Control apparatus, control method, control system, lithography apparatus, and method of manufacturing article

Abstract

The invention provides a control apparatus, a control method, a control system, a lithographic apparatus, and a method of manufacturing an article. The control device is used for controlling a plurality of nodes connected to a network. The control apparatus includes: a communication unit configured to transmit / receive a data frame including a plurality of data regions respectively allocated to the nodes at a predetermined period via the network; and a setting unit configured to, in a case where a first data region arranged as a data region of a first node among the plurality of data regions is not used in a first period, allocate the first data region as a data region of a second node different from the first node in the first period. The communication unit causes the second node to read the response data written to the first data area in the first cycle.

Description

Technical Field

[0001] The present invention relates to a control device, a control method, a storage medium, a control system, a photolithography device and a method for manufacturing an article. Background Art

[0002] Japanese Patent Laid-Open No. 2022-108621 discloses a technology for transmitting / receiving data about an abnormality in a unit controlled by a controlled device without delay while reliably transmitting / receiving control data between a master device and a controlled device.

[0003] Sometimes, a system is required to obtain information about a unit controlled by a controlled device, which is configured to send / receive data between a master device and a controlled device at a predetermined cycle. In this case, since data for information about the unit needs to be sent / received between the master device and the controlled device in addition to the control data, the amount of data sent / received per cycle increases.

[0004] When the amount of data sent / received per cycle increases, sometimes the sending / receiving of data cannot be completed within one cycle (one communication cycle), and sometimes the data is sent / received across multiple cycles. In this case, the processing of the controlled device that should normally be executed within one cycle is executed across multiple cycles, thereby delaying the operation of the system. Summary of the invention

[0005] The present invention provides a technique that is advantageous for suppressing a delay in transmission / reception of data between a master device and a controlled device.

[0006] The present invention, in its first aspect, provides a control device for controlling multiple nodes connected to a network, the control device comprising: a communication unit, which is constructed to send / receive data frames via the network at a predetermined cycle, the data frames including multiple data areas respectively assigned to the nodes; and a setting unit, which is constructed to allocate a first data area among the multiple data areas, which is scheduled as the data area of ​​a first node, as the data area of ​​a second node different from the first node in the first cycle, when the first data area is not used in the first cycle, wherein the communication unit enables the second node to read out response data written to the first data area in the first cycle.

[0007] The present invention, in its second aspect, provides a control method for controlling multiple nodes connected to a network, the control method comprising the following sending / receiving steps: sending / receiving data frames via the network at a predetermined cycle, the data frames comprising multiple data areas respectively assigned to the nodes, wherein the sending / receiving steps include: in a case where a first data area among the multiple data areas, which is arranged as a data area of ​​a first node, is not used in a first cycle, in the first cycle, the first data area is assigned as a data area of ​​a second node different from the first node, and the second node reads out response data written to the first data area in the first cycle.

[0008] The present invention, in its third aspect, provides a computer-readable storage medium storing a program for causing a computer to execute a control method for controlling multiple nodes connected to a network, the program including instructions for causing the computer to execute the following sending / receiving steps: sending / receiving data frames via the network at a predetermined cycle, the data frames including multiple data areas respectively assigned to the nodes, wherein the sending / receiving steps include: in a case where a first data area of ​​the multiple data areas arranged as a data area of ​​a first node is not used in a first cycle, in the first cycle, the first data area is assigned as a data area of ​​a second node different from the first node, and the second node reads out response data written to the first data area in the first cycle.

[0009] The present invention, in its fourth aspect, provides a control system comprising a plurality of nodes connected to a network and a control device configured to control the plurality of nodes, wherein the control device comprises: a communication unit configured to send / receive data frames at a predetermined cycle via the network, the data frames comprising a plurality of data areas respectively assigned to the nodes; and a setting unit configured to, when a first data area of ​​the plurality of data areas arranged as a data area of ​​a first node is not used in a first cycle, allocate the first data area as a data area of ​​a second node different from the first node in the first cycle, and the communication unit enables the second node to read out response data written to the first data area in the first cycle.

[0010] The present invention, in its fifth aspect, provides a lithography device for forming a pattern on a substrate, the lithography device comprising a control system defined in the fourth aspect above, wherein each of a plurality of nodes of the control system controls a unit, the unit being constructed to perform at least part of the process of forming a pattern on the substrate.

[0011] The present invention, in its sixth aspect, provides a method for manufacturing an article, the method comprising: forming a pattern on a substrate by using the lithography device defined in the fifth aspect above; processing the substrate on which the pattern is formed; and manufacturing an article based on the processed substrate.

[0012] Further features of the present invention will become apparent from the following description of exemplary embodiments (with reference to the attached drawings). BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a block diagram illustrating the configuration of the system;

[0014] Figure 2 is a block diagram illustrating the configuration of a master control device;

[0015] Figure 3 is a block diagram illustrating a functional configuration of a processing unit of a main control device;

[0016] Figure 4 is a block diagram illustrating the configuration of a controlled device;

[0017] Figure 5 is a block diagram illustrating a functional configuration of a processing unit of a controlled device;

[0018] Figure 6 is a diagram illustrating a data flow between a master control device and a plurality of controlled devices;

[0019] Figure 7 is a diagram illustrating a data region of a data frame;

[0020] Figure 8 is a diagram illustrating the flow of data when obtaining the status of a unit;

[0021] Fig. 9 is a diagram for explaining an example of writing status data in free space;

[0022] Fig.10 is a diagram illustrating the flow of data when obtaining the status of a unit;

[0023] Fig.11 is a flowchart illustrating a process of setting a data frame by a master control device;

[0024] Fig.12 is a diagram for explaining an example of writing status data in an unused area and a free area;

[0025] Fig.13 is a flowchart illustrating a process of writing status data in a data frame by a controlled device;

[0026] Fig.14 is a diagram illustrating the flow of data when obtaining the status of a unit;

[0027] Fig.15 is a flowchart illustrating a process in which a master device changes a process of a unit according to status data of a controlled device; and

[0028] Fig.16 It is a block diagram illustrating the structure of an exposure device. DETAILED DESCRIPTION

[0029] Hereinafter, the embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments are not intended to limit the scope of the present invention. A plurality of features are described in the embodiments, but are not limited to the invention requiring all of these features, and these features may be appropriately combined. In addition, in the accompanying drawings, the same reference numerals are given to the same or similar configurations, and redundant descriptions thereof are omitted.

