A structural design method and electronic device of DBR and Micro-LED

Abstract

The present invention discloses a structural design method and electronic device of a DBR and Micro-LED, and the DBR structural design method comprises: step 1: obtaining the current value range; step 2: determining the optimal value of n; step 3: determining the optimal value of the thickness of the first refractive layer and the second refractive layer; step 4: determining the current optimal DBR structure and obtaining the relationship curve diagram of its transmittance and incident angle, recorded as the first relationship curve diagram; step 5: evaluating the collimation effect of the current optimal DBR structure corresponding to the first relationship curve diagram, and obtaining the first evaluation result. If the first evaluation result meets the preset conditions, the parameters of the current optimal DBR structure corresponding to the first relationship curve diagram are used as the optimal design parameters; if the first evaluation result does not meet the preset conditions, return to step 1 to re-acquire the current value range until the first evaluation result meets the preset conditions. The structural design method of the present invention ensures that the designed DBR structure can enable the Micro-LED to have good light output effect and collimation.

Description

Technical Field

[0001] The present invention belongs to the field of semiconductor technology, and in particular relates to a DBR and Micro-LED structural design method and electronic equipment. Background Art

[0002] Micro-LED has the advantages of long life of light-emitting units, fast response speed, high color saturation and high brightness; however, it has the problem of uncontrollable direction of photons emitted by quantum wells, which causes light to radiate in all directions, resulting in a small proportion of top light energy actually utilized, resulting in low light output efficiency. Therefore, the existing Micro-LED has poor collimation and cannot be widely used in near-eye display, micro-projection and other fields.

[0003] In the prior art, in order to improve the collimation of Micro-LED, it is mainly achieved by reducing the light output angle of Micro-LED, including: microlens array, one-dimensional grating and metasurface, etc., but the microlens array is not conducive to integration in the Micro-LED array with smaller size and smaller spacing, which limits the development of miniaturization of display chips; although the method of making one-dimensional grating is relatively mature, it has multiple diffraction directions, so there is still a part of large-angle light output; and the metasurface solution takes a lot of time and cost from design to production, which is not conducive to industrial production. Based on this, in order to achieve small-angle light output, considering the above, a multi-layer film distributed Bragg reflector (DBR) structure design is used on the top of Micro-LED to collimate the light beam, which can avoid the above problems; DBR is a multi-layer structure, which is obtained by alternating the growth of high refractive index materials and low refractive index materials. The thickness of high refractive index materials and low refractive index materials and the growth period of DBR will affect the collimation effect. In order to be closer to the collimation effect of DBR structure in actual Micro-LED devices, it is necessary to optimize the structure of DBR. Summary of the invention

[0004] In view of this, in order to overcome the defects of the prior art, the purpose of the present invention is to provide a DBR and Micro-LED structural design method and electronic device, so that the Micro-LED has good light output effect and collimation characteristics.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] In one aspect, the present invention provides a method for designing a DBR structure, wherein the DBR comprises n composite layers, each of the composite layers comprises a first refractive layer and a second refractive layer stacked, the refractive index of the first refractive layer is greater than the refractive index of the second refractive layer, and the method for designing a DBR structure comprises the following steps:

[0007] Step 1: obtaining a current value range, wherein the current value range includes a thickness range of the first refractive layer, a thickness range of the second refractive layer, and a value range of n, where n is a positive integer greater than 0;

[0008] Step 2: Determine the optimal value of n according to the current value range;

[0009] Step 3: determining an optimal value of the thickness of the first refractive layer and an optimal value of the thickness of the second refractive layer according to the optimal value of n;

[0010] Step 4: determining a current optimal DBR structure according to the optimal value of n, the optimal value of the thickness of the first refractive layer, and the optimal value of the thickness of the second refractive layer, and obtaining a relationship curve graph between the transmittance and the incident angle of the current optimal DBR structure, recorded as a first relationship curve graph;

[0011] Step 5: Evaluate the collimation effect of the current optimal DBR structure corresponding to the first relationship curve diagram to obtain a first evaluation result;

[0012] If the first evaluation result meets the preset conditions, the parameters of the current optimal DBR structure corresponding to the first relationship curve graph are used as optimal design parameters; wherein the optimal design parameters include the optimal value of the thickness of the first refractive layer, the optimal value of the thickness of the second refractive layer, and the optimal value of n;

[0013] If the first evaluation result does not meet the preset conditions, return to step 1 to re-acquire the current value range until the first evaluation result meets the preset conditions, obtain the optimal design parameters, and complete the structural design of the DBR.

[0014] Furthermore, the preset condition is that the evaluation factor is greater than a first set value and less than a second set value.

[0015] Furthermore, the first setting value is 20, and the second setting value is 27.

[0016] The structural design method of the DBR of the present invention uses engineering numerical calculation software (such as MATLAB) and three-dimensional time-domain finite difference analysis software (such as FDTD) to perform joint simulation calculation on the device structure. MATLAB calculates the relationship curve of the transmittance of the DBR and the dependence on the incident angle by the optical transmission matrix method. Assuming that a beam of light hits the DBR structure of a multi-layer composite layer composed of a first refractive layer and a second refractive layer, the DBR structure acts as an angle filter, and the transmission matrix method is used to construct the relationship between the two interface electromagnetic fields, and the electromagnetic field of the interface 0 (z=0) on the front side of the first layer is defined as E0 and H0, and the electromagnetic field of the interface 1 on the back side of the first layer is defined as E1 and H1, that is, E0 and H0 become E1 and H1 after matrix transformation, as shown below:

[0017] ,

[0018] Where δ is the phase thickness, η is the optical admittance and , ε is the dielectric constant, μ is the magnetic permeability, and θ is the incident angle.

[0019] By analogy, the relationship between the electromagnetic fields of two adjacent layers can be represented by a transmission matrix. Each composite layer of the DBR structure designed in the present invention can be represented by the following transmission matrix:

[0020] ,

[0021] In the formula, δ j is the phase thickness and δ j =(2π / λ)n j d j cosθ j , n is the number of composite layers, and d is the thickness of the first refractive layer or the second refractive layer. The overall transmission matrix of the DBR structure composed of n composite layers can be expressed as:

[0022] ,

[0023] in, ,

[0024] Therefore, the relationship between the transmission coefficient t and the transmittance T is: t = 2η0 / (Aη0+Bη0η n+1 +C+Dη n+1 ),

[0025] .

