Upper furnace barrel rotating device of single crystal furnace

Abstract

The invention provides an upper furnace barrel rotating device of a single crystal furnace, which is arranged on one side of the single crystal furnace and connected with an upper furnace barrel, and belongs to the technical field of single crystal furnaces. Comprising a supporting rod, a rotating middle shaft, a chain, a power gear, a motor, a first connecting piece and a second connecting piece. The rotating middle shaft is fixedly connected with the upper furnace barrel through the first connecting piece and fixedly connected with the supporting rod through the second connecting piece, the rotating middle shaft is sleeved with the power gear, the outer surface of the power gear is sleeved with the chain, and the motor is arranged at one end of the rotating middle shaft and connected with the chain. The motor drives the chain to rotate, the chain drives the power gear to rotate, the power gear drives the rotating middle shaft to rotate, and therefore the upper furnace barrel is driven to rotate, rotation of the upper furnace barrel is automatically controlled, operation is easy, crystal bars and a feeder can be prevented from shaking and falling off, and the overall stability and durability of the upper furnace barrel during rotation are improved.

Description

Technical Field

[0001] The invention relates to the technical field of single crystal furnaces, and in particular to a furnace drum rotating device on a single crystal furnace. Background Art

[0002] The vertical pull type single crystal silicon growth furnace is a kind of equipment for preparing silicon single crystal silicon with high efficiency. At present, in line with the development trend of large-size, large-size single crystal furnaces have become the mainstream. The difficulty and risk factor of taking out the rod and adding materials are also increasing. In the process of taking out the crystal rod and adding materials, the traditional single crystal silicon growth furnace, after the upper furnace drum rises to a certain height, rotates the upper furnace drum horizontally to the other side of the main furnace chamber by manual rotation, and starts to take out the rod or add materials. However, manual rotation is difficult for personnel to operate, has large vibrations, poor stability, and there is a risk of the crystal rod falling when taking out the rod, which poses a great safety hazard.

[0003] In the prior art, for example, the Chinese utility model application number 201020163749.5 specifically discloses an electric rotating mechanism for a single crystal furnace body, and specifically discloses that by starting the reduction motor, the small gear at the output end of the reduction motor drives the large gear to rotate, the large gear drives the rotating shaft to rotate, and the rotating shaft drives the fixed block, the lifting frame and the connecting plate to rotate together, thereby driving the upper furnace body to rotate, so as to solve the problem that the crystal rod is easy to fall off caused by the original manual operation. However, the patent adopts the gear transmission method to realize the rotation of the furnace body, and there will be a certain gap between the gears, so that the gears are not in place, thereby increasing the vibration and impact generated when the gears are engaged, affecting the stability of the rotation of the upper furnace body. Summary of the invention

[0004] In view of this, the present invention provides a single crystal furnace upper furnace drum rotating device to solve the technical problem of poor stability when the existing single crystal furnace body rotating mechanism controls the rotation of the upper furnace drum.

[0005] The technical solution adopted by the present invention to solve its technical problem is: A furnace drum rotating device on a single crystal furnace is arranged on one side of the single crystal furnace and connected to the upper furnace drum, and is characterized in that it includes a support rod, a rotating central axis, a chain, a power gear, a motor, a first connecting piece and a second connecting piece; the rotating central axis is fixedly connected to the upper furnace drum through the first connecting piece, and is fixedly connected to the support rod through the second connecting piece, the rotating central axis is sleeved with the power gear, the outer surface of the power gear is sleeved with the chain, and the motor is arranged at one end of the rotating central axis and connected to the chain.

[0006] Preferably, it further comprises a clamping device, which is fixedly connected to the rotating central axis, and the installation height of the clamping device is adapted to the height of the auxiliary chamber.

[0007] Preferably, the clamping device includes a first gripping clamp, a second gripping clamp, a clamping rail and a fixing rod; one end of the fixing rod is fixedly connected to the rotating central axis, and the other end of the fixing rod is provided with the clamping rail, and the first gripping clamp and the second gripping clamp are slidably installed on the clamping rail through a sliding assembly.

[0008] Preferably, the first gripping clamp comprises a first clamping portion and a second clamping portion, and a certain angle is formed between the first clamping portion and the second clamping portion; the second gripping clamp comprises a third clamping portion and a fourth clamping portion, and a certain angle is formed between the third clamping portion and the fourth clamping portion.