[0030] <First Embodiment>

[0031] (system)

[0032] Figure 1 The configuration of a control system 100 as one aspect of the present disclosure is illustrated. The control system 100 may include a master control device 110, a plurality of controlled devices (a plurality of nodes), and a plurality of units. Figure 1 In the case shown in , the plurality of controlled devices may include a first control device 121, a second control device 122, and a third control device 123. The plurality of units may include a unit 131, a unit 132, and a unit 133. However, it should be noted that the number of controlled devices and the number of units are not limited to a specific number. One controlled device may have a form of controlling two or more units. Therefore, the number of units may be equal to or more than the number of control devices.

[0033] The first control device 121, the second control device 122, and the third control device 123 are control devices (control nodes) that respectively control the unit 131, the unit 132, and the unit 133. The master control device 110, the first control device 121, the second control device 122, and the third control device 123 are connected to each other via the network 140. The master control device 110 controls the first control device 121, the second control device 122, and the third control device 123 via the network 140. As described above, the first control device 121, the second control device 122, and the third control device 123 are control devices that respectively control the unit 131, the unit 132, and the unit 133. On the other hand, from the perspective of the master control device 110, the first control device 121, the second control device 122, and the third control device 123 are each a controlled device controlled by the master control device 110.

[0034] The main control device 110 and the plurality of controlled devices are each implemented by a general or special computer including a program. Alternatively, the main control device 110 and the plurality of controlled devices are each implemented by an application-specific integrated circuit (ASIC) or a programmable logic device (PLD) such as a field programmable gate array (FPGA). Alternatively, the main control device 110 and the plurality of controlled devices are each implemented by a combination of all or some of a computer, a PLD and an ASIC. For example, each of the plurality of units (unit 131, unit 132 and unit 133) may be an element or component (e.g., a relay, a sensor, a servo motor or an actuator). Alternatively, each of the plurality of units may be a module (e.g., a positioning mechanism) composed of a plurality of elements or components or a device composed of a plurality of modules. Note that the controlled device and the unit controlled by the controlled device may be integrated.

[0035] The master device 110 and the plurality of controlled devices may be connected using the network 140 to form a daisy chain. In the daisy chain, the first control device 121 is disposed between the master device 110 and the second control device 122. In the daisy chain, the second control device 122 is disposed between the first control device 121 and the third control device 123.

[0036] Figure 2 The configuration of the main control device 110 is illustrated. The main control device 110 may include a processing unit (processor) 200, a ROM 210, a RAM 220, a storage device 230, an input device 240, a display device 250, and a communication device 260. The processing unit 200 includes a central processing unit (CPU) that operates based on an operating system and an application program. In addition to the central processing unit (CPU), the processing unit 200 may also include additional devices such as a microprocessing unit (MPU), a graphics processing unit (GPU), or an application-specific integrated circuit (ASIC).

[0037] Each of ROM 210, RAM 220 and storage device 230 is in the form of a memory. For example, ROM 210 stores permanent data in the calculation data and the program to be executed by the processing unit 200. RAM 220 provides a working area of ​​the processing unit 200 and a temporary storage area for data. ROM 210 and RAM 220 are connected to the processing unit 200 via bus 270. Input device 240 includes pointing devices such as a mouse and a keyboard. Display device 250 provides a function of displaying information. All or part of input device 240 and display device 250 can be formed as an integrated device such as a touch panel. Storage device 230 can be, for example, any one or more of a hard disk device, a CD, a DVD and a memory card. Storage device 230 stores programs, data, etc. Input device 240, display device 250 and storage device 230 are connected to bus 270 via interfaces (not shown), respectively. The communication device 260 functions as a transmitter that sends data and a receiver that receives data, and, for example, receives response data from a transmitter (not shown) in a controlled device and stores the data in a receive buffer defined in the processing unit 200, RAM 220, or storage device 230.

[0038] Figure 3 The functional configuration of the processing unit 200 of the master device 110 is illustrated. The processing unit 200 includes a control unit 201, a communication unit 202, a setting unit 203, and a determination unit 204. The control unit 201 performs a readout process of reading out the response data sent from the controlled device from the receiving buffer. In addition, the control unit 201 performs a control process: generating command data for controlling the controlled device based on the response data read out from the receiving buffer. The control unit 201 also performs a write process: writing the command data for controlling the controlled device into the sending buffer.

[0039] The communication unit 202 is configured to send / receive a data frame at a predetermined period via the network 140, the data frame including a plurality of data areas respectively allocated to a plurality of controlled devices (nodes). The communication unit 202 controls: a sending process of sending command data to the controlled device and a receiving process of receiving data (such as response data and status data) from the controlled device. The communication unit 202 transfers data extracted from a data frame sent from the controlled device to the master control device 110 and received by the communication device 260 to a receiving buffer. In addition, the communication unit 202 transfers data sent from the master control device 110 to the controlled device from the sending buffer to the communication device 260, and writes the data into the data frame. The receiving buffer and the sending buffer are areas for temporarily storing data, and may be defined in the storage space of the processing unit 200, or defined in the storage space of the RAM 220 or the storage device 230.