[0026] In summary, MATLAB can be used to quickly calculate the relationship between the transmittance and the incident angle dependence of the current optimal DBR structure. The model structure when using MATLAB software for simulation calculation is to set the DBR on the GaN substrate, use GaN to simulate the traditional Micro-LED (no DBR on the top), and the light enters the DBR from the GaN medium and exits from the air, that is, the incident medium is the GaN substrate and the exit medium is air. Therefore, the above step 1 also includes obtaining basic parameters, which include the material of the first refractive layer and the second refractive layer, the thickness of GaN, the emission wavelength of GaN, and the background information of GaN and the refractive index of GaN in the background, so as to facilitate the construction of a DBR model for MATLAB calculation.

[0027] According to some preferred implementation aspects of the present invention, evaluating the collimation effect of the current optimal DBR structure corresponding to the first relationship curve graph to obtain a first evaluation result includes:

[0028] An evaluation factor is obtained by integrating a curve of a relationship between transmittance and incident angle of the current optimal DBR structure, and the evaluation factor is used as the first evaluation result.

[0029] According to some preferred implementation aspects of the present invention, the evaluation factor is calculated by the following formula:

[0030] .

[0031] Among them, G is the evaluation factor, T is the transmittance, λ is the emission wavelength, θ is the incident angle, θ1 is the first incident angle, θ2 is the second incident angle, and θ3 is the third incident angle.

[0032] .

[0033] The first incident angle θ1 is 0°, the second incident angle θ2 is 5°, and the third incident angle θ3 is 30°. The above formula is obtained based on the relationship curve between the transmittance and the incident angle of the above-mentioned current optimal DBR structure, where B represents the high transmittance part in the small angle range of the relationship curve, which is expressed by the average transmittance in the range of 0~5°; F represents the angle filtering performance presented in the relationship curve, which is expressed by the ratio of the average transmittance of the high light-transmitting part (in the range of 0~5°) to the average transmittance of the non-light-transmitting part (in the range of 5°~30°). In addition, in order to consider the Lambertian distribution of Micro-LED, the weight function cosθ dependency is also added. It can be seen that the greater the transmittance in the range of 0~5°, the greater B; the better the DBR angle filtering performance, the greater F, so the evaluation factor G is introduced to represent the product of the two performances.

[0034] According to some preferred implementation aspects of the present invention, determining the optimal value of n according to the current value range includes:

[0035] Acquire a first angle range and a second angle range;

[0036] Based on the current value range, the first angle range and the second angle range, a particle swarm algorithm is used to calculate the optimal value of n;

[0037] The second angle range includes the first angle range. The first angle range is -5° to 5°, the second angle range is -30° to 30°, and the incident angle in step 4 is -30° to 30°.

[0038] According to some preferred implementation aspects of the present invention, the step of calculating the optimal value of n using a particle swarm algorithm comprises:

[0039] Selecting a current traversal parameter from the current value range, wherein the current traversal parameter includes the thickness of the first refractive layer, the thickness of the second refractive layer, and the value of n;

[0040] Determine a corresponding current DBR structure according to the current traversal parameter, and obtain a curve diagram of the relationship between the transmittance and the incident angle of the current DBR structure;

[0041] Based on the relationship curve graph, calculating the sum of all light transmittances within the first angle range to obtain a first total transmittance;

[0042] Calculating the sum of all light transmittances within the second angle range to obtain a second total transmittance;

[0043] The ratio of the first total transmittance to the second total transmittance is calculated, and when the ratio is greater than a preset threshold, the value of n in the current traversal parameter is used as the optimal value of n. The preset threshold is 0.99.

[0044] In the present invention, due to the existence of three variables, namely, the thickness of the first refractive layer, the thickness of the second refractive layer, and the period n of the DBR, if the optimal result of each variable value is solved one by one by the control variable method, the exact value of each variable cannot be accurately controlled, and it is difficult to give a suitable value range. Therefore, the present invention uses a particle swarm algorithm to perform iterative calculations to obtain the accurate values ​​of the three variables, sets the initial number of iterations (for example, 100 times), and stops iteration when the ratio of the sum of the light transmittance in the first angle range (i.e., the small angle range: -5°~5°) to the sum of the light transmittance in the second angle range (i.e., the incident angle range: -30°~30°) exceeds the preset threshold value of 0.99 (collimation condition). It can be understood that in theory, the more periods, the better the collimation effect, but the present invention is designed for Micro-LED devices, so the more periods will make the thickness of the DBR larger, which will lead to a decrease in the light output efficiency of the device. Therefore, in order to meet the requirements of good collimation effect and high light output efficiency, when n is traversed from small to large within its value range, the first period corresponding to the ratio of the first total transmittance to the second total transmittance greater than the preset threshold is the optimal value of the period n.

[0045] In addition, when determining the optimal values ​​of the thickness of the first refractive layer and the second refractive layer in step 3, a relationship curve between the number of iterations and the thickness of the first refractive layer and the thickness of the second refractive layer can also be obtained. Since the change of the number of iterations will cause a slight fluctuation in the variable value, and as the number of iterations increases, the calculation speed will also slow down, it can be considered that when the thickness of the first refractive layer and the thickness of the second refractive layer tend to be stable with the increase of the number of iterations and the number of iterations is small, the corresponding thickness value of the first refractive layer and the thickness value of the second refractive layer are their respective optimal values. Among them, the number of iterations of the particle swarm algorithm is 0~4000 times.

[0046] According to some preferred implementation aspects of the present invention, re-obtaining the current value range includes:

[0047] The thickness range of the first refractive layer and the thickness range of the second refractive layer in the current value range are expanded so that the thickness range of the first refractive layer before the expansion is within the thickness range of the first refractive layer after the expansion and the thickness range of the second refractive layer before the expansion is within the thickness range of the second refractive layer after the expansion.

[0048] According to some preferred implementation aspects of the present invention, the method further comprises:

[0049] Constructing a Micro-LED model corresponding to the optimal design parameters, simulating the Micro-LED model, and obtaining a curve diagram of the relationship between the transmittance and the incident angle of the Micro-LED model, which is recorded as a second curve diagram;

[0050] Determining whether to end the structural design of the DBR based on the first relationship curve graph and the second relationship curve graph corresponding to the optimal design parameters;

[0051] The Micro-LED model includes DBR, n-GaN layer, quantum well layer, p-GaN layer and first reflective layer from top to bottom.

