Inertial measurement device

Abstract

The present disclosure pertains to an inertial measurement device that makes it possible to improve the detection accuracy of a multi-IMU system. Four island parts (each island part has a size obtained by dividing a square opening part provided on a substrate into four parts and has one inertial measurement unit (IMU) mounted thereon) and each part of a right side part or a left side part with respect to the center of each side of the opening part are connected by a connection part. The connecting portion has a lower stiffness than the substrate and the island portion. The method can be used in a multi-IMU system.

Description

Technical Field

[0001] The present disclosure relates to an inertial measurement device, and more particularly to an inertial measurement device capable of improving detection accuracy of a multi-IMU. Background Art

[0002] A multi-IMU is proposed to improve the detection accuracy by integrating the detection results of multiple IMUs.

[0003] As a technology for improving the detection accuracy of a multi-IMU, a technology for appropriately combining observation values ​​of a plurality of IMUs according to noise characteristics of the plurality of IMUs and conditions of the observation values ​​has been proposed (see Patent Document 1).

[0004] Reference List

[0005] Patent Literature

[0006] Patent document 1: WO2020 / 045099 Summary of the invention

[0007] Technical issues

[0008] Incidentally, a vibration-type IMU using a micro-electromechanical system (MEMS) for a multi-IMU using a plurality of IMUs (including the example of Patent Document 1) detects angular velocity based on a Coriolis force generated by rotating an object while applying vibration.

[0009] However, since a plurality of IMUs cause vibrations, interference is generated by vibrations generated by other IMUs, and beat noise caused by the interference may occur for each IMU.

[0010] In particular, with the recent improvement in the operating accuracy of IMUs, IMUs in which manufacturing deviations are reduced and the frequencies of vibrations generated by individual IMUs are similar have been mass-produced, and therefore, interference is easily generated, and the IMU is susceptible to beat noise caused by the interference.

[0011] In particular, the present disclosure has been made in view of such a situation, and the present disclosure aims to reduce the influence of beat noise caused by interference between the individual IMUs constituting the multi-IMU and realize a high-precision multi-IMU.

[0012] Solution to the problem

[0013] An inertial measurement device according to one aspect of the present disclosure is an inertial measurement device comprising: a predetermined number of mounting portions configured to have a single inertial measurement unit (IMU) mounted on the mounting portion; and a predetermined number of connecting portions configured to connect one of the mounting portions to an edge of an opening portion provided on a substrate, wherein the rigidity of the connecting portion is lower than the rigidity of the substrate.

[0014] In one aspect of the present disclosure, a predetermined number of mounting portions for mounting one inertial measurement unit (IMU) are connected to edges of an opening portion provided on a substrate through a predetermined number of connecting portions, and the rigidity of the connecting portions is lower than that of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] [ Figure 1 ] Figure 1 is a diagram showing multiple IMUs.

[0016] [ Figure 2 ] Figure 2 It is a diagram showing the structure of the IMU.

[0017] [ Figure 3 ] Figure 3 It is shown Figure 2 Diagram of the circuit configuration of the readout circuit of the IMU.

[0018] [ Figure 4 ] Figure 4 It is shown Figure 2 Diagram of the operation of the IMU.

[0019] [ Figure 5 ] Figure 5 is a diagram showing the operation of a multi-IMU.

[0020] [ Figure 6 ] Figure 6 is a diagram showing interference caused by multiple IMUs.

[0021] [ Figure 7 ] Figure 7 is a diagram showing interference caused by multiple IMUs.

[0022] [ Figure 8 ] Figure 8 is a diagram showing interference caused by multiple IMUs.

[0023] [ Fig. 9 ] Fig. 9 It is a diagram showing a method of suppressing interference caused by a multi-IMU.

[0024] [ Fig.10 ] Fig.10 1 is a diagram showing a first embodiment of a multi-IMU according to the present disclosure.

[0025] [ Fig.11 ] Fig.11 It is shown Fig.10 Figure 2. The structure of the multi-IMU with suppressed beats.

[0026] [ Fig.12 ] Fig.12 : is a diagram showing a first modified example of the first embodiment of the multi IMU of the present disclosure.

[0027] [ Fig.13 ] Fig.13 : is a diagram showing a second modified example of the first embodiment of the multi IMU of the present disclosure.

[0028] [ Fig.14 ] Fig.14 : is a diagram showing a third modified example of the first embodiment of the multi IMU of the present disclosure.

[0029] [ Fig.15 ] Fig.15 is a diagram showing a first example of a second embodiment of a multi-IMU of the present disclosure.

[0030] [ Fig.16 ] Fig.16 is a diagram showing a second example of the second embodiment of the multi-IMU of the present disclosure.

[0031] [ Fig.17 ] Fig.17 is a diagram showing a third example of the second embodiment of the multi-IMU of the present disclosure.

[0032] [ Fig.18 ] Fig.18 is a diagram showing a fourth example of the second embodiment of the multi-IMU of the present disclosure.

[0033] [ Fig.19 ] Fig.19 is a diagram showing a first example of the third embodiment of the multi-IMU of the present disclosure.

[0034] [ Fig. 20 ] Fig. 20 is a diagram showing a second example of the third embodiment of the multi-IMU of the present disclosure.

[0035] [ Fig.21 ] Fig.21 It is a diagram showing a fourth embodiment of the multi-IMU of the present disclosure.

[0036] [ Fig. 22 ] Fig. 22 It is a diagram showing a fourth embodiment of the multi-IMU of the present disclosure.

[0037] [ Fig.23 ] Fig.23 It is a diagram showing a fifth embodiment of the multi-IMU of the present disclosure.

[0038] [ Fig.24 ] Fig.24 It is a diagram showing a sixth embodiment of the multi-IMU of the present disclosure.

[0039] [ Fig.25 ] Fig.25 It is a diagram showing a seventh embodiment of the multi-IMU of the present disclosure.

[0040] [ Fig.26 ] Fig.26 It is a diagram showing an eighth embodiment of the multi-IMU of the present disclosure. DETAILED DESCRIPTION

[0041] Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the present specification and the accompanying drawings, components having substantially the same functional configuration will be denoted by the same reference numerals, and thus repeated descriptions thereof will be omitted.

[0042] Hereinafter, a mode for implementing the present technology will be described. The description will be given in the following order.

[0043] 1. Overview of the Disclosure

[0044] 2. First Implementation

[0045] 3. Second Implementation

[0046] 4. Third Implementation

[0047] 5. Fourth embodiment

[0048] 6. Fifth Implementation

[0049] 7. Sixth Implementation

[0050] 8. Seventh Implementation Method

[0051] 9. Eighth Implementation

[0052] <<1. Overview of the present disclosure>>

[0053] <Multi-IMU>

[0054] The present disclosure is particularly directed to reducing the influence of beat noise caused by interference between individual IMUs constituting a multi-inertial measurement unit (IMU) and realizing a high-precision multi-IMU.

[0055] First, when describing an overview of the present disclosure, a multi-IMU will be described.

[0056] like Figure 1 As shown in the left part of , the IMU 1 as a single unit, for example, includes: an acceleration sensor that detects acceleration as translational motion in each of three axial directions including the XYZ axes; and a gyro sensor that detects angular velocity as rotational motion to detect acceleration and angular velocity in each of the three axial directions.

[0057] Although there is also a high-precision IMU 1 as a single unit, high-precision IMUs are generally large and expensive. For high precision, the IMU becomes large and its cost increases.

[0058] As Figure 1 shown in the right part of , a plurality (e.g., n) of low-precision but inexpensive IMUs 1 are provided, for example, IMU 1-1 to IMU 1-n, and the combiner 2 combines the acceleration and angular velocity as the detection results of IMU 1-1 to IMU 1-n, thereby reducing the noise density and bias fluctuation to 1 / √n, achieving an improvement in detection accuracy and achieving high precision, thus obtaining the multi-IMU 10.

[0059] Compared with the device size and device cost when preparing the high-precision IMU 1 shown in the left part of as a single unit, the device size and device cost related to each of the low-precision and inexpensive IMUs 1-1 to IMU 1-n that make up the multi-IMU 10 shown in the right part of can be sufficiently reduced, and cost reduction can also be achieved. Figure 1 the left part of Figure 1 the right part of

[0060] Hereinafter, unless it is necessary to particularly distinguish IMU 1-1 to IMU 1-n, IMU 1-1 to IMU 1-n will be simply referred to as IMU 1, and other configurations will also be abbreviated in the same way. In addition, in this specification, although IMU 1 is assumed to be a small, inexpensive, and relatively low-precision IMU hereinafter, IMU 1 can also be a large, expensive, and highly accurate IMU.