[0040] The setting unit 203 is configured to set the definition of multiple data areas constituting the data frame based on the network configuration information. The network configuration information is pre-created by a user in the main control device 110 or other information processing device, for example, and stored in the ROM 210 or storage device 230 of the main control device 110.

[0041] The determination unit 204 determines whether the data received from the communication unit 202 meets a preset condition. If the determination unit 204 determines that the received data meets the condition, a process of changing the control of the controlled device is performed. An example of the process of changing the control will be described later.

[0042] Figure 4 The arrangement of the first control device 121, the second control device 122 and the third control device 123 (controlled device) is illustrated. The controlled device may include a processing unit (processor) 300, a ROM 310, a RAM 320, a storage device 330 and a communication device 360. The processing unit 300 includes a central processing unit (CPU) that operates based on an operating system and an application program. In addition to the central processing unit (CPU), the processing unit 300 may also include additional devices such as a microprocessing unit (MPU), a graphics processing unit (GPU) and an application-specific integrated circuit (ASIC).

[0043] ROM 310, RAM 320 and storage device 330 are each a form of memory. For example, ROM 310 stores permanent data in operation data and a program to be executed by processing unit 300. RAM 320 provides a working area of ​​processing unit 300 and a storage area for temporarily storing data. ROM 310 and RAM 320 are connected to processing unit 300 via bus 370. Storage device 330 may be, for example, any one or more of a hard disk drive, a CD, a DVD, a memory card, etc. Storage device 330 stores programs, data, etc. Storage device 230 is connected to bus 370 via an interface (not shown). Communication device 360 ​​serves as a sending unit that sends data and a receiving unit that receives data.

[0044] Figure 5The configuration of the processing unit 300 of each of the first control device 121, the second control device 122, and the third control device 123 (controlled device) is illustrated. The processing unit 300 may include a communication unit 301, a unit control unit 302, and a determination unit 303. The communication unit 301 is configured to send / receive a data frame including a plurality of data areas at a predetermined cycle. The communication unit 301 sends / receives data such as command data, response data, and status data to / from the master control device 110 via the data frame. In addition, the communication unit 301 sends the command data received from the master control device 110 to the unit control unit 302. The communication unit 301 writes the data received from the unit control unit 302 into the data frame, thereby sending the data to the master control device 110. The unit control unit 302 controls the corresponding unit (for example, the unit 131 in the case of the unit control unit 302 of the first control device 121) according to the data received from the communication unit 301. The determination unit 303 determines whether its own status data area is set in the data frame.

[0045] As Figure 1 The example of network 140 shown will be described as an industrial of exist In the process, the master control device 110 connected to the network sends data frames to multiple controlled devices, and the multiple controlled devices instantly read data from the data frames received from the master control device and instantly write data in the data frames received from the master control device. At this time, process data object communication (PDO communication) and service data object communication (SDO communication) are used for communication between the master control device and multiple controlled devices. PDO communication is communication performed at a predetermined cycle using data called process data objects (PDO). SDO communication is communication performed in response to a request from the master control device to the controlled device using data called service data objects (SDO). In PDO communication, since the data frame is transmitted at a predetermined cycle (for example, every 1 millisecond), the arrival time of the data is ensured. On the other hand, in SDO communication, since the communication is not always completed within one cycle, the arrival time of the data cannot be ensured.

[0046] If adopted As the network 140, at least one node among nodes connected to the network 140 functions as the master device 110, and the remaining nodes function as controlled devices. The node functioning as the master device 110 manages (controls) communication timing of data frames in the network 140, and the like.

[0047] exist Figure 1In the control system 100 shown, the master control device 110 writes the command data for the first control device 121, the second control device 122, and the third control device 123 into the data frame of the PDO communication, and sends the data frame to the first control device 121. When the first control device 121 receives the data frame from the master control device 110, it reads the command data assigned to the first control device 121 from the command data written into the data frame, and writes the response data to the read command data into the data frame. Then, the first control device 121 sends a data frame to the second control device 122, in which the response data to the command data assigned to the first control device 121 has been written. When the second control device 122 receives the data frame from the first control device 121, it reads the command data assigned to the second control device 122 from the command data written into the data frame, and writes the response data to the read command data into the data frame. The second control device 122 reads the command data assigned to the second control device 122, and writes the response data corresponding to the command data into the data frame. Then, the second control device 122 sends a data frame to the third control device 123, in which the response data to the command data assigned to the second control device 122 has been written. When receiving the data frame from the second control device 122, the third control device 123 reads the command data assigned to the third control device 123 from the command data written in the data frame, and writes the response data to the read command data into the data frame. Then, the third control device 123 sends a data frame to the master control device 110 via the second control device 122 and the first control device 121, in which the response data to the command data assigned to the third control device 123 has been written.

[0048] In the control system 100 configured to send / receive data between the above-mentioned master control device and a plurality of controlled devices in a predetermined cycle, with the emergence of, for example, a multi-axis industrial robot with many joints, the number of controlled devices and units tends to increase. In this case, a large amount of data (command data and response data) must be sent / received between the master control device 110 and the plurality of controlled devices, so the amount of data sent / received per cycle increases. In addition, in order to obtain the state of the unit controlled by the controlled device, in addition to the command data and the response data, it is also necessary to send / receive status data between the master control device 110 and the plurality of controlled devices, and the status data indicates information about the state of the unit. However, a certain limit is usually imposed on the amount of data that can be sent / received per cycle. Therefore, as the amount of data sent / received per cycle increases, the sending / receiving of data cannot be completed within one cycle (one communication cycle), so the data is sent / received across multiple cycles. In this case, the control processing of the controlled device that should be performed within one cycle is performed across multiple cycles (that is, one command data is sent after being divided into multiple cycles), thereby causing a delay in the operation of the control system 100. Such delays in the operation of the control system 100 may become noticeable particularly when status data indicating information about such status of the unit needs to be sent from the controlled device to the master device 110 to obtain the status of the unit.