[0052] In some embodiments of the present invention, in order to make the structural design of the DBR of the present invention closer to the actual Micro-LED device, the Micro-LED device including the DBR structure is verified by electromagnetic simulation software (such as: FDTD) to confirm that the DBR structure designed by the present invention has a good angle filtering effect, thereby realizing the light collimation of the Micro-LED.

[0053] According to some preferred implementation aspects of the present invention, determining whether to end the structural design of the DBR based on the first relationship curve graph and the second relationship curve graph corresponding to the optimal design parameters includes:

[0054] When the similarity between the first relationship curve diagram and the second relationship curve diagram exceeds a preset similarity threshold, the structural design of the DBR is terminated; the preset similarity threshold is 80%.

[0055] When the similarity between the first relationship curve graph and the second relationship curve graph does not exceed the preset similarity threshold, return to step 1 to reacquire the current value range until the similarity between the first relationship curve graph and the second relationship curve graph exceeds the preset similarity threshold.

[0056] The present invention also provides a method for designing a structure of a Micro-LED, wherein the Micro-LED includes a body layer, wherein the body layer includes a base structure and a first reflective layer located at the bottom of the base structure, and the method for designing a structure of a Micro-LED includes the following steps:

[0057] A DBR is arranged above the body layer; the DBR is designed using the DBR structure design method described above;

[0058] An insulating layer and a second reflecting layer are sequentially arranged on the side walls of the base structure, and the side walls of the base structure are arranged at an angle; the side walls of the base structure are arranged at an angle so that the light going out from the side walls is reflected to the surface, which can converge the edge light and improve the top light output efficiency.

[0059] Acquire structural parameters, where the structural parameters include a sidewall inclination angle range of the base structure, a material range of the second reflective layer, a thickness range of the second reflective layer, and a thickness range of the insulating layer;

[0060] Based on the structural parameters, simulation calculation is used to determine the optimal value of the side wall inclination angle of the base structure, the optimal material of the second reflective layer, the optimal value of the thickness of the second reflective layer and the optimal value of the thickness of the insulating layer.

[0061] The present invention further provides an electronic device, comprising a memory and a processor connected to each other, wherein the memory is used to store a computer program, and when the computer program is executed by the processor, it is used to implement the DBR structural design method and Micro-LED structural design method as described above.

[0062] Due to the adoption of the above technical scheme, compared with the prior art, the present invention is beneficial in that: the present invention provides a new structural design method of DBR, the DBR includes n layers of composite layers, each of which includes a first refractive layer and a second refractive layer which are stacked and have different refractive indices, and based on the thickness range of the first refractive layer, the thickness range of the second refractive layer and the value range of n, the current optimal DBR structure is determined by continuous iteration, and whether the current optimal DBR structure meets the requirements is evaluated, if the current optimal DBR structure meets the requirements, the iteration is stopped, and the optimal design parameters of the DBR (including the optimal value of the thickness of the first refractive layer, the optimal value of the thickness of the second refractive layer and the optimal value of n) are obtained to achieve the design of the DBR. The present invention collimates the light beam by arranging a DBR with a multilayer film on the top of the traditional Micro-LED to achieve small-angle light emission, and simulates and verifies the designed DBR structure by using simulation software, so as to ensure that the designed DBR structure can enable the Micro-LED to have good light emission effect and collimation, which is helpful to expand the application of Micro-LED in the fields of near-eye display and micro-projection. BRIEF DESCRIPTION OF THE DRAWINGS

[0063] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0064] Figure 1 A schematic diagram of a flow chart of a structural design method of a DBR provided by the present invention;

[0065] Figure 2 A schematic diagram of the structure of a simulation model of Micro-LED corresponding to the MATLAB simulation calculation in steps 1 to 5 of Example 1 of the present invention;

[0066] Figure 3A schematic diagram of the structure of a Micro-LED model corresponding to the FDTD simulation calculation in step 6 of Example 1 of the present invention and a schematic diagram of the structure of a Micro-LED model calculated by FDTD simulation calculation in Example 2;

[0067] Figure 4 Schematic diagram of the structure of the Micro-LED model calculated by FDTD simulation in Example 3 of the present invention;

[0068] Figure 5 A curve diagram showing the relationship between the ratio of the sum of the light transmittance of the DBR within the first angle range and the sum of the light transmittance within the second angle range and the period n obtained in step 2 of embodiment 1 of the present invention;

[0069] Figure 6 is a graph showing the relationship between the number of iterations obtained in step 3 of embodiment 1 of the present invention and the thickness of the first refractive layer and the thickness of the second refractive layer;

[0070] Figure 7 is a curve diagram showing the relationship between the transmittance and the incident angle of the current optimal DBR structure obtained by MATLAB simulation calculation in step 4 of Example 1 of the present invention;

[0071] Figure 8 is a graph showing the relationship between transmittance and incident angle calculated by FDTD simulation in step 6 of Example 1 of the present invention;

[0072] Fig. 9 A graph showing the relationship between the normalized top-out light intensity of the Micro-LED surface and the side wall inclination angle obtained by FDTD simulation calculation in step 3 of Example 2 of the present invention;

[0073] Fig.10 This is a normalized relationship diagram of the top far-field light output energies corresponding to different side wall inclination angles obtained by FDTD simulation calculation in step 4.1 of Example 3 of the present invention;

[0074] Fig.11 This is a relationship diagram of the normalized top far-field light energies corresponding to the second reflection layers of different materials obtained by FDTD simulation calculation in step 4.2 of Example 3 of the present invention;

[0075] Fig.12 This is a normalized relationship diagram of the top far-field light energies corresponding to insulating layers of different thicknesses obtained by FDTD simulation calculation in step 4.3 of Example 3 of the present invention;

[0076] Fig.13 This is a normalized relationship diagram of the top far-field light energies corresponding to the second reflective layers of different thicknesses obtained by FDTD simulation calculation in step 4.4 of Example 3 of the present invention;

[0077] Wherein, the accompanying drawings are marked as follows:

[0078] Composite layer-11, first refractive layer-111, second refractive layer-112, main layer-2, basic structure-21, n-GaN layer-211, quantum well layer-212, p-GaN layer-213, first reflective layer-22, insulating layer-23, second reflective layer-24, substrate-3. DETAILED DESCRIPTION

[0079] In order to enable those skilled in the art to better understand the technical solution of the present invention, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0080] The present invention provides a DBR structure design method, such as Figure 2 and Figure 3 As shown, the DBR includes n composite layers 11, each of which includes a first refractive layer 111 and a second refractive layer 112 stacked in layers, and the first refractive layer 111 in each composite layer 11 is located above the second refractive layer 112. Figure 1 As shown, the structural design method of DBR includes the following steps:

[0081] Step 1: Get the current value range.