[0061] <Structure of IMU>

[0062] Next, the structure of the IMU 1 will be described with reference to Figure 2

[0063] As Figure 2 shown in the right part of , each IMU 1 that makes up the multi-IMU 10 includes a silicon vibrator 11, a base 12 that fixes the vibrator 11, and a readout circuit 13 that reads the vibration of the vibrator 11 and outputs the angular velocity from the top in the figure, and these components are adhered (bonded) in the order shown in the right part of , and are integrated together by resin molding as shown in the left part of . Figure 2 the right part of Figure 2 the left part of

[0064] <Circuit Configuration of Readout Circuit>

[0065] Next, we will refer to Figure 3 The circuit configuration of the readout circuit 13 in the IMU 1 is described.

[0066] Figure 3 There is shown a configuration for detecting angular velocity in a readout circuit constituting the IMU 1. Since the configuration for detecting acceleration in the IMU 1 is a configuration excluding a detection circuit from the configuration for detecting angular velocity, a configuration for detecting a more complicated angular velocity will be specifically described.

[0067] The readout circuit 13 includes a driving circuit block 31 , a sensing circuit block 32 , and a digital output circuit block 33 .

[0068] The driving circuit block 31 supplies an oscillation signal having a predetermined driving frequency to the vibrator 11 configured by a micro-electromechanical system (MEMS) and the sensing circuit block 32 , and vibrates the vibrator 11 based on the oscillation signal.

[0069] The sensing circuit block 32 detects vibration generated according to the Coriolis force acting on the vibrator 11 vibrating based on the oscillation signal as an analog signal, and outputs the analog signal to the digital output circuit block 33 .

[0070] The digital output circuit block 33 converts the vibration generated according to the Coriolis force acting on the vibrator 11 supplied from the sensing circuit block 32 from an analog signal to a digital signal, and outputs the digital signal as an angular velocity.

[0071] More specifically, the drive circuit block 31 includes an oscillation circuit 51 and an automatic gain adjustment circuit 52 .

[0072] The oscillation circuit 51 is configured by RC, and generates an oscillation signal using the vibration supplied from the vibrator 11 as a reference signal, and outputs the oscillation signal to the automatic gain adjustment circuit 52 and the phase shift circuit 72 of the sensing circuit block 32 .

[0073] The automatic gain adjustment circuit 52 adjusts the gain of the oscillation signal at the driving frequency supplied from the oscillation circuit 51 , and supplies the oscillation signal to the vibrator 11 to vibrate the vibrator 11 .

[0074] The sensing circuit block 32 includes a charge amplifier circuit 71 , a phase shift circuit 72 , a synchronous detection circuit 73 , and an LPF 74 .

[0075] The charge amplifier circuit 71 detects the vibration of the vibrator 11 as a vibration signal, amplifies the vibration signal, and supplies the generated vibration signal to the phase shift circuit 72 .

[0076] The phase shift circuit 72 adjusts the phase of the vibration signal of the vibrator 11 detected by the charge amplifier circuit 71 based on the oscillation signal provided from the oscillation circuit 51, and outputs the vibration signal to the synchronous detection circuit 73.

[0077] The synchronous detection circuit 73 detects, from the vibration signal of the vibrator 11 whose phase has been adjusted, the waveform represented by the envelope indicating the Coriolis force acting on the vibrator 11, and outputs this waveform to the LPF 74.

[0078] The LPF 74 smoothes the waveform indicating the Coriolis force acting on the vibrator 11, and outputs the waveform to the digital output circuit block 33 as information regarding the angular velocity including an analog signal.

[0079] The digital output circuit block 33 includes an AD conversion circuit 91, a decimation filter 92, and a digital output circuit 93.

[0080] The AD conversion circuit 91 converts the information regarding the angular velocity of the Coriolis force acting on the vibrator 11 configured by the analog signal into a digital signal, and outputs the digital signal to the decimation filter 92.

[0081] The decimation filter 92 averages the information regarding the angular velocity configured by the digital signal, and outputs this information to the digital output circuit 93.

[0082] The digital output circuit 93 outputs the digitized and averaged angular velocity information as a digital signal.

[0083] <Operation of the IMU>

[0084] Next, the operation of the IMU 1 will be described with reference to Figure 4 As shown in the upper left part of

[0085] As Figure 4 shown, the vibrator 11 oscillates by means of the oscillation circuit 51, and vibrates based on a reference signal including an oscillation signal at the drive frequency fb, the gain of which has been adjusted by the automatic gain adjustment circuit 52.

[0086] In this case, when the Coriolis force acts on the vibrator 11, amplitude modulation according to the Coriolis force is applied, and the waveform output from the charge amplifier circuit 71 undergoes amplitude modulation according to the Coriolis force, for example, for the drive frequency fb as shown by the waveform fbc.

[0087] The synchronous detection circuit 73 detects the amplitude modulation according to the Coriolis force from the envelope of the waveform fbc as the waveform of the analog signal indicating the Coriolis force, i.e., the angular velocity, and outputs this waveform to the LPF 74.

[0088] The waveform of the analog signal extracted as the Coriolis force is converted into a digital signal by the digital output circuit block 33 and output as a digitized angular velocity value.

[0089] In a multi-IMU, for example, Figure 5 As shown, the n IMUs 1 are collected and integrated, and the angular velocities detected by the IMUs 1-1 to 1-n are combined by the combiner 2 to obtain a high-precision output.

[0090] <Interference caused by multiple IMUs>

[0091] For example, the multi-IMU 10 is specifically as follows Figure 6 Configure as shown.

[0092] That is to say, Figure 6 In the multi-IMU 10 , the IMU 1 - 1 to IMU 1 - 4 are disposed on a printed circuit board 110 .

[0093] In the case of such a configuration, the angular velocity detected by IMU 1-1 to IMU 1-4 is Figure 6 The multiple IMUs 10 are combined to improve the detection accuracy and perform output.

[0094] Incidentally, it is known that the IMU 1 is manufactured to have a variation of, for example, about 3% in the driving frequency due to individual differences in manufacturing.

[0095] Therefore, when the IMU 1 is designed so that the driving frequency is 20.000kHz, as Figure 6 As shown in IMU 1-1 to IMU 1-4, for example, IMU 1 is configured to be driven at a driving frequency of 20.000 kHz for IMU 1-1, at a driving frequency of 20.010 kHz for IMU 1-2, at a driving frequency of 19.900 kHz for IMU 1-3, and at a driving frequency of 20.020 kHz for IMU 1-1.

[0096] In this case, since the frequency difference between the respective driving frequencies of the IMU 1 - 1 to the IMU 1 - 4 is small, interference is generated in the vibration of the vibrator 11 .

[0097] More specifically, if Figure 7As shown, for example, for a reference signal including an oscillation signal at a driving frequency fb outputted via an automatic gain adjustment circuit 52 in a predetermined IMU 1, a reference signal including a driving frequency fb' (≠fb) of other IMUs 1 existing nearby becomes a disturbance (acoustic vibration), and interference occurs, and the reference signal actually provided to the vibrator 11 undergoes amplitude modulation and is provided to the vibrator 11 as an amplitude-modulated signal fe including a beat according to a frequency difference.

[0098] Therefore, when a reference signal including the driving frequency fb is supplied to the vibrator 11, Figure 7 The waveform fc in the figure is detected as an angular velocity, and the reference signal provided to the vibrator 11 is changed into an amplitude modulated signal fe due to the disturbance. For the waveform fc originally detected as the angular velocity, the angular velocity is detected as an amplitude modulated signal shown by the thick line in the figure, and therefore, an error occurs in the angular velocity.

[0099] Similarly, a beat as a frequency vibration is generated according to the frequency difference between the IMU 1 - 1 and the IMU 1 - 4 .

[0100] That is to say, Figure 8 As shown, the beat frequency between IMU 1-1 and IMU 1-2 is 10 Hz, which is the driving frequency difference between IMU 1-1 and IMU 1-2; the beat frequency between IMU 1-1 and IMU 1-3 is 100 Hz, which is the driving frequency difference between IMU 1-1 and IMU 1-3; the beat frequency between IMU 1-1 and IMU 1-3 is 20 Hz, which is the driving frequency difference between IMU 1-1 and IMU 1-3.

[0101] In addition, the beat frequency between IMU 1-2 and IMU 1-3 becomes 110 Hz, which is the driving frequency difference between IMU 1-2 and IMU 1-3; the beat frequency between IMU 1-2 and IMU 1-4 becomes 10 Hz, which is the driving frequency difference between IMU 1-2 and IMU 1-4, and the beat frequency between IMU 1-3 and IMU 1-4 becomes 120 Hz, which is the driving frequency difference between IMU 1-3 and IMU 1-4.