[0049] (Free space usage)

[0050] Will refer to Figure 6 A control method of controlling a plurality of controlled devices (a plurality of nodes) using the master control device 110 is described. Figure 6 The data flow in the communication between the master device 110 and a plurality of controlled devices is illustrated. Figure 6 The case in FIG. 1 illustrates five controlled devices (a first control device 121, a second control device 122, a third control device 123, a fourth control device 124, and a fifth control device 125) as controlled devices communicably connected to the main control device 110. Note that the number of controlled devices is not limited to five, and may be six or more, for example.

[0051] The communication between the master device and a plurality of controlled devices will be described first. This communication step is a step of transmitting / receiving a data frame including a plurality of data areas allocated to each controlled device (node) via the network 140 at a predetermined cycle.

[0052] In the first cycle processing, the control unit 201 of the master device 110 sends command data about the first control device 121, the second control device 122, the third control device 123, the fourth control device 124, and the fifth control device 125 to the communication unit 202. The communication unit 202 of the master device 110 sends a data frame to the first control device 121 via the network 140 (step S101). The communication unit 301 of the first control device 121 reads the command data assigned to itself from the command data written in the data frame, receives the response data corresponding to the command data from the unit control unit 302, and writes the data into the data frame. The communication unit 301 of the first control device 121 sends a data frame to the second control device 122, and writes the response data corresponding to the command data assigned to itself in the data frame (step S102). In addition, the communication unit 301 of the first control device 121 sends the command data to the unit control unit 302.

[0053] The communication unit 301 of the second control device 122 that receives the data frame from the first control device 121 reads out the command data assigned to itself from the command data written in the data frame. After that, the communication unit 301 of the second control device 122 receives the response data corresponding to the read command data from the unit control unit 302, and writes the data into the data frame. The communication unit 301 of the second control device 122 sends a data frame to the third control device 123, and writes the response data corresponding to the command data assigned to itself in the data frame (step S103). In addition, the communication unit 301 of the second control device 122 sends the command data to the unit control unit 302.

[0054] The communication unit 301 of the third control device 123 that has received the data frame from the second control device 122 reads out the command data assigned to itself from the command data written in the data frame. After that, the communication unit 301 of the third control device 123 receives the response data corresponding to the read command data from the unit control unit 302, and writes the data into the data frame. Then, the communication unit 301 of the third control device 123 sends a data frame to the fourth control device 124, in which the response data corresponding to the command data assigned to itself is written (step S104). In addition, the communication unit 301 of the third control device 123 sends the command data to the unit control unit 302.

[0055] The communication unit 301 of the fourth control device 124 that has received the data frame from the third control device 123 reads out the command data assigned to itself from the command data written in the data frame. After that, the communication unit 301 of the fourth control device 124 receives the response data corresponding to the read command data from the unit control unit 302, and writes the data into the data frame. The communication unit 301 of the fourth control device 124 sends a data frame to the fifth control device 125, in which the response data corresponding to the command data assigned to itself is written (step S105). In addition, the communication unit 301 of the fourth control device 124 sends the command data to the unit control unit 302.

[0056] The communication unit 301 of the fifth control device 125 that receives the data frame from the fourth control device 124 reads out the command data assigned to itself from the command data written in the data frame. After that, the communication unit 301 of the fifth control device 125 receives the response data corresponding to the read command data from the unit control unit 302, and writes the data into the data frame. The communication unit 301 of the fifth control device 125 sends a data frame to the master control device 110, in which the response data corresponding to the command data assigned to itself is written. The sending is performed via the fourth control device 124, the third control device 123, the second control device 122, and the first control device 121 (step S106, step S107, step S108, step S109, and step S110). In addition, the communication unit 301 of the fifth control device 125 sends the command data to the unit control unit 302.

[0057] The communication unit 202 of the master device 110 reads the response data of the first control device 121 , the second control device 122 , the third control device 123 , the fourth control device 124 , and the fifth control device 125 written in the data frame, and sends the data to the control unit 201 .

[0058] Subsequently, the second cycle process is executed. Since steps S111 to S120 in the second cycle process are the same as steps S101 to S110 in the first cycle process, the description of the process will be omitted.

[0059] Will refer to Figure 7 Describes data frames sent / received via the network 140. Figure 7 The data area of ​​the data frame sent from the master control device 110 to the first control device 121, the second control device 122, the third control device 123, the fourth control device 124 and the fifth control device 125 is illustrated. Figure 7As illustrated, the data frame of the first cycle is allocated with the data area of ​​the first control device 121, the second control device 122, and the third control device 123. The data area of ​​the fourth control device 124 and the fifth control device 125 is not allocated to the data frame of the first cycle. Similarly, the data area of ​​the first control device 121, the second control device 122, and the third control device 123 is allocated to each of the data frame of the second cycle and the data frame of the third cycle. However, the data area of ​​the fourth control device 124 and the fifth control device 125 is also not allocated to the data frame of the second cycle and the data frame of the third cycle. However, it should be noted that in each of the data frames of the first cycle, the second cycle, and the third cycle, the space area 1 is previously secured.