[0082] The basic parameters and the current value range can be obtained first; then, a simulation model is constructed using MATLAB software according to the basic parameters and the current value range. The simulation model includes a DBR and a substrate 3 , and the DBR is located above the substrate 3 .

[0083] Further, the basic parameters include the material of the first refractive layer 111 and the second refractive layer 112, the thickness of GaN, the emission wavelength of GaN, the background information of GaN, and the refractive index of GaN in the background, so as to build a model simulated by MATLAB software. The current value range includes the thickness range of the first refractive layer 111, the thickness range of the second refractive layer 112, and the value range of n, where n is the growth period of the composite layer 11 and its value is a positive integer greater than 0.

[0084] Furthermore, the refractive index of the first refractive layer 111 is greater than the refractive index of the second refractive layer 112, the material of the first refractive layer 111 is TiO2, Ti2O3 or SiN, and the material of the second refractive layer 112 is SiO2, Al2O3 or MgF2; the thickness range of the Micro-LED is 1~3μm.

[0085] Step 2: Determine the optimal value of n based on the current value range.

[0086] Obtain the first angle range and the second angle range, and select the current traversal parameter from the current value range; determine the corresponding current DBR structure according to the current traversal parameter, and obtain the relationship curve between the transmittance and the incident angle of the current DBR structure; based on the relationship curve, calculate the sum of the transmittances of all the light rays in the first angle range to obtain the first total transmittance; calculate the sum of the transmittances of all the light rays in the second angle range to obtain the second total transmittance; then calculate the ratio of the first total transmittance to the second total transmittance, and when the ratio is greater than a preset threshold, use the value of n in the current traversal parameter as the optimal value of n. The second angle range includes the first angle range; the current traversal parameter includes the thickness of the first refractive layer 111, the thickness of the second refractive layer 112, and the value of n.

[0087] Step 3: According to the optimal value of n, an iterative calculation is performed using a particle swarm algorithm to determine the optimal value of the thickness of the first refractive layer 111 and the optimal value of the thickness of the second refractive layer 112 .

[0088] The number of iterations of the particle swarm algorithm can be 0 to 4000 times. The particle swarm algorithm is an existing algorithm, and the specific content of the algorithm will not be described in detail here.

[0089] Step 4: Determine the current optimal DBR structure according to the optimal value of n, the optimal value of the thickness of the first refractive layer 111 and the optimal value of the thickness of the second refractive layer 112, and obtain a relationship curve graph between the transmittance and the incident angle of the current optimal DBR structure, which is recorded as a first relationship curve graph.

[0090] Step 5: Evaluate the collimation effect of the current optimal DBR structure corresponding to the first relationship curve diagram to obtain a first evaluation result.

[0091] The relationship curve between the transmittance and the incident angle of the current optimal DBR structure is integrated and calculated to obtain an evaluation factor, which is used to evaluate the collimation effect of the current optimal DBR structure. That is, the first evaluation result is the evaluation factor, which is calculated by the following formula:

[0092] .

[0093] Among them, G is the evaluation factor, T is the transmittance, λ is the emission wavelength, and θ is the incident angle.

[0094] After the evaluation factor is calculated, it is determined whether the evaluation factor is greater than the first set value and less than the second set value. When the evaluation factor is greater than the first set value and less than the second set value, the parameters of the current optimal DBR structure corresponding to the first relationship curve are used as optimal design parameters, and the optimal design parameters include the optimal value of the thickness of the first refractive layer 111, the optimal value of the thickness of the second refractive layer 112, and the optimal value of n.

[0095] Further, the first setting value may be 20, and the second setting value may be 27.

[0096] When the evaluation factor G≤20 or G≥27, return to step 1 and expand the thickness range of the first refractive layer 111 and the thickness range of the second refractive layer 112 in the current value range, so that the thickness range of the first refractive layer 111 before expansion is within the thickness range of the first refractive layer 111 after expansion and the thickness range of the second refractive layer 112 before expansion is within the thickness range of the second refractive layer 112 after expansion, and continue to perform subsequent steps until the first evaluation result is greater than the first set value and less than the second set value, and the optimal design parameters are obtained.

[0097] The present invention utilizes the evaluation factor to evaluate the collimation effect of the current optimal DBR structure obtained through the above steps, which can further improve the accuracy of the DBR structure design.

[0098] The structural design of DBR can be realized through the above steps. In order to further verify the collimation effect of DBR obtained through the above steps, the following steps can be adopted.

[0099] Step 6: When the evaluation factor of the above step 5 is greater than the first set value and less than the second set value, a Micro-LED model corresponding to the optimal design parameters is constructed to verify the optimal design parameters of the DBR. Through simulation calculation of the Micro-LED model, a curve graph of the relationship between the transmittance and the incident angle of the Micro-LED model is obtained, which is recorded as the second relationship curve graph.

[0100] The Micro-LED model can be simulated using FDTD simulation software, such as Figure 3 As shown, the Micro-LED model includes DBR, n-GaN layer 211, quantum well layer 212, p-GaN layer 213 and first reflective layer 22 from top to bottom.

[0101] Step 7: Determine whether the similarity between the first relationship curve graph and the second relationship curve graph exceeds a preset similarity threshold.

[0102] The first relationship curve graph and the second relationship curve graph may be processed first, and then the similarity between the two may be calculated. The preset similarity threshold may be 80%, and the preset similarity threshold may also be other values, which may be set according to specific application scenarios and needs.

[0103] When the similarity between the first relationship curve diagram and the second relationship curve diagram exceeds a preset similarity threshold, the DBR structure design is terminated.

[0104] When the similarity between the first relationship curve graph and the second relationship curve graph is less than or equal to the preset similarity threshold, return to step 1 and expand the thickness range of the first refractive layer 111 and the thickness range of the second refractive layer 112 in the current value range, so that the thickness range of the first refractive layer 111 before expansion is within the thickness range of the first refractive layer 111 after expansion and the thickness range of the second refractive layer 112 before expansion is within the thickness range of the second refractive layer 112 after expansion, and continue to perform subsequent steps until the similarity between the first relationship curve graph and the second relationship curve graph exceeds the preset similarity threshold.

