An adjustable aperture device for electron beam detection equipment

Abstract

The present invention discloses an adjustable aperture device for electron beam detection equipment, comprising: an aperture base assembly, an X-axis drive assembly, and a Y-axis drive assembly. The aperture base assembly includes a base, a connecting base, an aperture rod, and a feed heating assembly. The Y-axis drive assembly is used to drive the aperture rod to move autonomously along the Y-axis, while the X-axis drive assembly is used to drive the aperture rod to move autonomously along the X-axis. The X-axis drive assembly is connected to the Y-axis drive assembly via a Y-axis motion base and moves together with the Y-axis drive assembly. The connecting base is disposed on the base and connected to the X-axis drive assembly. The feed heating assembly extends through the connecting base and is connected to a power supply and the aperture rod, respectively. The feed heating assembly is used to electrically heat the aperture rod to achieve self-cleaning of the aperture aperture on the aperture rod. The present invention features a compact structure, simple operation, high positioning accuracy, stable operation, and a high degree of automation, significantly improving the efficiency of aperture adjustment and aperture switching.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor electron beam equipment, and in particular relates to an adjustable aperture device for electron beam detection equipment. Background Art

[0002] In existing electron beam inspection equipment, the adjustable aperture is often manually adjusted, which takes a long time, has poor precision, and requires a high degree of operator skill. Furthermore, existing adjustable apertures lack a high-temperature cleaning function, often requiring extended rest times before reaching a detectable state, impacting inspection efficiency. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to address the deficiencies of the prior art and to provide an adjustable aperture device for electron beam detection equipment that has a compact structure, simple operation, stable operation and a high degree of automation.

[0004] To achieve the above object, the present invention can adopt the following technical solutions:

[0005] An adjustable aperture device for electron beam detection equipment comprises: an aperture base assembly, an X-axis drive assembly and a Y-axis drive assembly; the aperture base assembly comprises a base, a connecting base, an aperture rod and a feed heating assembly; the Y-axis drive assembly is used to drive the aperture rod to move autonomously along the Y-axis direction, the X-axis drive assembly is used to drive the aperture rod to move autonomously along the X-axis direction, the X-axis drive assembly is connected to the Y-axis drive assembly via a Y-axis motion base and moves together with the Y-axis drive assembly; the connecting base is arranged on the base, the base is connected to the X-axis drive assembly, the feed heating assembly is arranged through the connecting base, the feed heating assembly is connected to the power supply and the aperture rod respectively, and the feed heating assembly is used to electrically heat the aperture rod to achieve self-cleaning of the aperture hole on the aperture rod.

[0006] As a further improvement of the present invention, the aperture base assembly also includes a mounting base connected to the X-axis drive assembly, a feedthrough hole is provided inside the mounting base, the top of the mounting base is sealed with the positive pole of the power supply, the discharge rod of the positive pole of the power supply is installed to the top of the feedthrough hole through a feedthrough flange, and the bottom of the feedthrough hole is connected to the power feeding heating assembly.

[0007] As a further improvement of the present invention, the power feeding and heating assembly includes an adapter, a terminal block and a heating rod, the adapter is connected to the bottom of the feedthrough hole, one end of the terminal block is connected to the adapter, the other end of the terminal block is connected to the heating rod, and the end of the terminal block close to the heating rod is connected to the negative pole of the power supply, and the heating rod is connected to the aperture rod; by connecting the terminal block to the power supply, the heating rod can be heated and heated, thereby achieving the cleaning of the aperture hole.

[0008] As a further improvement of the present invention, a wire threading hole is provided inside the adapter, and the wire threading hole is used for installing a wiring terminal.

[0009] As a further improvement of the present invention, a connecting tube is provided on the connecting seat, and the connecting tube faces the aperture rod; a bellows is provided on the outside of the connecting terminal, one end of the bellows is connected to the adapter, and the other end of the bellows passes through the connecting seat and the connecting tube, and is nested in the end of the connecting tube.

[0010] As a further improvement of the present invention, a sealing ring is provided at the end of the connecting tube to achieve a sealed connection between the adjustable aperture device and the electron beam equipment.

[0011] As a further improvement of the present invention, the aperture rod is provided with a clearance hole and a plurality of aperture holes side by side.

[0012] As a further improvement of the present invention, four aperture holes are arranged side by side on the aperture rod, and the aperture of the aperture hole is 0.02 mm.

[0013] As a further improvement of the present invention, the heating rod is a ceramic rod.

