.

[0006] The technical solution of the present invention to solve the above technical problems is as follows:

[0007] On the one hand, the present invention provides a multi-axis rotation center coplanar microscope, including an entire machine support, the entire machine support is equipped with an adjustment assembly No. 1, the adjustment assembly No. 1 includes a turntable No. 1 rotatably mounted on the entire machine support with a first axis as the center axis, the turntable No. 1 is equipped with an adjustment assembly No. 2, the adjustment assembly No. 2 includes a turntable No. 2 rotatably mounted on the turntable No. 1 with a second axis as the center axis, the turntable No. 2 can move along the first axis direction and the vertical direction, the first axis and the second axis are perpendicular to each other and are located in the same horizontal plane, the turntable No. 2 is equipped with a stage; the entire machine support is also equipped with an optical high-power microscope assembly, the optical high-power microscope assembly includes an optical high-power microscope component that can move vertically and along the second axis direction, and the optical high-power microscope component is located directly above the stage.

[0008] The beneficial effects of the present invention are as follows: during detection, the object to be detected is fixed on the stage, and then the position of the stage in the first axis direction and the vertical direction is adjusted by combining the movement of the No. 2 turntable along the first axis direction and the vertical direction, and the position of the stage in the second axis direction and the vertical direction can be adjusted by moving the optical high-power microscope microscope assembly in the vertical direction and the second axis direction, so as to achieve the focusing of the optical high-power microscope microscope assembly relative to the first axis and the second axis, so that the stage only needs to adjust the position of the lens relative to the No. 1 turntable and the No. 2 turntable for the first time, and only the height of the optical high-power microscope microscope assembly needs to be adjusted to adapt to samples of different heights when replacing different samples for detection and observation in the later stage, so that the features of the center of the field of view can be observed from various angles without more debugging steps, so as to improve the problem that the existing optical microscope platform will deflect out of focus at low magnification, and needs to refocus to find the characteristic field of view after defocusing; at the same time, in the focusing process, the No. 1 turntable and / or the No. 2 turntable can be driven to rotate, so that the stage and the object to be observed are deflected by a certain angle, so as to improve the technical problem that the existing high-power magnification microscope has no turntable and cannot be deflected for observation.

[0009] Based on the above technical solution, the present invention can also be improved as follows.

[0010] Furthermore, the No. 2 adjustment assembly also includes a turntable longitudinal sliding seat installed on the No. 1 turntable and a turntable fixed seat vertically slidably connected to the turntable longitudinal sliding seat, both ends of the turntable longitudinal sliding seat in the vertical direction are threadedly connected to the No. 1 turntable screw, the ends of the two No. 1 turntable screws are both abutted against the turntable fixed seat, and the No. 2 turntable is rotatably installed on the turntable fixed seat.

[0011] The beneficial effect of adopting the above further scheme is: when the position of the No. 2 turntable is moved vertically so that the second axis of the No. 2 turntable is focused on the optical high-power microscope assembly, the turntable fixing seat can be moved in the vertical direction by manually tightening the two No. 1 turntable screws to achieve vertical movement of the stage.

[0012] Furthermore, the No. 2 adjustment assembly also includes a turntable seat, which is slidably connected to the turntable fixing seat along the first axial direction, and the turntable fixing seat is threadedly connected with at least one No. 2 turntable screw, the length direction of the No. 2 turntable screw extends along the first axial direction, and the No. 2 turntable screw abuts against the turntable seat, and the No. 2 turntable is rotatably installed on the No. 2 turntable and rotatably installed on the turntable seat.

[0013] The beneficial effect of adopting the above further scheme is: when the position of the No. 2 turntable is moved along the first axis direction so that the second axis of the No. 2 turntable is focused on the optical high-power microscope assembly, the turntable fixing seat can be moved along the first axis direction by manually tightening the No. 2 turntable screw, thereby realizing the vertical movement of the stage.

[0014] Furthermore, it also includes a longitudinal turntable installed on the second turntable, the longitudinal turntable includes a vertically movable fine-tuning slide, and the loading platform is installed on the fine-tuning slide.

[0015] The beneficial effect of adopting the above further scheme is that while adjusting the position of the stage by rotating turntable No. 1 and turntable No. 2 and moving the optical high-power microscope assembly in the vertical direction and in the direction of the second axis, the movement and adjustment of the stage in the vertical direction can be achieved by vertical movement of the fine-tuning slide to achieve the purpose of rapid focusing.

[0016] Furthermore, the longitudinal turntable also includes a slide seat and a micrometer adjuster installed on the slide seat, the fine-tuning slide is vertically slidably installed on the slide seat and connected to the control end of the micrometer adjuster, and the slide seat is installed on the second turntable.

