Edge holding device and photolithography equipment

Abstract

The present invention provides a clamping device and a photolithography device, wherein the clamping device comprises a driving unit, a clamping unit and a connecting unit. The driving unit is configured to drive the clamping unit to move in a direction close to the substrate to shape the edge area of ​​the substrate after the suction cup completes the adsorption of the substrate; the connecting unit is configured to cause relative movement between the clamping unit and the driving unit when the clamping unit presses the edge area and is driven by the edge area. In this way, when the driving unit drives the clamping unit to press the edge area of ​​the substrate, the clamping unit generates relative movement with the driving unit after receiving the reaction force of the substrate, so as to unload the force applied by the substrate, reduce the interaction force between the clamping unit and the substrate, thereby reducing the dynamic friction between the clamping unit and the substrate, reducing the loss degree of the substrate, and improving the stability of the machine operation.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to an edge pressing device and a photolithography device. Background Art

[0002] In the wafer stage, the device used to adsorb and fix the silicon wafer is called a suction cup. The suction cup is positioned and adsorbed on the upper surface of the base of the core component of the wafer stage to ensure that the silicon wafer can move with the workpiece stage subsystem during the photolithography process and reach the correct position according to the predetermined route and speed. The adsorption of silicon wafers mainly includes electrostatic adsorption and vacuum adsorption. The electrostatic adsorption process is complicated and costly, while vacuum adsorption uses vacuum for contact adsorption, which is easy to implement and low in cost. It is currently a commonly used silicon wafer adsorption method in semiconductor photolithography equipment.

[0003] With the continuous development of the semiconductor industry, processors have more and more demands on semiconductor processing equipment. Substrate packaging is one of the requirements for photolithography machines. However, the substrates that need to be packaged are large in size and high in hardness, and edge warping is prone to occur during the entire manufacturing process. When some substrates with warped edges are handed over to the worktable, the warped edge parts cannot fit with the suction cup surface. When the worktable starts vacuum adsorption of the substrate, the warped edge parts cannot be adsorbed normally. The vacuum threshold of this part often does not reach the working setting value, so it often causes the worktable to fail to work normally.

[0004] At present, most manufacturers choose to use a driving unit to drive the pressure bar to press down to press the warped part of the edge of the substrate, so that the vacuum adsorption threshold of the edge area of ​​the substrate can reach the working set value. It is understandable that in the process of the driving unit driving the pressure bar to press the edge of the substrate from a warped shape to a straight shape, the edge of the substrate will correspondingly apply a reaction force to the pressure bar. However, in the existing pressing method, the pressure bar is usually a solid structure, and the pressure bar and the driving unit are relatively fixed. The two cannot generate relative movement through external force, which leads to the reaction force applied by the substrate to the pressure bar becoming larger and larger, the interaction force between the substrate and the pressure bar becoming larger and larger, and the dynamic friction between the substrate and the pressure bar becoming larger and larger, which will cause the pressure bar to seriously wear the edge surface of the substrate, which is not conducive to improving the stability of the machine operation. Summary of the invention

[0005] The object of the present invention is to provide an edge pressing device and a photolithography device to solve the problem in the prior art that the pressing method on the edge warping portion of the substrate is likely to seriously wear the edge surface of the substrate, thereby being detrimental to the working stability of the machine.

[0006] To solve the above technical problem, based on one aspect of the present invention, the present invention provides a margin pressing device, which includes a driving unit, a margin pressing unit and a connecting unit, wherein the margin pressing unit is connected to the driving unit through the connecting unit;

[0007] The driving unit is configured to drive the edge pressing unit to move toward the direction close to the substrate after the suction cup completes the adsorption of the substrate to press the edge area of ​​the substrate, thereby shaping the edge area of ​​the substrate.

[0008] The connection unit is configured to generate a relative movement between the edge pressing unit and the driving unit when the edge pressing unit shapes the edge region and is driven by the edge region.

[0009] Optionally, the edge pressing unit shapes the edge region of the substrate so that a vacuum adsorption threshold of the edge region of the substrate reaches a set value, or so that the shape of the edge region of the substrate reaches a predetermined shape.

[0010] Optionally, the relative movement between the edge holding unit and the driving unit includes linear relative movement, and the direction of the linear movement is perpendicular to the pressing direction of the edge holding unit, and the edge holding unit is fixed relative to the edge area when pressing the edge area.

[0011] Optionally, the connecting unit includes a guide rail and a moving member, the moving member is movably disposed on the guide rail, the guide rail is fixed on the driving unit, and the moving member is connected to the edge pressing unit.

[0012] Optionally, the edge pressing unit is rotatably connected to the connecting unit, that is, the edge pressing unit is rotatably connected to a moving part of the connecting unit.