[0102] Therefore, in IMU 1-1 to IMU 1-4, error vibrations in the beat frequency are superimposed due to interference caused by each other's reference signals, and angular velocities including errors are detected in IMU 1-1 to IMU 1-4, and therefore, there is a concern that an appropriate angular velocity cannot be obtained even if the angular velocities are combined.

[0103] So, for example, Fig. 9As shown in the multi-IMU 110 in FIG. 1 , it is conceivable to suppress the generation of beats by selecting four IMUs 1-11 to IMU 1-14 having completely different driving frequencies.

[0104] exist Fig. 9 In the embodiment, the driving frequencies of IMU 1-11 to IMU 1-14 are set to 25kHz, 20kHz, 15kHz and 30kHz respectively.

[0105] Therefore, the generation of the beats is suppressed by the corresponding IMUs 1-11 to 1-14 having completely different driving frequencies.

[0106] However, since the IMU 1 including at least four types of driving frequencies needs to be manufactured when configuring the multi IMU 110, the manufacturing cost increases, and the variation of the driving frequency is limited, so the number of combinations is limited.

[0107] <<2. First embodiment>>

[0108] <Example of Configuration of Multi-IMU of the Present Disclosure>

[0109] Therefore, in the multi-IMU of the present disclosure, the shape of the substrate is designed so that the multiple IMUs constituting the multi-IMU are arranged in an island structure, and thus, interference caused by mutual vibration is suppressed, and the generation of beat noise caused by interference is suppressed.

[0110] That is to say, Fig.10 In the illustrated multi-IMU 200 of the present disclosure, IMUs 201 - 1 to 201 - 4 are arranged on a printed circuit board 210 .

[0111] Here, Fig.10 The printed circuit board 210 and the IMUs 201-1 to 201-4 in the multi-IMU 200 have the same Figure 6 The printed circuit board 110 in the IMU 10 and the IMU 1-1 to IMU 1-4 correspond to the configuration. In addition, the number of IMUs 201 arranged on the printed circuit board 210 is not limited to Fig.10 There are four IMUs 201-1 to 201-4 shown in FIG, but other numbers are possible.

[0112] In addition to IMU 201-1 to IMU 201-4, Fig.10A control integrated circuit (IC) 202 for controlling the multi-IMU 200 and combining and outputting the detection results of the IMU 201-1 to the IMU 201-4, and a connector 203 for electrically connecting the multi-IMU 200 to an external device are also provided on the printed circuit board 210 of the multi-IMU 200.

[0113] In addition, Fig.10 The printed circuit board 210 of the multi-IMU 200 is also provided with screw holes 204-1 and 204-2 for joining the multi-IMU 200 to another substrate or the like (not shown) by means of screws or the like.

[0114] The IMUs 201-1 to 201-4 are provided in the island structure portions 221-1 to 221-4 provided on the right portion of the figure in the printed circuit board 210. Fig.10 An island-like structure portion 221 is extracted and shown on the right portion.

[0115] The island-like structural portions 221-1 to 221-4 are structures within the range of a rectangular shape indicated by a single-dot chain line in the figure, and when an approximately rectangular opening portion 211 (which is represented by a blank portion in the figure) provided on the printed circuit board 210 is roughly divided into four parts, island-like structural portions 221-1 to 221-4 are formed within the corresponding range.

[0116] like Fig.10 As shown in the right part of FIG. 2 , the single island structure portion 221 includes an island portion 221a and a connection portion 221b, and the IMU 201 is arranged on the island portion 221a. In other words, the island portion 221a serves as a mounting portion on which the IMU 201 is mounted. The shape and size of each island portion 221a are approximately 1 / 4 of the shape and size of the opening portion 211. That is, the opening portion 211 includes island portions 221a-1 to 221a-4.

[0117] The interval between adjacent islands 221a is set to a distance at which the islands 221a do not contact each other due to thermal expansion of the material, etc. In addition, the interval between each island 221a and each side of the opening 211 (the edge of the opening 211) is also set to a distance at which each island 221a and each side of the opening 211 do not contact each other due to thermal expansion of the material, etc. In the substrate 210, after the rectangular opening 211 is formed, each island 221a is not connected to the edge of the opening 211 by the connecting portion 221b, and by using a router to Fig.10 The blank part in the opening 211 in the substrate 210 is cut into a slit shape to form the island 221a and the connecting portion 221b. Therefore, the interval between adjacent islands 221a is approximately the size of the outer shape of the router that cuts the substrate 210.

[0118] When the approximately square opening portion 211 represented by the blank portion in the figure is observed from the periphery, the connecting portion 221b connects a portion of the portion to the right of the center position of each side (each edge) constituting the opening portion 211 to a portion of the island portion 221a, so that the island portion 221a is connected to the printed circuit board 210.

[0119] In the case of such a configuration, the island-like structure portions 221 - 1 to 221 - 4 are arranged such that the arrangement direction of the island-like structure portions 221 - 1 to 221 - 4 is rotated 90 degrees clockwise when viewed in clockwise order in the drawing.

[0120] The clockwise order of the island structure portions 221-1 to 221-4 specifically refers to the order of the island structure portion 221-1, the island structure portion 221-2, the island structure portion 221-4, and the island structure portion 221-3 when the island structure portion 221-1 is the starting point.

[0121] That is, the island-like structure portion 221-1 is arranged so that the connection portion 221b-1 is in the upper direction in the figure, the island-like structure portion 221-2 is arranged so that the connection portion 221b-2 is in the right direction in the figure, the island-like structure portion 221-4 is arranged so that the connection portion 221b-4 is in the lower direction in the figure, and the island-like structure portion 221-3 is arranged so that the connection portion 221b-3 is in the left direction in the figure.

[0122] When observing the approximately square opening portion 211 represented by the blank portion in the figure from the outer periphery, the connecting portion 221b can connect the portion on the left side of the center position of each side of the opening portion 211 to the island portion 221a so that the island portion 221a is connected to the printed circuit board 210.

[0123] The connection portion 221 b is provided with wiring (not shown) connected to the IMU 201 installed in the island portion 221 a , and the connection portion 221 b physically connects the IMU 201 to the printed circuit board 210 , and electrically connects the IMU 201 to the printed circuit board 210 .

[0124] The connection portion 221b is configured to be lower in rigidity than the island portion 221a, and has a configuration in which vibration in the printed circuit board 210 is difficult to propagate to the island portion 221a. More specifically, the width Wg of the connection portion 221b is smaller than the width Wi of the island portion 221a, and the connection portion 221b is thin, so that the rigidity of the connection portion 221b is lower than the rigidity of the island portion 221a. In the case of such a configuration, even if the connection portion 221b and the island portion 221a have the same material, the rigidity of the connection portion 221b is lower than the rigidity of the island portion 221a. In addition, since the connection portion 221b is smaller than the printed circuit board 210, the rigidity of the connection portion 221b is lower than the rigidity of the printed circuit board 210.

[0125] That is, because the rigidity between the island portion 221a and the printed circuit board 210 is less than the rigidity of the connecting portion 221b, the driving vibration between the IMU 201-1 to the IMU 201-4 is difficult to propagate through the printed circuit board 210, and thus the interference of the driving vibration between the IMU 201-1 to the IMU 201-4 can be suppressed, and as a result, the generation of the beat noise caused by the interference can be suppressed.

[0126] In order to form a wiring connected to the IMU 201, the width Wi of the connection portion 221b is minimized so that the rigidity of the connection portion 221b can be further reduced and the driving vibration transmitted by the IMU 201-1 to IMU 201-4 through the printed circuit board 210 can be more difficult to propagate to the island portion 221a.

[0127] That is, since the rigidity can be reduced by reducing the width Wi of the connecting portion 221b, it is possible to make the driving vibration between IMU201-1 to IMU 201-4 difficult to propagate, and as a result, the generation of beat noise due to suppressed interference between IMU 201-1 to IMU 201-4 can be suppressed.

[0128] In addition, Fig.11 In the illustrated structure, the island-like structure portions 221 to which the driving vibration propagated through the printed circuit board 210 is applied from the same direction among the island-like structure portions 221 - 1 to 221 - 4 are provided with connection portions 221 b at positions separated from each other.

[0129] Due to such a structure, propagation of driving vibration in the same direction is difficult to proceed, and this makes it possible to suppress the generation of beat noise due to suppressed interference.

[0130] More specifically, if Fig.11 As shown, the island portions 221a-1 and 221a-4 in the island-like structure portions 221-1 and 221-4 in the island-like structure portions 221-1 to 221-4 are connected to the printed circuit board 210 through the connecting portions 221b-1 and 221b-4, and the vibration from the printed circuit board 210 is easily transmitted to the island portions 221a-1 and 221a-4 in the direction of the arrow DV in the figure through the connecting portions 221b-1 and 221b-4.