[0060] Next, we will refer to Figure 8 A control method of controlling a plurality of nodes is described. Communication in the case of obtaining the state of a unit will be described below. Figure 8 The data flow in the communication in the case of obtaining the state of the unit which is the control object of the fourth control device 124 and the fifth control device 125 is illustrated. Figure 6 and thus their detailed description will be omitted. Fig. 9 The data area of ​​the data frame in the case of obtaining the status of the unit is illustrated. In the first cycle processing, the status data of the fourth control device 124 (second node) and the status data of the fifth control device 125 (third node) are sent to the main control device 110. In this case, the status data of the fourth control device 124 and the status data of the fifth control device 125 are preferably written into the space area 1 of the respective data frames. Fig. 9As shown, the total size of the status data of the fourth control device 124 and the status data of the fifth control device 125 is larger than the size of the spatial area 1 of the data frame of the first cycle, so the two data cannot be written into the spatial area 1 in one cycle. Therefore, in the first cycle processing, only the fourth control device 124 writes its own status data into the spatial area 1 of the data frame. Then, the communication unit 301 of the fourth control device 124 sends the data frame with its own status data written to it to the master control device 110 via the third control device 123, the second control device 122, and the first control device 121 (steps S107, S108, S109, and S110). Thereafter, in the second cycle processing, the fifth control device 125 writes its own status data into the spatial area 1 of the data frame. Then, the communication unit 301 of the fifth control device 125 sends the data frame with its own status data written to it to the master control device 110. This transmission is performed via the fourth control device 124, the third control device 123, the second control device 122, and the first control device 121 (step S116, step S117, step S118, step S119, and step S120).

[0061] In order to obtain the status of each unit in this way, the spatial region 1 of the data frame can be used. If the size of the status data to be obtained is larger than the size of the spatial region 1, the communication cannot be completed in one cycle, and multiple cycles are required.

[0062] (Use of unused area in data area)

[0063] Fig.10 The data flow in the communication in the case where the master device 110 obtains the state of the unit is illustrated. Figure 6 In this case, it is assumed that the master control device 110 controls the first control device 121 and the third control device 123 in the first cycle and obtains the status data of the fourth control device 124 and the fifth control device 125, and the master control device 110 controls the second control device 122 in the second cycle. Fig.10 As described in detail below, in the first cycle, the state data of the fifth control device 125 is written to the spatial area 1 (step S106), and the state data of the fourth control device 124 is written to an unused area different from the spatial area 1 (step S107).

[0064] Fig.11 This is an example of the main control device 110 Fig.10 The processing unit 200 (its respective units) executes Fig.11. In step S11, the control unit 201 determines whether to control the controlled device, that is, whether to send command data to the controlled device. This determination is made, for example, by determining whether the timing for sending command data to the controlled device is met. If the control unit 201 determines in step S11 that the timing for sending command data to the controlled device is met, the processing proceeds to step S12. In step S12, the control unit 201 writes the command data for controlling the controlled device into the sending buffer. Thereafter, the processing returns to step S11. If the control unit 201 determines in step S11 that the timing for sending command data to the controlled device has not been met, the processing proceeds to step S13. In step S13, the setting unit 203 sets the data area of ​​the controlled device in the data frame to the status data area of ​​other controlled devices for obtaining the status of the unit. Thereafter, the processing returns to step S11.

[0065] In step S13, the setting unit 203 can determine the state data area of ​​the specific controlled device to be set for the data area of ​​the controlled device in the data frame based on the sampling rate of the state data of each control node (controlled device). In this case, the sampling rate indicates, for example, the sampling period of the sensor when obtaining the sensor value as the state data. For example, the setting unit 203 can preferably set the controlled device that obtains the sensor value with a high sampling rate as the object of the state data area.

[0066] In addition, the setting unit 203 can determine the state data area of ​​the specific controlled device to which the data area of ​​the controlled device in the data frame is set based on the operating state of each of the multiple controlled devices (multiple nodes). For example, the setting unit 203 can preferably set the controlled device in operation as the object of the state data area.

[0067] In addition, the setting unit 203 can determine the state data area of ​​the specific controlled device to which the data area of ​​the controlled device of the data frame is set based on the command data sent by the main control device 110 to the controlled device. For example, the setting unit 203 can preferably set the controlled device to which the operation command data is sent as the object of the state data area.

[0068] Will refer to Fig.12 Describes data frames sent / received via the network 140. Fig.12 The data area of ​​the data frame transmitted from the master control device 110 to the first control device 121, the second control device 122, the third control device 123, the fourth control device 124, and the fifth control device 125 in each cycle is illustrated. In this case, it is assumed that the master control device 110 controls the first control device 121 and the third control device 123 in the first cycle, controls the second control device 122 in the second cycle, and controls the second control device 122 and the third control device 123 in the third cycle.

[0069] The data frame of the first cycle is originally allocated with data areas of the first control device 121, the second control device 122, and the third control device 123, and has a spatial area 1. However, in this case, since the master control device 110 does not control the second control device 122 in the first cycle, the data area of ​​the second control device 122 in the data frame is not used, and there is an unused area 1, such as Fig.12 shown.

[0070] In addition, the data frame of the second cycle is originally allocated with data areas of the first control device 121, the second control device 122, and the third control device 123, and has a spatial area 1. However, in this case, in the second cycle, the master control device 110 does not control the first control device 121 and the third control device 123. Therefore, the data areas of the first control device 121 and the third control device 123 in the data frame are not used, and thus there are unused areas 1 and 2, such as Fig.12 shown.

[0071] Likewise, the data frame of the third cycle is allocated with data areas of the first control device 121, the second control device 122, and the third control device 123, and has a spatial area 1. However, in this case, in the third cycle, since the master control device 110 does not control the first control device 121, the data area of ​​the first control device 121 is not used, and an unused area 1 exists.

[0072] In the first cycle processing, the master control device 110 allocates the space area 1 and the unused area 1 which was originally the data area of ​​the second control device 122 as the data area of ​​the fourth control device 124 and the data area of ​​the fifth control device 125. According to the allocation, the fourth control device 124 writes the status data to the unused area 1, and the fifth control device 125 writes the status data to the space area 1.