[0013] Optionally, the edge clamping device also includes a reset unit, which is arranged on the driving unit and connected to the edge clamping unit; the reset unit is configured to reset the position of the edge clamping unit after the driving unit drives the edge clamping unit to separate from the edge area in a direction away from the substrate.

[0014] Optionally, the resetting unit comprises an elastic stretching member, one end of the elastic stretching member is fixed relative to the driving unit, and the other end of the elastic stretching member is connected to the moving member.

[0015] Optionally, the resetting unit further includes a limiting member, which is fixed on the driving unit and is used to abut against one end of the movable member connected to the elastic stretching member.

[0016] Optionally, the connecting unit includes an elastic connecting member, and two ends of the elastic connecting member are respectively connected to the edge holding unit and the driving unit.

[0017] Optionally, the edge pressing unit is rotatably connected to the connecting unit, that is, the edge pressing unit is rotatably connected to one end of the elastic connecting member.

[0018] Optionally, the relative motion between the edge holding unit and the driving unit includes rotational relative motion.

[0019] Optionally, the edge pressing unit has a circular cross-section, and the edge pressing unit is rotatably disposed on the driving unit via the connecting unit, that is, the edge pressing unit is rotatably connected to the connecting unit.

[0020] Optionally, the material of the edge holding unit is elastic material.

[0021] Optionally, the edge pressing unit is hollow.

[0022] Optionally, there are multiple edge holding units, and the multiple edge holding units are distributed in a ring shape. There are one or more driving units, and each driving unit is used to drive one edge holding unit to move or drive at least two edge holding units to move simultaneously.

[0023] Optionally, the number of the edge pressing units is four and they are distributed in a rectangular ring shape.

[0024] Optionally, the driving unit includes a mounting plate and a driving motor, the driving motor is connected to the mounting plate, and the edge pressing unit is connected to the mounting plate via the connecting unit.

[0025] To solve the above technical problem, based on another aspect of the present invention, the present invention further provides a lithography device, comprising a suction cup and the edge holding device as described above, wherein the suction cup is used to absorb a substrate.

[0026] To summarize, in the edge clamping device and lithography equipment provided by the present invention, the edge clamping device includes a driving unit, an edge clamping unit and a connecting unit, and the edge clamping unit is connected to the driving unit through the connecting unit; the driving unit is configured to drive the edge clamping unit to press the edge area of ​​the substrate in a direction close to the substrate after the suction cup completes the adsorption of the substrate, so that the vacuum adsorption threshold of the edge area reaches a set value; the connecting unit is configured to generate relative movement between the edge clamping unit and the driving unit when the edge clamping unit presses the edge area and is driven by the edge area. In the edge clamping device of the present invention, the edge clamping unit is connected to the driving unit through the connecting unit, and the edge clamping unit and the driving unit are non-fixedly connected through the connecting unit. The edge clamping unit can generate relative movement with the driving unit when subjected to external force. In this way, when the driving unit drives the edge clamping unit to press the edge area of ​​the substrate, the edge clamping unit generates relative movement with the driving unit after receiving the reaction force of the substrate, so as to unload the force applied to the substrate, reduce the interaction force between the edge clamping unit and the substrate, thereby reducing the dynamic friction between the edge clamping unit and the substrate, reducing the loss degree of the substrate, and improving the stability of the machine operation.

[0027] It should be noted that, since the lithography equipment includes the edge clamping device, it also has the technical effects brought by the edge clamping device, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Those skilled in the art should understand that the drawings are provided for a better understanding of the present invention and do not constitute any limitation on the scope of the present invention.

[0029] Figure 1 is a schematic diagram of a lithography apparatus according to an embodiment of the present invention;

[0030] Figure 2 is a schematic diagram of a edge holding device according to an embodiment of the present invention;

[0031] Figure 3 yes Figure 2 Enlarged view of part A in the middle;

[0032] Figure 4 yes Figure 3 Enlarged view of middle part B;

[0033] Figure 5 It is a schematic diagram of the structural principle of the edge holding unit and the connection unit according to one embodiment of the present invention;

[0034] Figure 6 is another schematic diagram of the structural principle of the edge holding unit and the connecting unit according to one embodiment of the present invention;

[0035] Figure 7 This is another schematic diagram of the structural principle of the edge pressing unit and the connecting unit according to an embodiment of the present invention.