[0131] For example, when both the connection portions 221 b - 1 and 221 b - 4 are arranged close to each other, two vibrations are easily propagated, and as a result, interference is generated between the IMU 201 - 1 and the IMU 201 - 4 , thereby causing beat noise.

[0132] On the other hand, in the structure of the multi-IMU 200 of the present disclosure, as Fig.11 As shown in the figure, as indicated by the dotted arrows, the connecting portions 221b-1 and 221b-4 are both arranged on opposite sides of the substantially square opening portion 211 at point-symmetrical positions with respect to the center position of the opening portion 211, and are arranged at separate positions on the printed circuit board 210 that transmits vibrations.

[0133] Although the propagation distance is longer and the vibration is further weakened, since the distance between the connection parts 221b-1 and 221b-4 is arranged at separate positions in the printed circuit board 210 as described above, it is difficult for the vibration to propagate between the connection parts 221b-1 and 221b-4.

[0134] That is, with such a structure, it is possible to suppress the interference between the IMU 201 - 1 and the IMU 201 - 4 and suppress the generation of beat noise caused by the interference.

[0135] In addition, if Fig.11 As shown, the island portions 221a-2 and 221a-3 in the island-like structure portions 221-2 and 221-3 in the island-like structure portions 221-1 to 221-4 are connected to the printed circuit board 210 via the connecting portions 221b-2 and 221b-3, and the vibration from the printed circuit board 210 is easily transmitted to the island portions 221a-2 and 221a-3 in the direction of the arrow DV in the figure via the connecting portions 221b-2 and 221b-3.

[0136] For the connecting parts 221b-2 and 221b-3, as Fig.11 As shown, similar to the connecting portions 221b-1 and 221b-4, as indicated by the dotted arrows, the connecting portions 221b-2 and 221b-2 are both arranged on opposite sides of the basically square opening portion 211 at point-symmetrical positions with respect to the center position of the opening portion 211, and are arranged at separate positions on the printed circuit board 210 that transmits vibrations.

[0137] That is, in the case of such a structure, the interference between the IMU 201-1 and the IMU 201-4 can be suppressed, the interference between the IMU 201-2 and the IMU 201-3 can be suppressed, and the generation of the beat noise caused by the interference can be suppressed.

[0138] Fig.11 Only the Fig.10 The island structures 221-1 to 221-4 surrounded by the rectangular dotted lines in FIG. Fig.10The extracted range in the multi-IMU 200. Hereinafter, the range where the island-like structure parts 221-1 to 221-4 are arranged is simply referred to as an IMU arrangement unit 200U.

[0139] In addition, although an example has been described in which the opening portion 211 has an approximately square shape and the island portion 211a has a shape that is approximately 1 / 4 the size of the opening portion 211, the shape is not necessarily square or rectangular, and an island portion 211a may be formed that can be accommodated in the opening portion 211 and on which the IMU 201 can be mounted.

[0140] Therefore, for example, a plurality of circular islands 211a having a size allowing the IMU 201 to be mounted on the islands 211a and to be accommodated in the opening 211 may be formed in the rectangular opening 211, or islands 211a having other shapes may be formed.

[0141] However, when the connecting portions 211b connecting the corresponding island portions 211a to the edges of the opening portions 211 are arranged so that the physical distance between the connecting portions 211b is increased, the vibration propagating in the printed circuit board 210 therebetween is weakened and the interference is suppressed, so that the effect of reducing the beat noise caused by the interference can be enhanced, and therefore, it is preferred to arrange the connecting portions 211b at a larger distance.

[0142] <Modification Example 1>

[0143] Although an example of a configuration of the multi-IMU 200 including four IMUs 201 has been described above, the number of the IMUs 201 may be four or more, and for example, Fig.11 The two IMU arrangement units 200U in can be arranged side by side, such as Fig.12 As shown in FIG. 1 , a multi-IMU 200 consisting of 8 IMUs 201 is shown.

[0144] exist Fig.12 In FIG. 1 , the IMU arrangement units 200U-1 and 200U-2 are shown. Fig.12 , but needless to say, the IMU configuration units 200U-1 and 200U-2 may be arranged side by side in the horizontal direction, or two or more IMU configuration units 200U-1 and 200U-2 may be arranged side by side.

[0145] Even in such a configuration, similarly, it is possible to suppress interference of drive vibrations between the plurality of IMUs 201 and suppress generation of beat noise caused by the interference.

[0146] <Modification Example 2>

[0147] In addition, for example, Fig.13As shown, for a multi-IMU 200 with 16 IMUs 201 as a unit, for example, Fig.11 The two IMU arrangement units 200U can be arranged side by side in the horizontal direction and the vertical direction.

[0148] Fig.13 An example is shown in which two IMU arrangement units 200U are arranged side by side in the horizontal direction and the vertical direction of the figure as shown by the IMU arrangement units 200U-11 to 200U-14.

[0149] Even in such a configuration, similarly, it is possible to suppress interference of drive vibrations between the plurality of IMUs 201 and suppress generation of beat noise caused by the interference.

[0150] Furthermore, even in such a configuration in which a larger number of IMU configuration units 200U are arranged side by side in the horizontal direction and the vertical direction, the generation of beat noise can be similarly suppressed.

[0151] <Modification Example 3>

[0152] Although the above describes an example of a configuration in which the connecting portion 221b connects a portion of the portion to the right of the center position of each side (each edge) constituting the opening portion 211 when the approximately square opening portion 211 represented by the blank portion in the figure is observed from the periphery, the connecting portion 221b may also be provided at the corner of the opening portion 211.

[0153] Fig.14 An example of the configuration of the multi IMU 200 in which the connection portion 221 b is provided at each of the four corners of the opening portion 211 is shown.

[0154] exist Fig.14 The Multi-IMU 200 includes Fig.11 Configurations having the same functions as those of the multi-IMU 200 are denoted by the same reference numerals, and description will be appropriately omitted.

[0155] That is to say, Fig.14 Multi-IMU 200 and Fig.11 The difference between the multi-IMU 200 in FIG. 1 is that island-like structure portions 221 ′- 1 to 221 ′- 4 are provided instead of the island-like structure portions 221 - 1 to 221 - 4 .

[0156] Basically, similarly to the island-like structure portions 221 - 1 to 221 - 4 , the island-like structure portions 221 ′- 1 to 221 ′- 4 are provided with the IMUs 201 - 1 to 201 - 4 , and the basic functions are the same, but the structures thereof are different.

[0157] That is, the island-like structure portions 221 ′- 1 to 221 ′- 4 are configured of island portions 221 ′ a - 1 to 221 ′ a - 4 and connection portions 221 ′ b - 1 to 221 ′ b - 4 , respectively.

[0158] The connection portions 221 ′ b - 1 to 221 ′ b - 4 connect the printed circuit board 210 to the corners of the island portions 221 ′ a - 1 to 221 ′ a - 4 through the four corners of the opening portion 211 , respectively.

[0159] like Fig.14 As shown, since the island-like structure portion 221' to which the vibration propagated from the printed circuit board 210 is easily applied from the same direction has a structure in which the connecting portion 221'b is arranged at a separated position, the vibration is difficult to propagate in the same direction, and the interference of the vibration can be suppressed, and therefore, the generation of the beat noise caused by the interference can be suppressed.

[0160] More specifically, in Fig.14 In the structure shown, the island portions 221'a-1 and 221'a-4 in the island-like structure portions 221'-1 and 221'-4 among the island-like structure portions 221'-1 to 221'-4 are connected to the printed circuit board 210 via the connecting portions 221'b-1 and 221'b-4, respectively, and the vibration from the printed circuit board 210 is easily transmitted to the island portions 221'a-1 and 221'a-4 in the direction of the arrow D1 in the figure via the connecting portions 221'b-1 and 221'b-4.

[0161] For example, when both of the connection parts 221'b-1 and 221'b-4 are arranged close to each other, two vibrations are easily propagated, and as a result, interference between the IMU 201-1 and the IMU 201-4 is generated, and this causes beat noise caused by the interference.

[0162] On the other hand, in the multi-IMU 200 of the present disclosure, as Fig.14 As shown, as indicated by the dotted arrows, both the connection portions 221'b-1 and 221'b-4 are arranged on the diagonal line of the opening portion 211 and are arranged in the farthest position on the opening portion 211 in the printed circuit board 210 where vibrations propagate.

[0163] Therefore, adopting a structure in which vibration is difficult to propagate between the island-like structure portions 221 ′- 1 and 221 ′- 4 makes it possible to suppress interference due to vibration between the IMU 201 - 1 and the IMU 201 - 4 and suppress the generation of beat noise caused by the interference.