[0073] In the second cycle processing, the master control device 110 allocates the unused area 1 and the unused area 2, which were originally the data area of ​​the first control device 121 and the data area of ​​the third control device 123, as the data area of ​​the fourth control device 124 and the data area of ​​the fifth control device 125. According to the allocation, the fourth control device 124 writes the status data to the unused area 1, and the fifth control device 125 writes the status data to the unused area 2.

[0074] In the third cycle processing, the master control device 110 allocates the space area 1 and the unused area 1 which was originally the data area of ​​the first control device 121 as the data area of ​​the fourth control device 124 and the data area of ​​the fifth control device 125. According to the allocation, the fourth control device 124 writes the status data to the unused area 1, and the fifth control device 125 writes the status data to the space area 1.

[0075] As described above, in the present embodiment, in the case where the first data area (area 1 or 2) arranged as the data area of ​​the first node (one of the controlled devices) among the plurality of data areas is not used in the first cycle, the setting unit 203 performs dynamic allocation. More specifically, in the first cycle, the setting unit 203 allocates the first data area as the data area of ​​the second node (e.g., the fourth control device) which is different from the first node (e.g., the second control device). In addition, at this time, the setting unit 203 can allocate the spatial area 1 as the data area of ​​the third node (e.g., the fifth control device) which is different from the first node and the second node.

[0076] Fig.13 is a flowchart illustrating the process of the controlled device writing the status data into the data frame. The processing unit 300 (its various units) executes Fig.13 The steps in the flowchart of . In step S21, the determination unit 303 determines whether its own status data area is set in the data frame received from the main control device 110. More specifically, the data frame is provided with a flag, which indicates that the status data area is set for each controlled device. If the flag is set in the data frame, the determination unit 303 determines that its own status data area is set in the data frame. On the contrary, if the flag is not set in the data frame, the determination unit 303 can determine that its own status data area is not set in the data frame. In step S21, if the determination unit 303 determines that its own status data area is set in the received data frame, the processing enters step S22. In step S22, the unit control unit 302 obtains the status data of the unit and writes the status data in its own status data area set in the data frame. Thereafter, the processing returns to step S21. On the contrary, if the determination unit 303 determines that its own status data area is not set in the received data frame, the processing returns to step S21.

[0077] As described above, according to the present embodiment, in the communication between the master control device and the plurality of controlled devices, not only the spatial area in the data frame but also the unused area in the data area can be allocated as the data area of ​​each controlled device from which the status is to be obtained. This makes it possible to reduce the number of cycles required for communication. Therefore, the present embodiment is conducive to suppressing the delay in the transmission / reception of data between the master control device and the plurality of controlled devices.

[0078] <Second Embodiment>

[0079] Next, the second embodiment will be described. Note that matters not mentioned here may follow the first embodiment. In the second embodiment, the main control device 110 receives status data of the controlled devices and changes the processing of the units of other controlled devices according to the status data.

[0080] Fig.14 The data flow in the communication in the case where the master device 110 obtains the status of the unit is illustrated. Note that since the data flow in the communication between the master device 110 and a plurality of controlled devices is similar to Figure 6 , so the detailed description thereof will be omitted. In this case, it is assumed that the following control processing is performed. First, in the first cycle, the master control device 110 controls the first control device 121 and the third control device 123, and obtains the status data of the fourth control device 124 and the fifth control device 125. In the second cycle, the master control device 110 controls the first control device 121 and the second control device 122 based on the status data obtained in the first cycle. Fig.14 The data flows in this case are illustrated. Fig.14 ,and Fig.10 As in the first cycle, the status data of the fifth control device 125 is written to the spatial area 1 (step S106), and the status data of the fourth control device 124 is written to an unused area different from the spatial area 1 (step S107).

[0081] Fig.15 is a flowchart showing a process in the case where the master device 110 changes the process of the unit of the controlled device according to the state data of the controlled device. The processing unit 200 (its respective units) executes Fig.15 In step S31, the communication unit 202 reads out, from the data frame received from the controlled device, the status data of the controlled device written in the area allocated as the data area of ​​the controlled device.

[0082] In step S32, the determination unit 204 determines whether the state data of the controlled device read out in step S31 satisfies the preset condition. If the determination unit 204 determines in step S32 that the state data satisfies the condition, the process proceeds to step S33. In step S33, the control unit 201 sends command data generated based on the preset control data to the controlled device to change the control of the unit. Thereafter, the process returns to step S31. On the contrary, if the determination unit 204 determines in step S32 that the state data does not satisfy the condition, the process returns to step S31.

[0083] In the first cycle processing, the communication unit 202 of the master control device 110 reads out the status data of the area allocated as the status data area of ​​the fourth control device 124 and the fifth control device 125 from the data frame received from the first control device 121. Then, the communication unit 202 sends the status data to the determination unit 204. The determination unit 204 determines whether the status data satisfies the preset condition. Fig.14 In the case shown, since the determination unit 204 determines that the status data satisfies the preset condition, the determination unit 204 sends the preset control data to the control unit 201. Then, the control unit 201 performs a control process for generating command data for controlling the first control device 121 based on the preset control data. In addition, the control unit 201 writes the command data for controlling the first control device 121 into the transmission buffer. In this way, the main control device 110 sends command data for changing the control of the unit according to the status data read out from the status data area.

[0084] In the first control device 121, the communication unit 301 transmits the command data received from the main control device 110 to the unit control unit 302. The unit control unit 302 changes the processing of the corresponding unit according to the data received from the communication unit 301.