[0017] The beneficial effect of adopting the above further solution is that when the vertical movement adjustment of the sample carrier is achieved by vertical movement of the fine-tuning slide, the movement of the fine-tuning slide and the sample carrier can be precisely controlled by the micrometer adjuster.

[0018] Furthermore, the optical high-power microscope assembly also includes a lens fine-tuning main seat installed on the whole machine bracket and a lens longitudinal shift slide that can be slidably connected to the lens fine-tuning main seat along the second axis direction. The lens fine-tuning main seat is threadedly connected to two opposite No. 1 lens screws, and the two No. 1 lens screws are respectively abutted against both sides of the horizontal direction of the lens longitudinal shift slide, and the optical high-power microscope assembly is installed on the lens longitudinal shift slide.

[0019] The beneficial effect of adopting the above further scheme is that when adjusting the optical high-power microscope microscope assembly to make it focus on the first axis of the No. 1 turntable, the two No. 1 lens screws can be screwed to make the lens longitudinal slide and the optical high-power microscope microscope assembly move simultaneously along the second axis direction until the focusing of the optical high-power microscope microscope assembly and the first axis of the No. 1 turntable is completed.

[0020] Furthermore, the optical high-power microscope assembly also includes a lens fixing seat vertically slidably connected to the lens longitudinal shift slide, and the upper and lower ends of the lens longitudinal shift slide are both threadedly connected with a No. 2 lens screw, and the two No. 2 lens screws are respectively abutted against the upper and lower ends of the lens longitudinal shift slide, and the optical high-power microscope assembly is installed on the lens fixing seat.

[0021] The beneficial effect of adopting the above further scheme is that when adjusting the optical high-power microscope microscope assembly to focus on the first axis of the No. 1 turntable and / or the second axis of the No. 2 turntable, the optical high-power microscope microscope assembly can be moved in the vertical direction by screwing the two No. 1 and No. 2 lens screws to achieve focusing.

[0022] On the other hand, the present invention provides a debugging method for a multi-axis rotation center coplanar microscope, which is applied to the multi-axis rotation center coplanar microscope, and comprises the following steps:

[0023] Fix the object to be tested on the stage;

[0024] Controlling the optical high-power microscope microscopic assembly to move in the vertical direction until the focal plane center of the lens of the optical high-power microscope microscopic assembly is focused on the first axis;

[0025] The second turntable is controlled to move in the direction of the first axis until the second axis is focused on the center of the lens focal plane of the optical high-power microscope component.

[0026] Further, the step of controlling the optical high-power microscope assembly to move in the vertical direction until the focal plane center of the optical high-power microscope assembly is focused on the first axis specifically includes:

[0027] Control the No. 1 turntable to rotate a preset angle value e to obtain the focal plane center offset distance value A1 of the No. 1 turntable on the optical high-power microscope microscope assembly, and obtain the vertical offset distance value C of the first axis relative to the focal plane center of the lens according to the focal plane center offset distance value A1. According to the vertical offset distance value C, control the optical high-power microscope microscope assembly to move the distance value C in the vertical direction until the focal plane center of the lens of the optical high-power microscope microscope assembly is focused on the first axis.

[0028] Further, the step of controlling the second turntable to move in the direction of the first axis until the second axis is focused on the center of the focal plane of the lens of the optical high-power microscope assembly specifically includes:

[0029] Control the No. 2 turret to rotate by a preset angle value f, obtain the No. 2 turret focal plane center offset distance value A2 on the optical high-power microscope microscope assembly, obtain the horizontal offset distance value D of the second axis relative to the focal plane center of the lens according to the No. 2 turret focal plane center offset distance value A2, and control the No. 2 turret to move the distance value D in the horizontal direction according to the horizontal offset distance value D until the focal plane center of the lens of the optical high-power microscope microscope assembly is focused on the second axis;

[0030] The preset angle value e is equal to the preset angle value f. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 An axonometric diagram of the multi-axis rotation center coplanar microscope of the present invention;

[0032] Figure 2 An exploded view of the multi-axis rotation center coplanar microscope of the present invention;

[0033] Figure 3 for Figure 2 A first partial enlarged view of;

[0034] Figure 4 for Figure 2 A second partial enlarged view of;

[0035] Figure 5 It is a schematic diagram of the adjustment of the debugging method of the multi-axis rotation center coplanar microscope of the present invention;

[0036] Figure 6 It is a flow chart of the debugging method of the multi-axis rotation center coplanar microscope of the present invention;

[0037] Figure 7 The microscopic result image shows that the test sample is placed in the center of the field of view and focused;

[0038] Figure 8 Limit diagram for testing sample deflection to preset angle value.