[0036] In the attached figure:

[0037] 1- edge holding device; 2- suction cup; 3- substrate; 4- exposure table; 5- whole machine frame; 6- installation frame;

[0038] 11-driving unit; 111-mounting plate; 111a-first mounting plate; 111b-second mounting plate; 111c-third mounting plate; 111d-fourth mounting plate; 112-driving motor; 112a-first driving motor; 112b-second driving motor; 113-first connecting member;

[0039] 12-Brim holding unit;

[0040] 13-connecting unit; 131-guide rail; 132-moving member; 133-elastic connecting member; 134-second connecting member; 14-resetting unit; 141-elastic stretching member; 142-limiting member; 143-fixing seat; DETAILED DESCRIPTION

[0041] In order to make the purpose, advantages and features of the present invention clearer, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different scales are used.

[0042] As used in the present invention, the singular forms "one", "an" and "the" include plural objects, the term "or" is generally used to include the meaning of "and / or", the term "several" is generally used to include the meaning of "at least one", and the term "at least two" is generally used to include the meaning of "two or more". In addition, the terms "first", "second" and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second" and "third" may explicitly or implicitly include one or at least two of the features, "one end" and "the other end" and "the proximal end" and "the distal end" generally refer to two corresponding parts, which include not only the endpoints, and the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral body; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. In addition, as used in the present invention, an element disposed on another element generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements may be direct or indirect through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element may be in any orientation such as inside, outside, above, below or on one side of another element, unless otherwise clearly indicated in the content. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0043] Figure 1 Schematic diagram of a photolithography apparatus according to an embodiment of the present invention. Figure 1As shown, an embodiment of the present invention schematically provides a lithography device, which includes a suction cup 2, a substrate 3, a pressing device 1, and an exposure platform 4. The suction cup 2 is located on the exposure platform 4. The suction cup 2 is used to adsorb the substrate 3. The pressing device 1 can press the edge area of ​​the substrate 3, thereby shaping the edge area of ​​the substrate 3. Further, the pressing device 1 shapes the edge area of ​​the substrate 3 so that the shaped substrate 3 meets the application conditions. The application conditions here can be, for example, that the vacuum adsorption threshold of the edge area of ​​the substrate 3 reaches a set value, or that the shape of the edge area of ​​the substrate 3 reaches a predetermined shape. Specifically, the pressing device 1 presses the edge area of ​​the substrate 3 whose vacuum adsorption threshold is less than the set value until the vacuum adsorption threshold of the edge area reaches the set value, or the pressing device 1 presses and shapes the warped edge area of ​​the substrate 3 until the substrate 3 tends to be flat as a whole. Further, in order to realize the detection of the vacuum adsorption threshold of the edge area of ​​the substrate 3, a sensor corresponding to the edge area of ​​the substrate 3 can be set in the suction cup 2, and the vacuum adsorption threshold of each edge area of ​​the substrate 3 after the substrate 3 is adsorbed by the suction cup 2 is sensed by the sensor.

[0044] Figure 2 Schematic diagram of a pressure-bearing device according to an embodiment of the present invention. Figure 2, the edge pressing device 1 of this embodiment includes a driving unit 11, an edge pressing unit 12 and a connecting unit 13, and the edge pressing unit 12 is connected to the driving unit 11 through the connecting unit 13. In one embodiment, the edge pressing unit 12 is in a strip shape. The driving unit 11 is used to drive the edge pressing unit 12 to move along the Z direction so as to approach or move away from the substrate 3. Here, the Z direction is perpendicular to the substrate 3. The driving unit 11 is used to drive the edge pressing unit 12 to move in the direction close to the substrate 3 after the suction cup 2 completes the adsorption of the substrate 3 to press the edge area of ​​the substrate 3, thereby shaping the edge area of ​​the substrate 3 so that the edge area of ​​the substrate 3 or the substrate 3 as a whole meets the above-mentioned application conditions. It can be understood that when the edge pressing unit 12 presses and shapes the edge area of ​​the substrate 3, it is usually also subjected to the reaction force applied by the substrate 3 during the deformation (deformation from warping to straightening), so as to be driven by the reaction force applied by the substrate 3. The connection unit 13 makes the edge holding unit 12 and the driving unit 11 non-fixedly connected, so that the edge holding unit 12 can generate relative movement with the driving unit 11 when subjected to external force. The connection unit 13 is configured to: when the edge holding unit 12 presses the edge area of ​​the substrate 3 and is driven by the reaction force applied by the edge area of ​​the substrate 3, relative movement is generated between the edge holding unit 12 and the driving unit 11, such as relative movement between the edge holding unit 12 and the driving unit 11 in a direction perpendicular to the Z direction. Usually, the Z direction is the direction of gravity, that is, relative movement between the edge holding unit 12 and the driving unit 11 in a horizontal direction. It should be noted that the present embodiment does not limit the shapes of the suction cup 2 and the substrate 3, for example, both can be square or circular. Accordingly, the extension direction of the strip-shaped edge holding unit 12 can be a straight line direction to match the edge of the square substrate 3, or the extension direction of the strip-shaped edge holding unit 12 can be an arc direction to match the edge of the circular substrate 3. In addition, the edge region of the substrate 3 generally refers to a warped region of the substrate 3 or a region that is prone to warping.