[0009] Preferably, the first clamping portion is hingedly connected to the second clamping portion, and the third clamping portion is hingedly connected to the fourth clamping portion.

[0010] Preferably, the clamping device further comprises a sliding motor, and the sliding motor is arranged on one side of the clamping track to control the sliding of the first gripping clamp and the second gripping clamp.

[0011] Preferably, the first gripping clamp and the second gripping clamp are both provided with anti-slip pads.

[0012] Compared with the prior art, the present invention has the following beneficial effects: The present invention drives the chain to rotate by a motor, the chain drives the power gear to rotate, the power gear drives the rotating center shaft to rotate, thereby driving the upper furnace drum to rotate, and realizing automatic control of the upper furnace drum rotation. On the one hand, the operation is simple, which can reduce manual operation, avoid the crystal rod and the feeder from shaking and falling, and avoid risks; on the other hand, the chain transmission method is used instead of the gear transmission method, which can avoid the unstable rotation of the upper furnace drum caused by the gear meshing not being in place. At the same time, the chain transmission adopts a multi-tooth bearing method, and its bearing capacity is strong. For heavy equipment such as the upper furnace drum, it can improve its overall stability and durability during rotation. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the main structure of the furnace drum rotating device on the single crystal furnace of the present invention.

[0014] Figure 2 It is a schematic diagram of the top view of the structure of the furnace drum rotating device on the single crystal furnace of the present invention.

[0015] Figure 3 This is another schematic diagram of the main structure of the furnace drum rotating device on the single crystal furnace of the present invention.

[0016] Figure 4 It is a schematic diagram of the top structure of the clamping device of the present invention.

[0017] Figure 5Another schematic top view of the structure of the clamping device of the present invention.

[0018] In the figure: single crystal furnace 10, auxiliary chamber 110, upper furnace drum 120, crystal lifting mechanism 130, rotating central axis 210, chain 220, power gear 230, motor 240, first connecting member 250, second connecting member 260, support rod 310, clamping device 400, first gripping clamp 410, first clamping part 411, second clamping part 412, second gripping clamp 420, third clamping part 421, fourth clamping part 422, clamping rail 430, fixed rod 440, telescopic rod 450, sliding motor 460, anti-slip pad 470. DETAILED DESCRIPTION

[0019] The technical solutions and technical effects of the embodiments of the present invention are further described in detail below in conjunction with the accompanying drawings of the present invention.

[0020] Please also see Figure 1 and Figure 2 A furnace drum rotating device for a single crystal furnace is arranged on one side of the single crystal furnace 10 and connected to the upper furnace drum 120, including a support rod 310, a rotating central axis 210, a chain 220, a power gear 230, a motor 240, a first connecting member 250 and a second connecting member 260; the rotating central axis 210 is fixedly connected to the upper furnace drum 120 through the first connecting member 250, and is fixedly connected to the support rod 310 through the second connecting member 260, the rotating central axis 210 is sleeved with the power gear 230, and the outer surface of the power gear 230 is sleeved with the chain 220, and the motor 250 is arranged at one end of the rotating central axis 210 and connected to the chain 220.

[0021] During the process of taking out the crystal rod or adding materials, after the upper furnace drum rises to a certain height, it is necessary to rotate the upper furnace drum horizontally to the other side of the main furnace chamber, and the motor 250 starts to work, driving the chain 220 to rotate, the chain 220 drives the power gear 230 to rotate, and the power gear 230 drives the rotating center axis to rotate, thereby driving the upper furnace drum to rotate to the other side of the main furnace chamber to start taking out the rod or adding materials. When the crystal rod is taken out or the materials are added, the upper furnace drum needs to be closed. At this time, the motor 250 drives the chain to rotate in the opposite direction to the front, the chain 220 drives the power gear to rotate, and the power gear 230 drives the rotating center axis to rotate, thereby driving the upper furnace drum to rotate back to the top of the main furnace chamber, and the upper furnace drum descends. The present invention drives the upper furnace drum to rotate through the cooperation of chains and gears. On the one hand, the operation is simple, which can reduce manual operation, avoid the crystal rods and feeders from shaking and falling, and avoid risks. On the other hand, the chain transmission method is used instead of the gear transmission method, which can avoid the unstable rotation of the upper furnace drum caused by the gears not being in place. At the same time, the chain transmission adopts a multi-tooth load-bearing method, and its load-bearing capacity is strong. For heavier equipment such as the upper furnace drum, its overall stability and durability during rotation can be improved.