[0164] Similarly, in Fig.14In the structure shown, the island portions 221'a-2 and 221'a-3 in the island-like structure portions 221'-2 and 221'-3 in the island-like structure portions 221'-1 to 221'-4 are connected to the printed circuit board 210 via the connecting portions 221'b-2 and 221'b-3, respectively, and the vibration from the printed circuit board 210 is easily transmitted to the island portions 221'a-2 and 221'a-3 in the direction of arrow D2 in the figure via the connecting portions 221'b-2 and 221'b-3.

[0165] That is, similar to the connection parts 221'b-1 and 221'b-4, Fig.14 As shown by the dotted arrows in FIG. 2 , both the connection portions 221 ′ b - 2 and 221 ′ b - 3 are arranged on the diagonal line of the opening portion 211 and are arranged in the farthest position on the opening portion 211 in the printed circuit board 210 where vibration is transmitted.

[0166] Therefore, adopting a structure in which vibration is difficult to propagate between the island-like structure portions 221 ′- 2 and 221 ′- 3 makes it possible to suppress interference due to vibration between the IMU 201 - 2 and the IMU 201 - 3 and suppress the generation of beat noise caused by the interference.

[0167] Even if Fig.14 The IMU arrangement unit 200U shown is also as Fig.12 and Fig.13 The arrangement shown allows the same effect to be achieved using not only 4 IMUs 201 but also other numbers (e.g., 8 or 16) of IMUs.

[0168] <<3. Second Embodiment>>

[0169] <Part 1>

[0170] Although an example of the configuration of the multi-IMU 200 configured by four island-like structure portions 221 as a unit is described above, the multi-IMU 200 may be configured by another number as a unit, and for example, the multi-IMU 200 may be configured by two island-like structure portions 221 as a unit.

[0171] Fig.15 An example of the configuration of the multi IMU 200 in which two island-like structure portions 221 are configured as a unit is shown.

[0172] Fig.15The multi-IMU 200 in FIG. 1 is configured by island-shaped structural portions 221-11 and 221-12, the island portion 221a-11 and the island portion 221a-12 are adjacent to each other, and a connection portion 221b-11 and an island portion 221b-12 are provided in a portion of the opposite sides of the opening portion 211, with the island portion 221a-11 and the island portion 221a-12 interposed therebetween. Fig.15 In the multi-IMU 200, the opening 211 is configured to be a rectangular shape that is long in the horizontal direction of the figure.

[0173] Therefore, in Fig.15 In the structure of the multi-IMU 200, the connection parts 221b-11 and 221b-12 are arranged on the short sides of the opposite sides constituting the opening part 211, and are arranged at the farthest position in the opening part 211 of the printed circuit board 210 where the vibration is transmitted.

[0174] Therefore, adopting a structure in which vibration is difficult to propagate between the island-like structure portions 221-11 and 221-12 makes it possible to suppress interference due to vibration between the IMU 201-11 and the IMU 201-12 and suppress the generation of beat noise caused by the interference.

[0175] by Fig.15 The IMU arrangement unit 200UA in which the multi-IMU 200 is a unit can be arranged adjacent to each other in the horizontal direction and the vertical direction to constitute a multi-IMU 200 including two or more island-shaped structure parts 221.

[0176] <Part 2>

[0177] An example of a configuration has been described above: the configuration is made of two island-like structural portions 221 as a unit, the two island portions 221a are adjacent to each other in the horizontal direction, and the two connecting portions 221b are arranged in a portion on the short side of the opposite side serving as the opening portion 211, with the two island-like structural portions 221a interposed therebetween.

[0178] However, the two connection portions 221 b may be symmetrically disposed on the long sides opposite to the opening portion 211 with the center position as a reference point.

[0179] Fig.16 An example of a configuration of a multi-IMU 200 configured with two island-like structure portions 221 as a unit is shown, and is an example of a configuration in which two connection portions 221 b are arranged in a positional relationship on a long side opposite to the opening portion 211 symmetrically with respect to a center position as a reference point.

[0180] That is to say, Fig.16The multi-IMU 200 is configured by island-like structural portions 221-21 and 221-22, the island portion 221a-21 and the island portion 221a-22 are adjacent to each other, and the connecting portions 221b-21 and 221b-22 are arranged on the long side facing the opening portion 211 at point-symmetrical positions with respect to the center position.

[0181] Therefore, in Fig.16 In the multi-IMU 200, two connection portions 221b-21 and 221b-22 are arranged on opposite long sides of the opening portion 211 at point-symmetrical positions with respect to the center position, and are arranged at separated positions on the printed circuit board 210 that transmits vibrations.

[0182] Therefore, adopting a structure in which vibration is difficult to propagate between the island-like structure portions 221-21 and 221-22 makes it possible to suppress interference due to vibration between the IMU 201-21 and the IMU 201-22 and suppress the generation of beat noise caused by the interference.

[0183] In addition, Fig.16 The IMU arrangement unit 200UB in which the multi-IMU 200 is a unit can be arranged adjacent to each other in the horizontal direction and the vertical direction to constitute a multi-IMU 200 including two or more island-shaped structure parts 221.

[0184] <Part 3>

[0185] The example has been described above in which the multi IMU 200 is configured with two island-like structure portions 221 as a unit, and two connection portions 221 b are provided on the long side opposite to the rectangular opening portion 211 and in a point-symmetrical positional relationship with respect to the center position.

[0186] However, the two connection portions 221 b may be provided to have a positional relationship in which the connection portions 221 b are arranged on adjacent sides (edges) of the rectangular opening portion 211 .

[0187] Fig.17 An example of a configuration of a multi IMU 200 in which two island-like structure portions 221 are configured as a unit is shown, and is an example of a configuration in which two connection portions 221 b are provided to have a positional relationship in which the connection portions 221 b are arranged on adjacent sides (edges) of a rectangular opening portion 211 .

[0188] That is to say, Fig.17The multi-IMU 200 includes island structure portions 221-31 and 221-32, the island portion 221a-31 and the island portion 221a-32 are adjacent to each other, the connecting portion 221b-31 is arranged on the edge of the opening portion 211 in the horizontal direction, and the connecting portion 221b-32 is arranged on the edge of the opening portion 211 in the vertical direction.

[0189] Therefore, in Fig.17 In the multi-IMU 200, the connection parts 221b-31 and 221b-32 are arranged on the horizontal side and the vertical side of the opening part 211, respectively, and are arranged at separate positions on the printed circuit board 210 that transmits vibration.

[0190] Therefore, vibration is difficult to propagate between the island-like structure portions 221 - 31 and 221 - 32, thereby suppressing interference of vibration between the IMU 201 - 31 and the IMU 201 - 32 and suppressing generation of beat noise caused by vibration.

[0191] Although in Fig.17 The connection portion 221b-31 is shown in Fig.17 The center position on the upper horizontal side of the opening 211 is connected to a portion of the left portion and the connecting portion 221b-32 at Fig.17 In the example of connecting to a portion of the right side of the opening 211 in the vertical direction, the connecting portion 221b-32 can be from Fig.17 The center position of the upper horizontal side of the opening 211 in the embodiment is connected to a part of the right part, and the connecting part 221b-31 can be Fig.17 A portion connected to the left side of the opening 211 in the vertical direction.

[0192] In addition, Fig.17 The IMU arrangement unit 200UC in which the multi-IMU 200 is a unit can be arranged adjacent to each other in the horizontal direction and the vertical direction to constitute a multi-IMU 200 including two or more island-shaped structure parts 221.

[0193] <Part 4>

[0194] The example in which the two connection portions 221 b are in the positional relationship in which the two connection portions 221 b are arranged on adjacent sides of the rectangular opening portion 211 in units of two island-like structure portions 221 has been described above.

[0195] However, the two connection portions 221 b may be arranged at corners instead of the sides of the rectangular opening portion 211 .

[0196] Fig.18An example of the configuration of the multi IMU 200 in which two island-like structure portions 221 are configured as a unit is shown, and is an example of the configuration in which two connection portions 221 b are arranged in corner portions on a diagonal line of a rectangular opening portion 211 .

[0197] That is to say, Fig.18 The multi-IMU 200 in FIG. 2 is configured by island-like structure portions 221 - 41 and 221 - 42 , the island portion 221 a - 41 and the island portion 221 a - 42 are adjacent to each other, and the connection portions 221 ′ b - 41 and 221 ′ b - 42 are provided in the corner portions on the diagonal line of the opening portion 211 .