[0039] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0040] 1. Whole machine bracket;

[0041] 2. No. 1 adjustment assembly; 21. No. 1 turntable; 22. Rotating arm; 23. Fixed ring;

[0042] 3. No. 2 adjustment assembly; 31. No. 2 turntable; 32. Turntable longitudinal sliding seat; 321. No. 1 turntable screw; 33. Turntable fixing seat; 331. Adapter plate; 332. Sliding arm; 34. Turntable holder; 35. No. 2 turntable screw;

[0043] 4. Longitudinal turntable; 41. Fine adjustment slide; 42. Slide seat; 43. Micrometer adjuster;

[0044] 5. stage; 51. mounting seat;

[0045] 6. Optical high-power microscope assembly; 61. Optical high-power microscope component; 611. Optical high-power lens; 612. Industrial imaging camera; 62. Lens fine-tuning main seat; 621. No. 1 lens screw; 622. Main seat plate; 623. Base plate; 624. Cushion; 63. Lens longitudinal sliding seat; 631. No. 2 lens screw; 64. Lens fixing seat. DETAILED DESCRIPTION

[0046] The principles and features of the present invention are described below. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.

[0047] In one aspect, the present invention provides a multi-axis rotating center coplanar microscope, as described in detail below.

[0048] Example 1

[0049] like Figure 1 and Figure 2 A multi-axis rotation center coplanar microscope comprises a whole machine support 1, the whole machine support 1 is equipped with a No. 1 adjustment assembly 2, the No. 1 adjustment assembly 2 comprises a No. 1 turntable 21 which is rotatably mounted on the whole machine support 1 with a first axis as the center axis, the No. 1 turntable 21 is equipped with a No. 2 adjustment assembly 3, the No. 2 adjustment assembly 3 comprises a No. 2 turntable 31 which is rotatably mounted on the No. 1 turntable 21 with a second axis as the center axis, the No. 2 turntable 31 can move along the first axis direction and the vertical direction, the first axis and the second axis are perpendicular to each other and are located on the same horizontal plane, the No. 2 turntable 31 is equipped with a stage 5; the whole machine support 1 is also equipped with an optical high-power microscope assembly 6, the optical high-power microscope assembly 6 comprises an optical high-power microscope component 61 which can move vertically and along the second axis direction, and the optical high-power microscope component 61 is located directly above the stage 5.

[0050] The beneficial effect of this embodiment is that during the inspection, the object to be inspected is fixed on the stage 5, and then the position of the stage 5 in the first axis direction and the vertical direction is adjusted by combining the movement of the second turntable 31 along the first axis direction and the vertical direction, and the position of the stage 5 in the second axis direction and the vertical direction can be adjusted by moving the optical high-power microscope microscope assembly 61 in the vertical direction and the second axis direction, so that the focusing of the optical high-power microscope microscope assembly 61 relative to the first axis and the second axis is achieved, so that the stage 5 only needs to adjust the lens relative to the position of the first turntable 21 and the second turntable 31 for the first time When changing to different samples for inspection and observation at a later time, it is only necessary to adjust the height of the optical high-power microscope assembly 61 to adapt to samples of different heights, and the features of the center of the field of view can be observed from various angles without more debugging steps, so as to improve the problem that the existing optical microscope platform will deflect out of focus at low magnification, and after defocusing, it is necessary to refocus and find the characteristic field of view; at the same time, during the focusing process, the first turntable 21 and / or the second turntable 31 can be driven to rotate, so that the stage 5 and the object to be observed are deflected by a certain angle, thereby improving the technical problem that the existing high-power magnification microscope has no turntable and cannot be deflected for observation.

[0051] Through the above observation method, after high magnification at a fixed point, the angles in all directions can be directly offset for observation. This method can also be used to quickly and accurately measure the distance deviation between the focal plane of the lens and the axis of the turntable and the axes of two orthogonal turntables, which can be used for high-precision debugging and compensation of dual axes.

[0052] As a specific solution of the above embodiment, the optical high-power microscope assembly 61 includes an optical high-power lens 611 and an industrial imaging camera 612 installed at the observation end of the optical high-power lens 611. The optical high-power lens 611 is installed at the upper end of the whole machine bracket 1, and is provided with a lens system (including an eyepiece and an objective lens), a focusing system, a lens barrel, and a spacer and a pressure ring.

[0053] When in use, under the action of the optical high-power lens 611, observation is performed through the industrial imaging camera 612. The optical high-power lens 611 achieves magnified observation of the object to be observed through the refraction of the lens system and the adjustment function of the focusing system.

[0054] Based on the above embodiment, the first turntable 21 is equipped with a rotating arm 22 , one end of the rotating arm 22 is fixedly connected to the first turntable 21 , and the second adjustment assembly 3 is installed on the other end of the rotating arm 22 .