[0105] The present invention utilizes FDTD simulation software to simulate the Micro-LED model to obtain a second relationship curve graph; by comparing the first relationship curve graph with the second relationship curve graph, the collimation effect of the current optimal DBR structure obtained through the above steps is further evaluated to improve the accuracy of the DBR structure design.

[0106] The present invention also provides a method for designing a Micro-LED structure. Figure 3 As shown, the Micro-LED includes a body layer 2, the body layer 2 includes a base structure 21 and a first reflective layer 22 located at the bottom of the base structure 21, and the side wall of the base structure 21 is inclined. Specifically, the structural design method of the Micro-LED includes the following steps:

[0107] Step 1: Set up DBR on the bulk layer 2.

[0108] The structure of the DBR is designed using the above-mentioned DBR structure design method.

[0109] Step 2: Get the structural parameters.

[0110] The structural parameters include the side wall inclination angle range of the foundation structure 21 ; the side wall inclination angle range is the value range of the side wall inclination angle, and the side wall inclination angle refers to the acute angle between the side wall and the bottom surface of the foundation structure 21 .

[0111] Step 3: Based on the structural parameters, use simulation calculation to determine the design parameters of Micro-LED.

[0112] The design parameters include the optimal value of the side wall inclination angle of the base structure 21. FDTD software can be used for simulation calculation.

[0113] The present invention also provides another method for designing a Micro-LED structure. Figure 4 As shown, the Micro-LED includes a body layer 2, the body layer 2 includes a base structure 21, a first reflective layer 22, an insulating layer 23 and a second reflective layer 24, the side wall of the base structure 21 is inclined, and the insulating layer 23 and the second reflective layer 24 are conformally arranged on the side wall of the base structure 21. Specifically, the structural design method of the Micro-LED includes the following steps:

[0114] Step 1: Set up DBR on the bulk layer 2.

[0115] The structure of the DBR is designed using the above-mentioned DBR structure design method.

[0116] Step 2: sequentially arrange an insulating layer 23 and a second reflective layer 24 on the side walls of the base structure 21 .

[0117] Step 3: Get the structural parameters.

[0118] The structural parameters include the side wall inclination angle range of the base structure 21, the material range of the second reflective layer 24, the thickness range of the second reflective layer 24 and the thickness range of the insulating layer 23; the side wall inclination angle refers to the angle between the side wall and the bottom surface of the base structure 21; the material range of the second reflective layer 24 is one of Ag, Al, and Au.

[0119] Step 4: Based on the structural parameters, use simulation calculation to determine the design parameters of Micro-LED.

[0120] The design parameters include the optimal value of the sidewall inclination angle of the base structure 21, the optimal material of the second reflective layer 24, the optimal value of the thickness of the second reflective layer 24, and the optimal value of the thickness of the insulating layer 23. FDTD software can be used for simulation calculation.

[0121] In the present invention, a DBR structure with a multi-layer film is set on the top of the traditional Micro-LED to collimate the light beam to achieve small-angle light emission. The designed DBR structure is simulated and verified using simulation software to ensure that the designed DBR structure can enable the Micro-LED to have good light emission effect and collimation. At the same time, the structural design method of the present invention also provides an effective idea for the design of simulated Micro-LED.

[0122] The present invention also provides an electronic device, including a memory and a processor, wherein the memory is used to store a computer program, and when the computer program is executed by the processor, it can implement the above-mentioned DBR structural design method and Micro-LED structural design method.

[0123] Example 1

[0124] This embodiment provides a design method of a DBR structure, such as Figure 2 and Figure 3 As shown, the DBR includes n composite layers 11 , and each composite layer 11 includes a second refractive layer 112 and a first refractive layer 111 which are stacked.

[0125] The structural design method of the DBR of this embodiment comprises the following steps:

[0126] Step 1: Determine that the material of the first refractive layer 111 is TiO2, whose refractive index is 2.497, and the thickness of the first refractive layer 111 is in the range of 0-120nm; the material of the second refractive layer 112 is SiO2, whose refractive index is 1.474, and the thickness of the second refractive layer 112 is in the range of 0-120nm; the substrate 3 is GaN (incident medium), the thickness of GaN is 1.2μm, the refractive index of GaN is 2.465, the wavelength of the incident light is 436nm, the background of GaN is air (exit medium), and the refractive index of air is 1; the value range of n is 0-30 and n is a positive integer. According to these parameters, construct Figure 2 The simulation model shown includes a substrate 3 and a DBR disposed on the substrate 3. The substrate 3 in this embodiment is GaN.

[0127] Step 2: Determine that the first angle range is -5° to 5° and the second angle range is -30° to 30°, select current traversal parameters from the thickness range of the first refractive layer 111, the thickness range of the second refractive layer 112, and the value range of n, respectively, determine the corresponding current DBR structure according to the current traversal parameters, and obtain a curve diagram of the relationship between the transmittance and the incident angle of the current DBR structure; based on the curve diagram, calculate the sum of the transmittances of all the light rays within the first angle range to obtain a first total transmittance, calculate the sum of the transmittances of all the light rays within the second angle range to obtain a second total transmittance; then calculate the ratio of the first total transmittance to the second total transmittance, and obtain a curve diagram of the relationship between the ratio of the sum of the transmittances of the light rays of the DBR structure in the first angle range to the sum of the transmittances of the light rays in the second angle range and n (such as Figure 5 as shown).

[0128] Figure 5 The ordinate ratio in is the ratio of the first total transmittance to the second total transmittance, which is given by Figure 5It can be seen that when n is 15~30, the corresponding ratios are all greater than 0.99. Theoretically, the more periods, the better the collimation effect. However, considering that more periods will make the DBR thicker, which will lead to lower light output efficiency of the device, n is selected as 15 as the optimal value of n, and n is 15 is also the value of n corresponding to the first ratio greater than 0.99.

[0129] Step 3: Under the condition that the optimal value of n is 15, the particle swarm algorithm is used to perform iterative calculations with the number of iterations ranging from 0 to 4000, and a relationship curve diagram between the number of iterations and the thickness of the first refractive layer 111 and the thickness of the second refractive layer 112 is obtained (eg Figure 6 as shown).