[0045] Thus, in the edge clamping device 1 of the present invention, the edge clamping unit 12 is connected to the driving unit 11 through the connecting unit 13, and the edge clamping unit 12 and the driving unit 11 are non-fixedly connected through the connecting unit 13. The edge clamping unit 12 can generate relative movement with the driving unit 11 when subjected to external force. Thus, when the driving unit 11 drives the edge clamping unit 12 to press the edge area of ​​the substrate 3, the edge clamping unit 12 generates relative movement with the driving unit 11 after receiving the reaction force of the substrate 3, such as generating relative movement in the horizontal direction, so as to unload the force applied to the substrate 3, reduce the interaction force between the edge clamping unit 12 and the substrate 3, thereby reducing the dynamic friction between the edge clamping unit 12 and the substrate 3, reducing the loss degree of the substrate 3, and improving the stability of the machine operation.

[0046] Furthermore, by judging the vacuum adsorption thresholds of different edge regions of the substrate 3, a certain edge region on the substrate 3 can be pressed separately, avoiding pressing all edge regions of the substrate 3, thereby reducing the risk of damage to the substrate 3. Of course, for edge regions of the substrate 3 with a greater degree of warping, the edge pressing device 1 can also be used to press the edge region separately.

[0047] Preferably, there are multiple edge pressing units 12, and the multiple edge pressing units 12 are distributed in a ring shape, that is, the multiple edge pressing units 12 are arranged circumferentially around the Z direction, so that each edge area of ​​the substrate 3 is correspondingly provided with an edge pressing unit 12 to meet the pressing requirements of different edge areas of different substrates 3. For example, for a polygonal substrate 3, each edge of the substrate 3 can be divided into an edge area, and the number of edge pressing units 12 is equal to the number of edges of the substrate 3. In one embodiment, the substrate 3 is square, the number of edge pressing units 12 is four, and they are distributed in a rectangular ring shape to correspond to each edge of the substrate 3 respectively. For a circular substrate 3, the edge of the substrate 3 can be divided into multiple edge areas according to a set unit angle (the number of edge areas is 360° divided by the unit angle).

[0048] Furthermore, the number of driving units 11 is one or more, and the driving unit 11 can drive a clamping unit 12 to move to press the corresponding edge area. The driving unit 11 can also drive at least two clamping units 12 to move simultaneously to press the edge area of ​​the substrate 3 corresponding to each of the at least two clamping units 12.

[0049] Continue reading Figure 2The driving unit 11 includes a mounting plate 111 and a driving motor 112. The driving motor 112 is connected to the mounting plate 111, and the edge pressing unit 12 is connected to the mounting plate 111 through the connecting unit 13. The driving motor 112 drives the mounting plate 111 to move along the Z direction, thereby driving the edge pressing unit 12 to approach or move away from the substrate 3. The mounting plates 111 are arranged circumferentially around the Z direction, and the number of mounting plates 111 corresponds to the number of edge pressing units 12. The driving motor 112 is used to drive one of the mounting plates 111 to move, or can drive at least two mounting plates 111 to move synchronously and in the same direction. In this way, the number of motors can be equal to the number of mounting plates 111, or can be less than the number of mounting plates 111, so that a part of the motors drive the corresponding mounting plates 111, and the other part of the driving motors 112 can drive two or more mounting plates 111 at the same time, for example, one of the driving motors 112 drives two adjacent or opposite mounting plates 111 to move synchronously and in the same direction. In order to facilitate the same driving motor 112 to drive at least two mounting plates 111 at the same time, the driving unit 11 of this embodiment also includes multiple first connecting members 113, at least two mounting plates 111 are connected through the same first connecting member 113, and the first connecting member 113 is connected to the driving motor 112. It should be noted that the shape and relative position of each first connecting member 113 can be set according to the number and positional relationship of the mounting plates 111 to avoid mutual interference.