[0055] When the loading platform 5 is adjusted by rotating the first turntable 21 , the rotating first turntable 21 drives the rotating arm 22 to rotate, so as to indirectly adjust the angle of the loading platform 5 .

[0056] A fixing ring 23 is sleeved and rotatably connected to the outer side of the first turntable 21 . The fixing ring 23 is fixedly mounted on the whole machine bracket 1 by bolts to realize the rotatable installation of the first turntable 21 relative to the whole machine bracket 1 .

[0057] The rotation of the first turntable 21 and the second turntable 31 can be realized manually, by a motor or the like.

[0058] In the embodiment of the present invention, the first axis direction refers to extending along the X direction, the second axis direction refers to extending along the Y direction, and the vertical direction refers to extending along the Z direction.

[0059] It should be noted that when the first turntable 21 rotates, the second turntable 31 and the stage 5 can be driven to rotate synchronously. That is, in this embodiment, the second turntable 31 can move along the first axis direction and the vertical direction, wherein the "vertical direction" refers to the direction perpendicular to the second axis direction of the second turntable 31.

[0060] Example 2

[0061] like Figure 2 and Figure 3 On the basis of Example 1, the No. 2 adjustment assembly 3 also includes a turntable longitudinal sliding seat 32 installed on the No. 1 turntable 21 and a turntable fixed seat 33 vertically slidably connected to the turntable longitudinal sliding seat 32. Both ends of the turntable longitudinal sliding seat 32 in the vertical direction are threadedly connected to the No. 1 turntable screw 321, and the ends of the two No. 1 turntable screws 321 are both abutted against the turntable fixed seat 33. The No. 2 turntable 31 is rotatably installed on the turntable fixed seat 33.

[0062] The beneficial effect of adopting the preferred scheme in the above embodiment is that when the position of the No. 2 turntable 31 is moved vertically so that the second axis of the No. 2 turntable 31 is focused on the optical high-power microscope assembly 61, the turntable fixing seat 33 can be moved in the vertical direction by manually tightening the two No. 1 turntable screws 321 to achieve vertical movement of the stage 5.

[0063] Based on the above embodiment, a first dovetail groove is provided on the turntable longitudinal sliding seat 32, and folding plates are fixedly connected to the upper and lower ends of the turntable longitudinal sliding seat 32 to achieve threaded connection of the two No. 1 turntable screws 321 through the two folding plates.

[0064] The turntable fixing seat 33 includes an adapter plate 331 and two sliding arms 332. One end of the adapter plate 331 in the thickness direction is adapted and slidably connected to the first dovetail groove on the turntable longitudinal sliding seat 32, and the upper and lower ends are respectively abutted against the ends of the two No. 1 turntable screws 321 to realize the vertical sliding of the adapter plate 331 through the No. 1 turntable screw 321.

[0065] The two sliding arms 332 are both arranged transversely and are respectively fixedly connected to the upper and lower ends of the adapter plate 331 by bolts. A second dovetail groove is provided on the sides of the two sliding arms 332 facing each other.

[0066] Example 3

[0067] like Figure 2 and Figure 3 On the basis of Examples 1 and 2, the No. 2 adjustment assembly 3 also includes a turntable holder 34, which is slidably connected to the turntable fixing seat 33 along the first axis direction, and the turntable fixing seat 33 is threadedly connected with at least one No. 2 turntable screw 35, the length direction of the No. 2 turntable screw 35 extends along the first axis direction, and the No. 2 turntable screw 35 abuts against the turntable holder 34, and the No. 2 turntable 31 is rotatably installed on the No. 2 turntable 31 and is rotatably installed on the turntable holder 34.

[0068] The beneficial effect of adopting the preferred scheme in the above embodiment is that when the position of the No. 2 turntable 31 is moved along the first axis direction so that the second axis of the No. 2 turntable 31 is focused on the optical high-power microscope assembly 61, the turntable fixing seat 33 can be moved along the first axis direction by manually tightening the No. 2 turntable screw 35, thereby realizing the vertical movement of the stage 5.

[0069] On the basis of the above embodiment, dovetail blocks are formed on both the upper and lower sides of the turntable holder 34 to slide and fit into the second dovetail grooves of the two sliding arms 332 to achieve sliding connection. Flangings are fixedly connected to the cantilever ends of the two sliding arms 332 to achieve threaded connection of the two No. 2 turntable screws 35 through the two flanges, so that the ends of the two No. 2 turntable screws 35 abut against the turntable holder 34 at the same time to achieve the adjustment of the spacing between the turntable holder 34 and the whole machine bracket 1.

[0070] Example 4

[0071] like Figure 2 and Figure 3 On the basis of Examples 1-3, the multi-axis rotation center coplanar microscope further includes a longitudinal turntable 4 mounted on the second turntable 31 , the longitudinal turntable 4 includes a vertically movable fine-tuning slide 41 , and the stage 5 is mounted on the fine-tuning slide 41 .