[0130] Depend on Figure 6 It can be seen that when the number of iterations is in the range of 1000-4000, the thickness of the first refractive layer 111 and the thickness of the second refractive layer 112 tend to be stable as the number of iterations increases; although the more iterations, the more accurate the calculated result will be, but as the number of iterations increases, the calculation speed will also slow down. Therefore, when the number of iterations increases but the thickness tends to be stable, according to Figure 6 It can be confirmed that the number of iterations is 1000 and the thickness of the first refractive layer 111 and the thickness of the second refractive layer 112 are respectively the optimal values. In this embodiment, the optimal value of the thickness of the first refractive layer 111 is 40.92 nm, and the optimal value of the thickness of the second refractive layer 112 is 103.28 nm.

[0131] Step 4: According to the optimal value of n being 15, the optimal value of the thickness of the first refractive layer 111 being 40.92 nm, and the optimal value of the thickness of the second refractive layer 112 being 103.28 nm, the current optimal DBR structure is determined, and the relationship curve between the transmittance and the incident angle of the current optimal DBR structure in the range of the incident angle of -30° to 30° (referred to as the first relationship curve) is obtained by using MATLAB software, as shown in FIG. Figure 7 shown.

[0132] Depend on Figure 7 It can be seen that within the range of incident angles of -8°~8°, DBR has a good beam focusing effect, especially at normal incidence (incident angle of 0), with a transmittance of 95%, while light with incident angles outside the range of -8°~8° is effectively blocked and the transmittance is 0.

[0133] Step 5: The first relationship curve diagram of the current optimal DBR structure (i.e. Figure 7 ) is integrated to obtain the evaluation factor G, which is used to evaluate the collimation effect of the current optimal DBR structure.

[0134] The calculation formula of the evaluation factor G is as follows:

[0135] .

[0136] In this embodiment, T(436nm,θ) is the transmittance curve of DBR with incident angle when the emission wavelength is 436nm. , , , Finally, the evaluation factor G is calculated to be 26.69, which is greater than 20 and less than 27. Therefore, the optimal value of n is determined to be 15, the optimal value of the thickness of the first refractive layer 111 is determined to be 40.92 nm, and the optimal value of the thickness of the second refractive layer 112 is determined to be 103.28 nm.

[0137] Step 6: Use FDTD simulation software to build a Micro-LED model corresponding to the optimal design parameters (such as Figure 3 As shown in the figure, the Micro-LED model includes DBR, n-GaN layer 211, quantum well layer 212, p-GaN layer 213 and first reflective layer 22 from top to bottom, and FDTD is used to simulate and verify the Micro-LED model to obtain a curve diagram of the relationship between the transmittance and the incident angle of the Micro-LED model, which is recorded as the second relationship curve diagram.

[0138] In this embodiment, the FDTD simulation takes the change of transmittance with the incident angle as the calculation target. Considering that the Micro-LED model structure simulated by FDTD is a symmetrical structure, in order to reduce the simulation time and running computing power, only the positive angle range needs to be considered. The simulation results are as follows: Figure 8 shown.

[0139] Step 7: Process the first relationship curve graph and the second relationship curve graph and calculate the similarity between the two, and then compare them with the preset similarity threshold. Figure 8 It can be seen that the similarity between the curve portion of the first relationship curve graph within the positive angle range and the second relationship curve graph is 89%, which is greater than the preset similarity threshold of 80%, further indicating that the structure of the DBR designed in this embodiment meets the requirements and the structural design of the DBR is completed.

[0140] And by Figure 8It can be seen that when the light is incident normally (the incident angle is 0), the transmittance is as high as 95%, and then as the light output angle increases, the transmittance decreases continuously. When the light output angle is 8°, the transmittance is about 2%, which means that the DBR designed in this embodiment converges the Lambertian distribution of the Micro-LED light output surface to the light cone range of 0~8°, which is consistent with the result reflected by the relationship curve of the transmittance and incident angle of the current optimal DBR structure in the range of -30°~30° obtained in step 4, indicating that the DBR structure designed in this embodiment has a good angle filtering effect, which is conducive to the realization of Micro-LED light output collimation.

[0141] Through the design method of this embodiment, the DBR finally obtained has 15 composite layers 11, each composite layer 11 includes a first refractive layer 111 and a second refractive layer 112 stacked, and the first refractive layer 111 is located above the second refractive layer 112, wherein the material of the first refractive layer 111 is TiO2, and its thickness is 40.92nm, and the material of the second refractive layer 112 is SiO2, and its thickness is 103.28nm. The DBR structure designed in this embodiment can converge the Lambertian distribution state of the Micro-LED light-emitting surface into a light cone range of 0~8°, realize small-angle light emission, and effectively improve the collimation of the Micro-LED.

[0142] Example 2

[0143] This embodiment provides a design method for a Micro-LED structure. The structure of the Micro-LED in this embodiment is as follows: Figure 3 As shown, it includes a body layer 2 and a DBR arranged on the body layer 2, the body layer 2 includes a first reflective layer 22 and a base structure 21 arranged on the first reflective layer 22, the side wall of the base structure 21 is inclined, and the base structure 21 includes a stacked n-GaN layer 211, a quantum well layer 212 and a p-GaN layer 213. Since the light-emitting layer of the Micro-LED is the quantum well layer 212, the light emission of the quantum well is disorderly, and the light is reflected by the side wall and surface inside the Micro-LED, and only a small part of the light can escape. Inclining its side wall can allow more light to be emitted from the surface, and at the same time, it can also constrain the light emitted at a large angle.

[0144] The structural design method of the Micro-LED of this embodiment includes the following steps:

[0145] Step 1: Use dipoles to simulate the quantum well luminescence characteristics of Micro-LED and press Figure 3A simulation model structure is designed, a DBR is set above the main layer 2, and the structure of the DBR is designed using the structural design method of the DBR in Example 1. The top DBR structure designed by MATLAB and FDTD joint simulation in Example 1 is applied to the Micro-LED chip with a size of 10μm×10μm in this embodiment.

[0146] Step 2: Set the sidewall inclination angle range of the base structure 21 to 70°~90°, take the sidewall inclination angle as a variable, and analyze and compare the angle filtering effect of Micro-LED at different inclination angles.