[0050] For example, see Figure 2 The driving unit 11 includes a first mounting plate 111a and a second mounting plate 111b arranged along the X direction, a third mounting plate 111c and a fourth mounting plate 111d arranged along the Y direction, a first driving motor 112a and a second driving motor 112b, and the X direction, the Y direction and the Z direction are perpendicular to each other, that is, the X direction and the Y direction are parallel to the substrate 3. The first mounting plate 111a and the second mounting plate 111b are both connected to the first connecting member 113 connected to the first driving motor 112a, and the third mounting plate 111c and the fourth mounting plate 111d are both connected to the first connecting member 113 connected to the second driving motor 112b, and the first connecting member 113 connected to the first driving motor 112a and the first connecting member 113 connected to the second driving motor 112b are staggered and do not interfere with each other. In this way, the first driving motor 112a can be used to drive the edge pressing unit 12 on the first mounting plate 111a and the edge pressing unit 12 on the second mounting plate 111b to move synchronously in the same direction, and the second driving motor 112b can be used to drive the edge pressing unit 12 on the third mounting plate 111c and the edge pressing unit 12 on the fourth mounting plate 111d to move synchronously in the same direction.

[0051] Preferably, the material of the edge pressing unit 12 is an elastic material, such as a rubber material. Preferably, the edge pressing unit 12 is hollow, that is, the edge pressing unit 12 is an elastic hollow structure, such as an O-shaped rubber ring. In this way, when the edge pressing unit 12 presses the edge area of ​​the substrate 3, it can be in a slow downward pressing state, and the edge pressing unit 12 is elastically deformed, so as to avoid the situation where the hardness of the edge pressing unit 12 structure is too high and affects the servo state of the drive motor 112, and the elastic edge pressing unit 12 can minimize damage to the substrate 3. Moreover, for the hollow edge clamping unit 12, when the edge clamping unit 12 presses the substrate 3, the edge clamping unit 12 will have a greater elastic deformation freedom, so that it can adaptively deform according to the warping shape of the edge area of ​​the substrate 3, ensuring that the edge clamping unit 12 can maintain a maximum contact area with the warping area of ​​the substrate 3. At the same time, after the hollow edge clamping unit 12 elastically deforms and contacts the warping area of ​​the substrate 3, it can decompose a part of the pressing force into a horizontal thrust (that is, decompose it into a thrust in a direction perpendicular to the Z direction), thereby reducing the pressure acting on the exposure platform 4, and effectively preventing the exposure platform 4 from being pressed and hung. It can be understood that the hollow edge clamping unit 12 gradually extends outward as the substrate 3 becomes straighter until it is flattened.

[0052] In one embodiment, the connection unit 13 makes the relative motion between the edge holding unit 12 and the driving unit 11 after the edge region of the substrate 3 applies a reaction force, including a linear relative motion, and the direction of the linear relative motion is perpendicular to the pressing direction of the edge holding unit 12 (the pressing direction is also the Z direction), and the linear motion direction here can be the X direction or the Y direction, or other directions perpendicular to the Z direction in the plane of the substrate 3. It should be understood that the linear motion here does not mean that the edge holding unit 12 only moves linearly in the direction perpendicular to the Z direction, but also includes the movement of the edge holding unit 12 in the direction at an angle to the Z direction and the sub-movement in the direction perpendicular to the Z direction, for example, the movement of the edge holding unit 12 in the direction at an angle to the Z direction and the sub-movement in the X direction. In addition, when the edge holding unit 12 presses the edge region, it is fixed relative to the edge region. Specifically, when the driving unit 11 drives the edge holding unit 12 to press down so as to contact the edge region of the substrate 3 to press the substrate 3, the edge holding unit 12 and the corresponding edge region are relatively fixed, and no relative sliding occurs. The friction between the edge holding unit 12 and the substrate 3 is static friction. For example, the edge pressing unit 12 contacts the edge area of ​​the substrate 3 and then adheres to the edge area.

[0053] In this way, when the driving unit 11 drives the edge holding unit 12 to press the edge area, the edge holding unit 12 and the edge area are relatively fixed, and there is static friction between the two. When the edge of the substrate 3 is gradually pressed down and the edge of the substrate 3 changes from a warped state to a straight state, the edge area of ​​the substrate 3 will drive the edge holding unit 12 to produce a linear motion in a direction perpendicular to the Z direction relative to the driving unit 11. In this way, when the edge holding unit 12 presses the edge area, there is no relative sliding between the edge holding unit 12 and the substrate 3, and the contact point between the edge holding unit 12 and the substrate 3 remains unchanged, so no scratches will be left on the surface of the substrate 3, and the loss to the substrate 3 is extremely low.