[0022] In some embodiments, Figure 1 As shown, there are multiple second connecting members, which are evenly distributed on the rotating central axis. On the one hand, the rotating central axis and the support rod are fixedly connected together, and on the other hand, the force applied by the rotating central axis to the support rod can be evenly dispersed throughout the support rod, thereby improving the stability of the rotating central axis during rotation, thereby ensuring the stability of the upper furnace drum during rotation.

[0023] For further information, see Figure 3 The furnace drum rotating device on the single crystal furnace also includes a clamping device 400, which is fixedly connected to the rotating central axis 210, and the installation height of the clamping device 400 is adapted to the height of the auxiliary chamber 110. In actual use, the rotation speed of the motor is not well controlled, which may cause the upper furnace drum to not rotate at a uniform speed during rotation, thereby causing the upper furnace drum to shake during rotation. The present invention adds a clamping device, and the height of the clamping device 400 is adapted to the height of the auxiliary chamber 110, so as to clamp the auxiliary chamber during the rotation of the upper furnace drum and improve the stability of the upper furnace drum during rotation. In addition, the first connecting member and the clamping device are arranged at the relative position of the rotating central axis to achieve two-point support, which effectively reduces the force on the first connecting member, so that the force on the rotating central axis is balanced, and the first connecting member and the rotating central axis are not easily deformed, thereby improving the safety and accuracy of the upper furnace drum during rotation and reducing the degree of damage to the equipment.

[0024] For further information, see Figure 4 The clamping device 400 includes a first gripper 410, a second gripper 420, a clamping track 430 and a fixing rod 440; one end of the fixing rod 440 is fixedly connected to the rotating central axis 210, and the other end of the fixing rod 440 is provided with a clamping track 430, and the first gripper 410 and the second gripper 420 are slidably mounted on the clamping track 430 through a sliding assembly. When the upper furnace drum needs to be rotated, the first gripper 410 and the second gripper 420 slide relatively along the clamping track to clamp the secondary chamber; when the upper furnace drum rotates, the first gripper 410 and the second gripper 420 slide along the clamping track to the two ends of the clamping track to release the secondary chamber. In some embodiments, the first gripper 410 and the second gripper 420 can be manually controlled, that is, the staff manually pushes the first gripper 410 and the second gripper 420 to slide along the clamping track to achieve the clamping or release of the clamping device. In addition, the first gripper 410 and the second gripper 420 can also be automatically controlled. The specific method is not limited here.

[0025] For further information, see Figure 5The first gripper 410 includes a first clamping portion 411 and a second clamping portion 412, and a certain angle is formed between the first clamping portion 411 and the second clamping portion 412; the second gripper 420 includes a third clamping portion 421 and a fourth clamping portion 422, and a certain angle is formed between the third clamping portion 421 and the fourth clamping portion 422. The clamping device is used to clamp the auxiliary chamber, so the size and angle between the first clamping portion 411 and the second clamping portion 412, and the size and angle between the third clamping portion 421 and the fourth clamping portion 422 are designed according to the size of the auxiliary chamber. Among them, the first clamping portion and the third clamping portion are in contact with the plane of the auxiliary chamber, and the second clamping portion and the fourth clamping portion are in contact with the curved surface of the auxiliary chamber, thereby increasing the contact area between the clamping device and the auxiliary chamber, being able to wrap the auxiliary chamber and firmly clamp the auxiliary chamber, thereby ensuring the stability of the upper furnace drum when rotating.

[0026] Furthermore, the first clamping part 411 is hingedly connected to the second clamping part 412, and the third clamping part 421 is hingedly connected to the fourth clamping part 422. In the specific implementation process, the first clamping part is hingedly connected to the second clamping part, and the third clamping part is hingedly connected to the fourth clamping part, so that the angle between the first clamping part and the second clamping part and the angle between the third clamping part and the fourth clamping part can be adjusted, so that the clamping device can adapt to the sub-chambers of single crystal furnaces of different sizes. Among them, the angle between the first clamping part and the second clamping part and the angle between the third clamping part and the fourth clamping part can be adjusted manually, that is, the staff manually adjusts the angle according to the size of the sub-chamber; it can also be adjusted automatically, for example, a motor can be used to control the adjustment angle, and the specific adjustment method is not limited here.