[0147] Step 3: Analyze the angle filtering effect of DBR in Micro-LED through FDTD simulation to determine the optimal value of the sidewall inclination angle of the base structure 21.

[0148] Analyze the relative top light intensity of Micro-LED under different sidewall tilt angles, such as Fig. 9 As shown in the figure, when the sidewall inclination angle is 85°, the top light intensity of the Micro-LED integrated with the top DBR is the largest compared to other inclination angles, and as the sidewall inclination angle gradually decreases, the top light intensity gradually decreases, and most of the light overflows the sidewall, indicating that the 10μm×10μm Micro-LED integrated with the top DBR has the best light output performance when the sidewall inclination angle is 85°.

[0149] At this point, the structural design of the Micro-LED in this embodiment is completed.

[0150] Based on the above analysis, in this embodiment, when the side wall inclination angle of the base structure 21 is 85°, after the top DBR is integrated on the Micro-LED with a size of 10μm×10μm, the device structure has good light output effect and collimation characteristics.

[0151] Furthermore, the results of this embodiment show that the Micro-LED with an inclined sidewall at any angle does not affect the angle filtering effect of the DBR, but has a certain impact on the surface light extraction efficiency. This means that in the Micro-LED manufacturing process, the difficulty of process implementation will not be increased due to the small sidewall inclination angle, and the angle filtering effect of the top DBR will not be lost due to different sidewall inclination angles.

[0152] Example 3

[0153] This embodiment provides a design method for a Micro-LED structure. The structure of the Micro-LED in this embodiment is as follows: Figure 4As shown, it includes a body layer 2, an insulating layer 23 and a second reflective layer 24. The body layer 2 includes a base structure 21 and a first reflective layer 22 located at the bottom of the base structure 21. The side wall of the base structure 21 is inclined. The first reflective layer 22 at the bottom is made of metal. The first reflective layer 22 serves as a metal reflector to collect the light emitted downward from the quantum well and reflect it to the light emitting direction of the top of the chip, so that the light emitted downward is utilized, thereby improving the light extraction efficiency at the top.

[0154] The structural design method of the Micro-LED of this embodiment includes the following steps:

[0155] Step 1: Use dipoles to simulate the quantum well luminescence characteristics of Micro-LED and press Figure 4 The simulation model structure is designed, and a DBR is set above the main layer 2. The structure of the DBR is still designed using the structural design method of the DBR in Example 1. The top DBR structure designed by MATLAB and FDTD joint simulation in Example 1 is applied to the Micro-LED chip with a size of 10μm×10μm in this embodiment.

[0156] Step 2: An insulating layer 23 and a second reflective layer 24 are sequentially disposed on the side walls of the base structure 21 , wherein the insulating layer 23 is made of SiO 2 .

[0157] The second reflective layer 24 is made of metal. The second reflective layer 24 enables the light emitted from the quantum well to be reflected back into the chip, thereby facilitating the improvement of top light emission and preventing crosstalk between adjacent pixels.

[0158] Step 3: Obtain a sidewall inclination angle range of 80°~90° for the base structure 21, a material range of the second reflective layer 24 of one of Ag, Al, and Au, a thickness range of 50~150nm for the second reflective layer 24, and a thickness range of 100~400nm for the insulating layer 23.

[0159] Step 4: Through FDTD simulation calculation, determine the optimal value of the side wall inclination angle of the base structure 21, the optimal material of the second reflective layer 24, the optimal value of the thickness of the second reflective layer 24 and the optimal value of the thickness of the insulating layer 23, so as to maximize the light output energy of the Micro-LED top.

[0160] Step 4.1: While other structural parameters remain unchanged, change the sidewall inclination angle and normalize the top far-field light energy corresponding to different inclination angles to obtain Fig.10 The relationship between the sidewall tilt angle and the normalized far-field energy is shown. Fig.10It can be seen that when the inclination angle is between 80° and 90°, the far-field light output energy at the top increases with the increase of the inclination angle, and the far-field light output energy at the top reaches the maximum value when the inclination angle is 90°. Therefore, it is believed that when the side wall is a vertical side wall, the far-field light output energy at the top is maximized, that is, the optimal value of the side wall inclination angle is 90°.

[0161] Step 4.2: When other structural parameters remain unchanged, the material of the second reflective layer 24 is changed for simulation analysis. The top far-field light energy corresponding to the second reflective layer 24 of different materials is normalized to obtain Fig.11 The corresponding relationship between the material of the second reflective layer 24 and the normalized far-field energy is shown in FIG. Fig.11 It can be seen that when the material of the second reflective layer 24 is Au, the top far-field light output energy reaches the maximum, that is, the optimal material of the second reflective layer 24 is Au.

[0162] Step 4.3: Set the material of the insulating layer 23 to SiO2, determine the effect of its thickness on the top far-field light output energy, and normalize the top far-field light output energy corresponding to the insulating layer 23 with different thicknesses to obtain Fig.12 The corresponding relationship between the thickness of SiO2 and the normalized far-field energy is shown in Fig. Fig.12 It can be seen that the thickness of the insulating layer 23 has little effect on the top far-field light output energy. When the thickness of the insulating layer 23 is 200nm, the light output energy is the largest, which is 6% higher than that of 400nm. That is, the optimal value of the thickness of the insulating layer 23 is 200nm.

[0163] Step 4.4: Set the material of the second reflective layer 24 to Au, determine the effect of its thickness on the top far-field light output energy, and normalize the top far-field light output energy corresponding to the second reflective layer 24 with different thicknesses to obtain Fig.13 The corresponding relationship between Au thickness and normalized far-field energy is shown in Fig. Fig.13 It can be seen that the thickness of the second reflective layer 24 does not have a significant effect on the top far-field light output energy, and the thinner the second reflective layer 24, the greater the effect. When the thickness of the second reflective layer 24 is 50nm, the top far-field light output energy is the largest, which is 4% higher than that of 150nm. However, considering that the thinner the thickness of the second reflective layer 24, the easier it is for the side wall to leak light, crosstalk problems between pixels will occur. Therefore, it can be determined that the thickness of the second reflective layer 24 made of Au is more suitable to be 100nm, that is, the optimal value of the thickness of the second reflective layer 24 is 100nm.

[0164] At this point, the structural design of the Micro-LED in this embodiment is completed.