[0054] Figure 3 yes Figure 2 The enlarged view of the middle A part. Figure 4 yes Figure 3 The enlarged view of part B in the middle. Figure 5 1 is a schematic diagram of the structural principle of the edge holding unit and the connecting unit of an embodiment of the present invention. In a specific embodiment, the linear motion of the edge holding unit 12 relative to the driving unit 11 only refers to the linear motion of the edge holding unit 12 in a direction perpendicular to the Z direction, see Figures 3 to 5 The connecting unit 13 includes a guide rail 131 and a moving part 132. The guide rail 131 extends in a direction perpendicular to the Z direction, for example, the guide rail 131 extends in the X direction. The moving part 132 is movably arranged on the guide rail 131. The guide rail 131 is fixed on the driving unit 11. The moving part 132 is connected to the edge clamping unit 12, so that the edge clamping unit 12 can make a linear motion relative to the driving unit 11 through the cooperation of the guide rail 131 and the moving part 132. It should be noted that the guide rail 131 here can use a cross roller guide rail, or a linear guide rail with higher rigidity. Of course, it can also be replaced by other components with linear guiding function. The warping amount of the substrate 3 is D, for example, D is 10mm. After the substrate 3 is pressed into a straight shape by the edge clamping unit 12, it will drive the edge clamping unit 12 to move 0.2mm. This embodiment does not limit the connection method between the edge holding unit 12 and the movable member 132 of the connecting unit 13. The two can be fixedly connected or movably connected. For example, the cross-section of the edge holding unit 12 is circular, and the edge holding unit 12 is rotatably connected to the movable member 132 of the connecting unit. That is, the relative motion generated between the edge holding unit 12 and the driving unit 11 may include linear relative motion and rotational relative motion. In a preferred embodiment, although the edge holding unit 12 and the movable member 132 are rotatable, after the driving unit 11 presses the edge holding unit 12 down and contacts the substrate 3, the edge holding unit 12 and the substrate 3 are still relatively fixed due to the existence of static friction. During the shaping process of the substrate 3, no relative rotation will occur between the edge holding unit 12 and the driving unit 11.

[0055] Further, see Figure 4The edge clamping device 1 further includes a reset unit 14, which is disposed on the driving unit 11 and connected to the edge clamping unit 12. The reset unit 14 is configured to reset the position of the edge clamping unit 12 after the driving unit 11 drives the edge clamping unit 12 to separate from the edge region in a direction away from the substrate 3. In this way, after the edge clamping unit 12 presses the corresponding edge region, the driving unit 11 drives the edge clamping unit 12 to move and separate from the edge region, and the reset unit 14 drives the edge clamping unit 12 to reset to the initial position on the guide rail 131 under the drive of the moving member 132, so that the edge clamping unit 12 can contact with the edge region of the substrate 3 during the next pressing, and the contact position remains unchanged, thereby performing the subsequent pressing process.

[0056] It should be noted that after the reset unit 14 is further configured, if the edge holding unit 12 and the movable part 132 are rotatably connected, if the force applied by the reset unit 14 to the movable part 132 during the pressing process of the edge holding unit 12 is greater than the adhesion force between the substrate 3 and the edge holding unit 12, the reset unit 14 will apply force to the movable part 132 to move the movable part 132 along the reset direction. At this time, the edge holding unit 12 can roll on the substrate 3, and the relative motion generated between the edge holding unit 12 and the driving unit 11 includes both linear relative motion and rotational relative motion.

[0057] Furthermore, the reset unit 14 includes an elastic stretching member 141, which may be a spring. One end of the elastic stretching member 141 is fixed relative to the driving unit 11, for example, one end of the elastic stretching member 141 is connected to a fixing seat 143, and the fixing seat 143 is arranged on the mounting plate 111. The other end of the elastic stretching member 141 is connected to a moving member 132. In this way, the edge holding unit 12 can be reset by the elastic recovery of the elastic stretching member 141. Specifically, when the edge holding unit 12 presses the substrate 3, the warped edge area drives the edge holding unit 12 to move, so that the moving member 132 drives the elastic stretching member 141 to produce elastic deformation (which may be deformed by being stretched or compressed). After the pressing is completed, the edge holding unit 12 is separated from the substrate 3, and the elastic stretching member 141 drives the moving member 132 to gradually reset during the elastic recovery process. When the elastic stretching member 141 is completely elastically recovered, the moving member 132 will be reset, and thus the edge holding unit 12 will also be reset. Optionally, the reset element also includes a limit member 142, which is fixed on the mounting plate 111 of the drive unit 11. The limit member 142 is used to abut against one end of the elastic stretching member 141 connected to the movable member 132. In this way, under the action of the limit member 142, the edge holding unit 12 can be reset when the elastic stretching member 141 has not fully elastically recovered. Specifically, during the elastic recovery of the elastic stretching member 141, the edge holding unit 12 connected to the movable member 132 is driven to move. When the movable member 132 abuts against the limit member 142, the limit member 142 will block the movement of the movable member 132. At this time, the edge holding unit 12 is reset, and the elastic stretching member 141 is still in an elastic deformation state.