[0085] In addition, as a control process, the unit control unit 302 may stop the operation of the controlled device including the unit. As an exception process, the unit control unit 302 may also cause the display device 250 of the main control device 110 to display information about the abnormality that has occurred. In this case, the information about the abnormality may include information about a message notifying that the abnormality has occurred, the content or cause of the abnormality that has occurred, a coping method, and the like.

[0086] As described above, according to the present embodiment, in the communication between the master control device and a plurality of controlled devices, not only the spatial area of ​​the data frame but also the unused area in the data area can be allocated as the data area of ​​each controlled device from which the status is to be obtained. This makes it possible to reduce the cycle required for communication. Therefore, the present embodiment is conducive to controlling the delay in the transmission / reception between the master control device and the controlled devices. In addition, according to the status data of the controlled device, the control of other controlled devices can be quickly changed.

[0087] <Example of substrate processing apparatus>

[0088] An embodiment of a substrate processing device to which the control system 100 is applied will be described. This embodiment illustrates an exposure device that forms a pattern on a substrate by exposing the substrate, as a substrate processing device to which the control system 100 is applied. However, it is not limited thereto. For example, the control system 100 may be applied to substrate processing devices such as an imprinting device (which forms a pattern on an imprint material on a substrate by using a mold) and a drawing device (which forms a pattern on a substrate by irradiating the substrate with charged particle radiation). The control system 100 may also be applied to substrate processing devices such as a coating device (which coats the surface of a substrate with a photosensitive medium) and a developing device (which develops a substrate to which a pattern is transferred), as a substrate processing device to which the control system 100 is applied. In addition, the control system 100 may be applied to substrate processing devices such as a deposition device (CVD device, etc.), a processing device (laser processing device, etc.), and an inspection device (overlay detection device, etc.), as a substrate processing device to which the control system 100 is applied.

[0089] Fig.16 1 is a diagram showing the configuration of an exposure device 10 as a substrate processing device. The exposure device 10 exemplifies an exposure device that projects a pattern of a mask M onto a substrate W through a projection optical system 14 and exposes the substrate W. The exposure device 10 includes a light source 11, an illumination optical system 12, a mask stage 13, a projection optical system 14, a substrate stage 15, and a main control unit 16. In addition, the exposure device 10 includes a first drive unit 21 that drives the mask stage 13, a second drive unit 22 that drives a lens 14a of the projection optical system 14, and a third drive unit 23 that drives the substrate stage 15. The first drive unit 21, the second drive unit 22, and the third drive unit 23 are each a mechanism that performs at least a part of a process of forming a pattern on the substrate W. The mechanism is controlled by a mask stage control unit 31, a projection control unit 32, and a substrate stage control unit 33. In addition, the main control unit 16 includes, for example, a CPU (processing unit) and a storage device, and controls the entire exposure device 10 (each unit of the exposure device 10) by controlling the mask stage control unit 31, the projection control unit 32, and the substrate stage control unit 33.

[0090] The light source 11 emits exposure light. The illumination optical system 12 illuminates the mask M with the light emitted from the light source 11. The mask stage 13 may be configured to hold the mask M, and to move, for example, in the X and Y directions by the first driving unit 21. The projection optical system 14 projects the pattern of the mask M illuminated by the illumination optical system 12 onto a substrate. The projection optical system 14 includes a lens 14a that can be moved, for example, in the X and Y directions by the second driving unit 22. The substrate stage 15 may be configured to hold the substrate W, and to move, for example, in the X and Y directions by the third driving unit 23.

[0091] When the control system 100 is applied to Fig.16In the exposure device 10 shown in FIG. 1 , the main control unit 16 may be configured as the main control device 110. In addition, the mask stage control unit 31, the projection control unit 32, the substrate stage control unit 33, and the substrate stage monitoring unit 34 may each be configured as a controlled device. The first drive unit 21, the second drive unit 22, and the third drive unit 23 may each be configured as a unit (corresponding to the above-mentioned unit 131, unit 132, and unit 133). Communication between the main control unit 16, the mask stage control unit 31, the projection control unit 32, the substrate stage control unit 33, and the substrate stage monitoring unit 34 is performed at a preset cycle via the network 140.

[0092] The following describes a case where the main control device 110 communicates with the mask stage control unit 31, the projection control unit 32, the substrate stage control unit 33, and the substrate stage monitoring unit 34 as an example of a case where the control system 100 is applied to the exposure device 10. The control unit 201 performs control processing such as generating command data for controlling the mask stage control unit 31, the projection control unit 32, and the substrate stage control unit 33.

[0093] The communication unit 202 transmits the command data written into the transmission buffer by the control unit 201 to the mask stage control unit 31, the projection control unit 32, and the substrate stage control unit 33 at a predetermined cycle. The communication unit 202 receives response data corresponding to the command data from the mask stage control unit 31, the projection control unit 32, and the substrate stage control unit 33. The communication unit 202 also receives status data of the substrate stage 15 from the substrate stage monitoring unit 34.

[0094] In addition, the determination unit 204 of the main control device 110 receives the state data of the substrate stage 15 via the substrate stage monitoring unit 34 in one cycle. For example, the state data may include data indicating a state in which an abnormality occurs in the substrate stage 15. The determination unit 204 of the main control device 110 quickly changes the control of the substrate stage according to the state data of the substrate stage 15.

[0095] As described above, the control system 100 according to the present disclosure is applied to a substrate processing apparatus such as an exposure apparatus. This makes it possible to effectively suppress delays in data transmission / reception between the substrate processing apparatus and a plurality of controlled apparatuses.