[0027] For further information, see Figure 5 The clamping device 400 further includes a sliding motor 460, which is disposed on one side of the clamping track 430 to control the sliding of the first gripper 410 and the second gripper 420. In the specific implementation process, when the upper furnace drum needs to be rotated, the sliding motor 460 drives the first gripper and the second gripper to slide relative to each other, and the distance between the first gripper and the second gripper is gradually shortened, thereby clamping the secondary chamber; when the upper furnace drum rotates back to the top of the main furnace chamber and stops rotating, the sliding motor drives the first gripper and the second gripper to slide toward the two ends of the clamping track, and the distance between the first gripper and the second gripper is gradually increased, thereby releasing the secondary chamber, and then realizing automatic control of the clamping device through the sliding motor.

[0028] For further information, see Figure 5The first gripper 410 and the second gripper 420 are both provided with anti-skid pads 470. Specifically, the anti-skid pads are provided on the surfaces of the first gripper and the second gripper in contact with the auxiliary chamber, which increases the friction between the first gripper and the second gripper and the auxiliary chamber, and has an anti-skid effect, so as to prevent the first gripper and the second gripper from loosening when the first gripper and the second gripper clamp the auxiliary chamber, causing the auxiliary chamber to shake and affecting the stability of the upper furnace drum when rotating.

[0029] In some embodiments, see Figure 5 The clamping device 400 further includes a telescopic rod 450, which is disposed between the fixed rod 440 and the clamping track 430. When the upper furnace drum does not need to rotate, the telescopic rod contracts toward the direction close to the central axis of rotation, and the first and second gripping clamps are retracted; when the upper furnace drum needs to rotate, the telescopic rod extends toward the direction close to the upper furnace drum, and the first and second gripping clamps are extended to approach and clamp the auxiliary chamber.

[0030] In some embodiments, a dust cover is further provided on the outside of the chain, and the chain and the power gear are covered by the dust cover, which protects the chain and the power gear on the one hand, and prevents dust from entering the chain and the power gear on the other hand, thereby increasing the service life of the chain and the power gear. The dust cover can be made of a transparent material, so that the staff can check whether the chain and the power gear are operating normally at any time.

[0031] What is disclosed above is only a preferred embodiment of the present invention, which certainly cannot be used to limit the scope of rights of the present invention. A person skilled in the art can understand that all or part of the processes of the above embodiments and equivalent changes made according to the claims of the present invention still fall within the scope of the invention.

Claims

1. A single crystal furnace upper drum rotating device, arranged on one side of the single crystal furnace and connected to the upper drum, characterized in that: It includes a support rod, a rotating central axis, a chain, a power gear, a motor, a first connecting piece and a second connecting piece; the rotating central axis is fixedly connected to the upper furnace drum through the first connecting piece, and is fixedly connected to the support rod through the second connecting piece, the rotating central axis is sleeved with the power gear, the outer surface of the power gear is sleeved with the chain, and the motor is arranged at one end of the rotating central axis and connected to the chain.

2. The furnace drum rotating device for a single crystal furnace according to claim 1, characterized in that: It also includes a clamping device, which is fixedly connected to the rotating central axis, and the installation height of the clamping device is adapted to the height of the auxiliary chamber.

3. The furnace drum rotating device for a single crystal furnace according to claim 2, characterized in that: The clamping device includes a first gripping clamp, a second gripping clamp, a clamping track and a fixing rod; one end of the fixing rod is fixedly connected to the rotating central axis, and the other end of the fixing rod is provided with the clamping track, and the first gripping clamp and the second gripping clamp are slidably installed on the clamping track through a sliding assembly.

4. The furnace drum rotating device for a single crystal furnace according to claim 3, characterized in that: The first gripping clamp includes a first clamping portion and a second clamping portion, and a certain angle is formed between the first clamping portion and the second clamping portion; the second gripping clamp includes a third clamping portion and a fourth clamping portion, and a certain angle is formed between the third clamping portion and the fourth clamping portion.

5. The furnace drum rotating device for a single crystal furnace according to claim 4, characterized in that: The first clamping portion is hingedly connected to the second clamping portion, and the third clamping portion is hingedly connected to the fourth clamping portion.

6. The furnace drum rotating device for a single crystal furnace according to claim 2, characterized in that: The clamping device further comprises a sliding motor, and the sliding motor is arranged on one side of the clamping track to control the sliding of the first gripping clamp and the second gripping clamp.

7. The furnace drum rotating device for a single crystal furnace according to claim 2, characterized in that: The first gripping clamp and the second gripping clamp are both provided with anti-slip pads.

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