[0014] As a further improvement of the present invention, both the X-axis drive assembly and the Y-axis drive assembly are provided with limit switches and stroke control adjustable switches to achieve an adjustable stroke of 25 mm in the X direction and an adjustable stroke of 10 mm in the Y direction.

[0015] Compared with the prior art, the advantages of the present invention are:

[0016] The adjustable aperture device for electron beam detection equipment of the present invention is constructed by connecting an aperture base assembly to an X-axis drive assembly, which is then connected to a Y-axis drive assembly. Furthermore, a feed heating assembly is disposed through the connection base and connected to a power supply and an aperture rod, respectively. The X-axis drive assembly drives the aperture rod to move autonomously along the X-axis, while the Y-axis drive assembly drives the aperture rod to move autonomously along the Y-axis. This achieves precise adjustable control of the aperture rod in the X and Y directions under vacuum conditions. The feed heating assembly electrically heats the aperture rod, thereby achieving self-cleaning of the aperture aperture on the aperture rod and preventing the aperture aperture from being affected by condensation of water vapor. The adjustable aperture device of the present invention is used to precisely adjust a 0.02 mm aperture aperture to the center of the device's electron beam, thereby filtering out scattered electrons and forming a beam with a stable beam spot. This achieves precise adjustment of the aperture aperture in the X and Y directions under vacuum conditions, with adjustment accuracy reaching the micron level, laying a good foundation for electron beam shaping. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1Schematic diagram of the structure principle of an adjustable aperture device for electron beam detection equipment in a specific embodiment of the present invention;

[0018] Figure 2 Schematic diagram of the structural principle of the aperture base assembly in a specific embodiment of the present invention;

[0019] Figure 3 A schematic diagram of the cross-sectional structure principle of the aperture base assembly in a specific embodiment of the present invention;

[0020] Figure 4 Schematic diagram of the connection structure principle between the X-axis drive assembly and the Y-axis drive assembly in a specific embodiment of the present invention;

[0021] Legend: 1. Aperture base assembly; 2. X-axis drive assembly; 3. Y-axis drive assembly; 31. Y-axis motion seat; 4. Base; 5. Aperture rod; 51. Air avoidance hole; 52. Aperture hole; 6. Mounting seat; 61. Feedthrough hole; 7. Feedthrough flange; 8. Sealing ring; 9. Connecting pipe; 10. Bellows; 11. Adapter; 111. Threading hole; 12. Wiring terminal; 13. Heating rod; 14. Positive power supply pole; 15. Connecting seat. DETAILED DESCRIPTION

[0022] The present invention will be further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the scope of protection of the present invention is not limited thereby.

[0023] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0024] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0025] Example

[0026] like Figure 1 、 Figure 2 and Figure 4 As shown, the adjustable aperture device for electron beam detection equipment of the present invention comprises: an aperture base assembly 1, an X-axis drive assembly 2, and a Y-axis drive assembly 3. The aperture base assembly 1 includes a base 4, a connecting seat 15, an aperture rod 5, and a feed heating assembly. The Y-axis drive assembly 3 is used to drive the aperture rod 5 for autonomous movement along the Y-axis, while the X-axis drive assembly 2 is used to drive the aperture rod 5 for autonomous movement along the X-axis. The X-axis drive assembly 2 is connected to the Y-axis drive assembly 3 via a Y-axis motion seat 31 and moves together with the Y-axis drive assembly 3. The connecting seat 15 is disposed on the base 4 and connected to the X-axis drive assembly 2. The feed heating assembly is disposed throughout the connecting seat 15 and is connected to a power supply and the aperture rod 5, respectively. The feed heating assembly is used to electrically heat the aperture rod 5 to achieve self-cleaning of the aperture aperture on the aperture rod 5.

[0027] In this embodiment, both the X-axis drive assembly 2 and the Y-axis drive assembly 3 adopt conventional settings in this field. The X-axis drive assembly 2 is mainly used for precisely adjusting the X-direction displacement of the aperture, and includes components such as a motor, a grating scale, and a travel switch. The Y-axis drive assembly 3 is mainly used for precisely adjusting the Y-direction displacement of the aperture, and includes components such as a motor, a grating scale, and a travel switch, and a spring structure can be designed opposite the motor output shaft to form a unidirectional elastic force to minimize the impact of the backlash. Furthermore, the motor can adopt a high-precision motor, and a grating scale can be added in each direction of motion control to achieve closed-loop precision control of the motor, with a positioning accuracy of up to 0.006mm and a repeat positioning accuracy of up to 0.003mm. By providing limit switches and adjustable travel control switches in both the X-axis drive assembly 2 and the Y-axis drive assembly 3, the X-direction travel can be adjusted to 25mm and the Y-direction travel can be adjusted to 10mm.