[0198] Therefore, in Fig.18 In the multi-IMU 200, the connection parts 221'b-41 and 221'b-42 are arranged at Fig.18 The printed circuit board 210 is located in a corner portion on a diagonal line including an upper left corner and a lower right corner of the rectangular opening 211 and is arranged in a farthest position on the opening 211 of the printed circuit board 210 where vibration is transmitted.

[0199] Therefore, the structure makes it difficult for vibration to propagate between the island-like structural portions 221 - 41 and 221 - 42, and accordingly, interference due to vibration between the IMU 201 - 41 and the IMU 201 - 42 is suppressed, making it possible to suppress the generation of beat noise caused by the interference.

[0200] Although in Fig.18 An example is shown in which both connection portions 221'b-41 and 221'b-42 are arranged in the corners on the diagonal line of the rectangular opening portion 211 including the upper left corner and the lower right corner, but the connection portions 221b-41 and 221b-42 can be arranged in the corners on the diagonal line of the rectangular opening portion 211 including the upper right corner and the lower left corner.

[0201] In addition, Fig.18 The IMU arrangement unit 200UD in which the multi-IMU 200 is a unit can be arranged adjacent to each other in the horizontal direction and the vertical direction to constitute a multi-IMU 200 including two or more island-shaped structure parts 221.

[0202] <<4. Third embodiment>>

[0203] <Part 1>

[0204] An example has been described in which an island-like structure portion 221 is formed in an opening portion 211 provided on a printed circuit board 210, and connection portions 221b are arranged to be spaced apart from each other, thereby suppressing the propagation of driving vibration of each island portion 221a, reducing interference due to vibration, and suppressing the generation of beat noise caused by vibration.

[0205] However, in addition to such a configuration, a heavy object with a sufficiently large weight (for example, about 10 g or more) relative to the IMU 201 may be arranged on the back side of the island 221a, so that the rigidity of the island 221a can be increased and vibrations can be difficult to propagate, thereby reducing interference caused by vibrations and suppressing the generation of beat noise caused by interference.

[0206] Fig.19 An example of the configuration of the rear surface of the multi-IMU 200 in which the rigidity of the island 221 a is increased by arranging a heater resistor as a weight on the rear side of the islands 221 a - 51 to 221 a - 54 is shown.

[0207] because Fig.19 The structure of the front surface of Fig.10 The multi-IMU 200 is the same as in the multi-IMU 200, so the description thereof will be omitted.

[0208] That is to say, Fig.19 The multi-IMU 200 in FIG. 2 includes island-shaped structural portions 221 - 51 to 221 - 54 , and heater resistors 251 - 1 and 251 - 2 are arranged as weights in the corresponding island portions 221 a .

[0209] More specifically, heater resistors 251-51-1 and 251-51-2 are arranged in the island portion 221a-51, heater resistors 251-52-1 and 251-52-2 are arranged in the island portion 221a-52, heater resistors 251-53-1 and 251-53-2 are arranged in the island portion 221a-53, and heater resistors 251-54-1 and 251-54-2 are arranged in the island portion 221a-54.

[0210] In the case of such a configuration, since the rigidity of the island-like structure portions 221-51 to 221-54 is improved, the propagation of operating vibrations from other IMUs 201 via the connection portions 221b-51 to 221b-54 and the printed circuit board 210 is suppressed, and the interference associated with the vibration is reduced, so that the generation of beat noise caused by the interference can be suppressed.

[0211] Can be referenced Figures 15 to 18 The heater resistor 251 is provided on the back surface side of the island portion 221 a in the multi IMU 200 including the two island-like structure portions 221 described above, and the same effect can be achieved by such a configuration.

[0212] <Part 2>

[0213] The above has described an example of arranging a weight on the back side of the island 221a to increase the rigidity of the island 221a, thereby making it difficult for vibrations to propagate and suppressing the generation of beats, but other weights may be used as long as the weight is heavy enough relative to the IMU 201, and thus, for example, a metal plate may be attached.

[0214] Fig. 20 An example of the configuration of the rear surface of the multi-IMU 200 in which the rigidity of the island 221 a is increased by adhering a metal plate as a weight to the rear side of the island 221 a is shown.

[0215] because Fig. 20 The structure of the front surface of Fig.10 The multi-IMU 200 is the same as in the multi-IMU 200, so the description thereof will be omitted.

[0216] That is to say, Fig. 20 The multi-IMU 200 in FIG. 2 includes island-like structural portions 221-61 to 221-64, and metal plates 261-61 to 261-64 are adhered to the corresponding island portions 221a-61 to 221a-64 as weights.

[0217] In the case of such a configuration, since the rigidity of the island-like structure portions 221-61 to 221-56 is improved, the propagation of operating vibrations from other IMUs 201 via the connection portions 221b-61 to 221b-64 and the printed circuit board 210 is suppressed, and the interference associated with the vibration is reduced, so that the generation of beat noise caused by the interference is suppressed.

[0218] Can be found by referring to Figures 15 to 18 The multi-IMU 200 including the two island-like structural portions 221 is described in which the metal plate 261 is arranged on the back surface side of the island portion 221 a , and the same effect can be achieved by such a configuration.

[0219] <<5. Fourth embodiment>>

[0220] The example has been described above in which a weight is arranged on the back side of the island portion 221a of the island structure portion 221 to improve rigidity so that propagation of operational vibration is suppressed and interference associated with vibration is reduced so that generation of beat noise caused by interference is suppressed.

[0221] However, the vibration generated in the island portion 221 a may be reduced by applying a substance such as grease having a viscosity higher than a predetermined viscosity on the island portion 221 a so that the IMU 201 is surrounded and buried in the individual island portion 221 a.

[0222] Fig.211 is a side view of the island portion 221 a coated with a substance having high viscosity such as grease so as to surround the IMU 201 .

[0223] exist Fig.21 In the island portion 221a, grease 271 as a substance having high viscosity is applied to the island portion 221a so as to surround the IMU 201-71.

[0224] That is, since the operation vibration of the IMU 201-71 is propagated through the island portion 221a, the grease 271 having a viscosity higher than a predetermined viscosity is applied so that the IMU 201-71 in the island portion 221a is surrounded and buried, so that the vibration of the island portion 221a is weakened, and thus, it is possible to suppress the propagation of the operation vibration of the IMU 201. For example, the viscosity of the grease 271 is preferably at least such a degree that the viscosity continues to be maintained in the coating portion within a normal temperature range and shock / acceleration.

[0225] In addition, for example, when Fig. 22 As shown in the IMU 201-81 and IMU 201-82, when the interval between two adjacent IMUs is small, grease 271' is applied across the two IMUs so that the operating vibration of the IMU 201-81 and IMU 201-82 is weakened by the vibration of the island portion 221a propagated together with the grease 271 applied to the surroundings, and thus, the propagation of the operating vibration of the IMU 201-81 and IMU 201-82 is suppressed.

[0226] Therefore, since the propagation of the operating vibration of the IMU 201 is suppressed in any case, the interference associated with the vibration is also suppressed, and thus the generation of beat noise caused by the interference can be suppressed.

[0227] <<6. Fifth embodiment>>

[0228] An example has been described above in which high-viscosity grease 271 is applied in the island portion 221a to surround the IMU 201, and the vibration of the island portion 221a to which the operating vibration of the IMU 201 is directly transmitted is weakened, and as a result, the operating vibration of the IMU 201 is suppressed and the generation of beat noise is reduced.

[0229] Incidentally, although the printed circuit board 210 is assumed to be a rigid circuit board, a flexible circuit board made of a flexible material such as polyimide is used instead of the printed circuit board 210 so that propagation of driving vibrations between the plurality of IMUs 201 is suppressed.

[0230] Fig.23An example of a configuration of the multi-IMU 200 in which a flexible printed circuit board 291 is used instead of the printed circuit board 210 and the IMUs 201 - 91 to 201 - 94 are provided on the flexible printed circuit board 291 is shown.

[0231] Fig.23 The left portion is an example of the configuration of the front surface of the multi-IMU 200, and Fig.23 The right portion is an example of the configuration of the rear surface of the multi-IMU 200.

[0232] That is, the IMU 201-91 to IMU 201-94 are formed on the front surface of the multi-IMU 200 and are disposed on the flexible printed circuit board 291, and the control IC 202 is also disposed. The flexible substrate 291 is soft, and when the IMU 201-91 to IMU 201-94 are normally installed as they are, the installation process is hindered. Therefore, the reinforcing plates 201P-91 to 201P-94 configured by, for example, an epoxy resin plate or a stainless steel plate are adhered to the back side of the installation surface of the IMU 201-91 to IMU 201-94. The occurrence of the obstruction of the installation process of the IMU 201-91 to IMU 201-94 on the flexible substrate 291 is suppressed by the reinforcing plates 201P-91 to 201P-94.