[0165] Example 4

[0166] This embodiment provides an electronic device, which includes a memory and a processor, wherein the memory is used to store a computer program. When the computer program in the memory is executed by the processor, the DBR structural design method in the above-mentioned embodiment 1 and the Micro-LED structural design method in embodiments 2 and 3 can be implemented.

[0167] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with the technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for designing a structure of a DBR, wherein the DBR comprises n composite layers, each of which comprises a first refractive layer and a second refractive layer stacked in layers, wherein the refractive index of the first refractive layer is greater than the refractive index of the second refractive layer, and wherein: The structural design method of the DBR comprises the following steps: Step 1: obtaining a current value range, wherein the current value range includes a thickness range of the first refractive layer, a thickness range of the second refractive layer, and a value range of n, where n is a positive integer greater than 0; Step 2: Determine the optimal value of n according to the current value range; Step 3: determining an optimal value of the thickness of the first refractive layer and an optimal value of the thickness of the second refractive layer according to the optimal value of n; Step 4: determining a current optimal DBR structure according to the optimal value of n, the optimal value of the thickness of the first refractive layer, and the optimal value of the thickness of the second refractive layer, and obtaining a relationship curve graph between the transmittance and the incident angle of the current optimal DBR structure, recorded as a first relationship curve graph; Step 5: Evaluate the collimation effect of the current optimal DBR structure corresponding to the first relationship curve diagram to obtain a first evaluation result; If the first evaluation result meets the preset conditions, the parameters of the current optimal DBR structure corresponding to the first relationship curve graph are used as optimal design parameters; wherein the optimal design parameters include the optimal value of the thickness of the first refractive layer, the optimal value of the thickness of the second refractive layer, and the optimal value of n; If the first evaluation result does not meet the preset conditions, return to step 1 to re-acquire the current value range until the first evaluation result meets the preset conditions, obtain the optimal design parameters, and complete the structural design of the DBR; The step of evaluating the collimation effect of the current optimal DBR structure corresponding to the first relationship curve graph to obtain a first evaluation result includes: An evaluation factor is obtained by integrating a curve of a relationship between transmittance and incident angle of the current optimal DBR structure, and the evaluation factor is used as the first evaluation result.

2. The DBR structural design method according to claim 1, characterized in that: The evaluation factor is calculated by the following formula: ； Among them, G is the evaluation factor, T is the transmittance, λ is the emission wavelength, and θ is the incident angle; The preset condition is that the evaluation factor is greater than a first set value and less than a second set value.

3. The structural design method of DBR according to claim 1, characterized in that: Determining the optimal value of n according to the current value range includes: Acquire a first angle range and a second angle range; Based on the current value range, the first angle range and the second angle range, a particle swarm algorithm is used to calculate the optimal value of n; Wherein, the second angle range includes the first angle range.

4. The structural design method of DBR according to claim 3, characterized in that: The method of using a particle swarm algorithm to calculate the optimal value of n includes: Selecting a current traversal parameter from the current value range, wherein the current traversal parameter includes the thickness of the first refractive layer, the thickness of the second refractive layer, and the value of n; Determine a corresponding current DBR structure according to the current traversal parameter, and obtain a curve diagram of the relationship between the transmittance and the incident angle of the current DBR structure; Based on the relationship curve graph, calculating the sum of all light transmittances within the first angle range to obtain a first total transmittance; Calculating the sum of all light transmittances within the second angle range to obtain a second total transmittance; The ratio of the first total transmittance to the second total transmittance is calculated, and when the ratio is greater than a preset threshold, the value of n in the current traversal parameter is used as the optimal value of n.

5. The structural design method of DBR according to claim 1, characterized in that: The re-obtaining of the current value range includes: The thickness range of the first refractive layer and the thickness range of the second refractive layer in the current value range are expanded so that the thickness range of the first refractive layer before expansion is within the thickness range of the first refractive layer after expansion and the thickness range of the second refractive layer before expansion is within the thickness range of the second refractive layer after expansion.

6. The structural design method of DBR according to claim 1, characterized in that: The method further comprises: Constructing a Micro-LED model corresponding to the optimal design parameters, simulating the Micro-LED model, and obtaining a curve diagram of the relationship between the transmittance and the incident angle of the Micro-LED model, which is recorded as a second curve diagram; Determining whether to end the structural design of the DBR based on the first relationship curve graph and the second relationship curve graph corresponding to the optimal design parameters; The Micro-LED model includes DBR, n-GaN layer, quantum well layer, p-GaN layer and first reflective layer from top to bottom.

7. The DBR structural design method according to claim 6, characterized in that: The determining whether to end the structural design of the DBR based on the first relationship curve graph and the second relationship curve graph corresponding to the optimal design parameters includes: When the similarity between the first relationship curve graph and the second relationship curve graph exceeds a preset similarity threshold, ending the structural design of the DBR; When the similarity between the first relationship curve graph and the second relationship curve graph does not exceed the preset similarity threshold, return to step 1 to reacquire the current value range until the similarity between the first relationship curve graph and the second relationship curve graph exceeds the preset similarity threshold.

8. A method for designing a structure of a Micro-LED, wherein the Micro-LED comprises a body layer, wherein the body layer comprises a base structure and a first reflective layer located at the bottom of the base structure, wherein the side wall of the base structure is inclined, characterized in that: The Micro-LED structure design method comprises the following steps: A DBR is arranged above the body layer; the DBR is designed using the DBR structural design method according to any one of claims 1 to 7; Acquiring structural parameters, wherein the structural parameters include a range of a side wall inclination angle of the base structure; Based on the structural parameters, simulation calculation is used to determine the design parameters of the Micro-LED, and the design parameters include the optimal value of the side wall inclination angle of the basic structure.

9. The method for designing a Micro-LED structure according to claim 8, characterized in that: Before the step of obtaining the structural parameters, the method further includes: sequentially providing an insulating layer and a second reflecting layer on the side wall of the base structure; Among them, the structural parameters also include the material range of the second reflective layer, the thickness range of the second reflective layer and the thickness range of the insulating layer, and the design parameters also include the optimal material of the second reflective layer, the optimal value of the thickness of the second reflective layer and the optimal value of the thickness of the insulating layer.

10. An electronic device, characterized in that: It comprises a memory and a processor connected to each other, wherein the memory is used to store a computer program, and when the computer program is executed by the processor, it is used to implement the DBR structural design method described in any one of claims 1 to 7, or the Micro-LED structural design method described in any one of claims 8 to 9.

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