[0058] Figure 6 It is another schematic diagram of the structural principle of the edge holding unit and the connection unit of one embodiment of the present invention. In a specific implementation, the linear motion of the edge holding unit 12 relative to the driving unit 11 refers to the movement of the edge holding unit 12 in a direction that is angled with the Z direction and the sub-movement in a direction perpendicular to the Z direction, that is, under the action of the connection unit 13, when the edge area of ​​the substrate 3 is pressed, the edge holding unit 12 is driven to move in a direction that is angled with the Z direction, then the linear motion of the edge holding unit 12 relative to the driving unit 11 refers to the sub-movement of the movement of the edge holding unit 12 in a direction perpendicular to the Z direction, such as the sub-movement in the X direction. In specific implementation, refer to Figure 6The connecting unit 13 includes an elastic connecting member 133 and a second connecting member 134, one end of the elastic connecting member 133 is connected to the edge holding unit 12, and the other end of the elastic connecting member 133 is connected to the second connecting member 134 fixed on the mounting plate 111 of the driving unit 11. When the driving unit 11 drives the edge holding unit 12 to move and press the substrate 3, after the edge holding unit 12 contacts the substrate 3, the elastic connecting member 133 will be deformed by the reaction force of the substrate 3. During the deformation process, the elastic recovery tendency of the elastic connecting member 133 is used to simultaneously make the edge holding unit 12 have a movement tendency in a direction perpendicular to the Z direction, so that the edge holding unit 12 can move with the warping area of ​​the substrate 3 until the substrate 3 is completely flattened. Specifically, the driving unit 11 drives the edge holding unit 12 to move and contact the substrate 3, and in the process of the driving unit 11 applying force, the edge holding unit 12 is fixed relative to the substrate 3 (for example, the two are bonded together), and when the edge holding unit 12 gradually presses the substrate 3, the substrate 3 will correspondingly apply a reaction force to the driving unit 11 through the elastic connecting member 133, and the reaction force causes the elastic connecting member 133 to produce elastic deformation. During the deformation process, the elastic connecting member 133 will also apply a force to the edge area close to the substrate 3 to the edge holding unit 12 until the entire substrate 3 is The degree of deformation meets the requirements, that is, the elastic connector 133 and the substrate 3 are relatively fixed after contact, and the direction of the elastic force applied by the elastic connector 133 after deformation is opposite to the direction of the reaction force applied by the edge area of ​​the substrate 3 (for example, the direction of the reaction force applied by the edge area is inward along the X direction, and the direction of the force applied to the substrate by the elastic connector 133 after deformation is outward along the X direction), ensuring that the elastic connector 133 will not slide relative to the substrate 3, and the friction between the two is static friction, and the edge holding unit 12 can move with the warping area of ​​the substrate 3.

[0059] There is no restriction on the connection mode between the edge holding unit 12 and the elastic connecting member 133, and the two can be fixedly connected or movably connected. For example, the cross section of the edge holding unit 12 is circular, and the edge holding unit 12 is rotatably connected to the elastic connecting member 133. That is, the relative motion generated between the edge holding unit 12 and the driving unit 11 may include linear relative motion and rotational relative motion. In a preferred embodiment, although the edge holding unit 12 and the elastic connecting member 133 are rotatably connected, after the driving unit 11 presses the edge holding unit 12 down to contact the substrate 3, the edge holding unit 12 and the substrate 3 are still relatively fixed due to the existence of static friction. During the shaping process of the substrate 3, no relative rotation will occur between the edge holding unit 12 and the driving unit 11. In addition, it should be noted that if the elastic connecting member 133 and the edge clamping unit 12 are rotationally connected, and the force applied to the edge clamping unit 123 by the elastic connecting member 133 during deformation is greater than the force applied to the edge clamping unit 12 by the substrate 3, then during the shaping process of the substrate 3, the edge clamping unit 12 will roll on the substrate 3 and roll in the direction close to the edge area of ​​the substrate 3.

[0060] In one embodiment, the connecting unit 13 causes the edge pressing unit 12 to have a reaction force applied to it by the edge area of ​​the substrate 3, and the relative movement generated between the edge pressing unit 12 and the driving unit 11 includes a rotational relative movement. In this way, the sliding friction between the pressure strip and the substrate 3 in the prior art can be changed to rolling friction, thereby reducing the friction force of the edge pressing unit 12 on the substrate 3 and reducing the loss to the substrate 3. Figure 7 is another schematic diagram of the structural principle of the edge pressing unit and the connecting unit of an embodiment of the present invention. In a specific implementation manner, refer to Figure 7 The cross section of the edge pressing unit 12 is circular, and the edge pressing unit 12 is rotatably disposed on the driving unit 11 through the connecting unit 13. The connecting unit 13 is, for example, a rotating shaft, and the edge pressing unit 12 is sleeved on the rotating shaft.