[0072] The beneficial effect of adopting the preferred scheme in the above embodiment is that while adjusting the position of the stage 5 by the rotation of the No. 1 turntable 21 and the No. 2 turntable 31, and the movement of the optical high-power microscope component 61 in the vertical direction and the second axis direction, the vertical movement of the stage 5 can be achieved by the vertical movement of the fine-tuning slide 41 to achieve the purpose of quickly achieving focusing.

[0073] On the basis of the above embodiment, a mounting seat 51 is fixedly connected to the end of the stage 5 , and the mounting seat 51 is fixedly connected to the fine-tuning slide 41 by bolts, so as to realize the replacement of the stage 5 .

[0074] Example 5

[0075] like Figure 2 and Figure 3 On the basis of embodiments 1-4, the longitudinal turntable 4 also includes a slide seat 42 and a micrometer adjuster 43 installed on the slide seat 42, the fine-tuning slide 41 is vertically slidably installed on the slide seat 42 and connected to the control end of the micrometer adjuster 43, and the slide seat 42 is installed on the second turntable 31.

[0076] The beneficial effect of adopting the preferred solution in the above embodiment is that when the vertical movement adjustment of the worktable 5 is achieved by the vertical movement of the fine-tuning slide 41, the movement of the fine-tuning slide 41 and the worktable 5 can be accurately controlled by the micrometer adjuster 43.

[0077] Example 6

[0078] like Figure 2 and Figure 4 On the basis of Examples 1-5, the optical high-power microscope assembly 6 also includes a lens fine-tuning main seat 62 installed on the whole machine bracket 1 and a lens longitudinal shift slide 63 that can be slidably connected to the lens fine-tuning main seat 62 along the second axis direction. The lens fine-tuning main seat 62 is threadedly connected to two opposite No. 1 lens screws 621, and the two No. 1 lens screws 621 are respectively abutted against the two sides of the lens longitudinal shift slide 63 in the horizontal direction, and the optical high-power microscope assembly 61 is installed on the lens longitudinal shift slide 63.

[0079] The beneficial effect of adopting the preferred scheme in the above embodiment is that when adjusting the optical high-power microscope microscope assembly 61 to make it focus on the first axis of the No. 1 turntable 21, the two No. 1 lens screws 621 can be screwed to make the lens longitudinal slide 63 and the optical high-power microscope microscope assembly 61 move simultaneously along the second axis direction until the focusing of the optical high-power microscope microscope assembly 61 and the first axis of the No. 1 turntable 21 is completed.

[0080] Based on the above embodiment, the lens fine-tuning main seat 62 includes a main seat plate 622 and at least one transversely arranged base plate 623. A plurality of cushion sleeves 624 are arranged between the main seat plate 622 and the whole machine bracket 1, and a plurality of bolts are penetrated through the main seat plate 622, and the bolts pass through the cushion sleeves 624 and are threadedly connected to the whole machine bracket 1, so as to realize the interval installation of the main seat plate 622.

[0081] Each base plate 623 is mounted on the main base plate 622 by bolts. A third dovetail groove is provided on the side of the base plate 623 away from the main base plate 622, and the third dovetail groove extends along the second axis. The lens longitudinal shift slide 63 is formed with a dovetail block that is simultaneously adapted to and slidably connected to the third dovetail groove of the base plate 623, so as to realize the sliding installation of the lens longitudinal shift slide 63.

[0082] Ear plates are fixed at both ends of the main seat plate 622 in the horizontal direction, so that the two No. 1 lens screws 621 can be threadedly connected to the two ear plates respectively, so that the rods of the two No. 1 lens screws 621 are respectively in contact with the two sides of the lens longitudinal sliding seat 63 in the horizontal direction.

[0083] Example 7

[0084] like Figure 2 and Figure 4 On the basis of Examples 1-6, the optical high-power microscope assembly 6 also includes a lens fixing seat 64 vertically slidably connected to the lens longitudinal movement slide 63, and the upper and lower ends of the lens longitudinal movement slide 63 are both threadedly connected with No. 2 lens screws 631, and the two No. 2 lens screws 631 are respectively abutted against the upper and lower ends of the lens longitudinal movement slide 63, and the optical high-power microscope assembly 61 is installed on the lens fixing seat 64.

[0085] The beneficial effect of adopting the preferred scheme in the above embodiment is that when adjusting the optical high-power microscope microscope assembly 61 so that it is focused on the first axis of the No. 1 turntable 21 and / or the second axis of the No. 2 turntable 31, the optical high-power microscope microscope assembly 61 can be moved in the vertical direction by screwing the two No. 1 and No. 2 lens screws 631 to achieve focusing.

