A nano-crack-based underwater acoustic sensor and a preparation method thereof

A highly sensitive underwater acoustic sensor was fabricated by depositing a metal thin film on the surface of a flexible polymer and forming nanocracks. This solved the problem that existing underwater acoustic sensors are unable to detect low-frequency signals, and enabled simple and efficient low-frequency underwater acoustic detection, thereby improving ocean detection capabilities.

CN119177418BActive Publication Date: 2026-05-15DALIAN UNIV OF TECH
2 Cites 0 Cited by

Patent Information

Application Number
CN202411302773.5
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-09-19
Publication Date
2026-05-15
Estimated Expiration
2044-09-19

AI Technical Summary

Technical Problem

Existing underwater acoustic sensors are mostly fabricated on rigid substrates, have low sensitivity and complex structures, making it difficult to effectively detect low-frequency underwater acoustic signals, and there are no applications of nanocrack underwater acoustic sensors based on flexible substrates.

Method used

A nanocrack-based underwater acoustic sensor was fabricated by depositing a metal thin film on a flexible polymer surface, forming nanocracks through photoresist patterning and bending, and then encapsulating it with a polymethyl methacrylate substrate and a glass sheet.

Benefits of technology

It improves the detection sensitivity and resolution of low-frequency underwater acoustic signals, simplifies the manufacturing process, fills the gap in flexible substrate underwater acoustic sensors, and promotes the improvement of marine safety detection capabilities.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

The application provides a kind of nanometer crack-based underwater acoustic sensor and its preparation method, belongs to hydrophone technical field.The method first, in the flexible polymer surface deposition a layer of metal film, spin coating a layer of photoresist on the metal film surface of flexible polymer, photoresist and metal film patterning;Second, the photoresist on the metal film is again patterned;Third, the flexible polymer and metal film are bent to produce nanometer crack on the metal film;Finally, the flexible polymer, polymethyl methacrylate, glass sheet are bonded, and after injecting pure water in the cavity, it is sealed to obtain underwater acoustic sensor.The nanometer crack-based underwater acoustic sensor manufactured by the application has ultra-high sensitivity, by bonding the nanometer crack sensing unit with ultra-high sensitivity and flexibility on the substrate with cavity, the ultra-sensitive detection of low-frequency underwater acoustic can be realized, and the detection range of the underwater acoustic sensor is improved.
Need to check novelty before this filing date? Find Prior Art