[0061] In summary, in the edge clamping device and lithography equipment provided by the present invention, the edge clamping device includes a driving unit, an edge clamping unit and a connecting unit, and the edge clamping unit is connected to the driving unit through the connecting unit; the driving unit is configured to drive the edge clamping unit to press the edge area of ​​the substrate in a direction close to the substrate after the suction cup completes the adsorption of the substrate, so that the vacuum adsorption threshold of the edge area reaches a set value; the connecting unit is configured to generate relative movement between the edge clamping unit and the driving unit when the edge clamping unit presses the edge area and is driven by the edge area. In the edge clamping device of the present invention, the edge clamping unit is connected to the driving unit through the connecting unit, and the edge clamping unit and the driving unit are non-fixedly connected through the connecting unit. The edge clamping unit can generate relative movement with the driving unit when subjected to external force. In this way, when the driving unit drives the edge clamping unit to press the edge area of ​​the substrate, the edge clamping unit generates relative movement with the driving unit after receiving the reaction force of the substrate, so as to unload the force applied to the substrate, reduce the interaction force between the edge clamping unit and the substrate, thereby reducing the dynamic friction between the edge clamping unit and the substrate, reducing the loss degree of the substrate, and improving the stability of the machine operation.

[0062] Although the present invention is disclosed as above with preferred embodiments, the above embodiments are not intended to limit the present invention. For any technician familiar with the art, without departing from the scope of the technical solution of the present invention, the technical content disclosed above can be used to make many possible changes and modifications to the technical solution of the present invention, or modified into equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention still belongs to the scope of protection of the technical solution of the present invention.

Claims

1. A edge holding device, characterized in that: It comprises a driving unit, a pressing unit and a connecting unit, wherein the pressing unit is connected to the driving unit through the connecting unit; The driving unit is configured to drive the edge pressing unit to move toward the direction close to the substrate after the suction cup completes the adsorption of the substrate so as to shape the edge area of ​​the substrate; The connection unit is configured to generate relative movement between the edge pressing unit and the driving unit when the edge pressing unit shapes the edge region and is driven by the edge region; The relative movement between the edge pressing unit and the driving unit includes linear relative movement, and the direction of the linear movement is perpendicular to the moving direction of the edge pressing unit. The edge pressing unit is fixed relative to the edge area when shaping the edge area.

2. The edge holding device according to claim 1, characterized in that: The connecting unit comprises a guide rail and a moving member, wherein the moving member is movably arranged on the guide rail, the guide rail is fixed on the driving unit, and the moving member is connected to the edge pressing unit.

3. The edge holding device according to claim 2, characterized in that: The edge clamping device also includes a reset unit, which is arranged on the driving unit and connected to the edge clamping unit; the reset unit is configured to reset the position of the edge clamping unit after the driving unit drives the edge clamping unit to separate from the edge area in a direction away from the substrate.

4. The edge holding device according to claim 3, characterized in that: The resetting unit comprises an elastic stretching member, one end of which is fixed relative to the driving unit, and the other end of which is connected to the moving member.

5. The edge holding device according to claim 4, characterized in that: The reset unit further comprises a limiter, wherein the limiter is fixed on the drive unit and is used for abutting against one end of the movable member connected to the elastic stretching member.

6. The edge holding device according to claim 1, characterized in that: The connecting unit comprises an elastic connecting member, and two ends of the elastic connecting member are respectively connected to the edge pressing unit and the driving unit.

7. The edge holding device according to claim 1, characterized in that: The relative motion between the edge holding unit and the driving unit includes rotational relative motion.

8. The edge holding device according to any one of claims 1 to 7, characterized in that: The cross section of the edge pressing unit is circular, and the edge pressing unit is rotatably connected to the connecting unit.

9. The edge holding device according to claim 1, characterized in that: The material of the edge holding unit is elastic material.

10. The edge holding device according to claim 9, characterized in that: The edge pressing unit is hollow.

11. The edge holding device according to claim 1, characterized in that: There are multiple edge holding units, and the multiple edge holding units are distributed in a ring shape. There are one or more driving units, and each driving unit is used to drive one edge holding unit to move or drive at least two edge holding units to move simultaneously.

12. The edge holding device according to claim 11, characterized in that: The number of the edge holding units is four and they are distributed in a rectangular ring shape.

13. The edge holding device according to claim 1, characterized in that: The driving unit comprises a mounting plate and a driving motor, the driving motor is connected to the mounting plate, and the edge pressing unit is connected to the mounting plate via the connecting unit.

14. A lithography apparatus, characterized in that: include: A suction cup, the suction cup is used to absorb the substrate; The edge holding device according to any one of claims 1 to 13.

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