[0086] On the basis of the above embodiment, a fourth dovetail groove is also provided on the side of the lens longitudinal shift slide 63 away from the base plate 623. The fourth dovetail groove extends in the vertical direction, and a dovetail block adapted to and slidably connected to the fourth dovetail groove is formed at one end of the lens fixing seat 64. Ear plates are fixedly connected to both ends of the upper end of the lens longitudinal shift slide 63 to respectively realize the threaded connection of the two No. 2 lens screws 631, so that the rods of the two No. 2 lens screws 631 are respectively abutted against the upper and lower sides of the lens fixing seat 64.

[0087] On the other hand, the present invention provides a debugging method for a multi-axis rotation center coplanar microscope, which is described in detail below.

[0088] Example 8

[0089] like Figure 5 and Figure 6 A debugging method for a multi-axis rotation center coplanar microscope is applied to a multi-axis rotation center coplanar microscope as described in Examples 1-7, comprising the following steps:

[0090] Fix the object to be tested on the stage 5;

[0091] Controlling the optical high-power microscope component 61 to move in the vertical direction until the focal plane center of the lens of the optical high-power microscope component 61 is focused on the first axis;

[0092] The second turntable 31 is controlled to move in the direction of the first axis until the second axis is focused on the center of the lens focal plane of the optical high-power microscope assembly 61 .

[0093] The beneficial effect of adopting the preferred scheme in the above embodiment is that, through the movement of the optical high-power microscope microscope assembly 61 and the movement of the second turntable 31, the optical high-power microscope microscope assembly 61 can quickly focus on the center of the focal plane of the lens, and in multiple detection processes, it is only necessary to adjust the height of the optical high-power microscope microscope assembly 61 to achieve refocusing, thereby reducing the focusing operation, so as to improve the problem that the existing optical microscope platform will deviate from focus due to low magnification, and needs to refocus after defocusing to find the feature field of view.

[0094] Example 9

[0095] like Figure 5 and Figure 6 Based on Example 8, the steps of controlling the optical high-power microscope assembly 61 to move in the vertical direction until the focal plane center of the optical high-power microscope assembly 61 is focused on the first axis specifically include:

[0096] Control the No. 1 turret 21 to rotate a preset angle value e to obtain the No. 1 turret focal plane center offset distance value A1 on the optical high-power microscope microscope assembly 61, and obtain the vertical offset distance value C of the first axis relative to the lens focal plane center based on the No. 1 turret focal plane center offset distance value A1. Based on the vertical offset distance value C, control the optical high-power microscope microscope assembly 61 to move a distance value C in the vertical direction until the lens focal plane center of the optical high-power microscope microscope assembly 61 is focused on the first axis.

[0097] The beneficial effect of adopting the preferred scheme in the above embodiment is that when performing the focusing operation of the focal plane center of the lens of the optical high-power microscope microscope assembly 61 and the first axis, the No. 1 turntable 21 is first controlled to rotate to the preset angle value e, and the No. 1 turntable center offset distance value A1 corresponding to the optical high-power microscope microscope assembly 61 can be used to obtain the vertical offset distance value C that the optical high-power microscope microscope assembly 61 should actually move vertically downward, so that the optical high-power microscope microscope assembly 61 is moved vertically downward by the vertical offset distance value C, and the focal plane center of the lens of the optical high-power microscope microscope assembly 61 can be quickly focused on the first axis, so as to solve the technical problem that the high-power microscope microscope has no turntable and cannot be deflected for observation.

[0098] In this embodiment, the vertical offset distance value C can be obtained by formula (m), and the formula (m) is as follows:

[0099] (m)

[0100] Wherein, e is the preset rotation angle value of the first turntable 21 , A1 is the center offset distance value of the first turntable; and K is the lens magnification of the optical high-power microscope component 61 .

[0101] Example 10

[0102] like Figure 5 and Figure 6 On the basis of embodiments 8 and 9, the steps of controlling the second turntable 31 to move in the direction of the first axis until the second axis is focused on the center of the focal plane of the lens of the optical high-power microscope assembly 61 specifically include:

[0103] Control the No. 2 turret 31 to rotate by a preset angle value f, obtain the No. 2 turret focal plane center offset distance value A2 on the optical high-power microscope microscope assembly 61, obtain the horizontal offset distance value D of the second axis relative to the focal plane center of the lens according to the No. 2 turret focal plane center offset distance value A2, and control the No. 2 turret 31 to move the distance value D in the horizontal direction according to the horizontal offset distance value D until the focal plane center of the lens of the optical high-power microscope microscope assembly 61 is focused on the second axis;

[0104] The preset angle value e is equal to the preset angle value f.