[0028] In this embodiment, the aperture base assembly 1 and the X-axis drive assembly 2 are connected, and then the X-axis drive assembly 2 is connected to the Y-axis drive assembly 3; further, the feed heating assembly is set through the connecting seat 15, and the feed heating assembly is connected to the power supply and the aperture rod 5 respectively; the X-axis drive assembly 2 is used to drive the aperture rod 5 to move autonomously along the X-axis direction, and the Y-axis drive assembly 3 is used to drive the aperture rod 5 to move autonomously along the Y-axis direction, so that precise adjustable control of the aperture rod in the X and Y directions is achieved under vacuum conditions, and the feed heating assembly is used to electrically heat the aperture rod, that is, self-cleaning of the aperture hole on the aperture rod is achieved. The adjustable aperture device of the present invention is used to precisely adjust the 0.02mm aperture hole to the center of the electron beam of the device, thereby filtering out scattered electrons and forming a beam with a stable beam spot, laying a good foundation for shaping the electron beam.

[0029] like Figure 2 and Figure 3As shown, in this embodiment, the aperture base assembly 1 also includes a mounting base 6 connected to the X-axis drive assembly 2, a feedthrough hole 61 is provided inside the mounting base 6, the top of the mounting base 6 is sealedly connected to the positive pole of the power supply 14 through a sealing ring 8, the discharge rod of the positive pole of the power supply 14 is installed to the top of the feedthrough hole 61 through the feedthrough flange 7, and the bottom of the feedthrough hole 61 is connected to the feed heating assembly.

[0030] like Figure 2 As shown, the feed heating assembly includes an adapter 11, a terminal block 12, and a heating rod 13. The adapter 11 is connected to the bottom of the feedthrough hole 61, one end of the terminal block 12 is connected to the adapter 11, and the other end of the terminal block 12 is connected to the heating rod 13. The end of the terminal block 12 near the heating rod 13 is connected to the negative pole of the power supply, and the heating rod 13 is connected to the aperture rod 5. By connecting the terminal block 12 to the power supply, the heating rod 13 is heated and the aperture hole 52 is cleaned. Furthermore, the heating rod 13 is a ceramic rod.

[0031] like Figure 2 As shown, a wire hole 111 is provided inside the adapter 11 , and the wire hole 111 is used for detachably installing the terminal 12 .

[0032] like Figure 2 As shown, a connecting tube 9 is mounted on the connecting base 15, facing the aperture rod 5. A bellows 10 is sheathed around the terminal 12. One end of the bellows 10 connects to an adapter 11, while the other end of the bellows 10 passes through the connecting base 15 and the connecting tube 9, nesting within the end of the connecting tube 9. A sealing ring 8 is installed at the end of the connecting tube 9 to provide a sealed connection between the adjustable aperture assembly and the electron beam device. The X-axis drive assembly 2 utilizes the unidirectional elastic force of the bellows 10 to minimize the effects of backlash.

[0033] like Figure 1 As shown, the aperture rod 5 is provided with a side-by-side air-avoidance hole 51 and multiple aperture holes 52, with the air-avoidance hole 51 being close to the connecting seat 15. Furthermore, four aperture holes 52 are provided side by side on the aperture rod 5, each with an aperture diameter of 0.02 mm. The four aperture holes 52 can be switched at will, enabling centering adjustment and aperture position switching of the aperture without disassembly, reducing maintenance costs and improving work efficiency.

[0034] In this embodiment, a protective shell may be provided to cover and protect the entire structure to prevent accidental damage to the structure.

[0035] Working Principle: When an electron beam is directed vertically, the electrons are scattered. The adjustable aperture provides a very small aperture, filtering out the scattered electrons and leaving only the electron beam group with a larger central beam. To ensure that the main electron beam passes through the center of aperture 52, retaining the main beam while filtering out scattered electrons, precise control of the position of aperture 52 is required. The adjustable aperture device of this embodiment provides X-axis front-to-back positioning control and Y-axis left-to-right positioning control, allowing aperture 52 to be adjusted to a precise position that retains the main beam while filtering out scattered electrons, thereby achieving precise filtering of the electron beam.