[0096] <Embodiment of the method for manufacturing an article>

[0097] The method for manufacturing an article according to an embodiment of the present invention is suitable for manufacturing articles, for example, micro devices such as semiconductor devices or elements with microstructures. The method for manufacturing an article according to this embodiment includes: a step of forming a latent image pattern on a photosensitive agent coated on a substrate using the above-mentioned exposure device (a step of exposing the substrate), and a step of developing the substrate on which the latent image pattern is formed in the previous step. The manufacturing method also includes other known steps (oxidation, deposition, vapor deposition, doping, flattening, etching, removal of resist, cutting, bonding, packaging, etc.). Compared with conventional methods, the advantage of the method for manufacturing an article according to this embodiment lies in at least one of the performance, quality, productivity and production cost of the article.

[0098] Other embodiments

[0099] The embodiments of the present invention may also be implemented by reading and executing computer executable instructions (e.g., one or more programs) recorded on a storage medium (which may also be more completely referred to as a "non-transitory computer-readable storage medium") to perform one or more functions in the above-mentioned embodiments, and / or a computer of a system or device including one or more circuits (e.g., an application-specific integrated circuit (ASIC)) for performing one or more functions in the above-mentioned embodiments, and the embodiments of the present invention may be implemented by, for example, reading and executing the computer executable instructions from the storage medium by the computer of the system or device to perform one or more functions in the above-mentioned embodiments, and / or controlling the one or more circuits to perform one or more functions in the above-mentioned embodiments. The computer may include one or more processors (e.g., a central processing unit (CPU), a microprocessing unit (MPU)), and may include a network of separate computers or separate processors to read and execute the computer executable instructions. The computer executable instructions may be provided to the computer, for example, from a network or the storage medium. The storage medium may include, for example, a hard disk, a random access memory (RAM), a read-only memory (ROM), a memory of a distributed computing system, an optical disk (such as a compact disc (CD), a digital versatile disc (DVD), or a Blu-ray disc (BD) TM ), flash memory devices, memory cards, etc.

[0100] The embodiments of the present invention may also be implemented by providing software (program) for performing the functions of the above-described embodiments to a system or device via a network or various storage media, and a computer or a central processing unit (CPU) or a microprocessing unit (MPU) of the system or device reads and executes the program.

[0101] While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments.The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.

Claims

1. A control device for controlling a plurality of nodes connected to a network, the control device comprising: a communication unit configured to transmit / receive a data frame at a predetermined cycle via the network, the data frame including a plurality of data areas respectively allocated to the nodes; as well as a setting unit configured to allocate, in a case where a first data area arranged as a data area of ​​a first node among the plurality of data areas is not used in a first cycle, the first data area as a data area of ​​a second node different from the first node in the first cycle, The communication unit causes the second node to read the response data written in the first data area in the first cycle.

2. The control device according to claim 1, wherein: The second node is a control node configured to control the unit, and The setting unit allocates the first data area as a status data area in which status data indicating the status of the unit is written.

3. The control device according to claim 2, wherein: Based on the status data read out from the status data area, command data for changing control of the unit is transmitted.

4. The control device according to claim 2, wherein: The setting unit determines the second node from among the plurality of nodes based on a sampling rate of status data of each control node configured to control a unit.

5. The control device according to claim 1, wherein: The setting unit determines the second node from among the plurality of nodes based on operation states of the plurality of nodes.

6. The control device according to claim 1, wherein: The setting unit determines the second node from among the plurality of nodes based on command data to be transmitted.

7. The control device according to claim 2, wherein: The data frame also includes a pre-secured space region, and The setting unit further allocates the space area as a status data area in which status data indicating a status of a unit controlled by a third node different from the first node and the second node is written.

8. The control device according to claim 7, wherein: A total size of the state data of the second node and the state data of the third node is greater than a size of the space region.

9. The control device according to claim 1, wherein: The network is followed network.

10. A control method for controlling a plurality of nodes connected to a network, the control method comprising the following sending / receiving steps: sending / receiving a data frame at a predetermined cycle via the network, the data frame including a plurality of data areas respectively allocated to the nodes, in, The sending / receiving step includes: in a case where a first data area arranged as a data area of ​​a first node among the plurality of data areas is not used in a first cycle, allocating the first data area as a data area of ​​a second node different from the first node in the first cycle, and The second node reads the response data written in the first data area in the first cycle.

11. A computer-readable storage medium storing a program for causing a computer to execute a control method for controlling a plurality of nodes connected to a network, the program comprising instructions for causing the computer to execute the following sending / receiving steps: sending / receiving a data frame via the network at a predetermined cycle, the data frame comprising a plurality of data areas respectively allocated to the nodes, in, The sending / receiving step includes: in a case where a first data area arranged as a data area of ​​a first node among the plurality of data areas is not used in a first cycle, allocating the first data area as a data area of ​​a second node different from the first node in the first cycle, and The second node reads the response data written in the first data area in the first cycle.

12. A control system comprising a plurality of nodes connected to a network and a control device configured to control the plurality of nodes, in, The control device comprises: a communication unit configured to transmit / receive a data frame at a predetermined cycle via the network, the data frame including a plurality of data areas respectively allocated to the nodes; and a setting unit configured to, in a case where a first data area arranged as a data area of ​​a first node among the plurality of data areas is not used in a first cycle, allocate the first data area as a data area of ​​a second node different from the first node in the first cycle, and The communication unit causes the second node to read the response data written in the first data area in the first cycle.

13. A lithography apparatus for forming a pattern on a substrate, the lithography apparatus comprising the control system according to claim 12, in, Each of the plurality of nodes of the control system controls a unit configured to perform at least a portion of a process of forming a pattern on the substrate.

14. A method of manufacturing an article, the method comprising: forming a pattern on a substrate by using the photolithography apparatus according to claim 13; processing the substrate on which the pattern is formed; as well as An article is manufactured based on the processed substrate.

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