[0105] The beneficial effect of adopting the preferred scheme in the above embodiment is that after the optical high-power microscope microscope assembly 61 is adjusted downward to move the vertical offset distance value C so that the focal plane center of the lens of the optical high-power microscope microscope assembly 61 is focused on the first axis, the focusing operation of the focal plane center of the lens of the optical high-power microscope microscope assembly 61 and the second axis is performed; at this time, when the focusing operation of the focal plane center of the lens of the optical high-power microscope microscope assembly 61 and the first axis is performed, the No. 2 turntable 31 is first controlled to rotate by a preset angle value f, and the No. 2 turntable center offset distance value A2 corresponding to the optical high-power microscope microscope assembly 61 can be used to obtain the horizontal offset distance value D that the optical high-power microscope microscope assembly 61 should actually move vertically downward, so that the No. 2 turntable 31 is horizontally moved by the horizontal offset distance value D, and the rapid focusing of the focal plane center of the lens of the optical high-power microscope microscope assembly 61 and the second axis can be achieved, so as to further solve the technical problem that the high-power microscope microscope has no turntable and cannot be deflected for observation.

[0106] In this embodiment, the horizontal offset distance value D can be obtained by formula (n), and the formula (n) is as follows:

[0107] (n)

[0108] Wherein, f is the preset rotation angle value of the second turntable 31 , A2 is the center offset distance value of the second turntable; and K is the lens magnification of the optical high-power microscope component 61 .

[0109] For example, the present application uses a chrome-plated photoetched cross-transmitting quartz plate as the observation and inspection object, and the slit width of the inspection sample chrome-plated photoetched cross-transmitting quartz plate is 0.1mm, and the edge straight line accuracy is 0.5um; the optical high-power lens 611 used is black and white 12 million pixels, the resolution is 1282pxX1026pxCMOS, and it is a 20X optical magnification lens.

[0110] By using the coplanar microscope and debugging method of the present invention, finally, the detection sample is placed in the center of the field of view and focused as shown in the figure Figure 7 As shown, the detection sample deflection preset angle value e / f is as follows Figure 8 shown.

[0111] It can be seen that the image of the center point of the field of view of the offset No. 1 turntable 21 and the No. 2 turntable 31 is clear and the intersection of the engraved lines is fixed.

[0112] The coplanar microscope reduces the coplanar error of the two axes to 1.56um through a 20X optical magnification lens and a test sample. When a lens with a larger magnification is used, the intersection accuracy of the axes of the first turntable 21 and the second turntable 31 can be further improved.

[0113] The coplanar microscope only needs to adjust the positions of the optical high-power microscope assembly 61 and the No. 1 turntable 21 and the No. 2 turntable 31 for the first time. When changing to different samples for inspection and observation later, it is only necessary to adjust the height of the optical high-power microscope assembly 61 (to adapt to samples of different heights). The characteristics of the center of the field of view can be observed from various angles without the need for more debugging steps.

[0114] By adopting the multi-axis rotation center coplanar microscope and debugging method of the present invention, the following technical effects are achieved:

[0115] 1. Solve the problem of difficulty in debugging the shaft and rotation defocus when installing a high-power microscope;

[0116] 2. Two orthogonal turntables can dynamically deflect the center of the observation field to magnify the detailed features;

[0117] 3. Can accurately calculate the distance deviation between the focal plane of the lens and the axis of the turntable and the axes of two orthogonal turntables;

[0118] 4. No complicated adjustment is required in the later stage, and it can be used as batch automatic fixed-point amplification detection equipment;

[0119] 5. The adjustment accuracy of the coplanarity of the rotation centers of two or more axes has been improved to within 2um.

[0120] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0121] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0122] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0123] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0124] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0125] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A debugging method for a multi-axis rotation center coplanar microscope, characterized in that: The following steps are involved: Fixing the object to be tested on the stage (5); Controlling the optical high-power microscope component (61) to move in a vertical direction until the focal plane center of the lens of the optical high-power microscope component (61) is focused on the first axis; Controlling the second turntable (31) to move in the direction of the first axis until the second axis is focused on the center of the lens focal plane of the optical high-power microscope assembly (61); The steps of controlling the optical high-power microscope component (61) to move in the vertical direction until the focal plane center of the lens of the optical high-power microscope component (61) is focused on the first axis specifically include: Controlling the first turntable (21) to rotate by a preset angle value e, obtaining a focal plane center offset distance value A1 of the first turntable on the optical high-power microscope microscope assembly (61), obtaining a vertical offset distance value C of the first axis relative to the focal plane center of the lens according to the focal plane center offset distance value A1, and controlling the optical high-power microscope microscope assembly (61) to move a distance value C in a vertical direction according to the vertical offset distance value C until the focal plane center of the lens of the optical high-power microscope microscope assembly (61) is focused on the first axis; A multi-axis rotation center coplanar microscope comprises a whole machine support (1), the whole machine support (1) is equipped with a first adjustment assembly (2), the first adjustment assembly (2) comprises a first turntable (21) rotatably mounted on the whole machine support (1) with a first axis as the center axis, the first turntable (21) is equipped with a second adjustment assembly (3), the second adjustment assembly (3) comprises a second turntable (31) rotatably mounted on the first turntable (21) with a second axis as the center axis, the The second turntable (31) is movable along a first axis and in a vertical direction, the first axis and the second axis are perpendicular to each other and are located on the same horizontal plane, the second turntable (31) is installed with a stage (5); the whole machine support (1) is also installed with an optical high-power microscope assembly (6), the optical high-power microscope assembly (6) comprises an optical high-power microscope component (61) that is movable vertically and along a second axis, and the optical high-power microscope component (61) is located directly above the stage (5).