[0036] Although the present invention is disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can, without departing from the spirit and technical solutions of the present invention, use the methods and technical contents disclosed above to make many possible changes and modifications to the technical solutions of the present invention, or modify them into equivalent embodiments with equivalent changes. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments based on the technical spirit of the present invention without departing from the content of the technical solutions of the present invention, shall still fall within the scope of protection of the technical solutions of the present invention.

Claims

1. An adjustable aperture device for electron beam detection equipment, characterized in that: include: An aperture base assembly (1), an X-axis drive assembly (2) and a Y-axis drive assembly (3); the aperture base assembly (1) includes a base (4), a connecting seat (15), an aperture rod (5) and a feeding heating assembly; the Y-axis drive assembly (3) is used to drive the aperture rod (5) to move autonomously along the Y-axis direction, the X-axis drive assembly (2) is used to drive the aperture rod (5) to move autonomously along the X-axis direction, the X-axis drive assembly (2) is connected to the Y-axis drive assembly (3) through the Y-axis motion seat (31), and moves together with the Y-axis drive assembly (3); the connecting seat (15) is set on the base (4), the base (4) is connected to the X-axis drive assembly (2), the feeding heating assembly is set through the connecting seat (15), the feeding heating assembly is connected to the power supply and the aperture rod (5) respectively, and the feeding heating assembly is used to electrically heat the aperture rod (5) to achieve self-cleaning of the aperture hole on the aperture rod (5).

2. The adjustable aperture device for electron beam detection equipment according to claim 1, characterized in that: The aperture base assembly (1) also includes a mounting base (6) connected to the X-axis drive assembly (2), a feedthrough hole (61) is provided inside the mounting base (6), the top of the mounting base (6) is sealedly connected to the positive electrode of the power supply (14), the discharge rod of the positive electrode of the power supply (14) is installed to the top of the feedthrough hole (61) through the feedthrough flange (7), and the bottom of the feedthrough hole (61) is connected to the feed heating assembly.

3. The adjustable aperture device for electron beam detection equipment according to claim 2, characterized in that: The feed heating assembly comprises an adapter (11), a terminal block (12) and a heating rod (13); the adapter (11) is connected to the bottom of the feed-through hole (61); one end of the terminal block (12) is connected to the adapter (11); the other end of the terminal block (12) is connected to the heating rod (13); and the end of the terminal block (12) close to the heating rod (13) is connected to the negative pole of the power supply; the heating rod (13) is connected to the aperture rod (5); by connecting the terminal block (12) to the power supply, the heating rod (13) is heated and heated, thereby cleaning the aperture hole (52).

4. The adjustable aperture device for electron beam detection equipment according to claim 3, characterized in that: A wire threading hole (111) is provided inside the adapter (11), and the wire threading hole (111) is used for installing a wiring terminal (12).

5. The adjustable aperture device for electron beam detection equipment according to claim 3, characterized in that: A connecting tube (9) is provided on the connecting seat (15), and the connecting tube (9) faces the aperture rod (5); a bellows (10) is provided outside the connecting terminal (12), one end of the bellows (10) is connected to the adapter (11), and the other end of the bellows (10) passes through the connecting seat (15) and the connecting tube (9), and is nested in the end of the connecting tube (9).

6. The adjustable aperture device for electron beam detection equipment according to claim 5, characterized in that: The end of the connecting pipe (9) is provided with a sealing ring (8) to achieve a sealed connection between the adjustable aperture device and the electron beam equipment.

7. The adjustable aperture device for electron beam detection equipment according to any one of claims 1 to 6, characterized in that: The aperture rod (5) is provided with a space-avoiding hole (51) and a plurality of aperture holes (52) arranged side by side.

8. The adjustable aperture device for electron beam detection equipment according to claim 7, characterized in that: Four aperture holes (52) are arranged side by side on the aperture rod (5), and the aperture of the aperture hole (52) is 0.02 mm.

9. The adjustable aperture device for electron beam detection equipment according to any one of claims 4 to 6, characterized in that: The heating rod (13) is a ceramic rod.

10. The adjustable aperture device for electron beam detection equipment according to any one of claims 1 to 6, characterized in that: The X-axis drive assembly (2) and the Y-axis drive assembly (3) are both provided with a limit switch and a stroke control adjustable switch to achieve an X-direction stroke adjustable by 25 mm and a Y-direction stroke adjustable by 10 mm.

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