[0233] Fig.23 The IMU 201-91 to IMU 201-94 have the same Figure 1 The IMU 1 has a configuration in which a configuration corresponding to the vibrator 11 and the readout circuit 13 and a configuration corresponding to the base 12 are arranged in parallel.

[0234] Therefore, only the configuration corresponding to the base 12 among the IMUs 201-91 to 201-94 can be seen on the rear surface of the multi-IMU 200. In addition, a connector 203 is formed at an end of the flexible printed circuit board 291 on the rear surface of the multi-IMU 200.

[0235] In the case of this configuration, IMU 201-91 to IMU 201-94 are connected by a flexible printed circuit board made of a flexible material, so that the propagation of mutual operation vibrations of IMU 201-91 to IMU 201-94 is suppressed and the interference associated with the vibration is reduced, and this makes it possible to suppress the generation of beat noise caused by the interference.

[0236] <<7. Sixth Implementation>>

[0237] A description has been given of a case in which propagation of driving vibrations between the plurality of IMUs 201 is suppressed using a flexible printed circuit board configured of a flexible material such as polyimide instead of the printed circuit board 210 configured of a rigid circuit board.

[0238] However, one IMU is mounted on one circuit board, a connector that can electrically connect the front surface and the back surface of each circuit board is provided, the substrates are electrically connected by inserting the connector, and the substrates are physically connected for stacking, so that the propagation of operating vibrations between the IMUs of each substrate is suppressed due to friction between the connectors.

[0239] Fig.24 An example configuration of a multi-IMU 200 is shown in which a single IMU is mounted on a single substrate, connector brackets are provided that can be electrically connected on the front and back sides of each substrate, and the substrates are electrically and physically connected for stacking by connecting through plug-in connectors.

[0240] Fig.24 The left part is an exploded perspective view of the multi-IMU 200, and Fig.24 The right part is a perspective view at the bottom stage in a state where only the substrate 311 - 5 is separated.

[0241] Fig.24 The multi-IMU 201 includes substrates 311-1 to 311-5 and support columns 321-1 to 321-4.

[0242] The IMU 201 - 101 to the IMU 201 - 104 are provided on the boards 311 - 1 to 311 - 4 , respectively, and the control IC 202 is provided on the substrate 311 - 5 .

[0243] Substrates 311 - 2 to 311 - 5 having female connectors 313 - 1 to 313 - 4 are provided on the front surface side as the upper surface in the figure, and substrates 311 - 1 to 311 - 4 having male connectors 312 - 1 to 312 - 4 are provided on the back surface side in the figure.

[0244] The female connectors 313-1 to 313-4 are fitted in a state where the female connectors 313-1 to 313-4 face the male connectors 312-1 to 312-4 to be electrically and physically connected, and as a result, the substrates 311-1 to 311-5 are electrically and physically connected in a stacked state.

[0245] Among the stacked substrates 311-1 to 311-5, the substrates 311-1 and 311-5 are larger in size than the substrates 311-2 to 311-4. In addition, the substrate 311-5 stacked on the upper portion having the hole portions 311a-1 to 311a-4 is provided at the four corners.

[0246] The corresponding screws 322-1 to 322-4 are inserted into the holes 311a-1 to 311a-4 and fitted into the support pillars 321-1 to 321-4, so that the substrates 311-1 and 311-5 in the upper and lower ends of the stacked substrates 311-1 to 311-5 are joined and the substrates 311-2 to 311-4 are sandwiched therebetween, and thus, Fig.24 The multi-IMU 200 as a whole reaches a fixed state.

[0247] In the case of this configuration, since the female connectors 313-1 to 313-4 and the male connectors 312-1 to 312-4 are engaged and connected between the corresponding substrates 311-1 to 311-5, the propagation of vibration is attenuated by the friction associated with the engagement, resulting in a structure in which vibration is difficult to propagate between the substrates 311-1 to 311-5.

[0248] Therefore, mutual operation vibration between the IMU 201-101 to the IMU 201-104 arranged on the corresponding boards 311-1 to 311-4 is difficult to propagate, and interference associated with the vibration is reduced, thereby suppressing the generation of beat noise caused by the interference.

[0249] <<8. Seventh Implementation>>

[0250] The above describes a configuration in which a plurality of substrates are provided, each having an IMU mounted thereon, and connectors are provided that can be electrically connected to the front and back surfaces of the respective substrates, and the substrates are electrically connected by inserting the connectors and physically connected for stacking.

[0251] However, a plurality of connectors are provided on one substrate, and the IMU 201 is connected via the corresponding connectors, so that the propagation of vibration can be weakened due to the friction associated with the fitting between the connectors, however, when the operating vibration is still incompatible and beat noise is prone to occur, it can be replaced with a different IMU 201 that generates operating vibrations at different frequencies and the connection via the connector, so that the generation of beat noise can be suppressed as a whole.

[0252] Fig.25 An example of a configuration of a multi-IMU 200 in which a plurality of connectors are provided on one substrate and an IMU 201 is connected through each connector is shown.

[0253] Fig.25 The left picture is a top view of the multi-IMU 200, and Fig.25 The right picture is an exploded perspective view of the Multi-IMU 200.

[0254] That is to say, Fig.25The multi-IMU 200 in FIG. 2 includes connectors 351 - 101 to 351 - 104 , a control IC 202 that controls the overall operation of the multi-IMU 200 , and a connector 203 for connecting with an external device on a printed circuit board 210 .

[0255] In addition, the IMUs 201-111 to 201-114 are electrically and physically connected via the corresponding connectors 351-101 to 351-104. Although not shown in the figure, the IMUs 201-111 to 201-114 are provided with connectors corresponding to the connectors 351-101 to 351-104.

[0256] With this configuration, each connector (not shown) of the IMU 201-111 to IMU 201-114 and the corresponding connectors 351-101 to 351-104 are engaged and connected, and operational vibrations of the IMU 201-111 to IMU 201-114 are weakened and transmitted to the printed circuit board 210 due to friction associated with the engagement.

[0257] Therefore, the respective operational vibrations of the IMUs 201 - 111 to 201 - 114 are difficult to propagate to the printed circuit board 210 through the respective connectors 351 - 101 to 351 - 104 .

[0258] Therefore, since mutual operation vibration between the IMU 201-111 to the IMU 201-114 is difficult to propagate, interference associated with the vibration can be reduced and generation of beat noise caused by the interference can be suppressed.

[0259] Furthermore, in such a configuration, when a beat occurs, the generation of the beat noise can be suppressed by replacing the IMU 201 with another IMU 201 having a different operational vibration to create a combination that does not interfere with the operational vibration as a whole.

[0260] <<9. Eighth Implementation>>

[0261] The configuration is described above in which a plurality of connectors are provided on a printed circuit board, the IMU 201 is connected via the respective connectors, propagation of operational vibration from the IMU 201 to the printed circuit board is attenuated by friction associated with engagement between the connectors, and beat noise is suppressed.

[0262] However, the plurality of IMUs 201 are adhered to a base having a relatively large weight, making it difficult for operational vibrations between the IMUs 201 to propagate.

[0263] Fig.26is a side view of a multi-IMU 200 in which multiple IMUs 201 are bonded to a base having a relatively large weight.

[0264] exist Fig.26 In the multi-IMU 200, the IMU 201-121 and the IMU 201-122 are connected to a base 362 via double-sided tapes 361-111 and 361-112, and the base 362 has a weight sufficiently larger than the weight of the IMU 201, for example, a relatively large weight of about 10 grams or more.

[0265] With such a configuration, the IMU 201 - 121 and the IMU 201 - 122 are fixed to the base 362 having a large weight by the double-sided tapes 361 - 111 and 361 - 112 , respectively, thereby suppressing the propagation of the operational vibration.

[0266] Therefore, since the propagation of the operational vibration between the IMU 201-121 and the IMU 201-122 is suppressed, the interference related to the vibration can be suppressed and the beat noise caused by the interference can be reduced.

[0267] In this specification, a system refers to a collection of multiple components (e.g., devices, modules (components)), regardless of whether all the components are in the same housing. Therefore, multiple devices housed in separate housings and connected via a network and a device in which multiple modules are housed in one housing are both systems.

[0268] The embodiments of the present disclosure are not limited to the above-described embodiments, and various changes may be made without departing from the gist of the present disclosure.

[0269] The present disclosure may adopt the following configurations.

[0270] <1> An inertial measurement device, comprising:

[0271] a predetermined number of mounting portions configured to have an inertial measurement unit (IMU) mounted thereon; and

[0272] The predetermined number of connection portions are configured to connect one of the mounting portions to an edge of an opening portion provided on the substrate, wherein

[0273] The rigidity of the connection portion is lower than the rigidity of the substrate.