2. The debugging method of a multi-axis rotation center coplanar microscope according to claim 1, characterized in that: The step of controlling the second turntable (31) to move in the direction of the first axis until the second axis is focused on the center of the focal plane of the lens of the optical high-power microscope assembly (61), specifically comprises: Controlling the second turret (31) to rotate by a preset angle value f, obtaining a focal plane center offset distance value A2 of the second turret on the optical high-power microscope microscope assembly (61), obtaining a horizontal offset distance value D of the second axis relative to the focal plane center of the lens according to the focal plane center offset distance value A2, and controlling the second turret (31) to move by a distance value D in the horizontal direction according to the horizontal offset distance value D, until the focal plane center of the lens of the optical high-power microscope microscope assembly (61) is focused on the second axis; The preset angle value e is equal to the preset angle value f.

3. The debugging method of a multi-axis rotation center coplanar microscope according to claim 1, characterized in that: The second adjustment assembly (3) also includes a turntable longitudinal sliding seat (32) installed on the first turntable (21) and a turntable fixing seat (33) vertically slidably connected to the turntable longitudinal sliding seat (32), both ends of the turntable longitudinal sliding seat (32) in the vertical direction are threadedly connected to the first turntable screw rod (321), the ends of the two first turntable screw rods (321) are both abutted against the turntable fixing seat (33), and the second turntable (31) is rotatably installed on the turntable fixing seat (33).

4. The debugging method of a multi-axis rotation center coplanar microscope according to claim 3 is characterized in that: The second adjustment assembly (3) further comprises a turntable holder (34), wherein the turntable holder (34) is slidably connected to the turntable fixing seat (33) along the first axis direction, and the turntable fixing seat (33) is threadedly connected with at least one second turntable screw (35), wherein the length direction of the second turntable screw (35) extends along the first axis direction, and the second turntable screw (35) abuts against the turntable holder (34), and the second turntable (31) is rotatably mounted on the turntable holder (34).

5. The debugging method of a multi-axis rotation center coplanar microscope according to claim 1, characterized in that: It also includes a longitudinal turntable (4) mounted on the second turntable (31), the longitudinal turntable (4) including a vertically movable fine-tuning slide (41), and the object carrier (5) is mounted on the fine-tuning slide (41).

6. The debugging method of a multi-axis rotation center coplanar microscope according to claim 5, characterized in that: The longitudinal turntable (4) further comprises a slide seat (42) and a micrometer adjuster (43) mounted on the slide seat (42); the fine adjustment slide (41) is vertically slidably mounted on the slide seat (42) and connected to a control end of the micrometer adjuster (43); the slide seat (42) is mounted on the second turntable (31).

7. The debugging method of a multi-axis rotation center coplanar microscope according to claim 1, characterized in that: The optical high-power microscope assembly (6) also includes a lens fine-tuning main seat (62) mounted on the whole machine bracket (1) and a lens longitudinal movement slide seat (63) slidably connected to the lens fine-tuning main seat (62) along the second axis direction, the lens fine-tuning main seat (62) is threadedly connected to two opposite No. 1 lens screws (621), the two No. 1 lens screws (621) are respectively abutted against two sides of the lens longitudinal movement slide seat (63) in the horizontal direction, and the optical high-power microscope assembly (61) is mounted on the lens longitudinal movement slide seat (63).

8. The debugging method of a multi-axis rotation center coplanar microscope according to claim 7, characterized in that: The optical high-power microscope assembly (6) also includes a lens fixing seat (64) vertically slidably connected to the lens longitudinal movement slide (63), and the upper and lower ends of the lens longitudinal movement slide (63) are both threadedly connected with a No. 2 lens screw (631), and the two No. 2 lens screws (631) are respectively abutted against the upper and lower ends of the lens longitudinal movement slide (63), and the optical high-power microscope assembly (61) is installed on the lens fixing seat (64).

Images