[0274] <2> according to <1> The inertial measurement device, wherein the rigidity of the connecting portion is lower than the rigidity of the mounting portion.

[0275] <3> according to <1> or <2> The inertial measurement device, wherein the opening is square, and

[0276] Each of the connecting portions connects each side of the square to the mounting portion.

[0277] <4> according to <3> The inertial measurement device, wherein:

[0278] The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into the predetermined number, and

[0279] Each of the connection portions connects a portion of each side of the square to the mounting portion.

[0280] <5> according to <4> The inertial measurement device, wherein:

[0281] The predetermined number is 4,

[0282] The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into four, and

[0283] Each of the connection portions connects a portion on the right side or the left side from the center position of each side of the square to the mounting portion.

[0284] <6> according to <4> The inertial measurement device, wherein:

[0285] The predetermined number is 4,

[0286] The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into four, and

[0287] Each of the connection portions connects each corner of the square to the mounting portion.

[0288] <7> according to <4> The inertial measurement device, wherein:

[0289] The predetermined number is 2,

[0290] The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into two, and

[0291] Each of the connection portions connects a portion of short sides serving as opposite sides of the square to the mounting portion.

[0292] <8> according to <4> The inertial measurement device, wherein:

[0293] The predetermined number is 2,

[0294] The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into two, and

[0295] Each of the connection portions connects a portion of a right portion or a left portion from a center of a long side serving as an opposite side of the square to the mounting portion.

[0296] <9> according to <4> The inertial measurement device, wherein:

[0297] The predetermined number is 2,

[0298] The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into two,

[0299] The first connection portion connects a portion of the right portion or the left portion from the center of the long side of the square to the mounting portion, and

[0300] The second connection portion connects a portion of the short side of the square to the mounting portion.

[0301] <10> according to <4> The inertial measurement device, wherein:

[0302] The predetermined number is 2,

[0303] The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into two, and

[0304] Each of the connection portions connects a corner portion on a diagonal line of the square to the mounting portion.

[0305] <11> according to <1> to <10> The inertial measurement device described in any one of claims 1 to 5, wherein a plurality of units having the predetermined number of mounting portions accommodated in the opening portion and the predetermined number of connecting portions as units are arranged side by side in at least one of a horizontal direction and a vertical direction.

[0306] <12> according to <1> to <11> The inertial measurement device described in any one of the preceding claims, wherein the mounting portion includes a weight having a weight sufficiently larger than that of the IMU, the weight being located on a back surface of a surface on which the IMU is mounted.

[0307] <13> according to <12> The inertial measurement device, wherein the weight includes a heater resistor and a metal plate.

[0308] <14> according to <1> to <13> The inertial measurement unit described in any one of the preceding claims, wherein a substance having a viscosity higher than a predetermined viscosity is applied to the mounting portion to surround and bury the IMU.

[0309] <15> according to <14> In the inertial measurement device, the substance having a viscosity higher than the predetermined viscosity is grease.

[0310] <16> according to <1> to <15> The inertial measurement device described in any one of the preceding claims, wherein the interval between the adjacent mounting portions is such that they do not come into physical contact even when the main body thermally expands.

[0311] <17> according to <1> to <16> The inertial measurement device described in any one of the preceding claims, wherein the distance between the mounting portion and the edge of the opening portion is such that they do not come into physical contact even when the main body thermally expands.

[0312] <18> according to <1> to <17> An inertial measurement device as described in any one of the preceding claims, comprising:

[0313] The combining unit is configured to combine and output detection results of multiple IMUs.

[0314] Reference numerals list

[0315] More than 200 IMUs (Inertial Measurement Units)

[0316] 201, 201-1 to 201-4, 201-11, 201-12, 201-21, 201-22, 201-31, 201-32, 201-41, 201-42, 201-81, 201-82, 201-91 to 201-94, 201-101 to 201-104, 201-111 to 201-114, 201-121, 201-122IMU

[0317] 210 printed circuit board

[0318] 211 opening

[0319] 221-1 to 221-4, 221-11, 221-12, 221-21, 221-22, 221-31, 221-32, 221-41, 221-42, 221-51 to 221-54, 221-61 to 221-64, 221'-1 to 221'-4 island structure 221a, 221a-1 to 221a-4, 221a-11, 221a-12, 221a-21, 221a-22, 221a-31, 221a-32, 221a-41, 221a-42, 221a-51 to 221a-54, 221a-61 to 221a-64, 221'a, 221'a-1 to 221'a-4 island

[0320] 221b, 221b-1 to 221b-4, 221b-11, 221b-12, 221b-11, 221b-12, 221b-21, 221b-22, 221b-31, 221b-32, 221b-41, 221b-42, 221b-51 to 221b-54, 221b-61 to 221b-64, 221'b, 221'b-1 to 221'b-4 connection part

[0321] 251, 251-51-1, 251-51-2, 251-52-1, 251-52-2, 251-53-1, 251-53-2, 251-54-1, 251-54-2 Heater resistor

[0322] 261-61 to 261-64 Metal Plate

[0323] 271, 271' Grease

[0324] 291 Flexible board

[0325] 311-1 to 311-5 printed circuit boards

[0326] 312-1 to 312-4 male connector

[0327] 313, 313-1 to 313-4 female connector

[0328] 351, 351-1 to 351-4 connectors

[0329] 361-111, 361-112 double-sided tape

[0330] 362 base

Claims

1. An inertial measurement device, comprising: a predetermined number of mounting portions configured to have an IMU (Inertial Measurement Unit) mounted thereon; as well as The predetermined number of connection portions are configured to connect one of the mounting portions to an edge of an opening portion provided on the substrate, wherein The rigidity of the connection portion is lower than the rigidity of the substrate.

2. The inertial measurement device according to claim 1, wherein: The rigidity of the connecting portion is lower than the rigidity of the mounting portion.

3. The inertial measurement device according to claim 1, wherein: The opening is square, and Each of the connecting portions connects each side of the square to the mounting portion.

4. The inertial measurement device according to claim 3, wherein: The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into the predetermined number, and Each of the connection portions connects a portion of each side of the square to the mounting portion.

5. The inertial measurement device according to claim 4, wherein: The predetermined number is 4, The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into four, and Each of the connection portions connects a portion on the right side or the left side from the center position of each side of the square to the mounting portion.

6. The inertial measurement device according to claim 4, wherein: The predetermined number is 4, The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into four, and Each of the connection portions connects each corner of the square to the mounting portion.

7. The inertial measurement device according to claim 4, wherein: The predetermined number is 2, The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into two, and Each of the connection portions connects a portion of short sides serving as opposite sides of the square to the mounting portion.

8. The inertial measurement device according to claim 4, wherein: The predetermined number is 2, The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into two, and Each of the connection portions connects a portion of a right portion or a left portion from a center of a long side serving as an opposite side of the square to the mounting portion.

9. The inertial measurement device according to claim 4, wherein: The predetermined number is 2, The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into two, The first connection portion connects a portion of the right portion or the left portion from the center of the long side of the square to the mounting portion, and The second connection portion connects a portion of the short side of the square to the mounting portion.

10. The inertial measurement device according to claim 4, wherein: The predetermined number is 2, The mounting portion has a shape in which a range serving as the opening portion is substantially equally divided into two, and Each of the connection portions connects a corner portion on a diagonal line of the square to the mounting portion.

11. The inertial measurement device according to claim 1, wherein: A plurality of units having the predetermined number of mounting portions accommodated in the opening portion and the predetermined number of connecting portions as units are arranged side by side in at least one of a horizontal direction and a vertical direction.

12. The inertial measurement device according to claim 1, wherein: The mounting portion includes a weight having a weight sufficiently larger than that of the IMU, the weight being located on a back surface of a surface on which the IMU is mounted.

13. The inertial measurement device according to claim 12, wherein: The weight includes a heater resistor and a metal plate.

14. The inertial measurement device according to claim 1, wherein: In the mounting portion, a substance having a viscosity higher than a predetermined viscosity is applied to surround and bury the IMU.

15. The inertial measurement device according to claim 14, wherein: The substance having a viscosity higher than the predetermined viscosity is grease.

16. The inertial measurement device of claim 1, wherein: The interval between the adjacent mounting portions is such that they do not come into physical contact even when the body is thermally expanded.

17. The inertial measurement device of claim 1, wherein: The interval between the mounting portion and the edge of the opening portion is an interval that does not make physical contact even when the main body is thermally expanded.

18. The inertial measurement device of claim 1, comprising: The combining unit is configured to combine and output detection results of multiple IMUs.

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